JP6102140B2 - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 223
- 239000012535 impurity Substances 0.000 claims description 68
- 230000007704 transition Effects 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 239000003870 refractory metal Substances 0.000 claims description 3
- 229910002601 GaN Inorganic materials 0.000 claims description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
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Description
図1は、本発明の実施の形態1に係る半導体装置の断面図である。半導体装置は、nチャネルトレンチ型IGBTで形成されている。この半導体装置は、不純物密度が非常に低くドリフト層として機能するn型の基板10を備えている。基板10の上面にはチャネル層12が形成されている。チャネル層は、不純物密度が1.0E17/cm3、比誘電率が11.7のp型半導体で形成されている。チャネル層12の上にはエミッタ層14が形成されている。エミッタ層14は、不純物密度の高いn型半導体で形成されている。
CCH=εCH/XCH
CGX=εGA/XGA
CIN=εIN/TIN
VCH=Q/CCH=q/εCH・NCH・XCH 2
VGX=Q/CGX=q/εGA・NGA・XGA 2
=q/εGA・NCH 2/NGA・XCH 2
VIN=Q/CIN=q/εIN・NCH・tIN・XIN
VG=VCH+VIN+VGX
=q・NCH・(1/εCH+1/εGA・NCH/NGA)・XCH 2
+q/εIN・NCH・tIN・XCH
ここで、qは電子の素電荷、tINは絶縁層20の層厚である。NCH、NGA、NGBは、それぞれチャネル層12、第1半導体層22、第2半導体層24の不純物密度を表す。また、VCH,VIN、VGA、VGBは、それぞれチャネル層12、絶縁層20、第1半導体層22、第2半導体層24の電圧を表す。εCH、εIN、εGA、εGBは、それぞれチャネル層12、絶縁層20、第1半導体層22、第2半導体層24の比誘電率を表す。
VCH=0
VIN=Q/CIN=q/εIN・NCH・tIN・XCH
VG=VCH+VIN+VGX
=q/εGA・NCH 2/NGA・XCH 2+q/εIN・NCH・tIN・XCH
Q=qNCH・XCH=q(NGA・XGA+NGB・XGB)
CGX=εGA・εGA/(εGB・XGA+εGA・XGB)
VCH=0
VGX=Q/CCX=q・(NGA・XGA+NGB・XGB)
×(εGB・XGA+εGA・XGB)/(εGA・εGB)
VIN=Q/CIN=q/εIN・NCH・tIN・XCH
VG=VCH+VIN+VGX
=q・NGB・/εGBXGB 2+q・NGA・NGB・B1・XGB
+q・NGA・XGA・(L GA /εGA+tIN/εIN)
本発明の実施の形態2に係る半導体装置は、実施の形態1との共通点が多いので実施の形態1との相違点を中心に説明する。図13は、本発明の実施の形態2に係る半導体装置の断面図である。第1半導体層22と第2半導体層24の間に、第2半導体層24と比べて不純物の拡散係数が低いバリア層60が形成されている。バリア層60の材料は、半導体、絶縁体、又は金属のどれでもよい。しかし絶縁体の場合は、絶縁層20の容量への影響、及び第1半導体層と第2半導体層の間の電荷の移動を考慮して実施の形態1と同等となるようにする必要がある。
本発明の実施の形態3に係る半導体装置は、実施の形態1との共通点が多いので実施の形態1との相違点を中心に説明する。図14は、本発明の実施の形態3に係る半導体装置の断面図である。絶縁層20は厚く形成された部分20aを有している。部分20aはエミッタ層14と接する。つまり、絶縁層20のうちエミッタ層14と接する部分20aはチャネル層12と接する部分よりも厚い。また、第1半導体層22のうち、エミッタ層14を貫く部分70は、チャネル層12を貫く部分よりも不純物密度が高い。
本発明の実施の形態4に係る半導体装置は、実施の形態1で説明した絶縁層、第1半導体層、第2半導体層、及びゲート電極を備えた構造をMOSトランジスタに応用したことを特徴とする。
Claims (12)
- 基板の上に形成されたチャネル層と、
前記チャネル層と接して形成された絶縁層と、
前記絶縁層の前記チャネル層と反対側に形成された、不純物がドープされた第1半導体層と、
前記第1半導体層の前記絶縁層と反対側に形成された、不純物がドープされた第2半導体層と、
前記第2半導体層の前記第1半導体層と反対側に形成されたゲート電極と、を備え、
前記第1半導体層の不純物密度を前記第1半導体層の比誘電率で除した値は、前記第2半導体層の不純物密度を前記第2半導体層の比誘電率で除した値より大きく、
前記第1半導体層の全体に空乏層が形成されるゲート電圧である遷移電圧より小さいゲート電圧では、前記第1半導体層の一部に空乏層が形成され、前記第2半導体層には空乏層が形成されず、
前記遷移電圧より大きいゲート電圧では、前記第1半導体層全体、及び前記第2半導体層の少なくとも一部に空乏層が形成されることを特徴とする半導体装置。 - 前記第2半導体層の不純物密度は前記第1半導体層の不純物密度の1/10以下であることを特徴とする請求項1に記載の半導体装置。
- 前記第1半導体層と前記第2半導体層の間に形成された、前記第2半導体層と比べて不純物の拡散係数が低いバリア層を備えたことを特徴とする請求項1又は2に記載の半導体装置。
- 前記チャネル層の上に形成されたエミッタ層を備え、
前記絶縁層、前記第1半導体層、前記第2半導体層、及び前記ゲート電極は、前記チャネル層、及び前記エミッタ層を貫き前記基板に達するトレンチゲートを形成しており、
前記絶縁層のうち、前記エミッタ層と接する部分は、前記チャネル層と接する部分よりも厚く形成されたことを特徴とする請求項1乃至3のいずれか1項に記載の半導体装置。 - 前記チャネル層の上に形成されたエミッタ層を備え、
前記絶縁層、前記第1半導体層、前記第2半導体層、及び前記ゲート電極は、前記チャネル層、及び前記エミッタ層を貫き前記基板に達するトレンチゲートを形成しており、
前記第1半導体層のうち、前記エミッタ層を貫く部分は、前記チャネル層を貫く部分よりも不純物密度が高いことを特徴とする請求項1乃至3のいずれか1項に記載の半導体装置。 - 前記第2半導体層と前記ゲート電極の間に形成された、前記第2半導体層よりも抵抗値の低い低抵抗層を備えたことを特徴とする請求項1乃至6のいずれか1項に記載の半導体装置。
- 前記基板はワイドバンドギャップ半導体によって形成されていることを特徴とする請求項1乃至7のいずれか1項に記載の半導体装置。
- 前記ワイドバンドギャップ半導体は、炭化珪素、窒化ガリウム系材料、又はダイヤモンドであることを特徴とする請求項8に記載の半導体装置。
- 前記ゲート電極は前記第2半導体層よりも低抵抗であることを特徴とする請求項1又は2に記載の半導体装置。
- 前記ゲート電極は高融点金属で形成されたことを特徴とする請求項1又は2に記載の半導体装置。
- 前記ゲート電極に電圧を印加すると前記第1半導体層に空乏層が形成されることを特徴とする請求項1〜11のいずれか1項に記載の半導体装置。
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JP2012207393A JP6102140B2 (ja) | 2012-09-20 | 2012-09-20 | 半導体装置 |
US13/849,344 US9041097B2 (en) | 2012-09-20 | 2013-03-22 | Semiconductor device |
DE102013207740.8A DE102013207740B4 (de) | 2012-09-20 | 2013-04-26 | Halbleitervorrichtungen |
KR1020130091312A KR101444080B1 (ko) | 2012-09-20 | 2013-08-01 | 반도체장치 |
CN201310363445.1A CN103681823B (zh) | 2012-09-20 | 2013-08-20 | 半导体装置 |
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JPH07147405A (ja) * | 1993-09-30 | 1995-06-06 | Nkk Corp | 電界効果型トランジスタとその駆動方法及びそのトランジスタを用いたインバータ、ロジック回路及びsram |
JPH07176732A (ja) | 1993-10-29 | 1995-07-14 | Nkk Corp | Mis電界効果型トランジスタの製造方法 |
JPH0878534A (ja) | 1994-09-01 | 1996-03-22 | Fujitsu Ltd | 半導体装置及びその製造方法 |
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JPH1168105A (ja) | 1997-08-26 | 1999-03-09 | Mitsubishi Electric Corp | 半導体装置 |
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JP4483179B2 (ja) * | 2003-03-03 | 2010-06-16 | 株式会社デンソー | 半導体装置の製造方法 |
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CN103681823B (zh) | 2017-03-01 |
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