JP2001141747A - Probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate the attachment and detachment of each probe block to a probe base. SOLUTION: In this probe device, a probe sheet having a plurality of wirings formed on an electrically insulating film is installed to a probe holder, and the probe holder is mounted on a plate-like probe base. The probe holder has either one of a longitudinally extending protruding part and a longitudinally extending recessed part, and the probe base has the other of the protruding part and the recessed part. The probe holder has a protruding groove opened upward and backward, and it is mounted on the probe base by a first screw member having a flange-like head part at the lower end and the lower end part fitted to the groove in such a manner as to be relatively movable in the longitudinal direction, and a second screw member screwed to the first screw member.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device used for inspecting a flat object such as a liquid crystal panel and an integrated circuit.

In the present invention, one direction and another direction in a plane parallel to an object to be inspected are referred to as a front-back direction (first direction) and a left-right direction (second direction), respectively, and are perpendicular to the object. The direction is referred to as a vertical direction (third direction).

[0003]

2. Description of the Related Art In general, flat test objects such as integrated circuits and liquid crystal panels are inspected using a probe device such as a probe card. As one type of the probe apparatus, there is a probe apparatus using a probe sheet in which a plurality of wirings extending in parallel with each other are formed on one surface of an electrically insulating film, and a part of each wiring is used as a probe element.

A probe device using such a probe sheet requires a needle setting operation, compared to a needle type probe device using a probe formed of a thin metal wire and a blade type probe device using a blade-shaped probe. Since it is unnecessary, it is easy to manufacture and inexpensive.

[0005] A probe device using a probe sheet is
Various proposals have been made and put to practical use. Such probe devices typically incorporate one or more probe sheets on a common substrate. However, since the size of the object to be inspected, the number of electrodes, the arrangement pitch of the electrodes, and the like differ depending on the type of the object to be inspected, in the conventional probe device, every time the type of the object to be inspected is changed, It must be replaced with a probe device corresponding to the test object.

The replacement of such a probe device becomes more difficult as the probe device becomes larger. In particular, in a probe device for a liquid crystal panel, since the liquid crystal panel itself is large, the probe device itself becomes large and replacement work is more difficult.

[0007]

As in a needle-type probe device, a plurality of probe blocks in which a probe sheet is disposed on a probe holder are removably assembled to a probe base, so that the probe elements can be divided into a plurality of element groups. Conceivable.

In such a probe device, it is important to easily attach and detach each probe block to and from the probe base.

[0009]

A probe device according to the present invention comprises: a probe sheet in which a plurality of wirings extending in the front-rear direction are formed on an electrically insulating film at intervals in the left-right direction;
A probe holder provided with a mounting portion having a lower surface on which the probe sheet is mounted on a front portion, the probe having a convex portion extending in the front-rear direction and a concave portion extending in the front-rear direction for receiving the convex portion on an upper surface. A holder, a plate-shaped probe base on which the probe holder is arranged, and a plate-shaped probe base provided with the other of the projection and the recess on the lower side, and the probe holder on the lower side of the probe base. Mounting means comprising one or more screw members for releasably mounting.

In the probe sheet, the contact portion at the tip of each wiring is pressed against the electrode of the test object by moving the probe device and the test object relatively in the vertical direction. In this state, each wiring is energized, and the test object is inspected.

When the type of the object to be inspected is changed or when the probe sheet is damaged, the operation of replacing the probe sheet and the probe base is performed. This exchange work is performed as follows.

First, the screw member of the assembling means is loosened. Thereby, the assembly of the probe holder to the probe base is released.

Next, the probe holder is pulled out from the probe block together with the probe sheet mounted thereon. Thereby, the probe holder is removed from the probe block.

Next, a new probe holder on which a probe sheet according to the type of the test object is mounted is placed on the probe base. At this time, the probe holder is moved from the front to the rear with respect to the probe base in a state where the protruding portion formed on one of the probe holder and the probe base is fitted into the recess formed on the other.

Next, the probe holder is immovably mounted on the probe base by the screw member of the mounting means.

According to the present invention as described above, the first and second screw members are tightened and loosened, and the probe holder is moved in the front-rear direction with respect to the probe base, so that the probe holder is moved relative to the probe base. Since the probe holder can be attached and detached, the operation of attaching and detaching the probe holder to and from the probe base becomes easy.

The probe holder further includes a groove that opens upward and rearward, has a convex cross-sectional shape, and extends in the front-rear direction. The screw member moves the probe base in the thickness direction. A first screw member having a flange-shaped head at a lower end thereof, and a lower end portion received in the groove so as to be relatively movable in a longitudinal direction of the groove; A second screw member on the upper side of the probe base and screwed to the first screw member. By doing so, the probe holder can be immovably assembled to the probe base by sandwiching the portion forming the upper surface of the groove of the probe holder between the head of the first screw member and the probe base. Further, by loosening the screwing of the first and second screw members, the portion forming the upper surface of the groove of the probe holder is released from being clamped by the head of the first screw member and the probe base, The assembly of the probe holder to the probe base can be released. As a result, assembling and releasing of the probe holder with respect to the probe base are facilitated.

[0018] The assembling means may further include an elastic member for constantly urging the second screw member downward. By doing so, the distance between the head of the first screw member and the probe base naturally increases by loosening the screwing of the first and second screw members. By simply moving the probe holder back and forth, the probe holder can be arranged on the probe base.

The probe holder and the probe base may further include a stopper portion which comes into contact with each other when the probe holder is moved rearward with respect to the probe base in a state where the convex portion is received in the concave portion. Can be. In this case, when the stoppers come into contact with each other, the probe holder is prevented from moving backward, so that the probe holder is positioned in the front-rear direction with respect to the probe base.

The probe device may further include one or more plungers for urging the probe holder with respect to the probe base to one side in the left-right direction. By doing so, one side wall of the recess in the left-right direction and one side wall of the protrusion in the left-right direction abut, so that the probe holder is positioned in the left-right direction with respect to the probe base.

In a preferred embodiment, the probe sheet has a front end protruding forward from the probe holder. However, the probe sheet does not have to have its front end protruding forward from the probe holder.

The probe device may further comprise an arm having a front portion and a rear portion, wherein the rear portion is located above the probe base and is pivotally movable about an axis extending in the left-right direction at the rear portion. An arm coupled to a pressing mechanism disposed at the front end of the arm and pressing the front end of the probe sheet downward,
A third screw member for maintaining the arm releasably in a state where the pressing mechanism is pressing the probe sheet. With this configuration, when the probe holder is attached to or detached from the probe base, the arm can be displaced to a position that does not hinder the attachment / detachment of the probe holder. Further, when the contact portion of the probe sheet is pressed against the electrode of the device to be inspected, the front end of the probe sheet is prevented from being greatly bent with respect to the rear portion.

The pressing mechanism is a base member extending in the left-right direction, the base member being movably arranged in the vertical direction at the tip of the arm, and a height position of the base member with respect to a front end of the probe sheet. One or more adjustment screws that penetrate the front end of the arm in the up-down direction and are screwed to the base member to adjust the position of the arm, and the base member is disposed between the arm and the base member. The probe sheet may include at least one first elastic body that urges downward, and a second elastic body that is disposed on the base member and contacts an upper surface of a front end of the probe sheet. By doing so, the height position of the pressing mechanism with respect to the probe base can be adjusted by the screw member by adjusting the screwing amount of the adjusting screw into the base member. Further, when the contact portion of the probe sheet is pressed against the electrode of the device under test, the second elastic body is elastically deformed, so that the contact pressure (needle pressure) between the contact portion and the electrode increases.

The pressing mechanism further includes a plurality of guide pins extending in the vertical direction at intervals in the horizontal direction. The guide pins are supported by one of the arm and the base member, and And the other of the base members may be relatively movably received in the up-down direction, and may extend through the first elastic body.

In a preferred embodiment, the lower surface of the mounting portion has a rectangular shape that is long in the left-right direction. The probe sheet has a protruding electrode at the tip of each wiring, and uses the protruding electrode as a contact portion. Further, the probe sheet has slits extending in the front-rear direction between adjacent wirings at positions of the film corresponding to the arrangement positions of the contact portions.

The probe device further includes a connection sheet having a plurality of second wirings extending in parallel with each other on one surface of the electrically insulating film, the connection member being mounted on a probe holder. May be bent to the side of the connection sheet or folded upward, and each wire may be individually connected to the second wire at the bent portion or at the folded portion. Further, the probe device may further include a connection member having a plurality of third wirings individually connected to the second wiring.

[0027] The front edge of the probe sheet may be projected forward from the mounting portion, and at least a portion of the film that is forward of the mounting portion may be transparent or translucent. With this configuration, the positional relationship between the wiring of the probe sheet and the electrodes of the device under test can be confirmed through the transparent or translucent portion of the film in front of the mounting portion. Alignment with the electrodes is facilitated.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 8, a probe device 10 is partially used for an inspection device for a liquid crystal panel 12 shown in FIG.
The liquid crystal panel 12 has a rectangular shape, and a plurality of electrodes 14 are formed at predetermined intervals on edges corresponding to two adjacent sides of the rectangle.

The probe device 10 includes the probe block 1
6 inclusive. In the illustrated example, the probe block 16 includes a probe sheet 18, a sheet-like first connection sheet 20 connected to the probe sheet 18, and a second connection sheet 22 connected to the first connection sheet 20. , Probe holder 24 on which sheets 18, 20 and 22 are mounted
Are formed.

The front end of the probe sheet 18 is shown in FIG.
As shown in FIG. 7, a film probe unit is formed by forming a plurality of wirings 26 extending in the front-rear direction in parallel with each other on one surface of an electrically insulating film 28 such as polyimide by a printed wiring technique. The probe sheet 18 has a rectangular shape that is long in the arrangement direction (left-right direction) of the wirings 26 when viewed in plan. Each wiring 26 extends from the front end to the rear end of the film 28. The arrangement pitch of the wirings 26 is the same as the arrangement pitch of the electrodes 14 of the liquid crystal panel 12.

The probe sheet 18 also includes the protruding electrodes 3.
0 is provided at the front end of each wiring 26. Each protruding electrode 30
It is formed from a conductive metal material such as nickel,
It also has a hemispherical shape. However, the projection electrode 30
It may have other shapes such as a short columnar shape, a short polygonal column shape, a rectangular parallelepiped shape, a ring shape, and the like.

The probe sheet 18 further has a slit 32 extending between the adjacent wirings 26 at the front end, particularly at a position corresponding to the position where the protruding electrode 30 is formed. Each slit 32 penetrates the film 28. Such slits 32 are formed in the film 28 by an appropriate processing technique such as laser processing, etching processing, or the like.

As shown in FIG. 2, the first connection sheet 20 is a tab (TAB) in which a plurality of wirings 34 and 36 are formed on one surface of an electrically insulating film 38 such as polyimide by a printed wiring technique. And a driving integrated circuit 40 electrically connected to the wirings 34 and 36 on one surface.

Each wiring 34 of the first connection sheet 20 has a one-to-one correspondence with the wiring 26 of the probe sheet 18 and is electrically connected to the corresponding wiring 26. The integrated circuit 40 is used for driving the liquid crystal panel 12, receives a driving control signal from the wiring 36, and transmits a driving signal to the wiring 34.
Output to

As shown in FIG. 2, the second connection sheet 22 is a flat cable (FPC) in which a plurality of wirings 42 are formed on one surface of an electrically insulating film 44 such as polyimide by a printing wiring technique. . Second connection sheet 2
Each of the wirings 2 corresponds to the wiring 36 of the first connection sheet 20 in a one-to-one manner, and is electrically connected to the corresponding wiring 36.

As shown in FIG. 3, the probe holder 24 has an inverted L-shape with a substantially horizontal plate-like portion 46 and a plate-like mounting portion 48 extending downward from the front end thereof. Further, it is formed of an electrically insulating material. Plate part 4
6 and the lower surface of the mounting portion 48 are both flat surfaces.

A step portion 50 having an L-shaped cross section and opening upward and rearward is formed at the upper rear end of the plate portion 46. A bar-shaped elastic body 52 having a circular cross-sectional shape is arranged on the step portion 50. The elastic body 52 can be formed of rubber such as silicone rubber.

The probe sheet 18 is attached to the lower surface of the mounting portion 48 of the film 28 by an appropriate means such as an adhesive so that the front end of the probe sheet 18 projects forward of the mounting portion 48 and the wiring 26 is located below the film 28. It is installed. The connection sheets 20 and 22 are mounted on the lower surface of the plate-like portion 46 of the film 38 by an appropriate means such as adhesion so that the wirings 36 and 42 are on the lower side.

The front end of each wiring 26, the portion of the film 28 corresponding to the front end, and the protruding electrode 30 function as probe elements. Therefore, the front end portion of the probe sheet 18, particularly, the region where the protruding electrodes 30 and the slits 32 are formed functions as a probe region. Film 28
At least the front end can be transparent or translucent.

The rear end of the probe sheet 18 is folded upward. Each of the wirings 26 is electrically connected to the corresponding wiring 34 of the connection sheet 20 at the folded portion by heat compression (or a conductive adhesive such as solder). Wiring 36 and 42 of connection sheets 20 and 22
Before the connection sheets 20 and 22 are attached to the plate portion 46, they can be electrically connected by appropriate means such as conductive through holes or solder.

As shown in FIGS. 3, 4 and 5, the probe holder 24 further includes a convex portion 54 extending in the front-rear direction at the center in the left-right direction on the upper surface of the plate-shaped portion 46.
The protrusion 54 has a groove 56 opening upward and rearward, and a bar-shaped stopper 58 extending vertically is provided on the upper surface of the front end of the protrusion 54. The convex portion 54 has a rectangular parallelepiped shape, and the groove 56 has a convex (inverted T-shaped) cross-sectional shape.

The probe device 10 also includes a plate-shaped block holder or probe base 60 to which the probe holder 24 is coupled, a wiring member 62 coupled to the lower side of the probe base 60 by a plurality of screw members, An arm 64 connected to the probe sheet 60; a pressing mechanism 66 disposed at the front end of the arm 64 for pressing the front end of the probe sheet 18 downward;
And a screw member 68 for maintaining the arm 64 releasably in a state in which the arm 8 is pressed.

The probe base 60 includes a pair of guides 70.
Are attached to the front lower surface for each probe block 16 and one or more plungers 72 are attached to the probe block 1.
Each guide 6 is provided on one guide 70. Both guides 70
Extend in the front-rear direction at intervals in the left-right direction so as to form a recess for receiving the projection 54 of the probe holder 24.

The plunger 72 is a commercially available plunger having a stopper, a ball, and an elastic body between the stopper and the ball, which pushes the ball to the side opposite to the stopper, in a hollow cylinder. 24 so as to urge the convex portion 54 of the guide 24 toward the other guide 70.
Has been assembled.

As shown in FIG. 4, the assembling means for releasably assembling the probe holder 24 below the probe base 60 includes a first screw member 74 which penetrates the probe base 60 so as to be movable in the thickness direction, Probe base 60
A second screw member 76 which is screwed to the first screw member 74 and has a cap 78 through which an upper portion of the first screw member 74 penetrates.

The first screw member 74 has a flange-shaped head 74a at the lower end, and the lower end is received in the groove 56 so as to be relatively movable in the longitudinal direction of the groove 56. The second screw member 76 is screwed into a screw hole formed in the first screw member 74 from above.

A retaining ring 80 is attached to a longitudinally intermediate portion of the first screw member 74. An elastic member 82 is disposed between the retaining ring 80 and the cap 78 so as to constantly urge the first screw member 74 downward. The elastic member 82 is a compression coil spring in the illustrated example, but may be another member such as rubber.

Since the first screw member 74 is constantly urged downward by the elastic member 82, the distance between the lower surface of the probe base 60 and the head 74a of the first screw member 74 is equal to that of the first screw member 74. The adjustment can be made by adjusting the screwing amount of the second screw member 76 into the 74. The portion 54 a forming the upper surface of the groove 56 is sandwiched between the probe base 60 and the head 74 a of the first screw member 74.

As shown in FIG. 2, the wiring member 62 is a connection board in which a plurality of wirings 84 are formed in parallel with one surface of an electrically insulating substrate 86 by an appropriate method such as a printed wiring technique. As shown in FIG.
Is mounted on the lower surface of the probe base 60 via a spacer 88 so that the lower side of the probe base 60 is positioned downward.

Each of the wirings 84 of the wiring member 62 has an elastic body 52 with the rear end of the second connection sheet 22 folded upward.
By being pressed by the second connection sheet 22, it is electrically connected to the corresponding wiring 42 of the second connection sheet 22.

The arm 64 has a substantially curvilinear shape with a front portion and a rear portion, and a pivot 90 extending in the left-right direction has a rear portion above the probe base 60 and a front portion having the probe holder 24 and the probe base 24. The probe base 6 extends rearward with the front side of the probe base 60 extending diagonally downward.
Tied to 0.

The arm 64 has a hole for passing a tool such as a hex wrench for operating the second screw member 76 and a screw member 68.
And a hole at the rear. The screw member 68 is screwed into a screw hole formed in the probe base 60.

The pressing mechanism 66 includes a base member 92 disposed below the distal end of the arm 64, one or more adjusting screws 94 that penetrate the front end of the arm 64 in the vertical direction and screw into the base member 92. One or more first elastic bodies 96 disposed between the arm 64 and the base member 92 to urge the base member 92 downward with respect to the arm 64; and a front end portion of the probe sheet 18 disposed on the base member 92. A plurality of guide pins 10 extending in the up-down direction at intervals in the left-right direction with the second elastic body 98 in contact with the upper surface and the adjustment screw 94 interposed therebetween.
0.

The base member 92 extends in the left-right direction, and is attached to the arm 64 by an adjusting screw 94 and a guide pin 100 so as to be movable in the up-down direction. The guide pin 100 is supported by one of the arm 64 and the base member 92 and is received by the other of the arm 64 and the base member 92 so as to be relatively movable in the vertical direction. Extends through.

The first elastic body 96 is a compression coil spring in the illustrated example, but may be another member such as rubber. The second elastic body 98 is formed in a semi-cylindrical shape from an elastic material such as silicone rubber, and has a base member 9.
2 is disposed on the lower surface thereof in a state extending in the left-right direction.

As shown in FIGS. 9 to 13, a plurality of probe blocks 16, a plurality of wiring members 62, a plurality of arms 64, and a plurality of pressing mechanisms 66 are assembled to a common probe base 60 in the left-right direction. Have been. The front end surface of the probe base 60 is a flat surface so as to function as a stopper surface 60a with which the plurality of stoppers 58 abut.

At the time of inspection, the probe device 10 and the liquid crystal panel 1
2 is relatively moved in an approaching direction. As a result, first, each protruding electrode 30 is brought into contact with the electrode 14 of the liquid crystal panel 12, and then the overdrive is applied to the probe sheet 1.
8 acts on the tip, ie, the probe area. In this state, power is supplied to each wiring, and the inspection of the liquid crystal panel 12 is performed. As a result, the front end of the probe sheet 18 is elastically deformed against the force of the elastic body 96. When the relative pressure between the probe device 10 and the liquid crystal panel 12 is released, the probe device 10 returns to its original shape.

When the protruding electrode 30 of the probe sheet 18 is pressed against the electrode 14 of the liquid crystal panel 12, the arm 64 and the pressing mechanism 66 prevent the front end of the probe sheet 18 from being greatly bent with respect to the rear portion. I do. The protruding electrode 30 of the probe sheet 18 is
When the elastic body 98 is elastically deformed when pressed by the second electrode 14, the contact pressure (needle pressure) between the protruding electrode 30 and the electrode 14 increases.

When the probe area of the probe sheet 18 is elastically deformed, each probe area is independently deformed by the slit 32. At this time, each probe element is
8 is elastically deformed while compressing and deforming the corresponding portion, the displacement of the probe element in the left-right direction is coupled with the fact that the tip of the adjacent probe element is not separated,
It is blocked by the elastic body 98.

When the film 28 of the probe sheet 18 is made of a transparent material such as polyimide or a translucent material such as another film, as shown in FIG.
When the second electrode 14 and the protruding electrode 30 of the probe sheet 18 are brought into contact with each other, the positional relationship between the wiring 26 of the probe sheet 18 and the electrode 14 of the liquid crystal panel 12 is determined by using You can check through the department.

The probe block 16 is connected to the probe base 6
9, the screw member 68 is detached from the probe base 60 and the arm 6 is mounted as shown in FIGS.
4 is raised, the second screw member 76 is loosened, and the first screw member 74 is moved downward.

In this state, the projection 54 of the probe block 16 is inserted between the two guides 70 from the front until the stopper 58 contacts the front end surface of the probe base 60, that is, the stopper surface 60a. Thereby, the probe block 16 is arranged on the probe base 60 as shown in FIG.

The positioning of the probe block 16 in the front-rear direction is performed by the stopper 58 abutting on the stopper surface 60 a of the probe base 60. As shown in FIG. 13, the positioning of the probe block 16 in the left-right direction is performed by pressing the convex portion 54 against the guide 70 on the opposite side by the plunger 72. Therefore, the positioning of the probe block 16 can be performed with one touch.

The probe block 16 is connected to the probe base 6
0, the first screw member 74 is
Therefore, the portion 54 a forming the upper surface of the groove 56 is reliably received between the probe base 60 and the head 74 a of the first screw member 74.

The probe block 16 has the probe base 6
0, the second screw member 76 is tightly screwed into the second screw member 74, and the groove 5
The portion 54a forming the upper surface of the probe base 6
0 and the head 74a of the first screw member 74 is strongly sandwiched. As a result, the probe block 16
And as shown in FIG. 4, it is firmly immovably and releasably assembled to the probe base 60.

Next, the arm 64 is displaced to a predetermined position as shown in FIG. 12, and the screw member 68 is screwed into the screw hole of the probe base 60. As a result, the arm 64 and the pressing mechanism 66 are maintained at predetermined positions. In this state, the second elastic body 98 of the pressing mechanism 66 is in contact with the tip of the probe sheet 18.

Thereafter, the pressing force of the pressing mechanism 66 on the probe sheet 18 is adjusted and adjusted by the adjusting screw 94.

The probe block 16 is connected to the probe base 6
To remove the screw member 68 from the probe base 60,
And the arm 64 is lifted up, the second screw member 76 is loosened, and the portion 54a of the probe holder 24 is released from being clamped by the head 74a of the first screw member 74 and the probe base 60. Just pull it forward.

When replacing the probe block, the probe block attached to the probe base 60 may be removed as described above, and then a new probe block may be attached to the probe base 60 as described above.

According to the probe device 10 as described above,
The probe block 16 can be attached to and detached from the probe base 60 by tightening and loosening the first and second screw members 74 and 76 and moving the probe block 16 in the front-rear direction with respect to the probe base 60. Also, the work of attaching and detaching the probe block 16 to and from the probe base 60 becomes easy.

Further, by simply inserting the projection 54 of the probe block 16 between the guides 70 of the probe base 60, the probe block 1
Since the positioning of 6 is performed, the replacement work of the probe block 16 becomes easier.

Further, since the operation of attaching and detaching the probe block 16 to and from the probe base 60 can be performed with the arm raised, the arm 64 and the pressing mechanism 66 do not hinder the attachment and detachment of the probe holder 16.

FIG. 14 shows an embodiment of a probe card 110 for inspecting the liquid crystal panel 12 using a plurality of probe devices 10 having the above-described structure. Base plate 112
Has a rectangular opening 114 at the center, arranges a probe base 60 on which four probe devices 10 are assembled at a position corresponding to the long side of the rectangle, and mounts a probe base 60 on which three probe devices 10 are assembled. It is located at the location corresponding to the short side of the rectangle. Double probe base 60
Is at least the probe sheet 1 of each probe device 10.
8 are arranged on the base plate 112 so as to protrude from the opening 114.

In the above embodiment, the probe sheet 1
Although the front end of the probe sheet 8 protrudes forward from the pressing mechanism 66, the front end of the probe sheet 18 does not have to protrude forward from the pressing mechanism 66.

When the present invention is applied to a probe device used for a liquid crystal panel inspection device, it is preferable because a tab (TAB) can be used as a sheet-like member.
However, the present invention can also be applied to a probe device used for inspecting another flat object such as an integrated circuit.

The present invention can be applied not only to a probe device for a test object arranged horizontally but also to a probe device for a test object obliquely inclined. In the present invention, one direction and the other direction in a plane parallel to the object to be inspected are referred to as a front-rear direction and a left-right direction, respectively, and a direction perpendicular to the object to be inspected is referred to as an up-down direction. Direction.

The present invention is not limited to the above embodiment, but can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a probe device according to the present invention.

FIG. 2 is a bottom view of the probe device shown in FIG. 1;

FIG. 3 is a sectional view taken along line 3-3 in FIG. 1;

FIG. 4 is a sectional view taken along line 4-4 in FIG. 3;

FIG. 5 is a perspective view showing one embodiment of a probe block.

FIG. 6 is a perspective view showing the tip portion of the probe device shown in FIG. 1 upside down;

FIG. 7 is an enlarged sectional view of the rear end of the probe block.

FIG. 8 is an enlarged sectional view of a pressing mechanism.

FIG. 9 is a sectional view showing a state in which the probe block is mounted on the probe base.

FIG. 10 is a perspective view showing a state in which a probe block is mounted on a probe base.

FIG. 11 is a perspective view showing a state in which a probe block is mounted on a probe base.

FIG. 12 is a perspective view showing a state where the arm is correctly assembled to the probe base.

FIG. 13 is a view for explaining a positioning state of the probe block in the left-right direction.

FIG. 14 is a plan view showing one embodiment of a probe card using a plurality of probe devices.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Probe apparatus 12 Liquid crystal panel 14 Electrode of liquid crystal panel 16 Probe block 18 Probe sheets 20 and 22 Connection sheet 24 Probe holder 26 Probe sheet wiring 28 Probe sheet film 30 Protrusion electrode 32 Slit 34, 36, 42 Connection sheet wiring 38 , 44 Connection sheet film 46 Flat plate part of probe holder 48 Probe holder mounting part 54 Convex part 56 Concave part 58 Stopper 60 Probe base 60a Stopper surface 62 Connection member 64 Arm 66 Pressing mechanism 68 Screw member 70 Guide 72 Plunger 74 First Screw member 74a Head of first screw member 76 Second screw member 82 Elastic member 92 Base member 94 Adjusting screw 96, 98 First and second elastic members 100 Guide pin

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Akinori Iwabuchi 2-6-8 Kichijoji Honmachi, Musashino City, Tokyo Inside Micronics Co., Ltd. (72) Inventor Toshio Fukushi 2-6-8 Kichijoji Honmachi, Musashino City, Tokyo No. F term in Japan Micronics Co., Ltd. (reference) 2G011 AA15 AA21 AB06 AB08 AC12 AE02 AF01 4M106 AA20 BA01 CA01 DD03 DD04 DD06 DD09 DD13

Claims (8)

[Claims] 1. A probe holder comprising a probe sheet in which a plurality of wirings extending in the front-rear direction extending in the front-rear direction at intervals in the left-right direction are formed on an electrically insulating film; A probe holder having on its upper surface one of a convex portion extending in the front-rear direction and a concave portion extending in the front-rear direction to receive the convex portion, and a plate-shaped probe base on which the probe holder is arranged, A probe device, comprising: a plate-shaped probe base having the other of the convex portion and the concave portion on the lower side; and assembling means including one or more screw members for releasably assembling the probe holder to the lower side of the probe base. . 2. The probe holder further includes a groove that opens upward and rearward, has a convex cross-sectional shape, and extends in the front-rear direction. A first screw member penetrating in the vertical direction, the first screw member having a flange-shaped head at a lower end and a lower end received in the groove so as to be relatively movable in the longitudinal direction of the groove. The probe device according to claim 1, further comprising: a second screw member above the probe base and screwed to the first screw member. 3. The assembling means further comprises:
The probe device according to claim 2, further comprising an elastic member that constantly urges said screw member downward. 4. The probe holder and the probe base further include a stopper portion that comes into contact with each other when the probe holder is moved rearward with respect to the probe base in a state where the protrusion is received in the recess. The probe device according to claim 1, wherein the probe device is provided. 5. The probe device according to claim 1, further comprising one or more plungers for urging the probe holder with respect to the probe base to one side in the left-right direction. 6. The probe sheet has a front edge protruding forward, and the probe device further includes an arm having a front portion and a rear portion, wherein the rear portion is in an upper side of the probe base. An arm coupled to the probe base at the rear portion so as to be pivotable about an axis extending in a direction, a pressing mechanism disposed at a front end of the arm and pressing the front end of the probe sheet downward; The probe device according to any one of claims 1 to 5, further comprising a third screw member configured to maintain the arm releasably in a state where the mechanism is pressing the probe sheet. 7. The pressing mechanism is a base member extending in the left-right direction, the base member being movably arranged in the vertical direction at the tip of the arm, and the height of the base member with respect to the front end of the probe sheet. One or more adjustment screws that penetrate the front end of the arm in the vertical direction to adjust the position, and are screwed to the base member; and the base member is disposed between the arm and the base member. The device according to claim 6, further comprising: one or more first elastic members biasing the arm downward, and a second elastic member disposed on the base member and in contact with an upper surface of a front end of the probe sheet. Probe device. 8. The pressing mechanism further includes a plurality of guide pins extending in a vertical direction at intervals in a horizontal direction,
The guide pin is supported by one of the arm and the base member, and is received by the other of the arm and the base member so as to be relatively movable in a vertical direction. 8. The probe device according to claim 7, extending through.