JP4790997B2 - プローブ装置 - Google Patents

プローブ装置 Download PDF

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Publication number
JP4790997B2
JP4790997B2 JP2004091046A JP2004091046A JP4790997B2 JP 4790997 B2 JP4790997 B2 JP 4790997B2 JP 2004091046 A JP2004091046 A JP 2004091046A JP 2004091046 A JP2004091046 A JP 2004091046A JP 4790997 B2 JP4790997 B2 JP 4790997B2
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JP
Japan
Prior art keywords
probe
positioning
frame
block
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004091046A
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English (en)
Japanese (ja)
Other versions
JP2005274487A5 (enExample
JP2005274487A (ja
Inventor
一佳 三浦
康晃 小山内
俊雄 福士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2004091046A priority Critical patent/JP4790997B2/ja
Priority to TW093137277A priority patent/TWI255344B/zh
Priority to KR1020040110241A priority patent/KR100673717B1/ko
Publication of JP2005274487A publication Critical patent/JP2005274487A/ja
Publication of JP2005274487A5 publication Critical patent/JP2005274487A5/ja
Application granted granted Critical
Publication of JP4790997B2 publication Critical patent/JP4790997B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2004091046A 2004-03-26 2004-03-26 プローブ装置 Expired - Lifetime JP4790997B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004091046A JP4790997B2 (ja) 2004-03-26 2004-03-26 プローブ装置
TW093137277A TWI255344B (en) 2004-03-26 2004-12-03 Probe system
KR1020040110241A KR100673717B1 (ko) 2004-03-26 2004-12-22 프로브장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004091046A JP4790997B2 (ja) 2004-03-26 2004-03-26 プローブ装置

Publications (3)

Publication Number Publication Date
JP2005274487A JP2005274487A (ja) 2005-10-06
JP2005274487A5 JP2005274487A5 (enExample) 2007-03-01
JP4790997B2 true JP4790997B2 (ja) 2011-10-12

Family

ID=35174303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004091046A Expired - Lifetime JP4790997B2 (ja) 2004-03-26 2004-03-26 プローブ装置

Country Status (3)

Country Link
JP (1) JP4790997B2 (enExample)
KR (1) KR100673717B1 (enExample)
TW (1) TWI255344B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
JP4989911B2 (ja) * 2006-03-31 2012-08-01 株式会社日本マイクロニクス 可動式プローブユニット及び検査装置
TWI339730B (en) * 2006-05-31 2011-04-01 Applied Materials Inc Prober for electronic device testing on large area substrates
JP4808135B2 (ja) * 2006-11-09 2011-11-02 株式会社日本マイクロニクス プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
JP5209215B2 (ja) * 2007-01-17 2013-06-12 株式会社日本マイクロニクス プローブユニット及び検査装置
JP4903624B2 (ja) * 2007-04-17 2012-03-28 株式会社日本マイクロニクス プローブユニット及び検査装置
JP4625826B2 (ja) * 2007-05-21 2011-02-02 東芝テリー株式会社 プローブユニット
JP4936058B2 (ja) * 2007-06-08 2012-05-23 株式会社島津製作所 基板検査装置
JP5491790B2 (ja) * 2009-07-27 2014-05-14 株式会社日本マイクロニクス プローブ装置
JP5470456B2 (ja) * 2010-06-17 2014-04-16 シャープ株式会社 点灯検査装置
CN103235163B (zh) * 2013-03-28 2015-06-03 顺德中山大学太阳能研究院 一种探针间距可调测试太阳能电池接触电阻用测试探头
JP6114615B2 (ja) * 2013-04-05 2017-04-12 モレックス エルエルシー コネクタ嵌合装置、及び電子機器の検査方法
CN104102031A (zh) * 2014-06-17 2014-10-15 京东方科技集团股份有限公司 一种探针器件和检测装置
JP6422376B2 (ja) * 2015-03-06 2018-11-14 三菱電機株式会社 半導体装置検査用治具
KR101732629B1 (ko) 2016-03-04 2017-05-04 가온솔루션 주식회사 멀티 프로브 검사기용 정렬장치
CN106771417B (zh) * 2017-02-28 2023-08-08 厦门宏发工业机器人有限公司 一种电子器件引脚的探针检测机构
CN109270421B (zh) * 2017-07-17 2024-09-27 林上煜 Led测试装置
KR102121887B1 (ko) * 2020-04-03 2020-06-11 주식회사 케이에스디 유기발광 다이오드(oled) 패널 테스트용 가변 프로브 유닛

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0782032B2 (ja) * 1990-01-23 1995-09-06 株式会社日本マイクロニクス 表示パネル用プローブとその組み立て方法
JPH08110363A (ja) * 1994-10-11 1996-04-30 Kobe Steel Ltd フラットパネルの検査装置
JPH09251033A (ja) * 1996-03-15 1997-09-22 Sharp Corp 液晶表示パネルの検査装置
JP3526709B2 (ja) * 1996-11-29 2004-05-17 株式会社日本マイクロニクス 液晶パネルのアライメント装置
JP4280312B2 (ja) * 1996-12-25 2009-06-17 株式会社日本マイクロニクス プローブユニット
JP3206509B2 (ja) * 1997-08-22 2001-09-10 日本電気株式会社 表示パネル用プローブ装置
JP3286578B2 (ja) * 1997-09-19 2002-05-27 中央電子システム株式会社 インサーキットテスタ
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP3350899B2 (ja) * 1999-08-31 2002-11-25 株式会社双晶テック プローブブロックの支持枠体
JP3545655B2 (ja) * 1999-09-08 2004-07-21 株式会社日本マイクロニクス 電気接続装置
JP2002148280A (ja) * 2000-11-08 2002-05-22 Soushiyou Tec:Kk 検査用プローブブロックの並列搭載ユニット
JP4053790B2 (ja) * 2002-03-04 2008-02-27 株式会社日本マイクロニクス 表示用基板検査用ソケット

Also Published As

Publication number Publication date
TW200532208A (en) 2005-10-01
KR100673717B1 (ko) 2007-01-24
KR20050095539A (ko) 2005-09-29
TWI255344B (en) 2006-05-21
JP2005274487A (ja) 2005-10-06

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