JP5096825B2 - Probe and electrical connection device - Google Patents

Description

  The present invention relates to a probe used for an electrical test of a flat object to be inspected and an electrical connection device using the probe.

  A flat semiconductor element such as a semiconductor integrated circuit, that is, an object to be inspected, is subjected to an electrical test to determine whether or not it is manufactured according to the specifications. This type of test or inspection is performed using an electrical connection device such as a probe card, a probe block, or a probe unit that includes a plurality of contacts or probes that are individually pressed against the electrodes of the object to be inspected. This type of electrical connection device is used to electrically connect an electrode of a device under test and an electrical circuit of a tester.

  As one example of this type of electrical connection device, as described in Patent Document 1, a plurality of probes are arranged on a flat mounting portion, that is, a land of a probe mounting body such as a wiring board, a probe board, or a probe sheet. Some are attached like a cantilever.

JP-A-2005-203606

  In the above-described conventional electrical connection device, each probe is a seat portion or a mounting portion extending in a vertical direction intersecting the land from the land, and is attached to the land at one end thereof by a conductive adhesive. , An arm part extending laterally from the other end of the attachment part, an extension part extending from the tip part of the arm part to the opposite side of the attachment part, and a tip side of the extension part Needle tip.

  When the probe tip is pressed against the electrode of the object to be inspected, each probe is elastically deformed at the arm portion so that the needle tip slides a predetermined amount with respect to the electrode of the object to be inspected and gives a rubbing action to the electrode.

  On the other hand, a semiconductor element, that is, an integrated circuit as an object to be inspected is required to be miniaturized and densified in the future, and to increase an electrode arrangement density without reducing the number of electrodes of each integrated circuit. In such an electrical connection device used for the electrical test of the integrated circuit, the arrangement area of the probes for each integrated circuit becomes narrow, so the lateral length of each probe must be reduced.

  However, in the conventional probe, when the lateral length is reduced, the lateral length of the arm portion is reduced. In such a probe, since the rigidity of the arm portion is increased (the elasticity is insufficient), when the needle tip is pressed against the electrode of the object to be inspected by a predetermined overdrive, the pressing force of the needle tip against the electrode, that is, the needle The pressure may become too large and may break at the arm portion.

  An object of the present invention is to provide a probe having a small needle pressure even when the lateral length is small.

  The probe according to the present invention includes an attachment portion attached to a land of the probe attachment body, a plurality of continuous key-shaped portions, and a needle tip protruding in the vertical direction from the tip of the last-stage key shape portion. Each key-shaped portion has an arm portion extending in the lateral direction and an extending portion extending in the vertical direction from the distal end portion of the arm portion, and the land of the mounting portion in the arm portion of the first-stage key-shaped portion. The key portions adjacent to each other are further extended so that the arm portions of the adjacent key shapes extend in opposite directions toward the extending portion. It is continuous with the arm part.

  The probe may have a plate shape in which the attachment portion and the key portion extend in a common virtual plane.

  The arm part and the extension part of each key-shaped part may have long holes in the direction in which they extend.

  The arm portion of each key-shaped portion has a belt-like shape in which the edge on one side and the edge on the other side in the longitudinal direction extend in parallel, and the edge on the one side and the other side The edges can have the same length dimension.

  An odd number of the key shapes may be included. The mounting portion includes a seat portion having a mounting surface to be attached to the land, and an extension portion extending from the seat portion in the vertical direction, and the odd-numbered extension portion extends from the extension portion to the lateral direction. May be positioned on a virtual straight line extending in the vertical direction with a gap therebetween.

  The probe can include an even number of the key-shaped portions. In this case, the attachment portion may include a seat portion having an attachment surface attached to the land, and an extension portion extending from the seat portion in the longitudinal direction, and the even-numbered extension portions are the extension. The part may be positioned on a virtual straight line extending.

  An electrical connection device according to the present invention is a plate-like or sheet-like probe attachment body having at least one probe arrangement region on one surface and a plurality of lands in the probe arrangement region. And a plurality of probes as described above that are positioned in the probe arrangement region when viewed in plan. At least one arm portion of at least one probe is spaced apart from an arm portion of at least one other probe from the attachment portion side or the extension portion side of the other probe, and the arm of the other probe. It extends in the direction across the section.

  Another electrical connecting apparatus according to the present invention is a plate-like or sheet-like probe mounting body having at least one probe arrangement region on one surface and a plurality of lands in the probe arrangement region. An attachment body, a plurality of first probes as described above, and a plurality of first probes positioned in the probe arrangement region when viewed in plan, and a plurality of first probes in the probe arrangement region when viewed in plan A plurality of second probes positioned. Each of the second probes is a mounting portion extending from the land in a longitudinal direction intersecting with the probe arrangement region, and is attached to the land at one end portion thereof, and laterally extending from the other end portion of the mounting portion. An arm portion extending in the direction, an extension portion extending from the tip portion of the arm portion to the side opposite to the attachment portion, and a needle tip provided on the tip side of the extension portion. The arm portion of at least one first or second probe is spaced apart from the arm portion of at least one other probe from the mounting portion side or the extension portion side of the other probe. The probe extends in a direction crossing the arm portion or in a direction in which the arm portion extends.

  In any of the electrical connection devices described above, the probe placement region is a rectangular region, and the needle tip of the at least one probe is located at or near a corner where two adjacent sides of the rectangle intersect. May be.

  According to the present invention, there are provided a plurality of continuous key-shaped portions, and thus a plurality of arms spaced in the vertical direction, and the arm portions of adjacent key-shaped portions extend in the opposite directions from the extending portions. Therefore, when the tip of the needle is pressed against the electrode of the object to be inspected by a predetermined overdrive (pressing force), the arm portion is elastically deformed. As a result, even if the lateral length is reduced and the rigidity of each arm portion is increased, the total elastic deformation amount is increased and the stylus pressure is reduced, thereby preventing breakage in the arm portion.

  Further, when the number of the key-shaped portions is an even number, the sliding of the needle tip with respect to the electrode is reduced by the elastic deformation in the adjacent arm portion, and the sliding amount of the needle tip with respect to the electrode is small. However, if the number of the key-shaped portions is an odd number, there is a slip that is not attenuated by the adjacent arm, and the amount of slip of the needle tip with respect to the electrode increases.

  [Explanation of terms]

  In the following description of the embodiments, the vertical direction refers to the vertical direction in FIG. However, the vertical direction referred to in the present invention differs depending on the posture of the object to be inspected during the inspection with respect to the prober. Therefore, the vertical direction in the present invention is determined to be any one of the vertical direction, the opposite direction, the horizontal direction, and the inclined direction inclined with respect to the horizontal plane, depending on the actual inspection device (tester). May be.

  [Explanation of probe embodiments]

  Referring to FIG. 1, a probe 10 uses a semiconductor wafer having a plurality of uncut rectangular rectangular integrated circuits, that is, a semiconductor wafer having a region to be inspected in a matrix, as a flat inspected object 12. Such a device under test 12 has a plurality of pad electrodes 14 arranged on the upper surface thereof at a predetermined arrangement pitch.

  The probe 10 is integrally connected to a mounting portion 20 attached to the land 18 of the probe mounting body 16, a plurality of key-shaped portions 22 integrally connected to a lower end portion of the mounting portion 20, and a key-shaped portion 22 at the final stage. And a needle tip 24 that protrudes in the vertical direction (downward) from the tip of the last-stage key-shaped portion 22. The attachment body 16 will be described in detail later in connection with the electrical connection device 60 using the plurality of probes 10.

  The mounting portion 20 has a seat portion 26 and an extension portion 28 extending downward from the seat portion 26, and adheres to the corresponding land 18 with a conductive adhesive such as solder at the upper end portion of the seat portion 26. Has been.

  In the example shown in the figure, two L-shaped keys each having an arm portion 30 extending in the lateral direction and an extending portion 32 extending integrally from the distal end portion of the arm portion 30 and extending in the vertical direction. It has a shape 22.

  Each key shape portion 22 is continued from the lower end portion of the extension portion 28 in the arm portion 30 of the first-stage key shape portion 22, and the arm portions 30 of the adjacent key shape portions 22 are opposite to each other from the extension portion 32. Adjacent key-shaped portions 22 so as to extend to each other are continuous in one extending portion 32 and the other arm portion 30.

  Each of the extension part 28, each arm part 30, and the extension part 32 has a strip-like shape. Each of the extension portion 28, each arm portion 30, and the first-stage extension portion 32 has a long hole 34 that is long in the longitudinal direction thereof.

  The probe 10 is a blade needle having a plate shape made of a conductive material. The probe 10 has a total vertical length L0 and a total horizontal length W0. In the illustrated example, the width dimension and the thickness dimension of the extension portion 28, each arm portion 30, and each extension portion 32 are the same. However, their width and thickness dimensions may be different.

  The extension part 32 of the probe 10 acts as a needle tip part. The width dimension and the thickness dimension of the needle tip 24 can be the same as the thickness dimension of the extension portion 28, each arm portion 30, and each extension portion 32. However, at least one of the width dimension and the thickness dimension of the needle tip 24 may be smaller than the thickness dimension of the extension portion 28 and the like.

  The probe 10 is assembled in an electrical connection device and attached to a tester, and the probe tip 24 is pressed against the electrode 14 of the device under test 12 with a predetermined overdrive (pressing force). As a result, the probe 10 includes a plurality of arms 30 spaced in the vertical direction, and the adjacent arm portions 30 extend from the extending portions 32 in opposite directions. As described above, each arm portion 30 is elastically deformed.

  As a result of the above, in the probe 10, the total longitudinal length dimension W0 is one tenth to five minutes that of the conventional probe even though the total longitudinal length dimension thereof is substantially the same as that of the conventional probe. 1 can be about 0.1 mm to 0.5 mm.

  As described above, even when the lateral length W0 is reduced and the rigidity of each arm portion 30 is increased, the total elastic deformation amount is increased, the needle pressure is reduced, and breakage in the arm portion 30 is prevented. .

  In the embodiment described above, the probe 10 includes two key-shaped portions 22, but may include three or more key-shaped portions 22.

  However, if the number of the key-shaped portions 22 is an even number, the sliding of the needle tip 24 with respect to the electrode 14 is reduced by elastic deformation in the adjacent arm portion 30, and the sliding amount of the needle tip 30 with respect to the electrode 14 is small.

  On the other hand, when the number of the key-shaped portions 22 is an odd number, there is a slip that is not attenuated by the elastic deformation of the adjacent arm portion 30, so that the slip amount of the needle tip 24 with respect to the electrode 14 increases.

  The probe 40 shown in FIG. 2 includes three key portions 22. In contrast, the probe 50 shown in FIG. 3 has five key portions 22.

  In the probe 50 shown in FIG. 3, the effective lateral lengths L1, L2, L3, L4, and L5 of the upper and lower edges that effectively function as the arm among the arm portions 30 are the same in all the arm portions 30. It is good also as a different value for every arm part 30.

  Similarly, in the probes 10 and 40 shown in FIGS. 1 and 2, the effective lateral lengths of the upper and lower edges of the arm part 30 may be the same for all the arm parts 30, or for each arm part 30. Different values may be used.

  [Description of Embodiment of Electrical Connection Device]

  Referring to FIGS. 4-7, the electrical connection device 60 uses the plurality of probes 40 shown in FIG. 2 with three key-shaped portions 22, and a plurality of integrated circuits or untested rectangular shapes. A semiconductor wafer having regions in a matrix form is used as a plate-like object to be inspected 12, and the current-carrying test of such a plurality of regions to be inspected can be performed simultaneously or divided into a plurality of times.

  Each area to be inspected has a plurality of pad electrodes 14 arranged in a row at a predetermined arrangement pitch on each side of the rectangle on the upper surface. The electrodes 14 in each region to be inspected are divided into four groups individually corresponding to rectangular sides. The electrodes 14 of each group are arranged in a line at intervals in the extending direction of the corresponding side. For this reason, the electrode 14 is also arranged at each of the four corners of the rectangle.

  In the connection device 60, the attachment body 16 is a plate or sheet having an upper surface and a lower surface, and is made of an insulating material for attaching a plurality of probes 40 such as a wiring board, a probe board, a probe sheet, or the like. A manufactured substrate or sheet. In the illustrated example, the attachment body 16 is a wiring board.

  When the attachment body 16 is a wiring board, the attachment body 16 has a plurality of conductive tester lands connected to the electric circuit of the tester at the peripheral edge portion of the upper surface, and is flat for attaching the probe 40. A plurality of mounting portions, that is, mounting lands 18 are provided on the lower surface, and a plurality of wirings that electrically connect the tester lands and the mounting lands 18 in a one-to-one manner are provided inside.

  When the attachment body 16 is a probe board, the attachment body 16 has a plurality of flat conductive connection lands that are electrically connected to the wiring of the wiring board on the upper surface, and a plurality of flat plurality for attaching the probe 40. And a plurality of wirings for electrically connecting the connection lands and the mounting lands 18 in a one-to-one manner.

  When the attachment body 16 is a probe board, the wiring board and the probe board are relatively positioned by a plurality of positioning pins penetrating them in the thickness direction, and are coupled to each other by a plurality of screw members.

  When the attachment body 16 is a probe sheet, the attachment body 16 has a plurality of flat conductive connection lands that are electrically connected to wiring such as a wiring board and a probe board on the upper surface, and for attaching the probe 40. A plurality of flat mounting lands 18 are provided on the lower surface, and a plurality of wirings for electrically connecting the connection lands and the mounting lands 18 in a one-to-one manner are provided inside.

  When the attachment body 16 is a probe sheet, the attachment body 16 is attached to and supported by a support member such as a wiring board, a probe board, or a support body.

  The attachment body 16 has a plurality of probe arrangement regions 62 on the lower surface thereof. These probe placement areas 62 are assigned in a one-to-one relationship for each integrated circuit (inspected area) to be tested simultaneously. The figure only shows a rectangular probe placement area 62 for one integrated circuit, but in practice there are a plurality of probe placement areas 62 as many as the number of integrated circuits that can be tested simultaneously.

  Each probe arrangement area 62 is an area in which a plurality of probes 40 are arranged, and includes the same number of attachment lands 18 as the number of electrodes provided in the corresponding integrated circuit. Each land 18 is made of a conductive material in a rectangular shape so that the seat 26 of the probe 40 is attached with a conductive adhesive. The plurality of probes 40 arranged in each probe arrangement region 62 are located in the corresponding probe arrangement region 62 in plan view.

  The lands 18 of each inspection area are divided into four groups individually corresponding to the sides of the rectangle (probe arrangement area 62). The lands 18 of each group are arranged in a line at intervals in the direction in which the corresponding sides extend, and individually correspond to the electrodes 14 of the device under test 12.

  The probes 40 are divided into four groups that are individually associated with the sides of the rectangle and are positioned on virtual straight lines parallel to the sides with which the tip 24 corresponds. The probes 40 of each group are individually associated with the corresponding electrodes 14 of the device under test 12, and the probe 24 is disposed on the attachment body 16 so as to be able to face the corresponding electrodes 14.

  Each corner probe 40a in which the needle tip 24 is positioned at the corner of the rectangle belongs to any one group, but may not belong to any group, or two adjacent sides of the rectangle You may make it belong to two groups corresponding to this. However, each corner probe 40a is attached to the corresponding land 18 so that the arm portion 30 extends in a direction in which one of a pair of opposing sides of the rectangle extends.

  In the illustrated example, each of the neighboring probes 40b in which the needle tip 24 is positioned in the vicinity of the corner of the rectangle belongs to any one group corresponding to the other pair of opposite sides of the rectangle. It attaches to the corresponding land 18 so that the arm part 30 may extend in the direction in which the corresponding side extends.

  In the illustrated example, one proximity probe 40b with the needle tip 24 in the vicinity of the corner is disposed in the vicinity of each corner. Each of the other probes 40c and 40d in which the needle tip 24 is positioned on a pair of opposite sides of the rectangle belongs to a group corresponding to one of the sides of the rectangle, and the arm portion 30 corresponds to the corresponding side of the rectangle. Are attached to the corresponding lands 18 so as to extend in the direction crossing.

  The last stage arm section 30 of each corner probe 40a is located above the last stage arm section 30 of at least one other probe 40c of the group to which the corner probe 40a belongs. It extends in the direction that crosses 30.

  From the above, the length dimension from the lower end of the arm portion 30 at the final stage of each corner probe 40a to the needle tip 24 is larger than that of the other probes 40c, and from the upper end of the seat portion 26 of each corner probe 40a. The length dimension to the upper end of the arm part 30 at the final stage is smaller than that of the other probe 40c.

  The arm part 30 at the final stage of each neighboring probe 40b extends in the direction crossing the other probes 40d above the arm part 30 of at least one other probe 40d of the group to which the neighboring probe 40b belongs.

  From the above, the length dimension from the lower end of the arm portion 30 at the final stage of each neighboring probe 40b to the needle tip 24 is larger than that of the other probe 40d, and from the upper end of the seat portion 26 of each neighboring probe 40b to the last stage. The length to the upper end of the arm portion 30 is smaller than that of the other probe 40d.

  When a plurality of neighboring probes 40b are arranged near each corner of the rectangle, each neighboring probe 40b in which the probe 24 is located closest to the corner is, for example, the arm 30 of the final stage. It can arrange | position so that the upper side of the arm part 30 of the last stage of the other vicinity probe 40b may be extended in the longitudinal direction of the arm part 30 of the other vicinity probe 40b.

  In order to do the above, the length dimension from the lower end of the arm part 30 at the final stage of each nearest probe 40b where the needle tips 24 are located closest to the corners to the needle tips 24 is set to other neighborhoods. What is necessary is just to make it larger than that of the probe 40b, and to make the length dimension from the upper end of the seat part 26 of each nearest probe 40b to the upper end of the arm part 30 of the last stage smaller than that of the other vicinity probe 40b.

  The electrical connection device 60 is attached to the tester so that the needle tip 24 is on the lower side. In the state of being attached to the tester, the electrical connecting device 60 presses the needle tips 24 of the probes 40 against the pad electrode 14 of the device under test 12.

  As a result, the overdrive acts on each probe 40, and each probe 40 is elastically deformed in the arm portion 30. In this state, the predetermined probe 40 is energized from the tester through the land 18 of the mounting body 16, and an electric signal is returned from the predetermined probe 40 to the electric circuit of the tester.

  In the electrical connection device 60, the arm portions 30 of the corner probe 40a and the proximity probe 40b do not interfere with the arm portions 30 of the other probes 40c and 40d, respectively. As a result, even though each probe 40 has an arm portion 30 extending in the lateral direction, the same number of probes 40 as the number of electrodes of one integrated circuit are arranged in the probe arrangement region 62 having a size corresponding to the integrated circuit. can do.

  In the electrical connection device 60, the probe 40 is also disposed at and around the rectangular corner, so that the test of the device under test 12 in which the electrode 14 is disposed at and near the rectangular corner is also performed. Can also be used.

  In the electrical connection device 60, the lateral length of the probe 40 can be further reduced.

  In the above embodiment, the last stage arm 30 of the corner probe 40a and the neighboring probe 40b extends laterally above the last stage arm 30 of the other probes 40d and 40c. The lower side of the arm portion 30 at the final stage of the probes 40d and 40c may extend in the lateral direction.

  In the illustrated example, both the corner probe 40a and the proximity probe 40b are provided, but only one of them may be provided.

  Further, instead of positioning the probe tips 24 of each probe 40 on an imaginary straight line parallel to the rectangular side, at least one arm portion 30 extends in a direction crossing the arm portion 30 of at least one other probe 40. A probe 40 may be provided.

  Referring to FIG. 8, the electrical connection device 70 uses a probe 72 shown in FIG. 9 as each neighboring probe. Each of the adjacent probes 72 includes a mounting portion 20 extending in the vertical direction from the land 18, one key shape portion 22 that integrally extends to the lower end portion of the mounting portion 20, and a key shape portion that continues integrally with the key shape portion 22. 22 and a needle tip 24 protruding downward from the lower end of 22.

  Similar to the attachment portion 20 of the probe 40, the attachment portion 20 of the proximity probe 72 has a seat portion 26 and an extension portion 28 extending downward from the seat portion 26, and solder at the upper end portion of the seat portion 26. It adheres to the corresponding land 18 with a conductive adhesive.

  Similar to the key-shaped portion 22 of the probe 40, the key-shaped portion 22 of the proximal probe 72 extends in the vertical direction from the arm portion 30 that extends in the lateral direction and the arm portion 30 integrally with the arm portion 30. And an extending portion 32.

  The arm part 30 of each neighboring probe 72 has an upper arm part 30 of the last stage of at least one other probe 40c or 40d of the group to which the neighboring probe 72 belongs, and an arm part of the last stage of the other probe 40c or 40d. It extends in the direction that crosses 30.

  From the above, the length dimension from the lower end of the arm portion 30 of each neighboring probe 72 to the needle tip 24 is larger than that of the other probes 40c or 40d, and the last stage from the upper end of the seat portion 26 of each neighboring probe 72 to the last stage. The length to the upper end of the arm part 30 is smaller than that of the other probe 40c or 40d.

  The last stage arm portion 30 of each corner probe 40a extends in the direction in which the last stage arm portion 30 of the neighboring probe 72 extends above at least the last stage arm portion 30 of the neighboring probe 72 of the group to which the corner probe 40a belongs. Is growing.

  From the above, the length dimension from the lower end of the arm 30 at the final stage of each corner probe 40a to the needle tip 24 is larger than that of the nearby probe 72, and the length from the upper end of the seat portion 26 of each corner probe 40a to the last. The length dimension to the upper end of the stepped arm portion 30 is smaller than that of the proximity probe 72.

  Similarly to the electrical connection device 60, the electrical connection device 70 is also used for an electrical test of the device under test 12.

  The electrical connection devices 60 and 70 are the same as the probe 40 or 50 shown in FIG. 1 or FIG. 3 or the probe 40 or 50 shown in FIG. 1 or 3 and FIG. 9 instead of the probe 40 shown in FIG. The probe 72 shown may be used.

  In the above embodiment, instead of using a blade-type probe, a needle-type probe using a conductive thin metal wire may be used.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

It is a figure which shows one Example of the probe which concerns on this invention. It is a figure which shows only the Example of the probe which concerns on this invention. It is a figure which shows the further another Example of the probe which concerns on this invention. It is a bottom view which shows one Example of the electrical connection apparatus using the probe shown in FIG. It is the perspective view which looked at the electrical connection apparatus shown in FIG. 4 from the arrow 5 direction in FIG. It is the figure which looked at the electrical connection apparatus shown in FIG. 4 from the arrow 6 direction in FIG. It is the figure which looked at the electrical connection apparatus shown in FIG. 4 from the arrow 7 direction in FIG. FIG. 6 is a view similar to FIG. 5, showing another embodiment of the electrical connection device. It is a figure which shows the Example of the probe used for a part of electrical connection apparatus shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10, 40, 50, 72 Probe 12 Test object 14 Pad electrode 16 Probe mounting body 18 Mounting land 20 Mounting portion 22 Key portion 24 Needle tip 26 Seat portion 28 Extension portion 30 Arm portion 32 Extension portion 34 Slot hole 40a Corner angle Probe 40b Proximity probe 40c, 40d Other probe 62 Probe placement region

Claims (9)

A probe including a mounting portion attached to a land of the probe mounting body, a plurality of continuous key-shaped portions, and a needle tip protruding in a vertical direction from the tip of the key-shaped portion of the final stage;
The probe has a plate shape in which the attachment portion and the key shape portion extend in a common virtual plane,
Each key-shaped portion has an arm portion extending in the lateral direction and an extending portion extending in the vertical direction from the distal end portion of the arm portion, and the land of the mounting portion in the arm portion of the first-stage key-shaped portion. The key portions adjacent to each other are further extended so that the arm portions of the adjacent key shapes extend in opposite directions toward the extending portion. Continuous with the arm part,
Moreover, the said arm part of each key-shaped part and the said expansion | extension part have a long elongate hole in the direction in which they extend.   The arm portion of each key-shaped portion has a belt-like shape in which the edge on one side and the edge on the other side in the longitudinal direction extend in parallel, and the edge on the one side and the other side The probe according to claim 1, wherein the edges have the same length dimension.   The probe according to claim 1, comprising an odd number of said key portions.   The attachment portion includes a seat portion having an attachment surface attached to the land, and an extension portion extending from the seat portion in the vertical direction, and the odd-numbered extension portions are spaced from the extension portion in the lateral direction. The probe according to claim 3, wherein the probe is positioned on an imaginary straight line extending in the vertical direction.   Including an even number of the key-shaped portions, and the attachment portion includes a seat portion having an attachment surface attached to the land, and an extension portion extending in the vertical direction from the seat portion, and the even-numbered extension portion is the The probe according to claim 1, wherein the probe is located on an imaginary straight line extending from the extension. 6. A probe attachment body having a plate-like or sheet-like shape, the probe attachment body having at least one probe placement region on one surface and a plurality of lands in the probe placement region, and any one of claims 1 to 5. A plurality of probes according to claim 1, wherein the plurality of probes are located in the probe placement region in plan view;
At least one arm portion of at least one probe is spaced apart from an arm portion of at least one other probe from the attachment portion side or the extension portion side of the other probe, and the arm of the other probe. An electrical connection device extending in the direction across the section.   The probe placement region is a rectangular region, and the needle tip of the at least one probe is located at or near a corner where two adjacent sides of the rectangle intersect. Electrical connection device. 6. A probe attachment body having a plate-like or sheet-like shape, the probe attachment body having at least one probe placement region on one surface and a plurality of lands in the probe placement region, and any one of claims 1 to 5. The plurality of first probes according to claim 1, wherein the plurality of first probes are positioned in the probe arrangement region when viewed in plan, and are positioned in the probe arrangement region when viewed in plan. A plurality of second probes,
Each of the second probes is a mounting portion extending from the land in a longitudinal direction intersecting with the probe arrangement region, and is attached to the land at one end portion thereof, and laterally extending from the other end portion of the mounting portion. An arm part extending in the direction, an extension part extending from the tip part of the arm part to the opposite side of the attachment part, and a needle tip provided on the tip side of the extension part,
The arm portion of at least one first or second probe is spaced apart from the arm portion of at least one other probe from the mounting portion side or the extension portion side of the other probe. An electrical connection device extending in a direction crossing the arm portion of the probe or a direction in which the arm portion extends.   The probe placement area is a rectangular area, and the needle tip of the at least one first or second probe is located at or near a corner where two adjacent sides of the rectangle intersect, The electrical connection device according to claim 8.

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