JP5150518B2 - 半導体装置および多層配線基板ならびにそれらの製造方法 - Google Patents

半導体装置および多層配線基板ならびにそれらの製造方法 Download PDF

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Publication number
JP5150518B2
JP5150518B2 JP2009001253A JP2009001253A JP5150518B2 JP 5150518 B2 JP5150518 B2 JP 5150518B2 JP 2009001253 A JP2009001253 A JP 2009001253A JP 2009001253 A JP2009001253 A JP 2009001253A JP 5150518 B2 JP5150518 B2 JP 5150518B2
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Prior art keywords
insulating layer
wiring board
multilayer wiring
pad
pads
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Expired - Fee Related
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JP2009001253A
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English (en)
Japanese (ja)
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JP2009260255A (ja
JP2009260255A5 (enExample
Inventor
清己 萩原
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Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2009001253A priority Critical patent/JP5150518B2/ja
Priority to PCT/JP2009/000719 priority patent/WO2009118999A1/ja
Publication of JP2009260255A publication Critical patent/JP2009260255A/ja
Priority to US12/707,927 priority patent/US8324740B2/en
Publication of JP2009260255A5 publication Critical patent/JP2009260255A5/ja
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Publication of JP5150518B2 publication Critical patent/JP5150518B2/ja
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    • HELECTRICITY
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    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • H05K1/112Pads for surface mounting, e.g. lay-out directly combined with via connections
    • H05K1/113Via provided in pad; Pad over filled via
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    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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  • Engineering & Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
JP2009001253A 2008-03-25 2009-01-07 半導体装置および多層配線基板ならびにそれらの製造方法 Expired - Fee Related JP5150518B2 (ja)

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