JP2012037362A - Probe unit and inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To maintain the contact accuracy high between each contactor of a film type probe and each electrode of an object to be inspected.SOLUTION: A probe unit is so constituted that: each contactor is provided at the tip of the film type probe; the film type probe is supported by a probe block in a state where the tip extends from the probe block with free flexibility; a pressure member has a pressure surface contacting with the tip of the film type probe and is swingably supported by the probe block in a state where the pressure surface faces the tip of the film type probe; and a gap is formed between the pressure surface of the pressure member and the tip of the film type probe.

Description

  The present invention relates to a probe unit and an inspection apparatus used for inspecting an object to be inspected such as a liquid crystal panel.

  In the manufacturing process of a liquid crystal panel or the like, a lighting inspection or the like is performed as an inspection of the liquid crystal panel or the like. In general, an inspection apparatus including a probe unit having a plurality of probes is used for this inspection. In this case, the inspection is performed by supplying an inspection signal to each electrode in a state where each probe of the probe unit is pressed against an electrode such as a liquid crystal panel.

  An example of the probe unit is a liquid crystal display panel inspection probe unit described in Patent Document 1. The probe unit for inspecting the liquid crystal display panel will be outlined with reference to FIGS.

  The probe mount 1 is attached to the apparatus main body side. A probe block 2 is attached to the probe mount 1. A film type probe 3 is attached to the distal end side (left side in FIG. 1) of the lower surface of the probe block 2. The film type probe 3 includes a film substrate 4, a contact 5, and an insulating rubber plate 6. A plurality of contacts 5 are provided at equal intervals on the lower surface of the film substrate 4. The insulating rubber plate 6 is provided on the upper side surface of the film substrate 4. The film type probe 3 is fixed to the tip side of the lower surface of the probe block 2.

  Thereby, the contact 5 of the film type probe 3 is brought into contact with each electrode of the liquid crystal display panel 7 and is pressed by the probe block 2 via the insulating rubber plate 6 to be electrically connected.

Korean Patent Publication No. 10-2006-0108426

  However, in the conventional probe unit for inspecting a liquid crystal display panel, each contact 5 of the film type probe 3 contacts each electrode of the liquid crystal display panel 7, but the flatness of the electrode surface of the liquid crystal display panel 7 is not good. It becomes difficult to contact with high accuracy.

  The liquid crystal display panel 7 is a flat plate material as a whole, but there is a portion where the flat surface is partially undulated. Even in this case, since each contactor 5 is accurately supported by the probe block 2, it may not be absorbed by the insulating rubber plate 6 depending on the degree of swell. If the liquid crystal display panel 7 has a swell that cannot be absorbed by the insulating rubber plate 6, there is a problem that the contact accuracy between the contact 5 of the film type probe 3 and each electrode of the liquid crystal display panel 7 is lowered.

  The present invention has been made to solve the above-described problems, and provides a probe unit and an inspection apparatus capable of maintaining high contact accuracy between a contact of a film type probe and each electrode of an object to be inspected. The purpose is to do.

  In order to solve the above-mentioned problems, a probe unit according to the present invention comprises a film type probe having a plurality of contacts on the surface and having flexibility, and supports each of the contacts by supporting the film type probe. A probe block that is in electrical contact with each electrode of the inspection object, and the film type probe that is supported by the probe block and in which the contact of the film type probe is in contact with each electrode of the inspection object. A pressurizing member that pressurizes the film type probe with a suitable pressure, the tip of the film type probe is provided with the contacts, and the tip of the film type probe extends from the probe block and can be freely bent. Supported by the probe block, the pressure member has a pressure surface that contacts the tip of the film type probe. The pressure surface is supported by the probe block so as to be swingable with the pressure surface facing the tip of the film type probe, and a gap is formed between the pressure surface of the pressure member and the tip of the film type probe. It is characterized by having.

  Moreover, it is an inspection apparatus provided with the measurement part which supports and inspects to-be-inspected object, Comprising: It is characterized by using the probe unit mentioned above as a probe unit of the said measurement part.

  In the probe unit and the inspection apparatus, the contact accuracy between each contact of the film type probe and each electrode of the object to be inspected can be maintained high.

It is side surface sectional drawing which shows the conventional probe unit. It is a perspective view which shows the film type probe of the conventional probe unit. It is a perspective view which shows the measurement part of the test | inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the probe unit of the test | inspection apparatus which concerns on embodiment of this invention from the front side. It is a perspective view which shows from the probe unit back side of the test | inspection apparatus which concerns on embodiment of this invention. It is side surface sectional drawing which shows the probe assembly of the probe unit which concerns on embodiment of this invention. It is a front view which shows the probe assembly of the probe unit which concerns on embodiment of this invention. It is a front view which shows the state which the elastic body base of the pressurization member of the probe unit which concerns on embodiment of this invention rock | fluctuated right. It is a front view which shows the state which the elastic body base of the pressurization member of the probe unit which concerns on embodiment of this invention is not rock | fluctuating. It is a front view which shows the state which the elastic body base of the pressurization member of the probe unit which concerns on embodiment of this invention rock | fluctuated to the left. It is a principal part enlarged view which shows the pressurization member (part of the dotted circle X of FIG. 6) of the probe unit which concerns on embodiment of this invention. It is a top view which shows the film type probe of the probe unit which concerns on embodiment of this invention. It is AA arrow sectional drawing of FIG.

  Hereinafter, a probe unit and an inspection apparatus according to embodiments of the present invention will be described with reference to the accompanying drawings.

  The inspection apparatus of this embodiment is an apparatus provided with the probe unit of the present invention described later. All known inspection apparatuses that can be provided with this probe unit can be used as the inspection apparatus of this embodiment. This inspection apparatus includes a panel setting unit and a measurement unit. The panel setting unit is a device for receiving a display device such as a liquid crystal panel inserted from the outside as an object to be inspected, transporting the display device to the measurement unit, and delivering the display device after the inspection to the outside. The measurement unit is a device for supporting the display device passed from the panel setting unit and performing a lighting test or the like.

  As shown in FIG. 3, the measurement unit includes an alignment stage 11, a work table 12, a panel receiving unit 13, a probe unit 14, and the like.

  The alignment stage 11 is a device that adjusts the position of the display device 16 in the XYZθ directions. The alignment stage 11 includes an X movement mechanism, a Y movement mechanism, a Z movement mechanism, and a θ rotation mechanism (all not shown). The work table 12 is a member that supports the display device 16. The panel receiver 13 is a member that positions and supports the display device 16. The display device 16 is supported by the panel receiver 13, the panel receiver 13 is supported by the work table 12, and the work table 12 is supported by the alignment stage 11. Each mechanism of the alignment stage 11 operates in the XYZθ directions, so that the display device 16 and a film type probe 23 (to be described later) of the probe unit 14 are accurately aligned and come into contact with each other.

  The probe unit 14 is a member that electrically contacts a TAB electrode 66 as each contact described later with each electrode 16 </ b> A of the display device 16. The probe unit 14 mainly includes a probe base 18, an image input device 19, and a probe assembly 20.

  The probe base 18 is a plate member that is fixed to the apparatus main body side and integrally supports the image input device 19 and the probe assembly 20. Two probe bases 18 are provided along two adjacent sides of the display device 16. Each probe base 18 supports the probe assembly 20 or the like facing the display device 16 on the work table 12. A connection board 18 </ b> A (see FIG. 4) is provided on the upper side surface of each probe base 18. The connection substrate 18A is connected to a film type probe 23 described later, and is electrically connected to each electrode 16A of the display device 16 via the film type probe 23.

  The image input device 19 is a device for photographing a positioning mark (not shown) of the display device 16. The image input device 19 captures image information such as positioning marks and transmits the image information to a control unit (not shown). The control unit controls the alignment stage 11 based on the image information, and adjusts the position of the display device 16 so that the TAB electrode 66 as each contact and each electrode 16A of the display device 16 are aligned with each other. , Are designed to contact each other.

  The probe assembly 20 directly supports the TAB electrode 66 as each contact. A plurality of probe assemblies 20 are provided on each probe base 18. As shown in FIGS. 4 to 6, each probe assembly 20 includes a support portion 21, a slide portion 22, and a film type probe 23.

  The support portion 21 is a member for supporting the slide portion 22 on the distal end side in a state where the proximal end side is supported by the probe base 18. The support portion 21 is mounted directly on the probe base 18 and supports the whole, and a suspension block 26 that is integrally provided above the load base 25 and supports the slide portion 22 so as to be slidable. It is composed of

  The loading table 25 is formed in a substantially cubic shape. A probe groove 27 through which the film type probe 23 is passed is provided on the lower surface of the loading table 25. The probe groove 27 is configured as a groove penetrating from the connection substrate 18A side to the slide portion 22 side. The FPC 61 of the film type probe 23 is passed through the probe groove 27. The FPC 61 penetrates the probe groove 27 in a state where it can be freely bent.

  The suspension block 26 is substantially L-shaped. Two bolts 28 and 29 are passed through the suspension block 26. The bolts 28 and 29 are screwed into the loading table 25 to fix the loading table 25 and the suspension block 26 to each other.

  A slide support portion 31 is formed on the top end side (work table 12 side) of the upper portion of the suspension block 26. The slide support portion 31 extends horizontally from the upper portion of the suspension block 26 and is formed so as to cover the upper portion of the slide portion 22. An adjustment bolt hole 32 is provided in the slide support portion 31. The adjustment bolt hole 32 includes a head recess 32A for fitting the head 33A of the adjustment bolt 33 and a screw hole 32B through which the screw rod portion 33B of the adjustment bolt 33 passes. No screw groove is formed on the inner side surface of the screw hole portion 32B, and the screw rod portion 33B can freely move up and down.

  The two springs 35 are mounted between the slide support portion 31 and the slide portion 22 with the adjustment bolt 32 interposed therebetween. Specifically, the spring 35 is supported by a lower surface of the slide support portion 31 and a concave portion provided on the upper surface of the slide block 37 to urge the slide portion 22 downward (to the film type probe 23 side). A slide rail 36 is attached to the vertical wall of the suspension block 26 on the slide portion 22 side in the vertical direction. The slide rail 36 is a rail that supports the slide portion 22 so as to be slidable in the vertical direction.

  The slide portion 22 is a member that supports the film type probe 23 and is urged downward by a spring 35 on the suspension block 26 side. The slide part 22 includes a slide block 37 and a probe block 38.

  The slide block 37 is supported by the suspension block 26 of the support portion 21 so as to be slidable in the vertical direction. The slide block 37 is formed in an L shape and includes a slide guide 40, an adjustment bolt hole 41, a fixing bolt hole 42, and a positioning pin hole 43.

  The slide guide 40 is slidably attached to the slide rail 36 of the suspension block 26. The slide guide 40 is fixed to the slide block 37 and supports the slide block 37 so as to be slidable up and down.

  The adjustment bolt hole 41 is a screw hole into which the adjustment bolt 33 is screwed. The adjusting bolt 33 is screwed into the adjusting bolt hole 41, and the height of the slide block 37 is adjusted by changing the screwing amount of the adjusting bolt 33. Thereby, the slide part 22 is adjusted to a set height, and the space | interval of the TAB electrode 66 as each contact of the film type probe 23 and each electrode 16A of the display apparatus 16 is adjusted. The adjustment bolt 33 screwed into the adjustment bolt hole 41 supports the slide block 37 in a state where the head portion 33A is supported by the head recess portion 32A of the adjustment bolt hole 32 of the slide support portion 31. . Further, the slide block 37 is urged downward by a spring 35. Thereby, when the TAB electrode 66 as each contact of the film type probe 23 supported by the slide portion 22 contacts each electrode 16A of the display device 16, the spring 35 contracts and the TAB electrode as each contact. 66 and each electrode 16A are elastically pressurized.

  The fixing bolt hole 42 is a bolt hole through which the fixing bolt 45 is passed and the slide block 37 and the probe block 38 are fixed to each other.

  The positioning pin hole 43 is a pin hole in which the positioning pin 46 is fitted and the slide block 37 and the probe block 38 are positioned relative to each other.

  The probe block 38 is a member for directly supporting the film-type probe 23 and electrically contacting the TAB electrode 66 as each contact with each electrode 16 </ b> A of the display device 16. The probe block 38 is formed in a substantially cubic shape. On the upper surface of the probe block 38, a positioning pin hole 48 is provided at a position where it is aligned with the positioning pin 46, and a fixing bolt hole 49 is provided at a position where it is aligned with the fixing bolt hole 42. A screw hole 50 for fixing the film type probe 23 is provided on the lower surface of the probe block 38.

  On the distal end side (left side in FIG. 6) of the probe block 38, a pressure member mounting portion 51 for mounting and supporting a pressure member 55 described later is provided. The pressurizing member mounting portion 51 includes an overhang portion 52 formed by projecting the upper portion on the tip side of the probe block 38 by the same dimension as the thickness of the pressurization member 55, and a screw hole 53 for fixing the pressurization member 55. It is configured.

  The overhanging portion 52 is formed so that a slight gap is formed between the overhanging portion 52 and the upper end portion of the attached pressure member 55, and allows the pressure member 55 to swing. The screw hole 53 is a screw hole for supporting the pressurizing member 55 in a swingable manner. The screw hole 53 has a tapered portion so that the pressure member 55 is accurately positioned and fixed.

  A pressure member 55 is attached to the pressure member mounting portion 51 on the distal end side of the probe block 38. The pressurizing member 55 is a member for pressurizing the film type probe 23 with a uniform pressure. The pressurizing member 55 is swingably supported by the probe block 38, and pressurizes the TAB electrode 66 as each contact of the film type probe 23 in contact with each electrode 16A of the display device 16. ing.

  As shown in FIGS. 6 to 11, the pressing member 55 includes a mounting screw 56, a bearing 57, an elastic body base 58, and an elastic body 59.

  The attachment screw 56 is a screw for rotatably supporting the elastic body base 58 via the bearing 57. The attachment screw 56 is screwed into the screw hole 53 of the pressure member mounting portion 51 of the probe block 38 to attach the pressure member 55 to the pressure member mounting portion 51.

  The bearing 57 is fixed by a mounting screw 56 and supports the elastic body base 58 to be swingable on the pressing member mounting portion 51 of the probe block 38.

  The elastic body base 58 is formed in a quadrangular plate shape and is swingably mounted on the pressure member mounting portion 51 on the distal end side of the probe block 38.

  The elastic body 59 is a member for directly contacting and pressurizing the film type probe 23. The elastic body 59 is attached to the elastic body base 58 on the film type probe 23 side. Thereby, the portion of the pressure surface of the pressure member 55 is constituted by the elastic body 59. The lower surface of the elastic body 59 is a pressure surface that comes into contact with the tip of the film type probe 23. The elastic body 59 is swingably supported by the probe block 38 in a state where the pressing surface (the lower surface of the elastic body 59) faces the tip of the film type probe 23.

  The film type probe 23 is a member that is electrically connected to each electrode 16 </ b> A of the display device 16. As shown in FIGS. 5, 6, 11, and 12, the film type probe 23 includes an FPC 61, a connector 62, a TAB mounting plate 63, a TAB substrate 64, a TAB / IC 65, and a TAB electrode 66. Yes.

  The FPC 61 is a member for connecting the connection board 18 </ b> A fixed to the probe base 18 side and the TAB board 64 attached to the TAB attachment plate 63. The FPC 61 has flexibility and bends corresponding to the slide of the slide part 22 up and down. A connector 62 is provided at the base end portion (the right end portion in FIG. 6) of the FPC 61, and the FPC 61 is electrically connected to the connection board 18A via the connector 62.

  The TAB attachment plate 63 is a plate that supports the TAB substrate 64 and the like and is fixed to the lower surface of the probe block 38. The TAB mounting screw 69 is screwed into the screw hole 50 on the lower surface of the probe block 38, so that the TAB mounting plate 63 is fixed to the lower surface of the probe block 38.

  The TAB substrate 64 is a substrate that supports the TAB / IC 65 and the TAB electrode 66. The TAB substrate 64 is made of a flexible material and is fixed to the TAB mounting plate 63. Further, the TAB substrate 64 is fixed to the TAB mounting plate 63, and its tip (the tip of the film type probe 23, the left side in FIG. 6) extends from the TAB mounting plate 63. Further, it extends from the probe block 38. Thereby, the tip portion of the TAB substrate 64 is supported by the probe block 38 in a state where it can be freely bent.

  The TAB / IC 65 has a drive function of the display device 16 and the like. One of the TAB / IC 65 is connected to the wiring 61 A of the FPC 61, and the other of the TAB / IC 65 is connected to the TAB electrode 66.

  The TAB electrode 66 is a contact that is in contact with each electrode 16 </ b> A of the display device 16. A plurality of TAB electrodes 66 are provided on the lower surface of the tip portion of the TAB substrate 64. Specifically, the same number of TAB electrodes 66 as the respective electrodes 16A of the display device 16 are provided at positions on the lower surface of the tip portion of the TAB substrate 64 corresponding to the positions of the respective electrodes 16A. .

  The distal end portion of the TAB substrate 64 (the distal end portion of the film type probe 23) that is extended and supported by the probe block 38 in a state where it can be freely bent is a pressure surface of the pressure member 55 (under the elastic body 59). A gap S (see FIG. 11) is provided between the side surface and the side surface. When the TAB electrode 66 on the lower surface of the tip portion of the TAB substrate 64 is pressed by the display device 16 and slightly lifted by the gap S, the TAB electrode 66 is in contact with each electrode 16A of the display device 16. The tip portion of the TAB substrate 64 and the pressure surface of the pressure member 55 are in contact with each other. That is, when the electrode 16A is not flat due to the undulation of the substrate surface of the display device 16, the TAB substrate 64 is pushed up slightly by the display device 16, and the TAB substrate 64 is bent by its own deformation. The elastic body 59 follows the upper surface of the TAB substrate 64 by the swinging action of the elastic body base 58, and the TAB electrode 66 is in contact with the electrodes 16A. The tip is pressed by the pressure surface of the pressure member 55 (the lower surface of the elastic body 59). That is, the clearance S between the tip portion of the TAB substrate 64 (tip portion of the film type probe 23) and the pressure surface of the pressure member 55 allows the tip portion of the TAB substrate 64 to bend freely. In addition, the elastic body 58 is allowed to swing. As a result, the tip of the TAB substrate 64 can be flexed freely to follow the upper surface of the electrode 16A, and the tip of the TAB substrate 64 is previously contacted or adhered to the lower surface of the elastic body 59. Compared to the case, since the stress is not applied to the tip of the TAB substrate 64, the contact can be made with high accuracy, and the breakage can be prevented and the life can be extended.

  The probe unit 14 configured as described above operates as follows.

  The display device 16 is placed on the alignment stage 11, and as shown in FIG. 13A, the electrodes 16 A of the display device 16 and the TAB electrodes 66 of the film type probe 23 are aligned with each other. To be aligned. Here, it is assumed that there is an inclination of Θ <b> 1 between each electrode 16 </ b> A and the tip of the TAB substrate 64 due to the undulation of the display device 16.

  Next, the display device 16 is lifted by the alignment stage 11, and each electrode 16A of the display device 16 and each TAB electrode 66 of the film type probe 23 are brought into contact with each other.

  At this time, the tip portion of the TAB substrate 64 extends to the probe block 38 in a state where it can be freely bent. Therefore, as shown in FIG. Each electrode 16A and each TAB electrode 66 of the film type probe 23 are in contact with each other in alignment. At this time, almost no pressure is applied between them.

  Thus, even when the upper surface of each electrode 16A and the TAB electrode 66 of the film type probe 23 are not parallel due to the undulation of the surface of the display device 16, the display device 16 is lifted by the alignment stage 11 and the above-mentioned When the leading end of the film type probe 23 is slightly lifted, the leading end of the TAB substrate 64 flexibly follows each electrode 16A due to the gap S between the pressing surface of the pressing member 55. And consistent with each other.

  Thereafter, the tip portion of the TAB substrate 64 comes into contact with the pressure surface of the elastic body 59 of the pressure member 55 and is pressurized.

  Further, since the pressure member 55 is swingably supported by the probe block 38, the angle of the pressure member 55 is changed according to the upper surface of the display device 16 even when the surface of the display device 16 is not flat. . As a result, as shown in FIG. 13C, each TAB electrode 66 and each electrode 16A are in contact with each electrode 16A of the display device 16, with each TAB electrode 66 in contact with each electrode 16A of the display device 16. While maintaining the alignment, the tip of the film type probe 23 comes into contact with the pressing surface of the pressing member 55 whose angle has been changed. Thereby, the inclination Θ1 between each electrode 16A and the tip of the TAB substrate 64 becomes Θ2 (≈0), and the swell of the display device 16 is absorbed.

  Thereby, the said pressurization member 55 press-contacts uniformly to the front-end | tip part of the said film type probe 23. FIG. Further, when the distal end portion of the film type probe 23 comes into contact with the pressure member 55 in contact with the display device 16 side, the spring 35 biases the pressure member 55 and the film type probe. The tip of 23 is elastically pressurized.

  As a result, the contact accuracy between each TAB electrode 66 of the film type probe 23 and each electrode 16A of the display device 16 can be maintained high.

  In addition, as a test | inspection apparatus which concerns on the said embodiment, all the well-known test | inspection apparatuses which can be equipped with the said probe unit 14 can be used.

  DESCRIPTION OF SYMBOLS 11: Alignment stage, 12: Work table, 13: Panel receiving part, 14: Probe unit, 16: Display apparatus, 16A: Each electrode, 18: Probe base, 18A: Connection board, 19: Image input device, 20: Probe Assembly: 21: support part, 22: slide part, 23: film type probe, 25: loading platform, 26: suspension block, 27: groove for probe, 28, 29: bolt, 31: slide support part, 32: adjustment Bolt hole, 32A: head recess, 33: adjustment bolt, 33A: head, 33B: screw rod, 35: spring, 36: slide rail, 37: slide block, 38: probe block, 40: slide guide, 41: adjustment bolt hole, 42: fixing bolt hole, 43: positioning pin hole, 45: fixing bolt, 46: position Female pin, 48: positioning pin hole, 49: fixing bolt hole, 50: screw hole, 51: pressure member mounting portion, 52: overhang portion, 53: screw hole, 55: pressure member, 56: mounting screw, 57 : Bearing, 58: elastic body base, 59: elastic body, 61: FPC, 62: connector, 63: TAB mounting plate, 64: TAB substrate, 65: TAB / IC, 66: TAB electrode, 69: TAB mounting screw, S: A gap.

Claims (4)

A film-type probe having flexibility and having a plurality of contacts on the surface;
A probe block that supports the film-type probe and electrically contacts the electrodes of the object to be inspected;
A pressure member that is supported by the probe block and pressurizes the film type probe with a uniform pressure in a state where each contact of the film type probe is in contact with each electrode of the object to be inspected;
The film type probe is supported by the probe block in a state in which the contact is provided at the tip of the film type probe and the tip extends from the probe block and can be freely bent.
The pressurizing member has a pressurizing surface that contacts the tip of the film type probe, and is supported by the probe block in a swingable manner with the pressurizing surface facing the tip of the film type probe. A probe unit comprising a gap between the pressure surface of the pressure member and the tip of the film type probe. The probe unit according to claim 1, wherein
A probe unit, wherein a portion of a pressure surface of the pressure member is made of an elastic body. The probe unit according to claim 1, wherein
When the probe block is slidably provided and urged toward the film type probe, and the tip of the film type probe comes into contact with the object to be inspected and bends and comes into contact with the pressure member A probe unit that biases the pressure member to elastically and uniformly press the tip of the film type probe. An inspection apparatus including a measurement unit that supports and inspects an object to be inspected,
An inspection apparatus using the probe unit according to claim 1 as a probe unit of the measurement unit.

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