JP2013200256A - Probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe device which prevents unstable motion of an individual probe element and is capable of preferably coping with higher density of an electrode arrangement in which electrodes are arranged in a plurality of lines along the edge portion of an object to be inspected.SOLUTION: There is provided a probe device in which a probe sheet is supported by a probe block via a support plate, the support plate is protruded from the front edge of the probe block together with the probe sheet, and an elastic member is interposed between the support plate and the probe sheet in a region where at least the support plate and the probe sheet are protruded. This allows the protruded region of the probe sheet to be a laminated structure including the probe sheet, the elastic member and the support plate. Further, an entrance angle of probe elements of the probe sheet is set to an angle smaller than 10 degrees. These configurations make it possible to suppress needle pressure of each probe element within the variation of approximately 1 g even if contact electrodes of the adjacent probe elements are arranged while being displaced in a lengthwise direction of the probe sheet.

Description

  The present invention relates to a probe device used for an electrical test of a flat test object such as a liquid crystal display panel.

  An object to be inspected such as a liquid crystal display panel in which liquid crystal is sealed is generally inspected, that is, tested by a test apparatus in which a probe device such as a probe unit is incorporated. An electrical signal from a tester provided in the test apparatus is supplied to the object to be inspected via the probe apparatus.

  For example, the probe device described in Patent Document 1 is a flexible device having a strip-shaped electrically insulating film and a plurality of wirings extending in the longitudinal direction at intervals in the width direction of the film on the surface of the film. And a probe block provided with an inclined bottom surface for supporting the wiring sheet.

  The probe block inspects the tip of the wiring sheet at an intrusion angle of about 20 to 30 degrees determined by the inclined bottom surface of the probe block with the tip of the wiring sheet protruding from the front edge of the probe block. Guide it above the body. The tip of the wiring sheet protruding from the front edge of the probe block is elastically supported on the back surface of the wiring sheet, that is, the back surface of the film, by an arm that is elastically supported with respect to the probe block. In addition, a contact electrode that protrudes from each wiring path toward a corresponding electrode of the object to be inspected is formed at the tip of the wiring sheet.

  In the conventional probe device, when the probe device and the object to be inspected move relative to each other, the contact electrodes provided on each wiring at the tip of the wiring sheet are aligned in a line along the edge of the object to be inspected. It contacts the corresponding electrode arranged.

  At this time, the leading end portion of the wiring sheet that protrudes from the front edge of the probe block and is elastically supported by the arm undergoes bending deformation. In response to this bending deformation, each contact electrode slides the corresponding electrode of the device under test to remove the oxide film on the electrode. Thereby, each probe element consisting of the wiring provided with the contact electrode is reliably electrically connected to the corresponding electrode. In addition, each probe element is integrally formed with the adjacent probe element by the film as a base material at the tip portion of the wiring sheet, so that unstable movement of each probe element is suppressed.

  In the probe device used for the inspection of the object to be inspected, the contact electrode of each probe element corresponds to the arrangement of the electrodes at the tip of the wiring sheet protruding from the front edge of the probe block. Arranged in a row in the width direction. Therefore, the substantial probe length for each corresponding probe element is kept substantially constant. Therefore, when the contact electrode is pressed against the corresponding electrode of the object to be inspected, the amount of deflection of each probe element is also kept almost constant, so that there is a large variation in the needle pressure at the contact electrode of each probe element. Absent. As a result, as described above, as long as it is limited to the inspection when the object to be inspected has electrodes arranged in a line along the edge, it is possible to apply a substantially uniform needle pressure to each probe element. Appropriate testing is possible.

  However, with the miniaturization of the inspection object, the electrodes are arranged in, for example, two rows along the edge of the inspection object so that the electrodes are alternately shifted in a zigzag direction in a direction perpendicular to the edge of the inspection object. Sometimes. In this case, in order to inspect such an object to be inspected, in the probe device, the contact electrode of each probe element extends in the longitudinal direction of the probe sheet at the tip of the wiring sheet protruding from the front edge of the probe block. The contact electrodes are arranged in a zigzag arrangement corresponding to the electrode arrangement of the object to be inspected so that the contact electrodes are arranged in two rows at intervals and are alternately displaced in the longitudinal direction of the probe for each adjacent probe element. Need arises.

  However, in the conventional probe device, since the tip of the wiring sheet protruding from the front edge of the probe block is elastically supported by the arm, the protruding amount of the tip of the wiring sheet is compared between 5 mm and 10 mm. Must be set to a large value. When the amount of protrusion of the tip of the wiring sheet becomes such a large value, coupled with the fact that the penetration angle of the probe element is set to be as large as about 20 degrees to 30 degrees, the amount of deflection at the tip of the wiring sheet is , And changes greatly according to the distance from the front edge of the probe block. Therefore, between the contact electrodes arranged in a zigzag, between the first probe element group having the contact electrodes arranged in the first row and the second probe element group having the contact electrodes arranged in the second row Regardless of a slight difference in probe length, the difference between the displacement amount of the contact electrode in the first row and the displacement amount of the contact electrode in the second row is also amplified by the placement error of the wiring sheet with respect to the probe block. There is.

  For this reason, among the contact electrodes arranged in a zigzag, a first probe element group having a contact electrode located in the first row, and a second probe element group having a contact electrode located in the second row, It is difficult to accurately control the needle pressure difference.

  As a result, in such a probe device, a large variation exceeding approximately 2 g may occur in the needle pressure of the probe element between the first and second probe groups that are uniformly spaced from each other in the longitudinal direction of the probe sheet. is there. For this reason, the conventional probe device is not suitable for inspecting an object to be inspected having a high density arrangement in which electrodes are arranged in multiple rows.

JP 20014662 A

  Accordingly, the object of the present invention is to prevent unstable operation of individual probe elements and to cope with high density of electrode arrangements in which electrodes are arranged in multiple rows along the edge of the object to be inspected. An object of the present invention is to provide a probe device that can be used.

  The present invention is based on the following basic concept. First, instead of directly supporting the probe sheet with the probe block, the probe sheet is supported by the probe block via a support plate, and the support plate is supported from the front edge of the probe block. Protruding from the front edge of the probe block of the probe sheet by projecting together with the probe sheet, and interposing an elastic member between the support plate and the probe sheet at least in the region where the support plate and the probe sheet project A region to be formed is a laminated structure of the probe sheet, the elastic member, and the support plate. Second, the intrusion angle of the probe element of the probe sheet is set to an angle smaller than 10 degrees. With these configurations, the contact electrodes provided on the adjacent wiring to correspond to the electrode arrangement of the inspected object arranged at high density are arranged with a deviation in the longitudinal direction of the probe sheet. Even so, the needle pressure of each probe element can be suppressed within a variation of about 1 g.

  That is, the probe device according to the present invention is used for electrical inspection of an object to be inspected that is supported on a back surface and supported by an electrode on the back surface, and has a front end surface and a plane that intersects the front end surface. A probe block that is supported with the flat surface facing the support base so that a front edge constituted by the two surfaces is positioned above the support base, and is disposed on the flat surface of the probe block. A support plate fixed to the probe block at a surface and protruding from the front edge of the probe block, and at least a portion of the support plate protruding from the front edge of the probe block and fixed to the other surface of the support plate A plate-like elastic member, a strip-like electrically insulating film, and a plurality of wires formed on one surface of the film and spaced apart from each other in the width direction of the film. A wiring sheet having a contact electrode that rises, and the other surface of the film is supported by the flat surface of the probe block via the elastic member and the support plate, and together with the elastic member and the support plate, the probe block And a wiring sheet having an extending portion protruding from the front edge. The contact electrodes are located in the extending portion of the wiring sheet, and the contact electrodes provided on the adjacent wirings are arranged with a shift in the longitudinal direction of the film so as to correspond to the electrodes of the object to be inspected. In addition, an angle formed by the extending portion of the wiring sheet and a plane parallel to the surface of the object to be inspected is set to an angle smaller than 10 degrees.

  In the probe device according to the present invention, the extending portion of the probe sheet protruding from the front edge of the probe block forms a laminated structure together with the support plate and the elastic member, and the probe block is formed by the support plate and the elastic member. Is elastically supported. Therefore, the extension portion can be appropriately elastically supported without using a conventional elastically supported arm, and thus without forming a long extension portion as in the prior art.

  The angle formed by the extending portion and a plane parallel to the surface of the object to be inspected is referred to as an intrusion angle of each probe element constituted by the wiring provided with each contact electrode of the probe sheet. In the probe device according to the present invention, further, by setting the penetration angle to be less than 10 degrees, when each contact electrode of the probe element is pressed against the electrode of the object to be inspected with an appropriate needle pressure, The amount of deformation caused by the bending of the extending portion can be made smaller than before.

  By these, while suppressing the bending amount in the said extension part of the said wiring sheet, the adjacent probe element (wiring provided with the said contact electrode) arrange | positioned with a shift | offset | difference in the longitudinal direction of the said film, ie, the longitudinal direction of the said wiring sheet. ) Can be reduced by the probe length difference, so that the needle pressure difference between adjacent probe elements can be set within 1 g. Moreover, since the adjacent probe elements are coupled by the film, unstable operation of individual probe elements can be prevented.

  The angle formed by the extending portion of the wiring sheet and the plane parallel to the surface of the object to be inspected, that is, the penetration angle, is 1 in order to further suppress variation in the needle pressure difference between the adjacent probe elements. It is desirable that the angle is not less than 5 degrees and not more than 5 degrees.

  The penetration angle can be set by gradually increasing the thickness of the probe block toward the front edge.

  In order to further suppress the variation in the needle pressure difference between the adjacent probe elements, the length of the portion where the support plate, the elastic member, and the wiring sheet protrude from the front edge of the probe block is 1 mm or more. It is desirable to be 2 mm or less.

  The extending portion of the wiring sheet is elastic so that when the contact electrode is pressed by the corresponding electrode of the object to be inspected, the elastic member and the support plate are deformed to be in a substantially horizontal state. Can be transformed. Due to the elastic deformation of the extending portion, each contact electrode provided on the extending portion suitably removes the oxide film of the corresponding electrode of the device under test.

  The contact electrodes are arranged on a first virtual straight line of a pair of virtual parallel straight lines extending in the width direction of the film at intervals in the longitudinal direction of the film in the extending portion of the wiring sheet. And a second contact electrode group aligned on the other virtual straight line of the pair of virtual parallel straight lines. This arrangement of the contact electrodes can be adapted to the so-called zigzag arrangement of the electrodes of the object to be inspected, and can appropriately cope with the electrical inspection of the object to be inspected with the electrode arrangement being densified.

  The contact electrode includes a third contact electrode group aligned on a third imaginary line parallel to the pair of imaginary parallel lines, thereby further increasing the electrical density of the object to be inspected. Appropriately respond to physical inspection.

  By making the support plate, the elastic member, and the wiring sheet transparent or translucent, the electrodes of the object to be inspected corresponding to the contact electrodes of each probe element can be visually recognized from above the extending portion. The contact electrode of each probe element can be easily aligned with the corresponding electrode.

  The support plate can be bonded to the surface of the probe block with an adhesive. In this case, a concave groove for accommodating an excess amount of the adhesive is formed on one of the bonding surfaces of the probe block and the support plate, preferably on the surface of the probe block having a sufficient thickness dimension. It is desirable to do.

  The wiring sheet can be provided with thermal expansion suppressing means for suppressing thermal expansion deformation of the film in order to prevent the interval between the wirings from being changed due to thermal fluctuation.

  As the thermal expansion suppressing means, a plate-like member such as glass that is fixed to the film with an adhesive and has a lower thermal expansion coefficient and higher rigidity than the film can be used.

  The plate-like member functioning as thermal expansion suppressing means is provided between the support plate and the wiring sheet, following the rear end opposite to the protruding end of the elastic member protruding from the front edge of the probe block. Can intervene.

  According to the present invention, as described above, since adjacent adjacent probe elements are coupled by the film, unstable operation of individual probe elements can be prevented, and between adjacent probe elements can be prevented. Can be set within 1 g, so that it is possible to suitably cope with the increase in the electrode arrangement of the object to be inspected.

It is a perspective view which shows a part of test apparatus using the probe apparatus based on this invention. It is drawing which expands and shows a part of to-be-inspected object shown in FIG. 1, (a) is a top view, (b) is a side view. It is a longitudinal cross-sectional view of the probe apparatus shown in FIG. It is a perspective view which decomposes | disassembles and shows a part of probe apparatus shown in FIG. 1 shows a method for connecting a contact electrode of the probe device shown in FIG. 1 and an electrode of an object to be inspected, (a) is a side view showing a state at the beginning of connection, and (b) is a side view showing a subsequent connection state. FIG. It is a perspective view of the probe sheet which shows the other specific example of this invention.

  As shown in FIG. 1, the test apparatus 10 according to the present invention is used for lighting inspection of a flat object 12 such as a liquid crystal display panel. The test apparatus 10 includes a tester (not shown) that transmits a signal for testing the device under test 12. For example, a test signal or a drive signal for black display on the liquid crystal display panel necessary for the inspection is supplied to the inspection object 12 from the tester via the test apparatus 10.

  The inspected object 12 has a rectangular shape, and a plurality of, for example, square electrodes 14 (14a, 14b, 14c) are arranged on an edge corresponding to at least one side of the rectangle on the surface. Yes. In the illustrated example, a plurality of electrodes 14 (14 a, 14 b, 14 c) are provided on the surface of the inspection object 12 along two adjacent sides.

  As shown in FIGS. 2 (a) and 2 (b), the electrodes 14 (14a, 14b, 14c) of the device under test 12 are perpendicular to the corresponding straight edge 12a-1 of the rectangular body 12a. At the end of each electric circuit 16 (16a, 16b, 16c) extending toward the edge 12b of the device under test 12.

  In the example shown in FIG. 2, the electric circuit 16 has first and second lengths that terminate in the vicinity of three virtual lines l8a, 18b, and 18c that are parallel to the straight edge portion 12a-1 and equally spaced from each other. And a third mutually parallel electric circuit 16a, 16b, 16c.

  The first electric circuit 16a is set to be the shortest in the first to third electric circuits, and terminates in the vicinity of the virtual line 18a closest to the straight edge 12a-1. The third electric circuit 16c is set to be the longest in the first to third electric circuits, and terminates in the vicinity of the virtual line 18c farthest from the straight edge 12a-1. The second electric circuit terminates in the vicinity of the second virtual line 18b at the center of the virtual line 18a and the virtual line 18ac. The first, second, and third electric paths 16a, 16b, and 16c are formed in parallel with each other at equal intervals, and are arranged so as to repeat sequentially in one direction along the linear edge portion 12a-1.

  Therefore, the electrode 14 (14a, 14b, 14c) provided at the terminal of each of the first, second, and third electric circuits 16a, 16b, 16c is a first electrode group (on the first virtual line l8a) ( 14a), a second electrode group (14b) aligned on the second imaginary line 18b, and a third electrode group (14c) aligned on the third imaginary line 18c, respectively. As a result, each electrode 14 (14a, 14b, 14c) of the first, second, and third electrode groups is sequentially repeated in the above-described one direction along the straight edge portion 12a-1 of the device under test 12. Are arranged in a three-row zigzag arrangement.

  Such a zigzag electrode arrangement allows the distance between the adjacent electric paths 16 (16a, 16b, 16c) to be set small without causing mutual interference between the adjacent electrodes 14 (14a, 14b, 14c). This is advantageous in increasing the density of electrode arrangement.

  Referring again to FIG. 1, the test apparatus 10 according to the present invention is used for testing the inspection object 12 having the electrode arrangement as described above, and functions as a support base that receives the back surface of the inspection object 12. And a plurality of probe units 22 disposed above the chuck top 20.

  The probe unit 22 is held above the edge 12b of the device under test 12 held by the chuck top 20 as in the conventional case. The inspection object 12 is held on the chuck top 20 by the suction pressure of the chuck top 20 lower than the atmospheric pressure.

  The chuck top 20 is provided on the XYZθ stage as is well known in the art. Thereby, the probe unit 22 and the chuck top 20 are relatively movable in the vertical (Z-axis) direction so as to be close to each other or away from each other. Further, the device under test 12 on the chuck top 20 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction perpendicular to the XY plane integrally with the chuck top 20, and around the Z-axis ( That is, it can rotate in the θ direction). Therefore, the posture of the inspection object 12 on the chuck top 20 can be adjusted with respect to the test apparatus 10 by adjusting the XYZθ stage.

  Each probe unit 22 is spaced apart from the chuck top 20 on a plane parallel to the chuck top 20, for example, a probe base 24 supported by a frame member (not shown), and a plurality of probe devices 26 supported by the probe base 24. With. The probe base 24 extends along a corresponding edge of the device under test 12 received by the chuck top 20. The probe device 26 is disposed on the probe base 24 with an interval in the longitudinal direction of the probe base 24.

  As shown in FIG. 3, each probe device 26 is fixed to a corresponding probe base 24 via a screw member 28 and extends from the probe base 24 toward the top of the chuck top 20. A probe block 34 coupled to the coupling block via a screw member 32 on the lower surface of the distal end portion of the coupling block 30, a support plate 36 attached to the probe block, and a wiring sheet 38 held on the support plate And a plate-like elastic member 40 inserted between the wiring sheet and the support plate 36.

  Positioning pins 42, 44 for accurate positioning of the members 30, 24 or 30, 34 are applied between the connecting block 30 and the probe base 24 and between the connecting block 30 and the probe block 34. .

  The probe block 34 has a generally rectangular planar shape having a length dimension along the extending direction of the connecting block 30 and a width dimension perpendicular thereto. In the example shown in FIG. 3, the length dimension of the probe block 34 is equal to the length of the lower surface of the connection block 30 to which the probe block is attached. The connection block 30 has a front end surface 30 a located near the edge 12 b of the device under test 12 and above the edge, and the probe block 34 has a front end surface 34 a of the probe block 34 and a front end of the connection block 30. The upper surface of the probe block 34 is fixed in contact with the lower surface of the connecting block 30 so as to coincide with the surface 30a.

  Accordingly, the probe block 34 has the bottom surface 34b facing the chuck top 20 so that the front edge 34d formed by the intersection of the front end surface 34a and the bottom surface 34b is positioned above the chuck top 20 that is the support base. It is supported by the connecting block 30.

  The probe block 34 gradually increases the plate thickness along the longitudinal direction toward the front end surface 34a. Thereby, the flat lower surface, that is, the bottom surface 34b of the probe block 34 is given a depression angle of an angle θ (see FIG. 1) when viewed from the rear end surface 34c opposite to the front end surface 34a to the front end surface 34a. The depression angle θ is set to be less than 10 degrees, preferably 1 degree or more and 5 degrees or less. By setting the depression angle θ, the depression angle θ is set between the surface of the inspection object 12 on the chuck top 20 and the bottom surface 34b.

  As shown in FIG. 4, the support plate 36 has substantially the same width dimension as the bottom face 34b of the probe block 34, and has a length dimension longer than the length dimension of the bottom face 34b. Has a shape. The support plate 36 is made of a synthetic resin plate such as a transparent acrylic resin plate, liquid crystal polymer (LCP), or polyester having a uniform thickness, and can be deformed flexibly. As shown in FIGS. 3 and 4, the support plate 36 has a front end 36 a of the support plate 36 extending from the front edge 34 d of the probe block 34 toward the extending direction of the connecting block 30, that is, toward the device under test 12. For example, it arrange | positions so that it may protrude in the range of 1 mm-2 mm.

  It is desirable that the support plate 36 be fixed to the bottom surface 34b of the probe block 34 with an adhesive on the upper surface thereof. In this case, it is desirable to form a concave groove 46 for accommodating excess adhesive on the bottom surface 34b. In the illustrated example, a pair of parallel grooves 46 are employed, but the grooves can be formed annularly along the outer edge of the rectangular bottom surface 34b. Instead of forming the concave groove 46 on the bottom surface 34 b, the concave groove 46 can be formed on the upper surface serving as the joint surface of the support plate 36. However, in order to form the concave groove 46 having a depth sufficient to accommodate an excessive adhesive, it is desirable to provide the concave groove 46 in the probe block 34 as shown in the drawing.

  The plate-like elastic member 40 described above is disposed on the lower surface of the support plate 36. The elastic member 40 is made of a transparent elastic member such as urethane rubber having a uniform plate thickness. In the illustrated example, the elastic member 40 has a width dimension equal to the width dimension of the support plate 36, and is approximately three times the support plate 36. It has a fractional length dimension. The elastic member 40 is fixed to the upper surface 36a of the support plate 36 on the upper surface using an adhesive so that the front end 40a thereof coincides with the front end 36a of the support plate 36.

  In the illustrated example, a thermal expansion suppressing means 48 described later is disposed on the lower surface of the support plate 36 in succession to the rear end 40 b of the elastic member 40.

  As is well known in the art, the wiring sheet 38 has a strip-like electrically insulating film 50 made of a transparent film such as a polyimide film, and one surface of the electrically insulating film in the width direction of the film. And a plurality of wirings 52 extending along the longitudinal direction at intervals. The arrangement pitch between the adjacent wirings 52 is set to be equal to the arrangement pitch between the adjacent electric circuits 16 of the device under test 12. The wiring sheet 38 can be formed of, for example, a flexible printed wiring board (FPC) as is well known.

  The other surface of the electrical insulating film 50 is an elastic member so that the longitudinal direction of the wiring sheet 38, that is, the longitudinal direction of the electrical insulating film 50 coincides with the extending direction of the probe block 34, which is the longitudinal direction of the support plate 36. It is fixed to the lower surface of 40 via an adhesive. By this fixing, the front end 38 a of the wiring sheet 38 coincides with the front end 40 a of the elastic member 40 and the front end 36 a of the support plate 36. Therefore, the wiring sheet 38 is supported on the bottom surface 34 b of the probe block 34 via the support plate 36 and the elastic member 40, and has an extending portion 38 a that protrudes from the front edge 34 d of the probe block 34. As a result, the extending portion 38 a forms a laminated structure together with the support plate 36 and the elastic member 40, and the extending portion 38 a is fixed to the inclined bottom surface 34 b of the probe block 34 and from the front edge 34 d of the probe block 34. The support plate 36 arranged with the front end 36a protruding is guided toward the device under test 12 at a predetermined depression angle θ. The protruding length of the extending portion 38a is equal to the protruding length of the support plate 36 described above.

  As clearly shown in FIG. 4, contact electrodes 54 (54 a, 54 b, 54 c) that protrude from the wiring 52 are formed in the extending portion 38 a of the wiring sheet 38. Each contact electrode 54 (54a, 54b, 54c) is equidistant from the virtual lines l8a, 18b, 18c14a in which the electrode electrodes 14 (14a, 14b, 14c) of the device under test 12 shown in FIG. Alignment is made on three virtual lines 56 (56a, 56b, 56c) extending in the width direction of the extending portion 38a of the wiring sheet 38.

  That is, each contact electrode 54a extends in the width direction of the electrical insulating film 50 closest to the front end of the extending portion 38a so as to correspond to the electrode 14a of the device under test 12 shown in FIG. Align on the first virtual line 56a. Each contact electrode 54b is aligned on the second virtual line 56b at the center, and each contact electrode 54c is aligned on the third virtual line 56c farthest from the front end of the extending portion 38a.

  Therefore, the first contact electrode group 54a aligned on the first virtual line 56a, the second contact electrode group 54b aligned on the second virtual line 56b, and the third contact line aligned on the third virtual line 56c. Each electrode of the contact electrode group 54c of the contact electrode group 54c corresponds to the first to third electrodes 14 (14a, 14b, 14c) of the device under test 12 along the width direction of the wiring sheet 38. The electrodes 14 (14a, 14b, 14c) are arranged in three rows in a zigzag arrangement so as to be sequentially repeated in the arrangement direction.

  The extending portion 38a of the wiring sheet 38 and the vicinity thereof are supported by the support plate 36 via the elastic member 40 as described above. The wiring sheet 38 further extends rearward beyond the bottom surface 34b of the probe block 34. However, in the region beyond the rear end 40b of the elastic member 40, the wiring sheet 38 is fixed to the lower surface of the support plate 36 via the thermal expansion suppressing means 48. Has been.

  In the illustrated example, the thermal expansion suppressing means 48 is a rectangular plate-like member having a width dimension that matches the width dimension of the wiring sheet 38, and has a smaller thermal expansion coefficient and higher rigidity than the wiring sheet 44. As such a plate member 48, a glass plate can be used. The glass plate 48 is interposed between the support plate 36 and the electrically insulating film 50 of the wiring sheet 38 in a region beyond the rear end 40b of the elastic member 40, and the wiring sheet 44 and the electrically insulating film 50 are bonded by an adhesive. It is glued to.

  The electrically insulating film 50 of the wiring sheet 38 tends to expand and contract due to changes in the measurement environment temperature. The thermal expansion and contraction in the longitudinal direction of the electrical insulating film 50 is suppressed by a large number of wirings 52 provided on the electrical insulating film so as to extend in the longitudinal direction. On the other hand, the thermal expansion and contraction in the width direction of the electric insulating film 50 is arranged across the electric insulating film 50 in the vicinity of the extending portion 38 a and is fixed to the electric insulating film, and is more than the electric insulating film 50. It is suppressed by a thermal expansion suppression means 48 made of, for example, a glass plate having a small thermal expansion coefficient and high rigidity.

  Thereby, it is suppressed that the space | interval 52 of the wiring 52 on the electrically insulating film 50 increases / decreases by environmental temperature change, and between the contact electrodes 54 (54a, 54b, 54c) of each wiring 52 along the width direction of the wiring sheet 38. Increase or decrease in the interval is suppressed. Therefore, the shift | offset | difference to the width direction of the wiring sheet 38 by the environmental temperature change of each contact electrode 54 (54a, 54b, 54c) corresponding to the electrode 14 (14a, 14b, 14c) is suppressed.

  In the illustrated example, the rear end of the wiring sheet 38, that is, the end opposite to the extending portion 38a, is an IC chip 58 held on the lower surface of the central portion of the connection block 30 and a connection circuit 60 formed of, for example, an FPC. And connected to the tester. When the IC chip 58 receives the test signal from the tester, the IC chip 58 drives the device under test 12, and the contact electrodes 54 (54 a, 54 b, 54 c) of each wiring 52 and the device under test 12 corresponding to the contact electrodes. The drive signal supplied to the device under test 12 is generated through the electrodes 14 (14a, 14b, 14c).

  In the test apparatus 10 according to the present invention, the electrodes 14 (14 a, 14 b, 14 c) of the device under test 12 on the chuck top 20 are the contact electrodes 54 (54 a, 54 b, 54 c) corresponding to the wires 52 of the probe apparatus 26. The XYZθ stage is adjusted so as to be located immediately below. At this time, in addition to the above-described wiring sheet 38, the support plate 36 and the elastic member 40 are made of a transparent material, so that the lower contact electrode passes from above the probe device 26 through the support plate 36, the elastic member 40 and the wiring sheet 38. Since 54 (54a, 54b, 54c) can be visually recognized, the alignment can be easily adjusted. After completion of the positioning operation, the inspection object is moved in the vertical direction so that the probe device 26 and the inspection object 12 come close to each other by the operation of the XYZθ stage.

  In the test apparatus 10 according to the present invention, the extending portion 38a of the wiring sheet 38 forms a laminated structure together with the support plate 36 and the elastic member 40, and the contact electrodes 54 (54a, 54b, 54c) provided on the extending portion 38a. ) Is guided above the corresponding electrode 14 (14a, 14b, 14c) of the device under test 12 at an angle θ defined by the bottom surface 34b of the probe block 34. This angle θ. As is well known in the art, the penetration angle of the probe element constituted by each contact electrode 54 (54a, 54b, 54c) and the wiring 52 is obtained.

  Therefore, when the probe device 26 and the device under test 12 approach each other, first, as shown in FIG. 5A, first, the first contact electrode group 54a is connected to the corresponding electrode group 14a of the device under test 12. Abut. At this time, since the penetration angle of the extending portion 38a is maintained at the initial θ until at least the bending deformation is introduced into the extending portion 38a with the elastic deformation of the elastic member 40, the second and third The contact electrode groups 54b and 54c are not in contact with the corresponding second and third electrode groups 14b and 14c, and a gap is maintained between the contact electrode groups 54b and 54c and the electrode groups 14b and 14c.

  If the amount of bending deformation of the extending portion 38a increases as shown in FIG. 5B due to the subsequent relative movement between the probe device 26 and the object 12 to be inspected, the elastic member 40 increases as the amount of deformation increases. Is compressed and deformed between the extending portion 38 a and the support plate 36. Further, when the amount of compressive deformation of the elastic member 40 increases, the second and third contact electrode groups 54b and 54c sequentially correspond to the first contact electrode group 54a in addition to the first contact electrode group 54a. It contacts the electrode groups 14b and 14c, and is further subjected to bending deformation so that the extending portion 38a becomes substantially horizontal. Further, a slight bending deformation is also introduced into the protruding portion of the support plate 36 protruding from the front edge 34d of the probe block 34. During this time, each of the first to third contact electrode groups slightly slides on each electrode from a contact point with the corresponding first to third electrode group, so that each electrode 14 (14a, 14b, 14c) Sharpen the oxide film. Therefore, each contact electrode 54 (54a, 54b, 54c) is reliably electrically connected to the corresponding electrode 14 (14a, 14b, 14c) of the device under test 12.

  In the test apparatus 10 according to the present invention, the protruding length of the extending portion 38a that determines the substantial probe length into which the bending deformation of each probe element (52, 54) of the wiring sheet 38 is introduced is set shorter than the conventional one. Moreover, the penetration angle θ of the probe elements (52, 54) is also set smaller than in the prior art.

  For these reasons, in the electrical connection state described above, the amount of bending deformation of the extending portion 38a provided with the contact electrodes 54 (54a, 54b, 54c) of the wiring sheet 38 is reduced as compared with the conventional case. Therefore, even if the first, second, and third contact electrodes 54 (54a, 54b, 54c) are displaced in the longitudinal direction of the wiring sheet 38, the needle pressure difference of each probe element due to the difference is smaller than in the prior art. It can be suppressed within ± 1 g.

  Therefore, it is possible to prevent a measurement error due to a difference in needle thickness between the probe elements (52, 54).

  In the above-described embodiment, each probe element (52, 54) is integrally formed with the adjacent probe element (52, 54) by the extending portion 38a of the wiring sheet 38 by the electrically insulating film 50 as a base material. ing. This configuration is advantageous for suppressing the unstable operation of the individual probe elements, and is also considered advantageous for suppressing the needle pressure difference between the probe elements.

  The length dimension of the elastic member 40 is set to the length dimension of the support plate 36 so that the thermal expansion suppressing means 48 is not required and the space between the support plate 36 and the wiring sheet 38 on which the thermal expansion suppressing means 48 is disposed is filled with the elastic member. Can match. However, in order to prevent measurement errors due to environmental temperature, it is desirable to provide a thermal expansion suppression means 48 as shown in the figure.

  FIG. 6 shows another example of a wiring sheet applicable to the device under test 12 shown in FIG. The wiring sheet 60 shown in FIG. 6 includes the same electrical insulating film 50 and wiring 52 as in the wiring sheet 38. In the wiring sheet 38, each wiring 52 is provided with a contact electrode of any one of the first, second, or third contact electrode groups (54a, 54b, 54c). On the other hand, in the wiring sheet 60 shown in FIG. 6, the first to third contact electrodes 54 (on the first, second and third virtual lines 56 (56a, 56b, 56c) are respectively connected to the wirings 52. 54a, 54b, 54c).

  When the wiring sheet 60 shown in FIG. 6 is applied to the inspection object 12 shown in FIG. 2, the corresponding electric circuit among the first to third contact electrodes 54 a, 54 b, 54 c provided on each wiring 52. Only one contact electrode 54a, 54b or 54c corresponding to the electrode 14a, 14b or 14c provided on 16a, 16b or 16c functions as an electrode, the other two contact electrodes do not function, and the other The contact electrode is not obstructed.

  Further, when a long and thin electrode (not shown) is used instead of the square electrode 14 for the object to be inspected 12, the wiring sheet 60 includes the first, second and third contact electrodes 54a of each wiring 52. , 54b, 54c are applied so as to contact a single elongated electrode with the elongated electrode of the device under test as a common electrode.

  As described above, the present invention has been described along an arrangement in which each contact electrode of the probe element is arranged in a three-row zigzag arrangement. However, when the electrodes of the object to be inspected are arranged in two rows of zigzags, the arrangement of the contact electrodes of the present invention employs, for example, a two rows zigzag arrangement using the first and second contact electrode groups.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention. As the wiring sheet described above, a film with wiring such as a COF (Chip On Film) tape or a TAB (Tape Automated Bonding) tape can be appropriately used instead of the flexible printed wiring board (FPC).

DESCRIPTION OF SYMBOLS 10 Test apparatus 12 Inspected object 14 (14a, 14b, 14c) Electrode 26 Probe apparatus 34 Probe block 36 Support plate 38, 60 Wiring sheet 40 Elastic member 46 Concave groove 48 Thermal expansion suppression means 50 Electrical insulation film 52 Wiring 54 ( 54a, 54b, 54c) Contact electrode 56a, 56b, 56c Virtual line

Claims (12)

A probe device for electrical inspection of an object to be inspected, which is supported on a back surface by a support base and provided with electrodes on the front surface,
A probe block having a front end surface and a plane intersecting the front end surface, the probe block being supported with the plane facing the support base so that a front edge constituted by the both faces is positioned above the support base;
A support plate disposed on the plane of the probe block and fixed to the probe block on one side and protruding from the front edge of the probe block;
A plate-like elastic member provided on at least a portion of the support plate protruding from the front edge of the probe block and fixed to the other surface of the support plate;
A wiring sheet having a strip-shaped electrically insulating film, a plurality of wirings formed on one surface of the film at intervals in the width direction of the film, and contact electrodes rising from the respective wirings. A wiring sheet having the other surface supported by the flat surface of the probe block via the elastic member and the support plate, and having an extending portion protruding from the front edge of the probe block together with the elastic member and the support plate; Including
The contact electrodes are located in the extending portion of the wiring sheet, and the contact electrodes provided on the adjacent wirings are arranged with a shift in the longitudinal direction of the film so as to correspond to the electrodes of the object to be inspected. Has been
Moreover, the angle which the said extended part of the said wiring sheet and the surface parallel to the said surface of the to-be-inspected object make is set to an angle smaller than 10 degree | times.   2. The probe device according to claim 1, wherein the angle formed by the extending portion of the wiring sheet and a plane parallel to the surface of the object to be inspected is 1 degree or more and 5 degrees or less.   The probe block is provided with an inclination in the plane by gradually increasing the plate thickness toward the front edge, whereby a plane parallel to the extended portion of the wiring sheet and the surface of the object to be inspected. The probe device according to claim 1, wherein an angle formed by is set.   The probe apparatus according to claim 2, wherein a length of a portion where the support plate, the elastic member, and the wiring sheet protrude from the front edge of the probe block is 1 mm or more and 2 mm or less.   The extending portion of the wiring sheet is deformed so as to be in a substantially horizontal state with deformation of the elastic member and the support plate when the contact electrode is pressed by the corresponding electrode of the object to be inspected. The probe device according to claim 1, which is possible.   The contact electrodes are arranged on a first virtual straight line of a pair of virtual parallel straight lines extending in the width direction of the film at intervals in the longitudinal direction of the film in the extending portion of the wiring sheet. 2. The probe device according to claim 1, comprising: a plurality of contact electrode groups; and a second contact electrode group aligned on the other virtual line of the pair of virtual parallel straight lines. The probe device according to claim 6, further comprising a third contact electrode group aligned on a third virtual line parallel to the pair of virtual parallel lines.
The probe apparatus as described.   The probe device according to claim 1, wherein the support plate, the elastic member, and the wiring sheet are transparent.   The probe according to claim 1, wherein the support plate is bonded to the surface of the probe block with an adhesive, and a concave groove is formed on the surface to accommodate an excess of the adhesive. apparatus.   2. The probe device according to claim 1, wherein the wiring sheet is provided with thermal expansion suppression means for suppressing thermal expansion deformation of the film in order to suppress a change in the interval between the wirings due to thermal fluctuation. .   The probe device according to claim 10, wherein the thermal expansion suppressing means is a plate-like member that is fixed to the film with an adhesive and has a lower thermal expansion coefficient and higher rigidity than the film.   The plate-like member is interposed between the support plate and the wiring sheet following a rear end opposite to a protruding end of the elastic member protruding from the front edge of the probe block. The probe apparatus as described.

Images