JP2011122942A - Probe device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a probe for the power of a power source from touching other electrodes located next to an electrode corresponding to this probe. <P>SOLUTION: A probe device includes a plurality of plate-like probes arranged with their thickness direction in the right and left direction, and probe holders arranged at intervals in the right and left direction extending in the forward and backward direction. Each probe belongs to any one of a first and second groups of probes each of which includes a plurality of probes. The dimension in the right and left direction of at least the needle tip at the tip of each of the probes belonging to the second group, is larger than that of each of the probes belonging to the first group. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a probe device used for an electrical test of a flat test object such as a liquid crystal display panel.

  In general, rectangular and flat test objects such as liquid crystal display panels are inspected or tested by an inspection apparatus or a test apparatus using a probe apparatus such as a probe unit. One such probe device is described in Patent Documents 1 and 2.

  The probe devices described in Patent Documents 1 and 2 have a plurality of plate-like probes having the same thickness dimension, and the probes extend in the front-rear direction with the thickness direction set in the left-right direction and spaced in the left-right direction. And a probe holder arranged in parallel with the state.

  Each probe includes a plate-shaped needle central region, a plate-shaped needle front region extending forward from the front end of the needle central region, and a plate-shaped tip needle tip extending downward from the front end of the needle front region. And a plate-like needle rear region extending backward from the rear end portion of the needle central region, and a plate-like rear end needle tip extending upward from the front end portion of the needle rear region. Such a probe is arranged on the probe holder with the needle center region facing each other.

  On the other hand, the object to be inspected has a plurality of strip-shaped electrodes arranged on the edge corresponding to at least one side of the rectangle, spaced in the direction of the edge, and in a direction perpendicular to the direction of the edge. Are arranged in parallel so as to extend to each other. Such an object to be inspected is supplied with an electrical signal to the electrode via the probe in a state where the tip of each probe is pressed against the electrode.

  Such an electrode of the object to be inspected is assigned to power source power for supplying DC power (power source power having two types of positive and negative potentials) to a driving element such as a thin film transistor for a pixel element of the object to be inspected. And at least two electrodes and a plurality of electrodes assigned to drive signals for turning on and off each drive element. As the power supply voltage, a DC voltage including a positive or negative potential and a ground potential is used.

  Similarly, the probe device includes at least two probes assigned to such power supply power (DC power) and a plurality of probes assigned to the drive signal, and the tip needle tip of each probe corresponds to the corresponding electrode. In this state, an electric signal is supplied to the electrode.

  In a conventional probe device using a plurality of probes having the same thickness dimension, in the case of an inspected object in which the arrangement pitch of the electrodes of the inspected object is constant or the width dimensions of the electrodes are the same, each electrode is Corresponding to one or more probes, electrical signals are supplied to the electrodes from the corresponding probes.

  On the other hand, in the case of an object to be inspected in which the width dimension of the electrode for power supply, and hence the arrangement pitch, is larger than those of the electrode for drive signal so that a large power supply can be supplied, the conventional probe as described above is used. In the apparatus, a plurality of probes are assigned to each power supply electrode.

  However, when a plurality of probes are assigned to each drive electrode, the width of the drive electrodes and the arrangement pitch are larger than those of the drive signal, so that one probe tip of the probe assigned to the power supply power is Adjacent power supply electrode or drive signal electrode may be contacted, and accurate test results cannot be obtained.

Japanese Patent Laid-Open No. 10-132853 JP 2004-191064 A

  An object of the present invention is to prevent a probe for power supply power from coming into contact with another electrode located next to an electrode to be associated with this probe.

  The probe device according to the present invention includes a plurality of plate-like probes, and a probe holder that is arranged in a state in which the thickness direction thereof is the left-right direction and extends in the front-rear direction at intervals in the left-right direction. . Each probe includes a plate-shaped needle central region, a plate-shaped needle front region extending forward from the front end of the needle central region, and a plate-shaped tip needle tip extending downward from the front end of the needle front region. And each belongs to one of the first and second probe groups including a plurality of probes. The size of at least the tip of each probe belonging to the second probe group in the left-right direction is larger than that of the probes belonging to the first probe group.

  The probes belonging to the second probe group may be arranged in the probe holder at a pitch larger than that of the probes belonging to the first probe group.

  An interval in the left-right direction of the probes belonging to the second probe group may be larger than that of the probes belonging to the first probe group.

  Each probe belonging to the second probe group may include a plurality of probe members having a plate-like shape and overlapped with each other in the thickness direction.

  Each probe belonging to the second probe group may include a single probe member having a plate shape.

    Each probe further includes a plate-like needle rear region extending backward from the rear end portion of the needle center region, and a plate-like rear end needle tip extending upward from the rear end portion of the needle rear region, At least the rear end needle tip of each probe belonging to the second probe group in the left-right direction may be larger than that of the probe belonging to the first probe group.

  The probe device further includes a plurality of wirings extending in the front-rear direction at intervals in the left-right direction, and a plurality of wirings corresponding to the probes, with which the rear end needle tips of the corresponding probes abut on the lower surface A flexible sheet-like wiring region can be included. Each of the wirings may belong to one of a first wiring group and a second wiring group including a plurality of wirings, and a dimension in the left-right direction of each wiring belonging to the second wiring group may be the first wiring. It can be made larger than that of the wires belonging to the group.

  The probe device is further electrically connected to the plurality of second wirings that extend in the front-rear direction at intervals in the left-right direction and are in contact with the wirings in the sheet-like wiring region. An integrated circuit and a tab having a plurality of third wirings electrically connected to the integrated circuit extending in the front-rear direction at intervals in the left-right direction; and the tab extending in the front-rear direction at intervals in the left-right direction. And a second sheet-like wiring region having a plurality of fourth wirings electrically connected to the third wiring. Each of the second and third wirings can belong to either the third or fourth wiring group including the second or third wiring, and each wiring belonging to the fourth wiring group The dimension in the left-right direction may be larger than that of the wiring belonging to the third wiring group.

  In the probe device according to the present invention, at least the tip end of each probe belonging to the second probe group in the left-right direction is made larger than that of the probe belonging to the first probe group. For this reason, the probe in the second probe group can be assigned to the power supply power by making the dimension in the left-right direction of at least the tip needle tip the same as the dimension of the power supply electrode in the same direction.

  As a result of the above, according to the present invention, it is possible to prevent the probe tip of the power supply power probe from coming into contact with other electrodes for power supply power, drive signals, and the like.

It is a front view which shows one Example of the probe apparatus which concerns on this invention. It is a right view of the probe apparatus shown in FIG. It is a top view of the probe apparatus shown in FIG. It is a front view which expands and shows a part of probe assembly used with the probe apparatus shown in FIG. It is sectional drawing which expands and shows a probe assembly. FIG. 6 is a cross-sectional view taken along line 6-6 in FIG. 1 and is an enlarged view showing the vicinity of the probe assembly, the coupling block, and the assembly device array. It is sectional drawing which decomposes | disassembles and shows the probe apparatus shown in FIG. FIG. 2 is a front view showing the probe device shown in FIG. 1 with a probe assembly and a coupling block removed. It is a disassembled perspective view which shows one Example of the assembly | attachment apparatus which assembles | attaches a connection block to a support block. It is a figure for demonstrating the relationship between the electrode of a to-be-inspected object, each wiring sheet. It is a figure for demonstrating the relationship between the electrode of a to-be-inspected object, and a probe, Comprising: (A) is a top view of a to-be-inspected object, (B) is a figure which shows the relationship between the electrode of a to-be-inspected object, and a probe, C) is an enlarged view of a portion C in FIG. FIG. 5 is an enlarged front view similar to FIG. 4, showing another embodiment of the probe assembly.

  [Terminology]

  In the present invention, in FIG. 1, the vertical direction is referred to as the vertical direction or the Z direction, the horizontal direction is referred to as the horizontal direction or the X direction, and the paper back direction is referred to as the front-rear direction or the Y direction. However, these directions differ depending on the posture of the object to be inspected received by the panel receiver such as a work table.

  Therefore, in the probe device according to the present invention, the vertical direction (Z direction) according to the present invention is actually in any direction, such as a state in which the vertical direction is in the vertical direction, a state in which the vertical direction is reversed, or a state in which the vertical direction is inclined. It is attached to the test device and used.

  [Example]

  Referring to FIGS. 1 to 3, the probe apparatus 10 is used for a lighting inspection of the inspection object 12 with a liquid crystal display panel partially shown in FIGS. 2, 5, 6, 7 and 11 as the inspection object 12. .

  The inspected object 12 has a rectangular shape, and at least a plurality of electrodes formed in parallel on the edge corresponding to two adjacent sides of the rectangle at intervals in the direction of the edge. 14 Each electrode 14 has a belt-like shape extending in a direction (X direction or Y direction) orthogonal to the edge where the electrode 14 is disposed.

  As shown in FIGS. 10 and 11, the electrode 14 provided on one of the adjacent edges includes four types of electrodes 14A, 14B, 14C, and 14D having different width dimensions. In the illustrated example, the probe device 10 is used to supply power or drive signals to the four types of electrodes 14A, 14B, 14C, and 14D. The width dimension of the electrodes 14C and 14D is larger than that of the electrode 14A and smaller than that of the electrode 14D.

  However, the other edge may have an electrode arrangement in which the four types of electrodes 14A, 14B, 14C and 14D are arranged as described above, or an electrode arrangement in which only the plurality of electrodes 14A are arranged. You may do it.

  However, the probe device 10 is applied to an edge portion having an electrode arrangement in which the four types of electrodes 14A, 14B, 14C, and 14D are arranged as described above. Another probe device such as a conventional probe device using a plurality of probes corresponding to the plurality of electrodes 14 is applied to an edge portion having an electrode arrangement in which only the plurality of electrodes 14A are arranged.

  The electrode 14A is used as a drive signal electrode or a dummy electrode for turning on / off a drive element such as a thin film transistor for a pixel element of the device under test 12, and has a constant pitch in the extending direction of the corresponding edge. It is formed with. The electrodes 14B, 14C, and 14D are used as power source power electrodes that supply driving power such as positive or negative potential and ground potential to a plurality of driving elements, and the electrodes 14A extend in the extending direction of corresponding edges. It is formed with a different pitch.

  Referring to FIGS. 1 to 6, a probe apparatus 10 adapted to one of the electrode arrangements described above is connected to a probe assembly 16, a support block 18 that supports the probe assembly 16, and a support block 18. The connecting block 20, the connecting block 22 supported on the lower side of the support block 18 (one side in the Z direction), the assembling device 24 for assembling the connecting block 22 to the lower side of the supporting block 18, and the connecting block 22 The wiring sheet 26 supported on the lower side and the connection block 28 attached to the lower side of the support block 18 are included.

  The probe apparatus 10 is assembled as a part of the test apparatus by assembling the connecting block 20 to a flat probe base 30 attached to a main body frame (not shown) of the test apparatus.

  1 to 6, the probe assembly 16 includes a pair of slit bars 36 in which a plurality of probes 32 made of a conductive material are assembled to the lower surface of a block piece 34 at intervals in the front-rear direction. In addition, the bar member 38 having a circular cross-sectional shape is passed through the probe 32 and spaced apart in the left-right direction, and the end portions of both bar members 38 are blocked by a pair of covers 40. 34.

  As shown in FIG. 5, each probe 32 includes a rectangular plate-shaped needle central region 32a, a needle front region 32b that integrally extends forward from the front end of the needle central region 32a, and a rear of the needle central region 32a. A needle rear region 32c extending integrally from the end rearward, a tip needle tip 32d bent downward from the tip of the needle front region 32b, and a rear end needle tip bent upward from the rear end of the needle rear region 32c Is a blade-type (ie, plate-like) needle having 32e. The front end needle tip 32d and the rear end needle tip 32e are formed into a triangular shape and sharpened when viewed from the side.

  As shown in FIGS. 4, 10, and 11, the probe 32 includes four types of probes 32A, 32B, 32C, and 32D corresponding to the four types of electrodes 14A, 14B, 14C, and 14D. In the illustrated example, the probes 32A, 32B, 32C, and 32D have width dimensions corresponding to the corresponding electrodes 14A, 14B, 14C, and 14D, respectively. Accordingly, the width dimension of the probes 32C and 32D is larger than that of the probe 32A and smaller than that of the probe 32B.

  The probe 32A is composed of a single probe member. On the other hand, the probe 32B is apparently one probe by overlapping four probe members, and the probes 32C and 32D are apparently one probe by overlapping three probe members. The probe member used for the probes 32A, 32C, and 32D has the same shape, structure, thickness dimension, and the like as the probe 32A.

  Each of the block piece 34 and each slit bar 36 has a prismatic shape that is long in the left-right direction by an electrically insulating ceramic, synthetic resin, or the like.

  Each slit bar 36 is manufactured in a prismatic shape from an electrically insulating material, and is attached to the front lower surface or rear lower surface of the block piece 34 so as to extend in the left-right direction. As shown in FIG. 4, each slit bar 36 has a plurality of slits 42 on the lower surface that extend in the front-rear direction at a predetermined interval in the longitudinal direction (left-right direction) and open forward, backward, and downward. .

  Each slit 42 corresponds to the electrode 14 and the probe 32 of the device under test 12, has a width dimension corresponding to the corresponding electrode 14 and the probe 32, and further corresponds to the needle front region of the corresponding probe 32. 32b or needle rear region 32c is received. In the illustrated example, the slits 42A, 42B, 42C, and 42D have width dimensions that can receive the needle front end region 32b or the needle rear region 32c of the corresponding probes 32A, 32B, 32C, and 32D, respectively.

  In the illustrated example, the bar member 38 has a circular cross-sectional shape, and is formed of a hard electrically insulating material such as ceramic. However, the bar member 38 may be formed by coating a conductive material with an electrically insulating material, or may have another cross-sectional shape such as a rectangle such as a rectangle or a hexagon. Good.

  The bar member 38 is passed through a through hole 32f provided in the needle center region 32a of the probe 32 and penetrates the needle center region 32a. The through hole 32 f has the same circular or polygonal shape as the cross-sectional shape of the bar member 38.

  Each probe 32 is parallel to the slit bar 36 in such a state that the thickness direction of the needle center region 32a is the left-right direction, and the tip needle tip 32d and the rear needle tip 32e protrude forward and backward from the block piece 34, respectively. Is arranged. Each probe 32 also extends in the front-rear direction, and the needle front region 32b and the needle rear region 32c are fitted in the slits 42 of the front and rear slit bars 36, respectively.

  In FIG. 4, the slits 42 and the probes 32 are shown as being largely separated from each other. However, in actuality, the width dimension of each slit 42 is the needle front region 32 b or the needle rear region 32 c of the probe 32. Is set to a value that comes into contact with the wall portion forming the corresponding slit 42 and fits into the slit 42.

  As shown in FIGS. 1 and 4, each cover 40 is formed by a plate-like cover member 40 a located on the inner side and a plate-like cover member 40 b located on the outer side.

  As shown in FIGS. 1, 2, and 4, each cover 40 passes through cover members 40 a and 40 b, and includes a plurality of screw members 44 that are screwed to end portions in the left-right direction of the block piece 34. It is attached to the side surface in the left-right direction of 34 so that removal is possible.

  Each cover 40 is positioned with respect to the block piece 34 by a plurality of positioning pins 46. Each positioning pin 46 is attached to the end of the block piece 34 in the left-right direction so as to protrude leftward or rightward from the end, and is inserted into the cover members 40a and 40b.

  Each inner cover member 40a has a hole 48 (see FIG. 4) for receiving the end of the bar member 38. Thereby, the bar member 38 is attached to the block piece 34 and positioned by the screw member 44 and the positioning pin 46 together with the cover members 40a and 40b.

  As shown in FIG. 5, the front slit bar 36 and each probe 32 include a protrusion 50 protruding rearward and a recess 52 opened forward at the rear end and the front end, respectively. The convex portion 50 and the concave portion 52 have a U-shaped cross-sectional shape and are fitted to each other.

  Moreover, the convex part 50 and the recessed part 52 are respectively the lower edge part 50a and the upper edge part 52a which are located below (one side in the Z direction), and the upper part which is located above (the other side in the Z direction). It has the edge part 50b and the lower edge part 52b.

  The lower edge portion 50a of the convex portion 50 and the upper edge portion 52b of the concave portion 52 face downward, and the upper edge portion 50b of the convex portion 50 and the lower edge portion 52a of the concave portion 52 face upward. The upper edge 52a of the recess 52 is lowered toward the rear side. As a result, an additional recess 52 c is formed below the bottom of the recess 52.

  The probe assembly 16 also includes a plurality of positioning pins 54 (see FIG. 1) spaced in the left-right direction. Each positioning pin 54 is attached to the block piece 34 and extends upward from the block piece 34. Each positioning pin 54 is further fitted into a positioning hole (not shown) provided in the coupling block 22 to position the probe assembly 16 with respect to the coupling block 22 together with the positioning hole.

  On the contrary, the positioning pin 54 may be provided in the coupling block 22 and the positioning hole may be provided in the block piece 34.

  In each probe 32, the convex portion 50 and the concave portion 52 are fitted to each other, the bar member 38 penetrates the probe 32, and the needle front region 32 b and the needle rear region 32 c are fitted to the slit 42. The slit bar 36 is disposed.

  Each probe 32 has such a slit bar 36 assembled to the block piece 34 as described above by a screw member, an adhesive or the like, and the cover 40 is assembled to the block piece 34 as described above. The block piece 34 is assembled and held.

  The coupling block 22 has a downward step 56 on which the probe assembly 16 is disposed, as shown in FIGS. The downward step portion 56 extends in the left-right direction at the front end portion of the lower portion of the coupling block 22.

  As shown in FIGS. 1 and 6, the probe assembly 16 penetrates the through hole 57 of the coupling block 22 from the upper side to the lower side and is screwed into a female screw hole 58 provided in the block piece 34. The member 60 maintains the positioning pin 54 in the downward stepped portion 56 in a state where the positioning pin 54 is inserted into the positioning hole described above.

  In the drawing, adjacent probes 32 are shown to be spaced apart in the left-right direction, but the arrangement pitch of the probes 32 is actually small. The interval between adjacent probes 32 includes the number of probes 32, the thickness dimension and the arrangement pitch, the number of slits of the slit bar 36, the arrangement pitch and width dimension, the type of the object to be inspected 12, particularly the arrangement pitch and width dimension of the electrodes, Varies by

  The probe assembly 16 attaches both the slit bars 36 to the block piece 34 as described above, and inserts both ends of each probe 32 into the slit 42 of the slit bar 36 in this state, and fits the convex portion 50 and the concave portion 52. As a result, the bar member 38 is inserted into the probe 32 and the cover member 40 a, and then each cover 40 is attached to the block piece 34 with the screw member 44 and the positioning pin 46.

  One cover 40 may be attached to the block piece 34 after both slit bars 36 are attached to the block piece 34.

  The probe assembly 16 can be disassembled by performing the reverse operation. The replacement of the probe 32 can be performed by executing an operation similar to the above after performing the reverse operation to changing the original probe to a new probe.

  The assembly of the probe assembly 16 to the coupling block 22 is performed by inserting the screw member 60 into the through hole 57 of the coupling block 22 with the positioning pin 54 (see FIGS. 1 and 7) inserted into the positioning hole of the coupling block 22. Can be carried out by passing through the above from below and screwing it into the female screw hole of the block piece 34.

  Removal of the probe assembly 16 from the coupling block 22 can be performed by performing the reverse operation.

  In this embodiment, the block piece 34 and the slit bar 36 constitute a probe holder in which a plurality of probes 32 are arranged in parallel at one end face in the left-right direction at intervals in the front-rear direction.

  Referring to FIGS. 1 to 3, the support block 18 is manufactured in an L shape by two plate-like support portions 18 a and 18 b. The connection block 20 has an inverted L-shape by a main body portion 20a attached to the probe base 30 and an extension portion 20b extending forward from the upper portion of the main body portion 20a.

  In the illustrated example, the support block 18 forms a support together with the coupling block 22, and the screw member 60 functions as an assembly tool for assembling the probe assembly 16 to the coupling block 22.

  The support block 18 has a pair of guide rails 62 extending in the vertical direction with an interval in the left-right direction, and a guide 64 extending in the vertical direction between the guide rails 62, and is supported in the vertical direction on the front surface of the main portion 20 a of the connection block 20. It is connected to the extension portion 20b of the connection block 20 by a bolt 66 so that the position in the vertical direction can be adjusted.

  Both guide rails 62 and guides 64 are a linear rail and a linear guide, respectively. Both guide rails 62 are attached to the rear end face of the support portion 18 a of the support block 18. On the other hand, the guide 64 is disposed between the two guide rails 64 in the left-right direction, and is guided by the two guide rails 64 so as to be movable in the vertical direction. It is attached to the surface.

  The bolt 66 penetrates the extended portion 20 b of the connection block 20 from the upper side to the lower side, and is screwed into a screw hole 68 formed in the support block 18. As shown in FIG. 1, the support block 18 is biased downward by a pair of compression coil springs 70 that are spaced apart in the left-right direction.

  Each compression coil spring 70 is connected between the support block 18 and a plate-like spring retainer 72 attached by a plurality of screw members 71 (see FIG. 3) on the extension 20 b of the connection block 20. It arrange | positions in the state which penetrates the extended part 20b of an up-down direction. Thereby, the height position of the support block 18 and the probe assembly 16 can be adjusted by adjusting the screwing amount of the bolt 66 into the screw hole 68.

  The spring retainer 72 has a through hole 72a (see FIGS. 1 and 2) for adjusting the amount of rotation of the bolt 66 by inserting the tip of a tool such as a screwdriver from above. Thereby, since the height position of the support block 18 and the probe assembly 16 can be adjusted without removing the spring retainer 72 from the support block 18, such adjustment of the height position is facilitated.

  As shown in FIG. 2, the connecting block 20 is detachably attached to the probe base 30 by a plurality of bolts 76 that pass through the connecting block 20 downward from above and are screwed to the probe base. Each bolt 76 penetrates the main body portion 20 a of the connection block 20 from the upper side to the lower side, and is screwed into a screw hole 78 formed in the probe base 30.

  1 to 3 and 6 to 9, the assembling device 24 includes a recess 80 (see FIGS. 3 and 6 to 7) formed in the coupling block 22 and a connection fitted in the recess 80. A member 82, a plurality of screw members 84 (see FIGS. 3 and 8) for assembling the connecting member 82 to the lower side of the support block 18 to be supported by the support block 18, and a through hole 85 of the connecting member 82 are vertically penetrated. And a screw member 86 (see FIGS. 3, 6, 7 and 8) screwed into the screw hole 88 of the coupling block 22.

  The recess 80 and the connecting member 82 have a circular cross-sectional shape. Further, as shown in FIG. 3, the screw member 84 penetrates the support portion 18 b of the support block 18 from above to below and is screwed into a female screw hole 83 (see FIG. 9) provided in the connecting member 82. Yes. Further, the lower end portion of the screw member 86 is screwed into a female screw hole 88 (see FIGS. 6, 7, and 9) provided in the coupling block 22.

  In the illustrated example, the female screw hole 88 is a nut 22b that is non-displaceably assembled to the main body portion 22a of the coupling block 22 as shown in FIGS. 6 and 7, but may be formed directly on the main body portion 22a. .

  Assembling of the probe assembly 16 to the coupling block 22 is performed by moving the screw member 60 above the through hole 57 of the coupling block 22 with the positioning pin 54 (see FIG. 1) inserted into the positioning hole of the coupling block 22. Can be carried out by screwing it down into the female screw hole 58 of the block piece 34.

  In the assembling apparatus 24, the connecting member 82 is attached to the support block 18 by the screw member 84, and the screw member 86 penetrates the connecting member 82 in the vertical direction and is screwed into the female screw hole 88, whereby the connecting block 22. Is assembled to the lower side of the support portion 18 b of the support block 18.

  The assembly device 24 also maintains the coupling block 22 at a predetermined position in the XY plane formed in the left-right direction and the front-rear direction with respect to the support block 18 by fitting the recess 80 and the connecting member 82 together. is doing.

  Referring to FIGS. 6 to 9, the assembling device 24 further includes a recess 90 formed in the coupling block 22 and extending in the XY plane and communicating with the recess 80, and from the connecting member 82 in the XY plane. A pin member 92 extending and received in the recess 90, a pair of recesses 94 formed on the lower surface of the support portion 18b of the support block 18 and opened to the connection member 82 side, and above the connection member 82 A pair of pin members 96 extending and received in the recess 94 are provided.

  The recess 90 and the pin member 92 extend in one direction (X direction in the illustrated example) in front of the screw member 86 in the XY plane. On the other hand, the two recesses 94 and the two pin members 96 are separated from each other in a direction intersecting with the extending direction of the recesses 90 and the pin member 92, preferably in a direction orthogonal (Y direction in the illustrated example). Yes.

  The assembly device 24 maintains the coupling block 22 at a predetermined position in the left-right direction and the front-rear direction with respect to the support block 18 by the recesses 90, 94 and the pin members 92, 96, and extends in the up-down direction. A predetermined angular position around the axis is maintained.

  A recess 80 may be provided in the support block 18 and the connecting member 82 may be screwed to the coupling block 22. Moreover, you may provide the recesses 90 and 94 and the pin members 92 and 96 in the member opposite to the above.

  Assembling of the coupling block 22 to the support block 18 is performed by attaching the connecting member 82 to the lower side of the support block 18 with the screw member 84 with the pin member 96 positioned in the corresponding recess 94, and then connecting the connecting member 82. This can be performed by fitting the screw holding member 86 into the female screw hole 88 of the coupling block 22 in a state where the pin member 92 is positioned in the corresponding recess 90 by fitting into the recess 80.

  Removal of the connecting block 22 from the support block 18 can be performed by performing the reverse operation.

  As shown in FIGS. 2, 6, 7, and 10, the wiring sheet 26 includes a flexible printed wiring circuit that functions as a first wiring sheet region, that is, an FPC 26a, and a tab (TAB) 26b that follows the rear end of the FPC 26a. It is a composite circuit sheet having a flexible printed wiring circuit that functions as a second wiring region, that is, an FPC 26c, following the rear end portion of the tab 26b.

  The wiring sheet 26 is positioned below the coupling block 22 by the fixing plate 100, and an integrated circuit 102 (see FIGS. 2, 5, 6 and 7) for driving the device under test 12 is arranged on the tab 26b. Yes.

  The front FPC 26a includes a plurality of wirings 106 extending in parallel in the front-rear direction at intervals in the left-right direction (see FIG. 10). The front end portion of each wiring 106 is a connection portion where the rear end needle tip 32e of the probe 32 is pressed. For this reason, the FPC 26a corresponds to the electrodes 14A, 14B, 14C and 14D and the probes 32A, 32B, 32C and 32D, and has four types of wirings 106A, 106B, 106C and 106D having width dimensions corresponding to the corresponding electrodes and probes. including.

  The tab 26b has a plurality of front wirings 108 that extend in the front-rear direction at intervals in the left-right direction and a plurality of rear wirings 110 that extend in the front-rear direction at intervals in the left-right direction (see FIG. 10). The front wiring 108 is electrically connected to the rear end of the wiring 106 at the front end, and is electrically connected to the output terminal of the integrated circuit 102 at the rear end. On the other hand, the rear wiring 110 is electrically connected to the input terminal of the integrated circuit 102 at the front end.

  The front wiring 108 includes four types of wiring 108A, 108B, 108C, and 108D corresponding to the electrodes 14A, 14B, 14C, and 14D and the probes 32A, 32B, 32C, and 32D and having width dimensions corresponding to the corresponding electrodes and probes. Including. The rear wiring 110 includes three types of wirings 110A, 110B, and 110C corresponding to the electrodes 14A, 14B, and 14D and the probes 32A, 32B, and 32C and having width dimensions corresponding to the corresponding electrodes and probes.

  The rear FPC 26c has a plurality of wirings 112 extending in the front-rear direction at intervals in the left-right direction (see FIG. 10), and these wirings 112 are connected to the rear wiring 110 of the tab 26b at the front end. (See FIGS. 2, 6 and 7). The wiring sheet 26 is folded back above the coupling block 22 at the rear end portion of the FPC 26c, and the rear end portion of the wiring 106 faces upward (see FIGS. 2, 6 and 7).

  The wiring 112 also includes three types of wirings 112A, 112B and 112C corresponding to the electrodes 14A, 14B and 14D and the probes 32A, 32B and 32C and having width dimensions corresponding to the corresponding electrodes and probes.

  Referring to FIGS. 2, 6, and 7, the connection block 28 extends in the left-right direction below the support block 18, and is positioned between the rear end portion of the coupling block 22 and the support block 18. . The connection block 28 is separably attached to the lower side of the support block 18 by a plurality of screw members 110 spaced in the left-right direction and a plurality of positioning pins 112 spaced in the front-rear direction.

  Each screw member 110 penetrates the connection block 28 from below to above and is screwed to the support block 18. Each positioning pin 112 is fixed to one of the connection block 28 and the support block 18 so as to extend in the vertical direction, and is fitted into a positioning hole provided in the other of the connection block 28 and the support block 18.

  Referring to FIGS. 2, 6, and 7, the probe device 10 further includes a connection sheet 114 that is mounted on the lower side of the connection block 28 at the distal end so as to extend rearward from the connection block 28, and a lower side of the connection block And an elastomer 116 attached to the.

  The connection sheet 114 has a plurality of wirings (not shown) extending in the front-rear direction at intervals in the left-right direction. At least the front end portion of each wiring of the connection sheet 114 is exposed on the lower surface of the connection sheet 114 and is in contact with the wiring 112 folded back above the wiring sheet 26.

  The wiring of the connection sheet 114 is connected to the electric circuit of the test apparatus in a state where the probe apparatus 10 is assembled to the test apparatus. For this reason, each probe 32 is connected to the electric circuit of the test apparatus via the wiring of the wiring sheet 26, the integrated circuit 102, and the wiring of the connection sheet 114.

  The elastomer 116 is disposed below the connection block 28 and at a position corresponding to a contact portion between the wiring of the wiring sheet 26 and the wiring of the connection sheet 114. For this reason, the wiring of the elastomer 116, the wiring sheet 26, and the wiring of the connection sheet 114 are compressed and deformed in a state where the coupling block 22 and the connection block 28 are assembled to the support block 18. Thereby, the wiring of the wiring sheet 26 and the wiring of the connection sheet 114 are strongly pressed and come into reliable contact.

  The coupling block 22 is attached to the support block 18 by attaching the coupling member 82 to the support block 18 with the screw member 86 passed through the coupling member 82, attaching the probe assembly 16 to the coupling block 22, and supporting the connection block 28. After attaching to the block 18, the screw member 86 is screwed into the female screw hole 58 of the coupling block 22.

  Removal of the connecting block 22 from the support block 18 can be performed by releasing the screwing of the screw member 86 into the female screw hole 58.

  For this reason, the probe assembly 16 and the wiring sheet 26 can be replaced with the coupling block 22 separated from the support block 18. Further, the probe 32 can be replaced in a state where the coupling block 22 is separated from the support block 18 and the probe assembly 16 is separated from the coupling block 22. Further, the connection sheet 114 can be exchanged with the coupling block 22 separated from the support block 18 and the connection block 28 separated from the support block 18.

  As a result of the above, according to the probe device 10, the shape and structure of the assembly device 24 are simplified and the replacement work of consumables including the probe 32 is facilitated as compared with the prior art.

  When the coupling block 22 is assembled to the support block 18 as described above, the rear end needle tip 32e of each probe 32 is pressed against the front end portion of the wiring 106 of the wiring sheet 26 as shown in FIG.

  Each probe 32 receives a rotational force in the clockwise direction in FIG. 5 so that the tip needle tip 32d is displaced upward. As shown in FIG. While being pressed by the lower edge portion 50 a of the portion 50, the upper edge portion 52 b of the concave portion 52 is pressed by the upper edge portion 50 b of the convex portion 50 of the slit bar 36.

  As a result, the probe 32 maintains the tip end 32d at the same height position even if there is a gap due to design and processing tolerances in the convex portion 50 and the concave portion 52 that are fitted to each other. . As a result, the difference in the displacement of the probe with respect to the probe holder is remarkably reduced, and a correct test can be performed.

  When the tip end of the probe 32 is displaced upward, the additional recess 52a of the recess 52 acts as a clearance space below the rear end of the protrusion 50. Further, the probe 32 is pressed by the slit bar 36 and is prevented from being displaced in the left-right direction.

  In the test apparatus for the inspected object 12, the probe unit in which the plurality of probe apparatuses 10 having the above-described shape structure are arranged on the probe base 30 has the electrode array as described above of the inspected object 12. Used every time. However, a probe unit in which another known probe device using a plurality of probes corresponding to the plurality of electrodes 14 is arranged on the probe base 30 is used at the edge portion having the electrode arrangement in which only the plurality of electrodes 14A are arranged. .

  In the probe device 10 described above, each probe 32 belongs to one of the first and second probe groups, and each of the probes 32B, 32C, and 32D belonging to the second probe group has at least the tip of the tip. The dimension in the left-right direction is made larger than that of the probe 32A belonging to the first probe group.

  For this reason, the horizontal dimension of the tip 32b of the probes 32B, 32C, and 32D belonging to the second probe group is made the same as the width dimension of the power source electrode 12A of the device under test 12 in the same direction. Probes 32B, 32C and 32D can be assigned for power supply.

  As a result, according to the probe apparatus 10, the probe tips of the power supply probes 32B, 32C, and 32D are prevented from coming into contact with other electrodes for power supply power, drive signals, and the like.

  Further, according to the probe device 10, as the contact area between the electrode 14 of the device under test 12 and the probe 32 increases, the contact resistance between the electrode 14 of the device under test 12 and the probe 32 decreases. A high voltage can be applied to the device under test 12.

  Furthermore, according to the probe device 10, since the interval between the probes 32B, 32C and 32D belonging to the second probe group can be increased, the thickness dimension of the wall portion forming the slit 42 of the slit bar 36 can be reduced. It can be enlarged to increase the strength of those walls.

  Instead of forming the probes 32B, 32C, and 32D belonging to the second probe group by a plurality of probe members, a single probe member may be used as in the probe assembly 120 shown in FIG. Even with a probe apparatus using such a probe assembly 120, the same operational effects as the probe apparatus 10 can be obtained.

  The present invention provides not only a probe device for a liquid crystal display panel, but also a probe device for other display substrates such as a glass substrate on which a thin film transistor is formed, and a probe for other flat plate-like objects to be inspected such as integrated circuits. It can also be applied to devices.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

10 Probe device 12 Inspected object (display substrate)
DESCRIPTION OF SYMBOLS 14 Electrode of to-be-inspected object 16 Probe assembly 18 Support block 20 Connection block 22 Connection block 24 Assembly apparatus 26 Wiring sheet 26a, 26c FPC (1st and 2nd wiring area)
26b Tab 28 Connection block 30 Probe base 32, 32A to 32D Probe 32a Needle center region 32b Needle front region 32c Needle rear region 32d Tip needle tip 32e Trailing needle tip 34 Block piece 36 Slit bar 38 Bar member 40 Cover 42, 42A ˜42D Slit 100 Fixed plate 102 Integrated circuit 106, 108, 110, 112 Wiring 114 Connection sheet 106A˜106D Wiring 108A˜108D Wiring 110A˜110D Wiring 112A˜112D Wiring 120 Probe assembly

Claims (8)

A plurality of plate-shaped probes, and a probe holder disposed in a state where the thickness direction of the probes is set to the left-right direction and extends in the front-rear direction at intervals in the left-right direction,
Each probe includes a plate-shaped needle central region, a plate-shaped needle front region extending forward from the front end of the needle central region, and a plate-shaped tip needle tip extending downward from the front end of the needle front region. And each belongs to one of the first and second probe groups including a plurality of probes,
The probe apparatus, wherein at least the tip end of each probe belonging to the second probe group in the left-right direction is larger than that of the probe belonging to the first probe group.   The probe apparatus according to claim 1, wherein the probes belonging to the second probe group are arranged in the probe holder at a pitch larger than that of the probes belonging to the first probe group.   3. The probe device according to claim 1, wherein an interval in the left-right direction of the probes belonging to the second probe group is larger than that of the probes belonging to the first probe group. 4.   4. The probe according to claim 1, wherein each of the probes belonging to the second probe group includes a plurality of plate-like probe members, and includes a plurality of probe members that are overlapped with each other in the thickness direction. Probe device.   6. The probe device according to claim 1, wherein each probe belonging to the second probe group includes a single probe member having a plate shape. Each probe further includes a plate-like needle rear region extending backward from the rear end portion of the needle center region, and a plate-like rear end needle tip extending upward from the rear end portion of the needle rear region,
The dimension in the left-right direction of at least the rear end needle tip of each probe belonging to the second probe group is larger than that of the probe belonging to the first probe group. Probe device. Further, a plurality of wirings extending in the front-rear direction at intervals in the left-right direction and having a plurality of wirings on the lower surface corresponding to the probes and against which the rear end needle tips of the corresponding probes abut And a sheet-like first wiring region,
Each of the wirings belongs to one of the first and second wiring groups including a plurality of wirings,
The probe device according to claim 6, wherein a dimension of each wiring belonging to the second wiring group in the left-right direction is larger than that of a wiring belonging to the first wiring group. A plurality of second wirings extending in the front-rear direction at intervals in the left-right direction and in contact with the wirings in the first wiring region; an integrated circuit electrically connected to the second wirings; And a tab having a plurality of third wirings extending in the front-rear direction at intervals in the left-right direction and electrically connected to the integrated circuit;
A flexible and sheet-like second wiring region having a plurality of fourth wirings extending in the front-rear direction at intervals in the left-right direction and electrically connected to the third wiring;
Each of the second and third wirings belongs to either the third or fourth wiring group including the second or third wiring,
The probe device according to claim 7, wherein a dimension of each wiring belonging to the fourth wiring group in a left-right direction is larger than that of a wiring belonging to the third wiring group.

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