JP6337634B2 - 半導体集積回路装置 - Google Patents
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- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0921—Means for preventing a bipolar, e.g. thyristor, action between the different transistor regions, e.g. Latchup prevention
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823892—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
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- Computer Hardware Design (AREA)
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- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
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Description
実施の形態1にかかる半導体集積回路装置の構造について、自己分離型の高耐圧集積回路装置(HVIC)を例に図1,2,7〜9を参照しながら説明する。図1は、実施の形態1にかかる高耐圧集積回路装置の断面構造を示す断面図である。図2は、図1の高耐圧集積回路装置の平面構造を示す平面図である。実施の形態1にかかるHVIC80は、図7に示す電力変換装置を構成するHVICに対応する駆動素子であり、ハーフブリッジ回路のIGBT114,115のオン・オフを制御する機能を有する。
次に、実施の形態2にかかる半導体集積回路装置(HVIC)の構造について説明する。図4は、実施の形態2にかかる高耐圧集積回路装置の要部の構造を示す断面図である。実施の形態2にかかるHVIC84が実施の形態1にかかるHVICと異なる点は、p型ウエル領域5に、GNDの電位よりも高電位に接続されたn+型コンタクト領域44を、n-型ウエル領域4から外側(p型ウエル領域5側)へ向かう方向に並列に複数配置した点である。すなわち、p型ウエル領域5には矩形環状の平面形状を有する2つ以上のn+型コンタクト領域44が設けられ、n-型ウエル領域4(HVJT83)の周囲を2重以上に囲んでいる。図4には、例えばn+型コンタクト領域44を3つ配置した場合を示す。
次に、実施の形態3にかかる半導体集積回路装置(HVIC)の構造について説明する。図5は、実施の形態3にかかる高耐圧集積回路装置の要部の構造を示す断面図である。実施の形態3にかかるHVIC85が実施の形態1にかかるHVICと異なる点は、GNDの電位よりも高電位に接続されたn+型コンタクト領域44の下側(基板裏面側)を覆うように、p型ウエル領域5よりも拡散深さが浅いn型バッファ領域47が設けられている点である。具体的には、p型ウエル領域5の基板裏面側の表面層にn型バッファ領域47が選択的に設けられ、n型バッファ領域47の内部にn+型コンタクト領域44が選択的に設けられている。
次に、実施の形態4にかかる半導体集積回路装置(HVIC)の構造について説明する。図6は、実施の形態4にかかる高耐圧集積回路装置の要部の構造を示す断面図である。実施の形態4にかかるHVIC86が実施の形態1にかかるHVICと異なる点は、ハイサイド制御回路部82、ローサイド制御回路部81およびHVJT83を構成するn型領域(図1のn-型ウエル領域2,4およびn型ウエル領域3)に代えて、n型エピタキシャル成長層12を設けている点である。すなわち、p型半導体基板(p型支持基板)1のおもて面にn型エピタキシャル成長層12を積層してなるエピタキシャル基板(半導体チップ)を用いてHVIC86が作製されている。
2,4 n-型ウエル領域
3 n型ウエル領域
5 p型ウエル領域
12 n型エピタキシャル成長層
21,31 p型オフセット領域
22,32,41,44 n+型コンタクト領域
23,33 p+型ソース領域
24,34 p+型ドレイン領域
25,29,35,39 ゲート電極
26,36 n+型ドレイン領域
27,37 n+型ソース領域
28,38,43 p+型コンタクト領域
42 第1ピックアップ電極
45 第2ピックアップ電極
46 第3ピックアップ電極
47 n型バッファ領域
51,52 寄生pnダイオード
53 ピンチ抵抗
71,73,75,77 ソース電極
72,74,76,78 ドレイン電極
80,84〜86 高耐圧集積回路装置(HVIC)
81 ローサイド制御回路部
82 ハイサイド制御回路部
83 高耐圧接合終端領域(HVJT)
110 異常信号
111 Vs端子
112,113 低電圧電源
114,115 IGBT(ハーフブリッジ回路)
116,117 還流ダイオード(FWD)
118 L負荷
119 コンデンサ
120a 第1pチャネルMOSFET
120b 第1nチャネルMOSFET
130a 第2pチャネルMOSFET
130b 第2nチャネルMOSFET
210 レベルアップ回路
211 レベルアップ回路を構成するnチャネルMOSFET
212,222 レベルシフト抵抗
213,223 ダイオード
214,224 ボディーダイオード
215,225 出力部
216,227 ローサイド回路部
217,226 ハイサイド回路部
220 レベルダウン回路
221 レベルダウン回路を構成するpチャネルMOSFET
Claims (4)
- 第1導電型の半導体基板の一方の主面側に設けられた第1の第2導電型ウエル領域と、
前記半導体基板の一方の主面側に、前記第1の第2導電型ウエル領域と離して設けられた第2の第2導電型ウエル領域と、
前記第1の第2導電型ウエル領域に設けられ、第1電位を基準とする第1低電圧電源から前記第1電位よりも高い第2電位が供給される第1回路部と、
前記第2の第2導電型ウエル領域に設けられ、第3電位を基準とする第2低電圧電源から前記第3電位よりも高い第4電位が供給される第2回路部と、
前記第1の第2導電型ウエル領域と接して設けられ、前記第1の第2導電型ウエル領域の周囲を囲み、前記半導体基板に接する第1導電型ウエル領域と、
前記第1導電型ウエル領域の内部に選択的に設けられた第1導電型半導体領域と、
前記第1導電型半導体領域に接する、前記第1電位が供給される第1電極と、
前記第1導電型ウエル領域の、前記第1導電型半導体領域よりも前記第2の第2導電型ウエル領域側に、前記第1導電型半導体領域と離して選択的に設けられた第2導電型半導体領域と、
前記第2導電型半導体領域と接する、前記第2電位が供給される第2電極と、
を備えることを特徴とする半導体集積回路装置。 - 前記第2の第2導電型ウエル領域の周囲を囲み、前記第1導電型ウエル領域と前記第2の第2導電型ウエル領域との間に該両者に接して設けられ、前記第2の第2導電型ウエル領域よりも不純物濃度の低い第3の第2導電型領域を備えることを特徴とする請求項1に記載の半導体集積回路装置。
- 前記第3の第2導電型領域と前記第1導電型半導体領域との間には、前記第2電極が配置されていることを特徴とする請求項2に記載の半導体集積回路装置。
- 前記第1導電型ウエル領域の不純物濃度、または、前記第1導電型ウェル領域と前記第3の第2導電型領域とのpn接合と前記第2導電型半導体領域との間の距離、もしくはその両方は、前記pn接合から広がる空乏層が前記第2導電型半導体領域に到達しないように設定されていることを特徴とする請求項2または3に記載の半導体集積回路装置。
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JP2014123865A JP6337634B2 (ja) | 2014-06-16 | 2014-06-16 | 半導体集積回路装置 |
CN201510185305.9A CN105321944B (zh) | 2014-06-16 | 2015-04-20 | 半导体集成电路装置 |
US14/692,171 US9478543B2 (en) | 2014-06-16 | 2015-04-21 | Semiconductor integrated circuit |
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JP6337634B2 true JP6337634B2 (ja) | 2018-06-06 |
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JP6729214B2 (ja) * | 2016-09-07 | 2020-07-22 | 富士電機株式会社 | 高耐圧集積回路装置および半導体装置 |
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JP6972691B2 (ja) * | 2017-06-19 | 2021-11-24 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
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