HK1203183A1 - 搬運裝置、及電子器件的形成方法 - Google Patents

搬運裝置、及電子器件的形成方法

Info

Publication number
HK1203183A1
HK1203183A1 HK15103065.7A HK15103065A HK1203183A1 HK 1203183 A1 HK1203183 A1 HK 1203183A1 HK 15103065 A HK15103065 A HK 15103065A HK 1203183 A1 HK1203183 A1 HK 1203183A1
Authority
HK
Hong Kong
Prior art keywords
electronic device
forming method
transfer apparatus
device forming
transfer
Prior art date
Application number
HK15103065.7A
Other languages
English (en)
Inventor
鈴木　智也
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1203183A1 publication Critical patent/HK1203183A1/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/16—Pneumatic conveyors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Controlling Rewinding, Feeding, Winding, Or Abnormalities Of Webs (AREA)
  • Liquid Crystal (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Handling Of Sheets (AREA)
  • Advancing Webs (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
HK15103065.7A 2012-04-03 2015-03-26 搬運裝置、及電子器件的形成方法 HK1203183A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012084819 2012-04-03
PCT/JP2012/078378 WO2013150677A1 (ja) 2012-04-03 2012-11-01 搬送装置、及び電子デバイス形成方法

Publications (1)

Publication Number Publication Date
HK1203183A1 true HK1203183A1 (zh) 2015-10-23

Family

ID=49300192

Family Applications (2)

Application Number Title Priority Date Filing Date
HK15103065.7A HK1203183A1 (zh) 2012-04-03 2015-03-26 搬運裝置、及電子器件的形成方法
HK16112478.8A HK1224264A1 (zh) 2012-04-03 2015-03-26 基板處理裝置

Family Applications After (1)

Application Number Title Priority Date Filing Date
HK16112478.8A HK1224264A1 (zh) 2012-04-03 2015-03-26 基板處理裝置

Country Status (6)

Country Link
JP (3) JP6137171B2 (zh)
KR (5) KR101854959B1 (zh)
CN (2) CN104203779B (zh)
HK (2) HK1203183A1 (zh)
TW (3) TWI590369B (zh)
WO (1) WO2013150677A1 (zh)

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CN107010449B (zh) * 2017-04-22 2019-01-29 广州明森科技股份有限公司 一种电子票证前段加工设备
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CN108480135A (zh) * 2018-05-24 2018-09-04 陈鸿奇 一种成卷膜基材涂布用的涂布装置
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CN111610695A (zh) * 2019-02-26 2020-09-01 广东思沃精密机械有限公司 曝光机
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GB2605818B (en) * 2021-04-14 2023-12-06 Agfa Nv A substrate support system for a conveyor printer
CN114602741B (zh) * 2022-03-30 2023-08-29 深圳市鑫龙邦科技有限公司 一种卷对卷cob灯带点胶机及方法
CN114590626B (zh) * 2022-05-09 2022-08-02 常州树杰塑业有限公司 一种塑料薄膜生产用卷料机

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Also Published As

Publication number Publication date
KR20180072871A (ko) 2018-06-29
TW201929139A (zh) 2019-07-16
KR20170095395A (ko) 2017-08-22
CN105752686A (zh) 2016-07-13
TWI590369B (zh) 2017-07-01
HK1224264A1 (zh) 2017-08-18
TW201351555A (zh) 2013-12-16
KR101854959B1 (ko) 2018-05-04
WO2013150677A1 (ja) 2013-10-10
JP6593507B2 (ja) 2019-10-23
KR101962083B1 (ko) 2019-03-25
TW201836046A (zh) 2018-10-01
KR101879162B1 (ko) 2018-07-16
JPWO2013150677A1 (ja) 2015-12-17
KR20150000476A (ko) 2015-01-02
JP6414270B2 (ja) 2018-10-31
CN104203779B (zh) 2016-04-20
KR20190010732A (ko) 2019-01-30
KR20180038071A (ko) 2018-04-13
KR101809001B1 (ko) 2017-12-13
JP2018199580A (ja) 2018-12-20
TWI674645B (zh) 2019-10-11
TWI660449B (zh) 2019-05-21
CN105752686B (zh) 2018-09-21
CN104203779A (zh) 2014-12-10
JP2017144433A (ja) 2017-08-24
JP6137171B2 (ja) 2017-05-31
KR102000430B1 (ko) 2019-07-15

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