JP5085010B2 - 薄膜トランジスタ及びその製造方法と、薄膜トランジスタを含む平板表示装置及びその製造方法 - Google Patents
薄膜トランジスタ及びその製造方法と、薄膜トランジスタを含む平板表示装置及びその製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 49
- 239000010409 thin film Substances 0.000 title claims description 49
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000010408 film Substances 0.000 claims description 128
- 239000004065 semiconductor Substances 0.000 claims description 64
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 34
- 238000005229 chemical vapour deposition Methods 0.000 claims description 28
- 239000001257 hydrogen Substances 0.000 claims description 23
- 229910052739 hydrogen Inorganic materials 0.000 claims description 23
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 21
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 19
- 238000002425 crystallisation Methods 0.000 claims description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 15
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 15
- 230000008025 crystallization Effects 0.000 claims description 14
- 239000004973 liquid crystal related substance Substances 0.000 claims description 8
- 238000000059 patterning Methods 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 227
- 229910004205 SiNX Inorganic materials 0.000 description 12
- 229910021419 crystalline silicon Inorganic materials 0.000 description 12
- 239000011229 interlayer Substances 0.000 description 12
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 12
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 12
- 230000007547 defect Effects 0.000 description 8
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000002161 passivation Methods 0.000 description 8
- 230000001788 irregular Effects 0.000 description 7
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005525 hole transport Effects 0.000 description 4
- 239000012044 organic layer Substances 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000006735 deficit Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000002779 inactivation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K59/8792—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. black layers
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- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Geometry (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
105、205 非晶質シリコンバッファ層
110、210 第2バッファ層
115、215 半導体層
150、245 画素電極
160、250 画素定義膜、
170、255 発光層
180、260 対向電極
Claims (7)
- 発光領域と非発光領域を備える基板と、
前記発光領域と前記非発光領域全体にわたって形成され、水素を含む非晶質シリコン膜で形成される第1バッファ層と、
前記第1バッファ層上に設けられ、シリコン酸化膜(SiO 2 )またはシリコン窒化膜(SiN x )よりなる第2バッファ層と、
前記第2バッファ層上に設けられた半導体層と、
前記半導体層上に設けられたゲート電極と、
を備え、
前記第1バッファ層の厚さは、500〜1000Åであり、
前記第2バッファ層の厚さは、1000〜3000Åである平板表示装置。 - 前記半導体層は、非晶質シリコン膜を結晶化して形成されたことを特徴とする請求項1に記載の平板表示装置。
- 前記結晶化には、ELA、SLS、MIC及びMILCからなる一群から選択される一つの方法を用いることを特徴とする請求項2に記載の平板表示装置。
- 前記平板表示装置は、有機電界発光表示装置または液晶表示装置であることを特徴とする請求項1に記載の平板表示装置。
- 基板上に非晶質シリコン膜を用いて水素を含むように第1バッファ層を形成する段階と、
前記第1バッファ層上にシリコン酸化膜(SiO 2 )またはシリコン窒化膜(SiN x )よりなる第2バッファ層を形成する段階と、
前記第2バッファ層上に非晶質シリコン膜を形成し、これを結晶化することで半導体層を形成する段階と、
前記半導体層上にゲート絶縁膜を前記基板全面にかけて形成する段階と、
前記ゲート絶縁膜上にゲート電極を形成する段階と、
を含み、
前記第1バッファ層の厚さは、500〜1000Åであり、
前記第2バッファ層の厚さは、1000〜3000Åである薄膜トランジスタの製造方法。 - 発光領域と非発光領域を具備する基板を備える段階と、
前記基板上にCVD方法を用いて水素を含むように非晶質シリコン膜を形成することによって第1バッファ層を形成する段階と、
前記第1バッファ層をパターニングすることによって前記発光領域を露出させる段階と、
前記パターニングされた第1バッファ層上にシリコン酸化膜(SiO 2 )またはシリコン窒化膜(SiN x )よりなる第2バッファ層を形成する段階と、
前記第2バッファ層上に薄膜トランジスタを形成する段階と、
前記薄膜トランジスタ上に前記薄膜トランジスタと電気的に接続する画素電極を形成する段階と、
を含み、
前記薄膜トランジスタは、前記第2バッファ層上に非晶質シリコン膜を形成し結晶化することによって半導体層を形成する段階と、
前記半導体層上にゲート絶縁膜を前記基板全面にかけて形成する段階と、
ゲート電極、ソース電極、及びドレイン電極を形成する段階と、
を含み、
前記第1バッファ層の厚さは、500〜1000Åであり、
前記第2バッファ層の厚さは、1000〜3000Åである平板表示装置の製造方法。 - 前記結晶化には、ELA、SLS、MIC及びMILCからなる一群から選択される一つの方法を用いて実行することを特徴とする請求項6に記載の平板表示装置の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040038528A KR100601374B1 (ko) | 2004-05-28 | 2004-05-28 | 박막 트랜지스터 및 그 제조방법과 박막 트랜지스터를포함하는 평판표시장치 |
KR2004-038528 | 2004-05-28 |
Publications (2)
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JP2005340775A JP2005340775A (ja) | 2005-12-08 |
JP5085010B2 true JP5085010B2 (ja) | 2012-11-28 |
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JP2005068158A Expired - Fee Related JP5085010B2 (ja) | 2004-05-28 | 2005-03-10 | 薄膜トランジスタ及びその製造方法と、薄膜トランジスタを含む平板表示装置及びその製造方法 |
Country Status (4)
Country | Link |
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US (1) | US7554118B2 (ja) |
JP (1) | JP5085010B2 (ja) |
KR (1) | KR100601374B1 (ja) |
CN (1) | CN100481511C (ja) |
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KR101885691B1 (ko) | 2010-07-27 | 2018-08-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제작 방법 |
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JP3845566B2 (ja) * | 2001-10-03 | 2006-11-15 | セイコーエプソン株式会社 | 薄膜半導体装置及びその製造方法並びに当該装置を備える電子デバイス |
KR100894651B1 (ko) * | 2002-07-08 | 2009-04-24 | 엘지디스플레이 주식회사 | 액티브 매트릭스형 유기 전계발광 표시패널 및 그의제조방법 |
KR20040032401A (ko) | 2002-10-09 | 2004-04-17 | 엘지.필립스 엘시디 주식회사 | 박막 트랜지스터 및 그 제조방법 |
JP4245915B2 (ja) * | 2002-12-24 | 2009-04-02 | シャープ株式会社 | 薄膜トランジスタの製造方法及び表示デバイスの製造方法 |
TW573364B (en) * | 2003-01-07 | 2004-01-21 | Au Optronics Corp | Buffer layer capable of increasing electron mobility and thin film transistor having the buffer layer |
JP4547857B2 (ja) * | 2003-01-08 | 2010-09-22 | セイコーエプソン株式会社 | トランジスタの製造方法 |
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2004
- 2004-05-28 KR KR1020040038528A patent/KR100601374B1/ko not_active IP Right Cessation
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2005
- 2005-03-10 JP JP2005068158A patent/JP5085010B2/ja not_active Expired - Fee Related
- 2005-05-09 US US11/124,124 patent/US7554118B2/en active Active
- 2005-05-24 CN CNB2005100738219A patent/CN100481511C/zh not_active Expired - Fee Related
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JP2005340775A (ja) | 2005-12-08 |
KR20050113040A (ko) | 2005-12-01 |
KR100601374B1 (ko) | 2006-07-13 |
US7554118B2 (en) | 2009-06-30 |
CN1702532A (zh) | 2005-11-30 |
CN100481511C (zh) | 2009-04-22 |
US20050263761A1 (en) | 2005-12-01 |
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