JP5406852B2 - 非接触搬送装置 - Google Patents

非接触搬送装置 Download PDF

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Publication number
JP5406852B2
JP5406852B2 JP2010539196A JP2010539196A JP5406852B2 JP 5406852 B2 JP5406852 B2 JP 5406852B2 JP 2010539196 A JP2010539196 A JP 2010539196A JP 2010539196 A JP2010539196 A JP 2010539196A JP 5406852 B2 JP5406852 B2 JP 5406852B2
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Japan
Prior art keywords
conveyance
fluid
rail
conveyed
contact
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JP2010539196A
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English (en)
Japanese (ja)
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JPWO2010058689A1 (ja
Inventor
秀夫 小澤
耕一 角田
貴裕 安田
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Oiles Corp
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Oiles Corp
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Priority to JP2010539196A priority Critical patent/JP5406852B2/ja
Publication of JPWO2010058689A1 publication Critical patent/JPWO2010058689A1/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
JP2010539196A 2008-11-18 2009-10-29 非接触搬送装置 Active JP5406852B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010539196A JP5406852B2 (ja) 2008-11-18 2009-10-29 非接触搬送装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008293998 2008-11-18
JP2008293998 2008-11-18
JP2010539196A JP5406852B2 (ja) 2008-11-18 2009-10-29 非接触搬送装置
PCT/JP2009/068577 WO2010058689A1 (ja) 2008-11-18 2009-10-29 非接触搬送装置

Publications (2)

Publication Number Publication Date
JPWO2010058689A1 JPWO2010058689A1 (ja) 2012-04-19
JP5406852B2 true JP5406852B2 (ja) 2014-02-05

Family

ID=42198128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010539196A Active JP5406852B2 (ja) 2008-11-18 2009-10-29 非接触搬送装置

Country Status (5)

Country Link
JP (1) JP5406852B2 (ko)
KR (1) KR101663257B1 (ko)
CN (1) CN102239093B (ko)
TW (2) TWI468330B (ko)
WO (1) WO2010058689A1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5502788B2 (ja) * 2011-03-16 2014-05-28 東京エレクトロン株式会社 浮上式塗布装置
KR20140040724A (ko) * 2011-07-26 2014-04-03 오일레스고교 가부시키가이샤 비접촉 반송 장치
JP5913997B2 (ja) * 2012-01-13 2016-05-11 オイレス工業株式会社 エアスライド装置
JP6076606B2 (ja) * 2012-02-14 2017-02-08 オイレス工業株式会社 浮上搬送装置および浮上搬送方法
JP2013179137A (ja) * 2012-02-28 2013-09-09 Tokyo Institute Of Technology 力発生装置
JP6147521B2 (ja) * 2013-02-14 2017-06-14 オイレス工業株式会社 浮上搬送装置、搬送レール、および浮上搬送方法
JP2015020808A (ja) * 2013-07-16 2015-02-02 オイレス工業株式会社 非接触搬送装置及び非接触搬送方法
JP6288553B2 (ja) * 2014-03-11 2018-03-07 オイレス工業株式会社 非接触式浮上搬送装置およびその搬送方向切換方法と搬送速度調整方法
JP6116629B2 (ja) * 2015-08-11 2017-04-19 株式会社ハーモテック 吸引装置
CN112173725A (zh) * 2019-07-03 2021-01-05 上海睿范自动化设备有限公司 一种非接触传输装置
CN111112190B (zh) * 2019-12-31 2021-10-08 浙江大学 一种桥墩水下表面附着物清洗系统及结构改进的机器人

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0355836A (ja) * 1989-07-14 1991-03-11 Wacker Chemitronic Ges Elektron Grundstoffe Mbh ウエフア状ワークピース、特に半導体ウエフアを搬送・位置決めする装置およびワークピースの湿式化学的表面処理方法
JPH06193746A (ja) * 1992-12-22 1994-07-15 Hitachi Ltd ゲートバルブ
JP2000036508A (ja) * 1998-05-11 2000-02-02 Matsushita Electric Ind Co Ltd バンプボンディング装置及び方法
JP2000118712A (ja) * 1998-10-12 2000-04-25 Watanabe Shoko:Kk 浮上搬送装置用の気体噴出構造
JP2004123254A (ja) * 2002-09-30 2004-04-22 Nippon Sekkei Kogyo:Kk 大型薄板状材の搬送方法及び装置
JP2005051260A (ja) * 2000-06-09 2005-02-24 Harmotec Corp 非接触搬送装置
JP2005150528A (ja) * 2003-11-18 2005-06-09 Disco Abrasive Syst Ltd 研削装置
JP2006222209A (ja) * 2005-02-09 2006-08-24 Shinko Electric Co Ltd エア浮上ユニット、搬送方法、及びエア浮上搬送装置
WO2007074855A1 (ja) * 2005-12-27 2007-07-05 Harmotec Co., Ltd. 非接触搬送装置
JP2007324382A (ja) * 2006-06-01 2007-12-13 Harmotec Corp 旋回流形成体および非接触搬送装置
JP2008087910A (ja) * 2006-10-02 2008-04-17 Smc Corp 非接触搬送装置
JP2008270626A (ja) * 2007-04-24 2008-11-06 Tokyo Electron Ltd 基板吸着装置及び基板搬送装置
WO2009119377A1 (ja) * 2008-03-24 2009-10-01 オイレス工業株式会社 非接触搬送装置
WO2010004800A1 (ja) * 2008-07-10 2010-01-14 オイレス工業株式会社 旋回流形成体及び非接触搬送装置
JP2010083592A (ja) * 2008-09-29 2010-04-15 Seiko Epson Corp ワーク移動テーブルおよびこれを備えた液滴吐出装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3476005B2 (ja) * 1999-08-06 2003-12-10 川崎重工業株式会社 空気浮上式ベルトコンベア装置
KR100768908B1 (ko) * 2006-06-30 2007-10-19 (주)멕스코리아아이엔씨 기판 반송장치
TWM341017U (en) * 2007-12-25 2008-09-21 Jin-Wei Huang Fan air-floating device for glass substrate transportation

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0355836A (ja) * 1989-07-14 1991-03-11 Wacker Chemitronic Ges Elektron Grundstoffe Mbh ウエフア状ワークピース、特に半導体ウエフアを搬送・位置決めする装置およびワークピースの湿式化学的表面処理方法
JPH06193746A (ja) * 1992-12-22 1994-07-15 Hitachi Ltd ゲートバルブ
JP2000036508A (ja) * 1998-05-11 2000-02-02 Matsushita Electric Ind Co Ltd バンプボンディング装置及び方法
JP2000118712A (ja) * 1998-10-12 2000-04-25 Watanabe Shoko:Kk 浮上搬送装置用の気体噴出構造
JP2005051260A (ja) * 2000-06-09 2005-02-24 Harmotec Corp 非接触搬送装置
JP2004123254A (ja) * 2002-09-30 2004-04-22 Nippon Sekkei Kogyo:Kk 大型薄板状材の搬送方法及び装置
JP2005150528A (ja) * 2003-11-18 2005-06-09 Disco Abrasive Syst Ltd 研削装置
JP2006222209A (ja) * 2005-02-09 2006-08-24 Shinko Electric Co Ltd エア浮上ユニット、搬送方法、及びエア浮上搬送装置
WO2007074855A1 (ja) * 2005-12-27 2007-07-05 Harmotec Co., Ltd. 非接触搬送装置
JP2007176638A (ja) * 2005-12-27 2007-07-12 Harmotec Corp 非接触搬送装置
JP2007324382A (ja) * 2006-06-01 2007-12-13 Harmotec Corp 旋回流形成体および非接触搬送装置
JP2008087910A (ja) * 2006-10-02 2008-04-17 Smc Corp 非接触搬送装置
JP2008270626A (ja) * 2007-04-24 2008-11-06 Tokyo Electron Ltd 基板吸着装置及び基板搬送装置
WO2009119377A1 (ja) * 2008-03-24 2009-10-01 オイレス工業株式会社 非接触搬送装置
WO2010004800A1 (ja) * 2008-07-10 2010-01-14 オイレス工業株式会社 旋回流形成体及び非接触搬送装置
JP2010083592A (ja) * 2008-09-29 2010-04-15 Seiko Epson Corp ワーク移動テーブルおよびこれを備えた液滴吐出装置

Also Published As

Publication number Publication date
TWI522298B (zh) 2016-02-21
CN102239093B (zh) 2013-12-18
TW201515975A (zh) 2015-05-01
TWI468330B (zh) 2015-01-11
TW201033102A (en) 2010-09-16
JPWO2010058689A1 (ja) 2012-04-19
KR20110095240A (ko) 2011-08-24
WO2010058689A1 (ja) 2010-05-27
CN102239093A (zh) 2011-11-09
KR101663257B1 (ko) 2016-10-06

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