KR100673717B1 - Probing apparatus - Google Patents

Abstract

(Problem) It is to facilitate positioning of the probe assembly.

(Solution means) The probe apparatus includes a frame forming an opening, a plurality of probe assemblies arranged in the frame so as to be movable in a first direction extending in-plane parallel to the opening, and a plurality of probe assemblies in the first direction. It includes a positioning tool to hold the position can be released. The positioning tool includes a plurality of positioning members having a plurality of positioning members spaced in the first direction and having a plurality of positioning members having an axis extending in the second direction intersecting the in-plane with the first direction, and a plurality of positioning members, respectively. In order to include any one side of the plurality of recesses which are opened in the second direction and open in the third direction to intersect the surface to each other, each probe assembly includes a positioning member and the other side of the recess.

Description

Probe Device {PROBING APPARATUS}             

1 is a plan view showing one embodiment of a probe device according to the present invention

FIG. 2 is a plan view showing an example in which the arrangement position of the probe assembly is changed in order to apply the probe device shown in FIG. 1 to inspection of different types of display panels. FIG.

3 is a cross-sectional view taken along line 3-3 in FIG.

FIG. 4 is an enlarged view of a part of FIG. 3. FIG.

5 shows the relationship between the positioning tool and the probe assembly.

FIG. 6 is a view similar to FIG. 5 showing a state where a positioning tool is placed on a probe support plate;

7 is a plan view for explaining another member of the positioning tool for Y direction;

FIG. 8 is a cross-sectional view taken along the 8-8 line in FIG.

Fig. 9 is a view for explaining the action of the positioning member and the recess, where (A) shows the state where the positioning member starts to be stored in the recess, and (B) shows that the positioning member is completely stored in the recess. Drawing showing status

10 illustrates an embodiment of a probe assembly.

11 is a cross-sectional view taken along line 11-11 in FIG. 10.

12 is a cross-sectional view showing the relationship between the probe block and the flat cable

13 is a view for explaining the assembly sequence of the probe assembly;

14 is a view for explaining the alignment mark, (A) and (B) is a plan view and a front view of the lower end of the origin mark holder, respectively;

15 is a diagram for explaining an inspection target area of a display panel;

 Explanation of symbols on the main parts of the drawings

10-probe device 12-display board

14a, 14b-Tested area 16a, 16b-Electrode group

20-frame 22-opening

24-frame body 26-movable frame

26a-Middle area of movable frame 28,40,44-Guide rail

30,42,46-Guide member 32,34-Probe mounting plate

36,38-Probe Assembly 50-Probe Block

52-flat cable 54-connection block

56-support block 58-attachment block

62-Positioning Unit 64-Guide Block

66-Probe 68-Electrically insulating block

70-side plate 72-attachment bar

74-Slit Bar 76-Guide Film

78-connector 79-positioning hole

80-positioning pin 81-screw hole

82,90,104,106-Screw member 84-Projection

86-guide part 88-stopper pin

92-pusher 94-adjusting screw

98-linear guide 100-L-shaped member

102-plate base 110,112-first and second member

116-Coupling Pins 118-Elastomers

120-long member 122-positioning member

124-Positioning Pin 126-Setting Pin

128-through hole 130-setting hole

132-Plunger 134-Eccentric Cam

136-cam follower 138-tightening nut

140-Origin mark holder 142,144-Positioning mechanism

146-Clear Glass Plate 148-Origin Marks

150,160-Block 152,162-Coupling Screw

154,164-Auxiliary member 156,166-Adjusting bolt

158,168-Lock nut 170-Compression coil spring

180-Bracket 182-Positioning Pin

184-Adjusting screw 158,168,186-Locking nut

188-Clamp

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device for use in conduction testing of display substrates such as liquid crystal display panels.

A display substrate such as a glass substrate having a thin film transistor array formed on one surface thereof, a liquid crystal display panel encapsulating liquid crystal, or the like is tested (inspection) as to whether or not it has the performance according to the specification. This inspection is generally performed by using a probe device such as a probe unit having a plurality of probes (contactors), and supplying a predetermined electric signal to a predetermined electrode while pressing each contactor to the electrode of the display substrate. Lose.

As one of these types of probe apparatuses, there is one that can be commonly used for conducting tests of different types of display substrates (Patent Document 1).

[Patent Document 1] Japanese Patent Application Laid-Open No. 9-229965

Such a conventional probe apparatus includes a rim-shaped probe base having a quadrangle and a Y side orthogonal to each other, a first movable base disposed on the lateral side of the probe base so as to adjust a position in the Y direction, and The second movable base disposed on the Y side of the probe base to adjust its position in the probe base, the plurality of probe assemblies (probe block) disposed on the first movable base to adjust the position in the X direction, and the Y direction And a plurality of probe assemblies (probe blocks) disposed on the second movable base so as to adjust the position in the chamber.

Each probe assembly is arranged in parallel in an electrically insulating block with a plurality of probes spaced in one direction. The display panel to be inspected is disposed on a chuck top of the inspection apparatus, and the probe device is disposed above the chuck top.

The conventional probe apparatus is different in size, electrode position, and the like by adjusting the positions of the first and second movable bases in the Y and Y directions and the positions of the respective probe assemblies in the Y and Y directions. Commonly used for conducting tests of heterogeneous display panels.

However, in the conventional probe apparatus, the position adjustment of each movable base with respect to the probe base and the position adjustment of each probe assembly with respect to the movable base must be performed by human hands. For this reason, such a positioning operation is complicated and complicated, and as a result, the tip part (needle) of a probe may not correspond with the position of the electrode of a display panel.

An object of the present invention is to facilitate positioning of the probe assembly.

A probe device according to the present invention includes a frame forming an opening, a plurality of probe assemblies disposed in the frame so as to move in a first direction extending in-plane parallel to the opening, and the plurality of probe assemblies in the first direction. And a positioning tool for retaining the position of the probe assembly.

The positioning tool is a plurality of positioning members spaced in the first direction, a plurality of positioning members having an axis extending in the second direction intersecting the first direction, and the plurality of positioning members. And one of a plurality of recesses opened in the second direction and opened in a third direction intersecting the surface to accommodate each of the probe assemblies, wherein each probe assembly includes the positioning member and the other side of the recess. Include.

(The best form to carry out invention)

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described based on drawing.

1 to 4, the probe apparatus 10 is used for an inspection apparatus in which a glass substrate on which a thin film transistor array for a liquid crystal display panel is formed is used as a display substrate 12. As shown in FIG. The glass substrate is a large glass substrate made up of a plurality, and has a rectangular shape.

In the following description, the direction of the short side of the display substrate 12 is called the X direction, the direction of the long side is called the Y direction, and the thickness direction is called the Z direction or the vertical direction.

The glass substrate shown in Fig. 1 is a substrate composed of 18 pieces which finally obtain 3x6 substrates from one substrate. The glass substrate shown in Fig. 2 is a substrate composed of 2x3 pieces. However, even if the types of glass substrates are different, the same reference numerals are used.

In the following description, for simplicity, each of the inspected regions 14a of the glass substrate shown in FIG. 1 and each of the inspected regions 14b of the glass substrate shown in FIG. 2 may have different electrodes as shown in FIG. The arrangement pitches of the groups 16a and 16b are different, but the arrangement pitches (arrangement pitches) of the electrodes in the electrode groups 16a and 16b are the same.

When the same screen is displayed on the display panel 12 as described above, a difference occurs in resolution, but is energized by electrodes at the same arrangement position in the same electrode groups 16a and 16b. The display panel 12 is disposed on the chuck saw 18 (see FIG. 3) mounted on the inspection stage of the inspection apparatus.

1 to 4, the probe device 10 includes a frame 20. The frame 20 arranges the plurality of movable frames 26 extending in the X direction on the frame main body 24 having the rectangular opening 22 at intervals in the Y direction. The intermediate region 26a of each movable frame 26 in the X direction has an inverted L-shaped cross section that reaches the opening 22.

The movable frame 26 is attached to both ends of each of the movable frames 26 and a pair of guide rails 28 attached to the frame body 24 in a state extending in the Y direction at intervals in the Ⅹ direction. The guide member 30 fitted from the upper side 28 is combined with the frame main body 24 so as to be movable in the Y direction.

The frame 20 further includes a pair of probe attachment plates 32 extending in the Y direction facing the frame main body 24 in the 부착 direction, and attach the probe attachment plates 34 extending in the X direction to each movable frame. It is attached to (26).

A plurality of probe groups each including a plurality of probe assemblies 36 are arranged at intervals in the Y direction on the probe mounting plate 32 on one side in the Y direction. The plurality of probe assemblies 36 of each probe group are used simultaneously for the inspection of one inspection region 14a or 14b and spaced in the Y direction.

A plurality of probe assemblies 38 for the X direction are attached to each probe mounting plate 34 at intervals in the X direction. The plurality of probe assemblies 38 of each probe mounting plate 34 form a group of probes for the X direction used simultaneously for the inspection of one inspection region 14a or 14b.

The probe assembly 36 includes a guide rail 40 (see FIG. 11) attached to the probe mounting plate 32 in a Y-direction, fitted to the guide rail, and attached to each probe assembly 36. The guide member 42 (refer FIG. 11) is supported by being combined with the probe attachment plate 32 so that it can move to a Y direction.

The probe assembly 38 of each probe group fits with the guide rail 44 (refer to FIG. 11) attached to the corresponding probe mounting plate 34 extending in the Ⅹ direction, and the guide rail 44. The guide member 46 (see FIG. 11) attached to each probe assembly 38 is supported by being combined with the probe attachment plate 34 so as to be movable in the X direction.

The guide rails 28, 40, 44 and the guide members 30, 42, 46 may each be a linear guide rail and a linear guide member of the linear guide. Any of the guide members 30, 42, 46 can be moved manually.

Each of the probe assemblies 36 and 38 includes one probe block 50, a flat cable 52, and a flat cable 52 as shown in FIGS. 9 to 13. Attachment block 54 for connecting to 50, support block 56 for supporting the probe block 50, and attachment for attaching the support block 56 to the probe mounting plate 32 (or 34). A block 58 and a guide block 64 for associating the attachment block 58 with the positioning tool 62 described below.

Each probe block 50 extends a plurality of probes 66 each having a sharp tip end point and a rear end point tip, in which they are spaced in the Y (or Y) direction in the Y (or Y) direction. It arrange | positions in parallel to the electrically insulating block 68 in the state to become.

Each probe 66 is a blade-type contact whose center region is shaped like a band. The front end and the rear end of each probe 66 have a width dimension smaller than that of the center area, and protrude forward and backward from the lower end and the upper end of the center area, respectively. The tip needle tip and the rear tip tip of each probe 66 project downward and upward from the tip and the rear end, respectively.

Each electrically insulating block 68 has a recess open downward, and a pair of side plates 70 and a pair of electrically insulating attachment bars so that the probe 66 is located at the center thereof. 72) are assembled and supported so as not to be moved by suitable assembling means such as a screw member (not shown). The central regions of adjacent probes 66 are opposite.

Each probe assembly 36 (or 38) further arranges an electrically insulating slit bar 74 at the front end and the rear end of the insulating block. Each slit bar 74 has a plurality of slits which extend in the Ⅹ (or Y) direction at intervals in the Y (or Ⅹ) direction and open downward.

Each slit contains a front end portion or a rear end portion of the probe 66. As a result, the contact between the adjacent probes 66 is prevented, and the arrangement pitch of the adjacent probes 66 is maintained at the arrangement pitch of the electrodes of the display panel 12.

Each flat cable 52 is formed of a plurality of wires extending in the longitudinal direction (Y or Ⅹ direction) at intervals in the width direction (Ⅹ or Y direction) on a surface of one side of the electrically insulating film. The wiring is attached to the lower surface of the connection block 54 in a state where the wiring is lowered at one end in the longitudinal direction.

An electrically insulating guide film 76 is adhered to the lower surface of one end of the flat cable 52. The guide film 76 has a plurality of guide holes spaced in the width direction in the flat cable 52 that accommodates the needle tip of the rear end of the probe 66.

The arrangement pitch of the wiring and the arrangement pitch of the guide hole are the same as the arrangement pitch of the probe 66 of the corresponding probe assembly 36 (or (38)). The guide film 76 is attached to the flat cable 52 in a state where the wiring of the flat cable 52 is exposed from the guide hole of the guide film 76.

Each electrically insulating block 68 has an L-shaped stepped portion facing upwards and rearwards at its rear end, and each connection block 54 has an inverted L-shaped stepped downward facing forward and forwardly at its front end. Equipped. The electrically insulating block 68 and the connecting block 54 face both ends. Each flat cable 52 is connected to the electrical circuit of the inspection apparatus by the connector 78 provided at the other end thereof.

The electrically insulating block 68 and the connecting block 54 include a plurality of positioning pins 80 extending downward from the connecting block 54 and inserted into the positioning holes 79 of the electrically insulating block 68. The rear end needle tip of the probe 66 is guide hole of the guide film 76 by a plurality of screw members 82 penetrating through the connection block 54 and screwed into the screw holes 81 of the electrically insulating block 68. It is accommodated in the state and couple | bonded in the state pressed by the wiring of the flat cable 52.

Each probe block 50 has a protrusion 84 extending in the longitudinal direction of the probe 66 on the electrically insulating block 68. The protruding portion 84 is fitted to the guide groove of the guide portion 86 formed in the lower portion of the support block 56 to move in the longitudinal direction of the probe 66.

Each probe block 50 has a support block 56 by a screw member 90 in a state where a stopper pin 88 protruding upward from the front upper portion thereof abuts against the distal end surface of the guide portion 86. It is attached so that it is removable. The screw member 90 penetrates the support block 56 in the vertical direction and is screwed to the probe block 50.

The pair of probe blocks 50 with respect to the support block 56 in the arrangement direction of the probes 66 is arranged at a position on one side of the guide portion 86 at intervals in the longitudinal direction of the probes 66. The probe block 50 is pressed by the pusher 92 at the opposing position of the guide portion 86 and held.

Each support block 56 is suspended from the attachment block 58 by an adjustment screw 94 screwed to the support block 56 through the attachment block 58 in the vertical direction. It is supported by the plurality of elastic bodies 96 disposed between the attachment blocks 58 downward.

The height position of the support block 56 relative to the attachment block 58 can be adjusted by adjusting the amount of twisting of the adjustment screw 94 with respect to the support block 56. The support block 56 is coupled to the attachment block 58 to be moved up and down by the linear guide 98 using the linear guide member and the linear guide rail.

Each attachment block 58 is a probe attachment plate 32 by an L-shaped member 100 to which a support block 56 is attached, and a guide rail 40 or 44 and a guide member 42 or 46. Or a plate-shaped base 102 assembled to 34. The L-shaped member 100 and the plate-shaped base 102 extend in the arrangement direction of the probe 66 and are detachably coupled to each other by a pair of screw members 104.

Each support block 56 is coupled to the plate-shaped base 102 by a linear guide rail 98 so as to be movable upward and downward. Each guide block 64 is attached to the plate-shaped base 102 by a pair of screw members 106.

As shown in Figs. 9 to 11, each guide block 64 is a U-shaped concave that is opened in both the longitudinal direction and upward of the probe 66 by the first and second members 110 and 112. The point 114 is formed.

The first member 110 is a plate-like member having an L-shaped cutout (stepped portion) at one end thereof, and is attached to the plate-shaped base 102 by a screw member 106.

On the other hand, the plate-shaped member arrange | positioned at the side of the 1st member 110 so that the 2nd member 112 may act as the U-shaped recessed part 114 jointly with the 1st member 110. FIG. to be.

The second member 112 is rotatably angularly about an axis extending in the longitudinal direction of the probe 66 with respect to the first member 110 by a pair of coupling pins 116 spaced up and down. Are combined.

Each coupling pin 116 extends from the second member 112 to the opposite side thereof so that it penetrates the first member 110 in the arrangement direction of the probe 66, and at the one end thereof, the second member ( 112) is screwed on and supported.

Although the second member 112 is supported in the direction of approaching the first member 110 by the elastic body 118 disposed on the coupling pin 116, the upper and lower positions of the coupling pin 116 is screwed. Further angular rotation is prevented by the points on both sides contacting the first member 110.

The upper portion of the concave portion 114 is an inclined guide surface in which the width dimension is smaller by the lower portion.

In the probe assemblies 36 and 38 as described above, the first assembly operation of assembling the flat cable 52 and the connection block 54, the probe block 50, the support block 56, and the attachment block. The second assembling work for assembling the (58) is performed separately, and thereafter, the connection block 54 can be assembled by joining the probe block 50.

The assembled probe assemblies 36 and 38 are finally attached to the probe attachment plates 32 and 34 in the attachment block 58, respectively. This facilitates the assembly work of the probe assemblies 36 and 38 and the attachment work of the probe assemblies 36 and 38 to the probe mounting plates 32 and 34.

The probe block 50 having the plurality of probes 66 mounted on the electrically insulating block 68 has a protrusion 84 of the guide portion 86 of the support block 56 as shown in FIG. It is engaged with the guide groove, and as shown in FIG. 13 (B), the stopper pin 88 abuts against the front end face of the guide portion 86, and then, as shown in FIG. 13 (B), the screw member 90 ) Is coupled to the support block 56 by screwing into the electrically insulating block 68.

At the time of the attachment operation, since the flat cable 52 is not attached to the probe block 50, the attachment operation of the probe block 50 to the support block 56 is facilitated.

As shown in Figs. 13 (B) and (C), the connecting block 54 to which the flat cable 52 is mounted has a positioning pin 80 formed at the connecting block 54 first to be electrically insulated. 68 is inserted into the positioning hole 79 provided in 68, and is then assembled to the probe block 50 by screwing the screw member 82 into the screw hole 81 provided in the electrically insulating block 68. .

Therefore, since the wiring of the probe 66 and the flat cable 52 is correctly connected electrically just by assembling the connection block 54 to the electrically insulating block 68, the connection block to the electrically insulating block 68 is made. The assembling work of 54 is also facilitated.

Each positioning tool 62 is provided for each probe group and is detachably attached to the upper side of the probe mounting plate 32 or 34. Each positioning tool 62 has a positional relationship according to the type of the display panel 12 to be inspected on the probe mounting plate 32 or 34 of the plurality of probe assemblies 36 or 38 of the corresponding group. It is used for attaching so as to hold and position with.

As shown in Figs. 4 to 11, each positioning tool 62 is each pillar detachably attached to the probe attachment plate 32 (or 34) in a state extending in the Y (or Ⅹ) direction. A movable member 120 having a shape, a plurality of positioning members 122 disposed on the movable member 120 at intervals in the Y (or 또는) direction, and the probe mounting plate 32 (or 34). } A pair of positioning pins 124 extending upward from two spaced apart positions in the Y (or Ⅹ) direction, and penetrates two places outside the positioning pins 124 of the movable member 120 to move up and down. And a pair of setting pins 126 extending in the direction.

The movable member 120 includes a pair of through holes 128 through which the positioning pin 124 penetrates, and a pair of setting holes 130 through which the setting pin 126 penetrates. The plunger 132 which releasably engages in the upper part is provided in the position regarding the setting hole 130. As shown in FIG.

As shown in Figs. 10 and 11, each positioning member 122 includes a roller having a rotation axis extending in the Ⅹ (or Y) direction. Each roller attaches a circular eccentric cam 134 to the movable member 120 so as to be able to change its position around its axis of rotation, and a circular cam follower 136 around its eccentric cam 134. The fastening nut 138 is screwed to the eccentric cam 134.

The eccentric direction of the eccentric cam 134 around the rotation axis is maintained by fastening and fixing the eccentric cam 134 to the movable member 120 by the fastening nut 138.

Adjustment of the eccentric direction of the eccentric cam 134 loosens the fastening state to the eccentric cam 134 to the movable member 120 by the fastening nut 138, and rotates the eccentric cam 134 angularly in that state. It can adjust by making it.

The eccentric direction after the adjustment is maintained by fastening the eccentric cam 134 to the movable member 120 again with the fastening nut 138.

The cam follower 136 has an outer diameter substantially equal to the width dimension of the recess 114 so that it is accommodated in the recess 114 of the probe assembly 36 (or 38).

As shown in FIGS. 4-9, the movable member 120 allows the setting pin 126 to pass through the setting hole 130, the plunger 132 to engage the upper end of the setting pin 126, and positions It is arrange | positioned on the probe support plate 32 (or 34) in the state which accommodated the crystal pin 124 in the through-hole 128. FIG.

Thus, as shown in FIG. 5, the movable member 120 and the positioning member 122 are positioned upwardly away from the probe attachment plate 32 or 34 and the probe assembly 36 or 38, respectively. Is temporarily held on.

In this state, the relative positional relationship between the positioning tool 62 and the inspected region 14a (or 14b) is adjusted. For this reason, each through hole 128 is a long hole in the longitudinal direction of the movable member 120, the origin mark holder 140 is attached to the movable member 120, and the probe attachment plate 32 (or The movable member 120 is provided with a pair of positioning mechanisms 142 and 144 for adjusting the position of the movable member 120 in the Y (or Ⅹ) direction with respect to (34)}.

The origin mark holder 140 is attached to the movable member 120 in a state extending downward from the movable member 120 toward the display panel 12.

As shown in FIG. 14, the lower end of the origin mark holder 140 is bent in parallel with the display panel 12. The transparent glass plate 146 is attached to the lower end of the origin mark holder 140, and the origin mark 148 is formed on the glass plate 146.

The origin mark 148 can have the same shape as the origin mark formed in the inspection region 14a (or 14b) of the display panel 12, for example, a cross shape.

The positioning mechanism 142 on one side adjusts the position in the longitudinal direction thereof to the movable member 120 by the coupling screw 152 by attaching a block 150 that can contact the positioning pin 124. The auxiliary member 154 having a screw hole extending in the longitudinal direction of the movable member 120 is immovably attached to the movable member 120, and the adjusting bolt 156 is attached to the screw hole of the auxiliary member 154. It is screwed in.

The position of the block 150 in the longitudinal direction of the movable member 120 is previously adjusted, and the block 150 is detachably fixed to the movable member 120 by the coupling screw 152 in the state. It is.

Adjusting bolt 156 is a state in which the positioning tool 62 is disposed on the probe support plate 32 (or 34), the front end portion of the block 150 abuts the positioning pin 124 on one side In the state, it is held by the fixing nut 158.

The other positioning mechanism 144 is capable of adjusting its position in the longitudinal direction to the movable member 120 by another coupling screw 162 to another block 160 that can be contacted with the positioning pin 124. The other auxiliary member 164 having a through hole extending in the longitudinal direction of the movable member 120 to be movable to the movable member 120, and the other adjusting bolt 166 to the auxiliary member 164. Is letting pass.

The other side adjusting bolt 166 is supported by the other end block 160 in the shape of a cantilever, and the other fixing nut 168 is screwed on the other end side. The adjusting bolt 166 is supported by the compression coil spring 170 in a state where the fixing nut 168 is in contact with the auxiliary member 164.

The block 160 is freed in the longitudinal direction of the movable member 120 by loosening the coupling screw 162 until the positioning tool 62 is disposed on the probe support plate 32 (or 34). It is movable.

However, if the positioning tool 62 is disposed on the probe support plate 32 (or 34) and the positioning of the positioning tool 62 is performed, the block 160 is pressed against the positioning pin 124. It is held by the coupling screw 162 in a closed state.

Positioning of the positioning tool 62 presses down the movable member 120 to release the engagement of the plunger 132 and the setting pin 126, and passes both positioning pins 124 through the movable member 120. This is done by doing.

The above position adjustment can be performed by positioning the positioning mechanisms 142 and 144 such that the blocks 150 and 160 are pressed against the positioning pins 124 and 124, respectively. . After this position adjustment, the other block 160 is attached to the movable member by a coupling screw 162 so as to be immovable.

In the above position adjustment, the amount of twisting of the adjustment bolt 156 with respect to the screw hole of the auxiliary member 154 may be adjusted.

The movable member 120 passes through the pair of mounting screws 172 through the movable member 120 while being screwed to the probe mounting plate 32 or 34 in a state where it is positioned, whereby the probe mounting plate 32 is provided. Or detachably attached to (34).

Each probe assembly 36 (or 38) has a positioning member 122 corresponding to it by an operator in a state where the engagement between the plunger 132 and the setting pin 126 is engaged, as shown in FIG. ) Is moved to the position where the recess 114 is stored.

After each probe assembly 36 (or 38) is moved to a predetermined position, the movable member 120 releases the plunger 132 and the setting pin 126 and releases both the positioning pins 124. In the state penetrated through the movable member 120, it is pushed down and placed on the probe support plate 32 (or 34).

Even if there is a slight shift in the positions of the concave portion 114 and the positioning member 122 in the longitudinal direction of the movable member 120, this position shift causes both positioning pins 124 to penetrate the through-hole 128. When penetrating, it is naturally modified.

That is, since the positioning member 122 abuts against the inclined guide surface of the upper portion of the concave portion 114 as shown in Fig. 9 (A), as shown in Fig. 9A, as shown in Fig. 9B. The probe assembly 36 (or 38) is moved in the longitudinal direction of the movable member 120 until it is completely stored in the recess 114. Thereby, the position shift of the recessed part 114 and the positioning member 122 is corrected.

In correcting the misalignment, since the cam follower 136 rotates the inner surface forming the recess 114, the positioning member 122 is securely received in the recess 114 and the probe assembly 36 { Or (38)}.

As shown in Fig. 9A, when the positioning member 122 first contacts the second member 112, the positioning member 122 moves the second member 112 to the first member 110. As shown in FIG. It moves inwardly of the concave point 114 while inclining with respect to the holding force of the elastic body 118 with respect to).

However, when the positioning member 122 reaches the inside of the recess 114, since the second member 112 is returned to the original state by the elastic body 118, the recess 114 and the positioning member ( The position shift of 122) is corrected correctly.

The working effect obtained by the recess 114 and the positioning member 122 is that the recess 114 is formed in the positioning tool 62, and the positioning member 122 is attached to the probe assemblies 36 and 38. FIG. Even if equipped, it can obtain.

As shown in Fig. 8 and Fig. 9, each positioning tool 62 attached to the probe mounting plate 32 for the Y direction is movable for the position adjustment of the movable frame 26 in the Y direction. A bracket 180 screwably fixed to the member 120 and a positioning pin 182 supported in the cantilever shape on the movable frame 26 in a state extending in the Y direction.

The bracket 180 has a screw hole penetrating the upper end portion in the Y direction, and the adjusting screw 184 is screwed into the screw hole. The adjustment screw 184 is prevented from moving by the pair of fixing nuts 186.

In the positioning pin 182, the movable frame 26 is screwed in the one end part, it extends toward the adjustment screw 184, and is in contact with the end surface of the adjustment screw 184. As shown in FIG.

The position of the movable frame 26 in the Y direction loosens the screwing state of the fixing nut 186 to the adjusting screw 184, and twists the adjusting screw 184 to the screw hole of the bracket 180. It can adjust by adjusting the quantity to put. After adjustment, the adjustment screw 184 is immovably held relative to the bracket 180 by the fixing nut 186.

When the position of the movable frame 26 in the Y direction is adjusted, the movable frame 26 is movable with the positioning pin 182 in contact with the adjustment screw 184 with respect to the frame main body 24. Releasably held by a pair of clamps 188 disposed at both ends of the frame 26.

Instead of placing the positioning pins 182 and the adjustment screws 184 on the movable frame 26 and the bracket 180, respectively, the positioning pins 182 and the adjustment screws 184 are moved to the bracket 180 and the movable, respectively. You may arrange | position to the frame 26.

In the probe apparatus 10, the interval of the positioning member 122 in the first direction or the interval of the recess 114 in the first direction differs depending on the type of the display panel 12 to be inspected. A plurality of positioning tools 62 are prepared in advance.

When changing the type of the display panel 12 to be inspected, the positioning tool 62 according to the type of the new display panel is selected, and each positioning member 122 thereof is accommodated in the recess 114. In addition, the probe assembly 36 or 38 is moved, and the positioning tool 62 is positioned in the frame 20. This allows the probe assembly 36 or 38 to be positioned at a position along the new kind of display panel 12.

(Industrial availability)

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit thereof.

In the probe apparatus according to the present invention, a plurality of positioning tools having different positions of the positioning member or the concave portion in the first direction are prepared in advance.

When changing the type of display panel to be inspected, the positioning tool according to the new display panel is selected, and the probe assembly is moved so that each positioning member thereof is received in the recess, and the positioning tool is framed. Is located in. This allows the probe assembly to be positioned at a position according to a new kind of display panel.

When the positioning member is received in the recess, the probe assembly is naturally held at the position determined by the positioning tool. Therefore, the position of the probe assembly can be easily adjusted, and as a result, the needle tip of the probe can be precisely and easily matched to the position of the electrode of the display panel.

The positioning tool is a movable member detachably attached to the frame in a state extending in the first direction, and a plurality of rollers each acting as the positioning member to space the movable member in the first direction. It may include a roller having a rotation axis extending in the second direction, attached in a placed state, each probe assembly may include a guide block having the concave portion. In this case, the roller is easily stored in the recess, so even if the relative position of the roller and the recess in the first direction is slightly shifted, the roller is stored in the recess, whereby the probe assembly is moved in the first direction. The concave portion and further the position of the probe assembly with respect to the electrode of the panel for adjustment are adjusted.

The roller may have a circular eccentric cam attached to the movable member to change the position around the axis of rotation and a circular cam follower disposed on the eccentric cam so as to be displaceable around it. Can be. In this way, by adjusting the eccentric direction of the eccentric cam around the rotation axis and fixing the eccentric cam in such a position as to be releasable, the tip of the probe can be accurately positioned on the electrode of the display panel.

The guide block includes a first member having an L-shaped cutout at one end, and a second member disposed at a location of the first member in the first direction to cause the cutout to act as the recess. And an engaging pin for angularly rotatably coupling the second member to the first member about an axis extending in the second direction, and in the direction in which the second member approaches the first member. It may be provided with an elastic body holding the coupling pin. In this way, even if the position of the recess in the first direction is slightly shifted with respect to the positioning member, the positioning member is completely accommodated in the recess, whereby the probe assembly is accurately positioned with respect to the positioning member.

The positioning tool further includes a setting pin extending through the movable member in the third direction and extending toward the frame, a plunger disposed in the movable member so as to be locked to the setting pin, and through the movable member the frame. It may include an attachment screw screwed to.

The positioning tool further includes a pair of positioning pins extending in the third direction at two positions of the frame spaced in the first direction and penetrating the movable member, and as a pair of blocks disposed on the movable member. A pair of blocks that can contact any one of a location on the center side and a location on the end side in the first direction of the positioning pin; a coupling screw for attaching the block to the movable member; and in the first direction. A pair of adjustment screws screwed to the movable member so as to be extended to abut on a position opposite to the positioning pin of the block on one side, and the block on the other side to contact the block on the one side with the adjustment screw. It may include a spring to touch.

The frame may include a frame main body having the opening and a movable frame supported by the frame main body so as to be movable in the second direction, and the probe assembly and the positioning tool may be disposed on the movable frame.

A plurality of the movable frame is supported on the frame body at intervals in the second direction, a plurality of probe groups each of which includes the plurality of probe assemblies are supported on the movable frame, and the plurality of the positions Crystal balls may be provided in the movable frame, respectively. In this way, it can be used for the inspection of a plurality of display panels made in the second direction.

The probe apparatus further includes a plurality of second probe assemblies disposed on the frame at one end side of the opening in the first direction and spaced in the second direction and movable in the second direction. And a plurality of second positioning tools for releasably determining the position of the second probe assembly in the second direction, wherein the second positioning tools are attached at intervals in the second direction. A plurality of second positioning members, each of the plurality of second positioning members each having an axis extending in the first direction, and the first direction and the first to receive the plurality of second positioning members, respectively. Any one side of the plurality of second recesses open in three directions, each second probe assembly may include the second positioning member and the other side of the second recess. In this way, it can be used for the inspection of the display panel in which a plurality of electrodes are arranged in each of the first and second directions.

A plurality of probe groups each including the plurality of second probe assemblies are arranged in the frame at intervals in the second direction and movable in the second direction, and the second positioning tool is Each probe group may be provided. In this way, it can be used for the inspection of a plurality of display panels each in the first and second directions.

The second positioning tool includes a second movable member detachably attached to the movable frame in a state extending in the second direction, a bracket attached to the second movable member, any of the movable frame and the bracket. A positioning pin which is supported on one side and extends in the second direction and extends toward the other side of the movable frame and the bracket, and the positioning pin is brought into contact with the other side of the movable frame and the bracket. And a clamp for releasably holding the movable frame to the frame.

The bracket may have a screw hole penetrating it in the second direction and an adjusting screw screwed to the screw hole to abut the positioning pin.

Claims (12)

Release the positions of the frame forming the opening, the plurality of probe assemblies disposed in the frame so as to move in a first direction extending in-plane parallel to the opening, and the plurality of probe assemblies in the first direction. Includes a positioning tool to hold it, The positioning tool includes a plurality of positioning members having a plurality of positioning members spaced in the first direction, the plurality of positioning members having an axis extending in the second direction intersecting the first direction, and the plurality of positioning members. One side of the plurality of recesses which are opened in the second direction and open in the third direction to intersect the surface for accommodating the members, respectively, wherein each probe assembly is formed of the positioning member and the recesses. Probe device comprising the other side. The method according to claim 1, The positioning tool is a movable member detachably attached to the frame in a state extending in the first direction, and a plurality of rollers each acting as the positioning member and spaced apart from the movable member in the first direction. A roller having a rotation axis extending in the second direction, attached in a state where Each probe assembly includes a guide block having the concave portion. The method according to claim 2, The roller has a circular eccentric cam attached to the movable member so that the position around the axis of rotation can be changed, and a circular cam follower disposed on the eccentric cam so as to be displaceable around it. Probe device, characterized in that. The method according to claim 2, The guide block includes a first member having an L-shaped cutout at one end thereof, and a second member disposed at a location of the first member in the first direction to cause the cutout to act as the recess. A member, an engaging pin for rotatably engaging the second member to the first member about an axis extending in the second direction, and in a direction in which the second member approaches the first member. And an elastic body holding the coupling pin. The method according to claim 2, The positioning tool further includes a setting pin extending through the movable member in the third direction and extending toward the frame, a plunger disposed in the movable member so as to be locked to the setting pin, and passing through the movable member. Probe device comprising an attachment screw screwed to the frame. The method according to claim 2, The positioning tool further comprises a pair of positioning pins extending in the third direction from the frame at intervals in the first direction and penetrating the movable member; A pair of blocks arranged on the movable member, the pair of blocks capable of coming into contact with any one of a location on the center side and a location on the end side of the positioning pin in the first direction; A coupling screw attaching the block to the movable member; A pair of adjustment screws screwed to said movable member so as to extend in said first direction and abut on a location on the opposite side to said positioning pin of said block on one side; And a spring for holding the block on the other side to contact the block on the one side and the adjusting screw. The method according to claim 1, The frame includes a frame body having the opening, and a movable frame supported by the frame body to be movable in the second direction, And the probe assembly and the positioning tool are arranged on the movable frame. The method according to claim 7, A plurality of the movable frame is supported on the frame body at intervals in the second direction, a plurality of probe groups each of which includes the plurality of probe assemblies are supported on the movable frame, and the plurality of the positions And a crystal ball is provided in the movable frame, respectively. The method according to claim 7, Further, on the one end side of the opening in the first direction, a plurality of second probe assemblies disposed in the frame at intervals in the second direction and movable in the second direction, and the first A plurality of second positioning spheres for releasably determining the position of said second probe assembly in two directions, The second positioning tool is a plurality of second positioning members attached in a spaced apart state in the second direction, a plurality of second positioning members each having an axis extending in the first direction, and the plurality of One of a plurality of second recessed portions opened in the first direction and the third direction to respectively receive the second positioning member of Each second probe assembly includes the second positioning member and the other side of the second concave portion. The method according to claim 9, A plurality of probe groups each including the plurality of second probe assemblies are arranged in the frame at intervals in the second direction and movable in the second direction, and the second positioning tool is Probe device provided for each probe group. The method according to claim 9, The second positioning tool includes: a second movable member detachably attached to the movable frame in a state extending in the second direction; A bracket attached to the second movable member, A positioning pin which is supported on one side of the movable frame and the bracket in a state extending in the second direction and extends toward the other side of the movable frame and the bracket; And a clamp for releasably holding the movable frame to the frame while the positioning pin is brought into contact with the movable frame and the other side of the bracket. The method according to claim 11, And said bracket has a screw hole penetrating it in said second direction and an adjusting screw screwed to said screw hole to abut said positioning pin.

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