TWI325963B - - Google Patents

Description

[Technical Field] The present invention relates to a probe assembly for use in inspection of a flat object to be inspected such as a liquid crystal display panel. [Prior Art] As a check for a flat-shaped object to be inspected, such as a liquid crystal display panel, the 'a package' has a plurality of probes (pieces) having a flat type (Patent Document No.) It has a strip-shaped mounting area (central area), and first and second tip end regions extending forward and rearward from the front end and the rear end of the mounting area. In the probe assembly, each probe is a board. The members are disposed so as to be spaced apart from each other in the thickness direction, and are disposed below the support. Further, the probes are electrically insulated by the guide holes penetrating in the thickness direction and through the support members. Supporting rods made of materials are supported by the respective tip regions of the probes, which are formed by slits formed in the respective slits (arranged at the front end and the rear end of the support) and open downward The groove is disposed by the slit grooves of the slit rod, and the needle tips are arranged to protrude downward from the front edge of the slit rod. During the inspection, the tip of each probe is pressed against the object to be inspected. The electrode of this phlegm To make sure that the electrical contact is made, the contact is applied to each of the probes, and the pressing force of the needle to the area of the needle is slightly driven, that is, the overdrive is 6. The top of the slit slot of the slit-slit rod is It is set that the probe does not have a driving force but interferes with the top. When the overdriving force acts on each probe, the force is absorbed by the support rod formed through the guiding hole of the probe. The fine electrode pitch of the electrode corresponds to the probe assembly, and the number of probes arranged corresponding to the number of electrodes is over-supported (four) is supported by the support body, and the force acting on the support rod is increased by A, such as 4匕 will cause deflection deformation. When such a flexural deformation occurs in the support rod, the through hole forming the second needle and the support rod passing through the through hole may act due to manufacturing errors. The overdriving force of the probe causes the probe to produce a twisted deformation of the probe caused by such distortion, which may make it difficult to set a uniform and appropriate overdrive force of each probe, and may cause the probe to be used. Damage to the slit rod of the slit groove. Document 1] Japanese Patent Laid-Open No. Hei 10-132853. Therefore, the applicant of this application filed a proposal to arrange the elastomer in the probe and the support. Between the two, in order to suppress the deflection deformation of the support rod when the above-mentioned overdriving force is generated. Thereby, the elastic body can suppress the deflection deformation of the support rod caused by the penetration of the probe, and it is still desired to be more sure Therefore, the flexural deformation of the support rod caused by the overdriving force is prevented. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an over-driving force through a support rod formed of an electrically insulating material to act on a supported 9 support. In the case of a probe, an electric device capable of reliably preventing flexural deformation of the support rod is further provided. The present invention is a probe assembly comprising: a plurality of W25963 solid probes, a support body, and a strip-shaped tip region having a strip-shaped mounting region and a width dimension extending from a front end of the t-mounting region toward the front and having a width smaller than a width dimension of the mounting region, on the lower side of the support body, the Anchang area Opposite and side by side arranged in a state of up-and-down direction in the width direction of the mounting area; an elongated support rod extending along the thickness direction of the mounting area = extending through the mounting area and supported by the support; a narrow, buckle, which is disposed on the front end edge P of the support in the longitudinal direction of the support rod, has a space in the longitudinal direction of the slit rod, and is open to the lower side, and protrudes from the edge of the t by the tip of the needle Receiving a plurality of slit slots corresponding to the needle portion of the probe; the slit rod or the support body is provided with a rigid fulcrum at which the probe abuts the leading edge of the slit rod Connected to the top of the slit groove, abutting the probe to limit deformation of the probe. According to the present invention, since the rigid fulcrum provided on the slit rod or the support does not prevent proper elastic deformation in the needle tip region due to the overdriving force of the probe, at least a portion of the strain is subjected to the probe. Since the needle has a driving force, it is conventionally known that the external force does not act on the support rod supporting the probe, and the deflection deformation of the support rod thus caused can be surely prevented. Therefore, according to the present invention, it is possible to reliably prevent the distortion of the probe due to the deflection deformation of the support rod and thus the distortion caused by the tolerance of the through hole of each probe and the support rod penetrating the through hole. Damage or breakage of the partition wall of the slit rod caused by deformation. Thereby, the deviation of the height position of the tip position of each probe can be more effectively suppressed, and a stable electrical connection of all the probes can be realized even if it is used for a long period of time. A gang m fulcrum can be formed on the trailing edge portion of the top Z of the slit groove of the slit rod. Therefore, the rigid fulcrum can be set to the needle of the probe. By setting the rigid fulcrum near the tip of the needle, the tip of the probe can be caused by the high driving force. Consistent displacements are more advantageous in finding the electrical contact of all probes. Forming a flat surface portion in a segment shape with the remaining portion of the top surface of the top surface of the slit rod, and forming the flat between the mounting region and the needle tip region The section opposite the face. At this time, the flat surface portion abutting on the segment is configured as the rigid fulcrum. When the flat surface portion abuts the segment portion, the remaining portion of the top surface of the slit rod except the flat surface portion is spaced apart from the corresponding needle tip region of the probe, and This maintains the appropriate amount of elastic displacement of each probe due to the driving force. The flat surface portion of the slit rod is formed as a step surface below the remaining portion. The portion of the probe portion is formed as a step surface above the top of the needle tip region. Alternatively, the flat surface portion of the slit rod may be regarded as a step surface located above the remaining portion instead of the above. At this time, the step difference of the probe facing the step of the slit rod may have any difference of the step of the downward or upward step as a step, or the step of the probe may not be required. The top surface of the slit groove of the slit rod may be formed from a straight flat surface of the slit rod to a straight flat surface of the trailing edge, and the probe may form an orientation between the mounting region and the needle tip region The convex portion 8 1325963 portion of the flat surface portion. At this point the fulcrum. The portion opposite to the segment of the top surface is configured as the rigidity. The portion of the support portion that supports the rigid configuration can form a segment fulcrum below the support body. The slit rod side provided in the needle tip region abuts against the probe. The portion of the support can be formed by protruding downward along the slit rod.

Further, the probe may form a segment formed in a flat surface between the mounting region and the tip region and abutting the segment of the support. According to the present invention, One of the overdriving forces of the probe, by the support of the rigid fulcrum, can effectively prevent excessive deflection of the probe from being generated by the deflection of the probe. Therefore, it is possible to surely prevent the deformation or breakage of the partition wall of the slit rod caused by the distortion deformation of the probe caused by the flexural deformation of the support rod and thus the distortion, and since the probes can be more effectively suppressed The deviation of the height position of the needle tip position enables stable electrical connection of all probes even after long-term use. [Embodiment] Fig. 1 is a plan view showing an inspection apparatus 12 in which a plurality of probe devices 1 of the present invention are assembled. Fig. 1 is a view showing an example of an inspection device 12 for use in a power-on test of a rectangular liquid crystal display panel u. The inspection device 12 has an inspection table 16 provided with a rectangular opening 16a similar in shape to the liquid crystal display panel 14 but smaller than the outer shape. The liquid helium display panel 14 is formed of an insulating material disposed on the inspection 9 1325963 so as to cover the rectangular opening i6a. The probe card is also below the support body 24 and „H # ^ , the lower 24a has an overall rectangular shape ′ and one of the leading edges 30a is the edge of the A s β _ σ μ liquid day display panel 14 The part is disposed on the liquid day display panel 14. A secluded 4 曰 slit cup 28a is disposed along the front edge 30a of the lower surface 24a of the support body 24, and w 朴 从 从 谓 谓 谓 谓 谓 固定 固定 固定 固定 固定 固定 固定 固定 固定The lower surface 24a of the body 24. Further, the other _x+ is disposed from the slit cup 28b along the rear edge 30b of the lower surface 24a of the support body 24, and is fixed to the support body 24 thereon.

The lower surface 24a is spaced apart from the slit rod 28a. On the lower surface of each of the slit bars 28a and 28b, slit grooves 32a and 32b which are aligned with the number of the probes 22 are formed, and are spaced apart from each other in the longitudinal direction of each of the slit bars 28a and 28b. Each of the slit grooves 32a and 32b extends across the corresponding slit rods 28a and 28b in the width direction thereof, and is respectively lowered downwardly | the slit grooves 32a and 3 corresponding to the pair of slit rods 28a and 28b. , arranged in line with each other to receive the corresponding probe 2 2 . When the thickness of each of the probes 22 to be described later is, for example, about 15/m and the arrangement pitch is about 30 μm, the partition wall between the slit grooves 32a and 32b of each slit rod 28 is also the partition wall 32c (refer to Figure 4) is set to approximately 1 〇 in m. Each of the probes 22 disposed under the lower surface 24a of the support body 24 is formed of a plate-shaped conductive member as shown in Fig. 3, and has a belt having the same width dimension W in the longitudinal direction thereof and serving as a central portion. The strip-shaped mounting region 34 and a pair of needle-shaped tip regions 36 (36a, 36b) extending further forward and rearward from the front end and the rear end of the mounting region, respectively. A pair of guide holes 38 (38a, 38b) for the pair of support rods 26 (26a, 26b) are formed in the mounting region 34 of each of the probes 22. A pair of guide holes 11 1325963 3 8 (3 8a, 3 8b) are disposed at intervals in the longitudinal direction of the mounting region 34 and are formed at both end portions of the mounting region for penetrating the mounting region 34. The needle tip region 36a of each of the ones extends forward from the lower edge portion at the one end in the longitudinal direction of the attachment region 34, and the other of the needle tip regions 3 is extended rearward from the upper edge portion of the other end of the women's wear region 34. Each of the needle tip regions 36 (36a, 36b) has a width dimension smaller than the width dimension w of each of the mounting regions 34.

The probe 22 is disposed bluntly from the lower surface 2 of the support body 24 so as to be spaced below the lower surface so that a needle tip region 36a is received by the slit groove 32a corresponding to the slit rod 2, and the other is made One needle tip region 3 is complemented by a slit groove 32b corresponding to the other slit bar 28b. These probes 22 are spaced apart from each other and are arranged in such a manner that the width of each mounting region 34 is the upper and lower directions, and each Each of the guide holes 38a and 38b of the mounting region 34 is aligned. The respective support rods 26 (26a, 26b) are aligned with the respective guide holes 38 (38 & 3). Each support # 26 (26a, Both ends of the support body 24 are supported (four) by a pair of side covers 40 (see FIG. 2) on both sides of the support body 24. Thereby, each probe 22 is transmitted through each of the slit rods 28 (28a, 28b). The support rod 26 (26a, 26b) is held in the predetermined posture on the lower side of the support body 24. The other tip end region 36b of the probe 22 is formed in the needle tip region = rear end after the guide tip 42b is from the slit After the rod is moved to the support body, the socket is 42. The rear needle 42b is connected to the circuit board and is fixed to the support plate 44 supported by the support mechanism 2G. The connection 塾' is therefore connected to the body of the tester 12 1325963 which is not (4) via the circuit board 46. The tip 42b, in the illustrated example, is guided via a guide piece 48 for preventing erroneous contact with the circuit board 46. The hole 48a is connected to the connecting pad. The tip end region 36a of the probe 22 protrudes from the front side of the slit rod 28a toward the lower side before the tip end portion of the tip end region is formed. That is, as shown in FIG. As shown in the figure, the slit groove 32a of the slit rod 28a has a linear top surface, and is formed on the leading edge side and the opposite side trailing edge side of the slit rod 28a corresponding to the side of the leading edge 3〇a of the support body 24 The segment portion 5〇. The segment portion 5 is formed into a flat step surface 50a. In the illustrated example, the segment portion 5 is used to define a step surface 50a which is located opposite to the top portion except the slit groove 32a. An upper portion of the region other than the surface difference surface 50a is formed. Further, between the mounting region 34 of the probe 22 and the tip end region 36a, a convex segment portion 52 opposed to the step surface 50a is formed. It is used to define a flat step surface 52a that abuts the step surface 50a. It is formed on the slit rod 28a. The step surface 50a of the portion 50 abuts against the step surface 52a formed on the segment portion 52 of the probe 22. In the abutting state of the two faces 5〇3, 52&, the top surface of the slit groove 32a is excluded. The region other than the step surface pool does not abut the needle tip region 36a'. In a state in which the region other than the step surface 50a and the needle tip region are spaced apart, the needle tip 42a of the needle tip region protrudes obliquely downward from the front edge of the slit rod 28a. Therefore, when the one tip region 36a of each probe 22 of the probe device 1 is pressed against the electrode pad corresponding to the liquid crystal display panel 14, at least a part of the button 42a acting on each probe 22 is pressed. The pressure is a reaction force from the step surface 50a of the slit portion of the slit rod 28a opposed to the step surface 52a of the tip region 36a. Therefore, the step surface can function as the rigid branch 23. x, each of the needle tip regions 36a is allowed to elastically deform the tip region % until the top portion of the slit groove 32a abuts the region other than the step surface 50a. In this case, each of the probes 22 presses the electrode pad corresponding to the liquid crystal display panel M by an overdrive force corresponding to the amount of elastic deformation, and the overdrive force can be selected by the segment 5 having a rigid fulcrum. The position and height position (degree of the step) of the probe 22 in the longitudinal direction are appropriately set:

In the inspection device 12 in which the probe device 1 of the present invention is incorporated in the crystal display 10, the needle tip 42a of each probe 22 of each probe device is pressed against the electrode port corresponding to the liquid panel 14. For each of the probes, the probes 22 are formed by the stepped surface of the slit #28a, which is rigidly supported, and produces a bending deformation due to elasticity, and the overdriving force is generated by the bending deformation. Corresponding to the electrode pad, the electrode pads are thus positively connected to the tester body via the probe assembly f 1G

★ Again, at this time, since at least part of the overdriving force acting on the probe 22 is received by the rigid fulcrum, the conventional overdrive force does not act on the support rod of the support probe 22. 26 (26a, (10)), therefore, it is possible to surely prevent the deflection deformation of the support rod 26 (26a, shi) caused thereby. Therefore, according to the inspection device 12' including the probe device 10 of the present invention, the respective guide holes 38 (38a, 38b) corresponding to the through holes of the probes 22 and the support #26 (through the guide holes) can be prevented. The squeaking of the tolerance of the manufacturing tolerance of 2, (10)) reliably prevents the distortion of the probe 22 caused by the flexural deformation of the support rod and thus the distortion caused by the slit slot of the slit rod 28a between 5963 Damage or breakage of the partition wall 32c (refer to Fig. 4). Thereby, the deviation (Δζ) of the position of the needle tip 42a of each probe 22 in the height direction and the deviation (Δ χ, Δ y) of the needle tip 42a in the plane can be more effectively suppressed, and even if it is used for a long period of time, all the probes can be realized. Stable electrical connection of the needle 22. The deviation of the height position of the tip 42a of the probe 22 is more specific. When the elastic body for suppressing the flexural deformation of the support rod is used, the deviation of the height position of the needle tip 42a is about 4 〇//m, and in the present invention in which the rigid fulcrum is used instead of the elastic body, the deviation can be suppressed. At half the value of about 2 0 # m or less. In the example shown in Fig. 4, the rigid fulcrum of the trailing edge portion of the top surface of the slit groove 32a formed in the slit rod 28a is formed by the step surface 5〇a. Although not shown, the trailing edge portion of the top surface of the slit groove 32a may be formed to face the upper surface of the other leading edge portion. At this time, when the region facing the tip region of the tip end region 36a abuts against the step surface, the top surface of the slit groove 32a is allowed to be between the leading edge portion and the tip end region 36a. The same elastic deformation (four) as the aforementioned acupuncture area. The step difference 52a' of the step opposite to the direction of the slit rod may be either the same as the step surface or the lower surface of the lower portion. Or, no (four) the difference. As shown in Fig. 5, the slit rod 28a can be formed from the linear flat surface of the slit rod. At this point, the convex portion 52 of the mounting portion 34 and the tip portion of the tip region can be at the leading edge of the probes 22, 28a to Between 3 6 a of the top surface of the slit groove 32a at the trailing edge, 15 flat surface faces 5 2 a facing a flat portion 52 of the top surface are formed, and the second portion is formed in the same manner as described above. The rigid fulcrum. The rigid support fulcrum is replaced by the support body 24 instead of the aforementioned yoke point on the slit rod 28a. Fig. 6 shows an example in which the lower surface 24a of the bismuth molybdenum is formed along the slit rod 28a =::: two long portions 54. Figure 6: Two heights of the surface = 7 =: The surface 243 and the top of the slit groove 32a are formed under the surface of the segment of the probe 22; the system is used to receive the roadcast & _ difference The flat surface of the surface a is formed, and T functions as a rigid fulcrum of the probe 22 similar to the heart.蟾★2, as shown in Fig. 7, can be formed on the lower surface of the support body 24, and the elongated portion extending from the slit 283 is formed in parallel with the slit portion 28a. Above the support bar W. This flat lower end surface 56a abuts against the upper surface of the probe mounting region 34 above the support rod 26a, and functions as the same rigid support point as described above. In order to reduce the overdriving force acting on the support rod 26a, as shown in Fig. 7, it is preferable to form a rigid fulcrum that abuts against the mounting region above the support rod 26a. However, in order to act on the support rod 26a The driving force is lowered, and the overdriving force of each probe 22 is appropriately set with higher precision. As shown in FIGS. 4 and 5, it is preferable to set the rigid fulcrum at a position near the tip 42& For high precision, the amount of displacement of the tip caused by the overdriving force of each probe 22 is made uniform, and more stable electrical contact of all the probes 22 can be achieved. 16 ® can not reduce the capacitance hole 58a and 5 The female dressing area 34 of each of the probes 22 shown in Fig. 4, #^ 驭, #^, 2. These holes 58a and 58b =; seeking the reduction of the electrostatic capacitance of the adjacent probes, thereby reducing the rush It is said that the leakage between the adjacent probes 22 caused by the leakage is . . . and the description of the transmission support 26 (26a, 26b) is supported by the support body 24? 22, but as shown in FIG. 9, the present invention can also be applied to a single-bow tunnel-W guide hole 38 and inserted through the guide hole.

A probe that supports 同样 (not shown) to support the same support as described above is supported. . According to the present invention, since the overdriving force acting on the probe 22 can be partially supported by the rigid fulcrum (5Ga, 32a, 54a, 56a), excessive deflection of the stylus 22 can be surely prevented from being distorted. The deformation results from the support rod 26 of the support probe 22. Therefore, it is possible to surely prevent the distortion or breakage of the partition wall 32c of the slit rod 28a caused by the distortion deformation of the probe 22 caused by the flexural deformation of the support rod 26 and thus the distortion. Moreover, since the height position and the tip of the tip 42a of each probe 22 can be more effectively suppressed

The deviation of the position on the plane makes it possible to achieve a stable electrical connection of all the probes 22 even after long-term use. The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a part of an inspection apparatus for a liquid crystal display panel (an example of an electrical connection device of a probe assembly of the present invention). Fig. 2 is a front elevational view showing one of a plurality of probe assemblies assembled to the inspection apparatus shown in Fig. 1. 17 1325963 Fig. 3 is a partial cross-sectional view of the probe assembly taken along the ΠΙ-ΙΙΙ line shown in Fig. 2. Fig. 4 is a partially enlarged view showing, in an enlarged manner, a needle tip region of the probe assembly shown in Fig. 3. Fig. 5 is a view similar to Fig. 4 showing another example of the present invention. Fig. 6 is a view similar to Fig. 4 showing another example of the present invention. Fig. 7 is a view similar to Fig. 4 showing another example of the present invention. Fig. 8 is a plan view showing another example of the probe of the probe assembly shown in Fig. 3. Fig. 9 is a plan view showing another example of the probe shown in Fig. 8. [Explanation of main components] 10 probe device 12 inspection device 14 liquid crystal display panel 16 inspection table 16a rectangular opening 18 (18a ' 18b) probe base 2 Support mechanism 22 Probe 24 Support (probe board) 24a Support below 26 (26a > 26b) Support rod 28 (28a ' 28b) Slot rod 30a Slit rod leading edge 1325963 30b Slit rod trailing edge 32 (32a '32b) Slot groove 32c Partition wall 34 Mounting area 36 (36a' 36b) Tip area 38 (38a ' 38b) Guide hole 32a, 50a, 52a Rigid fulcrum 40 Side cover

42a front needle tip 42b rear needle tip 44 support plate 46 circuit board 48 guide piece 48a guide piece hole 50 section 50a section difference surface

52 segment 52a segment difference surface 54 extension portion 54a ' 56a rigid fulcrum 56 insulating film 58a ' 58b capacitance reduction hole 19

Claims (1)

X. Application Patent Specification: 1. A probe assembly, comprising: a plurality of probes, a support body, and a mounting region having a strip shape and extending from a front end of the mounting region toward the front a strip-shaped tip region of a width dimension having a small width dimension of the mounting region, on the side of the support, such that the mounting region is aligned and arranged side by side in a state in which the width direction of the mounting region is up and down; a rod that extends through the mounting area along the thickness direction of the mounting area and is supported by the support=2 and the slit rod disposed along the longitudinal direction of the support rod at the edge of the support a slit slot is formed in the longitudinal direction of the slit rod and spaced apart from each other, and the slit is opened downwardly, and a plurality of slit grooves corresponding to the S-shaped needle tip region of the X needle are received by the needle tip protruding from the leading edge; The rod or the support body is provided with a rigid fulcrum which abuts against the top of the slit groove at the leading edge of the slit rod of the 2 probe, abuts against the probe to limit deformation of the probe . The probe assembly of the first aspect of the invention, wherein the rigid branch point is formed on a rear edge portion of the top surface of the slit groove of the slit rod. The probe assembly of the second aspect of the patent, wherein the trailing edge portion of the crucible is formed with two ε-domain gates and an L-face portion of the top surface of the crucible, in the mounting region The tip of the needle is formed with a section facing the flat surface portion, and the flat surface portion of the portion is formed as the rigid fulcrum. 4. The probe assembly of claim 3, wherein when the flat surface portion of the 20 L325963 abuts the segment, the remaining portion of the top surface of the slit bar except the flat surface portion The region is spaced apart by the corresponding tip region of the probe. 5. The probe assembly of claim 4, wherein the flat surface of the slit rod. The 卩 is formed as a step surface located below the remaining area, and the & portion of the probe is formed as a step surface above the top of the apex region. 6. The probe assembly of the second embodiment of the present invention, wherein the top surface of the slit groove of the slit rod is formed by a linear flat surface from a front edge to a rear edge of the slit rod, The probe is formed with a convex segment facing the flat surface portion between the mounting region and the tip region, and a portion opposite to the segment of the top surface is configured as the rigid fulcrum. 7. The probe assembly of claim μ, wherein a segment portion is formed under the tip portion, and the segment portion is adjacent to the needle tip region: the slit rod side abuts the arrangement position of the support rod The segment is configured as the rigid fulcrum. 8. The probe assembly of claim 7, wherein the section of the holder is formed to protrude downward along the slit rod.支9', as in the probe assembly of the eighth aspect of the patent range, the probe is formed into a section, the scorpion 叱# gentleman + bucket' between the "mounting area" and the needle tip area - the support The section of the section abuts the flat surface facing the direction. XI, "Form: as the next page 21