JP4471424B2 - Probe card - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a probe card used for an energization test of a flat object such as a semiconductor integrated circuit and a liquid crystal substrate.
[0002]
[Prior art]
In a probe card using a plurality of needle-type probes made of fine metal wires, there is a limit to reducing the diameter of the probe itself, so there is a limit to narrowing the arrangement pitch of the probes. Therefore, it is desired to reduce the arrangement pitch of the probes.
[0003]
One technique for narrowing the arrangement pitch of needle-type probes is a unit formed by a pair of probe cards in which a plurality of probes are arranged in a row and a stopper supported by both probe cards (Japanese Patent No. 2827983) )It has been known.
[0004]
[Problems to be solved]
However, in such a unitized probe card, since the stopper is supported in a state suspended from a pair of guide lines, the stopper is easily displaced with respect to the probe, and the position of the needle tip with respect to the electrode of the object to be inspected is not good. Therefore, the arrangement pitch of the probes cannot be made too small.
[0005]
Therefore, in the probe card, it is important to stabilize the position of the needle tip and reduce the arrangement pitch of the probes.
[0006]
[Solution, action and effect]
The probe card according to the present invention is a plurality of probes bent with respect to a substrate and a needle main body portion where the needle tip portion follows the rear end thereof, and the needle tip is in a substantially linear array. A plurality of probes disposed on the probe, a plurality of guide holes through which the needle tips of the probes are displaceably penetrated, and a sheet-like guide that extends on the opposite side of the substrate from the needle main body, and the guide Is disposed on the substrate.
[0007]
In one probe card according to the present invention, the plurality of probes includes a first probe group in which a needle main body portion extends from the needle tip portion to one side, and a second probe group in which the needle main body portion extends from the needle tip portion to the other. A third probe group in which the needle main body portion extends from the needle tip portion to one side and the height position of the needle main body portion with respect to the substrate is different from the probes of the first probe group, and the needle main body portion extends from the needle tip portion. The probes of the first, second, third and fourth probe groups are divided into the fourth probe group which extends to the other side and has a height position different from the probes of the second probe group. They are alternately positioned in the previous arrangement direction.
[0008]
In another probe card according to the present invention, the arrangement means includes a guide holder arranged on the substrate with the probe in between, and a pair of guide supports arranged at an interval from the guide holder, The guide is mounted on both guide supports.
[0009]
The tensioned guide is less likely to displace relative to the probe than the suspended guide, so the position of the probe tip with respect to the electrode of the object to be inspected is stabilized, and the probe pitch is reduced. be able to.
[0010]
The plurality of probes are arranged in multiple layers with different height positions of the needle main portions with respect to the substrate, and probes with different height positions of the needle main portions may be alternately arranged in the arrangement direction of the needle tips. Good. By doing so, it becomes possible to reduce the arrangement pitch of the probes of each probe group to at least one half as compared with the case where the needle main portions of all the probes extend in the same direction from the needle tip portion. The arrangement pitch of the probes can be further reduced.
[0011]
According to the above one probe card, the arrangement pitch of the probes in each probe group is at least 4 minutes compared to the case where the probes are arranged in one layer and the needle main parts of all the probes extend in the same direction from the needle tips. 1 and as a result, the arrangement pitch of the probes can be remarkably reduced. According to the other probe described above, the guide holder and the guide support on the substrate are not disposed at the same position as the probe is disposed on the substrate, and the guide can be maintained in a more tensioned state.
[0012]
The guide holders may be spaced in the arrangement direction of the needle tips, and the guide supports may be spaced in the longitudinal direction of the needle main body. By doing so, the small area guide can be stably maintained in a more tight state.
[0013]
The guide may have the guide hole for each probe. By doing so, the sliding direction and the sliding amount of the probe tip of each probe can be regulated by the guide hole, so that the needle tip can be reliably brought into contact with the electrode.
[0014]
The guide hole may have an elongated hole shape with a width dimension that decreases toward the tip side. By doing so, the contact position with the electrode becomes more accurate.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIGS. 1 to 5, the probe card 10 is inspected as a flat plate like a semiconductor integrated circuit having at least a plurality of electrodes 12 arranged in a row, as shown in part in FIGS. 6 and 7. It is used for the energization test of the body 14. The electrodes 12 usually have a rectangular shape in which the arrangement direction is the width direction in order to reduce the arrangement pitch.
[0016]
In the probe card 10, a plurality of probes 20, 22, 24, and 26 are arranged on the lower surface of the substrate 28 so that their needle tips are arranged in a substantially linear array. The probes 20 and 24 are attached to the substrate 28 by one needle presser 30, and the probes 22 and 26 are attached to the substrate 28 by the other needle presser 30.
[0017]
Each probe is of a needle type formed of a conductive metal thin wire, and has an L-shaped shape in which a needle tip portion 32a is bent to one side from a needle main body portion 32b following this rear end. Each probe is assembled to the needle presser 30 in the needle main body portion 32b with the adhesive so that the needle tip portion faces downward. Of each probe, the region in front of the attachment position to the needle presser 30 has a conical shape (ie, a tapered shape) in which the diameter dimension decreases toward the needle tip (tip) side, and the tip has a hemispherical shape. I am doing.
[0018]
The substrate 28 has a rectangular opening 34 in the center, a plurality of wirings (not shown) around the opening, and a plurality of tester lands 36 electrically connected to the wirings. A wiring board having a plurality of layers around and is made of an electrically insulating material. The rear end of each probe is electrically connected to the wiring formed on the substrate 28 by a conductive adhesive 38 such as solder.
[0019]
The both-needle presser 30 is mounted on the lower side of the portion corresponding to the two opposing sides of the opening 34 of the substrate 28 with an adhesive, a plurality of screw members, and the like. In the illustrated example, the double needle presser 30 is formed as a separate member. However, for example, the double needle presser 30 may be integrally formed so as to form a planar rectangular shape by the double needle presser.
[0020]
The protruding amounts of the probes 20, 22, 24, and 26 from the needle presser 30 are substantially the same. However, the probes 20, 22, 24, and 26 have electrode tips 12 (tips) as shown in FIG. Are arranged so as to be slightly zigzag within the range of the size (length), and are alternately arranged in the arrangement direction of the needle tips as shown in FIGS.
[0021]
The probes 20 and 24 mounted on one needle presser 30 extend the needle main body from the needle tip in the same direction, although the height positions of the needle main body from the substrate 28 are different. The probes 22 and 26 mounted on the other needle presser 30 are different in the height position of the needle main portion from the substrate 28, but the needle main portion is in the same direction from the needle tip and in the opposite direction to the probes 20 and 24. Is extended to.
[0022]
This makes it possible to reduce the arrangement pitch of the probes by at least a quarter compared to the case where the probes are arranged in one layer and the needle main body portions of all the probes extend from the needle tip portion in the same direction. As a result, the arrangement pitch of the probes can be remarkably reduced due to the fact that the needle tips having a small diameter are adjacent to each other in the arrangement direction of the needle tips.
[0023]
The probe card 10 also includes a sheet-like guide 40 formed of an electrically insulating material such as polyimide, and an arrangement means for assembling the guide 40 to the substrate 28 in a state where the lower side of the needle main body is extended. .
[0024]
The arrangement means includes a pair of guide holders 42 assembled to the substrate 28 with the probes 20, 22, 24, 26 interposed therebetween, a pair of guide supports 44 spaced from the guide holders 42, and the guide 40 as the guide support 44. And a guide presser 46 that is pressed against.
[0025]
The guide holder 42 extends in parallel to the longitudinal direction of the needle main body at an interval in the needle tip arrangement direction. The guide support 44 extends in the needle tip arrangement direction with an interval in the longitudinal direction of the needle main body, and is assembled to the lower end of the guide holder 42 so as to extend in parallel with the lower side of the needle main body. . The guide 40 is adhered to both guide supports 44 by an adhesive 48 and is maintained in a tensioned state.
[0026]
As a result, the arrangement position of the guide holder 42 and the guide support 44 does not overlap with the arrangement position of the probe, and an arrangement space for the probe is formed between the substrate 28 and the guide 40.
[0027]
As shown in FIG. 7, the guide 40 has a plurality of guide holes 50, 52, 54, and 56 through which the needle tips of the probes 20, 22, 24, and 26 are individually penetrating so as to be substantially linear. The guide holes 50, 52, 54, and 56 have a shape of a long hole whose width dimension decreases toward the tip side, and are alternately arranged in the direction in which the needle tips are arranged and the size of the electrode 12 (length dimension). It is formed in a slightly zigzag shape within the range.
[0028]
During standby, as shown in FIG. 8A, the probe tip portion of each probe is located on the rear end side where the corresponding guide hole has a large width dimension.
[0029]
During the energization test, the electrode 12 of the device under test 14 and the probe tip of each probe are relatively pressed, so that overdrive (OD) acts on each probe as shown in FIG. Thus, each probe is slightly curved in an arc. As a result, the probe tip portion of each probe is displaced toward the tip side smaller in the width dimension of the corresponding guide hole as shown in FIG.
[0030]
For this reason, the probe tip of each probe slides and moves relative to the corresponding electrode 12 and gives a rubbing action to the electrode 12. Thereby, since an electrical insulating film such as an oxide film existing on the surface of each electrode 12 is scraped off, the probe and the electrode are electrically connected reliably.
[0031]
Since the probe card 10 is maintained in a state where the guide 40 is tight, the guide 40 itself is not easily displaced with respect to the probe as compared with the case where the guide is suspended, and the position of the probe tip of the probe with respect to the electrode 12 is stable. To do. For this reason, even if the needle tip and the electrode are pressed, the needle tip is not likely to be displaced in the arrangement direction, and the arrangement pitch of the probes can be reduced.
[0032]
In the illustrated example, the guide 40 has a guide hole for each probe. For this reason, since the sliding direction and the sliding amount of the probe tip of each probe can be regulated by the guide hole, the probe tip can be reliably brought into contact with the electrode. However, the guide 40 may have a guide hole for each of the plurality of probes.
[0033]
Each guide hole preferably has a shape that takes into account the sliding direction and sliding amount of the needle tip when the overdrive is applied and the taper angle of the needle tip portion. Thereby, the contact position of the needle point to the electrode becomes more accurate.
[0034]
In the illustrated example, only one set of probes and guides is arranged on the substrate, but when conducting a current test on a plurality of chips on a semiconductor wafer at the same time, a plurality of sets of probes and guides are arranged on the substrate. .
[0035]
In the illustrated embodiment, four types of probes are used. However, the present invention can be applied to a probe card including more types of probes, and the probes 20, 22 or probes 20, 24. The present invention can also be applied to a probe card including two types of probes as described above, and further to a probe card including any one type of probe.
[0036]
The present invention is not limited to a probe card for an integrated circuit, such as an integrated circuit chip on a semiconductor wafer, a cut integrated circuit chip, a molded integrated circuit, etc. It can also be applied to a probe card.
[0037]
The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.
[Brief description of the drawings]
FIG. 1 is a bottom view showing an embodiment of a probe card according to the present invention. FIG. 2 is a front view in which a part of the probe card shown in FIG. 1 is omitted. Fig. 4 is a cross-sectional view showing details of the vicinity of the guide mounting portion on the substrate. Fig. 5 is a cross-sectional view showing details of the vicinity of the guide hole. Fig. 6 is a diagram for explaining an arrangement example of the probe tip portion of the probe. FIG. 7 is a diagram showing the positional relationship between the guide hole and the electrode. FIG. 8 is a diagram for explaining the operation of the probe tip during contact. FIG. 9 is a perspective view showing details of the probe tip. ]
DESCRIPTION OF SYMBOLS 10 Probe card 12 Electrode 14 Test object 20, 22, 24, 26 Probe 28 Substrate 30 Needle presser 32a Needle tip part 32b Needle main part 40 Guide 42 Guide holder 44 Guide support 46 Guide presser 50, 52, 54, 56 Guide hole

Claims (8)

A plurality of probes arranged on the substrate in a state in which the needle tips are bent with respect to the needle main body portion following the rear end of the substrate and the needle tips are arranged in a substantially linear array; A sheet-like guide having a plurality of guide holes through which the probe tip portion of the probe penetrates displaceably and extending on the opposite side to the substrate with respect to the needle main portion, and the guide being stretched on the substrate Placing means for placing,
The plurality of probes includes a first probe group in which a needle main body portion extends from the needle tip portion to one side, a second probe group in which the needle main body portion extends from the needle tip portion to the other, and a needle main body portion from the needle tip portion. A third probe group extending to one side and having a height position of the needle main body portion different from the probes of the first probe group with respect to the substrate; a needle main body portion extending from the needle tip portion to the other; The probes of the second probe group and the fourth probe group different from each other are divided, and the probes of the first, second, third and fourth probe groups are alternately positioned in the arrangement direction of the needle tips. A probe card.   The plurality of probes are arranged in multiple layers in which the height positions of the needle main portions with respect to the substrate are different, and the probes in which the height positions of the needle main portions are different are alternately arranged in the arrangement direction of the needle tips, The probe card according to claim 1.   The arrangement means includes a guide holder arranged on the substrate with the probe in between, and a pair of guide supports arranged at intervals between the guide holders, and the guides are attached to both guide supports. The probe card according to any one of claims 1 and 2. A plurality of probes arranged on the substrate in a state in which the needle tips are bent with respect to the needle main body portion following the rear end of the substrate and the needle tips are arranged in a substantially linear array; A sheet-like guide having a plurality of guide holes through which the probe tip portion of the probe penetrates displaceably and extending on the opposite side to the substrate with respect to the needle main portion, and the guide being stretched on the substrate Placing means for placing,
The arrangement means includes a guide holder arranged on the substrate with the probe in between, and a pair of guide supports arranged at intervals between the guide holders, and the guides are attached to both guide supports. A probe card.   The probe card according to claim 4, wherein the guide holder is spaced in the arrangement direction of the needle tips, and the guide support is spaced in the longitudinal direction of the needle main body.   The probe card according to claim 1, wherein the guide has the guide hole for each probe.   The probe card according to claim 6, wherein the guide hole has a shape of a long hole whose width dimension decreases toward the tip side.   The plurality of probes includes a first probe group in which a needle main body portion extends from the needle tip portion to one side, a second probe group in which the needle main body portion extends from the needle tip portion to the other, and a needle main body portion from the needle tip portion. A third probe group extending to one side and having a height position of the needle main body portion different from the probes of the first probe group with respect to the substrate; a needle main body portion extending from the needle tip portion to the other; The probes of the second probe group and the fourth probe group different from each other are divided, and the probes of the first, second, third and fourth probe groups are alternately positioned in the arrangement direction of the needle tips. The probe card according to claim 5.

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