JP5490226B2 - 光電変換装置 - Google Patents
光電変換装置 Download PDFInfo
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- JP5490226B2 JP5490226B2 JP2012512816A JP2012512816A JP5490226B2 JP 5490226 B2 JP5490226 B2 JP 5490226B2 JP 2012512816 A JP2012512816 A JP 2012512816A JP 2012512816 A JP2012512816 A JP 2012512816A JP 5490226 B2 JP5490226 B2 JP 5490226B2
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- 238000006243 chemical reaction Methods 0.000 title claims description 73
- 230000031700 light absorption Effects 0.000 claims description 137
- 150000001875 compounds Chemical class 0.000 claims description 41
- 239000004065 semiconductor Substances 0.000 claims description 25
- 229910052738 indium Inorganic materials 0.000 claims description 18
- 229910052733 gallium Inorganic materials 0.000 claims description 13
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052951 chalcopyrite Inorganic materials 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 description 47
- 239000002184 metal Substances 0.000 description 45
- 238000000034 method Methods 0.000 description 40
- 229910052798 chalcogen Inorganic materials 0.000 description 26
- 150000001787 chalcogens Chemical class 0.000 description 25
- 230000015572 biosynthetic process Effects 0.000 description 23
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- 239000002994 raw material Substances 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
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- 230000000694 effects Effects 0.000 description 6
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- 230000008018 melting Effects 0.000 description 5
- 229910052717 sulfur Inorganic materials 0.000 description 5
- 238000005481 NMR spectroscopy Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- -1 chalcopyrite compound Chemical class 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
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- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- YWBHROUQJYHSOR-UHFFFAOYSA-N $l^{1}-selanylbenzene Chemical group [Se]C1=CC=CC=C1 YWBHROUQJYHSOR-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000002879 Lewis base Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 238000001354 calcination Methods 0.000 description 1
- SKOLWUPSYHWYAM-UHFFFAOYSA-N carbonodithioic O,S-acid Chemical compound SC(S)=O SKOLWUPSYHWYAM-UHFFFAOYSA-N 0.000 description 1
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- YWWZCHLUQSHMCL-UHFFFAOYSA-N diphenyl diselenide Chemical compound C=1C=CC=CC=1[Se][Se]C1=CC=CC=C1 YWWZCHLUQSHMCL-UHFFFAOYSA-N 0.000 description 1
- LTYMSROWYAPPGB-UHFFFAOYSA-N diphenyl sulfide Chemical compound C=1C=CC=CC=1SC1=CC=CC=C1 LTYMSROWYAPPGB-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- JPIIVHIVGGOMMV-UHFFFAOYSA-N ditellurium Chemical compound [Te]=[Te] JPIIVHIVGGOMMV-UHFFFAOYSA-N 0.000 description 1
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- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 150000007527 lewis bases Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- ORQWTLCYLDRDHK-UHFFFAOYSA-N phenylselanylbenzene Chemical compound C=1C=CC=CC=1[Se]C1=CC=CC=C1 ORQWTLCYLDRDHK-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
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- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003459 sulfonic acid esters Chemical class 0.000 description 1
- 150000003462 sulfoxides Chemical class 0.000 description 1
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- TULWUZJYDBGXMY-UHFFFAOYSA-N tellurophene Chemical compound [Te]1C=CC=C1 TULWUZJYDBGXMY-UHFFFAOYSA-N 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
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- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
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- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03923—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
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Description
2:第1の電極層
3:光吸収層
3A:第1層
3B:第2層
3C:第3層
3a、3b、3c:空隙
4:バッファ層
5:第2の電極層
6:第3の電極層
7:接続導体
8:集電電極
10:光電変換装置
11:光電変換モジュ−ル
Claims (9)
- 電極層と、
該電極層上に設けられた、カルコパイライト系のI-III-VI族化合物半導体から成る光吸収層とを備え、
該光吸収層は、前記電極層側に位置する第1層と、該第1層上に設けられた第2層とを有しており、
前記第1層の空隙率は、前記第2層の空隙率よりも小さい、光電変換装置。 - 前記第1層の空隙率は0〜20%であり、前記第2層の空隙率は30〜80%である、請求項1に記載の光電変換装置。
- 前記化合物半導体は、InおよびGaを含み、
前記第1層におけるIn/(In+Ga)モル比は、前記第2層におけるIn/(In+Ga)モル比よりも小さい、請求項1または請求項2に記載の光電変換装置。 - 前記第1層および前記第2層は、Naをさらに含み、前記第1層におけるNaのモル濃度は、前記第2層におけるNaのモル濃度よりも小さい、請求項1乃至請求項3のいずれかに記載の光電変換装置。
- 前記光吸収層上に設けられた半導体層をさらに有し、
前記光吸収層は前記第2層上に設けられた、前記半導体層とpn接合を形成する第3層をさらに備えており、
該第3層の空隙率は、前記第2層の空隙率よりも小さい、請求項1乃至請求項4のいずれかに記載の光電変換装置。 - 前記第3層の空隙率は0〜20%である、請求項5に記載の光電変換装置。
- 前記化合物半導体は、InおよびGaを含み、
前記第1層および前記第3層におけるIn/(In+Ga)モル比は、前記第2層におけるIn/(In+Ga)モル比よりも小さい、請求項5または請求項6に記載の光電変換装置。 - 前記化合物半導体は、InおよびGaを含み、
前記第1層および第2層におけるIn/(In+Ga)モル比は、前記第3層におけるI
n/(In+Ga)モル比よりも小さい、請求項5または請求項6に記載の光電変換装置。 - 前記第3層は、Naをさらに含み、該第3層におけるNaのモル濃度は、前記第2層におけるNaのモル濃度よりも小さい、請求項5乃至請求項8のいずれかに記載の光電変換装置。
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WO2012014924A1 (ja) * | 2010-07-29 | 2012-02-02 | 京セラ株式会社 | 光電変換装置 |
JP6189604B2 (ja) * | 2012-03-28 | 2017-08-30 | 京セラ株式会社 | 光電変換装置 |
WO2014140897A2 (en) | 2013-03-15 | 2014-09-18 | Nanoco Technologies, Ltd. | Pv device with graded grain size and s:se ratio |
WO2016017617A1 (ja) * | 2014-07-29 | 2016-02-04 | 京セラ株式会社 | 光電変換装置およびタンデム型光電変換装置ならびに光電変換装置アレイ |
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JP6864642B2 (ja) * | 2018-03-22 | 2021-04-28 | 株式会社東芝 | 太陽電池、多接合型太陽電池、太陽電池モジュール及び太陽光発電システム |
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