JP5514302B2 - ガラス基板用の担体 - Google Patents
ガラス基板用の担体 Download PDFInfo
- Publication number
- JP5514302B2 JP5514302B2 JP2012509867A JP2012509867A JP5514302B2 JP 5514302 B2 JP5514302 B2 JP 5514302B2 JP 2012509867 A JP2012509867 A JP 2012509867A JP 2012509867 A JP2012509867 A JP 2012509867A JP 5514302 B2 JP5514302 B2 JP 5514302B2
- Authority
- JP
- Japan
- Prior art keywords
- elastomer
- carrier
- support
- glass sheet
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/13613—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit the semiconductor element being formed on a first substrate and thereafter transferred to the final cell substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
Description
(A)第1(15)および第2(17)の対向表面を有するエラストマー(9)と、
(B)前記エラストマー(9)の第1の表面(15)に接着した支持体(11)であって、前記薄いガラスシート(7)の厚さの1〜10倍の範囲の厚さを有する支持体(11)と、
を備え、ここで、
(i)使用中、前記薄いガラスシート(7)が、前記エラストマーの第2の表面(17)に直接接触し、かつ、取り外し可能に接着し;
(ii)前記エラストマーの第2の表面(17)が、
(a)10〜90の範囲のショアA硬さ、および
(b)185ナノメートル以下の粗さ(Ra値)
を有し;
(iii)前記第1の表面(15)と前記支持体(11)との接着が、20ミリメートル/分の剥離速度および90°の剥離角で測定した場合に、少なくとも0.5キロニュートン/メートルの剥離強度を有する;
ことを特徴とする。
G(v)=(m・g・sin(α))/w
ここで、gは重力定数であり、mおよびwは、それぞれ、円筒の質量および幅である。
この実施例は、電子部品の製造の間に遭遇するであろう状況に耐える、担体/ガラスシート組立体の能力におけるショアA硬さおよび表面粗さの影響を例証する。
この実施例は、TFT蒸着プロセスのシミュレートを意図した試験において、シリコーンエラストマーをペルフルオロエラストマーと比較する。
9 エラストマー
11 支持体
13 担体/薄いガラス基板組立体
15 エラストマーの第1の表面
17 エラストマーの第2の表面
19 ガラスの円筒
21 付着エネルギー試験装置
23 薄いガラス基板の露出面
25 薄いガラス基板の接着面
27 エラストマー層
31 担体
Claims (9)
- 0.5ミリメートル以下の厚さを有する薄いガラスシート用の担体であって、前記担体が、
(A)第1および第2の対向表面を有するエラストマーと、
(B)前記エラストマーの第1の表面に接着した支持体であって、前記薄いガラスシートの厚さの1〜10倍の範囲の厚さを有する支持体と、
を備え、ここで、
(i)使用中、前記薄いガラスシートが、前記エラストマーの第2の表面に直接的に接触し、かつ、取り外し可能に接着し;
(ii)前記エラストマーの第2の表面が、
(a)10〜90の範囲のショアA硬さ、および
(b)185ナノメートル以下の粗さ
を有し;
(iii)前記第1の表面と前記支持体との接着が、20ミリメートル/分の剥離速度および90°の剥離角で測定した場合に、少なくとも0.5キロニュートン/メートルの剥離強度を有する;
ことを特徴とする、担体。 - 前記エラストマーが、接着剤を使用することなく、前記支持体に接着されることを特徴とする請求項1記載の担体。
- 25℃における50または60ヘルツの超音波アセトン浴に入れたときに、薄いガラスシートが前記第2の表面に20分間保持される確率が45%を超えることを特徴とする請求項1または2記載の担体。
- 前記エラストマーが無極性エラストマーであることを特徴とする請求項1〜3いずれか1項記載の担体。
- 前記支持体がガラスからなることを特徴とする請求項1〜4いずれか1項記載の担体。
- 前記支持体と前記エラストマーとの接着促進剤をさらに含むことを特徴とする請求項5記載の担体。
- 前記エラストマーがペルフルオロエラストマーであることを特徴とする請求項6記載の担体。
- 請求項1記載の担体、および、0.5ミリメートル以下の厚さを有する薄いガラスシートを備えた組立体。
- 前記薄いガラスシートが、ピクセル化ディスプレイ用の基板としての使用に適したガラスを含むことを特徴とする請求項8記載の組立体。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09305404.7 | 2009-05-06 | ||
EP09305404 | 2009-05-06 | ||
PCT/US2010/033355 WO2010129459A2 (en) | 2009-05-06 | 2010-05-03 | Carrier for glass substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012526393A JP2012526393A (ja) | 2012-10-25 |
JP5514302B2 true JP5514302B2 (ja) | 2014-06-04 |
Family
ID=43050795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012509867A Expired - Fee Related JP5514302B2 (ja) | 2009-05-06 | 2010-05-03 | ガラス基板用の担体 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8697228B2 (ja) |
JP (1) | JP5514302B2 (ja) |
KR (1) | KR101561729B1 (ja) |
CN (1) | CN102422406B (ja) |
TW (1) | TWI480153B (ja) |
WO (1) | WO2010129459A2 (ja) |
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CN102422406B (zh) | 2014-07-09 |
KR101561729B1 (ko) | 2015-10-19 |
WO2010129459A3 (en) | 2011-03-03 |
JP2012526393A (ja) | 2012-10-25 |
KR20120023063A (ko) | 2012-03-12 |
TW201107131A (en) | 2011-03-01 |
CN102422406A (zh) | 2012-04-18 |
WO2010129459A2 (en) | 2010-11-11 |
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