JP4571517B2 - Probe assembly - Google Patents

Description

  The present invention relates to a probe assembly used for inspecting a flat inspection object such as a liquid crystal display panel.

  As one of the probe assemblies used for inspecting a flat inspection object such as a liquid crystal display panel, a belt-like attachment region (central region) and a first extending from the front and rear ends of the attachment region to the front and rear, respectively. And a plurality of blade-type probes (contactors) having the second needle tip region, with the attachment region facing the lower side of the support (block) so that the width direction of the attachment region is the vertical direction. There is one arranged in parallel (Patent Document 1).

Japanese Patent Laid-Open No. 10-132853

  The probes are attached to the support by one or more elongated guide bars that extend through these attachment regions and are supported by the support, and are arranged on the front end side and the rear end side of the support, respectively. The first and second needle tip regions are received in a plurality of slits formed in the first and second slit bars extending in the longitudinal direction of the bar at intervals in the longitudinal direction.

  The first needle tip region is thinner toward the tip side, and has a needle tip protruding downward at the tip. The second needle tip region is made thinner toward the rear end side, and has a needle tip protruding upward at the rear end.

  The probe assembly is assembled to the inspection apparatus in a state where the needle tip in the second needle tip region is pressed by the energization wiring.

  During the energization test of the device under test, the needle tip in the first needle tip region is pressed against the electrode of the device under test. Thereby, the first needle tip region is curved by the overdrive (OD) acting on the first needle tip region, and the needle tip slides with respect to the electrode of the object to be inspected.

  Since the blade type probe can be manufactured by a photolithographic technique or an etching technique, it has an advantage that a probe having the same function can be manufactured in a large amount and at a low cost with high accuracy. .

  However, in the above conventional probe, since play between the guide bar and each probe through which the guide bar penetrates cannot be completely eliminated, each probe is inclined in the longitudinal direction of the guide bar with respect to the support or the slit bar by overdrive. .

  As a result, the first needle tip region is irregularly bent, and the first slit bar is pressed by a foreign substance such as glass powder adhering to the object to be inspected or the probe assembly. The partition wall forming the slit, particularly the slit, may be damaged or the needle tip region may be broken.

  In particular, when the electrode of the object to be inspected is made of IZO (Indium Zinc Oxide), the needle tip in the needle tip region tends to slip with respect to the electrode during the overdrive operation. For this reason, in the conventional probe, the amount of bending of the first needle tip region due to overdrive is large, and the partition wall is more easily damaged.

  As a result, conventionally, it has been necessary to frequently clean the object to be inspected and the probe assembly.

  An object of the present invention is to prevent the breakage of the slit bar even though the needle tip region pressed against the electrode of the object to be inspected has a shape that is easily bent when the overdrive is applied.

The probe assembly according to the present invention includes a support, a belt-like attachment region, and a belt-like needle tip region having a width dimension smaller than the width dimension of the attachment region extending forward from the tip of the attachment region. a probe, a plurality of probes in the width direction of the mounting region are parallel disposed opposite the mounting area on the lower side of the support in a state where the vertical direction, the thickness of which the attachment region an elongate guide bar which is supported to extend and to the support through the directionally, said guide a bar slit bars Ru extending in the longitudinal direction of are arranged on the distal end side of the support, to the longitudinal direction a slit bar having a plurality of slits to open the gap placed and downwards, less that extends in the longitudinal direction of the slit bars are disposed between the support and the attachment area Also it includes a single elastic body. The probe receives the needle tip region in the slit.

  In the probe used in the probe assembly according to the present invention, the lower end edge of the projecting portion is used as a contact point with the electrode of the object to be inspected. Such a probe is easily deflected because the width dimension of the needle tip region is smaller than that of the attachment region.

However, a probe assembly according to the present invention, the guide bar from being arranged at least one elastic member Ru extending in the longitudinal direction of the slit bar between the support and the mounting area, each probe by an elastic body The play between each probe and the guide bar is eliminated.

  This prevents the probe from tilting in the longitudinal direction of the guide bar with respect to the support or slit bar even if overdrive acts on the probe, and as a result, irregular bending of the needle tip region is prevented, and the slit Damage to the bar and breakage of the needle tip area are prevented.

  At least two elastic bodies are included, one elastic body is disposed between the slit bar and the needle tip region, and the other elastic body is disposed between the attachment region and the support body. May be. By doing so, since the needle tip region is brought into contact with the elastic body, bending of the needle tip region due to overdrive is prevented by the elastic member. For this reason, the breakage of the partition wall forming the slit of the slit bar is more reliably prevented.

  The slit bar may further include a recess that extends in the longitudinal direction and opens downward, and the one elastic body may be disposed in the recess.

Two elastic bodies spaced apart in the longitudinal direction of the probe may be included, and both elastic bodies may be disposed between the attachment region and the support body.

  The needle tip region is a first region extending from the distal end portion of the attachment region, and a second region extending from the distal end portion of the first region, and projects downward from the lower end edge of the attachment region. And a second region having a protrusion.

  The first region may include a U-shaped recess that opens upward. In this case, you may make the width dimension of the location in which the said notch part of the said 1st area | region was formed smaller than the width dimension of another location. By doing so, the needle tip region has a shape that is more easily bent at the location where the recessed portion is formed.

  The width dimension of the portion where the concave portion of the first region is formed can be made smaller than the width dimension of other portions.

  The second region further includes a second recessed portion that is open at a position where the protruding portion is formed, and the probe has a portion of the elastic body that is part of the second recessed portion. May accept.

  The lower surface of the protrusion may be an inverted trapezoid downward surface.

  Instead of the above, the protruding portion may be inclined so that the lower portion is on the tip side, and may have a lower end surface that is higher on the tip side. If it does in that way, when a projection part is pressed by the electrode of a to-be-inspected object, both will be electrically connected reliably.

  The protrusion further includes a protrusion that is spaced from the protrusion in the longitudinal direction of the attachment region and is inclined so that the lower portion is on the tip side, and the protrusion You may provide the lower end surface which becomes higher toward the front end side.

The probe further includes a third region extending from a distal end portion of the second region, and the third region has a distal end surface that is inclined so as to be closer to the second region side toward the upper side. And the probe may have the tip surface projected forward from the slit. By doing so, the position of the needle tip with respect to the electrode of the object to be inspected can be easily confirmed from above.

  The second region may have an oval shape, and the protrusion may be formed at the tip of the oval. In this case, the second region can have a tip surface that is inclined so that the upper side is closer to the first region. Also in this case, the position of the needle tip with respect to the electrode of the object to be inspected can be easily confirmed from above by arranging the probe on the slit bar.

  The second region may have a distal end surface that is inclined so that the upper side is closer to the first region side, and the probe may project the distal end surface forward from the slit. Also in this case, the position of the needle tip with respect to the electrode of the object to be inspected can be easily confirmed from above by arranging the probe on the slit bar.

  The probe may further include a needle tip that protrudes downward from the tip of the needle tip region.

  In the present invention, the width direction of the attachment area is referred to as the vertical direction, and the side of the needle tip area that is pressed against the electrode of the object to be inspected is referred to as the distal end side with respect to the attachment area, The region side is called the rear end side. However, in actual use of the probe assembly, the width direction of the attachment region may be an oblique or horizontal direction, or the vertical direction may be reversed.

  Referring to FIGS. 1 to 3, the probe assembly 10 includes a block or support 12, a plurality of strip-shaped probes 14 arranged in parallel below the support 12, and an elongated shape penetrating the probe 14. A pair of guide bars 16, a pair of slit bars 18 that receive a part of the probe 14, a long guide member 20 that stabilizes the position of the needle tip on the rear end side of the probe 14, and the guide bar 16 on the support 12 And a pair of side covers 22 to be supported.

  The support 12 has a screw hole 24 and a pair of guide holes 26 on the upper surface side, and a pair of guide holes 28 on each side surface. As shown in FIG. 2, the lower surface of the support 12 is formed in a step shape by a plurality of steps. The support 12 can be made of a so-called non-conductive metal material, ceramic or synthetic resin that does not conduct electricity.

  As shown in FIGS. 2 and 3, each probe 14 includes an attachment region 30 that acts as a belt-like central region, and a pair of belt-like needle tip regions that extend further forward and rearward from the front and rear ends of the attachment region 30, respectively. 32 and 34.

  The attachment region 30 has a guide hole 36 through which the guide bar 16 penetrates at each end portion, and a plurality of elongated holes 38 that penetrate portions spaced in the longitudinal direction of the attachment region 30 are located between the guide holes 36. Have.

  Each elongated hole 38 extends in the longitudinal direction of the attachment region 30 and is spaced in the longitudinal direction of the attachment region 30.

  In the illustrated example, each guide hole 36 is circular, but may have a shape corresponding to the cross-sectional shape of the guide bar 16. In addition, the guide hole 36 may be formed at another place spaced in the longitudinal direction of the attachment region 30 or may be a long hole that extends greatly in the longitudinal direction of the attachment region 30. In the latter case, a long hole following the long hole 38 may be used.

  The needle tip regions 32 and 34 extend forward and backward from the upper edge and the lower edge of one end and the other end in the longitudinal direction of the attachment region 30, respectively, and have a width dimension smaller than the width dimension of the attachment region 30. .

  The needle tip region 32 includes a first region 40 extending forward from the distal end portion of the attachment region 30, a second region 42 extending forward from the distal end portion of the first region 40, and a distal end portion of the second region 42. And a third region 44 extending forward.

  The first region 40 has a U-shaped recessed portion 46 that opens upward at the distal end, and an arc-shaped recessed portion 48 that opens downward at a base end portion (site on the attachment region 30 side). )

  The width dimension of the first region 40 where the recessed portions 46 and 48 are formed is smaller than the width dimension of other portions of the first region 40. The portion of the first region 40 where the recessed portion 46 is formed protrudes slightly below the lower edge of the attachment region 30.

  The second region 42 includes a protruding portion 50 that protrudes downward from the lower end edge of the attachment region 30, and an arc-shaped recess 52 that opens upward is provided at a location where the protruding portion 50 is formed. ing. The lower surface of the protrusion 50 is an inverted trapezoid downward surface.

  In the illustrated example, the lower end surface 54 of the protrusion 50 is a horizontal plane parallel to the electrode of the object to be inspected, and the whole is a contact part to the electrode of the object to be inspected. However, the lower end surface 54 may be inclined by an angle of θ with respect to the horizontal plane so that the portion closer to the tip side is higher. In this case, a part of the lower end surface 54 acts as a contact portion to the electrode of the object to be inspected.

  The third region 44 has a tip surface 56 that is inclined such that the upper region is closer to the second region 42.

  As shown in FIG. 2, the tip of the needle tip region 34 is bent upward to form a sharp needle tip 34a. When the probe 14 is viewed from the thickness direction, the needle tip 34a has a triangular shape.

  The probe 14 is formed by etching an electrically conductive thin metal plate to create a probe original, and then forming a coating with an electrically insulating material such as a polyimide material on the probe excluding the portion that becomes the probe tip. By doing so, it can be manufactured.

  However, the probe 14 may be manufactured using a photolithographic technique and an electroplating technique.

  The probe 14 is arranged in parallel below the support 12 with the attachment region 30, the guide hole 36, and the long hole 38 facing each other in a state where the width direction of the attachment region 30 is the vertical direction.

  Each guide bar 16 has a circular cross-sectional shape in the illustrated example, and is formed of a non-conductive metal material. Each guide bar 16 is pushed into the guide hole 36 of the probe 14, and each end penetrates the side cover 22, whereby the guide bar 16 is assembled to the support 12 by the side covers 22.

  Each slit bar 18 has a plurality of slits 60 formed at a predetermined pitch in the longitudinal direction thereof. Each slit 60 has substantially the same width dimension as the thickness dimension of the probe 14 and extends over the entire width direction of the slit bar 18.

  The slit bar 18 on the distal end side also has a groove-like recess 62 that extends in the longitudinal direction and opens downward. In the recess 62, a rod-like elastic body 64 is arranged so that a part thereof protrudes into the slit 60 and extends in the longitudinal direction of the slit bar 18.

  In the example shown in the drawing, the recess 62 has a semicircular shape facing the recessed portion 52 of the probe 14, and the elastic body 64 has a circular cross-sectional shape. However, the recess 52, the recess 62, and the elastic body 64 may have other shapes.

  The slit bar 18 can be made from a non-conductive material such as ceramic. Each slit 60 can be formed before or after the slit bar 18 is attached to the support 12.

  The slit bar 18 having the recess 62 is bonded to the lower surface of the front end of the support 12 so that the slit bar 18 extends in the arrangement direction of the probes 14 and the slit 60 faces downward. The other slit bar 18 is bonded to the lower surface of the rear end of the support 12 so that the slit bar 18 extends in the arrangement direction of the probes 14 and the slit 60 faces downward. However, each slit bar 18 may be attached to the support 12 by one or more screw members or by fitting.

  Each probe 14 has the tip surface 56 protruding forward from the slit 60 of the slit bar 18 on the distal end side, and the needle tip region 32 and the needle tip 34a protruding rearward from the slit 60 of the slit bar 18 on the rear end side. 34 are respectively received in the slits 60 of the slit bar 18 on the front end side and the rear end side.

  In the above state, a part of the elastic body 64 is received in the recessed portion 52 of the needle tip region 32. However, the needle tip region 32 is separated from the groove bottom of the slit 60 of the slit bar 18 on the distal end side, and the lower end surface 54 protrudes downward from the slit 60 of the slit bar 18 on the distal end side.

  The guide member 20 has an L-shaped cross-sectional shape, and has a plurality of through holes 66 (see FIG. 1) spaced in the longitudinal direction of the guide member 20 in one side portion of the L-shape. The guide member 20 can be manufactured from a non-conductive film such as a polyimide material, and the through hole 66 can be formed by laser processing.

  The guide member 20 has a lower rear end surface of the support 12 by a plurality of screw members 68 so that each needle tip 34a extends through the through-hole 66 and extends in the arrangement direction of the probe 14 at the other side portion of the L shape. Removably attached to. However, the guide member 20 may be attached to the support 12 by fitting or by bonding. The guide member 20 may not be provided.

  Each side cover 22 is formed of a plate member having a shape corresponding to the side surface of the support body 12, and is detachably attached to the side surface of the support body 12 by a pair of guide pins 70 and a plurality of screw members 72. Yes.

  Each guide pin 70 is fitted in a guide hole 28 formed in the support 12 so as not to escape, and an end portion is fitted in a guide hole formed in the side cover 22. However, the guide pins 70 may be fixed to the side cover 22. The side cover 22 has a through hole that receives the ends of both guide bars 16.

  In the figure, the adjacent probes 14 are shown as being spaced apart greatly, but the arrangement pitch of the probes 14 is actually small. The thickness dimension and arrangement pitch of the probe 14 and the arrangement pitch and width dimension of the slit 60 differ depending on the type of the object to be inspected, particularly the arrangement pitch and width dimension of the electrodes.

  The probe assembly 10 first inserts both ends of each probe 14 into the slit 60 of the slit bar 18 with both the slit bars 18 and the guide member 20 attached to the support 12 in the state described above, and the needles. The tip 34a is passed through the through hole 66 of the guide member 20, the guide bar 16 is then inserted into the guide hole 36 of the probe 14, the guide pin 70 is then inserted into the side cover 22 and the support 12, and the end of the guide bar 16 is inserted. It can be assembled by inserting the portion through the side cover 22 and then attaching the side cover 22 to the support 12 with the screw member 72.

  Thereby, the probe 14 and the guide bar 16 are supported by the support body 12 via the side cover 22, and each probe 14 is supported by the support body 12 in a state where the thickness direction thereof is the longitudinal direction of the guide bar 16. Is done.

  In the assembled state as described above, the probe 14 is arranged in parallel on the lower side of the support 12 in a pattern corresponding to the arrangement pattern of the electrodes of the device under test such as a liquid crystal display panel, and the needle tip 34a is It protrudes rearward and upward from the slit bar 18 and protrudes upward from the guide member 20.

  The probe tip region 32 of each probe 14 is spaced from the groove bottom of the slit 60 of the slit bar 18 on the distal end side, but is in contact with the elastic body 64 at the recessed portion 52. Further, the tip surface 56 of each probe 14 projects forward from the slit bar 18.

  When the probe assembly 10 is assembled to the inspection apparatus, the probe assembly 10 is assembled to the inspection apparatus in a state where the needle tip 34a is slightly excessively pressed against the energization wiring of the TAB tape (not shown). Thereby, each probe 14 warps in an arc shape because the width dimension of the needle tip region 34 is smaller than that of the attachment region 30, and each needle tip 34 a reliably contacts the energization wiring.

  When the probe assembly 10 is assembled to the inspection device, the probe assembly 10 is positioned with respect to the inspection device by a guide pin inserted into the guide hole 26 shown in FIG. 1 and is inspected by a screw member screwed into the screw hole 24. Removably assembled to the device. However, the probe assembly 10 may be assembled to the inspection apparatus by other methods and other means.

  To replace the probe 14, the probe assembly 10 is removed from the inspection apparatus, the side cover 22 is removed from the support 12, the guide bar 16 is removed, the probe to be replaced is removed, and a new probe is instead attached to the support 12. After that, the probe assembly 10 is assembled by the method described above, and the probe assembly 10 is attached to the inspection apparatus. For this reason, exchange of a probe becomes easy.

  At the time of inspection, the probe assembly 10 and the object to be inspected are slightly excessively pressed against the electrode of the object to be inspected in a state where the lower end surface 54 and the electrode of the object to be inspected are aligned. At this time, since the distal end surface 56 protrudes forward from the slit 60, the position of the needle tip with respect to the electrode of the object to be inspected can be easily confirmed from above.

  When the lower end surface 54 is pressed against the electrode of the object to be inspected, overdrive (OD) acts on the probe 14. Each probe 14 is easily bent in the needle tip region 32 by such overdrive because the width of the needle tip region 32, particularly the width of the recessed portion 46 is smaller than that of the attachment region 30.

  However, the probe 14 is in contact with the elastic body 64 at the recessed portion 52 with the needle tip region 32 being separated from the groove bottom of the slit 60 of the slit bar 18 on the distal end side. For this reason, the elastic body 64 prevents the needle tip portion 32 from being bent by overdrive.

  As a result, since the deformation of the needle tip region 32 is prevented, the sliding amount of the lower end surface 54 with respect to the electrode of the object to be inspected is also small. Thus, according to the probe 14 with a small slip amount of the lower end surface 54 acting as the contact portion, the slit bar 18 is prevented from greatly approaching the object to be inspected even when the overdrive is actuated. Damage to the partition wall forming the slit 60 of the slit bar 18 due to the above is prevented.

  Further, the probe 14 is pressed against the guide bar 16 by the elastic body 64, and the play between the probe 14 and at least the guide bar 16 on the distal end side is eliminated. This prevents the probe 14 from being inclined in the longitudinal direction of the guide bar 16 with respect to the support 12 and the slit bar 18 on the distal end side even if an overdrive acts on the probe 14.

  As a result, irregular bending of the needle tip region 32 is prevented, and breakage of the slit bar 18 on the tip side and breakage of the needle tip region 32 are reliably prevented.

  Instead of the projecting portion 50 whose lower side surface is an inverted trapezoidal downward surface, a projecting portion having another shape may be used.

  The protrusion 80 shown in FIG. 4 is tilted so that the lower side is on the tip side. The protrusion 80 includes a lower end surface 82 that is inclined by an angle θ1 with respect to a horizontal plane so that the protrusion 80 is higher on the tip side, and a part of the lower end surface 82 serves as a contact portion. According to such a protruding portion 80, when this is pressed against the electrode of the device under test, both are reliably electrically connected.

  The probe 14 shown in FIG. 5 has a convex portion 84 in the second region 42 spaced from the protruding portion 80 to the rear in the longitudinal direction of the attachment region 30 (or may be the front). Similarly to the projecting portion 80, the convex portion 84 is inclined so that the lower portion is closer to the tip side.

  The lower end surface 86 of the convex portion 84 is inclined by an angle of θ2 with respect to the horizontal plane so that the lower end surface 86 becomes higher toward the tip side. θ2 may be the same as or different from θ1.

In the probe 14 shown in FIG. 6, the second region 42 has an oval shape, and the protrusion 88 is formed at the oval tip. The lower end surface 90 of the projecting portion 88 is inclined with respect to the horizontal plane so that the portion closer to the tip side is lower, and the tip is used as a contact portion to the electrode of the object to be inspected.

  The probe shown in FIG. 6 does not include the third region. For this reason, the tip surface 56 inclined so as to be closer to the first region 40 toward the upper side is formed in the second region 42.

  In any of the embodiments of FIGS. 3, 4, and 5, the tip surface 56 may be formed in the second region 42, and the third region 44 may not be provided. Further, in any of the embodiments shown in FIGS. 3 to 6, it is not necessary to provide the tip surface 56 that is inclined so as to be closer to the first region 40 toward the upper side.

  In any of the embodiments shown in FIGS. 3 to 5, the recess 62 may have a rectangular cross-sectional shape, and an elastic body having a rectangular cross-sectional shape corresponding to the cross-sectional shape of the recessed portion may be used. In the embodiment of FIG. 6, the recess 92 may have an arcuate cross-sectional shape, and an elastic body having a circular cross-sectional shape corresponding to the cross-sectional shape of the recessed portion may be used.

  When the probe 14 shown in FIG. 6 is used, the elastic body 94 and the recessed portions 46 and 48 may not be provided as shown in FIG.

  As in the probe assembly 10 shown in FIG. 8, not only the elastic body 64 is disposed between the needle tip region 32 and the slit bar 18 on the distal end side, but also the elastic body 96 is connected to the central region 30 of the probe 14 and the support body 12. You may arrange | position between the lower surfaces of. In the illustrated example, the elastic body 96 is made into a plate shape with a rubber agent such as silicone rubber.

  As described above, if the plurality of elastic bodies 64 and 96 are arranged at intervals in the longitudinal direction of the probe 14, the probe 14 is pressed against the guide bar 16 on the rear end side even on the rear end side. Is reliably prevented.

  Instead of disposing the elastic body 64 between the needle tip region 32 and the slit bar 18 on the distal end side, as shown in FIG. 9, two elastic bodies 96 are connected between the probe 14 and the support 12 as shown in FIG. 14 may be arranged at intervals in the longitudinal direction.

  Further, as shown in FIG. 10, two elastic bodies 96, 96 are arranged between the probe 14 and the support 12 with a space in the longitudinal direction of the probe 14, and are made into a plate shape with a rubber material such as silicone rubber. The other elastic body 98 produced in (5) may be disposed between the needle tip region 32 and the slit bar.

  Furthermore, as shown in FIG. 11, an elastic body 100 having a width dimension substantially the same as the length dimension of the central region 30 may be disposed between the probe 14 and the support body 12. The elastic body 100 is also made of a rubber material such as silicone rubber in a plate shape.

  In any of the embodiments shown in FIGS. 9, 10 and 11, the probe 14 is pressed against the guide bars 16 and 16 on both the front end side and the rear end side, so that the tilt is reliably prevented.

  However, as shown in FIG. 12, the elastic body 96 may be disposed only between the central region 30 of the probe 14 and the lower surface of the support 12.

  Instead of using an elastic body having a circular or rectangular cross-sectional shape such as the elastic bodies 64, 96, 98, 100, an elastic body having another cross-sectional shape such as a semicircular shape, a hexagonal shape, an oval shape, an elliptical shape or the like is used. May be.

  In the embodiment shown in FIG. 13, an elastic body 102 having a semicircular cross-sectional shape is used.

  The probe 12 used in the embodiment shown in FIGS. 9 to 13 has a width of the needle tip region 32 smaller than the width of the central region 30, but the needle tip 32 a is the tip of the needle tip region 32. It is bent downward from.

  Further, the probe 12 used in the embodiment shown in FIGS. 9 to 13 does not have the long hole 38 in the central region 30, but such a long hole 38 may be formed in the central region 320. .

  The present invention can be applied not only to a liquid crystal display panel but also to a probe and a probe assembly used for inspecting other flat inspected objects such as glass substrates, organic EL, and other display substrates. it can.

  The present invention is not limited to probes and probe assemblies used for inspection of display panels such as liquid crystal display panels and organic EL, but also to probes and probe assemblies used for inspection of other flat objects such as integrated circuits. Can also be applied.

1 is a perspective view showing a first embodiment of a probe assembly according to the present invention. It is a longitudinal cross-sectional view of the probe assembly shown in FIG. FIG. 2 is an enlarged longitudinal sectional view in the vicinity of a tip end side needle tip region in the first embodiment shown in FIG. 1. FIG. 6 is an enlarged longitudinal sectional view in the vicinity of a tip end side needle tip region showing a second embodiment of the probe assembly according to the present invention. It is an enlarged vertical sectional view of the vicinity of the needle tip region on the tip side showing a third embodiment of the probe assembly according to the present invention. FIG. 9 is an enlarged longitudinal sectional view in the vicinity of a tip end side needle tip region showing a fourth embodiment of the probe assembly according to the present invention. FIG. 10 is an enlarged longitudinal sectional view in the vicinity of a tip end side needle tip region showing a fifth embodiment of the probe assembly according to the present invention. It is a longitudinal cross-sectional view which shows the 6th Example of the probe assembly which concerns on this invention. It is a longitudinal cross-sectional view which shows the 7th Example of the probe assembly which concerns on this invention. It is a longitudinal cross-sectional view which shows the 8th Example of the probe assembly which concerns on this invention. It is a longitudinal cross-sectional view which shows the 9th Example of the probe assembly which concerns on this invention. FIG. 20 is an enlarged longitudinal sectional view showing a tenth embodiment in the vicinity of the needle tip region on the distal end side of the probe assembly according to the present invention. It is an expanded longitudinal cross-sectional view which shows the 11th Example of the needle tip area | region vicinity of the front end side of the probe assembly which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Probe assembly 12 Support body 14 Probe 16 Guide bar 18 Slit bar 20 Guide member 22 Side cover 30 Center area | region 32,34 Needle tip area | region 40 1st area | region 42 2nd area | region 44 3rd area | region 46,48 Notch Part 50, 80, 88 Projection part 52 Concave part (second concave part)
54, 82, 86, 90 Lower end surface 60 Slit 62, 92 Recess 64, 94, 96, 98, 100, 102 Elastic body 66 Through hole 84 Projection

Claims (14)

A support, a plurality of probes and a belt-shaped needle tip region having a smaller width dimension than the width of the mounting region Ru extending forwardly from the distal end of the strip-shaped mounting region and the mounting region, of said attachment area A plurality of probes arranged in parallel with the attachment region facing the lower side of the support body in a state where the width direction is the vertical direction, extending through the attachment region in the thickness direction thereof, and the An elongated guide bar supported by the support, and a slit bar disposed on the distal end side of the support and extending in the longitudinal direction of the guide bar, and spaced apart in the longitudinal direction and open downward A slit bar having a slit; and at least one elastic body disposed between the attachment region and the support body and extending in a longitudinal direction of the slit bar. Over Bed is the needle tip area are received in the slit, the probe assembly.   Including at least two elastic bodies, wherein one elastic body is disposed between the slit bar and the needle tip region, and the other elastic body is disposed between the attachment region and the support body. The probe assembly of claim 1, wherein:   The probe assembly according to claim 2, wherein the slit bar further has a recess extending in a longitudinal direction thereof and opening downward, and the one elastic body is disposed in the recess.   2. The probe assembly according to claim 1, comprising two elastic bodies spaced in the longitudinal direction of the probe, both elastic bodies being disposed between the attachment region and the support.   The needle tip area is a first area extending from the distal end of the attachment area and a second area extending from the distal end of the first area, and projects downward from the lower edge of the attachment area. The probe assembly according to claim 1, further comprising a second region having a protruding portion.   The probe assembly according to claim 5, wherein the first region includes a U-shaped recess that opens upward.   The probe assembly according to claim 6, wherein a width dimension of the first region where the recessed portion is formed is smaller than a width dimension of the other part.   The probe assembly according to claim 5, wherein a lower surface of the protrusion is an inverted trapezoid downward surface.   6. The probe assembly according to claim 5, wherein the protruding portion is inclined so as to be closer to the distal end as it is located on the lower side, and further includes a lower end surface that becomes higher toward the distal end side.   The projecting portion further includes a projecting portion spaced from the projecting portion in the longitudinal direction of the attachment region, the projecting portion being inclined so as to be on the tip side toward the lower portion, the projecting portion. The probe assembly according to claim 9, further comprising a lower end surface that is higher on the tip side.   The probe further includes a third region extending from the distal end portion of the second region, and the third region has a distal end surface that is inclined so as to be closer to the second region toward the upper side. The probe assembly according to claim 5, wherein the probe has the tip end surface projected forward from the slit.   The probe assembly according to claim 5, wherein the second region has an oval shape, and the protrusion is formed at a tip of the oval.   The second region has a tip surface that is inclined so that the upper side is closer to the first region, and the probe projects the tip surface forward from the slit. A probe assembly according to claim 1.   The probe assembly according to claim 5, wherein the probe further includes a needle tip protruding downward from a tip of the needle tip region.

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