JP5491790B2 - Probe device - Google Patents

Description

  The present invention relates to a probe device used for an energization test of a flat test object such as a liquid crystal display panel.

  In general, a flat inspection object such as a liquid crystal display panel is inspected or tested by an inspection apparatus or a test apparatus using a probe apparatus such as a probe unit. One such probe device is described in Patent Documents 1 and 2.

  The probe device described in Patent Document 1 includes a plate-like probe base attached to a main body frame of a test device, a connection block attached to the probe base, and a support suspended on a slide base so that the height position can be adjusted. The block includes a probe block (probe assembly) in which a plurality of probes are supported by a probe holder, and the probe block is assembled to the support block.

  The probe holder is attached to the connecting block by a pair of screw members in a state where a convex portion protruding upward from the probe holder is inserted into a concave portion formed in the slide block. Thereby, the probe block is maintained releasably with respect to the support block.

  Each probe has a plate-like needle central region, a tip region integrally extending forward from the needle central region, a tip needle tip protruding downward from the tip needle tip region, and a rear end region integrally extending backward from the needle center region. And a rear end needle tip protruding upward from the rear end region. Such a probe is arranged in the probe holder in a state where the thickness direction of the needle center region is the left-right direction.

  In addition to the probe and the probe holder, the probe assembly extends through the needle center region in the thickness direction, and a pair of guide bars supported by the probe holder at both ends and the left and right ends to receive the tip needle tip. Supported by the probe holder having a plurality of slits spaced in the direction and having a plurality of slits spaced in the left-right direction to receive the tip end side slit bar supported by the probe holder and the rear end needle tip A rear end side slit bar.

  In the probe device described in Patent Document 1, the probe is supported on the probe holder by a pair of guide bars. In such a probe device, when the tip of the tip and the tip of the rear end are pressed against the connection part of the wiring sheet such as the electrode and the tab of the object to be inspected, and the overdrive acts on each probe, The amount of displacement of the probe varies depending on the size of the gap existing between each probe and the guide bar.

  The formation of the gap as described above between the probe and the guide bar cannot be avoided due to tolerances in design and processing. As a result, the contact between the tip of the tip and the electrode of the object to be inspected and the electrical contact between the tip of the tip of the tip and the land of the wiring sheet become unstable, and a correct test, that is, an inspection is not performed. .

  In order to solve the above-mentioned problem, in the probe device described in Patent Document 2, the above-described guide bar is used as a positioning pin, and the U-shaped first and second recesses opened forward are provided. First and second convex portions provided at the front end portion and the rear end portion of the center portion of each probe, respectively, protruding rearward and fitted into the first and second concave portions, It is provided on a load receiving bar provided at the rear end of the block piece.

  In the probe device described in Patent Document 2, the guide bar is used as a positioning pin, the first concave portion and the first convex portion are fitted, and the second concave portion and the second concave portion are fitted. By being combined, the difference in the displacement amount of the probe with respect to the block piece when the overdrive acts on each probe is reduced.

  However, the probe device described in Patent Document 2 does not disclose any assembly device for assembling the probe assembly to the connection block (slide block).

  Moreover, in the assembling apparatus described in Patent Document 1, in order to obtain reproducibility of the needle tip position when replacing consumables such as a probe, a probe block, a connection sheet, and an auxiliary block, a stopper, a plurality of convex portions, Since multiple members that require complicated operations such as multiple plungers, multiple pusher pins, multiple compression coil springs, etc. are used, not only the shape and structure of the assembly device is complicated, but also replacement of consumables Work becomes complicated.

JP 2004-191064 A JP 2009-115585 A

  An object of the present invention is to simplify the shape and structure of an assembling apparatus and facilitate replacement work of consumables.

  A probe device according to the present invention includes a support block, a coupling block disposed below the support block, an assembling device for assembling the coupling block below the support block, a leading needle tip, and a trailing needle tip A probe assembly comprising a plurality of probes having a plurality of probes and a probe holder in which the probes are arranged, wherein the probes are arranged in the probe holder so as to extend in the front-rear direction at intervals in the left-right direction, and And a probe assembly assembled to the underside of the coupling block.

  The assembly device includes a recess formed in one of the coupling block and the support block, a connecting member fitted in the recess, and a first assembly for assembling the connecting member to the coupling block or the support block. 1 screw member, and the 2nd screw member which penetrated the said connection member to the up-down direction, and was screwed together to the other of the said connection block and the said support block.

  The recess and the connecting member may have a circular or polygonal cross-sectional shape.

  The assembling apparatus further includes a second recess formed in the one of the coupling block and the support block, and extends in an XY plane formed by a left-right direction and a front-rear direction, and the coupling block and A second recess communicated with the recess formed in the one of the support blocks, a pin member extending in the XY plane from the connection member, and received in the second recess; Can be provided.

  The assembly apparatus further includes a third recess formed in the one of the connecting member and the support block, the third recess opening to the other side of the connecting member and the support block; And a second pin member extending in the vertical direction from the other of the connecting member and the support block and received in the third recess.

  The coupling block is a step portion facing downward, and has a step portion on which the probe assembly is disposed on the distal end side, and has the recess into which the connecting member is fitted, and further includes the second portion. The screw member can have a female screw hole.

The recess is formed in the coupling block, the connecting member is attached to the support block by the first screw member, and the second screw member penetrates the connecting member from above to below. And may be screwed into the coupling block.

  The probe device according to the present invention is further a wiring sheet that is disposed on the lower side of the coupling block and whose rear end portion is folded back on the upper side of the coupling block, and includes a plurality of connection portions on a lower surface of the front end portion. A wiring sheet comprising a plurality of first wires extending rearward from the connecting portion, and a connection disposed between the rear end portion of the connecting block and the support block and attached to the connecting block or the support block A connection sheet attached at the tip to the lower side of the connection block in a state extending rearward from the connection block, and having a plurality of second wirings extending in the front-rear direction, and each second wiring The tip of the connection sheet is in contact with the first wiring, and the lower part of the connection block is disposed at a position corresponding to the contact part of the first and second wirings. It may include a stoma.

  In the probe device according to the present invention, the assembling device for assembling the coupling block below the support block includes a recess formed in one of the coupling block and the support block, and a connecting member fitted in the recess. A first screw member that assembles the connecting member to the connecting block or the connecting member, and a second screw member that passes through the connecting member in the vertical direction and is screwed to the other of the connecting block and the support block. .

  For this reason, the probe assembly and the wiring sheet can be exchanged in a state where the coupling block is separated from the support block. Further, the probe can be exchanged in a state where the coupling block is separated from the support block and the probe assembly is separated from the coupling block. Further, the connection sheet can be exchanged in a state where the coupling block is separated from the support block and the connection block is separated from the support block.

  As a result of the above, according to the present invention, the shape and structure of the assembling apparatus are simplified as compared with the prior art, and the replacement work of consumables including the probe is facilitated.

It is a front view which shows one Example of the probe apparatus which concerns on this invention. It is a right view of the probe apparatus shown in FIG. It is a top view of the probe apparatus shown in FIG. FIG. 4 is an enlarged view of a portion IV in FIG. 3. It is sectional drawing obtained along the VV line in FIG. It is sectional drawing which decomposes | disassembles and shows the probe apparatus shown in FIG. It is the front view which removed the probe assembly and the connection block. It is a disassembled perspective view which shows one Example of the assembly | attachment apparatus which assembles | attaches a connection block to a support block. It is a front view which expands and shows a part of probe assembly. FIG. 10 is a right side view of the probe assembly shown in FIG. 9. It is sectional drawing obtained along the XI-XI line in FIG. It is an expanded sectional view showing one example of the back end needle tip of a probe, and its neighborhood. It is an expanded sectional view which shows one Example of the recessed part and convex part of a probe and a block piece, and those vicinity. It is an expanded sectional view of an elastomer and its vicinity. It is sectional drawing which shows the other Example of a probe assembly.

DESCRIPTION OF SYMBOLS 10 Probe apparatus 12 Display board 14 Display board electrode 16 Probe assembly 18 Support block 20 Connection block 22 Coupling block 24 Assembly apparatus 26 Wiring sheet 26a Front area 26b Middle area 26c Rear area 28 Connection block 30 Probe base 32 Probe 32a Needle main portion 32b Tip region 32c Trailing end region 32d Tip tip tip 32e Trailing tip tip 34 Block piece 36 Slit bar 38 Bar member 40 Cover 40a, 40b Cover member 42 Slit 50 Protruding portion 52 Concave portion 50a, 52a Lower edge portion 50b , 52b Upper edge portion 56 Downward stepped portion 58 Female screw hole 60 Screw member (assembly tool)
80 recess 82 connecting member 84, 86 screw member 90, 94 recess 92, 96 pin member 100 fixing plate 102 integrated circuit 104 connection land (connection portion)
106 Wiring 110 Screw member 112 Positioning pin 114 Connection sheet 116 Elastomer 120 Probe assembly 122 Probe

  [Terminology]

  In the present invention, in FIG. 1, the vertical direction is referred to as the vertical direction or the Z direction, the horizontal direction is referred to as the horizontal direction or the X direction, and the paper back direction is referred to as the front-back direction or the Y direction. However, these directions differ depending on the posture of the object to be inspected received by the panel receiver such as a work table.

  Therefore, in the probe device according to the present invention, the vertical direction (Z direction) according to the present invention is actually in any direction, such as a state in which the vertical direction is in the vertical direction, a state in which the vertical direction is reversed, or a state in which the vertical direction is inclined. It is attached to the test device and used.

  [Example]

  Referring to FIGS. 1 to 4, the probe device 10 uses a liquid crystal display panel partially shown in FIGS. 2, 5, 10, 11, and 15 as an inspection object 12, and is used for lighting inspection of the inspection object 12. . The device under test 12 has a rectangular shape, and a plurality of electrodes 14 (see FIGS. 10, 11 and 15) are formed at a predetermined pitch on edges corresponding to at least two adjacent sides of the rectangle. ing. Each electrode 14 has a belt-like shape extending in a direction (X direction or Y direction) orthogonal to the edge where the electrode 14 is disposed.

  1 to 5, the probe apparatus 10 includes a probe assembly 16, a support block 18 that supports the probe assembly 16, a connection block 20 to which the support block 18 is coupled, and a lower part of the support block 18. A coupling block 22 supported on the side (one side in the Z direction), an assembling device 24 for assembling the coupling block 22 to the lower side of the support block 18, and a wiring sheet 26 supported on the lower side of the coupling block 22 And a connection block 28 attached to the lower side of the support block 18.

  The probe apparatus 10 is assembled as a part of the test apparatus by assembling the connecting block 20 to a flat probe base 30 attached to a main body frame (not shown) of the test apparatus.

  Referring to FIGS. 9 to 11, the probe assembly 16 includes a pair of slit bars 36 in which a plurality of probes 32 made of a conductive material are assembled to the lower surface of the block piece 34 at intervals in the front-rear direction. In addition, the bar member 38 having a circular cross-sectional shape is passed through the probe 32 and spaced apart in the left-right direction, and the end portions of both bar members 38 are blocked by a pair of covers 40. 34.

  As shown in FIG. 11, each probe 32 includes a rectangular plate-shaped needle main body 32a, a tip region 32b that integrally extends forward from the front end of the needle main body 32a, and a rear end of the needle main body 32a. A rear end region 32c extending integrally rearward, a front end needle tip 32d bent downward from the front end of the front end region 32b, and a rear end needle tip 32e bent upward from the rear end of the rear end region 32c. It is a blade type needle provided. The leading end needle tip 32d and the trailing end needle tip 32e are formed in a triangular shape and sharpened.

  Each of the block piece 34 and each slit bar 36 has a prismatic shape that is long in the left-right direction by an electrically insulating ceramic, synthetic resin, or the like.

  Each slit bar 36 is manufactured in a prismatic shape from an electrically insulating material, and is attached to the front lower surface or rear lower surface of the block piece 34 so as to extend in the left-right direction. As shown in FIGS. 9 to 12, each slit bar 36 has a plurality of slits 42 on the lower surface that extend in the front-rear direction at predetermined intervals in the longitudinal direction (left-right direction) and open downward.

  In the illustrated example, the bar member 38 has a circular cross-sectional shape, and is formed of a hard electrically insulating material such as ceramic. Each bar member 38 passes through the needle main body 32 a of the probe 32. However, the bar member 38 may be formed by coating a conductive material with an electrically insulating material, or may have another cross-sectional shape such as a rectangle such as a rectangle or a hexagon. Good.

  Each probe 32 is arranged in parallel with the slit bar 36 in a state in which the thickness direction of the needle main body portion 32a is the left-right direction and the front end needle tip 32d and the rear end needle tip 32e protrude forward and backward from the block piece 34, respectively. Further, the front end region 32b and the rear end region 32c are fitted into the slits 42 of the slit bar 36.

  As shown in FIGS. 1 and 9, each cover 40 is formed by a plate-like cover member 40a located on the inner side and a plate-like cover member 40b located on the outer side.

  As shown in FIGS. 1, 2, 9 and 10, each cover 40 passes through cover members 40 a and 40 b, and includes a plurality of screw members 44 screwed to the end portions in the left and right direction of the block pieces 34. Removably attached to the side surface of the block piece 34 in the left-right direction.

  Each cover 40 is positioned with respect to the block piece 34 by a plurality of positioning pins 46. Each positioning pin 46 is attached to the end portion of the block piece 34 in the left-right direction so as to protrude from the end portion in the left-right direction, and is inserted into both cover members 40a, 40b.

  Each inner cover member 40a has a hole 48 (see FIG. 9) for receiving the end of the bar member 38. Thereby, the bar member 38 is attached to the block piece 34 and positioned by the screw member 44 and the positioning pin 46 together with the cover members 40a and 40b.

  As shown in FIGS. 10, 11 and 13, the front slit bar 36 and each probe 32 include a convex portion 50 projecting rearward and a concave portion 52 opened forward, respectively, at the rear end portion and the front end portion. The convex portion 50 and the concave portion 52 have a U-shaped cross-sectional shape and are fitted to each other.

  Moreover, the convex part 50 and the recessed part 52 are respectively located in the lower edge part and the upper edge parts 50a and 52a which are located below (one side in the Z direction), and the upper part (the other side in the Z direction). It has upper and lower edges 50b and 52b.

  The lower edge portion 50a of the convex portion 50 and the upper edge portion 52b of the concave portion 52 face downward, and the upper edge portion 50b of the convex portion 50 and the lower edge portion 52a of the concave portion 52 face upward. The upper edge 52a of the recess 52 is lowered toward the rear side. As a result, an additional recess 52 c is formed below the bottom of the recess 52.

  The probe assembly 16 also includes a plurality of positioning pins 54 (see FIG. 1) spaced in the left-right direction. Each positioning pin 54 is attached to the block piece 34 and extends upward from the block piece 34. Each positioning pin 54 is further fitted into a positioning hole (not shown) provided in the coupling block 22 to position the probe assembly 16 with respect to the coupling block 22 together with the positioning hole.

  On the contrary, the positioning pin 54 may be provided in the coupling block 22 and the positioning hole may be provided in the block piece 34.

  In each probe 32, the protrusion 50 and the recess 52 are fitted to each other, the bar member 38 passes through the probe 32, and the leading end region 32 b and the trailing end region 32 c are fitted to the slit 42. Located on the bar 36.

  Each probe 32 is also configured such that such a slit bar 36 is assembled to the block piece 34 as described above by a screw member, adhesive or the like, and the cover 40 is assembled to 34 as described above. The piece 34 is assembled and held.

  The coupling block 22 has a downward step 56 on which the probe assembly 16 is disposed, as shown in FIGS. The downward step portion 56 extends in the left-right direction at the front end portion of the lower portion of the coupling block 22.

  As shown in FIGS. 1, 5 and 6, the probe assembly 16 penetrates through the through hole 57 of the coupling block 22 from the upper side to the lower side and is screwed into a female screw hole 58 provided in the block piece 34. With the screw member 60, the positioning pin 54 is maintained in the downward stepped portion 56 in a state of being inserted into the positioning hole.

  In the drawing, adjacent probes 32 are shown to be spaced apart in the left-right direction, but the arrangement pitch of the probes 32 is actually small. The number, thickness, and arrangement pitch of the probes 32, and the number, arrangement pitch, and width of the slits of the slit bar 36 vary depending on the type of the object to be inspected 12, particularly the arrangement pitch and width of the electrodes.

  The probe assembly 16 inserts both ends of each probe 32 into the slit 42 of the slit bar 36 with the both slit bars 36 attached to the block piece 34 as described above, and fits the convex portion 50 and the concave portion 52. As a result, the bar member 38 is inserted into the probe 32 and the cover member 40 a, and then each cover 40 is attached to the block piece 34 with the screw member 44 and the positioning pin 46.

  One cover 40 may be attached to the block piece 34 after both slit bars 36 are attached to the block piece 34.

  The probe assembly 16 can be disassembled by performing the reverse operation. The replacement of the probe 32 can be performed by executing an operation similar to the above after performing the reverse operation to changing the original probe to a new probe.

  The assembly of the probe assembly 16 to the coupling block 22 is performed by inserting the screw member 60 into the through hole 57 of the coupling block 22 with the positioning pin 54 (see FIGS. 1 and 6) inserted into the positioning hole of the coupling block 22. Can be carried out by passing through the above from below and screwing it into the female screw hole of the block piece 34.

  Removal of the probe assembly 16 from the coupling block 22 can be performed by performing the reverse operation.

  In this embodiment, the block piece 34 and the slit bar 36 constitute a probe holder in which a plurality of probes 32 are arranged in parallel at one end face in the left-right direction at intervals in the front-rear direction.

  Referring to FIGS. 1 to 7, the support block 18 is manufactured to have an L-shaped cross section by two plate-like support portions 18a and 18b. The connection block 20 has an inverted L-shape by a main body portion 20a attached to the probe base 30 and an extension portion 20b extending forward from the upper portion of the main body portion 20a.

  In the illustrated example, the support block 18 forms a support together with the coupling block 22, and the screw member 60 functions as an assembly tool for assembling the probe assembly 16 to the coupling block 22.

  The support block 18 has a pair of guide rails 62 extending in the vertical direction with an interval in the left-right direction, and a guide 64 extending in the vertical direction between the guide rails 62, and is supported in the vertical direction on the front surface of the main portion 20 a of the connection block 20. It is connected to the extension portion 20b of the connection block 20 by a bolt 66 so that the position in the vertical direction can be adjusted.

  Both guide rails 62 and guides 64 are a linear rail and a linear guide, respectively. Both guide rails 62 are attached to the rear end face of the support portion 18 a of the support block 18. On the other hand, the guide 64 is disposed between the two guide rails 64 in the left-right direction, and is guided by the two guide rails 64 so as to be movable in the vertical direction. It is attached to the surface.

  The bolt 66 penetrates the extended portion 20 b of the connection block 20 from the upper side to the lower side, and is screwed into a screw hole 68 formed in the support block 18. As shown in FIG. 1, the support block 18 is biased downward by a pair of compression coil springs 70 that are spaced apart in the left-right direction.

  Each compression coil spring 70 is connected between the support block 18 and a plate-shaped spring retainer 72 attached by a plurality of screw members 71 (see FIGS. 3 and 5) on the extension 20 b of the connection block 20. It arrange | positions in the state which penetrates the extension part 20b of the block 20 to an up-down direction. Thereby, the height position of the support block 18 and the probe assembly 16 can be adjusted by adjusting the screwing amount of the bolt 66 into the screw hole 68.

  The spring retainer 72 has a through hole 72a for adjusting the amount of rotation of the bolt 66 by inserting the tip of a tool such as a screwdriver from above. Thereby, since the height position of the support block 18 and the probe assembly 16 can be adjusted without removing the spring 72 from the support block 18, such height position adjustment is facilitated.

  As shown in FIG. 5, the connecting block 20 is detachably attached to the probe base 30 by a plurality of bolts 76 that pass through the connecting block 20 downward from above and are screwed to the probe base. Each bolt 76 penetrates the main body portion 20 a of the connection block 20 from the upper side to the lower side, and is screwed into a screw hole 78 formed in the probe base 30.

  1 to 8, the assembling device 24 includes a recess 80 (see FIGS. 6 and 8) formed in the coupling block 22, a connecting member 82 fitted in the recess 80, and a connecting member 82. A plurality of screw members 84 (see FIGS. 3 and 7) assembled to the lower side of the support block 18 and supported by the support block 20, and a through hole 85 of the connecting member 82 are vertically penetrated to form a screw hole of the coupling block 22. And a screw member 86 screwed into the screw 88.

  The recess 80 and the connecting member 82 have a circular cross-sectional shape. 3 and 7, the screw member 84 penetrates the support portion 18b of the support block 18 from above to below and is screwed into the female screw hole 83 (see FIGS. 7 and 8) of the connecting member 82. ing. Further, the lower end portion of the screw member 86 is screwed into a female screw hole 88 provided in the coupling block 22.

  In the illustrated example, the female screw hole 88 is a nut 22b that is non-displaceably assembled to the main portion 22a of the coupling block 22 as shown in FIG. 6, but is directly formed in the main portion 22a as shown in FIG. May be.

  Assembling of the probe assembly 16 to the coupling block 22 is performed by moving the screw member 60 above the through hole 57 of the coupling block 22 with the positioning pin 54 (see FIG. 1) inserted into the positioning hole of the coupling block 22. Can be carried out by screwing it down into the female screw hole 58 of the block piece 34.

  In the assembling apparatus 24, the connecting member 82 is attached to the support block 18 by the screw member 84, and the screw member 86 penetrates the connecting member 82 in the vertical direction and is screwed into the female screw hole 88, whereby the connecting block 22. Is assembled to the lower side of the support portion 18 b of the support block 18.

  The assembly device 24 also maintains the coupling block 22 at a predetermined position in the XY plane formed in the left-right direction and the front-rear direction with respect to the support block 18 by fitting the recess 80 and the connecting member 82 together. doing.

  In the illustrated example, the assembling device 24 is further formed in the coupling block 22, extends in the XY plane, extends in the XY plane from the recess 90 connected to the recess 80, and extends in the XY plane. A pin member 92 received at the location 90, a pair of recesses 94 formed on the lower surface of the support portion 18b of the support block 18 and opened to the connection member 82 side, and extending above the connection member 82 to form a recess. A pair of pin members 96 received at the point 94.

  The recess 90 and the pin member 92 extend in one direction (X direction in the illustrated example) in front of the screw member 86 in the XY plane. On the other hand, the two recesses 94 and the two pin members 96 are separated from each other in a direction intersecting with the extending direction of the recesses 90 and the pin member 92, preferably in a direction orthogonal (Y direction in the illustrated example). Yes.

  The assembly device 24 maintains the coupling block 22 at a predetermined position in the left-right direction and the front-rear direction with respect to the support block 18 by the recesses 90, 94 and the pin members 92, 94, and extends in the up-down direction. A predetermined angular position around the axis is maintained.

  A recess 80 may be provided in the support block 18 and the connecting member 82 may be screwed to the coupling block 22. Moreover, you may provide the recesses 90 and 94 and the pin members 92 and 96 in the member opposite to the above.

  Assembling of the coupling block 22 to the support block 18 is performed by attaching the connecting member 82 to the lower side of the support block 18 with the screw member 84 with the pin member 96 positioned in the corresponding recess 94, and then connecting the connecting member 82. This can be performed by fitting the screw holding member 86 into the female screw hole 88 of the coupling block 22 in a state where the pin member 92 is positioned in the corresponding recess 90 by fitting into the recess 80.

  Removal of the connecting block 22 from the support block 18 can be performed by performing the reverse operation.

  As shown in FIGS. 2, 5 and 6, the wiring sheet 26 is formed by a front region 26a formed by a flexible printed circuit (FPC) and a tab (TAB) following the rear end portion of the front region 26a. The composite circuit sheet includes an intermediate region 26b and a rear region 26c formed by a flexible printed circuit (FPC) following the rear end portion of the intermediate region 26b.

  As shown in FIGS. 2, 5, 6, 8, 11, and 12, the wiring sheet 26 is positioned below the coupling block 22 by the fixing plate 100, and the integrated circuit 102 that drives the device under test 12 is provided. It arrange | positions in the intermediate | middle area | region 26b.

  The front region 26 a of the wiring sheet 26 includes a plurality of connection lands 104 (see FIGS. 11 and 12) spaced in the left-right direction on the lower surface of the front end portion, and is spaced from the connection land 104 rearward in the left-right direction. A plurality of wirings 106 (see FIGS. 11, 12, and 14) extending in parallel are provided.

  Instead of using the connection land 104 provided in each wiring 106 as a connection portion between the trailing end needle tip 32e and the wiring 106 of the wiring sheet 26, a part of each wiring 106 may be used as such a connection portion.

  The intermediate region 26b of the wiring sheet 26 has a plurality of front wirings spaced in the left-right direction and a plurality of rear wirings spaced in the left-right direction. The front wiring is connected to the rear end of the wiring 106 at the front end, and is connected to the output terminal of the integrated circuit 102 at the rear end. On the other hand, the rear wiring is connected to the input terminal of the integrated circuit 102 at the front end.

  The rear region 26c of the wiring sheet 26 has a plurality of wires spaced in the left-right direction, and these wires are connected to the rear wires of the intermediate region 26b at the front end thereof. The wiring sheet 26 is folded back to the upper side of the coupling block 22 at the rear end portion of the rear region 26c, and the rear end portion of the wiring 106 faces upward (see FIGS. 8 and 14).

  Referring to FIGS. 2, 5, and 6, the connection block 28 extends in the left-right direction below the support block 18, and is positioned between the rear end portion of the coupling block 22 and the support block 18. . The connection block 28 is separably attached to the lower side of the support block 18 by a plurality of screw members 110 spaced in the left-right direction and a plurality of positioning pins 112 spaced in the front-rear direction.

  Each screw member 110 penetrates the connection block 28 from below to above and is screwed to the support block 18. Each positioning pin 112 is fixed to one of the connection block 28 and the support block 18 so as to extend in the vertical direction, and is fitted into a positioning hole provided in the other of the connection block 28 and the support block 18.

  Referring to FIGS. 2, 5, 6, and 14, the probe device 10 further includes a connection sheet 114 that is attached to the lower side of the connection block 28 at the distal end so as to extend rearward from the connection block 28, and And an elastomer 116 mounted on the lower side.

  The connection sheet 114 has a plurality of wirings 118 (see FIG. 14) extending in the front-rear direction at intervals in the left-right direction. At least the tip of each wiring 118 is exposed on the lower surface of the connection sheet 114 and is in contact with the wiring 106 that is folded back above the wiring sheet 26.

  The wiring 118 of the connection sheet 114 is connected to an electric circuit of the test apparatus in a state where the probe apparatus 10 is assembled to the test apparatus. Therefore, each probe 32 is connected to the electrical circuit of the test apparatus via the wiring 106 of the wiring sheet 26, the integrated circuit 102, and the wiring 118 of the connection sheet 114.

  The elastomer 116 is disposed below the connection block 28 and at a position corresponding to a contact portion between the wiring sheet 26 and the wiring sheet 118 of the connection sheet 114. For this reason, the elastomer 116, the wiring 106 of the wiring sheet 26, and the wiring 118 of the connection sheet 114 are compressed and deformed in a state where the coupling block 22 and the connection block 28 are assembled to the support block 18 (see FIG. 14). Thereby, the wiring 106 of the wiring sheet 26 and the wiring 118 of the connection sheet 114 are strongly pressed and come into contact with each other with certainty.

  The coupling block 22 is attached to the support block 18 by attaching the coupling member 82 to the support block 18 with the screw member 86 passed through the coupling member 82, attaching the probe assembly 16 to the coupling block 22, and supporting the connection block 28. After attaching to the block 18, the screw member 86 is screwed into the female screw hole 58 of the coupling block 22.

  Removal of the connecting block 22 from the support block 18 can be performed by releasing the screwing of the screw member 86 into the female screw hole 58.

  For this reason, the probe assembly 18 and the wiring sheet 26 can be replaced in a state where the coupling block 22 is separated from the support block 18. Further, the probe 32 can be replaced in a state where the coupling block 22 is separated from the support block 18 and the probe assembly 16 is separated from the coupling block 22. Further, the connection sheet 114 can be exchanged with the coupling block 22 separated from the support block 18 and the connection block 28 separated from the support block 18.

  As a result of the above, according to the probe device 10, the shape and structure of the assembly device 24 are simplified and the replacement work of consumables including the probe 32 is facilitated as compared with the prior art.

  When the coupling block 22 is assembled to the support block 18 as described above, the rear end needle tip 32e of each probe 32 is pressed against the connection land 104 of the wiring sheet 26 as shown in FIG. The pressing of the rear end needle tip 32e to the connection land 104 acts on each probe 32 as follows.

  Each probe 32 receives a rotational force in the clockwise direction in FIG. 11 such that the tip needle tip 32d is displaced upward, and as shown in FIG. While being pressed by the lower edge portion 50 a of the portion 50, the upper edge portion 52 b of the concave portion 52 is pressed by the upper edge portion 50 b of the convex portion 50 of the slit bar 36.

  As a result, the probe 32 maintains the tip end 32d at the same height position even if there is a gap due to design and processing tolerances in the convex portion 50 and the concave portion 52 that are fitted to each other. . As a result, the difference in the displacement of the probe with respect to the probe holder is remarkably reduced, and a correct test can be performed.

  When the tip end of the probe 32 is displaced upward, the additional recess 52a of the recess 52 acts as a clearance space below the rear end of the protrusion 50. Further, the probe 32 is pressed by the slit bar 36 and is prevented from being displaced in the left-right direction.

  In a test apparatus for testing an object to be inspected, a plurality of probe units in which a plurality of probe apparatuses 10 having the shape structure as described above are arranged on a probe base 30 are used.

  Referring to FIG. 15, the probe assembly 120 further includes a top member 124 that extends between the front and rear slit bars 36 and 36 and extends above the probe 122 in the left-right direction. The top member 124 includes a plate-like main portion 124a extending in the left-right direction on the upper side of the probe 122, and a plate-like protrusion 124b extending in the left-right direction between the probe 122 and the rear slit bar 36 and projecting downward. Thus, it is manufactured in a reverse L-shaped cross-sectional shape.

  Each probe 122 protrudes from the bottom of the concave portion 52 on the front end side to the front end, and comes into contact with the convex portion 50 of the front slit bar 36, and the lower surface and the protruding portion 124b of the main portion 124a of the top member 124. And an upper protrusion 122b that comes into contact with the front surface of the lens.

  In each probe 122, when the end needle tip 32 d is pressed against the electrode 14 of the device under test 12 with the rear end needle tip 32 e pressed against the connection land 104 of the connection sheet 26, the convex portion 122 a is a front slit. It is strongly pressed against the convex portion 50 of the bar 36. Thereby, displacement of the probe 122 with respect to the probe holder in the left-right direction, the front-rear direction, and the up-down direction is reliably prevented.

  The probe assembly 120 shown in FIG. 15 does not include the bar member 38 that extends in the left-right direction and penetrates the probe 122. However, such a bar member 38 may be provided.

  In the above embodiment, the convex portion 50 and the concave portion 52 may be provided on either side of the probe and the probe holder, respectively, contrary to the above. In this case, in the embodiment in FIG. 15, the convex portion 122 a can be provided on the front slit bar 36.

  Instead of the blade-type probe, other probes such as a needle-type probe made of a fine metal wire or a probe element using a part of each wiring as a probe may be used.

  The present invention provides not only a probe device for a liquid crystal display panel, but also a probe device for other display substrates such as a glass substrate on which a thin film transistor is formed, and a probe for other flat plate-like objects to be inspected such as integrated circuits. It can also be applied to devices.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

Claims (6)

A support block; a coupling block disposed on the lower side of the support block; an assembling apparatus for assembling the coupling block on the lower side of the support block; a plurality of probes having a tip needle tip and a trailing needle tip; A probe assembly including a probe holder disposed in the probe holder, wherein the probe is disposed in the probe holder so as to extend in the front-rear direction at intervals in the left-right direction, and is assembled to the lower side of the coupling block. A probe assembly,
The assembly device includes a recess formed in one of the coupling block and the support block, a connecting member fitted in the recess, and a first assembly for assembling the connecting member to the coupling block or the support block. 1 screw member, and a second screw member that penetrates the connecting member in the vertical direction and is screwed to the other of the coupling block and the support block,
The assembling apparatus further includes a second recess formed in the one of the coupling block and the support block, and extends in an XY plane formed by a left-right direction and a front-rear direction, and the coupling block and A second recess communicated with the recess formed in the one of the support blocks, a pin member extending in the XY plane from the connection member, and received in the second recess; A probe apparatus.   The probe device according to claim 1, wherein the recess and the connecting member have a circular or polygonal cross-sectional shape.   The assembly apparatus further includes a third recess formed in the one of the connecting member and the support block, the third recess opening to the other side of the connecting member and the support block; And a second pin member extending in the up-down direction from the other of the connecting member and the support block and received in the third recess. Probe device.   The coupling block is a step portion facing downward, and has a step portion on which the probe assembly is disposed on the distal end side, and has the recess into which the connecting member is fitted, and further includes the second portion. The probe device according to any one of claims 1 to 3, further comprising a female screw hole into which the screw member is screwed. The recess is formed in the coupling block, the connecting member is attached to the support block by the first screw member, and the second screw member penetrates the connecting member from above to below. The probe device according to claim 1, wherein the probe device is screwed to the coupling block. Furthermore, the wiring sheet is disposed below the coupling block and has a rear end folded back to the upper side of the coupling block. The wiring sheet includes a plurality of connection portions on a lower surface of the front end portion and extends rearward from the connection portions. A wiring sheet comprising a plurality of first wirings;
A connecting block disposed between the rear end of the coupling block and the support block and attached to the coupling block or the support block;
A connection sheet that is mounted at the front end on the lower side of the connection block so as to extend rearward from the connection block, and has a plurality of second wires extending in the front-rear direction, and the front end of each second wire A connection sheet in contact with the first wiring;
The probe according to any one of claims 1 to 5, further comprising an elastomer disposed at a position below the connection block and corresponding to a contact portion of the first and second wirings. apparatus.

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