JP4369201B2 - Probe assembly - Google Patents

Description

  The present invention relates to a probe assembly used for inspection of electrical characteristics of a flat inspection object such as a liquid crystal display panel.

  In the present invention, the thickness direction of the flat test object is referred to as the vertical direction, the arrangement direction of the plurality of probes is referred to as the left-right direction, and the horizontal direction perpendicular to the left-right direction is referred to as the front-rear direction. The side of the needle tip region is referred to as the front, and the side of the second needle tip region of the probe is referred to as the back.

  As one of probe assemblies used for inspecting a liquid crystal display panel, a plurality of probes including a belt-like central region and first and second probe tip regions extending further forward and rearward from the front and rear ends of the central region, respectively. Are arranged in parallel on the lower side of the block with the central region facing each other so that the width direction of the central region is in the vertical direction, and the probes are connected via one or more elongated guide bars penetrating the probes. What was supported by the block is known (refer patent document 1).

  Thus, inspecting a liquid crystal display panel provided with two types of electrodes for horizontal and vertical (pad electrodes) for each display pixel, a probe must be brought into contact with each electrode. That is, the inspection is performed by bringing the horizontal and vertical probes into contact with the horizontal and vertical electrodes of the liquid crystal display panel, respectively.

  For this reason, conventionally, inspection is performed using two types of horizontal and vertical probe assemblies each having a plurality of probes.

  However, liquid crystal display panels have been downsized year by year, and the arrangement pitch of horizontal electrodes and vertical electrodes has become narrower. For example, a small COG panel of about 1.9 inches has been proposed. Horizontal electrodes and vertical electrodes are arranged at a narrow arrangement pitch in series along the lower portion of the small COG panel.

  Thus, in the inspection of a small liquid display panel having a narrow arrangement pitch, it is difficult to arrange a large number of horizontal and vertical probes in a common block with the same arrangement pitch as the electrode arrangement pitch.

Japanese Patent Laid-Open No. 10-132853

  An object of the present invention is to arrange a plurality of probes in a common block.

  A probe assembly according to the present invention includes a base block, first and second side covers mounted on end surfaces in the left-right direction of the base block, and a bar support disposed in the middle of the base block in the left-right direction. A plurality of probes each having a belt-like central region and first and second needle tip regions extending further forward and rearward from the front and rear ends of the central region, respectively, wherein the width direction of the central region is vertically A first group disposed between the bar support and the first side cover and the bar support and the second side cover with the central region facing each other in a direction. A plurality of probes arranged in a second group arranged in a central region of the first group of probes and extending through a central region of the probes of the first group. A first guide bar supported by the cover, and a second guide bar extending through a central region of the second group of probes and supported by the bar support and the second side cover Including.

  The plurality of probes have a bar support disposed between both side covers, a group in which a plurality of probes in one group are disposed between the bar support and one side cover, and the bar support and the other. It is divided into a group arranged between the side cover and the guide bar for each group supported by the bar support and the side cover.

  For this reason, according to the present invention, a plurality of probes can be arranged in a common block. Further, without removing all the probes from the base block, the probes of the group including the probe to be exchanged can be removed from the base block and exchanged. As a result, the probe replacement operation is facilitated.

  Each of the first and second guide bars may include a pair of bars extending in the left-right direction at intervals in the front-rear direction. By doing so, the probe is reliably held by the pair of bars and their postures are stabilized, so that the positional accuracy of the probe is improved.

  The probe assembly may further include a pair of first slit bars disposed between the bar support and the first side cover and attached to the base block, the first and second groups. A pair of first slit bars each having a plurality of grooves for receiving the first probe tip regions of the probe, and the bar support and the second side cover, which are disposed on the base block And a pair of second slit bars having a plurality of grooves that respectively receive the second needle tip regions of the first and second groups of probes. Also good. By doing so, since the needle tip region of each probe is inserted into the corresponding groove and each needle tip region is stabilized, the interval between adjacent probes can be kept constant. The position accuracy of the tip of the is improved.

  Each first slit bar and each second slit bar have first and second step portions extending in the left-right direction on the outer side in the front-rear direction, and the first and second step portions are front-rear. You may contact the front side and the back side of the base block in the direction. By doing so, the step portions of the first and second slit bars are reliably positioned on the base block, and the positioning accuracy of the first and second slit bars is improved. For this reason, the positional accuracy of the tip of the probe tip region of the probe is improved.

  The first and second side covers may include an inner cover that supports an end portion of the first or second guide bar, and an outer cover that is disposed outside the inner cover.

  The positions of the tips of the first and second needle tip regions of the adjacent probes of the first and second groups may be shifted in the front-rear direction. In this way, even if the arrangement pitch of the electrodes of the device under test is small, the displacement in the front-rear direction can be made the same size as the displacement of the electrodes of the device under test in the front-rear direction. Can be placed on the base block.

  In the first group of probes and the second group of probes, the positions of the tips of the first and second needle tip regions may be shifted in the front-rear direction. By doing so, it can be used for inspection of an object to be inspected whose electrode positions are shifted in the front-rear direction.

  The bar support may include a first recess that receives an end portion of the first guide bar, and a second recess that receives an end portion of the second guide bar. By doing so, the first and second guide bars are inserted into the first and second recesses, respectively. Therefore, the first and second guide bars are assembled to the bar support with high accuracy and reliability. be able to.

  The probe assembly may further include first and second set screws for assembling the first and second guide bars to the first and second side covers, respectively. In this case, each of the first and second guide bars has a recess in which the first and second set screws are screwed to the outer ends thereof.

  Referring to FIGS. 1 to 4, the probe assembly 10 is used in an inspection apparatus having a rectangular liquid crystal display panel 12 shown in FIG. The liquid crystal display panel 12 has a rectangular shape and encloses liquid crystal.

  As shown in FIG. 5, most of the liquid crystal display panel 12 is a display unit 14. In addition to the display unit 14, the liquid crystal display panel 12 further includes a pair of driving IC bonding units 16 and 18 for mounting a driving integrated circuit (IC) at one end in the longitudinal direction with a gap in the left-right direction. In addition, two sets of electrodes (pad electrodes) 20, 22 and 24, 26 are provided in two rows between the display unit 14 and the bonding units 16 and 18, respectively.

  The electrodes 20, 22 and 24, 26 correspond to groups of horizontal scanning electrodes and vertical scanning electrodes, respectively. The electrodes 20, 22 and 24, 26 are arranged in a staggered manner so as to be shifted by a distance Y in the front-rear direction for each group. The electrodes 20 and 22 and the electrodes 24 and 26 are spaced by a distance X in the left-right direction and are shifted by a distance Z in the front-rear direction. The bonding parts 16 and 18 are shifted by a distance Z in the front-rear direction.

  Referring again to FIGS. 1 to 4, the probe assembly 10 is disposed in the middle of the base block 30, the side cover 32 attached to each end face in the left-right direction of the base block 30, and the base block 30 in the left-right direction. Bar support 34, a plurality of probes 36 disposed between the bar support 34 and one side cover 32, and a plurality of probes disposed between the bar support 34 and the other side cover 32. The probe 38 and a plurality of guide bars 40 penetrating the probes 36 and 38, respectively.

  In the illustrated example, the bar support 34 is manufactured separately from the base block 30 and is bonded or screwed to the base block 30. However, the bar support 34 may be manufactured integrally with the base block 30.

  The probe 36 constitutes a first group, and the probe 38 constitutes a second group. As shown in FIG. 1, the first group of probes 36 and the second group of probes 38 are spaced by a distance X in the left-right direction and are shifted by a distance Z in the front-rear direction.

  Each of the probes 36 and 38 includes a belt-like central region 44 and front and rear needle tip regions 46 and 48 (see FIG. 2) extending further forward and rearward from the front and rear ends of the central region 44, respectively. The front end portion (needle tip) of each front needle tip region 46 is bent downward, and the front end portion of each rear needle tip region 48 is bent upward.

  The probes 36 and 38 are arranged at predetermined positions at intervals in the left-right direction for each group so that the width direction of the center region 44 is in the vertical direction and extends in the front-rear direction with the center region 44 facing each group. Has been. In the adjacent probes 36 and 38, the positions of the needle tip regions 46 and 48 are shifted by a distance Y in the front-rear direction for each group. Therefore, the needle tip regions 46 and 48 of the probes 36 and 38 are staggered for each group.

  The base block 30 is inserted with a pair of guide pins 50 for accurately positioning the side cover 32 from each end face in the left-right direction toward the center. The base block 30 also includes a block main body 52 on which the probes 36 and 38 are mounted, and a mounting portion 54 for mounting on a probe unit, that is, a probe device 80 described later.

  Each side cover 32 includes an inner cover 56 that supports the end portion of the guide bar 40, and an outer cover 58 that is disposed outside the inner cover 56. The inner cover 56 and the outer cover 58 have holes 60 and 62 into which the guide pins 50 are fitted, respectively.

  Each side cover 32 is attached to the base block 30 by a pair of bolts 66 that pass through the outer cover 58 and the inner cover 56 and are screwed into the screw holes 64 on the left and right end faces of the base block 30.

  Each guide bar 40 penetrates through the central region 44 of the corresponding probe 36 or 38 and has one end received in the recess 68 (see FIG. 2) of the bar support 34 and the other end corresponding to the corresponding inner cover. 56 holes or recesses 70 (see FIG. 2) are received. Each guide bar 40 is assembled to the base block 30 by a bolt 74 that passes through the side cover 32 and is screwed into the screw hole 72 at the other end.

  The guide bar 40 for the probe 36 and the guide bar 40 for the probe 38 are shifted from each other in the front-rear direction by a distance Z.

  The front and rear needle tip regions 46 and 48 of the probes 36 and 38 are grooves 78 formed in slit bars 76 and 76 disposed between the bar supports 34 and 34 and the side covers 32 and 32, respectively. And 78. Thereby, the positions of the probes 36 and 38 with respect to the base block 30 are stabilized.

  Each slit bar 76 has a stepped portion 79 extending in the left-right direction at the upper part on the rear side or the front side, and the stepped portion 79 is brought into contact with the lower end portion on the front side or the rear side of the base block 30. Thereby, the position of the slit bar 76 with respect to the base block 30 is stabilized, and thereby the positions of the probes 36 and 38 with respect to the base block 30 are stabilized.

  The probe assembly 10 first inserts both ends of the probes 36 and 38 into the grooves 78 of the predetermined slit bar 76 in a state where the slit bars 76 are attached to the base block 30 in predetermined positions at predetermined positions. Then, each guide bar 40 is inserted into the probes 36 and 38 and the side cover 32, and each guide bar 40 is attached to the side cover 32 with a bolt 74, and then each side cover 32 is attached to the base block 30 with a bolt 66. Can be assembled. As a result, the probes 36 and 38 are supported by the base block 30 via the bar support 34, the guide bar 40 and the side cover 32.

  The replacement of the probe 36 or 38 can be performed by performing the same operation as described above after performing the reverse operation to change the original probe to a new probe.

  In the probe assembly 10 described above, a plurality of probes are divided into a group of probes 36 and a group of probes 38 and are supported by a common base block 30 for each probe. The probe groups can be shifted from each other, and the positions of the probe tips of adjacent probes can be shifted for each group.

  As a result, even if the arrangement pitch of the electrodes of the liquid crystal display panel is small, the displacement in the front-rear direction can be made the same size as the displacement in the front-rear direction of the electrodes of the liquid crystal display panel. It can be arranged in a block, and can be used for inspection of a liquid crystal display panel in which the position of the electrode is shifted in the front-rear direction.

  As described above, when the probes 36 and 38 are supported by the base block 30 for each group, the probes 36 or 38 of the group including the probes 36 or 38 to be exchanged are removed without removing all the probes from the base block 30. It can be removed from 30 and replaced. As a result, the probe replacement operation is facilitated.

  Further, since each of the probes 36 and 38 is supported on the base block 30 by the pair of guide bars 40, the probes 36 and 38 are securely held and their postures are stabilized, and as a result, the probe with respect to the base block is stabilized. Position accuracy is improved.

  Referring to FIGS. 6 to 11, the probe unit, ie, the probe device 80 is configured such that the plurality of probe assemblies 10 described above can be attached to and detached from the plate-like probe base 82 to enable simultaneous inspection of a plurality of objects to be inspected. It is assembled.

  As shown in FIG. 6, in addition to the probe assembly 10 and the common probe base 82 for each liquid crystal display panel 12, the probe device 80 further includes an attachment block 84 assembled to the probe base 82, and an attachment block 84. An L-shaped suspension block 86 assembled so as to be movable in the vertical direction, a coupling block 88 attached to the lower end of the suspension block 86, and a plate-like wiring block 90 horizontally attached to the lower side of the coupling block 88. For each probe assembly 10.

  Each probe assembly 10 is supported by the coupling block 88 and the wiring block 90 by inserting the mounting portion 54 into a space 92 formed by the coupling block 88 and the wiring block 90.

  The probe base 82 is attached to an inspection apparatus (not shown) such that the wiring block 90 is substantially horizontal, the thickness direction of the probe base 82 is up and down, and the suspension block 86 and the like are spaced in the left and right direction.

  The probe base 82 supports connectors arranged at the rear ends of a plurality of flat cables 94 each having a plurality of wirings 96 (see FIG. 7). Each connector is electrically connected to a tester.

  However, instead of using a connector, a plurality of wirings individually connected to the wiring of the flat cable 94 and tester lands individually connected to the wiring may be formed on the probe base 82.

  Each attachment block 84 is attached to the upper surface of the probe base 82 by a plurality of screw members (not shown). Each mounting block 84 has a recessed portion on the lower side of the distal end portion, and the upper portion of the suspension block 86 is received in the recessed portion.

  Each suspension block 86 is attached to the lower side of the distal end portion of the attachment block 84 at the upper part by an adjustment screw 98 for height adjustment and a pair of compression coil springs 100.

  The adjustment screw 98 passes through the tip of the mounting block 84 and is screwed into the screw hole of the suspension block 86. The compression coil spring 100 is disposed between the lower side of the distal end portion of the mounting block 84 and the upper surface of the distal end portion of the suspension block 86.

  The height position of the probe assembly 10 can be adjusted by moving the probe assembly 10 up and down by adjusting the screwing amount of the adjustment screw 98 into the suspension block 86.

  Each coupling block 88 has a U-shape, and is attached to the lower side of the suspension block 86 so that the space 92 extends in the front-rear direction and opens to the wiring block 90 side.

  Each wiring block 90 is horizontally attached to the lower side of the coupling block 88, and a tab (TAB) 102 provided for each flat cable 94 is bonded to the lower surface.

  Each tab 102 has a plurality of wirings 104 and 106 and a driving integrated circuit 108 attached thereto. Each integrated circuit 108 is connected to one end of the wirings 104 and 106 and is accommodated in a recess of the wiring block 90.

  The other end of the wiring 104 is individually bonded to the wiring 96 of the flat cable 94 with a conductive adhesive, and the other end of the wiring 106 is electrically individually connected to the second needle tip region 48 of the probe 36 or 38. It is connected to the.

  In the illustrated example, each wiring block 90 includes two flat cables 94 respectively corresponding to the groups of probes 36 and 38.

  The mounting portion 54 of the base block 30 has a groove 110 that is used when the probe assembly 10 is attached to the probe device 80. The groove 110 extends in the front-rear direction and has a convex (inverted T-shaped) cross-sectional shape that opens upward and rearward.

  Each suspension block 86 is connected to the attachment block 84 by a guide 112 extending in the vertical direction and a pair of guide rails 114 so as to be movable in the vertical direction.

  Each probe assembly 10 is fixed in a state where the mounting portion 54 of the base block 30 is inserted into the space 92 and the tip of each second needle tip region 48 of the probes 36 and 38 is pressed by the wiring 106 of the tab 102. Maintained by screws 120;

  In this state, in each probe assembly 10, the stopper 122 protruding upward from the base block 30 is in contact with the distal end surface of the coupling block 88, and the mounting portion 54 is spaced from the coupling block 88 in the front-rear direction. As a result of being pushed to one side in the left-right direction within the space 92 by the pair of plungers 116 arranged in the above-mentioned manner, positioning in the front-rear direction and the left-right direction is performed.

  The height position of the probe assembly 10 in the vertical direction is maintained by the adjustment screw 98 being screwed in a predetermined amount and the mounting portion 54 being pressed against the coupling block 88 by the fixing screw 120. Further, each second needle tip region 48 is positioned with respect to the tab 102 by passing through the hole of the guide film 126.

  The fixing screw 120 includes a pair of screw members 128 and 130 screwed together. The screw member 128 has a rod-like male screw portion that penetrates the suspension block 86 and the coupling block 88 in the vertical direction, and a head portion that follows the upper end thereof.

  The screw member 130 has a rod-shaped female screw portion that penetrates the coupling block 88 in the vertical direction and a head portion that follows the lower end thereof. The screw hole formed in the female screw portion of the screw member 130 is open upward so as to be screwed with the male screw portion of the screw member 128.

  The screw member 130 is prevented from dropping from the coupling block 88 by a retaining ring 132 disposed at the upper end of the main portion thereof. The screw member 130 is always urged downward by a compression coil spring 134 disposed between the head of the screw member 130 and the coupling block 88.

  In a state where the probe assembly 10 is correctly mounted on the coupling block 88, the plurality of convex portions 136 formed on the upper surface of the mounting portion 54 are individually received by the plurality of concave portions 138 formed on the lower surface of the coupling block 88. ing.

  When the probe assembly 10 is replaced, first, the screwed state of the adjusting screw 98 and the fixing screw 120 is loosened, so that the probe assembly 10 to be replaced is displaced downward with respect to the coupling block 88 by the compression coil spring 134. The Thereby, the convex part 136 is removed from the concave part 138. Next, in the above state, the probe assembly 10 is pulled out horizontally with respect to the base block 30.

  When the probe assembly 10 is pulled out, the probe assembly 10 is displaced downward by at least the height of the projection 136 with respect to the coupling block 88 by the compression coil spring 134. Moved in contact.

  In contrast, in the new probe assembly 10, first, the rear end portion of the mounting portion 54 is received in the space 92 in a state where the fixing screw 120 is lowered by the compression coil spring 134 as shown in FIG. 10.

  Next, the new probe assembly 10 is pushed horizontally in the above state until the stopper 122 contacts the front end surface of the coupling block 88. At this time, the new probe assembly 10 is pressed in one of the left and right directions by the plunger 116 to be correctly positioned in the left and right direction with respect to the coupling block 88.

  When the mounting portion 54 of the new probe assembly 10 is pushed into the space 92 until the stopper 122 contacts the front end surface of the coupling block 88, the new probe assembly 10 is positioned in the front-rear direction with respect to the coupling block 88. The Accordingly, the convex portion 136 is opposed to the concave portion 138 in combination with the positioning in the left-right direction with respect to the coupling block 88.

  Even when the probe assembly 10 is pushed, the probe assembly 10 is displaced downward by at least the height of the convex portion 136 with respect to the coupling block 88 by the compression coil spring 134. Therefore, the probe assembly 10 has a surface on which at least the concave portion 138 is opened. It is moved in a state in which the convex portion 136 is in contact with.

  When the screw members 128 and 130 are tightened in a state where the convex portion 136 and the concave portion 138 face each other, the probe assembly 10 is raised with respect to the coupling block 88 and the convex portion 136 is received in the concave portion 138. As a result, the probe assembly 10 is prevented from moving in the left-right direction and the front-rear direction with respect to the coupling block 88 and is completely positioned. 104 abuts.

  When the probe assembly 10 is moved with respect to the coupling block 88, both when the probe assembly 10 is pulled out and inserted, the probe assembly 10 is at least as high as the height α of the convex portion 136 with respect to the coupling block 88. Therefore, the tips (rear end side needle tips) of the second needle tip regions 48 of the probes 36 and 38 are lowered from the wiring 104 of the tab 102 by at least the height of the convex portion 136. Is moved to the position released.

  For the same reason, when the thickness dimension β of the guide film 126 is set, the probe assembly 10 is moved at a position separated from the guide film 126 by at least α-β. The side needle tip is moved to a position separated from the guide film 126 by at least α-β.

  As described above, when the probe assembly 10 is moved in a state where the rear end needle tips of the probes 36 and 38 do not contact the tab 102 and the guide film 126, the rear end needle tips are prevented from being displaced and damaged. The

  The present invention can be applied not only to a probe device for a liquid crystal display panel, but also to a probe device for other flat plate-like objects to be inspected, such as another display substrate such as a glass substrate on which a thin film transistor is formed. .

  The present invention can be applied not only to a probe device for an object to be inspected horizontally but also to a probe device for an object to be inspected obliquely.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

It is a perspective view which shows one Example of the probe assembly which concerns on this invention. It is the disassembled perspective view seen from the bottom of the probe assembly shown in FIG. It is the perspective view seen from the bottom which shows the state which assembled the probe assembly shown in FIG. FIG. 4 is a cross-sectional view taken along line 4-4 in FIG. It is a perspective view which shows one Example of a to-be-inspected object. It is an external appearance perspective view which shows one Example of the probe apparatus using the probe assembly shown in FIG. It is a side view of the probe apparatus shown in FIG. It is a front view of the probe apparatus shown in FIG. It is a bottom view of the probe apparatus shown in FIG. It is sectional drawing which shows the assembly state of the probe apparatus shown in FIG. It is the elements on larger scale of the probe apparatus shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Probe assembly 12 Liquid crystal display panel 30 Base block 32 Side cover 34 Bar support 36,38 Probe 40,42 Guide bar 44 Center area 46,48 Needle tip area 50 Guide pin 52 Block main body 54 Mounting part 56 Inner cover 58 Outer cover Cover 60, 62 hole 64 Screw hole 66 Bolt 68, 70 Recess 72 Screw hole 74 Bolt 76 Slit bar 78 Groove 79 Step

Claims (9)

A base block;
First and second side covers attached to end faces in the left-right direction of the base block;
A bar support disposed in the middle in the left-right direction of the base block;
A plurality of probes each having a belt-like central region and first and second needle tip regions extending forward and rearward from the front and rear ends of the central region, respectively, and the width direction of the central region is the vertical direction The first region disposed between the bar support and the first side cover and the bar support and the second side cover with the central region facing each other A plurality of probes divided into second groups,
A first guide bar extending through a central region of the first group of probes and supported by the bar support and the first side cover;
A probe assembly including a second guide bar extending through a central region of the second group of probes and supported by the bar support and the second side cover.   2. The probe assembly according to claim 1, wherein each of the first and second guide bars includes a pair of bars extending in parallel in the left-right direction with an interval in the front-rear direction. And a pair of first slit bars disposed between the bar support and the first side cover and attached to the base block, wherein the first of the first and second groups of probes. A pair of first slit bars having a plurality of grooves each receiving one needle tip region;
A pair of second slit bars disposed between the bar support and the second side cover and attached to the base block, wherein the second of the probes of the first and second groups The probe assembly according to claim 1, comprising a pair of second slit bars each having a plurality of grooves that respectively receive the needle tip regions.   Each first slit bar and each second slit bar have first and second step portions extending in the left-right direction on the outer side in the front-rear direction, and the first and second step portions are front-rear. 4. The probe assembly of claim 3, wherein the probe assembly is in contact with the front and rear sides of the base block in a direction.   The said 1st and 2nd side cover contains the inner cover which supports the edge part of the said 1st or 2nd guide bar, and the outer cover arrange | positioned on the outer side of this inner cover. The probe assembly according to any one of the above.   The probe according to any one of claims 1 to 5, wherein positions of tip portions of the first and second needle tip regions of adjacent probes of the first and second groups are shifted in the front-rear direction. Assembly.   The probe of the 1st group and the probe of the 2nd group have shifted the position of the tip part of the 1st and 2nd needle tip field in the direction of order. A probe assembly according to claim 1.   8. The bar support of claim 1, comprising a first recess for receiving an end of the first guide bar and a second recess for receiving an end of the second guide bar. The probe assembly according to any one of the preceding claims. And first and second set screws for assembling the first and second guide bars to the first and second side covers, respectively.
9. The first and second guide bars according to any one of claims 1 to 8, wherein the first and second guide bars each have a recess that is hinged with the first and second set screws at their outer ends. The probe assembly as described.

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