TWI420112B - Probe device - Google Patents

Description

Probe device

The present invention relates to a probe device for energization testing of a flat object to be inspected such as a liquid crystal display panel.

For example, a flat object to be inspected by a liquid crystal display panel is generally inspected (i.e., tested) by using an inspection device (i.e., a test device) of a probe device such as a probe unit. One of the probe devices is disclosed in Patent Documents 1 and 2.

The probe device disclosed in Patent Document 1 includes a plate-shaped slider attached to a main body frame of the test device, a connection block attached to the probe base, a support block capable of adjusting a height position and suspended in the connection block, and a system A plurality of probes are supported on the probe block (probe assembly) of the probe holder and assembled to the probe block of the support block.

The probe block is inserted into the concave portion of the support block from the convex portion protruding from the probe holder upward, and is attached to the support block by a pair of screw members. Thereby, the probe block is maintained in such a manner as to be detachable from the support block.

Each probe has a central portion of a plate-shaped needle, a front end region extending integrally from the central portion of the needle toward the front, a front needle protruding downward from the front needle region, a rear end region extending from the central portion of the needle toward the rear, and a rear region. The end region protrudes upward from the rear needle. This type of probe is placed in the probe holder in a state in which the thickness direction of the central portion of the needle is in the left-right direction.

In addition to the probe and probe holder, the probe assembly has: The pair of guide rods penetrate and extend in the thickness direction of the central portion of the needle, and are supported by the probe holder at both end portions; the distal end side slit rod accommodates the distal end needle, and has a plurality of slits spaced apart from each other in the left-right direction and supported The probe holder and the rear end side slit rod receive the rear end needle, and have a plurality of slits spaced apart from each other in the left-right direction, and are supported by the probe holder.

In the probe device disclosed in Patent Document 1, the probe is supported by the probe holder by a pair of guide bars. In the probe device, the front end needle and the rear end needle are respectively pressed against the connection portion between the electrode of the test object and the wiring piece such as the tab, and if all the rods act on the respective probes, the probe is displaced from the probe holder. The amount will vary depending on the size of the gap between each probe and the guide.

The above-mentioned gap is formed between the probe and the guide bar, which is a tolerance allowed in design and processing, and therefore cannot be avoided. As a result, the contact between the tip end needle and the electrode of the object to be inspected, and the electrical contact between the rear end needle and the seat of the wiring piece become unstable, and the correct test (ie, inspection) cannot be performed.

In order to solve the above problem, in the probe device disclosed in Patent Document 2, the above-described guide bar is used as a positioning pin, and will be opened to the front. The first and second recesses of the glyph are respectively provided at the front end portion and the rear end portion of the center portion of the needle of each probe, and the first and second convex portions that are fitted to the first and second concave portions that protrude rearward are respectively The load receiving rod is disposed on the front end side slit rod and the rear end portion of the block.

In the probe device disclosed in Patent Document 2, the guide rod is used as a positioning pin, and the first concave portion and the first convex portion are fitted, and the second concave portion and the second convex portion are fitted, whereby all the rods act to probe When the needle is used, the difference in the displacement of the probe to the block can be reduced.

However, in the probe device disclosed in Patent Document 2, there is no disclosure about the assembly device for assembling the probe block to the support block (slider).

Further, in the assembly apparatus disclosed in Patent Document 1, in order to obtain the reproducibility of the needle position when replacing consumables such as a probe, a probe block, a connecting piece, and an auxiliary block, a brake, a plurality of convex portions, and a plurality of columns are required for use. A plurality of members of a complicated operation such as a plug, a plurality of pusher pins, and a plurality of compression coil springs are complicated, and the shape and structure of the assembly device are complicated, and the replacement work of the consumables becomes complicated.

Patent Document 1: Japanese Patent Laid-Open Publication No. 2004-191064

Patent Document 2: Japanese Laid-Open Patent Publication No. 2009-115585

It is an object of the present invention to simplify the shape and structure of an assembly apparatus and to facilitate replacement of consumables.

The probe device of the present invention comprises: a support block; a joint block disposed on a lower side of the support block; an assembly device for assembling the joint block on a lower side of the support block; and a probe assembly having a front end needle and a rear end a plurality of probes of the needle and a probe holder in which the probe is disposed, and the probes are disposed at intervals in the left-right direction, and the probe holder is extended in the front-rear direction, and is assembled under the joint block The assembly device includes a coupling member formed in one of the coupling block and the support block, a coupling member fitted to the recess, and a first screw for assembling the connecting member to the coupling block or the support block The member and the second screw member penetrating the connecting member in the vertical direction and screwed to the coupling block and the other of the support blocks.

The recess and the joining member can have a circular or polygonal cross-sectional shape.

The assembly apparatus further includes a second recess formed in the one of the joint block and the support block, extending in the XY plane formed in the left-right direction and the front-rear direction, and being connected to the joint block and the support block The recess of the one of the recesses; and the pin member extending from the connecting member in the XY plane and being received in the second recess.

The assembly device further includes a third recess formed in one of the connecting member and the support block, and open to the other side of the connecting member and the support block, and a second pin member from the connecting member and The other of the support blocks extends in the vertical direction and is housed in the third recess.

The coupling block has a section on the front end side facing downward and in which the probe assembly is disposed, and has the recess fitted by the coupling member, and the further portion can have a female screw screwed by the second screw member hole.

The recess may be formed in the joint block, and the joint member may be attached to the support block by the first screw member. The first screw member penetrates the joint member from above to below and is screwed to the joint block. .

The probe device of the present invention may further include: a wiring sheet disposed on a lower side of the bonding block, the rear end portion being folded back on the upper side of the bonding block, and a plurality of connecting portions on the lower surface of the front end portion, and having the connection from the connection a plurality of first wires extending to the rear; the connecting block is disposed between the end portion of the bonding block and the supporting block, and is mounted on the bonding block or the supporting block; and the connecting piece is mounted on the front end portion of the connection The lower side of the block extends rearward from the connecting block, and has a plurality of second wires extending in the front-rear direction, the end portions of the second wires are in contact with the first wires, and the elastic body is disposed in the connection. A portion corresponding to the contact portion between the first and second wirings on the lower side of the block.

In the probe device of the present invention, the assembly device for assembling the coupling block to the lower side of the support block includes: a coupling member formed in one of the coupling block and the support block, and a coupling member fitted to the recess, and the coupling member The first screw member that is assembled to the joint block or the joint member, and the second screw member that penetrates the joint member in the vertical direction and is screwed to the joint block and the other of the support blocks.

Therefore, the probe assembly and the wiring sheet can be replaced in a state where the bonding block is separated from the support block. Further, in the state where the bonding block is separated from the support block and the probe assembly is separated from the bonding block, the probe replacement can be performed. Further, in the state where the joint block is separated from the support block and the joint block is separated from the support block, the connection piece can be replaced.

As a result of the above, according to the present invention, the shape and structure of the assembling device can be simplified as compared with the prior art, and the replacement work of the consumable including the probe becomes easy.

In the present invention, in FIG. 1, the vertical direction is referred to as the vertical direction or the Z direction, the left and right direction is referred to as the left-right direction or the X direction, and the paper back surface direction is referred to as the front-rear direction or the Y-direction. However, these directions are different from the angle of the object to be inspected by the panel receiving seat, such as a workbench.

Therefore, in the probe device of the present invention, the vertical direction (Z direction) in the present invention is actually in a state in which it is in the vertical direction, a state in which it is in the up and down direction, a state in which it is in the up and down direction, and a state in which it is in an oblique direction. Status, installed in the test unit for use.

[Examples]

Referring to Figs. 1 to 4, the probe device 10 uses a liquid crystal display panel shown in Figs. 2, 5, 10, 11 and 15 as the object 12 to be inspected for lighting inspection of the subject 12. The subject 12 has a rectangular shape, and a plurality of electrodes 14 are formed at a predetermined distance from the edge corresponding to at least two sides adjacent to the rectangle (see FIGS. 10, 11 and 15). Each of the electrodes 14 has a strip shape extending in a direction (X direction or Y direction) orthogonal to the edge portion where the electrode 14 is disposed.

1 to 5, the probe device 10 includes a probe assembly 16, a support block 18 for supporting the probe assembly 16, a connection block 20 that connects the support blocks 18, and a support side of the support block 18 (either of the Z directions). The joint block 22 of the side, the assembly device 24 for assembling the joint block 22 to the lower side of the support block 18, the wiring sheet 26 supported by the lower side of the joint block 22, and the joint block 28 attached to the lower side of the support block 18.

In the probe device 10, the connection block 20 is assembled to the flat probe base 30 attached to the main body frame (not shown) of the test device, and is assembled as a part of the test device.

Referring to FIGS. 9 to 11, the probe unit 16 is disposed in a state in which the probe elements 16 are extended in the right and left directions, and a plurality of probes 32 made of a conductive material are disposed at intervals in the front-rear direction and assembled to the block 34. In the following, the slit member 36 has a rod member 38 having a circular cross-sectional shape penetrating the probe 32, and the end portions of the two rod members 38 are assembled to the block 34 by a pair of covers 40.

As shown in Fig. 11, each of the probes 32 includes a needle main body portion 32a formed in a rectangular plate shape, a front end region 32b extending integrally from the front end of the needle main body portion 32a toward the front, and a rear end portion from the rear end portion of the needle main body portion 32a. The end region 32c after extension, the front needle 32d bent from the front end of the front end region 32b to the lower end, and the end needle 32e which is bent upward from the rear end of the rear end region 32c constitute an airfoil needle. The front end needle 32d and the rear end needle 32e form a triangle and are sharp.

Each of the block piece 34 and each of the slit bars 36 is made of an electrically insulating ceramic, a synthetic resin or the like, and has a long-angle column shape in the left-right direction.

Each of the slit bars 36 is formed in a prismatic shape by an electrically insulating material, and is attached to a state in which the lower portion of the front portion of the block 34 or the lower portion of the rear portion extends in the left-right direction. As shown in FIG. 9 to FIG. 12, each of the slit bars 36 has a plurality of slits 42 extending in the longitudinal direction (left-right direction) of each of the slit bars 36 in a front-rear direction at a predetermined interval, and is opened downward.

The rod member 38, in the illustrated example, has a circular cross-sectional shape and is formed of a hard electrical insulating material such as ceramic. The lever member 38 penetrates the needle main body portion 32a of the probe 32. However, the rod member 38 may be coated with an electrically insulating material, and may have other cross-sectional shapes such as a rectangular shape, a hexagonal shape, or the like.

Each of the probes 32 has a thickness direction of the needle main body portion 32a as a left-right direction, and the front end needle 32d and the rear end needle 32e are protruded forward and rearward from the block 34, respectively, and are arranged side by side on the slit rod 36. Further, the front end region 32b and the rear end region 32c are fitted to the slit 42 of the slit rod 36.

As shown in Figs. 1 and 9, each of the covers 40 is formed by a plate-like cover member 40a located on the inner side and a plate-like cover member 40b located on the outer side.

As shown in FIGS. 1, 2, 9 and 10, each cover 40 is detachably mounted through the cover members 40a and 40b by a plurality of screw members 44 screwed to the ends of the block 34 in the left-right direction. On the side of the block 34 in the left-right direction.

Each cover 40 in turn utilizes a plurality of locating pins 46 to position the slab 34. Each of the positioning pins 46 is attached to the end portion of the block 34 in the left-right direction in a state of protruding from the end portion in the left-right direction, and the two cover members 40a and 40b are inserted.

Each of the inner cover members 40a has a hole 48 for accommodating the end of the lever member 38 (refer to Fig. 9). Thereby, the lever member 38 and the cover members 40a and 40b are both attached to the block 34 by the screw member 44 and the positioning pin 46 for positioning.

As shown in FIGS. 10, 11, and 13, the convex portion 50 that protrudes rearward and the concave portion 52 that is open to the front are provided at the rear end portion and the front end portion. The convex portion 50 and the concave portion 52 have The cross-sectional shape of the glyphs and they are fitted to each other.

Further, each of the convex portion 50 and the concave portion 52 has a lower edge portion and upper edge portions 50a and 52a located below (in either side of the Z direction) and an upper edge portion and a lower edge located at the upper side (the other side in the Z direction). Parts 50b and 52b.

The lower edge portion 50a of the convex portion 50 and the lower edge portion 52b of the concave portion 52 are directed downward, and the upper edge portion 50b of the convex portion 50 and the upper edge portion 52a of the concave portion 52 are directed upward. The upper edge portion 52a of the recess 52 is lower than the rear side. Thereby, the concave portion 52c attached to the lower side of the inner bottom portion of the concave portion 52 is formed.

The probe assembly 16 further includes a plurality of positioning pins 54 spaced apart from each other in the left-right direction (refer to FIG. 1). Each of the positioning pins 54 is attached to the block 34 and extends upward from the block 34. Each positioning pin 54 is further fitted to the binding block A positioning hole (not shown) of 22 positions the probe assembly 16 at the bonding block 22 simultaneously with the positioning hole.

Contrary to the above, the positioning pin 54 may be disposed on the coupling block 22 to position the positioning hole in the block 34.

Each of the probes 32, the convex portion 50 and the concave portion 52 are fitted to each other, and the rod member 38 penetrates the probe 32, and is further fitted to the slit 42 in the distal end region 32b and the rear end region 32c, and is disposed in the slit rod 36. .

Each of the probes 32 is assembled to the block 34 by a screw member, an adhesive or the like as described above, and the cover 40 is assembled to the block 34 as described above, thereby being assembled to the block 34. Keep it.

The bond block 22, as shown in Figures 6 and 8, has a downward section 56 in which the probe assembly is disposed. The lower section 56 extends the front end of the lower portion of the joint block 22 in the left-right direction.

As shown in FIGS. 1, 5 and 6, the probe assembly 16 is inserted through the through hole 57 of the coupling block 22 from above, and is screwed to the screw member 60 having the head screw hole 58 provided in the female screw hole 58 of the block 34. When the positioning pin 54 is inserted into the positioning hole, it is maintained in the downward section 56.

In the figure, the adjacent probes 32 are spaced apart from each other in the left-right direction, but actually, the arrangement pitch of the probes 32 is small. The number, thickness, and arrangement pitch of the probes 32, and the number of slits, arrangement pitches, and widths of the slits 36 vary depending on the type of the object 12 to be inspected, particularly, the arrangement pitch and width of the electrodes.

In the state in which the two slit bars 36 are attached to the block 34 in the above state, both end portions of the probes 32 are inserted into the slits 42 of the slit rod 36, and the projections are made convex. The portion 50 and the recess 52 are fitted, and the rod member 38 is inserted into the probe 32 and the lid member 40a, and then the screw member 44 and the positioning pin 46 are attached to the block 34, whereby the assembly can be assembled. Needle assembly 16.

Alternatively, the two slit bars 36 may be attached to the block 34, and one of the covers 40 may be attached to the block 34.

The reverse of the above operation is performed, whereby the decomposition of the probe assembly 16 can be performed. The operation opposite to the above is performed, and after the old probe is updated to the probe, the same operation as described above is performed, whereby the replacement of the probe 32 can be performed.

In a state in which the positioning pin 54 (refer to FIGS. 1 and 6) is inserted into the positioning hole of the joint block 22, the screw member 60 is passed through the through hole 57 of the joint block 22 from above to the bottom, and is screwed to the block 34. A female screw hole whereby the assembly of the probe assembly 16 can be performed toward the coupling block 22.

The operation opposite to the above is performed, whereby the probe assembly 16 can be removed from the bonding block 22.

In this embodiment, the block piece 34 and the slit rod 36 constitute a probe holder which is disposed in parallel with one of the plurality of probes 32 in the left-right direction at one end side (lower side) in the vertical direction.

Referring to Figs. 1 to 7, the support block 18 is formed into an L-shaped cross-sectional shape by using two support portions 18a and 18b in a plate shape. The connecting block 20 has an inverted L shape by being attached to the main body portion 20a of the probe base 30 and the extended portion 20b extending forward from the upper portion of the main body portion 20a.

In the illustrated example, the support block 18 forms a support together with the joint block 22, and the screw member 60 functions as an assembly for assembling the probe assembly 16 to the joint block 22.

The support block 18 is connected to the main body portion 20a of the joint block 20 so as to be movable in the vertical direction by a guide 64 extending between the guide rails 62 and the guide rails 62 extending in the vertical direction. The front portion is connected to the extension portion 20b of the joint block 20 by the bolt 66 so as to be able to adjust the vertical direction.

The two guide rails 62 and the guide members 64 are linear rails and linear guides, respectively. The two guide rails 62 are attached to the rear end surface of the support portion 18a of the support block 18. On the other hand, the guide 64 is disposed between the two guide rails 62 in the left-right direction, and is attached to the front end surface of the main body portion 20a of the connection block 20 by the two guide rails 62 so as to be movable in the vertical direction.

The bolt 66 penetrates the extension portion 20b of the coupling block 20 from above and is screwed to the screw hole 68 formed in the support block 18. As shown in FIG. 1, the support block 18 biases the compression screw spring 70 downward by one of the left-right direction spacing arrangements.

Each of the compression screw springs 70 is placed in the vertical direction of the connecting block 20, and is placed on the extension 20b of the connecting block 20 by a plurality of screw members 71 (see FIGS. 3 and 5). The plate spring member 72 is between the support block 18. Thereby, the amount of screwing of the bolt 66 to the screw hole 68 is adjusted, whereby the height position of the support block 18 and the probe assembly 16 can be adjusted.

The spring pressing member 72 has a through hole 72a into which a front end portion of the tool such as a screwdriver is inserted from above, thereby adjusting the amount of rotation of the bolt 66. Thereby, the spring pressing member 72 cannot be removed from the support block 18, and the height position of the support block 18 and the probe assembly 16 can be adjusted, so that it is easy to adjust the height position.

As shown in FIG. 5, the connecting block 20 is inserted through the connecting block 20 from above, and is detachably attached to the probe base 30 by a plurality of bolts 76 screwed to the probe base. Each of the bolts 76 passes through the main body portion 20a of the coupling block 20 from above and is screwed into the screw hole 78 formed in the probe base 30.

Referring to FIGS. 1 to 8, the assembly device 24 includes a recess 80 formed in the joint block 22 (see FIGS. 6 and 8), a joint member 82 fitted to the recess 80, and a joint member 82 assembled to the lower side of the support block 18. The plurality of screw members 84 (see FIGS. 3 and 7) supported by the support block 18 and the through-holes 85 penetrating the connecting member 82 in the vertical direction are screwed to the screw members 86 of the female screw holes 88 of the joint block 22.

The recess 80 and the connecting member 82 have a circular cross-sectional shape. Further, as shown in FIGS. 3 and 7, the screw member 84 passes through the support portion 18b of the support block 18 from above and is screwed to the female screw hole 83 of the connection member 82 (see FIGS. 7 and 8). Further, the lower end portion of the screw member 86 is screwed to the female screw hole 88 provided in the coupling block 22.

In the illustrated example, the female screw hole 88 is assembled to the nut 22b of the main body portion 22a of the coupling block 22 so as not to be displaced as shown in FIG. 6, but may be directly formed in the main body as shown in FIG. Part 22a.

In a state where the positioning pin 54 (refer to FIG. 1) is inserted into the positioning pin hole of the coupling block 22, the screw member 60 is passed through the through hole 57 of the coupling block 22 from above to the bottom to be screwed to the mother of the block 34. A screw hole 58 is provided whereby the probe assembly 16 can be assembled to the coupling block 22.

The assembly device 24 and the connecting member 82 are attached to the screw member 84 by In the support block 18, the screw member 86 penetrates the coupling member 82 in the vertical direction and is screwed to the female screw hole 88, whereby the coupling block 22 is assembled to the lower side of the support portion 18b of the support block 18.

The assembly device 24 is also fitted to the coupling member 82 by the recess 80, whereby the coupling block 22 is held relative to the support block 18 at a predetermined position in the XY plane formed by the left-right direction and the front-rear direction.

In the illustrated example, the assembly device 24 further includes: a recess 90 formed in the coupling block 22 extending in the XY plane and communicating with the recess 80; extending from the coupling member 82 in the XY plane and being received in the recess 90 a pin member 92; formed under the support portion 18b of the support block 18, and open to a pair of recesses 94 on the side of the joint member 82; and extending over the joint member 82 and received in the recess 94 Member 96.

The recess 90 and the pin member 92 are in the XY plane, and extend in a direction (the X direction in the illustrated example) from the position in which the screw member is forward. On the other hand, the two recesses 94 and the two pin members 96 are separated from each other in a direction intersecting the extending direction of the recess 90 and the pin member 92, and are preferably spaced apart from each other in the straight traveling direction (the Y direction in the illustrated example).

The assembly device 24 maintains the joint block 22 at a predetermined position in the left-right direction and the front-rear direction with respect to the support block 18 by the recesses 90, 94 and the pin members 92, 96, and maintains the circumference around the θ axis extending in the vertical direction. Angle position.

The recess 80 may be provided on the support block 18, and the joint member 82 may be screwed to the joint block 22. Further, the recesses 90, 94 and the pin members 92, 96 may be provided on the opposite member as described above.

With the pin member 96 in the corresponding recess 94, the coupling member 82 is attached to the lower side of the support block 18 by the screw member 84, and then the coupling member 82 is fitted to the recess 80, and the pin member 92 is made In the state of the corresponding recess 90, the screw support member 86 is screwed to the female screw hole 88 of the coupling block 22, whereby the coupling block 22 can be assembled to the support block 18.

The work opposite to the above is performed whereby the joint block 22 can be removed from the support block 18.

As shown in FIGS. 2, 5 and 6, the wiring sheet 26 is a composite circuit sheet having a front portion 26a formed by a flexible printed wiring circuit (FPC) and a rear portion connected to the front portion 26a. The intermediate portion 26b formed by the tab (TAB) and the rear portion region 26c are formed by a flexible printed wiring circuit (FPC) connected to the end portion of the intermediate portion 26b.

As shown in FIGS. 2, 5, 6, 8, 11, and 12, the wiring sheet 26 is disposed on the lower side of the bonding block 22 by the fixing plate 100, and the integrated circuit 102 that drives the inspection object 12 is disposed in the intermediate portion 26b. .

The front portion 26a of the wiring sheet 26 includes a plurality of wirings 106 (see FIGS. 11, 12, and 14), and a plurality of connecting seats 104 (see FIGS. 11 and 12) spaced apart from each other in the left-right direction are disposed under the front end portion, and The connecting seats 104 extend side by side at intervals in the rear left and right direction.

A part of each of the wirings 106 may be used as such a connection portion instead of the connection portion 104 provided in each of the wirings 106 as a connection portion between the rear end needle 32e and the wiring 106 of the wiring sheet 26.

The intermediate portion 26b of the wiring sheet 26 has a plurality of rear side wirings spaced apart from each other in the left-right direction by a plurality of front side wirings spaced apart in the left-right direction. before The side wiring is connected to the rear end portion of the wiring 106 at the front end portion thereof, and is connected to the output terminal of the integrated circuit 102 at the rear end portion. On the other hand, the rear side wiring is connected to the input terminal of the integrated circuit 102 at the front end portion.

The rear portion 26c of the wiring sheet 26 has a plurality of wirings spaced apart from each other in the left-right direction, and the wirings are connected to the rear side wiring of the intermediate portion 26b at the front end portion thereof. The wiring sheet 26 is overlapped on the upper side of the bonding block 22 at the end portion of the rear portion 26c, and the rear end portion of the wiring 106 is upward (see FIGS. 8 and 14).

Referring to Figures 2, 5 and 6, the connecting block 28 extends the lower side of the support block 18 in the left-right direction and is located between the end of the joining block 22 and the support block 18. The connecting block 28 is detachably attached to the lower side of the support block 18 by a plurality of locating pins 112 spaced apart from each other in the front-rear direction by a plurality of screw members 110 spaced apart in the left-right direction.

Each of the screw members 110 penetrates the connecting block 28 from below and is screwed to the support block 18. Each of the positioning pins 112 is fixed to the connection block 28 and the support block 18 in a state of extending in the vertical direction, and is fitted to the other positioning hole provided in the connection block 28 and the support block 18.

2, 5, 6 and 14, the probe device further includes a connecting piece 114 extending from the connecting block 28 to the rear, being attached to the lower side of the connecting block 28 at the front end portion, and being mounted on the lower side of the connecting block Elastomer 116.

The connecting piece 114 has a plurality of wires 118 (see FIG. 14) extending in the front-rear direction with the left-right direction being spaced apart from each other. At least the front end portion of each of the wires 118 is exposed on the lower surface of the connecting piece 114, and is in contact with the wiring 106 stacked above the wiring sheet 26.

The wiring 118 of the connecting piece 114 is connected to the circuit of the testing device in a state where the probe device 10 is assembled to the testing device. Therefore, each probe 32 is connected to the circuit of the test apparatus through the wiring 106 of the wiring sheet 26, the integrated circuit 102, and the wiring 118 of the connecting piece 114.

The elastic body 116 is located on the lower side of the connection block 28, and is disposed at a portion corresponding to the contact portion of the wiring of the wiring sheet 26 and the wiring 118 of the connection piece 114. Therefore, the elastic body 116, the wiring 106 of the wiring sheet 26, and the wiring 118 of the connecting piece 114 are compressed and deformed in a state in which the bonding block 22 and the connecting block 28 are assembled to the support block 18 (see FIG. 14). Thereby, the wiring 106 of the wiring sheet 26 and the wiring 118 of the connection piece 114 are strongly pressed to make sure contact.

When the screw member 86 is passed through the connecting member 82, the connecting member 82 is attached to the support block 18, the probe assembly 16 is attached to the joint block 22, and the connecting block 28 is attached to the support block 18, and the screw member 86 is rotated. The female screw hole 88 of the coupling block 22 is inserted, whereby the coupling block 22 can be mounted to the support block 18.

The screwing of the screw member 86 to the female screw hole 88 is removed, whereby the coupling block 22 can be detached from the support block 18.

Therefore, the replacement of the probe assembly 16 and the wiring sheet 26 can be performed in a state where the bonding block 22 is separated from the support block 18. Further, in the state where the bonding block 22 is separated from the support block 18 and the probe assembly 16 is separated from the bonding block 22, the replacement of the probe 32 can be performed. Further, in the state in which the joint block 22 is separated from the support block 18 and the joint block 28 is separated from the support block 18, the replacement of the joint piece 114 can be performed.

As a result of the above, according to the probe device 10, the shape and configuration of the assembly device 24 can be simplified as compared with the prior art, and the elimination of the probe 32 can be eliminated. The replacement of consumables becomes easy.

As described above, the coupling block 22 is assembled to the support block 18, and the distal end needle 32e of each probe 32 is pressed against the joint 104 of the wiring piece 26 as shown in FIG. The pressing of the trailing end needle 32e toward the connecting base 104 acts on each of the probes 32 in the following manner.

In each of the probes 32, the distal end needle 32d is displaced upward, and in Fig. 11, the rotational force is applied in the clockwise direction. As shown in Fig. 13, the lower edge portion 52a of the concave portion 52 is pressed against the convex portion 50 of the slit rod 36. The lower edge portion 50a and the upper edge portion 52b of the recessed portion 52 are pressed against the upper edge portion 50b of the convex portion 50 of the slit rod 36.

Thereby, even if the probe 32 has a gap between the convex portion 50 and the concave portion 52 which are fitted to each other due to design and processing tolerances, the distal end needle 32d can be maintained at the same height position. As a result, the difference in the displacement amount of the probe to the probe holder is remarkably small, and the correct test can be performed.

When the needle 32 is displaced upward at the front end of the probe 32, the recess 52c to which the recess 52 is attached functions as a retreat space at the lower end of the rear end of the projection 50. Further, the probe 32 is pressed against the slit lever 36 to prevent displacement in the left-right direction.

In the test apparatus for testing an object to be inspected, a plurality of probe units having a plurality of probe devices 10 having the above-described shape configuration are disposed on the probe base 30.

Referring to Fig. 15, the probe assembly 120 further includes a plate member 124 that is positioned between the front and rear slit bars 36, 36 to extend the upper side of the probe 122 in the left-right direction. The plate member 124 is a plate-shaped main body portion 124a that extends the upper side of the probe 122 in the left-right direction, and the probe 122 and the rear side. The plate-like projections 124b extending between the slit bars 36 in the left-right direction and projecting downward are formed into an inverted L-shaped cross-sectional shape.

Each of the probes 122 has a front convex portion 122a that protrudes from the bottom of the concave portion 52 on the distal end side to the distal end, abuts against the convex portion 50 of the slit rod 36 on the front side, and the upper convex portion 122b abuts against the plate member 124. The lower surface of the main body portion 124a and the front surface of the projection 124b.

In the state in which the rear end needle 32e is pressed against the joint 104 of the connecting piece 26, when the front end needle 32d is pressed against the electrode 14 of the test object 12, the convex portion 122a is strongly pressed against the front side. The convex portion 50 of the sewing rod 36. Thereby, it is possible to surely prevent the probe 122 from being displaced in the left-right direction, the front-rear direction, and the up-and-down direction of the probe holder.

The probe unit 120 shown in FIG. 15 does not have a rod member 38 that extends in the left-right direction and penetrates the probe 122. However, such a rod member 38 can also be provided.

In the above embodiment, the convex portion 50 and the concave portion 52 may be provided on either side of the probe and the probe holder, respectively. At this time, in the embodiment of Fig. 15, the convex portion 122a can be disposed on the front side slit rod 36.

Further, it is also possible to use a needle probe made of a thin metal wire, or another probe such as a probe element using a part of each wire as a probe, instead of the airfoil probe.

The present invention can be applied not only to a probe device for a liquid crystal display panel, but also to other probe devices for a display substrate on which a glass substrate of a thin film transistor is formed, and other flat-shaped test objects for an integrated circuit. Probe device.

The present invention is not limited to the above embodiments as long as it does not deviate from the patent application Various changes can be made in the subject of the disclosure.

10‧‧‧ probe device

12‧‧‧Inspected body

14‧‧‧Electrode

16‧‧‧ probe assembly

18‧‧‧Support block

20‧‧‧Link block

22‧‧‧Combined block

24‧‧‧Assembled device

26‧‧‧Connecting piece

26a‧‧‧Front area

26b‧‧‧Intermediate area

26c‧‧‧ Rear area

28‧‧‧Connecting block

30‧‧‧ probe base

32‧‧‧ probe

32a‧‧‧ needle main body

32b‧‧‧ front end area

32c‧‧‧ Backend area

32d‧‧‧ front needle

32e‧‧‧Back end needle

34‧‧‧ pieces

36‧‧‧Slit rod

38‧‧‧ rod members

40‧‧‧ Cover

40a, 40b‧‧‧ cover members

42‧‧‧slit

50‧‧‧ convex

52‧‧‧ recess

50a, 52b‧‧‧ lower edge

50b, 52a‧‧‧ upper edge

56‧‧‧down section

58‧‧‧Female screw hole

60‧‧‧ screw components (assembly tools)

80‧‧‧ recess

82‧‧‧Connected components

84, 86‧‧‧ screw components

90, 94‧‧ ‧ recess

92, 96‧‧ ‧ pin components

100‧‧‧ fixed board

102‧‧‧Integrated circuit

104‧‧‧Connecting seat (connection)

106‧‧‧Wiring

110‧‧‧ screw components

112‧‧‧Locating pins

114‧‧‧Connecting piece

116‧‧‧ Elastomers

120‧‧‧ probe assembly

122‧‧‧Probe

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a front elevational view showing an embodiment of a probe device of the present invention.

Figure 2 is a right side view of the probe device shown in Figure 1.

Figure 3 is a plan view of the probe device shown in Figure 1.

Figure 4 is an enlarged view of a portion IV of Figure 3.

Figure 5 is a cross-sectional view taken along line V-V of Figure 1.

Fig. 6 is a cross-sectional view showing the probe device shown in Fig. 1 in an exploded manner.

Figure 7 is a front elevational view of the probe assembly and bonding block removed.

Fig. 8 is an exploded perspective view showing an embodiment of an assembling device for assembling a joint block to a support block.

Figure 9 is a front elevational view showing a portion of the probe assembly in an enlarged manner.

Figure 10 is a right side view of the probe assembly shown in Figure 9.

Figure 11 is a cross-sectional view taken along line XI-XI of Figure 9.

Figure 12 is an enlarged cross-sectional view showing one embodiment of the probe at the rear end of the probe and its vicinity.

Fig. 13 is an enlarged cross-sectional view showing a concave portion and a convex portion of the probe and the block, and an embodiment of the vicinity.

Figure 14 is an enlarged cross-sectional view of the elastomer and its vicinity.

Figure 15 is a cross-sectional view showing another embodiment of the probe assembly.

10. . . Probe device

16. . . Probe assembly

18. . . Support block

18a, 18b. . . Support

20. . . Link block

20a. . . Main body

20b. . . Extension

twenty two. . . Combined block

22a. . . Main body

22b. . . Nut

twenty four. . . Assembly device

26. . . Wiring sheet

28. . . Connector

30. . . Probe base

32. . . Probe

34. . . Block

36. . . Slit rod

38. . . Rod member

54. . . Locating pin

56. . . Down section

57. . . Through hole

58. . . Female screw hole

60. . . Screw member

62. . . guide

64. . . Guide

66. . . bolt

68. . . Screw hole

72. . . Spring press

72a. . . Through hole

80. . . Recess

82. . . Connecting member

85. . . Through hole

86. . . Screw member

88. . . Female screw hole

90. . . Recess

92. . . Needle member

94. . . Recess

96. . . Pin member

100. . . Fixed plate

102. . . Integrated circuit

110. . . Screw member

112. . . Locating pin

114. . . Connecting piece

116. . . Elastomer

Claims (6)

A probe device comprising: a support block; a joint block disposed on a lower side of the support block; an assembly device for assembling the joint block on a lower side of the support block; and a probe assembly having a front end needle and a rear end needle a plurality of probes and a probe holder in which the probes are disposed, the probes are disposed at intervals in the left-right direction, and the probe holders are extended in the front-rear direction, and are assembled on the lower side of the bonding block; The assembly device includes a coupling member formed in one of the coupling block and the support block, and a coupling member that is fitted to the recess, and a first screw member that assembles the coupling member to the coupling block or the support block, And a second screw member that penetrates the coupling member in the vertical direction and is screwed to the coupling block and the other of the support blocks; the assembly device further includes: a second recess formed in the coupling block and one of the support blocks And extending in the XY plane formed in the left-right direction and the front-rear direction, communicating with the recess formed in the one of the joint block and the support block; and a pin member extending from the joint member in the XY plane And accommodated in the second recess. The probe device of claim 1, wherein the recess and the connecting member have a circular or polygonal cross-sectional shape. The probe device of claim 1, wherein the assembly device further comprises: a third recess formed in one of the connecting member and the support block and open to the other side of the connecting member and the supporting block; and a second pin member from the other side of the connecting member and the supporting block It extends in the up and down direction and is accommodated in the third recess. The probe device according to claim 1, wherein the coupling block has a segment portion on the front end side facing downward and in which the probe assembly is disposed, and has the recessed portion fitted by the coupling member, further having A female screw hole that is screwed by the second screw member. The probe device according to claim 1, wherein the recess is formed in the joint block, and the joint member is attached to the support block by the first screw member, and the first screw member is the joint member The upper portion penetrates to the lower side and is screwed to the joint block. The probe device of claim 1, further comprising: a wiring piece disposed on a lower side of the bonding block, folding the rear end portion back to the upper side of the bonding block, and having a plurality of connecting portions under the front end portion, and a plurality of first wires extending from the connecting portion to the rear; the connecting block is disposed between the rear end portion of the bonding block and the supporting block, and is attached to the bonding block or the supporting block; and the connecting piece is mounted on the connecting piece The front end portion is extended from the connection block to the rear side of the connection block, and has a plurality of second wires extending in the front-rear direction, and the end portions of the second wires are in contact with the first wires; and the elastic body. It is disposed at a portion below the connection block and corresponding to the contact portion between the first and second wirings.