JP2010160083A - Probe assembly - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To arrange probes at a small pitch without reducing a slit pitch. <P>SOLUTION: In this probe assembly, a plurality of probes including each belt-like mounting domain and each tip side needle tip domain extending further from the tip of the mounting domain are arranged in parallel on the lower side of a support so that a width direction of the mounting domain is a vertical direction. The plurality of probes include: a plurality of first probes whose each part of the needle tip domain is arranged on the tip side of the support, and which are received by each slit formed on a slit bar extending in the array direction of the probes, at intervals in the longitudinal direction of the slit bar; and second probes arranged respectively between adjacent first probes. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a probe assembly used for an electrical test of a flat test object such as a liquid crystal display panel.

  One probe assembly used for an electrical test of a flat test object such as a liquid crystal display panel is described in Patent Document 1.

  The probe assembly described in Patent Literature 1 includes a support and a plurality of needle tip regions each extending from the respective end portions in the front-rear direction (Y direction) of the belt-shaped attachment region to the front end side or the rear end side. A plurality of probes arranged in parallel with the mounting region facing the lower side of the support so that the width direction (Z direction) of the mounting region is the vertical direction, and the mounting region of these probes An elongated support bar extending through the thickness direction (X direction) and supported by the support at both ends, and a pair of slit bars arranged on the support and extending in the probe arrangement direction (X direction) Including.

  Each slit bar includes a plurality of slits extending in the front-rear direction and spaced downward in the longitudinal direction (X direction). The support bar has a longitudinal end received by a plate-like side cover screwed to each end of the block in the arrangement direction of the probes. Thereby, the probe is assembled | attached to the support body by the support bar and the side cover.

  Each probe has an insulating film that covers a part of the surface on one surface, and the tip of the needle tip region on the tip side of each needle tip region is bent downward to inspect the tip. The needle tip is pressed against the body electrode. In the probe, a part of the needle tip region on the front end side and the rear end side is received in the slits of one and the other slit bars, respectively. This prevents the probe tip region of each probe from being displaced in the longitudinal direction of the slit bar.

  However, there is a limit to reducing the slit pitch due to mechanical strength. However, in the above-described conventional probe assembly, since the probe tip regions of all probes are received in the slits of the slit bar, the same number of slits as the number of probes must be provided in the slit bar. For this reason, in the conventional probe assembly, slits with a narrow pitch cannot be formed in the slit bar, and the probes cannot be arranged with a narrow pitch.

  An object of the present invention is to make it possible to arrange probes at a narrow pitch without reducing the pitch of the slits.

  The probe assembly according to the present invention is a plurality of probes including a support, a band-shaped attachment region, and a needle tip region that extends further forward from the tip of the attachment region, and the width direction of the attachment region is a vertical direction. A plurality of probes arranged in parallel with the mounting region facing the lower side of the support, and a slit bar arranged on the tip side of the support and extending in the arrangement direction of the probes. And a slit bar having a plurality of slits opened downward at intervals in the longitudinal direction of the slit bar.

  In the probe assembly according to the present invention, an insulating film is formed on one surface of each probe so as to cover a part of the surface. The plurality of probes are respectively disposed between a plurality of first probes in which a part of the needle tip region is received in the slit and the first probes adjacent in the longitudinal direction of the slit bar. Second probe.

  In another probe assembly according to the present invention, the plurality of slits include a first slit located on one side of the slit bar in the front-rear direction and a second slit located on the other side, Each probe has an insulating film formed on one surface thereof so as to cover a part of the surface, and each of the plurality of probes receives a part of the needle tip region in the first slit. Arranged between the plurality of first probes and the first probes adjacent to each other in the longitudinal direction of the slit bar, each of which receives a part of the needle tip region in the second slit A plurality of second probes.

  Each slit may extend in the longitudinal direction of the probe, and may open to one or the other side in the longitudinal direction of the probe.

  The needle tip region of each first probe may be an arm portion that extends further forward from the tip of the attachment region, and a portion of the arm portion may be received by the slit.

  Instead of the above, the needle tip region of each first probe includes an arm portion that extends further forward from the tip of the attachment region, and a protrusion that protrudes upward from the arm portion and is received by the slit. Can be provided.

  The protrusions of the first probes adjacent in the longitudinal direction of the slit bar may be provided at different positions in the longitudinal direction of the first probe.

  The slits adjacent in the longitudinal direction of the slit bar may be provided at different positions in the longitudinal direction of the first probe.

  A plurality of second probes may be arranged between the first probes adjacent to each other in the longitudinal direction of the slit bar.

  The height position of the portion received in the slit in the needle tip region of each first probe may be higher than the height position of the corresponding portion of the needle tip region of the second probe.

  The probe assembly further includes a pair of support bars extending through a portion spaced in the longitudinal direction of the attachment region of the first and second probes in the thickness direction of the portion, and a longitudinal direction of the support bar. It is a pair of plate-shaped side covers which receive the edge part of a direction, Comprising: A pair of side cover removably assembled | attached to the side part of the said support body can be included.

  The probe assembly is further a second slit bar arranged on the rear end side of the support and extending in the arrangement direction of the probes, and the probe assembly is spaced apart in the longitudinal direction of the second slit bar A second slit bar including a plurality of second slits extending in the longitudinal direction and opening downward may be included. Each probe may further include a needle tip region extending further rearward from the rear end of the attachment region. Furthermore, either one of each of the first probes and each of the second probes can receive a part of the needle tip region extending rearward in the second slit from below.

  Each of the second slits may receive a part of the needle tip region extending rearward of the first probe from below.

  The height position of the portion of the first probe extending rearward of each first probe that is received by the second slit is the height of the corresponding portion of the second tip extending region of the second probe. It may be higher than the height position.

  Each of the needle tip regions of each probe may further include a needle tip that protrudes downward or upward from the tip or rear end thereof.

  According to the probe assembly of the present invention, each of the plurality of probes has an insulating film on one surface, and among the plurality of probes, a part of the needle tip regions of the plurality of first probes Since the plurality of second probes are arranged between the first probes adjacent to each other in the longitudinal direction of the slit bar, the same number of slits as the number of the first probes may be provided in the slit bar. As a result, the probes can be arranged at a narrow pitch without causing electrical interference between adjacent probes and without reducing the pitch of the slits.

  According to another probe assembly according to the present invention, the plurality of slits include a first slit located on one side of the slit bar in the front-rear direction and a second slit located on the other side. Each probe has an insulating film formed on one surface thereof so as to cover a part of the surface, and each of the plurality of probes receives a part of the needle tip region in the first slit. Arranged between the plurality of first probes and the first probes adjacent to each other in the longitudinal direction of the slit bar, each of which receives a part of the needle tip region in the second slit Since a plurality of second probes are included, the probes can be arranged at a narrow pitch without causing electrical interference between adjacent probes and without reducing the pitch in the slits.

It is a top view which shows a part of test | inspection apparatus of the liquid crystal display panel which shows an example of the electrical connection apparatus incorporating the probe assembly which concerns on this invention. It is a front view which shows roughly one of the probe assemblies integrated in the inspection apparatus shown in FIG. FIG. 3 is a partial cross-sectional view schematically showing a probe assembly obtained along the line 3-3 in FIG. 2. FIG. 4 is a front view of the probe assembly shown in FIG. 3, in which the probe is hatched so that it can be easily understood. FIG. 5 is an enlarged cross-sectional view showing a part near the probe and slit bar of the probe assembly shown in FIG. 4. It is a figure which shows the relative positional relationship of a probe and a slit bar, Comprising: (A) shows the relative positional relationship of one probe and a slit bar, (B) is the relative position of the other probe and a slit bar. Indicates the positional relationship. It is an enlarged view which shows in detail the relationship between the needle point area | region of the front end side of one and the other probe, and a slit. It is a figure which shows the detail of the probe roughly shown in FIG. 3, Comprising: (A) is a side view, (B) shows the relative positional relationship at the time of arrange | positioning the probe shown to (A) in parallel. FIG. FIG. 5 is a side view similar to FIG. 4, showing a second embodiment of the probe assembly according to the present invention. It is a figure which shows the positional relationship of the probe and slit bar in 3rd Example of the probe assembly which concerns on this invention, Comprising: (A) shows the positional relationship of one probe and a slit bar, (B) is the other The positional relationship of a probe and a slit bar is shown. It is a figure which shows the positional relationship of the probe and slit bar in 4th Example of the probe assembly which concerns on this invention. It is a figure which shows the positional relationship of the probe and slit bar in the 5th Example of the probe assembly which concerns on this invention.

  Referring to FIG. 1, an inspection apparatus 12 incorporates a plurality of probe assemblies 10 according to the present invention and is used for an energization test of a rectangular liquid crystal display panel 14. The liquid crystal display panel 14 has a large number of electrode pads (not shown) arranged in alignment with the upper surfaces of the edges corresponding to one long side and one short side of the rectangle.

  The inspection device 12 includes an inspection stage 16 in addition to the probe assembly 10. The inspection stage 16 has a rectangular opening 16 a that is slightly smaller than this, similar to the external shape of the liquid crystal display panel 14. The liquid crystal display panel 14 is disposed on the inspection stage 16 so as to receive backlight light from the back surface through the opening 16a and cover the opening 16a.

  A plurality of probe bases 18 (18a, 18b) are disposed above the inspection stage 16. In the illustrated example, the probe base 18 is provided at two locations corresponding to adjacent sides of the rectangular liquid crystal display panel 14. Each probe assembly 10 is assembled to a corresponding probe base 18 by a corresponding support mechanism 20 so as to be electrically connected to the electrode pad of the liquid crystal display panel 14.

  As shown in FIG. 2, each support mechanism 20 is assembled to a corresponding probe base 18, and the corresponding probe assembly 10 is attached to a number of probes 22 (22 a and 22 b provided on the probe assembly 10. ) Is detachably supported so that the needle tip 42 a on the tip side protrudes toward the liquid crystal display panel 14.

  Each probe assembly 10 is held by a corresponding support mechanism 20 so as to be movable up and down with respect to the liquid crystal display panel 14 so that the probe tip 42a of the probe 22 is in contact with the corresponding electrode pad. A support mechanism having the same configuration as the support mechanism 20 is described in, for example, Japanese Patent Application Laid-Open No. 2004-191064.

  As shown in FIGS. 2 and 3, each probe assembly 10 includes a probe block or a support 24 detachably attached to the support mechanism 20 in addition to the above-described many probes 22, and a probe 22. A pair of support bars 26 a and 26 b for supporting the support 24, a pair of prismatic slit bars 28 a and 28 b provided on the lower surface 24 a of the support 24, and screw members fixed to both sides of the support 24. And a pair of side covers 40a and 40b (see FIG. 2) for fixing both support bars 26a and 26b to both sides of the support 24 at both ends thereof. A large number of probes 22 are arranged below the support 24.

  The support 24 is made of a metal material covered with an insulating film or an electrically insulating material. Both slit bars 28a, 28b are made of an electrically insulating material such as ceramic. Both support bars 26a and 26b are also made of a rod-shaped metal material coated with an electric insulating film or a rod-shaped electric insulating material.

  The lower surface 24a of the support 24 has an overall rectangular shape, and one side 30a, which is the front edge, is positioned above the liquid crystal display panel 14 received by the inspection stage 16, and the liquid crystal display The support mechanism 20 is disposed on the corresponding probe base 18 so as to extend along the edge of the panel 14.

  One slit bar 28a extends along one side of the lower surface 24a of the support 24, that is, the front edge 30a, and the upper surface of the slit bar 28a is in contact with the lower surface 24a of the support 24. It is fixed to.

  The other slit bar 28b extends along the other side of the lower surface 24a of the support 24, that is, the rear edge 30b so as to extend in parallel with the one slit bar 28a with a distance from the one slit bar 28a to the rear side. In addition, the upper surface is fixed to the support 24 so that the upper surface is in contact with the lower surface 24 a of the support 24.

  The slit bars 28a and 28b respectively have a plurality of slits 32a and a plurality of slits 32b spaced from each other in the longitudinal direction of the corresponding slit bars 28a and 28b on the lower surface.

  Each of the slits 32a and 32b extends through the corresponding slit bar 28a or 28b in the front-rear direction (that is, the longitudinal direction of the probe 22), and is open to the front end side, the rear end side, and the lower side, respectively. It is supposed to be a groove. The slits 32a and 32b correspond to each other. The slit bars 28a and 28b are arranged so that the corresponding slits 32a and 32b are at the same position in the longitudinal direction of the slit bars 28a and 28b.

  As shown in FIG. 3, each probe 22 has a belt-like attachment region 34 having the same width W in the longitudinal direction, and a pair of belt-like needles extending further forward and rearward from the front and rear ends of the attachment region 34, respectively. It consists of a plate-shaped electrically-conductive member provided with the front area | regions 36a and 36b.

  The attachment region 34 of each probe 22 has a pair of guide holes 38 through which the pair of support bars 26 a and 26 b respectively penetrate at one end and the other end of the attachment region 34. Both guide holes 38 are spaced apart from each other in the longitudinal direction of the attachment region 34, and penetrate the attachment region 34 in the thickness direction.

  One (tip end) needle tip region 36 a of each probe 22 extends forward from the lower edge portion at one end (tip) in the longitudinal direction of the attachment region 34. The other (rear end side) needle tip region 36b of each probe 22 extends rearward from the upper edge portion at the other end (rear end) of the attachment region 34.

  Each of the needle tip areas 36a and 36b includes an arm portion 54 (see FIGS. 6A, 6B, and 7) having a width dimension smaller than the width dimension W of the attachment area 34. In the illustrated example, the width dimensions of the needle tip regions 36a and 36b (arm portion 54) are smaller toward the tip side. However, the width dimension of each arm part 54 may be substantially the same, or may be larger toward the distal end side.

  The multiple probes 22 are aligned in parallel in the thickness direction of the probe 22 so that the width direction of the attachment region 34 is the vertical direction and the attachment regions 34 are opposed to each other. Thereby, the guide holes 38 in the attachment region 34 of the adjacent probes 22 are aligned with each other.

  As shown in FIGS. 4 to 7, in order to reduce the arrangement pitch of the multiple probes 22, a first probe group including a plurality of probes 22 a and a second probe group including a plurality of probes 22 b It is divided into.

  Each probe (first probe) 22a belonging to the first probe group has the support 24 in a state where the arm portions 54 of the one and other needle tip regions 36a and 36b are received by the slits 32a and 32b, respectively. It is located below the lower surface 24a at a distance from the lower surface 24a. Thereby, as shown in FIG. 6 (A), a part of each arm portion 54 of the needle tip regions 36a and 36b of one probe 22a is received in the slit 32a or 32b.

  On the other hand, as shown in FIG. 6B, the needle tip regions 36a and 36b of each probe (second probe) 22b belonging to the second probe group can receive the arm portion 54 in the slits 32a and 32b. And are located below the slit bars 28a and 28b, respectively. Accordingly, the needle tip regions 36a and 36b of the other probes 22b extend in parallel with the probes 22a between the probes 22a adjacent to each other in the longitudinal direction of the slit bars 28a and 28b.

  As a result, the slits 28a and 28b do not need to be provided with slits for receiving the needle tip regions 36a and 36b of the other probe 22b, so that it is not necessary to form the slits 32a and 32b at a narrow pitch.

  In the illustrated example, since every other probe 22a is received in the slit 32, for example, even if the pitch of the slit 32 is the same as the pitch of the slit in the conventional probe assembly, the arrangement pitch of the probes 22 is This is twice the arrangement pitch of the probes in the conventional probe assembly. Thereby, the slits 32 can be easily formed, and the probes 22 can be arranged at a narrow pitch.

  The support bars 26a and 26b pass through the aligned guide holes 38 and 38 of the probe 22, respectively, and both ends thereof are passed through the side covers 40a and 40b (see FIG. 2), so that the support 24 It is fixed on both sides. Thus, each probe 22 is held in a predetermined posture below the support 24 via the support bars 26a and 26b and the side covers 40a and 40b arranged in parallel with the slit bars 28a and 28b.

  The needle tip region 36b on the rear side of each probe 22 has a rear needle tip 42b formed at the rear end of the needle tip region 36b protruding from the slit bar 28b obliquely rearward of the support 24. The needle tip 42b is connected to a corresponding connection pad of a circuit board 46 (see FIG. 3) fixed to the lower surface of the support block 44 supported by the support mechanism 20.

  As a result, each probe 22 is connected to a tester body (not shown) via the circuit board 46. In the example shown in FIG. 3, the needle tip 42 b extends through the hole 48 a of the guide film 48 for preventing erroneous contact with the circuit board 46 and is connected to the connection pad of the circuit board 46.

  The needle tip regions 36a and 36b of the probe 22a extend at a position higher than the needle tip regions 36a and 36b of the probe 22b, as one of them (36a) is illustrated in FIG.

  The needle tip region 36a on the distal end side of each probe 22 projects the needle tip 42a on the distal end side of the arm portion 54 obliquely downward from the front of the slit bar 28a. On the other hand, the needle tip region 36b on the rear end side of each probe 22 projects the needle tip 42b on the rear end side of the arm portion 54 obliquely upward from behind the slit bar 28b.

  In the illustrated example, the slit bar 28a has a stepped portion 50 at the rear edge of the slit 32a. The step portion 50 defines a flat step surface 50a located above the back bottom surface of the slit 32a.

  Each probe 22 has a stepped portion 52 corresponding to the stepped portion 50 at a position on the distal end side of the attachment region 34. The step 52 defines a flat step surface 52 a that faces the step surface 50 a of the step 50, and acts as a part of the attachment region 34. For this reason, in the illustrated example, one needle tip region 36a extends forward from the step portion 52, but the step portion 52 may not be provided.

  As shown in FIGS. 6 (A) and 6 (B) and FIG. 7, each probe 22a has its tip side needle tip region 36a abutting against the back bottom surface of the slit 32a when both surfaces 50a and 52a are in contact with each other. There is no contact, and a space is formed between the needle tip region 36a and the region of the stepped portion 50 excluding the step surface 50a so that the needle tip 42a protrudes obliquely downward from the front edge of the slit bar 28a. , Held by the support 24.

  On the other hand, in each probe 22b, in the state where both surfaces 50a and 52a are in contact, the needle tip region 36a does not contact the lower surface of the slit bar 28a, and the probe tip region 36a and the stepped surface 50a are excluded. An interval is formed between the region of the stepped portion 50, and the needle tip 42a is held by the support 24 so as to protrude obliquely downward from the front edge of the slit bar 28a.

  Therefore, when the needle tip 42a on the tip side of each probe 22 is pressed against the corresponding electrode pad of the liquid crystal display panel 14, at least a part of the pressing force acting on each needle tip 42a is a stepped surface of the attachment region 34. The reaction force is borne by the step surface 50a of the step portion 50 of the slit bar 28a facing the 52a. Thereby, the step surfaces 50a and 52a act as a rigid fulcrum and a rigid supported point, respectively.

  Each of the probe tip regions 36a of the probes 22a and 22b is allowed to elastically deform in the probe tip region 36a until it comes into contact with the inner bottom surface of the slit 32a or the lower surface of the slit bar 28a. Thus, each probe 22 is pressed against the corresponding electrode pad of the liquid crystal display panel 14 with an overdrive force corresponding to the elastic deformation amount.

  The rigid fulcrum 50a, the rigid supported point 52a, the step portion 50, and the step portion 52 can be eliminated. However, in order to reduce the overdrive force acting on the pair of support bars 26a and 26b and prevent the needle tip 42a from being displaced due to the bending deformation of the support bars 26a and 26b, the rigid fulcrum 50a and the rigid supported point It is desirable to provide 52a, the step part 50, and the step part 52. FIG.

  In the inspection apparatus 12, the tip 42 a on the tip side of each probe 22 provided in each probe assembly 10 is pressed against the corresponding electrode pad of the liquid crystal display panel 14. As a result, each probe 22 is deformed with elasticity, and is connected to the corresponding electrode pad with an overdrive force corresponding to the deformation. Therefore, each electrode pad is securely connected to the tester body through the probe assembly 10.

  In order to prevent an electrical short circuit between the adjacent probes 22, the plate-like probes 22 are spaced in the longitudinal direction of the probes 22 as shown in FIGS. 4, 5, 8, and 9. A plurality of electrical insulating films 56 covering each of the plurality of places are provided on one surface.

  In the illustrated example, one surface of each probe 22 is covered with a band-shaped insulating film 56 in a plurality of regions from the needle tip 42a to the needle tip 42b, while the other surface is covered with the needle tip 42a. The entire region up to the tip 42b is exposed without being covered with the insulating film 56.

  However, the insulating film 56 may be formed at a plurality of locations in the entire region from the needle tips 42a on both surfaces of each probe 22 to the needle tips 42b, or from one or both needle tips 42a on each surface of each probe 22. It may be formed continuously over the entire region extending over the needle tip 42b. Further, instead of the strip-like insulating film 56, an insulating film having a large number of dot-like or small surface regions may be used.

  As shown in FIGS. 4, 5, and 8 (B), each of the plurality of probes 22 has one surface (a surface having an insulating film) on the other surface of the adjacent probe 22 (having no insulating film). 3 and is supported by the support 24 via support bars 26a and 26b penetrating the guide holes 38 and 38, respectively, as shown in FIG.

  As a result, even if the adjacent probes 22 come into contact with each other due to the arrangement of a large number of probes 22, an electrical short circuit between the adjacent probes 22 is prevented.

  8A shows capacity reducing holes 58a and 58b which are omitted in FIG. 3 for the sake of simplicity of the drawing. The capacitance reducing holes 58a and 58b reduce crosstalk between the adjacent probes 22 due to leakage of the pulse signal by reducing the electrostatic capacitance between the adjacent probes 22.

  Like the probe assembly 10, each probe 22 has an insulating film on one surface, and a part of the needle tip region 36a of the probe 22a is received in the slit 32a, and the probe 22b is adjacent to the longitudinal direction of the slit bar 28a. If it arrange | positions between the matching probes 22a, the probes 22 can be arrange | positioned by a narrow pitch, without causing the mutual electrical interference of the adjacent probes 22, and without making the pitch of the slit 32a small.

  In the above embodiment, the probes 22a and 22b are alternately arranged in the longitudinal direction of the slit bar 28a. However, as shown in FIG. 9, a plurality of probes 22b are arranged between the probes 22a adjacent to each other in the longitudinal direction of the slit bar 28a. You may arrange. By doing so, the probes 22 can be arranged at a narrower pitch without reducing the pitch of the slits 32a, and the slits 32a can be formed more easily.

  The plurality of probes 22b arranged between the adjacent probes 22a may be overlapped with each other in a state in which an electrical short circuit is prevented by the insulating film 56. Moreover, it is not necessary to provide a space between the probes 22a and 22b adjacent in the longitudinal direction of the slit bar 28a.

  Referring to FIGS. 10A and 10B, each of the needle tip regions 36a and 36b of one probe 60a is provided in addition to the arm portion 54 and the needle tip 42a or 42b. A protrusion 62 protruding upward from the upper edge is provided. However, the needle tip regions 36a and 36b of the other probe 60b do not have such a protrusion.

  These protrusions 62 may be provided at the distal end portion of the arm portion 54 like the protrusion 62 of the tip end side needle tip region 36a, or the arm like the protrusion 62 of the rear end side needle tip region 36b. You may provide in the center part (or the location by the side of the attachment area | region 34) of the part 54.

  Referring to FIG. 11, slits 64 adjacent to each other in the longitudinal direction of the slit bars 28a and 28b are provided at different positions in the longitudinal direction of the probes 60a and 60b. That is, the slits 64 are alternately positioned on one side and the other side of the corresponding slit bar 28a or 28b in the front-rear direction (longitudinal direction of the probe), and are positioned on one side of the corresponding slit bar in the front-rear direction. A first slit belonging to the first slit group, and a second slit belonging to the second slit group located on the other side.

  Similarly, the protrusions 62 of the probes 60a adjacent in the longitudinal direction of the slit bars 28a and 28b are provided at different positions in the longitudinal direction of the probe 60a. That is, the probe 60 a has a protrusion 62 provided at a position on the attachment region 34 side of the arm portion 54, and a first slit belonging to the first probe group received by the first slit, and the arm portion 54. And a second slit belonging to the second probe group, which is provided at a location opposite to the attachment region 34 and is received by the second slit.

  Each slit 64 is open to the lower side and the front end side or the rear end side, and further has a deep bottom surface extending obliquely. Instead of the slit 64 as shown in FIG. 11, it may be a slit that opens to the lower side, the front side, and the rear side similarly to the slits 32 a and 32 b already described. And a slit that opens to the front side or the rear side.

  11 and 12 using the first and second slits 64 and 64, the slits 64 are alternately positioned on one side and the other side in the front-rear direction (longitudinal direction of the probe). A protrusion 62 of 60a is received in either the first or second slit, and a probe 60b is disposed between the probes 60a adjacent to each other in the longitudinal direction of the slit bar. For this reason, although the slit can be formed more easily, the arrangement pitch of the probes 60a and 60b can be reduced.

  Instead of arranging the probes 60a and 60b as in the embodiment shown in FIGS. 11 and 12, the probe 60a is provided with a protrusion provided on either the attachment region 34 side or the opposite side location. A protrusion provided on the other side of the region 34 side and the opposite side is provided on the probe 60b, and the protrusion of the probe 60a is disposed on one of the corresponding first and second slits. The protrusion may be disposed on the other of the corresponding first and second slits.

  In the above case, the slit 64 acts as the first and second slits according to the position where they are provided, and the probe 60a is the first slit belonging to the first probe group received in the first slit. The probe 60b acts as a second probe belonging to the second probe group received in the second slit.

  According to the probe assembly as described above, since the adjacent first and second slits are provided at different positions in the longitudinal direction of the probe, the protrusions of the first and second probes are respectively connected to the first and second protrusions. Even if it arrange | positions to a 2nd slit, it arrange | positions a probe by a narrow pitch, without causing the mutual electrical interference of an adjacent probe, and without making the pitch of a 1st slit, and the pitch of a 2nd slit small. can do.

  The slit bar 28b having the slit 32b for receiving the needle tip region on the rear end side of the probe 22b and the guide film 48 for receiving the needle tip 42b on the rear end side of each probe 22 may be omitted. Further, the needle tip region 36b on the rear end side may not have the above shape.

  The present invention can be applied not only to a liquid crystal display panel but also to a probe assembly used for an electrical test of another flat object to be inspected such as a display panel using a large number of light emitting elements.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

DESCRIPTION OF SYMBOLS 10 Probe assembly 12 Electrical connection apparatus 14 Liquid crystal display panel (inspection object)
22, 22a, 22b, 60a, 60b Probe 24 Support body 26 (26a, 26b) Support bar 28 (28a, 28b) Slit bar 32a, 32b, 64, 66 Slit 34 Mounting portion 36 (36a, 36b) Needle tip region 40a , 40b Side cover 42a, 42b Needle tip 54 Arm portion of needle tip region 56 Insulating film 62 Projection

JP 2007-303969 A

Claims (14)

A support;
A plurality of probes comprising a belt-like attachment region and a needle tip region extending further forward from the tip of the attachment region, wherein the attachment region is below the support so that the width direction of the attachment region is in the vertical direction A plurality of probes arranged in parallel with each other facing each other,
A slit bar that is disposed on the distal end side of the support and extends in the arrangement direction of the probes, and includes a slit bar that includes a plurality of slits that open downward at intervals in the longitudinal direction of the slit bar;
Each probe has an insulating film formed on one surface thereof so as to cover a part of the surface.
Each of the plurality of probes is disposed between a plurality of first probes in which a part of the needle tip region is received in the slit and the first probes adjacent in the longitudinal direction of the slit bar. A probe assembly comprising a second probe.   2. The probe assembly according to claim 1, wherein each slit extends in a longitudinal direction of the probe and opens to one or the other side in the longitudinal direction of the probe.   The needlepoint region of each first probe is an arm portion that extends further forward from the tip of the attachment region, and includes an arm portion that is partially received by the slit. The probe assembly according to claim 1.   The needle tip region of each first probe includes an arm portion that extends further forward from the tip of the attachment region, and a protrusion that protrudes upward from the arm portion and is received in the slit. 3. The probe assembly according to claim 1.   The probe assembly according to claim 4, wherein the protrusions of the first probes adjacent to each other in the longitudinal direction of the slit bar are provided at different positions in the longitudinal direction of the first probe.   The probe assembly according to claim 5, wherein slits adjacent in the longitudinal direction of the slit bar are provided at different positions in the longitudinal direction of the first probe.   The probe assembly according to any one of claims 1 to 6, wherein a plurality of second probes are respectively disposed between the first probes adjacent to each other in the longitudinal direction of the slit bar.   The height position of the portion received in the slit in the needle tip region of each first probe is higher than the height position of the corresponding portion of the needle tip region of the second probe. 8. The probe assembly according to any one of 1 to 7.   Further, a pair of support bars extending through a portion spaced in the longitudinal direction of the attachment region of the first and second probes in the thickness direction of the portion, and an end portion of the support bar in the longitudinal direction The probe assembly according to any one of claims 1 to 8, comprising a pair of plate-shaped side covers to be received, and a pair of side covers removably assembled to a side portion of the support body. Furthermore, the second slit bar is disposed on the rear end side of the support and extends in the arrangement direction of the probes, and extends in the longitudinal direction of the probe with an interval in the longitudinal direction of the second slit bar. Including a second slit bar having a plurality of second slits opened downward,
Each probe further includes a needle tip region extending further rearward from the rear end of the attachment region,
Either one of each of the first probes and each of the second probes receives a part of the needle tip region extending rearward in the second slit from below. The probe assembly according to Item.   The probe assembly according to claim 10, wherein each second slit receives a part of the needle tip region extending backward from the first probe from below.   The height position of the portion of the first probe extending rearward of each first probe that is received by the second slit is the height of the corresponding portion of the second tip extending region of the second probe. The probe assembly of claim 11, wherein the probe assembly is higher than a height position.   The probe assembly according to any one of claims 10 to 12, wherein each of both needle tip regions of each probe further includes a needle tip protruding downward or upward from a tip end portion or a rear end portion thereof. A support;
A plurality of probes comprising a belt-like attachment region and a needle tip region extending further forward from the tip of the attachment region, wherein the attachment region is below the support so that the width direction of the attachment region is in the vertical direction A plurality of probes arranged in parallel with each other facing each other,
A slit bar that is disposed on the distal end side of the support and extends in the arrangement direction of the probes, and includes a slit bar that includes a plurality of slits that open downward at intervals in the longitudinal direction of the slit bar;
The plurality of slits include a first slit located on one side of the slit bar in the front-rear direction and a second slit located on the other side,
Each probe has an insulating film formed on one surface thereof so as to cover a part of the surface.
Each of the plurality of probes is between a plurality of first probes in which a part of the needle tip region is received in the first slit and the first probes adjacent in the longitudinal direction of the slit bar. And a plurality of second probes, each disposed with a portion of the needle tip region received in the second slit.

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