200925615 九、發明說明 【發明所屬之技術領域】 本發明係關於一種用於檢查液晶面板、積體電路等之 平板狀被檢查體的探針組裝體及檢查裝置。 【先前技術】 液晶面板等的平板狀被檢查體，一般係使用探針單元 〇 來檢査。作爲此種探針單元，有一種並排複數片薄板狀之 葉片型探針而構成的形式。作爲此例有專利文獻1。以下 槪略說明此專利文獻1之發明。 如第2圖及第3圖所示，探針組裝體1，係包含：塊 體2;及並列配置於塊體2下側之呈帶狀的複數支探針 3;及貫穿探針3之細長的一對導桿4;及容納探針3之 一部份的一對開縫桿5;及使針尖之位置穩定於探針3後 端側之呈長方形狀的導引構件6 ;以及使塊體2支撐導桿 © 4的一對側蓋7所構成。 各探針3，係具備：呈帶狀的中央區域3A;以及從 . 該中央區域之前端及後端朝向前方及後方延伸的一對針尖 • 區域3B及3C。中央區域3A，係於各端部具有導桿4所 貫穿的導孔3D。各探針3，係使導桿4導通至其導孔 3D，且使各針尖區域3B及3C嵌合於開縫桿5，並配設 於塊體2之下側。 藉此，針尖區域3B之探針就會接觸到設置於液晶面 板上的電極而電氣連接，且進行控制信號發送等。 -5- 200925615 (專利文獻1)日本特開平1〇_132853號公報 【發明內容】 (發明所欲解決之問題） 然而’前述探針3’雖然可由二個導桿4所支撐，但 是在只以二個導桿4來支撐時，會在各探針3發生多多少 少的偏移。亦即’探針3雖然有並列配設複數片，但是各 © 探針—旦只以二個導桿4來支撐，則會在各探針3間發生 探針高度方向之不均等。結果’會有液晶面板側之電極及 探針基座之TCP側的電極與探針3之間的接觸造成不穩 定的問題。 (解決問題之手段） 爲了解決前述課題，本發明的探針組裝體，係一種支 撐葉片型探針並使其電氣性接觸於被檢查體之電極的探針 組裝體’其特徵在於：該探針組裝體具備：塊體片，其係 一體地支撐複數支前述葉片型探針；及定位銷，其係分別 貫穿至複數支前述葉片型探針並一體地支撐各葉片型探針 而定位；及前端側接觸荷重承受部，其係嵌合於前述葉片 型探針之作爲前述被檢查體側的前端側來承受當該葉片型 探針之前端側的接觸件接觸於前述被檢査體之電極時的接 觸荷重；以及基端側接觸荷重承受部，其係嵌合於前述葉 片型探針之基端側來承受當該葉片型探針之基端側的接觸 件接觸於探針基座側之電極時的接觸荷重。 -6- 200925615 (發明效果） 降低前述葉片型探針之不均等’並提高與葉片型探針 之前端側及基端側的各電極間之接觸穩定性。 【實施方式】 以下，就本發明之實施形態的探針組裝體及檢查裝 © 置，一邊參照附圖一邊加以說明。本實施形態的檢查裝 置，係一種用於檢查被檢査體的檢査裝置，其具備：從外 部搬入被檢查體，且在檢查結束之後，往外部搬運的設定 部（未圖示）；以及支撐從該設定部交接而來的被檢査體並 進行試驗的測定部（未圖示）。作爲此檢查裝置的前述測定 部之探針組裝體，係使用本實施形態的探針組裝體。另 外，本實施形態的檢查裝置，由於與前述習知檢查裝置大 致相同，所以在此以探針組裝體爲中心加以說明。又，作 © 爲本發明的檢查裝置，係可適用於能使用本實施形態的探 針組裝體之裝置全部。 - 如第4圖所示，本實施形態的探針單元U，係用於 . 作爲被檢査體的液晶面板12之檢査裝置中的裝置。液晶 面板12，係形成長方形的形狀，又將複數個電極（未圖示） 以預定的間距形成於對應長方形之相鄰的二個邊之緣部。 探針單元Η，主要係具備探針基座13、及探針組裝 體14而構成。 探針基座13，係固定於檢查裝置之本體框側的構 200925615 件。探針基座1 3，係在固定於本體框側之狀態下，支撐 探針組裝體1 4。 探針組裝體14，係用以支撐探針並使其電氣接觸於 液晶面板12之電極的裝置。如第1圖所示，探針組裝體 14，主要係具備懸吊基座16、滑動塊體17、探針板18、 FPC基座19、及探針塊體20而構成。 懸吊基座16，係夾介滑動塊體17等來支撐後述的探 〇 針塊體20之葉片型探針38用的構件。懸吊基座16，係 將整體形成大致立方體狀並固定於探針基座13。在懸吊 基座1 6之前端側，係設置有用以從上側對滑動塊體1 7進 行彈壓的帽遮部1 6 A。在帽遮部1 6 A係設置有螺栓孔 22，可爲螺栓23螺入。此螺栓23之前端側被插入於後述 的滑動塊體17之彈簧孔17B。在懸吊基座16之前端側面 的前述帽遮部16A之下側，係設置有將滑動塊體17朝向 上下方向能滑動地導引的軌道24。 © 滑動塊體17，係朝向上下滑動來支撐探針塊體20用[Technical Field] The present invention relates to a probe assembly and an inspection apparatus for inspecting a flat object to be inspected such as a liquid crystal panel or an integrated circuit. [Prior Art] A flat object to be inspected such as a liquid crystal panel is generally inspected using a probe unit 〇. As such a probe unit, there is a form in which a plurality of thin plate-shaped blade-type probes are arranged side by side. Patent Document 1 is taken as an example. The invention of Patent Document 1 will be briefly described below. As shown in FIGS. 2 and 3, the probe assembly 1 includes a block 2, and a plurality of strip-shaped probes 3 arranged in parallel on the lower side of the block 2; and a probe 3 penetrating the probe 3 a pair of elongated guide rods 4; and a pair of slit rods 5 accommodating one portion of the probe 3; and a rectangular guide member 6 for stabilizing the position of the needle tip on the rear end side of the probe 3; The body 2 is constructed by a pair of side covers 7 that support the guides ©4. Each of the probes 3 includes a belt-shaped central region 3A, and a pair of needle tips/regions 3B and 3C extending from the front end and the rear end of the central region toward the front and the rear. The central portion 3A has a guide hole 3D through which the guide rod 4 penetrates at each end portion. Each of the probes 3 guides the guide bar 4 to the guide hole 3D, and the respective tip end regions 3B and 3C are fitted to the slit rod 5, and are disposed on the lower side of the block body 2. Thereby, the probe of the tip region 3B is electrically connected to the electrode provided on the liquid crystal panel, and control signal transmission or the like is performed. -5-200925615 (Patent Document 1) Japanese Laid-Open Patent Publication No. Hei No. Hei No. Hei. No. Hei. No. Hei. When supported by the two guide rods 4, more or less offset occurs in each probe 3. That is, the probe 3 has a plurality of sheets arranged in parallel, but each of the probes is supported by the two guide rods 4, and unevenness in the height direction of the probe occurs between the probes 3. As a result, there is a problem that the contact between the electrode on the liquid crystal panel side and the electrode on the TCP side of the probe base and the probe 3 causes instability. (Means for Solving the Problem) In order to solve the above-described problems, the probe assembly of the present invention is a probe assembly that supports a blade-type probe and electrically contacts the electrode of the test object. The needle assembly includes: a block piece integrally supporting a plurality of the blade type probes; and a positioning pin penetrating through the plurality of the blade type probes and integrally supporting the blade type probes to be positioned; And a distal end side contact load receiving portion that is fitted to the tip end side of the blade type probe on the side of the object to be inspected to receive the electrode on the front end side of the blade type probe to contact the electrode of the object to be inspected a contact load at the time of the contact; and a proximal end contact load receiving portion that is fitted to the proximal end side of the blade-type probe to receive the contact on the proximal end side of the blade-type probe to contact the probe base side Contact load at the electrode. -6-200925615 (Effect of the invention) The unevenness of the blade type probe is lowered and the contact stability between the electrodes on the front end side and the base end side of the blade type probe is improved. [Embodiment] Hereinafter, a probe assembly and an inspection device according to an embodiment of the present invention will be described with reference to the drawings. The inspection apparatus according to the present embodiment is an inspection apparatus for inspecting an object to be inspected, and includes a setting unit (not shown) that carries the object to be inspected from the outside and transports the object to the outside after the inspection is completed; The measurement unit (not shown) that tests the test object and delivers the test object. As the probe assembly of the above-described measuring unit of the inspection apparatus, the probe assembly of the present embodiment is used. Further, since the inspection apparatus of the present embodiment is substantially the same as the above-described conventional inspection apparatus, the probe assembly will be mainly described here. Further, the inspection apparatus according to the present invention can be applied to all of the apparatuses in which the probe assembly of the present embodiment can be used. - As shown in Fig. 4, the probe unit U of the present embodiment is used in an inspection apparatus of the liquid crystal panel 12 as an object to be inspected. The liquid crystal panel 12 has a rectangular shape, and a plurality of electrodes (not shown) are formed at a predetermined pitch on the edge of the adjacent two sides of the corresponding rectangle. The probe unit Η is mainly composed of a probe base 13 and a probe assembly 14. The probe base 13 is fixed to the body frame side of the inspection device 200925615. The probe base 13 supports the probe assembly 14 in a state of being fixed to the main frame side. The probe assembly 14 is a device for supporting the probe and electrically contacting the electrodes of the liquid crystal panel 12. As shown in Fig. 1, the probe assembly 14 mainly includes a suspension base 16, a slide block 17, a probe card 18, an FPC base 19, and a probe block 20. The suspension base 16 is a member for supporting the blade type probe 38 of the probe needle block 20 to be described later by sandwiching the slider body 17 or the like. The suspension base 16 is formed in a substantially cubic shape and fixed to the probe base 13. On the front end side of the suspension base 16 is provided a cap portion 1 6 A for biasing the slider body 17 from the upper side. A bolt hole 22 is provided in the cap portion 1 6 A, and the bolt 23 can be screwed. The front end side of the bolt 23 is inserted into a spring hole 17B of a slider body 17 to be described later. On the lower side of the cap portion 16A on the side of the front end of the suspension base 16, a rail 24 that slidably guides the slider body 17 in the vertical direction is provided. © Slide block 17, which slides up and down to support the probe block 20
的構件。滑動塊體17係形成大致立方體狀。在滑動塊體 17之下部，係形成有覆蓋探針板18之大小的帽遮部 17A。探針板18，係抵接於包含此帽遮部17A在內的滑動 塊體17之下側面而支撐。在滑動塊體17之基端面（第1 圖中的右側面），係安裝有嵌合於懸吊基座16之軌道24 來支撐滑動塊體17朝向上下之移動的導件26。在滑動塊 體17之上側面，係設置有用以插入彈簧28的彈簧孔 17B。彈簧28’係由螺栓23支撐而插入於彈簧孔17B -8 - 200925615 內，且將滑動塊體17朝向下方彈壓。藉由此彈簧28所帶 來的彈壓力，在後述的各接觸件56接觸到液晶面板之 各電極的狀態下將各接觸件56朝向各電極側彈壓。 探針板18，係在由滑動塊體17支撐的狀態下’用以 支撐FPC基座19與探針塊體20的構件。探針板18’係 在將其上側面固定於滑動塊體1 7之下側面的狀態下，於 下側面固定有FPC基座19與探針塊體20。 〇 FPC基座1 9，係用以支撐FPC電纜27並電氣連接外 部裝置與後述的葉片型探針38的構件。FPC電纜27，係 將其基端部連接於安裝在探針基座13之下側面的中繼基 板29上，且將其前端側安裝於FPC基座19之下側面。 在FPC基座19之前端部，係設置有與後述的葉片型探針 38之基端側（FPC側）的接觸件57進行電氣接觸的端子（未 圖示）、保護此端子的導引薄膜30、及驅動用積體電路（未 圖示）等。 © 探針塊體20，係爲了對液晶面板12之電路（未圖示） 進行檢查信號發送等而電氣接觸於液晶面板12之電極用 的構件。如第1、5、6圖所示，探針塊體20，係具備塊 . 體片33、開縫桿34、定位銷35、支承銷36、側蓋37、 葉片型探針38、及荷重承受桿39而構成。 塊體片3 3，係用以在其下側面隔開固定間隔一體地 支撐複數支葉片型探針38的構件。塊體片33,係將其下 側面配合葉片型探針3 8之上側面形狀使其凹陷而形成。 在塊體片33之上側面，係設置有將探針塊體20定位固定 -9- 200925615 於探針板1 8用的導孔40與螺絲孔4 1。 開縫桿34,係用以分別定位並支撐配設有複數支的 葉片型探針3 8中之後述的各前端側臂部5 1與各基端側臂 部52的構件。此開縫桿34，係由陶瓷所形成，且不會受 到熱的影響而可正確地支撐葉片型探針38。開縫桿34, 係由前端側開縫桿34A、及基端側開縫桿34B所構成。 前端側開縫桿34A，係設置於塊體片34之作爲液晶 〇 面板1 2側（被檢查體側）的前端側並隔開固定間隔來支撐 複數支葉片型探針38之前端側（各前端側臂部51)。基端 側開縫桿3 4B，係設置於塊體片3 3之基端側且隔開固定 間隔來支撐複數支葉片型探針3 8之基端側（各基端側臂部 52)。各開縫桿34A、34B，係設置複數個開縫43而形 成。各開縫43,係隔開設定間隔來支撐葉片型探針38之 各前端側臂部5 1及各基端側臂部52用的開縫。前端側開 縫桿34A之各開縫43的間隔，係以嵌合於各開縫43的 〇 前端側臂部51之後述的接觸件56與液晶面板43之各電 極的間隔匹配之方式而設定。基端側開縫桿34B之開縫 43的間隔，係以嵌合於各開縫43的基端側臂部52之後 述的接觸件57與FPC電纜27之端子的間隔匹配之方式 而設定。 在葉片型探針38之前端側係設置有前端側接觸荷重 承受部44A。前端側接觸荷重承受部44A，係用以嵌合於 葉片型探針38之前端側來承受當該葉片型探針38之前端 側的接觸件5 6接觸到液晶面板1 2之電極時的接觸荷重之 -10- 200925615 構件。在葉片型探針3 8之基端側係設置有基端側接觸荷 重承受部44B。基端側接觸荷重承受部44B，係用以嵌合 於前述葉片型探針38之基端側來承受當該葉片型探針38 之基端側的接觸件5 7接觸到探針基座1 3側之電極時的接 觸荷重之構件。 前述前端側接觸荷重承受部44A，係具備設置於前述 前端側開縫桿34A的嵌合部45、及設置於前述葉片型探 〇 針38中之對應於前述嵌合部45之位置的被嵌合部46而 構成。藉由此等嵌合部45與被嵌合部46相互地嵌合，以 此接觸件5 6接觸到液晶面板1 2之電極時的反動經由前端 側臂部5 1使本體板部5 0朝向上方上推，用以防止在各葉 片型探針38之高度發生不均等，且防止接觸件56與液晶 面板12之電極的接觸造成不穩定。 嵌合部45，係朝向前述葉片型探針38之本體板部50 延伸出的截面四角形狀之凸條構件，並設置及於前端側開 ❹ 縫桿3 4A之全長，且嵌合所有的葉片型探針38之被嵌合 部46。被嵌合部46，係對應嵌合部45而剪切形成與該嵌 合部45大致相同的形狀。被嵌合部46之具體的形狀，係 與嵌合部45之截面形狀大致同樣地形成四角形狀。更 且，在被嵌合部46之深內部的下側，係設置有大致呈圓 弧狀的切口 A(參照第7圖）。此切口 A，係爲了將應力集 中所造成的畸變在設定範圍內抑制於最小限，並可正確地 支撐接觸件56所設置。 前述基端側接觸荷重承受部44B，係具備設置於前述 -11 - 200925615 塊體片33之基端側的荷重承受桿39之嵌合部48、及設 置於前述葉片型探針38中之對應前述嵌合部48之位置的 被嵌合部49而構成。藉由此等嵌合部48與被嵌合部49 相互地嵌合，可以接觸件57接觸到FPC基座19前端部 之端子時的反動經由基端側臂部52使本體板部50朝向下 方下推，用以防止在各葉片型探針38之高度發生不均 等，且防止接觸件57與FPC基座19前端部之端子的接 © 觸造成不穩定。 荷重承受桿39，係由固定於塊體片33的基體部 39A、及從該基體部39A朝向探針基座13側而設置的嵌 合部48所構成。基體部39A，係設定成與塊體片33之橫 方向相同的長度，且利用螺絲固定、接著、燕尾榫與燕尾 榫槽之嵌合等來固定於塊體片33。嵌合部48，係朝向探 針基座1 3側而延伸出的截面四角形狀之凸條構件，並設 置及於基體部39A之全長，且嵌合所有的葉片型探針38 ® 之被嵌合部49。荷重承受桿39，係以陶瓷或合成樹脂等 的絕緣物所構成。或是以金屬構成荷重承受桿39，並藉 由在與葉片型探針38之接觸部分貼附絕緣物等，使葉片 . 型探針38與荷重承受桿39之間絕緣。又，亦可將荷重承 受桿39，與塊體片33形成一體構造，以使葉片型探針38 與荷重承受桿39之間絕緣。被嵌合部49，係與被嵌合部 46同樣地形成，且同樣地設置有切口 A(未圖示）。 定位銷35，係用以支撐葉片型探針38並定位的構 件。定位銷35係形成大徑圓柱狀。大徑圓柱狀的定位銷 -12- 200925615 35之直徑，係設定成與葉片型探針38之後述的定位銷 53之內徑匹配的尺寸。此係爲了夾介定位銷35進行葉 型探針3 8之定位所設置。亦即，在定位銷3 5嵌合於葉 型探針3 8之定位銷孔5 3的狀態下一旦對此定位銷3 5 行定位，就可正確地決定與此定位銷35之中心軸正交 方向之葉片型探針38的位置。因此，藉由將定位銷35 直徑設定成與葉片型探針38之定位銷孔53之內徑匹配 © 尺寸，來對定位銷3 5進行定位，就可正確地進行與此 位銷35之中心軸正交的方向之葉片型探針38的定位， 葉片型探針3 8之支撐，主要係以前端側開縫桿34 A及 端側開縫桿34B之各開縫43、嵌合部45、荷重承受桿 來承擔。因此，定位銷35只有設置一個。 支承銷36，係用以支撐葉片型探針38的構件。支 銷36係形成圓形棒狀。此支承銷36之直徑，係設定成 葉片型探針38之後述的支承銷孔54之內徑匹配的尺寸 © 此係爲了與定位銷35同時夾介支承銷36進行葉片型探 3 8之定位所設置。 側蓋3 7，係用以支撐定位銷3 5與支承銷3 6的 件。側蓋3 7係使用二片，且被安裝於塊體片3 3之兩側 在側蓋3 7，係設置有插入固定螺絲47的蓋固定用螺絲 3 7A、定位銷固定用螺絲孔37B、及支承銷固定用螺絲 3 7C等。各螺絲孔係被正確地定位而設置，且對塊體片 正確地定位並支撐定位銷35與支承銷36。 葉片型探針3 8，係用以直接接觸到液晶面板1 2之 孔 片 片 進 的 之 的 定 而 基 39 承 與 〇 針 構 〇 孔 孔 3 3 電 -13- 200925615 路的電極並進行檢查信號發送等的構件。葉片型探針 3 8，係由本體板部5 0、前端側臂部5 1、及基端側臂部52 所構成。 本體板部50’係設置有用以通過定位銷35與支承銷 36的定位銷孔53、及支承銷孔54。定位銷孔53 ’係將其 內徑設定成與定位銷35之外徑尺寸匹配的尺寸。支承銷 孔54，係將其內徑設定成與支承銷36之外徑尺寸匹配的 〇 尺寸。藉此，本體板部50可正確地定位並支撐。 前端側臂部5 1，係以其前端部支撐朝向下側的接觸 件5 6用的構件。在前端側臂部5 1，於與液晶面板12之 電極匹配的前端位置設置有接觸件56。 基端側臂部52，係以其基端部（第6圖中之右側端部） 支撐朝向上側的接觸件57用的構件。在基端側臂部52， 於與FPC電纜27之端子匹配的位置設置有接觸件57。 更且，在本體板部50中之面對於前述前端側開縫桿 ® 34A之嵌合部45側的位置係設置有被嵌合部46。被嵌合 部46，係藉由嵌合於嵌合部45，用以對從液晶面板12側 所承受的接觸荷重支撐葉片型探針38的部分。被嵌合部 46,係藉由設置於各葉片型探針38之本體板部50中之面 對於前端側開縫桿34A之嵌合部45的位置之凹狀切口而 構成。 在本體板部50中之面對於前述荷重承受桿39之嵌合 部48側的位置係設置有被嵌合部49。被嵌合部49，係藉 由嵌合於嵌合部48，用以對從FPC基座19側所承受的接 -14 - 200925615 觸荷重支撐葉片型探針38的部分。被嵌合部49,係藉由 設置於各葉片型探針38之本體板部50中之面對於荷重承 受桿39之嵌合部48的位置之凹狀切口而構成。 如以上所構成的探針單元11係作用如下。另外，由 於檢查裝置整體的作用係與習知檢查裝置相同，所以在此 以葉片型探針3 8之部分爲中心而加以說明。 在檢查裝置之測定部載置有液晶面板1 2，一旦探針 © 塊體20之葉片型探針38的接觸件56接觸到液晶面板12 之各電極並被施加超速驅動，就會在葉片型探針38整體 上起較強的應力作用。此時，雖然會在前端側臂部51及 本體板部50與接觸件56 —起朝向上方上推的方向產生作 用力，但是在本體板部50由於前端側接觸荷重承受部 44A之被嵌合部46會嵌合於嵌合部45，而使本體板部50 由前端側開縫桿34A所支撐，所以可確實地支撐接觸件 5 6〇 Ο 藉此，各葉片型探針38之高度方向的不均等會降 低，而可正確地支撐此葉片型探針38之前端的接觸件 56 ° 另一方面，在葉片型探針38之基端部，探針塊體20 被固定於探針板18，當接觸件57接觸到FPC基座19之 前端部的端子時就會在葉片型探針38整體起較強的應力 作用。此時，雖然會在基端側臂部52及本體板部50與接 觸件57 —起朝向下方下推的方向產生作用力，但是在本 體板部50由於基端側接觸荷重承受部44B之被嵌合部49 -15- 200925615 會嵌合於嵌合部48，而使本體板部50由荷重承受桿39 所支撐，所以可確實地支撐接觸件57。 藉此，各葉片型探針38之高度方向的不均等會降 低，而可正確地支撐此葉片型探針38之基端的接觸件 57。結果，各接觸件57會確實地接觸到FPC基座19之 前端部的各端子，而提高接觸穩定性。 〇 [變化例] 前述實施形態中，雖然將荷重承受桿39之嵌合部48 配設成朝向基端側（FPC基座19側）延伸出，但是亦可配 設成朝向前端側延伸出。具體而言，如第7圖所示，將荷 重承受桿61安裝於塊體片33之基端部，並使嵌合部62 朝向葉片型探針3 8側延伸出而形成。更且，與嵌合部62 相對向地設置葉片型探針38之被嵌合部63。在此，被嵌 合部63係形成大致鉤狀，且以勾住嵌合部62之上側面的 ® 方式支撐葉片型探針38。此情況，也可獲得與前述實施 形態同樣的作用、效果。 前述實施形態中，雖然只有設置一個定位銷35，但 是亦可設置二個。以二個定位銷35來支撐葉片型探針 3 8 ’藉此可與前端側接觸荷重承受部44 a及基端側接觸 荷重承受部44B相結合，更加穩定地支撐葉片型探針 38 ° 前述實施形態中，雖然只有設置一個支承銷36，但 是亦可設置二個。以二個支承銷36來支撐葉片型探針 -16- 200925615 38，藉此可與前述定位銷35、前端側接觸荷重承受部 44A及基端側接觸荷重承受部44B相結合，更加穩定地支 撐葉片型探針38。 前述實施形態中’雖然將前述前端側接觸荷重承受部 44A之嵌合部45設置於前端側開縫桿34A，但是亦可設 置於塊體片33之前端側。此情況，也可獲得與前述實施 形態同樣的作用、效果。 〇 前述實施形態中’雖然將前述基端側接觸荷重承受部 44 B之嵌合部48設置於荷重承受桿39，但是亦可設置於 前述基端側開縫桿3 4 B側。此情況，也可獲得與前述實施 形態同樣的作用、效果。 前述實施形態中，雖然將前述基端側接觸荷重承受部 44B之荷重承受桿39設置於塊體片33之基端側，來支撐 葉片型探針38之基端側，但是亦可將荷重承受桿39設置 於塊體片3 3之前端側，來支撐葉片型探針3 8之前端側。 © 此情況’葉片型探針3 8之基端側，係在基端側開縫桿 34B設置有嵌合部45，且面對於此嵌合部45設置有被嵌 合部49 °此情況’也可獲得與前述實施形態同樣的作 用、效果。 【圖式簡單說明】 第1圖係顯示本發明之實施形態的探針單元之局部破 斷側視圖。 第2圖係顯示習知檢查裝置之探針組裝體的立體圖。 -17- 200925615 第3圖係顯示習知檢查裝置之探針組裝體的側面剖視 圖。 第4圖係顯示本發明之實施形態的探針單元之立體 圖。 第5圖係顯示本發明之實施形態的探針單元之探針組 裝體的分解立體圖。 第6圖係從其背面顯示本發明之實施形態的探針單元 ❺ 之探針塊體的立體圖。 第7圖係顯示本發明之變化例的探針單元之側視圖。 【主要元件符號說明】 1 :探針單元 1 2 :液晶面板 1 3 :探針基座 1 4 :探針組裝體 © 1 6 :懸吊基座 16A :帽遮部 1 7 :滑動塊體 17A :帽遮部 17B :彈簧孔 1 8 :探針板 19: FPC基座 2〇 :探針塊體 22 :螺栓孔 -18- 200925615 23 :螺栓 24 :軌道 26 :導件 27 ： FPC電纜 2 8 :彈簧 29 :中繼基板 30 :導引薄膜 © 33 :塊體片 34 :開縫桿 34A :前端側開縫桿 34B :基端側開縫桿 3 5 :定位銷 3 6 :支承銷 3 7 :側蓋 3 8 :葉片型探針 G 39 :荷重承受桿 39A :基體部 40 :導孔 4 1 :螺絲孔 43 :開縫 44A =前端側接觸荷重承受部 44B :基端側接觸荷重承受部 45 :嵌合部 46 :被嵌合部 -19 200925615 ❹ :嵌合部 :被嵌合部 :本體板部 :前端側臂部 :基端側臂部 ’·定位銷孔 :支承銷孔 :接觸件 :接觸件 :荷重承受桿 :嵌合部 :被嵌合部 -20-Components. The sliding block 17 is formed in a substantially cubic shape. Below the sliding block 17, a cap portion 17A covering the size of the probe card 18 is formed. The probe card 18 is supported by abutting against the lower side of the slide block 17 including the cap portion 17A. A guide 26 that is fitted to the rail 24 of the suspension base 16 to support the movement of the slider body 17 in the vertical direction is attached to the base end surface (the right side surface in the first drawing) of the slider body 17. On the upper side of the sliding block 17, a spring hole 17B for inserting the spring 28 is provided. The spring 28' is supported by the bolt 23 and inserted into the spring hole 17B -8 - 200925615, and the sliding block 17 is biased downward. By the elastic pressure of the spring 28, each of the contacts 56 is biased toward the respective electrode sides in a state where each of the contacts 56 to be described later comes into contact with the respective electrodes of the liquid crystal panel. The probe card 18 is a member for supporting the FPC base 19 and the probe block 20 in a state of being supported by the slider block 17. The probe card 18' is fixed to the lower side of the slide block body 17 in a state where the upper side surface thereof is fixed to the lower side surface, and the FPC base 19 and the probe block body 20 are fixed to the lower side. The FPC base 197 is a member for supporting the FPC cable 27 and electrically connecting the external device to the blade type probe 38 to be described later. The FPC cable 27 has its base end portion attached to a relay substrate 29 mounted on the lower side of the probe base 13, and its front end side is attached to the lower side of the FPC base 19. A terminal (not shown) that electrically contacts the contact 57 on the proximal end side (FPC side) of the blade-type probe 38 to be described later, and a guide film that protects the terminal, are provided at the end of the FPC base 19 at the end. 30. And an integrated circuit for driving (not shown). The probe block 20 is a member for electrically contacting the electrode of the liquid crystal panel 12 in order to transmit an inspection signal to a circuit (not shown) of the liquid crystal panel 12. As shown in Figures 1, 5, and 6, the probe block 20 is provided with a block, a body piece 33, a slit bar 34, a positioning pin 35, a support pin 36, a side cover 37, a blade type probe 38, and a load. It is constructed by receiving the rod 39. The block piece 3 3 is a member for integrally supporting the plurality of blade type probes 38 at a fixed interval on the lower side thereof. The block piece 33 is formed by fitting the lower side surface thereof to the shape of the upper surface of the blade type probe 38 to be recessed. On the upper side of the block 33, a guide hole 40 for fixing the probe block 20 to the probe hole 18 and a screw hole 4 1 are provided. The slats 34 are used to respectively position and support members of the plurality of blade-type probes 38, which are described later, in the respective distal end side arm portions 51 and the respective proximal end side arm portions 52. This slit rod 34 is formed of ceramic and can be properly supported by the blade type probe 38 without being affected by heat. The slit rod 34 is composed of a front end side slit rod 34A and a base end side slit rod 34B. The front end side slit rods 34A are provided on the front end side of the liquid crystal panel 1 2 side (the object side) on the block sheet 34, and are supported at a fixed interval to support the front end side of the plurality of blade type probes 38 (each Front end side arm portion 51). The proximal end side slit bars 3 4B are provided on the proximal end side of the block piece 33 and are supported at a fixed interval to support the proximal end sides of the plurality of blade type probes 38 (each of the proximal end side arm portions 52). Each of the slit bars 34A, 34B is formed by providing a plurality of slits 43. Each of the slits 43 supports the slits for the distal end side arm portions 51 and the respective proximal end side arm portions 52 of the vane type probe 38 at a predetermined interval. The interval between the slits 43 of the distal end side slit bars 34A is set such that the contact between the contact members 56, which will be described later, and the electrodes of the liquid crystal panel 43 are fitted to the respective distal end side arm portions 51 of the slits 43. . The interval between the slits 43 of the proximal end side slit bars 34B is set so that the contact 57 of the proximal end side arm portion 52 fitted to each of the slits 43 and the terminal of the FPC cable 27 match. A front end side contact load receiving portion 44A is provided on the front end side of the blade type probe 38. The front end side contact load receiving portion 44A is fitted to the front end side of the vane type probe 38 to receive contact when the contact member 56 on the front end side of the vane type probe 38 comes into contact with the electrode of the liquid crystal panel 12. Load -10- 200925615 components. A proximal end side contact load receiving portion 44B is provided on the proximal end side of the blade type probe 38. The proximal end side contact load receiving portion 44B is fitted to the proximal end side of the blade type probe 38 to withstand contact with the probe base 1 when the proximal end side of the blade type probe 38 contacts the probe base 1 A component that contacts the load at the electrode on the 3 side. The distal end side contact load receiving portion 44A includes a fitting portion 45 provided on the distal end side slit rod 34A, and a fitting portion provided in the blade type probe needle 38 corresponding to the position of the fitting portion 45. The joint 46 is constructed. When the fitting portion 45 and the fitted portion 46 are fitted to each other, the reaction when the contact member 56 contacts the electrode of the liquid crystal panel 1 2 causes the body plate portion 50 to be oriented via the distal end side arm portion 51. The upper push is applied to prevent unevenness in the height of each of the vane type probes 38, and to prevent the contact between the contact member 56 and the electrodes of the liquid crystal panel 12 from being unstable. The fitting portion 45 is a ridge member having a rectangular cross section extending toward the main body portion 50 of the blade type probe 38, and is provided with the entire length of the front end side slat rod 34A, and all the blades are fitted. The fitted portion 46 of the type probe 38. The fitted portion 46 is cut and formed in substantially the same shape as the fitting portion 45 corresponding to the fitting portion 45. The specific shape of the fitted portion 46 is formed into a quadrangular shape in substantially the same manner as the cross-sectional shape of the fitting portion 45. Further, a slit A having a substantially circular arc shape is provided on the lower side of the inner portion of the fitted portion 46 (see Fig. 7). This slit A is intended to minimize the distortion caused by the stress concentration within the set range and to properly support the contact member 56. The proximal end side contact load receiving portion 44B includes a fitting portion 48 provided on the proximal end side of the block body 33 of the -11 - 200925615, and a corresponding portion provided in the blade type probe 38. The fitting portion 49 at the position of the fitting portion 48 is configured. When the fitting portion 48 and the fitted portion 49 are fitted to each other, the reaction of the contact member 57 when it contacts the terminal of the front end portion of the FPC base 19 can cause the main body plate portion 50 to face downward via the proximal end side arm portion 52. The push-down is performed to prevent unevenness in the height of each of the vane-type probes 38, and to prevent the contact between the contact 57 and the terminals of the front end portion of the FPC base 19 from being unstable. The load receiving rod 39 is composed of a base portion 39A fixed to the block piece 33 and an engaging portion 48 provided from the base portion 39A toward the probe base 13 side. The base portion 39A is set to have the same length as the lateral direction of the block piece 33, and is fixed to the block piece 33 by screwing, followed by fitting of the dovetail and the dovetail groove. The fitting portion 48 is a ridge member having a rectangular cross section extending toward the probe base 13 side, and is provided over the entire length of the base portion 39A, and is fitted with all the blade type probes 38 Joint 49. The load receiving rod 39 is made of an insulator such as ceramic or synthetic resin. Alternatively, the load receiving rod 39 is made of metal, and the blade-type probe 38 and the load receiving rod 39 are insulated by attaching an insulator or the like to the portion in contact with the vane type probe 38. Further, the load receiving rod 39 may be integrally formed with the block piece 33 to insulate the blade type probe 38 from the load receiving rod 39. The fitted portion 49 is formed in the same manner as the fitted portion 46, and is similarly provided with a slit A (not shown). The positioning pin 35 is a member for supporting and positioning the blade type probe 38. The positioning pin 35 is formed in a large-diameter cylindrical shape. The diameter of the large-diameter cylindrical positioning pin -12-200925615 35 is set to match the inner diameter of the positioning pin 53 described later of the blade type probe 38. This is provided for the positioning of the leaf probe 38 for interposing the positioning pin 35. That is, once the positioning pin 35 is fitted into the positioning pin hole 53 of the air tip probe 38, once the positioning pin 35 is positioned, the center axis of the positioning pin 35 can be correctly determined. The position of the blade type probe 38 in the intersecting direction. Therefore, by locating the positioning pin 35 to the inner diameter of the positioning pin hole 53 of the blade type probe 38 to position the positioning pin 35, the center of the position pin 35 can be correctly performed. The positioning of the blade type probe 38 in the direction orthogonal to the axis, the support of the blade type probe 38 is mainly the slit 43 of the front end side slit bar 34 A and the end side slit bar 34B, and the fitting portion 45 The load is to bear the rod. Therefore, only one positioning pin 35 is provided. The support pin 36 is a member for supporting the blade type probe 38. The pins 36 are formed in a circular bar shape. The diameter of the support pin 36 is set to the size of the inner diameter of the support pin hole 54 to be described later of the blade type probe 38. This is to position the blade type probe 38 with the positioning pin 35 at the same time. Set. The side cover 37 is for supporting the positioning pin 35 and the support pin 36. The side cover 3 7 is used in two pieces, and is attached to both sides of the block piece 3 3 . The side cover 37 is provided with a cover fixing screw 3 7A into which the fixing screw 47 is inserted, a fixing pin fixing screw hole 37B, And the support pin fixing screw 3 7C and the like. Each of the screw holes is properly positioned and positioned to properly position and support the locating pin 35 and the support pin 36. The blade type probe 38 is used for directly contacting the electrode of the liquid crystal panel 1 and the electrode of the hole and the hole of the hole of the liquid crystal panel 1 3 A component such as a signal transmission. The blade type probe 38 is composed of a main body plate portion 50, a distal end side arm portion 51, and a proximal end side arm portion 52. The body plate portion 50' is provided with a positioning pin hole 53 for passing the positioning pin 35 and the support pin 36, and a support pin hole 54. The positioning pin hole 53' sets its inner diameter to a size matching the outer diameter of the positioning pin 35. The support pin hole 54 has its inner diameter set to a size corresponding to the outer diameter of the support pin 36. Thereby, the body plate portion 50 can be correctly positioned and supported. The front end side arm portion 561 is a member for supporting the contact member 56 toward the lower side at the front end portion thereof. A contact member 56 is provided at the front end portion of the front end side arm portion 51 to match the electrode of the liquid crystal panel 12. The proximal end side arm portion 52 is a member for supporting the contact member 57 facing the upper side with its base end portion (the right end portion in FIG. 6). At the proximal end side arm portion 52, a contact member 57 is provided at a position matching the terminal of the FPC cable 27. Further, the surface of the main body plate portion 50 is provided with the fitted portion 46 at a position on the side of the fitting portion 45 of the front end side slit bar ® 34A. The fitted portion 46 is fitted to the fitting portion 45 to support the portion of the blade type probe 38 with respect to the contact load received from the liquid crystal panel 12 side. The fitted portion 46 is formed by a concave slit provided at the position of the fitting portion 45 of the distal end side slit rod 34A on the surface of the main plate portion 50 of each of the vane type probes 38. The surface of the main body plate portion 50 is provided with a fitting portion 49 at a position on the side of the fitting portion 48 of the load receiving rod 39. The fitted portion 49 is fitted to the fitting portion 48 for supporting the portion of the blade type probe 38 with respect to the load from the FPC base 19 side. The fitted portion 49 is formed by a concave slit provided at the position of the fitting portion 48 of the load receiving rod 39 by the surface provided in the main plate portion 50 of each of the vane type probes 38. The probe unit 11 configured as above functions as follows. Further, since the operation of the entire inspection apparatus is the same as that of the conventional inspection apparatus, the description will be centered on the portion of the blade type probe 38. The liquid crystal panel 12 is placed on the measurement unit of the inspection device, and when the contact 56 of the blade type probe 38 of the probe © block 20 comes into contact with each electrode of the liquid crystal panel 12 and is overdriven, it is in the blade type. The probe 38 acts as a strong stress as a whole. At this time, the front end side arm portion 51 and the main body plate portion 50 are urged upward in the upward direction with the contact member 56. However, the main body plate portion 50 is fitted to the front end side contact load receiving portion 44A. The portion 46 is fitted to the fitting portion 45, and the main plate portion 50 is supported by the distal end side slit rod 34A, so that the contact member 56 can be surely supported, whereby the height direction of each of the vane type probes 38 is provided. The unequality is reduced, and the contact portion 56 at the front end of the blade type probe 38 can be properly supported. On the other hand, at the base end portion of the blade type probe 38, the probe block 20 is fixed to the probe card 18 When the contact member 57 contacts the terminal at the front end of the FPC base 19, the blade type probe 38 as a whole exerts a strong stress. At this time, although the urging force is generated in the direction in which the proximal end side arm portion 52 and the main body plate portion 50 are pushed downward together with the contact member 57, the main body plate portion 50 is contacted by the load receiving portion 44B at the proximal end side. The fitting portion 49 -15-200925615 is fitted to the fitting portion 48, and the body plate portion 50 is supported by the load receiving rod 39, so that the contact 57 can be reliably supported. Thereby, the unevenness in the height direction of each of the vane type probes 38 is lowered, and the contact 57 of the base end of the vane type probe 38 can be accurately supported. As a result, the respective contact members 57 surely come into contact with the respective terminals of the front end portion of the FPC base 19, thereby improving the contact stability.变化 [Variation] In the above-described embodiment, the fitting portion 48 of the load receiving lever 39 is disposed to extend toward the proximal end side (the FPC base 19 side), but may be disposed to extend toward the distal end side. Specifically, as shown in Fig. 7, the load receiving rod 61 is attached to the base end portion of the block piece 33, and the fitting portion 62 is formed to extend toward the blade type probe 38 side. Further, the fitted portion 63 of the blade type probe 38 is provided to face the fitting portion 62. Here, the fitted portion 63 is formed in a substantially hook shape, and the blade type probe 38 is supported by the ® which hooks the upper side surface of the fitting portion 62. Also in this case, the same actions and effects as those of the above embodiment can be obtained. In the above embodiment, although only one positioning pin 35 is provided, two may be provided. The blade type probe 38 is supported by the two positioning pins 35, thereby being combined with the front end side contact load receiving portion 44a and the base end side contact load receiving portion 44B to more stably support the blade type probe 38°. In the embodiment, although only one support pin 36 is provided, two may be provided. The blade type probe-16-200925615 38 is supported by the two support pins 36, whereby the positioning pin 35, the front end side contact load receiving portion 44A, and the base end side contact load receiving portion 44B can be combined to support the support member more stably. Blade type probe 38. In the above-described embodiment, the fitting portion 45 of the distal end side contact load receiving portion 44A is provided on the distal end side slit rod 34A, but may be provided on the front end side of the block piece 33. Also in this case, the same actions and effects as those of the above embodiment can be obtained. In the above-described embodiment, the fitting portion 48 of the proximal end side contact load receiving portion 44 B is provided on the load receiving rod 39, but may be provided on the proximal end side slit rod 3 4 B side. Also in this case, the same actions and effects as those of the above embodiment can be obtained. In the above-described embodiment, the load receiving rod 39 of the proximal end side contact load receiving portion 44B is provided on the proximal end side of the block piece 33 to support the proximal end side of the blade type probe 38, but the load can also be received. The rod 39 is provided on the front end side of the block piece 33 to support the front end side of the blade type probe 38. In this case, the base end side of the blade type probe 38 is provided with a fitting portion 45 on the proximal end side, and the fitting portion 45 is provided with the fitted portion 49. The same actions and effects as those of the above embodiment can be obtained. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partially broken side view showing a probe unit according to an embodiment of the present invention. Fig. 2 is a perspective view showing a probe assembly of a conventional inspection device. -17- 200925615 Fig. 3 is a side cross-sectional view showing the probe assembly of the conventional inspection device. Fig. 4 is a perspective view showing a probe unit according to an embodiment of the present invention. Fig. 5 is an exploded perspective view showing the probe assembly of the probe unit according to the embodiment of the present invention. Fig. 6 is a perspective view showing the probe block of the probe unit 实施 according to the embodiment of the present invention from the back side. Fig. 7 is a side view showing a probe unit of a variation of the present invention. [Description of main component symbols] 1 : Probe unit 1 2 : Liquid crystal panel 1 3 : Probe base 1 4 : Probe assembly © 1 6 : Suspension base 16A: Cap shield 1 7 : Slide block 17A : Cap cover 17B: Spring hole 18: Probe board 19: FPC base 2〇: Probe block 22: Bolt hole -18- 200925615 23: Bolt 24: Track 26: Guide 27: FPC cable 2 8 : Spring 29 : Relay substrate 30 : Guide film © 33 : Block piece 34 : Slotted rod 34A : Front end side slit rod 34B : Base end side slit rod 3 5 : Locating pin 3 6 : Support pin 3 7 : side cover 3 8 : blade type probe G 39 : load bearing rod 39A : base portion 40 : guide hole 4 1 : screw hole 43 : slit 44A = front end side contact load receiving portion 44B : base end side contact load receiving portion 45: fitting portion 46: fitted portion-19 200925615 ❹ : fitting portion: fitted portion: main body plate portion: front end side arm portion: base end side arm portion '· locating pin hole: support pin hole: contact Piece: Contact: Load bearing rod: Mating part: Fitted part -20-