JP6137171B2 - 搬送装置、及び電子デバイス形成方法 - Google Patents

搬送装置、及び電子デバイス形成方法 Download PDF

Info

Publication number
JP6137171B2
JP6137171B2 JP2014509000A JP2014509000A JP6137171B2 JP 6137171 B2 JP6137171 B2 JP 6137171B2 JP 2014509000 A JP2014509000 A JP 2014509000A JP 2014509000 A JP2014509000 A JP 2014509000A JP 6137171 B2 JP6137171 B2 JP 6137171B2
Authority
JP
Japan
Prior art keywords
substrate
support member
electronic device
longitudinal direction
back surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014509000A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2013150677A1 (ja
Inventor
鈴木　智也
智也 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2014509000A priority Critical patent/JP6137171B2/ja
Publication of JPWO2013150677A1 publication Critical patent/JPWO2013150677A1/ja
Application granted granted Critical
Publication of JP6137171B2 publication Critical patent/JP6137171B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/16—Pneumatic conveyors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Liquid Crystal (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Handling Of Sheets (AREA)
  • Advancing Webs (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2014509000A 2012-04-03 2012-11-01 搬送装置、及び電子デバイス形成方法 Active JP6137171B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014509000A JP6137171B2 (ja) 2012-04-03 2012-11-01 搬送装置、及び電子デバイス形成方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2012084819 2012-04-03
JP2012084819 2012-04-03
JP2014509000A JP6137171B2 (ja) 2012-04-03 2012-11-01 搬送装置、及び電子デバイス形成方法
PCT/JP2012/078378 WO2013150677A1 (ja) 2012-04-03 2012-11-01 搬送装置、及び電子デバイス形成方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017085838A Division JP6414270B2 (ja) 2012-04-03 2017-04-25 パターン形成装置

Publications (2)

Publication Number Publication Date
JPWO2013150677A1 JPWO2013150677A1 (ja) 2015-12-17
JP6137171B2 true JP6137171B2 (ja) 2017-05-31

Family

ID=49300192

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2014509000A Active JP6137171B2 (ja) 2012-04-03 2012-11-01 搬送装置、及び電子デバイス形成方法
JP2017085838A Active JP6414270B2 (ja) 2012-04-03 2017-04-25 パターン形成装置
JP2018171066A Active JP6593507B2 (ja) 2012-04-03 2018-09-13 パターン形成装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2017085838A Active JP6414270B2 (ja) 2012-04-03 2017-04-25 パターン形成装置
JP2018171066A Active JP6593507B2 (ja) 2012-04-03 2018-09-13 パターン形成装置

Country Status (6)

Country Link
JP (3) JP6137171B2 (zh)
KR (5) KR101854959B1 (zh)
CN (2) CN104203779B (zh)
HK (2) HK1203183A1 (zh)
TW (3) TWI590369B (zh)
WO (1) WO2013150677A1 (zh)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102278073B1 (ko) * 2014-11-28 2021-07-16 세메스 주식회사 기판 처리 장치
JP2016127086A (ja) * 2014-12-26 2016-07-11 東京エレクトロン株式会社 基板吸着補助部材及び基板搬送装置
JP6448132B2 (ja) * 2015-03-13 2019-01-09 株式会社小森コーポレーション 印刷機
JP6829814B2 (ja) * 2017-03-13 2021-02-17 日本電気硝子株式会社 ガラスフィルムの製造方法
WO2018180651A1 (ja) * 2017-03-27 2018-10-04 日本電気硝子株式会社 ガラス板の製造方法及びその製造装置
CN107032163B (zh) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 一种纸带输送装置
CN107010449B (zh) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 一种电子票证前段加工设备
CN107618878A (zh) * 2017-09-05 2018-01-23 深圳市华星光电技术有限公司 一种玻璃基板传送装置
CN109693825A (zh) * 2017-10-24 2019-04-30 金红叶纸业集团有限公司 除静电输送装置及其除静电装置
CN108480135A (zh) * 2018-05-24 2018-09-04 陈鸿奇 一种成卷膜基材涂布用的涂布装置
TWI813718B (zh) * 2018-07-18 2023-09-01 日商東京威力科創股份有限公司 顯像處理裝置及顯像處理方法
KR102527442B1 (ko) 2018-08-01 2023-04-28 가부시키가이샤 니콘 미스트 발생 장치, 그리고 미스트 성막 방법, 및 미스트 성막 장치
KR102301669B1 (ko) * 2018-08-10 2021-09-14 주식회사 엘지에너지솔루션 전극기재의 타발시스템 및 타발방법
JP6771160B2 (ja) * 2018-08-21 2020-10-21 パナソニックＩｐマネジメント株式会社 搬送ステージとそれを使用したインクジェット装置
CN111610695A (zh) * 2019-02-26 2020-09-01 广东思沃精密机械有限公司 曝光机
JP7454555B2 (ja) 2019-03-29 2024-03-22 日東電工株式会社 ガラスフィルム複合体の搬送方法
DE112021000508T5 (de) * 2020-01-08 2022-12-01 Nippon Electric Glass Co., Ltd. Verfahren zur herstellung von glasfilmen und vorrichtung zur herstellung von glasfilmen
US11551970B2 (en) * 2020-10-22 2023-01-10 Innolux Corporation Method for manufacturing an electronic device
GB2605818B (en) * 2021-04-14 2023-12-06 Agfa Nv A substrate support system for a conveyor printer
CN114602741B (zh) * 2022-03-30 2023-08-29 深圳市鑫龙邦科技有限公司 一种卷对卷cob灯带点胶机及方法
CN114590626B (zh) * 2022-05-09 2022-08-02 常州树杰塑业有限公司 一种塑料薄膜生产用卷料机

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477558A (en) * 1966-10-27 1969-11-11 Fred J Fleischauer Air lift and vacuum conveyors and foraminous belt means therefor
US3889801A (en) * 1972-10-26 1975-06-17 Bell & Howell Co Vacuum conveyor belt with air bearing
DE3626244C3 (de) * 1986-08-02 1995-06-29 Rockwool Mineralwolle Vorrichtung zum Fördern und Wenden von Gütern in Form von Lamellen
JP2578631B2 (ja) * 1988-02-08 1997-02-05 コニカ株式会社 磁気記録媒体の塗布装置
JPH024813U (zh) * 1988-06-20 1990-01-12
US5079854A (en) * 1989-12-27 1992-01-14 Xerox Corporation Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
JPH09156749A (ja) * 1995-12-15 1997-06-17 Santrade Ltd スチールベルト洗浄装置及びスチールベルト洗浄方法
JP3498122B2 (ja) * 1999-10-26 2004-02-16 株式会社ヒラノテクシード 単板の塗工装置
TW553780B (en) * 1999-12-17 2003-09-21 Sharp Kk Ultrasonic processing device and electronic parts fabrication method using the same
DE60116404T2 (de) * 2000-02-26 2006-08-03 Voith Paper Patent Gmbh Unterdruck-Bandförderer
JP4557376B2 (ja) * 2000-06-19 2010-10-06 日東電工株式会社 多孔質体の製造方法及び多孔質体
JP2002045775A (ja) * 2000-08-07 2002-02-12 Toppan Printing Co Ltd 塗布装置
JP2002280340A (ja) * 2001-03-22 2002-09-27 Toppan Printing Co Ltd ガラス基板の洗浄方法
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP2004307149A (ja) * 2003-04-08 2004-11-04 Toppan Printing Co Ltd テープ搬送装置
JP2004322305A (ja) * 2003-04-11 2004-11-18 Tokki Corp 基板表面平坦化・洗浄装置
KR101053770B1 (ko) * 2003-04-30 2011-08-02 올림푸스 가부시키가이샤 기판 부상 장치
JP4767251B2 (ja) * 2004-04-14 2011-09-07 コアフロー サイエンティフィック ソリューションズ リミテッド 光学検査装置を平坦な対象物の接面に対して焦点合わせする方法
JP2006113292A (ja) * 2004-10-14 2006-04-27 Fuji Xerox Co Ltd 画像形成装置および画像形成装置用のエンドレスのベルトの表面および裏面の加工方法、
WO2006100868A1 (ja) * 2005-03-18 2006-09-28 Konica Minolta Holdings, Inc. 有機化合物層の形成方法、有機ｅｌ素子の製造方法、有機ｅｌ素子
JP4491364B2 (ja) 2005-03-23 2010-06-30 シーケーディ株式会社 非接触支持装置
KR20060109167A (ko) * 2005-04-15 2006-10-19 엘지전자 주식회사 평판 디스플레이 이송용 공기부상유니트
JP4692924B2 (ja) * 2005-06-21 2011-06-01 日本電気硝子株式会社 保護シート分離方法及び保護シート分離装置
JP4796889B2 (ja) * 2006-05-08 2011-10-19 Ｎｅｃ液晶テクノロジー株式会社 パネル洗浄機及び洗浄方法
JP4962760B2 (ja) 2006-07-19 2012-06-27 横河電機株式会社 移送システム
JP4753313B2 (ja) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 基板処理装置
DE202008003610U1 (de) * 2008-03-16 2008-05-21 Jonas & Redmann Automationstechnik Gmbh Transportbandsystem mit mindestens einem Transportband zum Transportieren von flachem Transportgut, insbesondere von Substraten wie Siliziumwafer und Solarzellen
JP5024145B2 (ja) * 2008-03-24 2012-09-12 セイコーエプソン株式会社 液体噴射装置
JP5320876B2 (ja) * 2008-07-16 2013-10-23 株式会社Ｉｈｉ 基板移送システム及び基板移送方法
JP2010036999A (ja) * 2008-07-31 2010-02-18 Nippon Electric Glass Co Ltd ガラス基板の搬送ユニット、及びガラス基板の搬送装置、並びにガラス基板の搬送方法
JP2010208243A (ja) * 2009-03-12 2010-09-24 Duplo Seiko Corp 液体吐出装置
JP2010232472A (ja) * 2009-03-27 2010-10-14 Dainippon Screen Mfg Co Ltd 基板搬送装置および基板処理装置
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
JP5451256B2 (ja) * 2009-08-25 2014-03-26 日新工機株式会社 鋼帯通板コンベア及び鋼帯通板設備
JP2011084352A (ja) 2009-10-14 2011-04-28 Myotoku Ltd ワーク浮上装置
JP2011194297A (ja) * 2010-03-18 2011-10-06 Seiko Epson Corp 吸着装置および液滴吐出装置

Also Published As

Publication number Publication date
KR20180072871A (ko) 2018-06-29
TW201929139A (zh) 2019-07-16
KR20170095395A (ko) 2017-08-22
CN105752686A (zh) 2016-07-13
TWI590369B (zh) 2017-07-01
HK1224264A1 (zh) 2017-08-18
TW201351555A (zh) 2013-12-16
KR101854959B1 (ko) 2018-05-04
WO2013150677A1 (ja) 2013-10-10
JP6593507B2 (ja) 2019-10-23
KR101962083B1 (ko) 2019-03-25
TW201836046A (zh) 2018-10-01
KR101879162B1 (ko) 2018-07-16
JPWO2013150677A1 (ja) 2015-12-17
KR20150000476A (ko) 2015-01-02
JP6414270B2 (ja) 2018-10-31
CN104203779B (zh) 2016-04-20
KR20190010732A (ko) 2019-01-30
KR20180038071A (ko) 2018-04-13
KR101809001B1 (ko) 2017-12-13
JP2018199580A (ja) 2018-12-20
HK1203183A1 (zh) 2015-10-23
TWI674645B (zh) 2019-10-11
TWI660449B (zh) 2019-05-21
CN105752686B (zh) 2018-09-21
CN104203779A (zh) 2014-12-10
JP2017144433A (ja) 2017-08-24
KR102000430B1 (ko) 2019-07-15

Similar Documents

Publication Publication Date Title
JP6593507B2 (ja) パターン形成装置
JP5962831B2 (ja) パターン形成方法、及びパターン形成装置
TWI627120B (zh) Component manufacturing device
TWI604550B (zh) 匣裝置、基板搬送裝置、基板處理裝置、及基板處理方法
TWI611500B (zh) 基板處理裝置
TWI587428B (zh) 基板處理裝置及元件製造方法
JP5929324B2 (ja) 搬送装置
JP6065954B2 (ja) 製造システム
US9682543B2 (en) System for laminating optical film and method for manufacturing display unit using the same
CN209567414U (zh) 真空吸附传送载具
JP2012002994A (ja) 表示パネル組立装置
US9694571B2 (en) System for laminating optical film and method for manufacturing display unit using the same
JP2013112436A (ja) 基板処理装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150924

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150924

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161011

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170404

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170417

R150 Certificate of patent or registration of utility model

Ref document number: 6137171

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250