KR100610889B1 - Probe unit for a flat display panel having fine pitch-pattern - Google Patents

Abstract

The present invention relates to a probe device for inspecting a flat panel display panel, and includes a pair of slit bars (16, 18) (20, 22) at the front and rear ends of the probe block (12), respectively. 18) (20, 22) has a plurality of slits 16a, 18a (20a, 22a) disposed at regular intervals, respectively, wherein the slits 16a, 20a of the first slit bars 16, 20 are second The probe blades 24 and 26 are arranged one by one between the intervals of the slits 18a and 22a of the slit bars 18 and 22 so that each slit of the front and rear slit bars 18 and 22 and 16 and 20 facing each other is provided. A first probe blade 24 fitted and supported in the slit 16a, 18a of the front slit bars 16, 18 disposed in the longitudinal direction and the rear slit bars 20, 22 disposed in the longitudinal direction. The second probe blades 26 supported by the slits 20 and 22 of the slits 20 are spaced apart without interference from each other in the longitudinal direction and spaced apart without interference from each other in the vertical direction, thereby causing an error of the inspector having an ultra fine pitch. Inspect without.

Flat Panel Display, Probe Unit, Fine Pitch, Double Slit

Description

Probe unit for inspection of flat display devices with fine pitch {Probe unit for a flat display panel having fine pitch-pattern}

1 is a partial perspective bottom perspective view of a probe unit according to the present invention;

2 is a longitudinal sectional view of a probe unit according to the present invention;

3 is an installation side view of the probe blade of the probe unit according to the present invention;

4 is a partially enlarged plan view of a probe blade of a probe unit according to the present invention.

※ Explanation of code about main part of drawing ※

10: probe unit 12 according to the present invention: probe block

16: First Slit Bar 18: Second Front Slit Bar

20: First Rear Slit Bar 22: Second Rear Slit Bar

24: first probe blade 26: second probe blade

24a: body 24b: first front probe

24c: first rear probe 26a: body

26b: second front probe unit 26c: second rear probe unit

30: TAB P: subject

Japanese Patent Publication 2004-191064

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a probe device used for conducting tests of flat panel display panels, and in particular, a liquid crystal display device (hereinafter referred to simply as "LCD") and a plasma display panel (hereinafter referred to as "PDP"). The present invention relates to a probe unit used for energizing a flat panel display panel (hereinafter referred to simply as "FPD").

Probe devices such as probe units are now widely used to check the energization state of wires provided in flat panel-like objects such as integrated circuits and liquid crystal display panels. Recently, as electronic products are gradually miniaturized, the size of the liquid crystal panel is also miniaturized, and accordingly, the pitch of the probe member of the probe unit for inspecting the small liquid crystal panel is also miniaturized.

As a probe device used for conducting tests of such a flat panel display panel, it is disclosed and disclosed by Korean Patent Laid-Open No. 2000-74037 and Japanese Laid-Open Patent No. 2004-191064.

However, the conventional probe unit has a structure in which a probe blade made of a thin conductive material is inserted into each of a plurality of slits of the slit bar provided before and after the probe block. Therefore, in order to meet the wiring inspection of the inspection object formed at a very fine pitch, the slit width and the spacing of the slit bar should be formed very finely.

However, if the slit bar has a small slit width and spacing, the walls between adjacent slits become thin and fragile, so that there is a limit in minimizing the slit gap. In addition, if the slit width and spacing of the slit bar are processed very fine according to the pattern spacing of the subject, the thickness of the walls between adjacent slits becomes very vulnerable, so that even the small impact applied to the slit bar during assembly or use is damaged and The pitch interval of the assembled probe blade is not accurate, and as a result, there is a problem that a measurement error occurs because the wiring of the test object cannot be contacted accurately.

Accordingly, an object of the present invention is to provide a probe unit capable of probing an inspected object having an ultra fine pitch in order to solve the problems of the conventional probe unit.

Probe unit of the present invention for achieving the above object is a probe block detachably coupled to the connecting block of the probe device, a plurality of slits installed in the width direction at the front end of the probe block having a constant width in the horizontal direction A front slit bar provided at regular intervals along the rear slit bar, which is installed in the width direction at the rear end of the probe block, and has a plurality of slits corresponding to the slits of the front slit bar, The front and rear ends are inserted and supported by each corresponding pair of slits of the front slit bar and the rear slit bar, each of which is a front probe part contacting the wiring of the subject under test and a rear probe contacting each wire of the TAB at the rear end. A plurality of probe blades having a portion,

The rear slit bar may include a first rear slit bar provided at a rear end of the probe block and having a plurality of slits formed at regular intervals along a width direction of the probe block, and the first rear slit bar at the rear end of the probe block. A second rear slit bar having a plurality of slits arranged side by side behind the rear slit bar and arranged one by one between the slits of the first rear slit bar,

The probe blade is composed of a plurality of first probe blades and a plurality of second probe blades,

The first probe blade protrudes downward from the body so as to face the wiring of the test object disposed below the body and is inserted into and supported by the slit of the first front slit bar, and the first probe blade disposed below the body. And a first rear probe portion projecting downward so as to contact the wiring of the TAB from above and being fitted into and supported by the slit of the first rear slit bar.

The second probe blade is disposed with a predetermined interval in the width direction with the first probe blade, the body is a predetermined interval above the body of the first probe blade so as not to overlap in the width direction with the body of the first probe blade. And a protruding downwardly toward the wiring of the inspected object disposed below the body, spaced apart from the first front probe part by a predetermined distance in the longitudinal direction, and inserted into and supported by the slit of the second front slit bar. 2 protruding downward from the body so as to contact the front probe portion and the wiring of the TAB disposed below the body from above, and spaces a predetermined distance in the longitudinal direction from the first rear probe portion of the second rear slit bar. And a second rear probe portion inserted into and supported by the slit.

As described above, the probe unit of the present invention arranges two adjacent probe blades spaced apart in the vertical direction so as not to interfere with each other and arranges a plurality of slits formed in the front slit bar between the slits of the rear slit bar. By alternately installing different probe blades in these slits, probe blades can be arranged at a finer pitch interval than in the prior art of arranging probe blades into a plurality of slits formed in one slit bar. The thickness of the partition wall between the slits formed in the groove is relatively increased, thereby improving the strength.

In addition, the probe unit of the present invention forms a fixing groove in the front and rear probe portions of the first probe blade, and the fixing groove corresponding to the fixing groove is formed in the front and rear probe portions of the second probe blade so that the fixing groove and the fixing protrusion are formed. By assembling and engaging with each other, the probe can be fixed so as not to be deformed when it is in contact with the object under test.

The probe block is composed of a block body and a cover plate which is fastened to the bottom surface of the block body to securely fix the TAB disposed between the block bodies, and the inner surface of the cover plate includes a tip of the TAB and a rear probe portion of the probe blade. The pressing plate is elastically deformed by the pressure adjusting screw to contact each other.

One end of the pressure plate is fixed to the inner surface of the cover plate by a fastening screw, and the front end is elastically deformed according to the insertion depth of the pressure adjusting screw penetrating the cover plate to push the TAB toward the rear probe portion of the probe blade. In addition, the pressure adjustment screw is fixed in position by a stop screw inserted from the side of the cover plate.

And by placing the TAB on the bottom surface of the block body of the probe block and the cover plate is stacked below the TAB and the side cover is fastened to both sides of the block body and the cover plate, respectively, the block body and the cover plate are assembled firmly without flow In addition, the front end wiring of the TAB and the rear probe portion of the probe blade come into close contact with each other.

Hereinafter, a preferred embodiment of the probe unit according to the present invention will be described in detail with reference to the drawings.

1 is a bottom perspective view showing an embodiment of a probe unit according to the present invention, Figure 2 is a longitudinal cross-sectional view of Figure 1, Figure 3 is an enlarged cross-sectional view showing a coupling structure of the probe blade and the slit bar, 4 is a partially enlarged plan view partially showing an enlarged front end of the probe unit shown in FIG. 1.

As shown in FIG. 1, the probe unit 10 according to the present invention includes a probe block 12 detachably coupled to a connection block (not shown) of a probe device (not shown).

2 to 4, the longitudinal front end of the probe block 12 is made of a non-conductor such as ceramic, and includes a first front slit bar 16 and a second front slit bar 18. Two front slit bars consisting of) are provided in the width direction.

The first front slit bar 16 and the second front slit bar 18 include a plurality of slits 16a and 18a formed at predetermined intervals in the longitudinal direction, respectively, in FIG. 3. The rear end of the probe block 12 is provided with two rear slit bars consisting of a first rear slit bar 20 and a second rear slit bar 22 in the width direction, and these first rear slit bars 20 ) And the second rear slit bar 22 are provided with a plurality of slits 20a and 22a corresponding to the slits 16a and 18a of the front slit bars 16 and 18, respectively.

As shown in FIG. 2, the probe unit 10 of the present invention contacts the front probe portions 24b and 26b at the front end and the front end portions 24b and 26b at the front end and the wirings of the TAB 30 at the rear end. And a plurality of probe blades 24 and 26 having rear probe portions 24c and 26c. As shown in FIGS. 1 and 4, the probe blades 24 and 26 may include a plurality of first probe blades 24 arranged at regular intervals P1 along the width direction, and the first probe blades 24. The second probe blades 26 and 26 are arranged at regular intervals P2, and the first probe blades 24 and the second probe blades 26 alternately in the width direction of the probe block 12. It is arranged and disposed at a constant interval D as a whole and is supported by the front and rear slit bars 16 and 18 and 20 and 22, respectively.

The first probe blade 24 is supported at both ends by a pair of slits 16a and 20a corresponding to the first front slit bar 16 and the first rear slit bar 20, respectively. The first probe blade 24 protrudes downward from the body 24a so as to face the wiring of the test object P disposed below the body 24a, so that the first probe blade 24 is disposed on the slit 16a of the first front slit bar 16. The first rear slit bar 20 protrudes downward from the body 24a so as to contact the first front probe portion 24b, which is fitted and supported, and the wiring of the TAB 30 disposed below the body 24a, from above. And a first rear probe portion 24c fitted to and supported by the slit 20a.

In addition, the first probe blade 24 has a fixing groove 24d formed in the first front probe part 24b and is fitted into and supported by the fixing protrusion 16b provided in the first front slit bar 16. Fixing grooves 24e are also formed in the rear probe part 24c to be firmly supported by being fitted into the fixing protrusions 20b provided in the first rear slit bar 20.

As shown in FIG. 4, the second probe blade 26 is disposed at a predetermined distance D from the first probe blade 24 in the width direction thereof, and the body 26a is the first probe blade. It is disposed at a predetermined interval above the body 24a of the first probe blade 24 so as not to overlap the body 24a of the 24 in the width direction.

In addition, as shown in FIG. 3, the second probe blade 26 protrudes downward from the body 26a to be fitted to and supported by the slit 18a of the second front slit bar 18. 2nd front probe part 26b arrange | positioned outward longitudinally by the predetermined distance L from the front-end | tip of the 1st front probe part 24b of 1 probe blade 24, and TAB arrange | positioned under the body 26a. Slit of the second rear slit bar 22 protrudes downward so as to contact the wiring of the upper side 30 and protrudes outward by a predetermined distance L from the front end of the first rear probe portion 24c. And a second rear probe portion 26c fitted to and supported by 22a).

The second probe blade 26 has a fixing protrusion 26d formed on the second front probe portion 26b and is fitted into and supported by a fixing groove 18b provided in the second front slit bar 18, and is supported by the second rear blade 26. A fixing groove 26e is formed in the probe portion 26c to be firmly supported by being fitted to the fixing protrusion 22b provided in the second rear slit bar 22.

Accordingly, the interval between the slits 16a and 20a formed in the first front slit bar 16 and the first rear slit bar 20 corresponding thereto is 'P1', and the second front slit bar 18 and the corresponding front slit bar 18 are corresponding thereto. The slits 18a and 22a respectively formed on the second rear slit bar 22 have a spacing of 'P2', but each slit of these second front slit bar 18 and the second rear slit bar 22 ( 18a and 22a are disposed one by one between the interval P1 of the first front slit bar 16 and the slits 16a and 20a of the first rear slit bar 20, so that the pitch of the probe blade of the probe unit of the present invention is The spacing D can be narrowed to about half of the slit spacing of each slit bar, so that ultra fine pitch can be realized, and at the same time, the thickness of the partition wall between the slits of each slit bar is the partition wall between the slits formed in one slit bar. It can be increased by about twice the thickness and the strength is improved.

On the other hand, the probe block 12, as shown in Figure 2, the block body 13 is fixed to the connection block (not shown) by a fixed screw, and the TAB 30 is crimped on the bottom surface of the block body 13 The cover plate 14 is fastened to the block body 13 to be fixed. On the inner surface of the cover plate 14, the tip of the TAB 30 is elastically pressed to contact the rear probes 24c and 26c of the probe blades 24 and 26, as indicated by the dotted lines in FIG. The key is attached to the pressing plate 32.

The pressure plate 32 is fixed to the inner surface of the cover plate 14 with the rear end fastening screw 34, the front end is elastic in accordance with the insertion depth of the pressure adjusting screw 36 penetrating the cover plate (14). The TAB 30 is pushed toward the rear probe portions 24c and 26c of the probe blades 24 and 26. The pressure adjusting screw 36 is fixed by the stop screw 38 is inserted from the side of the cover plate 14.

Then, the TAB 30 is disposed on the bottom surface of the block body 13 of the probe block 12 and the cover plate 14 is piled up thereunder, and then both sides of the block body 13 and the cover plate 14 are placed. 1, the block body 13 and the cover plate 14 are firmly assembled to each other without flow by fastening the side cover 40 as shown in FIG. 1 with the fastening screw 41, respectively, to the front end of the TAB 30. And the rear probe portions 24c and 26c of the probe blades 24 and 26 are in close contact.

As described above, the probe unit of the present invention comprises a slit bar that maintains a plurality of probe blades at a constant pitch, each consisting of two slit bars in front and rear, and the probe blades are alternately inserted into slits formed on the two slit bars, respectively. The ultrafine pitch inspection can be performed by arranging the plungers and arranging the probe blades spaced apart from each other in the vertical direction and the front and rear directions so as not to overlap each other.

In addition, the probe unit of the present invention has a slit formed in one slit bar because the slit spacing of the slit bars for determining the pitch of the probe blade is formed by the slits of two slit bars arranged one pair in front and rear of the probe block. The partition thickness between them is relatively increased, so that the strength is improved.

In addition, the probe unit of the present invention forms a fixing groove or a fixing protrusion at the front and rear probe portions of the probe blade, and a fixing protrusion or fixing groove is formed in the slit bar supporting each of the probe blades by engaging the fixing groove or the fixing protrusion. Thus, the fixing groove and the fixing protrusion are firmly assembled with each other so that the probe may be fixed so as not to be dislocated or deformed when the probe part contacts the object to be measured.

Claims (4)

A probe block detachably coupled to the connection block of the probe device, a front slit bar installed at a front end of the probe block in a width direction and provided with a plurality of slits having a predetermined width at regular intervals along a horizontal direction; A rear slit bar provided at a rear end of the probe block in a width direction and having a predetermined width and having a plurality of slits corresponding to the slits of the front slit bar, and a corresponding pair of the front slit bar and the rear slit bar; Ultra-fine pitch including both front and rear ends inserted into each slit, each of which includes a plurality of probe blades having a front probe portion in front of the front end and a rear probe portion in contact with each wire of the TAB at the rear end. In the flat display panel inspection probe unit having a, The front slit bar 16 is provided at the front end of the probe block 12 and includes a first front slit bar 16 having a plurality of slits 16a formed at regular intervals along the width direction of the probe block 12. ) And a plurality of slits arranged side by side in front of the first front slit bar 16 at the front end of the probe block 12 and disposed one by one between the slits 16a of the first front slit bar 16. 2nd front slit bar 18 provided with the slit 18a, The rear slit bar 20 may include a first rear slit bar 20 provided at a rear end of the probe block 12 and having a plurality of slits 20a formed at regular intervals along the width direction of the probe block 12. ) And a plurality of ones disposed side by side behind the first rear slit bar 20 at the rear end of the probe block 12 and disposed one by one between the slits 20a of the first rear slit bar 20. A second rear slit bar 22 having a slit 22a, The probe blade is composed of a plurality of first probe blades 24 and a plurality of second probe blades 26, The first probe blade 24 protrudes downward from the body 24a so as to face the wiring of the test object P disposed below the body 24a, and thus the slit 16a of the first front slit bar 16. A slit of the first rear slit bar 20 that protrudes downward to contact the first front probe portion 24b inserted into and supported by the first front probe portion 24b and the wiring of the TAB 30 disposed below the body 26a from above. A first rear probe portion 24c fitted to and supported by 20a), The second probe blade 26 is disposed with a predetermined distance D in the width direction from the first probe blade 24, and the body 26a is the body 24a of the first probe blade 24. Is disposed at a predetermined interval above the body 24a of the first probe blade 24 so as not to overlap in the width direction, and downwardly protrudes toward the wiring of the test object P disposed below the body 26a. And a second front probe part 26b spaced apart from the first front probe part 24b by a predetermined distance L in the longitudinal direction and inserted into and supported by the slit 18a of the second front slit bar 18. Protruding downward from the body 26a to contact the wiring of the TAB 30 disposed below the body 26a from the upper side by a predetermined distance L in the longitudinal direction with the first rear probe portion 24c. And a second rear probe portion 26c, which is inserted into and supported by the slit 22a of the second rear slit bar 22 at a distance. Probe unit for inspection of flat panel with fine pitch. According to claim 1, wherein each of the front and rear probes of the first probe blades 24 and the second probe blades 26 is provided with a fixing groove or a fixing projection, the first probe blades 24 and the second probe blades The front and rear slit bars (16, 18) (20, 22) supporting the (26) is provided with a fixing protrusion or fixing groove which is engaged with the fixing groove and the fixing protrusion of the probe blades (24, 26). Probe unit for inspecting flat panel display panel having an ultra-fine pitch, characterized in that. The method according to claim 1 or 2, wherein the probe block 12 is fastened to the block body 13 and the block body 13 to squeeze and fix the TAB (30) on the bottom of the block body (13) The cover plate 14 is configured to elastically press the tip of the TAB 30 to the inner surface of the cover plate 14 to contact the rear probes 24c and 26c of the probe blades 24 and 26. The pressure plate 32 is attached, The pressing plate 32 is fixed to the rear end on the inner surface of the cover plate 14, the front end is elastically deformed according to the insertion depth of the pressure adjusting screw 36 penetrating the cover plate 14 TAB (30) A probe unit for inspecting a flat panel display panel having an ultra fine pitch, which is pushed toward the rear probe parts 24c and 26c of the probe blades 24 and 26. The method of claim 3, wherein the block body 13 and the cover plate 14 of the probe block 12 is fixed to each other by the side cover 40 which is fastened with fastening screws 41 respectively on both sides. Probe unit for inspecting flat panel panels having an ultra fine pitch.

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