JP2000214184A - Probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent displacement in an array direction of a probe element and therewith make deformation of the probe element independent of other elements. SOLUTION: A probe device comprises a base mount 36 with a recess extending along an end edge, an elastic body 38 arranged at the recess with a part projected from the recess, and a sheet-typed member 40 where a plurality of wiring 46 are formed at a side surface of a film 50. The sheet-typed member 40 is arranged at the base 36 so that a surrounding area of the body 38 acts as probe elements 84 with slits 54 making co-adjacent probe elements 84 independent at arranged locations.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device used for inspecting a flat object to be inspected, and more particularly to a probe device using a film probe suitable for inspecting a liquid crystal panel.

[0002]

2. Description of the Related Art Inspection is performed using a flat object to be inspected such as an integrated circuit or a liquid crystal panel, generally using a probe device such as a probe card. As one of such probe devices,
In some cases, a plurality of wiring portions extending in parallel with each other are formed on one surface of an electrically insulating film, and a film-shaped probe is used in which a part of each wiring portion is used as a probe element.

A probe device using such a film probe is a needle-type probe device in which a probe formed of a thin metal wire is arranged on a wiring board, and a blade-type probe device in which a blade-like probe is arranged in a block. In comparison, since a needle stand is not required, the manufacture is easy and the cost is low.

In a probe device using a film probe, since an elastic force in a region of the probe element is small, an elastic body such as silicone rubber is provided between the region of the probe element and a mounting plate for mounting the film probe. By arranging the probe elements, an apparent elastic force is imparted to the probe element (for example, JP-A-3-218473). However, in this probe device, when the probe element is pressed against the object to be inspected, deformation of adjacent probe elements affects each other, and as a result, there are many probe elements that do not contact the electrodes of the object to be inspected.

In some films, a slit is formed in a portion between adjacent probes to form a finger-like probe element, thereby independently deforming the probe. However, in this probe device, since the tip position of the probe element in the arrangement direction of the probe elements is not stable, when the probe element is pressed against the device under test, the tip of the probe element is displaced in the arrangement direction of the probe elements. There will be probe elements that do not contact the electrodes of the liquid crystal pal.

From the above, in a film-like probe using a finger-like probe element, a metallic spring material is provided on the entire back surface of the film (for example, Japanese Patent Application Laid-Open No. 4-363671). However, in order to make the displacement of the probe element independent, the slit must be formed not only in the film but also in the spring material, so when forming the slit in the spring material, the location of the wiring part acting as the probe element may be damaged. Often do.

[0007]

Therefore, in the probe apparatus, it is important to make the deformation of the probe element independent, although the displacement of the probe element in the arrangement direction can be prevented.

[0008]

A probe device according to the present invention comprises a mounting base having at least one edge and a recess extending along the edge, and a mounting base having a part protruding from the recess. And a sheet-like member having a plurality of wiring portions extending in parallel with each other on one surface of the electrically insulating film. The sheet-shaped member is disposed on the mounting base such that the wiring portion is located outside the film and extends around the protrusion of the elastic body from the recess, and between the adjacent wiring portions. Is provided at a position corresponding to the arrangement position of the elastic body.

In this probe device, the area of the sheet-like member including the wiring portion corresponding to the position of the elastic body is used as a probe element pressed against the electrode portion of the test object. When the probe element is pressed against the test object, the area of the probe element is independently deformed by the slit so as to compressively deform the elastic body. At this time, each of the probe elements is prevented from being displaced in the arrangement direction by the elastic body.

According to the present invention, the wiring portion extends across the projecting portion of the elastic body with the wiring portion being outside the film, and the sheet-like member is provided with a slit extending between the adjacent wiring portions. Since the probe element is provided at a position corresponding to the position, the probe element is prevented from being displaced in the arrangement direction, even though the probe element is independently deformed.

[0011] The sheet-like member is folded back at least at the edge or at a location where the elastic body is disposed, and is attached to the mounting base at a front end portion ahead of the slit and a rear end portion behind the slit. Can be. This stabilizes the positions of the leading end and the trailing end of the sheet member with respect to the mounting base, so that displacement of the probe elements in the arrangement direction is reliably prevented.

The projecting portion of the elastic body may have a shape forming an arc surface. With this configuration, since each wiring portion is curved in an arc shape along the protrusion of the elastic body, the probe element surely comes into contact with the inspection object at any position of the curved wiring portion.

[0013] Further, it is possible to include a driving integrated circuit arranged on the mounting base and connected to the wiring section. In this case, since the tab (TAB) can be used as the sheet-like member, the cost of the sheet-like member is reduced.

[0014] The sheet-shaped member may have a plurality of second wiring portions connected to the integrated circuit and extending to a side opposite to the wiring portion. Further, it may include a flexible printed wiring board (FPC) having a plurality of third wiring portions connected to the integrated circuit.

[0015] The elastic body may have a slit in the protruding portion communicating with each slit. In this way, the movement of each probe element is more reliably independent.

Further, the base may include a base plate having an opening in the center, and the mounting base may be assembled to the base plate in a state where the position of the elastic body protrudes from the opening.

The assembling means for assembling the mounting base to the base plate includes a Z base assembled to the base plate with a front end protruding from the opening, and a Z base mounted to be movable in a thickness direction of the base plate. A movable piece assembled to the tip of the Z base.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 and 2, a probe device 10 is used for an inspection device for a liquid crystal panel 12, particularly for a lighting inspection device. The liquid crystal panel 12 has a rectangular shape, and a part thereof has a plurality of electrode portions 14 at edges corresponding to two adjacent sides as shown in FIG.

Inspection stage 1 on which liquid crystal panel 12 is arranged
6, a chuck top 20 containing a backlight for illuminating the liquid crystal panel 12 from behind, a θ stage 22 for rotating the chuck top 20 angularly around an axis orthogonal to the liquid crystal panel 12, and a chuck top 20. A Z stage 24 for moving in the direction of the axis perpendicular to the liquid crystal panel 12 (vertical direction), a Y stage 26 for moving the chuck top 20 in the front-rear direction (Y direction) in a plane parallel to the liquid crystal panel 12, and a chuck top X is moved in the horizontal direction (X direction) in a plane parallel to the liquid crystal panel 12.
And a stage 28.

The probe device 10 has a rectangular base plate 3.
0, and a plurality of probe blocks 32 arranged on the base plate 30. The base plate 30 is formed of a plate material such as aluminum, the surface of which is anodized, and has an opening 34 having a shape substantially similar to the liquid crystal panel 12 at the center. The surface forming each corner of the opening 34 is an arc surface.

As shown in FIGS. 3 to 7, each probe block 32 is attached to a rectangular plate-like mounting base 36.
The probe unit is formed by mounting the long elastic body 38 and the sheet-like member 40.

The mounting base 36 has an inverted L-shaped recess 42 extending continuously in the width direction at the lower corner of one end of the longitudinal direction, and a projection extending in the width direction at one end. Part 44
On the upper surface. The elastic body 38 is manufactured in the form of a rod having a fan-shaped cross section using an electrically insulating material such as silicone rubber, and is formed in the recess 42 with an arc-shaped portion protruding from the recess 42. Are located.

The sheet member 40 is a film probe in which a plurality of first wiring portions 46 and a plurality of second wiring portions 48 are formed on one surface of an electrically insulating film 50.
Also, a driving integrated circuit 52 electrically connected to the first and second wiring portions 46 and 48 is provided.

As shown in FIG. 8, the first wiring portion 46 extends in parallel from the integrated circuit 52 to one end (end) of the film 50, and the second wiring portion 48 extends from the integrated circuit 52 to the film 50. It extends in parallel to the other end (rear end). The film 50 is formed by forming a slit 54 for partially separating the region of the adjacent first wiring portion 46 from the adjacent first wiring portion 46.
Have in between.

As shown in FIG. 3 and FIG. 7, the sheet-like member 40 includes first and second wiring portions 46 and 48 formed of a film 5.
The slit 54 is attached to the mounting base 36 such that the slit 54 extends around the protruding portion of the elastic body 38 in a state where the slit 54 is outside the zero.

A front end portion of the sheet-like member 40, which is located forward of the slit 54, is attached to an upper surface of a leading end portion of the mounting base 36 by a sheet retainer 56 and a plurality of screws 58, and a rear end portion located behind the slit 54. Is attached to the lower surface of the mounting base 36 by bonding, locking or the like. It is preferable that the rear end portion of the sheet-like member 40 be detachably mounted on the mounting base 36.

As a result, together with the sheet-like member 40, the first wiring portion 46 extends from the upper surface of the distal end of the mounting base 36 to the lower surface of the mounting base 36 across the distal edge of the mounting base 36 and the elastic body 38. The elastic body 38 is bent in a J (or U) shape, and protrudes in an arc at the position where the elastic body 38 is disposed.

As shown in FIG. 7, the film 50 where the integrated circuit 52 is disposed is removed, and the first and second wiring portions 4 are removed.
6, 48 at the location of the integrated circuit 52,
The integrated circuit 52 may be connected between the exposed ends of the wiring portions 46 and 48 and disposed between the wiring portions 46 and 48 and the mounting base 36. In this way, the integrated circuit 52 is protected by the sheet-like member 40 and the mounting base 36. Further, the recess 60 accommodating the integrated circuit 52 is attached to the mounting base 36.
In this case, the integrated circuit 52 is more reliably protected.

The sheet-shaped member 40 may be manufactured exclusively, or may be manufactured using a tab (TAB). In any case, as shown in FIG.
8 on the film 50 or the integrated circuit 5
8A and 8B, a plurality of slits 54 are formed at predetermined locations by an appropriate method such as laser processing, as shown in FIGS. be able to.

After the sheet-like member 40 is manufactured as described above or mounted on the mounting base 36 as described above,
A flexible printed wiring board 62 is mounted on the lower surface of the rear end of the sheet-like member 40. The wiring board 62 has a plurality of third wiring portions 64 extending in parallel on one surface of the electrically insulating film 66. The third wiring portion 64 is electrically connected at its leading end to the rear end of the second wiring portion 48.

As shown in FIG. 5, the mounting base 36 of the probe unit is mounted on the base plate 30 with a plurality of screws 68 with the tip protruding from the opening 34.
Z can be moved in the thickness direction of base 70 and base plate 30.
The movable piece 72 attached to the distal end of the base 70 and the spacer 74 attached to the movable piece 72 are attached to the base plate 30. The mounting base 36 is mounted on the spacer 74.

The movable piece 72 includes a movable piece 72 and a Z base 70.
Are urged downward by a plurality of compression coil springs 76 disposed therebetween, and are assembled to the Z base 70 by one or more adjustment screws 78. The movement of the movable piece 72 with respect to the Z base
Since the guide 80 and the Z guide rail 82 provided on the movable piece 72 are fitted so as to be movable in the thickness direction of the base plate 30, it is accurately maintained.

In the sheet-like member 40, an arc-shaped region including the first wiring portion 46 at a position corresponding to the position where the elastic body 38 is disposed is separated from the probe element 8 by the slit 54.
4 used at the time of inspection.
4 is touched.

In the probe device 10, when the probe device 10 and the liquid crystal panel 12 are relatively moved in the mutually approaching direction, first, as shown by a solid line in FIG.
Contacts the liquid crystal panel 12. Then, the probe device 1
When the 0 and the liquid crystal panel 12 are further moved relative to each other and the overdrive acts on the probe area 84, the probe element 84 deforms so as to compressively deform the elastic body 38 as shown by a dashed line in FIG.

In the probe device 10, since the adjacent probe elements 84 are independent by the slit 54, each probe element 84 is independently deformed. At this time, each of the probe elements 84 is prevented from being displaced in the arrangement direction by the elastic body 38. Therefore, according to the probe device 10, the displacement of the probe elements 84 in the arrangement direction is prevented even though the probe elements 84 are independently deformed.

Each probe element 84 is deformed so as to be displaced forward with respect to the electrode section 14 of the liquid crystal panel 12 while compressively deforming the elastic body 38. As a result, each probe element 84 exerts a rubbing action on the electrode section 14 of the liquid crystal panel 12 by the first wiring section 46, so that the oxide film on the surface of the electrode section 14 is rubbed off. Good electrical contact between the wiring portion 46 and the electrode portion 14 can be obtained.

Instead of the elastic body 38 having a fan-shaped cross-section, an elastic body having another cross-section such as a circular cross-section such as an elastic body 86 shown in FIG. Instead of the U-shaped recess 42, a recess having another shape such as a U-shape, such as a recess 88 as shown in FIG. 10, may be used.

Further, as shown in FIG. 11, a bump electrode 90 pressed against the electrode portion of the liquid crystal panel is connected to each first wiring portion 46.
May be formed in the probe region 84. By doing so, the probe device surely comes into contact with the electrode portion of the liquid crystal panel at the bump electrode 90, and can reliably apply the rubbing action to the electrode portion of the liquid crystal panel by the bump electrode 90.

Further, as shown in FIG.
A slit 92 communicating with 4 may be formed in the elastic body 38. In this way, each probe element 84 is more reliably independently deformed. The slit 92 is formed in the sheet member 4.
After the 0 is mounted on the mounting base 36, it can be formed together with the slit 54.

When the present invention is applied to a probe device used for inspection of a liquid crystal panel, a tab can be used as a sheet-like member, which is preferable. However, the present invention is also applicable to inspection of another flat object to be inspected such as an integrated circuit. The present invention can be applied to the probe device used. The present invention is not limited to the above-described embodiment, and can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a probe device according to the present invention.

FIG. 2 is a cross-sectional view taken along line 2-2 of FIG. 1, showing the probe device together with an inspection stage of the inspection device.

FIG. 3 is a perspective view showing one embodiment of a distal end portion of a probe block used in the probe device shown in FIG. 1;

FIG. 4 is a plan view of a probe block.

FIG. 5 is a sectional view taken along line 5-5 in FIG. 4;

FIG. 6 is a left side view of the probe block shown in FIG. 5;

FIG. 7 is an enlarged sectional view of a probe block.

8A and 8B are views for explaining a method of manufacturing a sheet-like member, wherein FIG. 8A is a view before forming a slit, FIG. 8B is a view showing the formation of a slit, and FIG.

FIG. 9 is an enlarged view showing a deformed state of the probe element when the probe element is pressed against the liquid crystal substrate.

FIG. 10 is a view showing another embodiment of the elastic body and the recess.

FIG. 11 is a sectional view showing an embodiment in which a bump electrode is formed on a probe element.

FIG. 12 is a cross-sectional view showing an example of a samurai history in which a slit is formed in an elastic body.

[Explanation of symbols]

 Reference Signs List 10 probe device 12 liquid crystal panel 14 electrode part of weather panel 16 inspection stage 30 base plate 32 probe block 34 opening of base plate 36 mounting base 38,86 elastic body 40 sheet member (film probe) 42 recess 46 first Wiring part 48 Second wiring part 50 Film 52 Driving integrated circuit 54 Slit 56 Sheet presser 62 Flexible printed wiring board 70 Z base 72 Movable body 74 Spacer 84 Probe element 90 Bump electrode 92 Elastic body slit

Claims (9)

[Claims] 1. A mounting base having at least one edge and a recess extending along the edge, an elastic body disposed in the recess such that a part thereof protrudes from the recess, and an elastic body arranged in parallel with each other. A sheet-like member having a plurality of wiring portions extending on one side of an electrically insulating film, the sheet-like member being such that the wiring portion is outside the film and the elastic body from the recess is formed. A probe device which is arranged on the mounting base so as to extend around a protruding portion of the elastic member, and has a slit extending between adjacent wiring portions at a position corresponding to the position of the elastic body. 2. The sheet-like member is folded back at least at a position where the edge or the elastic body is disposed, and the mounting is performed at a front end portion before the slit and a rear end portion behind the slit. The probe device according to claim 1, which is mounted on a base. 3. The probe device according to claim 1, wherein the protruding portion of the elastic body forms an arc surface. 4. The probe device according to claim 1, further comprising a driving integrated circuit arranged on said mounting base and connected to said wiring portion. 5. The probe device according to claim 4, wherein the sheet-like member has a plurality of second wiring portions connected to the integrated circuit and extending to a side opposite to the wiring portion. 6. The probe device according to claim 4, further comprising a flexible printed wiring board having a plurality of third wiring portions connected to the integrated circuit. 7. The probe device according to claim 1, wherein the elastic body has a slit in the protrusion that communicates with each slit. 8. The apparatus according to claim 1, further comprising a base plate having an opening in the center, wherein said mounting base is assembled to said base plate in a state in which an arrangement position of said elastic body is projected to said opening. The probe device according to any one of the above. 9. An assembling means for assembling the mounting base to the base plate, wherein the assembling means is movable in a thickness direction of the base plate and a Z base assembled to the base plate in a state in which a tip portion protrudes from the opening. The probe device according to claim 8, further comprising: a movable piece attached to a tip portion of the Z base.