JP4671666B2 - 駆動回路 - Google Patents
駆動回路 Download PDFInfo
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- JP4671666B2 JP4671666B2 JP2004328301A JP2004328301A JP4671666B2 JP 4671666 B2 JP4671666 B2 JP 4671666B2 JP 2004328301 A JP2004328301 A JP 2004328301A JP 2004328301 A JP2004328301 A JP 2004328301A JP 4671666 B2 JP4671666 B2 JP 4671666B2
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- 238000009792 diffusion process Methods 0.000 claims description 103
- 239000000758 substrate Substances 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000010586 diagram Methods 0.000 description 35
- 230000003071 parasitic effect Effects 0.000 description 29
- 238000002955 isolation Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 9
- 230000006378 damage Effects 0.000 description 9
- 230000007257 malfunction Effects 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 230000002159 abnormal effect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000000872 buffer Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0921—Means for preventing a bipolar, e.g. thyristor, action between the different transistor regions, e.g. Latchup prevention
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823481—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823493—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Description
以上のような従来の半導体回路装置について以下に図を用いて説明する。
また、前記第1の導電型がP型で、前記第2の導電型がN型であっても良い。
(実施の形態1)
本発明の実施の形態1における駆動回路を図1,図2,図3を用いて説明する。
図1(a)において、200は駆動回路を構成するトランジスタのソースドレイン形成パターン、201はゲート形成パターン、202はP型ウェル電位供給用拡散形成パターン、203は分離領域に形成されたコレクタ電流低減用高濃度N型拡散層形成パターンである。また、図1(b)において106は出力端子OUTnに繋がる高濃度N型拡散層、160は出力端子OUTn+1に繋がる高濃度N型拡散層、107は高濃度P型拡散層、116はトランジスタ間の分離領域115に設けられたコレクタ電流低減用高濃度N型拡散層、108はP型ウェル、109はP型基板、104は任意のトランジスタの出力端子OUTn、105はその隣接するトランジスタの出力端子OUTn+1、130は接地端子、131は固定電位供給端子である。ここで、コレクタ電流低減用高濃度N型拡散層116は分離領域115の高濃度P型拡散層107中に形成され、固定電位供給端子131によりP型ウェル108の電位以上の電位に固定される。
自己ノイズまたは外来ノイズにより隣接端子間に形成されるNPN寄生バイポーラトランジスタが動作し、異常電流が流れて誤動作や破壊の原因になることは背景技術で述べた通りである。
図2は実施の形態1の開発事例を説明する断面構造図、図3は実施の形態1の開発事例における破壊耐性の評価結果を説明する図である。
本発明の実施の形態2における駆動回路を図4,図5,図6を用いて説明する。
図4(a)は実施の形態2におけるPDPを駆動する駆動回路の構造を示す概略図、図4(b)は実施の形態2におけるPDPを駆動する駆動回路の断面構造概略図であり、そのA−B間の断面構造概略図である。実施の形態1との違いは、分離領域115に高濃度N型拡散層を形成するかわりに、隣接するトランジスタそれぞれのドレイン領域の対向する位置に低濃度N型拡散層110を備えることである。
自己ノイズまたは外来ノイズにより隣接端子間に形成されるNPN寄生バイポーラトランジスタが動作し、異常電流が流れて誤動作や破壊の原因になることは背景技術で述べた通りである。
図5は実施の形態2の開発事例を説明する断面構造図、図6は実施の形態2の開発事例における破壊耐性の評価結果を説明する図である。
本発明の実施の形態3における駆動回路について図7を用いて説明する。
図7(a)は実施の形態3におけるPDPを駆動する駆動回路の構造を示す概略図、図7(b)は実施の形態3におけるPDPを駆動する駆動回路の断面構造概略図であり、そのA−B間の断面構造概略図である。実施の形態1に対して異なる点は、基板をN型基板113とし、各トランジスタを独立したP型ウェル108に形成し、N基板電位供給端子132によりN型基板113とP型ウェル108の間のビルトイン電圧よりも高い電位に固定可能なN型基板電位供給用のN型拡散層118およびN型基板領域113により各トランジスタの分離領域115を構成する点である。
自己ノイズまたは外来ノイズにより隣接端子間に形成されるNPN寄生バイポーラトランジスタが動作し、異常電流が流れて誤動作や破壊の原因になることは背景技術で述べた通りである。
(実施の形態4)
本発明の実施の形態4における半導体回路装置について図8を用いて説明する。
自己ノイズまたは外来ノイズにより隣接端子間に形成されるNPN寄生バイポーラトランジスタが動作し、異常電流が流れて誤動作や破壊の原因になることは背景技術で述べた通りである。
本発明の実施の形態5における半導体回路装置について図9を用いて説明する。
図9(a)は実施の形態5におけるPDPを駆動する駆動回路の構造を示す概略図、図9(b)は実施の形態5におけるPDPを駆動する駆動回路の断面構造概略図であり、そのA−B間の断面構造概略図である。実施の形態1に対して異なる点は、独立したP型ウェル108に各トランジスタを形成し、各トランジスタの分離領域115にN型ウェル114を形成する点である。
自己ノイズまたは外来ノイズにより隣接端子間に形成されるNPN寄生バイポーラトランジスタが動作し、異常電流が流れて誤動作や破壊の原因になることは背景技術で述べた通りである。
103 駆動電源端子
104 出力端子(OUTn)
105 出力端子(OUTn+1)
106 高濃度N型拡散層
160 高濃度N型拡散層
107 高濃度P型拡散層
108 P型ウェル
109 P型基板
110 低濃度N型拡散層
113 N型基板
114 N型ウェル
115 分離領域
116 コレクタ電流低減用高濃度N型拡散層
117 ドレイン領域
118 N型拡散層
130 接地端子
131 固定電位供給端子
132 N基板電位供給端子
140 低電位用N型ウェル
141 N型オフセット拡散層
142 P型オフセット拡散層
143 LOCOS
144 出力取出し用アルミ電極
200 ソースドレイン形成パターン
201 ゲート形成パターン
202 P型ウェル電位供給用拡散形成パターン
203 高濃度N型拡散層形成パターン
204 低濃度N型拡散層形成パターン
900 PDP
901 走査電極ライン
902 走査線ドライバ
903 表示データ電極ライン
904 表示データ線ドライバ
905 シフトレジスタ
906 ラッチ回路
907 レベルシフト回路
908 駆動回路
Claims (2)
- 第1導電型の半導体基板と、
前記半導体基板に形成される第1導電型のウェルと、
前記ウェルに形成される第2の導電型の第1の拡散層と、
前記第1の拡散層に接続される第1の出力端子と、
前記ウェルに形成される第2の導電型の第2の拡散層と、
前記第2の拡散層に接続される第2の出力端子と、
前記ウェルの前記第1の拡散層と前記第2の拡散層との間に形成される第3の拡散層と、
前記第3の拡散層内に形成される第1の導電型の第4の拡散層と、
前記第3の拡散層内に形成される第1の導電型の第5の拡散層と、
前記第4の拡散層と前記第5の拡散層との間に形成される第2の導電型の第6の拡散層と
を有し、前記第6の拡散層には前記ウェルの電圧以上の電圧が印加されることを特徴とする駆動回路。 - 前記第1の導電型がP型で、前記第2の導電型がN型であることを特徴とする請求項1記載の駆動回路。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004328301A JP4671666B2 (ja) | 2004-11-12 | 2004-11-12 | 駆動回路 |
US11/255,883 US7244993B2 (en) | 2004-11-12 | 2005-10-24 | Driving circuit |
CNB2005101250109A CN100521206C (zh) | 2004-11-12 | 2005-11-11 | 驱动电路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004328301A JP4671666B2 (ja) | 2004-11-12 | 2004-11-12 | 駆動回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006140302A JP2006140302A (ja) | 2006-06-01 |
JP4671666B2 true JP4671666B2 (ja) | 2011-04-20 |
Family
ID=36385373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004328301A Expired - Fee Related JP4671666B2 (ja) | 2004-11-12 | 2004-11-12 | 駆動回路 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7244993B2 (ja) |
JP (1) | JP4671666B2 (ja) |
CN (1) | CN100521206C (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5099282B1 (ja) * | 2011-03-15 | 2012-12-19 | 富士電機株式会社 | 高耐圧集積回路装置 |
JP5970758B2 (ja) * | 2011-08-10 | 2016-08-17 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の駆動方法および電子機器 |
JP6337634B2 (ja) * | 2014-06-16 | 2018-06-06 | 富士電機株式会社 | 半導体集積回路装置 |
JP2017117882A (ja) * | 2015-12-22 | 2017-06-29 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001053228A (ja) * | 1999-08-16 | 2001-02-23 | Matsushita Electric Ind Co Ltd | 半導体集積回路 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5903032A (en) * | 1994-05-13 | 1999-05-11 | Texas Instruments Incorporated | Power device integration for built-in ESD robustness |
US5912494A (en) | 1996-04-02 | 1999-06-15 | Winbond Electronics Corporation | Internal ESD protection structure with contact diffusion |
US6066879A (en) | 1999-05-03 | 2000-05-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Combined NMOS and SCR ESD protection device |
US6306695B1 (en) | 1999-09-27 | 2001-10-23 | Taiwan Semiconductor Manufacturing Company | Modified source side inserted anti-type diffusion ESD protection device |
US6358781B1 (en) | 2000-06-30 | 2002-03-19 | Taiwan Semiconductor Manufacturing Company | Uniform current distribution SCR device for high voltage ESD protection |
TWI259573B (en) | 2002-04-22 | 2006-08-01 | Ind Tech Res Inst | High efficiency substrate-triggered ESD protection component |
TWI223432B (en) * | 2003-12-18 | 2004-11-01 | Univ Nat Chiao Tung | Double-triggered silicon controller rectifier and relevant circuitry |
-
2004
- 2004-11-12 JP JP2004328301A patent/JP4671666B2/ja not_active Expired - Fee Related
-
2005
- 2005-10-24 US US11/255,883 patent/US7244993B2/en not_active Expired - Fee Related
- 2005-11-11 CN CNB2005101250109A patent/CN100521206C/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001053228A (ja) * | 1999-08-16 | 2001-02-23 | Matsushita Electric Ind Co Ltd | 半導体集積回路 |
Also Published As
Publication number | Publication date |
---|---|
US7244993B2 (en) | 2007-07-17 |
JP2006140302A (ja) | 2006-06-01 |
CN100521206C (zh) | 2009-07-29 |
CN1773706A (zh) | 2006-05-17 |
US20060102981A1 (en) | 2006-05-18 |
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