TWI277740B - Probe assembly - Google Patents

Abstract

This present invention provides a probe assembly which is tightly pressed in a needle region of an electrode of object to be tested and despite an easily deformed form, damage of a slit rod while subjecting to an overloading condition. The probe assembly of the present invention employs a guide bar extending along an alignment direction of the probe assembly to support the probe in a support body for placing a needlepoint region at tip side of the probes in a slit of the slit rod so as to place a flexible body extending along the longitudinal axis of the guide bar between the probe and the support body or the slit rod. Thereby, since the probes are pressed against the guide bars by the elastic body, there's no gap between the probe and the guide bar, with respect to the guide bars, is eliminated and tilting of the probes can be prevented.

Description

[Technical Field] The present invention relates to a probe assembly used for inspection of a flat object to be inspected such as a liquid crystal display panel. [Prior Art] One of the probe assemblies used for inspection of a flat object to be inspected such as a liquid crystal display panel has a sheet shape (a belt-shaped mounting region (central region), and a front end and a rear portion from the assembly region a plurality of probes (contactors) extending to the front and the rear respectively, and the width direction of the assembly areas is in the up-and-down direction, so that the assembly area is opposed to the support body ( Block) is arranged side by side (Patent Document 丨). Patent Document 1: Japanese Patent Application Laid-Open No. Hei No. Hei-132853 discloses that a needle is attached to a support by one or more elongated guide rods extending through the assembly area and supported by the support body, and And the second needle tip region is accommodated in the plurality of slits, and the plurality of slits are respectively disposed on the front end side and the rear end side of the support body, and the first and second slit rods extending in the longitudinal direction of the guide rod Upper, along the long axis direction of the slit rods are formed at intervals. *Different 1 needle tip area 'The thinner the front end side, and the tip of the needle to the lower end of the dog.帛 2 needle tip area, the thinner the rear end side, and the rear end and the needle tip protruding upward.探针 The probe assembly is placed on the inspection device with the tip of the 2 4f + ρ a ^ ^ needle too Q domain pressed against the wiring for energization. When the test object is energized, the tip of the needle tip area is pressed 5 J277740 to the electrode of the object to be inspected. Thereby, the i-th tip region is bent by the overdrive (0D) acting thereon, and the tip of the needle is slid over the electrode of the object to be inspected. Since the blade type probe is fabricated by lithography or etching technology, it is advantageous in that the probe having the same function can be manufactured with high precision, in a large amount, and at low cost. However, in the above-mentioned conventional probe, since the gap between the probe and the probe through which the guide rod is inserted cannot be completely eliminated, the probes may be inclined to the length of the guide rod due to the overload. Axis direction. As a result of the above, the first needle tip region is irregularly deflected, and the first slit is pressed by foreign matter such as glass frit adhered to the test object or the probe assembly, so that the slit rod is partially formed, in particular, narrowly formed. The next wall of the seam is broken or the needle tip area is broken. In particular, if the electrode of the object to be inspected is IZ0 (Indium Zine 〇xide): 乍w field overload effect, the needle tip of the tip region is easy to slide on the electrode: because 匕 'in the conventional probe' is caused by The amount of bending of the second tip region of the overload is large, and the partition wall is more likely to be broken.九 ^Results In the past, it is necessary to frequently perform an object to be inspected or a probe group. [Explanation] The object of the present invention is to prevent breakage of the slit rod during an overload. The probe tip portion of the electrode pressed against the object to be inspected has a shape that is easily deflected, and prevents the probe assembly of the present invention from containing the support body; the plurality of probes, the 6 'I277740 has a strip-like assembly a region, and a band Μ ^ ^ ^ ^ L t large & field extending from the front end of the 羞 奘 1 1 且 且 且 且 且 且 且 且 : : : : : : ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ The direction of the visibility is the up-and-down direction. The assembly area is opposite to the support limb. The plurality of probes are arranged side by side, and the rods are arranged in the assembly area to the abundance of the beans. The θ degree direction extends and is supported by the support f, and the slit # is disposed on the front end side of the support body and extends along the long axis direction of the slit rod, and has a space spaced apart along the long axis direction thereof and is opened downward: a plurality of slits; and at least one elastic body disposed between the probe narrowing rod or the support body, and extending along the long axis of the slit rod to make the needle tip region Stored in the slit. The probe used in the probe assembly of the present invention has the lower edge of the projection as a contact portion to the electrode of the test object. Such a probe is because the width of the tip region is smaller than the width of the assembly region, so that it is easy to bend. However, in the probe assembly of the present invention, since at least one elastic body extending along the long axis direction of the slit rod is disposed between the probe and the slit rod or the support body, each probe is elastically tight. Press on the guide rod to offset the gap between each probe and the rod. Therefore, even if the probe is overloaded, the probe can be prevented from tilting the support or the slit rod to the long axis direction of the guide rod, and as a result, the irregular curvature of the needle tip region can be prevented, and the slit rod can be prevented. Breakage or breakage of the tip Z domain. The elastomer may also be disposed between the slit rod and the tip region. Therefore, since the tip region can be in contact with the elastic body, the deflection of the needle tip region caused by the overload can be prevented by the elastic body. Therefore, it is possible to more reliably prevent the breakage of the partition wall of the slit of the slit beam formed by the 7 J277740. The slit rod may further have a recess extending in the longitudinal direction thereof to open downward, and the elastic body is disposed in the recess. The elastomer may also be disposed between the assembly area and the support. At least two of the elastic bodies may be included, an elastic body is disposed between the slit rod and the needle tip region, and another elastic body is disposed between the fitting region and the support body. Thereby, since the needle tip region comes into contact with the elastic body, the deflection of the needle tip region caused by the overload can be prevented by the elastic body. Therefore, it is possible to more reliably prevent the breakage of the partition wall forming the slit of the slit rod. The slit rod may further have a recess extending in the longitudinal direction thereof to open downward, and an elastic body may be disposed in the recess. At least two 哕 elastic bodies spaced apart along the long axis direction of the probe may be included, and the two elastic bodies may be disposed between the assembly region and the support. The tip region may include: a third region extending from a front end of the assembly region; and a second region extending from a front end of the second region, and/or a hole from a lower edge of the skirt region The protrusion below it. The first region may include a U-shaped notch portion that opens upward. In this case, the width of the notch portion forming portion of the second region may be made smaller than the width of the other portion. Thereby, the needle tip region has a shape that is more easily bent at the notch portion: the formed portion. The width dimension of the notch portion forming portion of the first region may be smaller than the width dimension of the other portion. The second region may further include a second recess 8 -1277740 开口 that is open upward, and is located at a portion where the protrusion portion is formed, and the enthalpy is stored in the 筮, and the elastic body is formed by the h needle. Notch. Replace the shape of the above...TM^(4) to the downside. The more the portion is inclined toward the front end, the larger the exit 彳 can be formed so as to be on the lower side. Thereby, the protrusion 2 is provided, and the front end side is provided to be electrically connected to the lower end of the object to be inspected.

It is stronger from the front side of the protruding portion to the upper end side of the lower side, and the length of the long gentleman's length of the assembly area including the convex portion is spaced apart, and the guard position is toward the front end. The squat and the needle are tilted and the convex portion has a lower end surface. The squeegee may be the third e ϋ 1 of the 隹 ... 乂 备 备 备 备 第 第 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 「 The tilt is more toward the front of the slit. The dream: the needle can also make the front end protrude from the position of the electrode. Gu Yi confirms the needle tip from the top to the body to be inspected. w and w has a long 0-shaped shape, and the protrusion is formed at the headquarters before the T7 long 囡 shape. In this case, the 帛2 region may have a square side toward the first region side. The front end surface is inclined. In this case, σ ' may be misplaced by placing the probe on the slit rod', and the position of the needle tip to the electrode of the test object can be easily recognized from above. The second region is also inclined before the front side of the region side In this case, the portion of the upper side may be toward the summer portion, and the probe may protrude the front end surface from the slit by disposing the probe on the slit rod. ^77740 *Easy to confirm the position of the tip of the needle to the electrode of the object to be inspected from above. The tip end of the tip area is downward. [Embodiment] In the case of the invention, the width direction of the assembly area is referred to as the up and down direction, and the pair of clothes and the placket area are pressed against the electrodes of the object to be inspected by the needles w and EH. The side of the large area of the needle of the m+ potential is called the side of the needle tip of the front wiring. The side of the needle is called the rear end side. However, when the tooth and the needle assembly are used, the width of the assembly area can also be made wide and horizontal... c + A is used when the degree direction is oblique or 1 is up and down. i, day, ?, Fig. 1 to Fig. 3, probe assembly 1 〇# #册卞υ系系·块块 Supporting body 12 · a plurality of probes 14 in a flat shape, juxtaposed, long m is arranged on the lower side of the support body 12; a fine needle, a gum needle 14; a pair of slit rods 18, a part of the storage probe, 'long guide The cover guiding member 20 is used for stabilizing the position of the needle tip on the side of the probe 14; and a support body 12. The sub-side 22 is used to support the guide rod 12, on the upper side There are screw holes 24 and a pair of guide holes ", sub: each side: side has - opposite guide holes 28. Below the support body 12, as shown in Fig. 精, the plurality of segments are stepped. Support & can be no

The so-called non-guided lightning-emitting S metal material, ceramic or synthetic resin is produced. Each of the probes 14 has a mounting area 30 as shown in Fig. 2 and the upper part of the circle, and the assembly area 30 is used as a V-shaped central area for the field and the magnetic field. 34, from the assembly area 3〇 & J and the rear end respectively extend further forward and rearward. The splitting area 30 has a guide hole 36 penetrating the guide rod 16 in each of the long-term (four) soils, and 1277740 is located between the guide holes 36 and has an ancient long H, which has a plurality of long holes 38 extending through the skirting area. The portion of the long axis direction of 30 is spaced apart. Each of the elongated holes 38 extends in the longitudinal direction of the fitting region 3〇 at intervals in the longitudinal direction of the fitting region 30. In the example of Fig. 7F, each of the guide holes 36 is formed in a circular shape, but may be formed in accordance with the cross-sectional shape of one turn. Also, the guide "dry wipe Μ ^ ^ ^ 蜍 36, can also be formed in the assembly area Β in the long axis direction of the other parts of the interval, can also be extended with the long axis of the area 30 ^ ^ clothing, 狎 long hole . The case of the right side of the latter may also be formed as a long hole extending through the long hole 38. The tip region 3 2 and 3 4, the male rk strong nr r- ia mountain ^ knife is extended from the long axis direction of the assembly area 30 to the upper edge and the lower edge of the other end to the front and the rear, and 1 A width dimension that is smaller than the width of the assembly area 30. One - needle large area 32 ‘ contains: the first! The region 4A extends forward from the end portion of the assembly area %; the second region 42 extends forward from the ^ portion; and the third region 44 extends from the front side of the 〇〇3. In the front end portion, the front end portion has a U-shaped notch that is opened upwards = 46', and the base end portion (portion on the side of the mounting region 3) has a lower opening. Arcuate notch 48. The width of the portion where the notch portions 46 and 48 of the first region 40 are formed is smaller than the width of the other portions of the region i. The portion where the first region such as the notch portion 46 is formed protrudes slightly downward from the lower end edge of the mounting region 30. The second region 42 has a protruding portion 5 117 which is lower than the lower edge of the skirting region 3 12, and has an arcuate notch that opens to the opening of the dog in the part where the dog is formed at 5 〇. Part 52. Highlight the direction below. ...the lower side of the 5" is the lower end surface 54 of the inverted trapezoidal projection 50, and the water is turned on the electrode of the same -々η士体, and the 例 例 例 例 例 例 例 例 例 例 例 例 使 使 使Check the contact of the f-pole of the body. However, the power at the lower end is tilted upwards (for the horizontal:: the more the front end side is, the more the angle is inclined by 0 degrees). In this case, the lower end face; the portion acts as a contact portion to the electrode of the test object. The square ί & field 44 ′ has a front end surface 56 that is inclined toward the second region 42 side at the upper side. The needle large area 3 4 '嫂立卩» becomes a sharp point..., as shown in Fig. 2, it is curved upwards, and u is right when the eucalyptus needle 14 is viewed from its thickness direction, the needle big 34a has a triangle The shape. The X4 series applies the original shape of the metal plate with weak conductivity to the work of the probe, J: Ge, recognizes # π 风休^ in the original shape of the 5th, and uses the electro-technical material such as polyimine material.钍 && , a coating layer formed outside the tip of the squid needle, thereby making. However, the probe 14 can also be fabricated using lithography and electrominening techniques. The needle 14' is placed in the up-and-down direction in the width direction of the assembly area; or the width direction of the 3' is aligned, and the mounting area 30, the guide hole 36 and the long hole 38 are opposed to each other, and are arranged side by side on the lower side of the support 12. Each of the guide members 16 has a circular cross-sectional shape and is formed of a # conductive metal material in the illustrated example. Each of the guide rods 16 is squeezed into the guide hole 3 6 of the probe 14 and is joined to the side cover 22, thereby being mounted on the support body 1 2 with the side cover 22 group 12 * 1277740 . Each slit rod 18 has a plurality of slits 60 that are axially elongated. Each of the slits 60 has a width which is substantially the same in a predetermined pitch shape and extends to a span of ft. The slit rod 18 on the front end side in the width direction of 18, and the groove-shaped recess 62 in the (four) square opening. Extending in the direction of the concavity and downward in the recess 62, a rod shape is arranged so as to partially protrude from the slit 6〇 to form a state of being stretched in a narrow shape.仵丨8 Long-axis direction extension In the illustrated example, the recess 62 has a semi-circular shape with respect to the ::14 direction of the probe 14, and the bullet (four) 64 has a circular cross-sectional shape. ::?, the notch portion 52, the recess 62, and the elastic body ... may have other shaped slit bars 18 which may be made of a non-conductive material such as Tao Jing. Further, each of the slits 60 can be formed after the slit rod 18 is attached to the support 12 . The slit rod 18 having the recess 62 extends in the direction in which the probes 14 are arranged, and is adhered to the lower side of the front end of the support 12 with the slit 60 facing downward. Further, the slit rods 18' extend in the direction in which the probes 14 are arranged, and are adhered to the lower side of the rear end of the support 12 with the slits (9) facing downward. However, each of the slit bars 18 may be attached to the support 12 by means of one or more screw members or by distraction. In each of the probes 14, the front end surface 56 protrudes in front of the slit rod 18 on the front end side, and the needle tip 34a protrudes from the slit 6 of the slit rod 18 on the rear end side to the state of 13 1277740, so that the needle tip region 3 side The slit 60 of the slit rod 18. It is not stored in the front end side and the rear end: the above-mentioned state 'elastic body 64' is a notch portion 52 which is partially received in the region 32. The fine work, the narrow slot of the slit 60 of the large slit 18, Μ ^ ^ ^ · 幵, the lower face, the 5 4 series protrudes from the front

It is below the slit 6 of the slit rod 18 of the known side.孓月J has a cross-sectional shape of the shape of the ^, and is on the side of one of the l-words. The knives have a plurality of scallops 66 spaced apart along the long axis of the guide frame 3 U. The non-conductive (four) film of the guiding member 2〇 is formed by the amine material 。. The shell hole 66 can be laser-processed to guide the member 20, and the needle tips are on the other side of the L-shape. : The "mode" state of the perforation is extended by the arrangement of the plurality of screws in the direction of the rear end of the end face. The B t is mounted on the support 12 and mounted on the support body = ^ the guide member 2G is embedded The side cover 22 =: ... member 2 is formed, and is attached to the side of the support body 12 by a plate member having a side shape of the guide lock 12 - the screw member 72 is detachably freely Guide =: End 2 = Output is formed in the support body 12. The guide lock 70 can also be fixed to the side cover 22. Two holes. However, the through hole of the end of the 16 is now. In the figure, the two guide rods are arranged in such a way that the adjacent probes 14 are arranged at a large interval, but the actual pitch is 4 and the pitch is arranged. The pitch is small. The thickness of the probe is the type of the body to be inspected. _ = the pitch and width dimensions of the slit (9) are different. In particular, the probe assembly depends on the pitch and width of the electrode. 1 A y ' is equipped with the following steps: ugly 18 and the guiding member, and the first one of the two slits is 1200, and the probes 14 are placed on the support 12 in the state described above. Inserting the slit 60 of the slit rod 18 at both ends of the needle tip 34, and inserting the needle into the through hole of the guide member 2 will pass through the probe 14 and the V pin 16 The support body 12 is inserted into the support body 12, and then the guide pin 70 is inserted into the side cover 22 and the side sill 22 to insert the end of the material pin 16 into the side cover 22, and then the screw member 72 is assembled to the support body by the screw member 72. 12. The needle 14 and the guide lock 16 are permeable, and each probe M is supported by the support body 12 in its thickness direction. (4) The shape of the long axis of the cymbal, etc. I:: the state of the group The probe 14 is arranged side by side in a pattern accommodating the arrangement pattern of the electrodes τ ® 俨 12 ... of the liquid crystal display panel 4 to be inspected, and the needle tip is out. The dog is protruded rearward and upward by the slit rod 18 and the dog is above the guiding member 20. Further, the needle tip of each probe 14 is returned to the shirt! 〇,,, „ 卞大超域32, although narrow from the front end side The slot of the cup 18 is 6 inches, and the scorpion is 4" force one - the abutment portion 52 is abutted against the elastic body 64. When the sewing rod is assembled in the front of the inspection device, when it is assembled in the inspection device, the wooden needle is probed, and the member 10 is slightly over pressed against the TAB belt with the needle tip 34a (to the first, the production of Lu_w-u In the state of the wiring for energization, it is assembled in the device. In this case, each of the sized needles 14 has a width of 15 • 1277740 which is smaller than the width of the & area 30, and therefore is curved in an arc shape, and the tip 34a is surely in contact with the wiring for energization. When the probe assembly 10 is assembled to the inspection device, the probe assembly 10 is positioned to the inspection device by inserting the guide pin of the guide hole 26 shown in FIG. 1 and by the screw member screwed to the screw hole 24. And disassembled and assembled easily in the double check device. However, the probe assembly 10 can also be assembled to the inspection device by other methods and other mechanisms. The exchange of the cymbal 14 removes the probe assembly from the inspection device, detaches the side cymbal 22 from the support body 12, pulls out the guide rod 16, disassembles the sputum needle to be exchanged, and replaces the new probe with the support body. 2. The probe assembly 10 is then assembled in the manner described, and the probe assembly can be assembled to the inspection device. Therefore, the exchange of the probe becomes easy. At the time of the check, the probe unit i and the object to be inspected are in such a manner that the lower end surface 54 and the electrode of the object to be inspected are in a state of being identical, so that the lower end surface 54 is slightly excessively I. At this time, since the front end surface 56 protrudes from the slit 6 幻 magic square, it is easy to confirm the position of the needle tip to the electrode of the test object from the upper valley. When the field lower end surface 54 is pressed against the electrode of the object to be inspected, an overload (〇ver drive OD) acts on the probe 14. Each of the probes 14 is easily bent in the needle tip region 32 due to the above-described overload due to the visibility of the tip region u, in particular, the width of the notch portion 46 is smaller than the width of the fitting portion 3'. However, in the probe 14, the tip end region 32 is separated from the groove bottom of the slit 60 of the slit 182 of the leading end side, and the notch portion 52 abuts against the elastic body 64. Therefore, the bending of the tip end portion 32 caused by the overload can be blocked by the elastic body 64 16-1277740. ^ As a result, since the deformation of the needle tip region 32 can be prevented, the lower end surface "when the contact of the corpus callosum is in contact with the W:: the amount is also small. Therefore, the sliding amount of the lower end surface: the action of the sputum β is small" The needle 14, even if it is subjected to an overload, is close to the object to be inspected, and the breakage of the slit 60 which forms the slit rod 18 due to the W can be prevented. 14 and again, the elastic body 64 is pressed against the guide rod 16 14 The gap between the guide rods 16 on the side, thereby preventing the probe 14 from being narrowed to the support body 12 or the front end side even if the probe slit is produced, and the 4'18 is inclined to the length of the guide rod 16. Axis direction: Death 2::, 旎, to prevent irregular deflection of the needle tip region 32, and indeed the damage of the slit rod 18 on the heart side or the breakage of the needle tip region 32. The lower side surface is formed as an inverted trapezoid The protrusion may be replaced by a protrusion of another shape. The T is inclined by the protrusion # shown in Fig. 4. The portion of the lower portion is inclined toward the front end side toward the front end side; The horizontal plane is only used as the contact portion. Thus =' and the far lower end surface 82 is the part of the ^^^. Large exit Ρ Μ, if it is tight When the electrode of the body is inspected, the two can be electrically connected. The probe 14 shown in Fig. 5 is in the second region & or 3. The rear of the long axis (or in front) Out: The convex part is inclined in the same way as the protruding part 8〇. The more the side is toward the lower end of the front convex part 84; ^ Λ the lower side 86, the horizontal plane only faces the front end side upwards 17 ^ 1277740 square tilt 0 2 angle. 0 2, can also be different from /, ci, or different. The probe 14 shown in Figure 6, in the 箆9, brother 2 area 42 has an oblong shape 'protrusion The 88-series is formed at the front end of the oblong shape. The protrusion "underside: the surface 9" is inclined so that the horizontal plane faces downward toward the front end side, and the front end serves as a contact portion with respect to the electrode of the test object. In the illustrated probe, the 3 and 侑 3 regions are not provided. Therefore, the 刖 end face 56 of the 八 1 1 贝 , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In any of the embodiments of FIG. 3 and FIG. 5, the third region 44 may not be provided, and the front end surface 56 may be formed in the second region. Further, in FIG. In any of the embodiments of FIG. 6, the front end surface 56 may be inclined so as to be toward the first region 40 at the upper side. In any of the embodiments of FIG. 3 to FIG. The portion _ becomes a rectangular cross-sectional shape' and uses an elastic body having a rectangular cross-sectional shape corresponding to the cross-sectional shape of the notch portion. Further, in the embodiment of Fig. 6, the concave portion may be formed into an arc-shaped cross-sectional shape, and used. An elastic body having a circular cross-sectional shape corresponding to the cross-sectional shape of the notch portion. 7 When the probe 14 shown in Fig. 6 is used, as shown in Fig. 7, the 5 early body 94 and the notched portions 46 and 48 are as shown. The probe assembly 10 shown in FIG. 8 can arrange not only the elastic body μ between the needle tip region 32 and the slit rod 18 on the distal end side but also the elastic body % in the central region 30 of the probe 14 and the support body 12. Between the following. The 疒 body 96, in the illustrated example, is made of a rubber such as an anthrone rubber: a plate shape.衣1下18 -1277740 As described above, when a plurality of elastic bodies 64 and 96 are arranged at intervals in the probe μ-axis direction, _ 14 is pressed on the rear end side by the guide rod 16 so that it can be surely prevented. tilt. In addition to arranging the elastic body 6 4 between the obliquely-shaped ρ ΞΓ 1 pin large area 32 and the front end of the slit rod 18, as shown in FIG. 9, the two elastic bodies 96, 96 may also be along the length of the probe 14. The axial directions are disposed between the probe 14 and the support 12 at intervals.

Further, as shown in FIG. 1G, two elastic bodies 96 and 96 may be disposed between the probe " and the support body n at intervals along the long axis direction of the probe 14, and the other elastic body 98 may be used. The rubber material such as ketone rubber is formed into a plate shape and disposed between the needle tip region 32 and the slit bar. Further, as shown in Fig. 11, an elastic body ι having a width dimension substantially equal to the length dimension of the central region 30 may be disposed between the probe 14 and the support 12. The elastomer 1 is also formed into a plate shape by a rubber material such as a rubber. Even in any of the embodiments of Fig. 9, Η 10 and Fig. u, the probe 14 is pressed against the guide rod "and the cymbal" on either the front end side and the rear end side, so that the tilt can be surely prevented. However, as shown in Fig. 12, the elastic body 96 may be disposed only between the central portion 30 of the probe 14 and the lower surface of the support body 12. In addition to using a circular shape such as an elastic body 64, 96, 98, 1 , etc. The elastic body of the rectangular cross-sectional shape may also be an elastic body having a semicircular shape, a hexagonal shape, an oblong shape, an elliptical shape, or the like, and other cross-sectional shapes. In the embodiment shown in Fig. 13, a semicircular cross section is used. Shaped Elastomers 01. 19 -1277740 For the probe 12 of the embodiment shown in Figures 9 to 13, the tip region 32 has a width dimension smaller than the width of the central region 3〇, but the tip 32a is The front end of the needle tip region 32 is bent downward. Further, the probe I used in the embodiment shown in Figs. 9 to 13 does not have the long hole 38' in the central portion 30, but the long hole % can be formed. In the central area 30.

The present invention can be applied not only to a liquid crystal display panel but also to a probe and a probe assembly for inspection of other flat-shaped test objects such as a glass substrate or an organic EL panel. The present invention can be applied not only to a needle and a needle assembly used for a display panel such as a liquid crystal display panel or an organic EL, but also to a probe and a probe for inspection of other flat specimens such as an integrated circuit. Component. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a probe assembly of the first embodiment of the probe assembly of the present invention. Fig. 2 is a longitudinal sectional view of the probe assembly shown in Fig. 1. Fig. 3 is an enlarged longitudinal sectional view showing the vicinity of the tip end region on the front end side of the first embodiment shown in Fig. 1. Fig. 4 is an enlarged longitudinal sectional view showing the vicinity of a tip end region on the end side before the second embodiment of the probe assembly of the present invention. Fig. 5 is an enlarged longitudinal sectional view showing the vicinity of a tip end region on the end side before the third embodiment of the probe assembly of the present invention. Fig. 6 is an enlarged longitudinal sectional view showing the vicinity of a tip end region on the end side before the fourth embodiment of the probe assembly of the present invention. 20 -1277740 Fig. 7 is an enlarged longitudinal sectional view showing the vicinity of the tip end region on the end side before the fifth embodiment of the probe assembly of the present invention. Fig. 8 is a longitudinal cross-sectional view showing a sixth embodiment of the probe assembly of the present invention. Fig. 9 is a longitudinal cross-sectional view showing a seventh embodiment of the probe assembly of the present invention. Fig. 1 is a longitudinal cross-sectional view showing an eighth embodiment of the probe assembly of the present invention. Figure 11 is a longitudinal cross-sectional view showing a ninth embodiment of the probe assembly of the present invention. Fig. 12 is an enlarged longitudinal sectional view showing a tenth embodiment in the vicinity of the tip end region on the front end side of the probe assembly of the present invention. Fig. 13 is an enlarged longitudinal sectional view showing the eleventh embodiment in the vicinity of the tip end region on the front end side of the probe assembly of the present invention. [Main component symbol description] 10 : Socket component 12 : Support body 14 : Probe 16 : Guide bar 18 : Slit bar 20 : Guide member 22 : Side cover 30 : Center area 32 > 34 : Tip 21 .1277740 40: first region 42: second region 44 third region 46, 48: notch portions 50, 80, 88: protruding portion 52: notch portion (second notch portion)

54, 82, 86, 90: lower end face 60: slit 62, 92: recess elastic body 64, 94, 96, 98, 100, 102: 66: through hole 84: convex

twenty two

Claims (1)

-1277740 and dispose the elastomer in the recess. 7. If applying for a patented rib diagram, the needle assembly having a uranium formula includes at least two of the elastic bodies along the long axis direction of the wood needle, and the two elastic bodies are disposed at The assembly area is between the support and the support. 8. The probe assembly of claim 1, wherein the needle small & field comprises a 'different 1 region' from the front end of the assembly region to the second region 'from the ..., the front end of the domain Extension, and with Jebbi The lower edge of the matching area protrudes downward from the protruding edge. 9. The probe assembly of claim 8, wherein the first region has a U-shaped notch that opens upward. The probe assembly of the ninth aspect of the invention, wherein the width dimension of the portion of the notch portion of the L-th region is smaller than that of other portions. 11. The probe assembly of claim 8, wherein the first region includes a second notch portion that opens upwardly and is located at a portion where the second portion is formed; the probe is The portion of the elastic body is housed in the second notch portion. 12. The probe assembly of claim 8, wherein the underside of the protrusion is formed as a downward facing surface of the inverted trapezoid. The probe assembly according to the eighth aspect of the invention, wherein the protruding portion is inclined such that the portion on the lower side thereof is toward the front end side, and the upper end surface is provided toward the upper end side. The probe assembly of claim 13, wherein the protruding portion further comprises a convex portion that is inclined toward the front end side along the long axis 24-1277740 of the fitting portion; the convex direction is separated a portion of the portion that is spaced apart from the lower side, and has a front end surface that is higher toward the front end side. The vibrating needle assembly of the eighth top + ^ 乐 Le 8 item of the patent application range, wherein the probe further includes In the third region, the third region in which the crotch portion extends, and the Hedi 3 region, has a sigma position which is inclined toward the second region side by the σ position of the upper side + 1 彳j. ^ , , 十使 "玄玄螭面 prominent in the month of the slit *J Wan 16. If the second area of the patent application area has an oblong shape, the previous creeping portion. 8 item 4 wooden needle assembly, wherein the first protruding portion is formed in the oblong shape 17. As in the patent application range 62, and the right is the 赭μ+ 铋 needle assembly, wherein the first tilting : The side of the square side is on the side of the side of the 帛1 area. And the money pin makes the front end surface protrude from the slit of the # needle 18. Into - as in the patent application, step δ has a probe assembly from the tip region, wherein the probe tip protrudes downward from the w-end. XI, schema·· as the next page 25