KR100673717B1 - 프로브장치 - Google Patents

프로브장치 Download PDF

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Publication number
KR100673717B1
KR100673717B1 KR1020040110241A KR20040110241A KR100673717B1 KR 100673717 B1 KR100673717 B1 KR 100673717B1 KR 1020040110241 A KR1020040110241 A KR 1020040110241A KR 20040110241 A KR20040110241 A KR 20040110241A KR 100673717 B1 KR100673717 B1 KR 100673717B1
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KR
South Korea
Prior art keywords
positioning
probe
frame
movable
block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020040110241A
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English (en)
Korean (ko)
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KR20050095539A (ko
Inventor
미우라가즈요시
오사나이야스아키
후쿠시도시오
Original Assignee
가부시키가이샤 니혼 마이크로닉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니혼 마이크로닉스 filed Critical 가부시키가이샤 니혼 마이크로닉스
Publication of KR20050095539A publication Critical patent/KR20050095539A/ko
Application granted granted Critical
Publication of KR100673717B1 publication Critical patent/KR100673717B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020040110241A 2004-03-26 2004-12-22 프로브장치 Expired - Fee Related KR100673717B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00091046 2004-03-26
JP2004091046A JP4790997B2 (ja) 2004-03-26 2004-03-26 プローブ装置

Publications (2)

Publication Number Publication Date
KR20050095539A KR20050095539A (ko) 2005-09-29
KR100673717B1 true KR100673717B1 (ko) 2007-01-24

Family

ID=35174303

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040110241A Expired - Fee Related KR100673717B1 (ko) 2004-03-26 2004-12-22 프로브장치

Country Status (3)

Country Link
JP (1) JP4790997B2 (enExample)
KR (1) KR100673717B1 (enExample)
TW (1) TWI255344B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
JP4989911B2 (ja) * 2006-03-31 2012-08-01 株式会社日本マイクロニクス 可動式プローブユニット及び検査装置
TWI339730B (en) * 2006-05-31 2011-04-01 Applied Materials Inc Prober for electronic device testing on large area substrates
JP4808135B2 (ja) * 2006-11-09 2011-11-02 株式会社日本マイクロニクス プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
JP5209215B2 (ja) * 2007-01-17 2013-06-12 株式会社日本マイクロニクス プローブユニット及び検査装置
JP4903624B2 (ja) * 2007-04-17 2012-03-28 株式会社日本マイクロニクス プローブユニット及び検査装置
JP4625826B2 (ja) * 2007-05-21 2011-02-02 東芝テリー株式会社 プローブユニット
JP4936058B2 (ja) * 2007-06-08 2012-05-23 株式会社島津製作所 基板検査装置
JP5491790B2 (ja) * 2009-07-27 2014-05-14 株式会社日本マイクロニクス プローブ装置
CN102884567B (zh) * 2010-06-17 2015-01-28 夏普株式会社 点亮检查装置
CN103235163B (zh) * 2013-03-28 2015-06-03 顺德中山大学太阳能研究院 一种探针间距可调测试太阳能电池接触电阻用测试探头
JP6114615B2 (ja) * 2013-04-05 2017-04-12 モレックス エルエルシー コネクタ嵌合装置、及び電子機器の検査方法
CN104102031A (zh) * 2014-06-17 2014-10-15 京东方科技集团股份有限公司 一种探针器件和检测装置
JP6422376B2 (ja) * 2015-03-06 2018-11-14 三菱電機株式会社 半導体装置検査用治具
KR101732629B1 (ko) 2016-03-04 2017-05-04 가온솔루션 주식회사 멀티 프로브 검사기용 정렬장치
CN106771417B (zh) * 2017-02-28 2023-08-08 厦门宏发工业机器人有限公司 一种电子器件引脚的探针检测机构
CN109270421B (zh) * 2017-07-17 2024-09-27 林上煜 Led测试装置
KR102121887B1 (ko) * 2020-04-03 2020-06-11 주식회사 케이에스디 유기발광 다이오드(oled) 패널 테스트용 가변 프로브 유닛

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218472A (ja) * 1990-01-23 1991-09-26 Nippon Maikuronikusu:Kk 表示パネル用プローブとその組み立て方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08110363A (ja) * 1994-10-11 1996-04-30 Kobe Steel Ltd フラットパネルの検査装置
JPH09251033A (ja) * 1996-03-15 1997-09-22 Sharp Corp 液晶表示パネルの検査装置
JP3526709B2 (ja) * 1996-11-29 2004-05-17 株式会社日本マイクロニクス 液晶パネルのアライメント装置
JP4280312B2 (ja) * 1996-12-25 2009-06-17 株式会社日本マイクロニクス プローブユニット
JP3206509B2 (ja) * 1997-08-22 2001-09-10 日本電気株式会社 表示パネル用プローブ装置
JP3286578B2 (ja) * 1997-09-19 2002-05-27 中央電子システム株式会社 インサーキットテスタ
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP3350899B2 (ja) * 1999-08-31 2002-11-25 株式会社双晶テック プローブブロックの支持枠体
JP3545655B2 (ja) * 1999-09-08 2004-07-21 株式会社日本マイクロニクス 電気接続装置
JP2002148280A (ja) * 2000-11-08 2002-05-22 Soushiyou Tec:Kk 検査用プローブブロックの並列搭載ユニット
JP4053790B2 (ja) * 2002-03-04 2008-02-27 株式会社日本マイクロニクス 表示用基板検査用ソケット

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218472A (ja) * 1990-01-23 1991-09-26 Nippon Maikuronikusu:Kk 表示パネル用プローブとその組み立て方法

Also Published As

Publication number Publication date
KR20050095539A (ko) 2005-09-29
TW200532208A (en) 2005-10-01
JP4790997B2 (ja) 2011-10-12
JP2005274487A (ja) 2005-10-06
TWI255344B (en) 2006-05-21

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