KR200396580Y1 - Probe unit for inspection of flat display devices - Google Patents
Probe unit for inspection of flat display devices Download PDFInfo
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- KR200396580Y1 KR200396580Y1 KR20-2005-0017834U KR20050017834U KR200396580Y1 KR 200396580 Y1 KR200396580 Y1 KR 200396580Y1 KR 20050017834 U KR20050017834 U KR 20050017834U KR 200396580 Y1 KR200396580 Y1 KR 200396580Y1
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- probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
본 고안은 PDP패널과 같은 평판형 피검사체의 검사용 프로브유니트에 관한 것으로, 특히 프로브블록(18)의 폭방향을 따라 소정간격으로 배열된 복수개의 탐침(20)을 구비하고, 탐침(20)은 길이가 동일하고 상하 설치높이와 전방 돌출길이가 서로 다르게 배열한 적어도 4개의 탐침이 1조를 이루는 탐침군을 프로브블록의 폭방향을 따라 평행하게 복수조로 배치되며, 이들 탐침(20)은 전후방 선단을 제외한 몸체부분을 덮어주도록 충전되어 경화된 에폭시계 수지로 고정된다. The present invention relates to a probe unit for inspecting a flat object such as a PDP panel, in particular, having a plurality of probes 20 arranged at predetermined intervals along the width direction of the probe block 18, the probe 20 Is arranged in a plurality of pairs of probes having the same length and having at least four probes having one set of different heights and vertical protrusion heights arranged differently in parallel along the width direction of the probe block. It is filled to cover the body except the tip and fixed with hardened epoxy resin.
Description
본 고안은 PDP패널과 같은 평판형 피검사체의 전기적 특성을 검사하는데 사용도는 프로브유니트에 관한 것으로, 침형 탐침부재를 사용하는 프로브유니트에 관한 것이다. The present invention relates to a probe unit for use in inspecting the electrical characteristics of a flat specimen such as a PDP panel, and to a probe unit using an acicular probe member.
프로브유니트는 집적회로(IC), 액정 디스플레이패널 등의 피검사체의 전기적 특성 검사에 사용된다. 이러한 프로브유니트는 일반적으로 전기절연재료의 기판과, 피검사체의 피검사부에 대응하여 기판에 서로 일정한 간격을 가지고 배치된 도전성을 가진 복수의 탐침부재를 가지고 있다. The probe unit is used to inspect the electrical characteristics of an object under test such as an integrated circuit (IC) and a liquid crystal display panel. Such a probe unit generally has a substrate of an electrically insulating material and a plurality of probe members having conductivity arranged at regular intervals on the substrate in correspondence with the inspection target of the inspected object.
상기 종래의 프로브유니트는 도 1에 도시된 바와 같이, 프로브블록(116)과, 프로브블록(116)을 지지하는 지지블록(118)과, 지지블록(118)을 연결하는 연결블록(120)과, TCP(Tape Carrier Package)블록(122)과, 연결블록이 설치되는 평판형 프로브베이스(124)를 포함하고, 프로브블록(116)은 도전성 재료로 제작된 복수개의 탐침블레이드(126)를, 프로브홀더(128)의 하면에 전후방향으로 간격을 유지하여 조립된 1쌍의 슬리트바아(130)에 소정의 간격을 두고 전후방향으로 연장된 상태로 배치하고, 이와 같이 배열된 복수개의 탐침블레이드(126)에 전후방향으로 간격을 둔 한쌍의 가이드바아(132)를 관통시켜 양 가이드바아(132)를 1쌍의 사이드커버(143)로 프로브홀더(128)에 조립한 구조로 되어 있다. As shown in FIG. 1, the conventional probe unit includes a probe block 116, a support block 118 supporting the probe block 116, and a connection block 120 connecting the support block 118. And a tape carrier package (TCP) block 122 and a flat probe base 124 on which a connection block is installed, and the probe block 116 includes a plurality of probe blades 126 made of a conductive material. A plurality of probe blades arranged in such a manner as to extend in the front-rear direction at a predetermined interval on a pair of slits bars 130 assembled by maintaining a distance in the front-rear direction on the lower surface of the holder 128 ( The guide bar 132 is assembled to the probe holder 128 by a pair of side covers 143 through a pair of guide bars 132 spaced in the front and rear directions 126.
그런데 상기 종래의 탐침블레이드(126)가 마모 또는 파손이 되었을 경우에 파손된 탐침블레이드만 교체할 수 있는 구조로 되어 있지만 실제로 프로브홀더(128)에서 분리하여 새로운 탐침블레이드(126)으로 교체하는데에는 상당한 시간과 기술이 요구되어 오히려 원가를 상승시키는 단점이 있다. However, when the conventional probe blade 126 is worn or damaged, only the damaged probe blade can be replaced. However, the probe blade 128 is actually separated from the probe holder 128 and replaced with a new probe blade 126. It takes time and skill, which leads to a cost increase.
뿐만아니라 피측정대상의 전극 간격이 점차 미세화됨에 따라 이를 검사하는 프로브유니트의 탐침블레이드 배치간격도 미세화되어야 하는데, 종래 탐침부재는 일정한 두께나 직경을 가지므로 평행하게 배열하였을 경우 두께나 직경에 의해 피치(간격)을 미세하게 하는데에는 한계가 있었다. In addition, the spacing of the probe blades of the probe unit for inspecting them should be miniaturized as the electrode spacing of the object to be measured gradually becomes finer. However, since the conventional probe members have a predetermined thickness or diameter, the pitch is determined by thickness or diameter when arranged in parallel. There was a limit to making the (interval) fine.
이에 본 고안은 상기 종래 블레이트형 탐침부재를 사용하는 프로브유니트에 비하여 제조원가가 저렴하고 탐침간격을 미세하게하여 극미세의 전극을 구비한 피검사체 검사에 적합한 프로브유니트를 제공함에 목적이 있다. Accordingly, an object of the present invention is to provide a probe unit suitable for inspecting an object having an ultra-fine electrode by inexpensive manufacturing cost and having a fine probe interval as compared to a probe unit using the conventional blade type probe member.
또한 본 고안은 탐침조립을 간편하게 하여 불량률을 감소시키고 나아가 제조원가를 절감할 수 있는 프로브유니트를 제공함에 또 다른 목적이 있다. In addition, the present invention has another object to provide a probe unit that can simplify the probe assembly to reduce the defect rate and further reduce the manufacturing cost.
상기 목적을 달성하기 위한 본 고안의 프로브유니트는 매니퓰레이터의 저면에 부착설치되는 프로브블록과, 상기 프로브블록의 폭방향을 따라 일정한 간격으로 배치되는 복수개의 탐침과, 상기 복수개의 탐침들을 일정한 간격으로 유지시킨 상태로 프로브블록에 고정해주는 탐침고정수단을 포함하고, 상기 탐침은 길이가 동일하고 상하 설치높이와 전방 돌출길이가 서로 다르게 배열한 적어도 4개의 탐침이 1조를 이루는 탐침군이 프로브블록의 폭방향을 따라 평행하게 복수조로 배치된 것이다. Probe unit of the present invention for achieving the above object is a probe block attached to the bottom surface of the manipulator, a plurality of probes arranged at regular intervals along the width direction of the probe block, and maintaining the plurality of probes at regular intervals It includes a probe fixing means for fixing to the probe block in the state, wherein the probe is the same length, the probe group is a probe group consisting of a pair of at least four probes arranged differently in the upper and lower installation height and the front protrusion length is the width of the probe block It is arranged in plurality in parallel along the direction.
또한 상기 탐침은 전방선단이 상기 프로브블록의 길이방향을 따라 최전방으로 돌출되고 상하방향으로는 최대 설치높이에 배치되는 제1탐침과, 상기 제1탐침과 폭방향으로 일정한 간격을 두고 평행하게 배치되되 상하방향의 설치높이가 제1탐침보다 상대적으로 낮게 배치되며 제1탐침에 비하여 전방돌출길이가 상대적으로 짧은 제2탐침과, 상기 제2탐침과 폭방향으로 일정한 간격을 두고 평행하게 배치되되 상하방향의 설치높이가 제2탐침보다는 높고 제1탐침보다는 낮게 배치되며 전방 돌출길이는 상기 제1탐침보다는 짧으나 제2탐침보다는 길도록 배치된 제3탐침과, 상기 제3탐침과 폭방향으로 일정한 간격을 두고 평행하게 배치되되 상하방향의 설치높이가 제2탐침보다 낮게 낮게 배치되며 전방 돌출길이는 제2탐침보다 상대적으로 짧은 제4탐침이 1조를 이루는 탐침군이 반복하여 복수조로 배열된다. In addition, the probe is disposed in parallel with the front end protrudes in the front direction along the longitudinal direction of the probe block and is disposed at the maximum installation height in the vertical direction at regular intervals in the width direction with the first probe. The installation height of the up-down direction is arranged to be relatively lower than the first probe, and the second probe having a relatively shorter forward protrusion length than the first probe, and parallel to the second probe at regular intervals in the width direction, The installation height of the second probe is higher than the second probe and is arranged lower than the first probe and the front protrusion length is shorter than the first probe, but longer than the second probe and the third probe arranged to be a constant distance in the width direction with the third probe Are arranged in parallel, but the installation height in the vertical direction is lower than the second probe, and the fourth protruding length is relatively shorter than that of the second probe. The probe is a group forming repeatedly arranged plurality twos.
그리고 상기 탐침은 50㎛ 내지 60㎛의 간격으로 437개 내지 772개가 배치되고, 상기 탐침을 고정하는 고정수단은 에폭시계 수지로 이루어진다. And the probe is disposed 437 to 772 at intervals of 50㎛ 60㎛, the fixing means for fixing the probe is made of epoxy resin.
상기한 바와 같이 구성된 본 고안의 프로브유니트에 의하면 탐침이 미세한 간격으로 배열되면서 에폭시계 수지로 견고히 고정되므로 탐침의 간격을 흔들림없이 균일하게 유지할 수 있고, 나아가 점차 미세화해지는 피검사체의 배선간격에 대응하여 정밀하고 정확한 검사를 할 수 있게 된다. According to the probe unit of the present invention configured as described above, since the probes are firmly fixed with an epoxy resin while being arranged at minute intervals, the probe intervals can be maintained uniformly without shaking, and furthermore, in response to the wiring intervals of the test subjects gradually becoming finer. Precise and accurate inspections are possible.
또한 본 고안의 프로브유니트는 가는 탐침을 에폭시계 수지로 고정하므로 탐침을 미세한 간격으로 견고히 고정할 수 있고 조립이 간편하므로 조립생산성을 향상시킬 수 있다. In addition, since the probe unit of the present invention is fixed to the thin probe with an epoxy-based resin, it is possible to firmly fix the probe at a fine interval and easy assembly, thereby improving assembly productivity.
이하, 본 고안에 따른 프로브유니트의 실시예를 첨부도면에 따라 상세히 설명한다. Hereinafter, an embodiment of the probe unit according to the present invention will be described in detail according to the accompanying drawings.
도 2는 프로브장치의 조립단면도이다. 도 2에 도시된 바와 같이, 프로브장치(10)는 매니퓰레이터(12)와, 매니퓰레이터(12)를 상하방향으로 위치이동가능하게 지지하는 지지블록(14)과, 상기 매니퓰레이터(12)의 앞쪽 선단 저면에 탈착가능하게 설치되고 복수개의 탐침(20)이 구비된 프로브유니트(16)를 포함한다. 2 is an assembled cross-sectional view of the probe device. As shown in FIG. 2, the probe device 10 includes a manipulator 12, a support block 14 supporting the manipulator 12 so as to be movable in a vertical direction, and a bottom surface of the front end of the manipulator 12. The probe unit 16 is detachably installed in the probe unit 16 and includes a plurality of probes 20.
상기 탐침(20)의 후방선단은 탭IC(TAB IC)를 구비한 FPC 시트(13)와 접속되고, 상기 FPC시트(13)는 연결시트(15)를 통하여 PCB(17)에 접속된다. The rear end of the probe 20 is connected to the FPC sheet 13 having a tab IC (TAB IC), and the FPC sheet 13 is connected to the PCB 17 through the connection sheet 15.
상기 프로브유니트(16)는 도 3에 도시된 바와 같이 프로브블록(18)과, 상기 프로브블록(18)의 폭방향을 따라 소정간격으로 배열된 복수개의 탐침(20)과, 상기 복수개의 탐침(20)을 프로브블록(18)에 고정하는 탐침고정수단(30)으로 에폭시계 수지층을 포함한다. As shown in FIG. 3, the probe unit 16 includes a probe block 18, a plurality of probes 20 arranged at predetermined intervals along a width direction of the probe block 18, and the plurality of probes ( Probe fixing means 30 for fixing 20 to the probe block 18 includes an epoxy resin layer.
상기 탐침(20)은 도 4 및 도 5에 도시된 바와 같이, 상기 탐침(20)은 전방선단이 상기 프로브블록(18)의 길이방향을 따라 최전방으로 돌출길이(L1)만큼 돌출되고 상하방향으로는 최대 설치높이(h1)에 배치되는 제1탐침(21)과, 상기 제1탐침(21)과 폭방향으로 일정한 간격을 두고 평행하게 배치되되 상하방향의 설치높이(h2)가 제1탐침(21)보다 상대적으로 낮게 배치되며 제1탐침(21)에 비하여 전방돌출길이(L2)가 상대적으로 짧은 제2탐침(22)과, 상기 제2탐침(22)과 폭방향으로 일정한 간격을 두고 평행하게 배치되되 상하방향의 설치높이(h3)가 제2탐침(22)보다는 높고 제1탐침(21)보다는 낮게 배치되며 전방 돌출길이(L3)는 상기 제1탐침(21)보다는 짧으나 제2탐침(22)보다는 길도록 배치된 제3탐침(23)과, 상기 제3탐침(22)과 폭방향으로 일정한 간격을 두고 평행하게 배치되되 상하방향의 설치높이(h4)가 제2탐침(22)보다 낮게 낮게 배치되며 전방 돌출길이(L4)는 제2탐침(22)보다 상대적으로 짧은 제4탐침(24)이 1조를 이루는 탐침군이 반복하여 복수조로 배열된 구조로 이루어진다. As shown in FIGS. 4 and 5, the probe 20 has a front tip protruding forwardly by the protruding length L1 along the longitudinal direction of the probe block 18 and upward and downward. The first probe 21 disposed at the maximum installation height h1 and the first probe 21 are arranged in parallel with a predetermined interval in the width direction, and the installation height h2 in the vertical direction is determined by the first probe ( The second probe 22 is disposed relatively lower than the first probe 21 and has a shorter forward protrusion length L2 than the first probe 21, and is parallel to the second probe 22 at regular intervals in the width direction. The installation height (h3) of the up and down direction is higher than the second probe 22 and lower than the first probe 21, and the front protrusion length L3 is shorter than the first probe 21 but the second probe ( 22 and the third probe 23 arranged to be longer than the third probe 22, and the third probe 22 is disposed in parallel at regular intervals in the width direction. The installation height h4 in the vertical direction is lower than that of the second probe 22, and the front protrusion length L4 is a probe group in which a fourth probe 24, which is relatively shorter than the second probe 22, forms one pair. This repetition consists of a structure arranged in plurality.
그리고 상기 각 탐침(21,22,23,24)은 원형 단면을 가진 금속재 세선으로 만들어진다. 상기 각 탐침(21,22,23,24)은 몸체(21c,22c,23c,24c)의 전방 선단에서 하향 구부림되어 피측정대상의 전극과 접촉하는 전방 선단(21a,22a,23a,24a)과, 몸체(21c,22c,23c,24c)의 후방 선단에서 상향 구부림되어 TAB(도시생략)의 전극에 접촉되는 후방 선단(21b,22b,23b,24b)을 구비하며, 상기 탐침(21,22,23,24)의 전후방 선단(21a,21b)(22a,22b)(23a,23b)(24a,24b)은 각각 선단으로 갈수록 직경이 점차 감소하여 끝이 예리한 형상으로 이루어진다. Each of the probes 21, 22, 23, and 24 is made of a fine metal wire having a circular cross section. Each of the probes 21, 22, 23, and 24 is bent downward from the front ends of the bodies 21c, 22c, 23c, and 24c, and the front ends 21a, 22a, 23a, and 24a contacting the electrodes to be measured. And rear ends 21b, 22b, 23b, and 24b that are bent upward from the rear ends of the bodies 21c, 22c, 23c, and 24c to contact the electrodes of the TAB (not shown), and the probes 21, 22, The front and rear ends 21a and 21b and 22a and 22b and 23a and 23b and 24a and 24b of the 23 and 24, respectively, are gradually reduced in diameter toward the ends to have sharp ends.
이들 탐침(20)은 프로브블록(18)상에 50㎛ 내지 60㎛의 간격으로 437개 내지 772개가 배치되어 피측정대상의 미세한 전극간극에 대응한다. 그리고 정해진 간격으로 배치된 상태에서 에폭시계 수지를 충진하여 경화시킴으로써 프로브블록(18)에 고정되게 된다. These probes 20 are disposed on the probe block 18 at intervals of 50 μm to 60 μm, and 437 to 772 are corresponding to the minute electrode gaps to be measured. And it is fixed to the probe block 18 by filling and curing the epoxy resin in a state arranged at a predetermined interval.
상기한 바와 같이 본 고안의 프로브유니트는 인접하는 탐침의 돌출길이에 차이를 두도록 배열함으로써 피측정대상의 미세한 간극으로 배치된 피측정대상의 전극에 대응하여 정밀하게 검사할 수 있고, 이들 가는 탐침들이 에폭시계 수지로 견고히 고정되므로 탐침의 간격을 균일하게 유지할 수 있다. As described above, the probe units of the present invention can be precisely inspected corresponding to the electrodes of the object to be arranged with the minute gap of the object to be measured by arranging them so as to have a difference in the protruding lengths of adjacent probes. Since it is firmly fixed with epoxy-based resin, it is possible to maintain a uniform interval between the probes.
또한 본 고안의 프로브유니트는 가는 탐침을 에폭시계 수지로 고정하므로 조립이 간편하여 조립생산성을 향상시킬 수 있다. In addition, the probe unit of the present invention is fixed to the thin probe with an epoxy resin so that the assembly is easy to improve the assembly productivity.
도 1은 종래 프로브유니트의 결합단면도,1 is a cross-sectional view of a conventional probe unit coupling;
도 2는 본 고안에 따른 프로브유니트의 결합단면도, 2 is a cross-sectional view of the coupling of the probe unit according to the present invention,
도 3은 도 2의 "A"부에 대한 확대단면도,3 is an enlarged cross-sectional view of a portion “A” of FIG. 2;
도 4는 본 고안에 따른 탐침의 정면배치구조를 나타낸 도면,4 is a view showing a front layout structure of the probe according to the present invention,
도 5는 본 고안에 따른 탐침의 평면배치구조를 나타낸 도면이다. 5 is a view showing a planar arrangement of the probe according to the present invention.
※ 도면의 주요부분에 대한 부호의 설명※ Explanation of code for main part of drawing
10: 프로브장치 12: 매니퓰레이터10: probe device 12: manipulator
13: FPC 시트 14: 지지블록13: FPC seat 14: support block
15: 연결시트 16: 프로브유니트15: Connection sheet 16: Probe unit
17: PCB 18: 프로브블록17: PCB 18: Probe Block
20: 탐침 21: 제1탐침20: probe 21: first probe
22: 제2탐침 23: 제3탐침22: second probe 23: third probe
24: 제4탐침 30: 탐침고정수단24: fourth probe 30: probe fixing means
Claims (4)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20-2005-0017834U KR200396580Y1 (en) | 2005-06-21 | 2005-06-21 | Probe unit for inspection of flat display devices |
| TW094135042A TWI285269B (en) | 2005-06-21 | 2005-10-07 | Pin typed probe apparatus for inspecting FPD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20-2005-0017834U KR200396580Y1 (en) | 2005-06-21 | 2005-06-21 | Probe unit for inspection of flat display devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR200396580Y1 true KR200396580Y1 (en) | 2005-09-26 |
Family
ID=39456673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR20-2005-0017834U KR200396580Y1 (en) | 2005-06-21 | 2005-06-21 | Probe unit for inspection of flat display devices |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR200396580Y1 (en) |
| TW (1) | TWI285269B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007069818A1 (en) * | 2005-12-16 | 2007-06-21 | Nano Semitech Co., Ltd. | Detachable integrated probe block |
| KR101192102B1 (en) * | 2005-10-05 | 2012-10-17 | 엘지디스플레이 주식회사 | auto probe appratus and using the inspecting method for LCD panel using the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113848356B (en) * | 2021-10-25 | 2024-05-03 | 武汉精毅通电子技术有限公司 | Probe module and preparation method thereof |
-
2005
- 2005-06-21 KR KR20-2005-0017834U patent/KR200396580Y1/en not_active IP Right Cessation
- 2005-10-07 TW TW094135042A patent/TWI285269B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101192102B1 (en) * | 2005-10-05 | 2012-10-17 | 엘지디스플레이 주식회사 | auto probe appratus and using the inspecting method for LCD panel using the same |
| WO2007069818A1 (en) * | 2005-12-16 | 2007-06-21 | Nano Semitech Co., Ltd. | Detachable integrated probe block |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI285269B (en) | 2007-08-11 |
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