JP4171148B2 - Probe device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a probe apparatus used for inspecting a plate-like object such as a liquid crystal panel and an integrated circuit.
[0002]
In the present invention, one direction and the other direction in a plane parallel to the object to be inspected are referred to as the front-rear direction (first direction) and the left-right direction (second direction), respectively, and the direction perpendicular to the object to be inspected is up and down. It is called direction (third direction).
[0003]
[Prior art]
In general, flat inspection objects such as integrated circuits and liquid crystal panels are inspected using a probe device such as a probe card. One type of this type of probe device uses a probe sheet in which a plurality of wirings extending in parallel with each other are formed on one surface of an electrically insulating film and a part of each wiring is used as a probe element.
[0004]
The probe device using such a probe sheet does not require a needle stand operation as compared with a needle type probe device using a probe formed from a thin metal wire and a blade type probe device using a blade-like probe. Therefore, it is easy to manufacture and inexpensive.
[0005]
Various probe devices using a probe sheet have been proposed and put into practical use. Such probe devices generally have one or more probe sheets assembled on a common substrate. However, since the size of the object to be inspected, the number of electrodes, the arrangement pitch of the electrodes, and the like vary depending on the type of the object to be inspected, in the conventional probe device, each time the type of the object to be inspected is changed, It must be replaced with a probe device corresponding to the object to be inspected.
[0006]
Such replacement of the probe device becomes more difficult as the probe device becomes larger. In particular, in a probe device for a liquid crystal panel, since the liquid crystal panel itself is large, the probe device itself becomes large and replacement is more difficult.
[0007]
[Problems to be solved]
As in the case of a needle type probe device, it is conceivable to divide the probe elements into a plurality of element groups by removably assembling a plurality of probe blocks having probe sheets arranged on the probe holder to the probe base.
[0008]
In such a probe device, it is important to facilitate attachment / detachment of each probe block to / from the probe base.
[0009]
[Solution, action and effect]
A probe device according to the present invention includes a probe sheet in which a plurality of wirings extending in the front-rear direction at intervals in the left-right direction are formed on an electrically insulating film, and a mounting portion having a lower surface on which the probe sheet is mounted. A probe holder provided on the upper surface, and a probe holder provided on the upper surface with one of a convex portion extending in the front-rear direction and a concave portion extending in the front-rear direction to receive the convex portion, and the probe holder is disposed A plate-like probe base, which is provided with the other of the convex portion and the recess on the lower side, and one or more screw members for releasably assembling the probe holder to the lower side of the probe base. Assembly means provided.
[0010]
In the probe sheet, the probe device and the object to be inspected are relatively moved in the vertical direction, whereby the contact portion at the tip of each wiring is pressed against the electrode of the object to be inspected. In this state, each wiring is energized, and the inspection object is inspected.
[0011]
When the type of the object to be inspected is changed or the probe sheet is damaged, the probe sheet and the probe holder are exchanged. This replacement work is performed as follows.
[0012]
First, the screw member of the assembly means is loosened. Thereby, the assembly of the probe holder to the probe base is released.
[0013]
Next, the probe holder is pulled forward from the probe base together with the probe sheet attached thereto. Thereby, the probe holder is removed from the probe base.
[0014]
Next, a new probe holder equipped with a probe sheet corresponding to the type of the object to be inspected is placed on the probe base. At this time, the probe holder is moved from the front to the rear with respect to the probe base in a state where the convex portion formed on one of the probe holder and the probe base is fitted in the recess formed on the other.
[0015]
Next, the probe holder is assembled so as to be immovable on the probe base by the screw member of the assembling means.
[0016]
As described above, according to the present invention, the probe holder can be attached to and detached from the probe base by tightening and loosening the screw member and moving the probe holder in the front-rear direction with respect to the probe base. The probe holder can be easily attached and detached.
[0017]
In the probe apparatus according to the present invention, the probe holder further includes a groove that opens upward and rearward, has a convex cross-sectional shape and extends in the front-rear direction, and the screw member includes: The first screw member that penetrates the probe base in the thickness direction, has a flange-shaped head at the lower end, and the lower end is received in the groove so as to be relatively movable in the longitudinal direction of the groove. A first screw member; and a second screw member that is above the probe base and screwed into the first screw member. Therefore, according to the present invention, the probe holder can be moved to the probe base by sandwiching the portion forming the upper surface of the groove of the probe holder between the head of the first screw member and the probe base. Can be assembled. In addition, by loosening the screwing of the first and second screw members, the portion forming the upper surface of the groove of the probe holder is released from clamping between the head of the first screw member and the probe base, The assembly of the probe holder to the probe base can be released. As a result, the assembly and release of the probe holder with respect to the probe base is facilitated.
[0018]
The assembly means may further include an elastic member that constantly urges the second screw member downward. By doing so, the interval between the head of the first screw member and the probe base is naturally increased by loosening the screwing of the first and second screw members. The probe holder can be arranged on the probe base simply by moving it in the front-rear direction.
[0019]
The probe holder and the probe base may further include a stopper portion that abuts each other when the probe holder is moved rearward with respect to the probe base in a state where the convex portion is received in the recess. If it does in that way, if both stoppers contact | abut, since the movement of a probe holder to the back will be prevented, a probe holder will be positioned in the front-back direction with respect to a probe base.
[0020]
The probe device may further include one or more plungers that urge the probe holder toward the one side in the left-right direction with respect to the probe base. By doing so, one side wall of the recess in the left-right direction and one side wall of the convex portion in the left-right direction come into contact with each other, whereby the probe holder is positioned in the left-right direction with respect to the probe base.
[0021]
In a preferred embodiment, the probe sheet has its front end protruding forward from the probe holder. However, the probe sheet may not have its front end portion projected forward from the probe holder.
[0022]
The probe device further includes an arm having a front portion and a rear portion, wherein the rear portion is located above the probe base and is pivotable about an axis extending in the left-right direction at the rear portion to the probe base. A coupled arm; a pressing mechanism disposed at a front end portion of the arm to press the front end portion of the probe sheet downward; and the arm releasable to a state where the pressing mechanism presses the probe sheet. A third screw member to be maintained. By doing so, when the probe holder is attached to or detached from the probe base, the arm can be displaced to a position that does not hinder the attachment or detachment of the probe holder. Moreover, when the contact part of a probe sheet is pressed by the electrode of a to-be-inspected object, it is prevented that the front-end part of a probe sheet is largely bent with respect to the site | part of the back.
[0023]
The pressing mechanism is a base member extending in the left-right direction, and is disposed at the tip end portion of the arm so as to be movable in the vertical direction, and the height position of the base member with respect to the front end portion of the probe sheet. One or more adjustment screws that pass vertically through the front end of the arm to be adjusted and screwed into the base member, and the base member is disposed between the arm and the base member. One or more first elastic bodies that urge downward may be provided, and a second elastic body that is disposed on the base member and contacts the upper surface of the front end portion of the probe sheet. If it does in that way, the height position of the press mechanism with respect to a probe base can be adjusted with a screw member by adjusting the screwing amount of the adjustment screw to a base member. Further, when the contact portion of the probe sheet is pressed against the electrode of the object to be inspected, the second elastic body is elastically deformed, so that the contact pressure (needle pressure) between the contact portion and the electrode increases.
[0024]
The pressing mechanism further includes a plurality of guide pins extending in the vertical direction at intervals in the left-right direction, the guide pins being supported by either the arm or the base member, The other base member is received so as to be relatively movable in the vertical direction, and may extend through the first elastic body.
[0025]
In a preferred embodiment, the lower surface of the attachment portion has a rectangular shape that is long in the left-right direction. The probe sheet has a protruding electrode at the tip of each wiring, and this protruding electrode is used as a contact portion. Further, the probe sheet has a slit extending in the front-rear direction between adjacent wirings at the position of the film corresponding to the arrangement position of the contact portion.
[0026]
The probe device further includes a connection sheet having a plurality of second wirings extending in parallel with each other on one surface of the electrically insulating film, the connection member being mounted on the probe holder, and a rear portion of the probe sheet The wiring sheet may be bent or folded upward, and each wiring may be individually connected to the second wiring at a folded portion or a folded portion. The probe device may further include a connection member having a plurality of third wirings individually connected to the second wiring.
[0027]
The front edge of the probe sheet may protrude forward from the attachment portion, and at least a portion of the film in front of the attachment portion may be transparent or translucent. In this way, the positional relationship between the wiring of the probe sheet and the electrode of the object to be inspected can be confirmed through the transparent or translucent portion of the film in front of the mounting portion. Alignment with the electrode becomes easy.
[0028]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIGS. 1 to 8, the probe device 10 is used in part for an inspection device for the liquid crystal panel 12 shown in FIG. The liquid crystal panel 12 has a rectangular shape, and a plurality of electrodes 14 are formed at predetermined pitches on edges corresponding to two adjacent sides of the rectangle.
[0029]
The probe device 10 includes a probe block 16. In the illustrated example, the probe block 16 includes a probe sheet 18, a sheet-like first connection sheet 20 connected to the probe sheet 18, and a second connection sheet 22 connected to the first connection sheet 20. , And the probe holder 24 to which the sheets 18, 20 and 22 are attached.
[0030]
As shown in FIG. 6, the probe sheet 18 is a film in which a plurality of wirings 26 extending in the front-rear direction in parallel to each other are formed on one surface of an electrically insulating film 28 such as polyimide by a printed wiring technique. Probe unit. The probe sheet 18 has a rectangular shape that is long in the arrangement direction (left-right direction) of the wirings 26 in plan view. Each wiring 26 extends from the front end to the rear end of the film 28. The arrangement pitch of the wirings 26 is the same as the arrangement pitch of the electrodes 14 of the liquid crystal panel 12.
[0031]
The probe sheet 18 also has a protruding electrode 30 at the front end of each wiring 26. Each protruding electrode 30 is made of a conductive metal material such as nickel, and has a hemispherical shape. However, the protruding electrode 30 may have other shapes such as a short columnar shape, a short polygonal column shape, a rectangular parallelepiped shape, and a ring shape.
[0032]
The probe sheet 18 further has a slit 32 extending between the adjacent wirings 26 at the front end, particularly at a position corresponding to the position where the protruding electrode 30 is formed. Each slit 32 penetrates the film 28. Such slits 32 are formed in the film 28 by an appropriate processing technique such as laser processing or etching processing.
[0033]
As shown in FIG. 2, the first connection sheet 20 is a tab (TAB) in which a plurality of wirings 34 and 36 are formed on one surface of an electrically insulating film 38 such as polyimide by a printed wiring technique. A driving integrated circuit 40 electrically connected to the wirings 34 and 36 is provided on one surface.
[0034]
Each wiring 34 of the first connection sheet 20 corresponds to the wiring 26 of the probe sheet 18 on a one-to-one basis, and is electrically connected to the corresponding wiring 26. The integrated circuit 40 is used for driving the liquid crystal panel 12, receives a driving control signal from the wiring 36, and outputs a driving signal to the wiring 34.
[0035]
As shown in FIG. 2, the second connection sheet 22 is a flat cable (FPC) in which a plurality of wirings 42 are formed on one surface of an electrically insulating film 44 such as polyimide by a printed wiring technique. Each wiring 42 of the second connection sheet 22 corresponds to the wiring 36 of the first connection sheet 20 in a one-to-one manner, and is electrically connected to the corresponding wiring 36.
[0036]
As shown in FIG. 3, the probe holder 24 has an inverted L-shape with a substantially horizontal plate-like portion 46 and a plate-like attachment portion 48 extending downward from its front end, and is electrically insulated. It is made of material. The lower surfaces of the plate-like portion 46 and the attachment portion 48 are both flat surfaces.
[0037]
A step portion 50 having an L-shaped cross-section opening upward and rearward is formed at the upper rear end of the plate-like portion 46. A rod-shaped elastic body 52 having a circular cross-sectional shape is disposed on the step portion 50. The elastic body 52 can be formed of rubber such as silicone rubber.
[0038]
The probe sheet 18 is attached to the lower surface of the mounting portion 48 in the film 28 by an appropriate means such as an adhesive so that the front end portion protrudes forward of the mounting portion 48 and the wiring 26 is below the film 28. Yes. The connection sheets 20 and 22 are attached to the lower surface of the plate-like portion 46 in the film 38 by an appropriate means such as adhesion so that the wirings 36 and 42 are on the lower side.
[0039]
The front end portion of each wiring 26, the portion of the film 28 corresponding to the front end portion, and the protruding electrode 30 function as probe elements. Therefore, the front end portion of the probe sheet 18, particularly the region where the protruding electrode 30 and the slit 32 are formed functions as a probe region. At least the front end of the film 28 can be transparent or translucent.
[0040]
The rear end portion of the probe sheet 18 is folded upward. Each wiring 26 is electrically connected to the corresponding wiring 34 of the connection sheet 20 by thermocompression bonding (or a conductive adhesive such as solder) at the folded portion. The wirings 36 and 42 of the connection sheets 20 and 22 are electrically connected by an appropriate means such as a conductive through hole or solder before the connection sheets 20 and 22 are attached to the plate-like portion 46. Can do.
[0041]
As shown in FIGS. 3, 4, and 5, the probe holder 24 is provided with a convex portion 54 that extends in the front-rear direction at the center in the left-right direction, and opens upward and rearward. A groove 56 is provided on the convex portion 54, and a bar-like stopper 58 extending in the vertical direction is provided on the upper surface of the front end portion of the convex portion 54. The convex portion 54 has a rectangular parallelepiped shape, and the groove 56 has a convex (inverted T-shaped) cross-sectional shape.
[0042]
The probe device 10 is also connected to the probe base 60, a plate-like block holder to which the probe holder 24 is coupled, that is, the probe base 60, a wiring member 62 coupled to the lower side of the probe base 60 by a plurality of screw members. Arm 64, a pressing mechanism 66 that is disposed at the front end of the arm 64 and presses the front end of the probe sheet 18 downward, and the arm 64 is releasable when the pressing mechanism 66 is pressing the probe sheet 18. And a screw member 68 for maintaining the above.
[0043]
The probe base 60 has a pair of guides 70 attached to the lower surface of the front portion for each probe block 16, and one or more plungers 72 are provided on one guide 70 for each probe block 16. Both guides 70 extend in parallel in the front-rear direction at intervals in the left-right direction so as to form a recess that receives the convex portion 54 of the probe holder 24.
[0044]
The plunger 72 is a commercially available one in which a stopper, a ball, and an elastic body that is between the stopper and the ball and pushes the ball to the opposite side of the stopper are arranged in a hollow cylinder. The portion 54 is assembled to one guide 70 so as to bias the portion 54 toward the other guide 70.
[0045]
As shown in FIG. 4, the assembly means for releasably assembling the probe holder 24 to the lower side of the probe base 60 includes a first screw member 74 that penetrates the probe base 60 so as to be movable in the thickness direction, and the probe base 60. And a cap 78 through which an upper portion of the first screw member 74 penetrates.
[0046]
The first screw member 74 has a flange-shaped head portion 74 a at the lower end, and the lower end portion is received in the groove 56 so as to be relatively movable in the longitudinal direction of the groove 56. The second screw member 76 is screwed into the screw hole formed in the first screw member 74 from above.
[0047]
A stop ring 80 is assembled to the middle portion in the longitudinal direction of the first screw member 74. An elastic member 82 is disposed between the retaining ring 80 and the cap 78 so as to constantly bias the first screw member 74 downward. The elastic member 82 is a compression coil spring in the illustrated example, but may be another member such as rubber.
[0048]
Since the first screw member 74 is constantly urged downward by the elastic member 82, the distance between the lower surface of the probe base 60 and the head portion 74 a of the first screw member 74 is the same as that of the first screw member 74. By adjusting the screwing amount of the second screw member 76, it can be adjusted. A portion 54 a forming the upper surface of the groove 56 is sandwiched between the probe base 60 and the head portion 74 a of the first screw member 74.
[0049]
As shown in FIG. 2, the wiring member 62 is a connection board in which a plurality of wirings 84 are formed in parallel with one surface of the electrically insulating board 86 by an appropriate method such as a printed wiring technique. As shown in FIG. 3, the wiring member 62 is assembled to the lower surface of the probe base 60 via a spacer 88 so that the wiring 84 is downward.
[0050]
Each wiring 84 of the wiring member 62 has the rear end portion of the second connection sheet 22 folded back upward and pressed against the second connection sheet 22 by the elastic body 52, whereby the second connection sheet 22. The corresponding wiring 42 is electrically connected.
[0051]
The arm 64 has a substantially U-shaped shape by the front part and the rear part, and the rear part is on the upper side of the probe base 60 and the front part is the front side of the probe holder 24 and the probe base 60 by the pivot 90 extending in the left-right direction. Is coupled to the probe base 60 at the rear part so as to extend obliquely downward.
[0052]
The arm 64 has a hole through which a tool such as a hexagon wrench for operating the second screw member 76 passes, and a hole through which the screw member 68 passes. The screw member 68 is screwed into a screw hole formed in the probe base 60.
[0053]
The pressing mechanism 66 includes a base member 92 disposed below the distal end of the arm 64, one or more adjustment screws 94 that pass through the front end of the arm 64 in the vertical direction and are screwed into the base member 92, One or more first elastic bodies 96 disposed between the base member 92 and urging the base member 92 downward with respect to the arm 64, and disposed on the base member 92 to contact the upper surface of the front end portion of the probe sheet 18. A second elastic body 98 and a plurality of guide pins 100 extending in the vertical direction with an adjustment screw 94 interposed therebetween and spaced in the horizontal direction.
[0054]
The base member 92 extends in the left-right direction, and is assembled to the arm 64 by an adjustment screw 94 and a guide pin 100 so as to be movable in the vertical direction. The guide pin 100 is supported by one of the arm 64 and the base member 92 and is received by the other of the arm 64 and the base member 92 so as to be relatively movable in the vertical direction. Extends through.
[0055]
The first elastic body 96 is a compression coil spring in the illustrated example, but may be another member such as rubber. The second elastic body 98 is formed in a bowl shape with an elastic material such as silicone rubber, and is disposed on the lower surface of the base member 92 so as to extend in the left-right direction.
[0056]
As shown in FIGS. 9 to 13, a plurality of probe blocks 16, a plurality of wiring members 62, a plurality of arms 64, and a plurality of pressing mechanisms 66 are assembled to a common probe base 60 in the left-right direction. . The front end surface of the probe base 60 is a flat surface so as to act as a stopper surface 60a with which a plurality of stoppers 58 abut.
[0057]
At the time of inspection, the probe device 10 and the liquid crystal panel 12 are relatively moved in the direction of mutual approach. As a result, first, each protruding electrode 30 is brought into contact with the electrode 14 of the liquid crystal panel 12, and then the overdrive acts on the tip of the probe sheet 18, that is, the probe region. In this state, each wiring is energized and the liquid crystal panel 12 is inspected. As a result, the front end portion of the probe sheet 18 is elastically deformed against the force of the elastic body 96, but returns to its original shape by releasing the relative pressing between the probe device 10 and the liquid crystal panel 12. .
[0058]
When the protruding electrode 30 of the probe sheet 18 is pressed against the electrode 14 of the liquid crystal panel 12, the arm 64 and the pressing mechanism 66 prevent the front end portion of the probe sheet 18 from being greatly bent with respect to the rear portion thereof. Further, since the elastic body 98 is elastically deformed when the protruding electrode 30 of the probe sheet 18 is pressed against the electrode 14 of the liquid crystal panel 12, the contact pressure (needle pressure) between the protruding electrode 30 and the electrode 14 increases. .
[0059]
When the probe region of the probe sheet 18 is elastically deformed, each probe region is independently deformed by the slit 32. At this time, since each probe element is elastically deformed while compressing and deforming a corresponding portion of the elastic body 98, the displacement of the probe element in the left-right direction is coupled with the fact that the tip of the adjacent probe element is not separated. This is blocked by the elastic body 98.
[0060]
When the film 28 of the probe sheet 18 is made of a transparent material such as polyimide or a semi-transparent material such as another film, the electrode 14 of the liquid crystal panel 12 and the protruding electrode 30 of the probe sheet 18 are shown in FIG. , The positional relationship between the wiring 26 of the probe sheet 18 and the electrode 14 of the liquid crystal panel 12 can be confirmed through the front end portion of the probe sheet 18 protruding forward from the mounting portion 48.
[0061]
When the probe block 16 is assembled to the probe base 60, as shown in FIGS. 9 and 10, the screw member 68 is detached from the probe base 60 and the arm 64 is raised, and the second screw member 76 is loosened. Thus, the first screw member 74 is moved downward.
[0062]
In this state, the convex portion 54 of the probe block 16 is inserted between the guides 70 from the front until the stopper 58 contacts the front end surface of the probe base 60, that is, the stopper surface 60a. Thereby, the probe block 16 is arrange | positioned at the probe base 60, as shown in FIG.
[0063]
Positioning of the probe block 16 in the front-rear direction is performed by the stopper 58 coming into contact with the stopper surface 60 a of the probe base 60. As shown in FIG. 13, the positioning of the probe block 16 in the left-right direction is performed by pressing the convex portion 54 against the guide 70 on the opposite side by the plunger 72. For this reason, positioning of the probe block 16 can be performed with one touch.
[0064]
When the probe block 16 is attached to the probe base 60, the first screw member 74 is pushed down by the elastic member 82, so that the portion 54 a forming the upper surface of the groove 56 is the probe base 60 and the first screw member. 74 is reliably received between the head 74a.
[0065]
In the state where the probe block 16 is mounted on the probe base 60 as described above, the second screw member 76 is strongly screwed to the first screw member 74, and a portion 54a forming the upper surface of the groove 56 is formed. The probe base 60 and the head portion 74a of the first screw member 74 are strongly sandwiched. As a result, the probe block 16 is strongly assembled to the probe base 60 so as not to move and to be released as shown in FIGS.
[0066]
Next, the arm 64 is displaced to a predetermined position as shown in FIG. 12 and the screw member 68 is screwed into the screw hole of the probe base 60. Thereby, the arm 64 and the pressing mechanism 66 are maintained at predetermined positions. In this state, the second elastic body 98 of the pressing mechanism 66 is in contact with the tip of the probe sheet 18.
[0067]
Thereafter, the pressing force of the probe sheet 18 by the pressing mechanism 66 is adjusted and adjusted by the adjusting screw 94.
[0068]
When removing the probe block 16 from the probe base 60, the screw member 68 is removed from the probe base 60, the arm 64 is raised, the second screw member 76 is loosened, and the portion 54 a of the probe holder 24 is moved to the first screw member 74. It is only necessary to release the clamping between the head 74a and the probe base 60 and then pull the probe block 16 forward.
[0069]
When exchanging the probe block, the probe block assembled to the probe base 60 may be removed as described above, and then a new probe block may be assembled to the probe base 60 as described above.
[0070]
As described above, according to the probe device 10, the first and second screw members 74 and 76 are tightened and loosened, and the probe block 16 is moved in the front-rear direction with respect to the probe base 60, whereby the probe block 16 is moved. Since the probe base 60 can be attached to and detached from the probe base 60, the attachment and detachment work of the probe block 16 to the probe base 60 is facilitated.
[0071]
Further, since the probe block 16 is positioned in the left-right direction and the front-rear direction simply by inserting the convex portion 54 of the probe block 16 between the guides 70 of the probe base 60, the replacement work of the probe block 16 becomes easier. .
[0072]
Furthermore, since the probe block 16 can be attached to and detached from the probe base 60 with the arm raised, the arm 64 and the pressing mechanism 66 do not hinder the attachment or detachment of the probe holder 16.
[0073]
FIG. 14 shows an embodiment of a probe card 110 for inspecting the liquid crystal panel 12 using a plurality of probe devices 10 having the above-described structure. The base plate 112 has a rectangular opening 114 in the center, a probe base 60 assembled with four probe devices 10 is arranged at a position corresponding to the long side of the rectangle, and a probe assembled with three probe devices 10. The base 60 is disposed at a location corresponding to the short side of the rectangle. Both probe bases 60 are arranged on the base plate 112 so that at least the probe sheet 18 of each probe device 10 protrudes into the opening 114.
[0074]
In the above embodiment, the front end portion of the probe sheet 18 protrudes forward from the pressing mechanism 66, but the front end portion of the probe sheet 18 does not have to protrude forward from the pressing mechanism 66.
[0075]
When the present invention is applied to a probe device used in a liquid crystal panel inspection device, a tab (TAB) can be used as a sheet-like member. However, the present invention can also be applied to a probe apparatus used for inspecting other plate-shaped inspected objects such as integrated circuits.
[0076]
The present invention can be applied not only to a probe device for an object to be inspected horizontally but also to a probe device for an object to be inspected obliquely. In the present invention, one direction and the other direction in a plane parallel to the object to be inspected are referred to as the front-rear direction and the left-right direction, respectively, and the direction perpendicular to the object to be inspected is referred to as the up-down direction. Direction.
[0077]
The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of a probe apparatus according to the present invention.
FIG. 2 is a bottom view of the probe device shown in FIG.
3 is a cross-sectional view taken along line 3-3 in FIG.
4 is a cross-sectional view taken along line 4-4 of FIG.
FIG. 5 is a perspective view showing an embodiment of a probe block.
6 is a perspective view showing the tip portion of the probe device shown in FIG. 1 upside down. FIG.
FIG. 7 is an enlarged cross-sectional view of the rear end of the probe block
FIG. 8 is an enlarged sectional view of the pressing mechanism.
FIG. 9 is a sectional view showing a state in which the probe block is attached to the probe base.
FIG. 10 is a perspective view showing a state in which the probe block is mounted on the probe base.
FIG. 11 is a perspective view showing a state in which the probe block is mounted on the probe base.
FIG. 12 is a perspective view showing a state in which the arm is correctly assembled to the probe base.
FIG. 13 is a view for explaining the positioning state of the probe block in the left-right direction.
FIG. 14 is a plan view showing an embodiment of a probe card using a plurality of probe devices.
[Explanation of symbols]
10 Probe device
12 LCD panel
14 LCD panel electrodes
16 Probe block
18 Probe sheet
20,22 Connection sheet
24 Probe holder
26 Probe sheet wiring
28 Probe sheet film
30 Projection electrode
32 slits
34, 36, 42 Wiring of connection sheet
38,44 Connection sheet film
46 Flat part of the probe holder
48 Probe holder mounting
54 Convex
56 groove
58 Stopper
60 probe base
60a Stopper surface
62 Wiring member
64 arms
66 Pressing mechanism
68 Screw member
70 Guide
72 Plunger
74 First screw member
74a Head of first screw member
76 Second screw member
82 Elastic member
92 Base member
94 Adjustment screw
96, 98 First and second elastic bodies
100 guide pins

Claims (7)

A probe sheet in which a plurality of wires extending in the front-rear direction at intervals in the left-right direction are formed on the electrically insulating film;
A probe holder having a mounting portion having a lower surface on which the probe sheet is mounted at a front portion, and having either one of a convex portion extending in the front-rear direction and a concave portion extending in the front-rear direction to receive the convex portion A probe holder provided on the upper surface;
A plate-like probe base on which the probe holder is disposed, and a plate-like probe base provided with the other of the convex portion and the concave portion on the lower side;
Assembly means comprising one or more screw members for releasably assembling the probe holder to the lower side of the probe base;
The probe holder further includes a groove that opens upward and rearward, has a convex cross-sectional shape, and extends in the front-rear direction.
The screw member is a first screw member that penetrates the probe base in the thickness direction, has a flange-shaped head at the lower end, and moves the lower end relative to the groove in the longitudinal direction of the groove. A probe device, comprising: a first screw member that is accepted, and a second screw member that is above the probe base and screwed into the first screw member.   The probe apparatus according to claim 1, wherein the assembling unit further includes an elastic member that constantly biases the second screw member downward.   The probe holder and the probe base further include a stopper portion that abuts each other when the probe holder is moved rearward with respect to the probe base in a state where the convex portion is received in the recess. 3. The probe device according to claim 1.   4. The probe device according to claim 1, further comprising one or more plungers that urge the probe holder toward the one side in the left-right direction with respect to the probe base. 5.   The probe sheet has a front end protruding forward, and the probe device further includes an arm having a front part and a rear part, and the rear part extends to the upper side of the probe base and extends in the left-right direction. An arm coupled to the probe base at the rear portion so as to be capable of pivoting around an axis; a pressing mechanism disposed at a front end portion of the arm to press the front end portion of the probe sheet downward; and The probe device according to claim 1, further comprising a third screw member that maintains the arm so that the probe sheet can be released while pressing the probe sheet.   The pressing mechanism is a base member extending in the left-right direction, and is disposed at the tip end portion of the arm so as to be movable in the vertical direction, and the height position of the base member with respect to the front end portion of the probe sheet. One or more adjustment screws that pass vertically through the front end of the arm to be adjusted and screwed into the base member, and the base member is disposed between the arm and the base member. The probe apparatus according to claim 6, comprising one or more first elastic bodies that are biased downward and a second elastic body that is disposed on the base member and contacts the upper surface of the front end portion of the probe sheet.   The pressing mechanism further includes a plurality of guide pins extending in the vertical direction at intervals in the left-right direction, and the guide pins are supported by one of the arm and the base member, and the arm and the base The probe device according to claim 6, which is received by the other member so as to be relatively movable in the vertical direction, and extends through the first elastic body.

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