KR20090046679A - Probe assembly and inspection apparatus - Google Patents

Abstract

The present invention is to improve the contact stability between the blade-type probe and each electrode by reducing the unevenness of the blade-type probe. A probe assembly which supports a blade-type probe and electrically contacts an electrode of an object under test. The probe assembly includes a block piece for integrally supporting a plurality of the probes, a positioning pin that penetrates through the plurality of probes and integrally supports and positions each probe, and the probe of the probe. A tip-side contact load receiving portion which is inserted into the tip side of the test subject and receives the contact load when the tip contactor of the probe contacts the electrode of the test subject, and the proximal contact of the probe is inserted into the proximal end of the probe. The base end contact load receiving part which receives the contact load at the time of contacting the electrode of the side is provided.

Electrodes, Contactors, Blade Probes, Contact Loads, Probe Assemblies, Positioning Pins

Description

Probe Assembly and Inspection Apparatus

1 is a partially broken side view showing a probe unit according to an embodiment of the present invention.

2 is a perspective view showing a probe assembly of a conventional inspection apparatus.

Figure 3 is a side cross-sectional view showing a probe assembly of a conventional inspection device.

4 is a perspective view showing a probe unit according to an embodiment of the present invention.

5 is an exploded perspective view showing the probe assembly of the probe unit according to the embodiment of the present invention.

6 is a perspective view showing the probe block of the probe unit according to the embodiment of the present invention from the rear side thereof.

7 is a side view showing a probe unit according to a modification of the present invention.

Description of the main symbols in the drawings

11: probe unit 12: liquid crystal panel

13: probe base 14: probe assembly

16: Suspension base 17: Slide block

18: Probe plate 19: FPC base

20: probe block 22: bolt hole

23: bolt 24: rail

26: Guide 27: FPC cable

28: spring 29: relay board

30: guide film 33: block piece

34: Slit bar 34A: Slit bar toward the tip

34B: Base slit bar 35: Positioning pin

36: support pin 37: side cover

38: Blade type probe 39: Load bearing bar

40: guide hole 41: screw hole

43: Slit 44A: Tip contact load receiving side

44B: Proximal contact load receiving portion 45: Coupling portion

46: to be joined 50: body plate

51: proximal arm 52: proximal arm

53: positioning pin hole 54: support pin hole

56: contact 57: contact

61: load-bearing bar 62: coupling portion

63: coupled part

Field of invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe assembly and an inspection apparatus used for inspection of a flat inspection object such as a liquid crystal panel and an integrated circuit.

Background of the Invention

Generally, a to-be-tested object, such as a liquid crystal panel, is examined using a probe unit. As this kind of probe unit, there exists a type which comprises several sheets of thin plate-shaped probes arranged. There is patent document 1 as an example. The invention of the patent document 1 is outlined below.

As shown in Figs. 2 and 3, the probe assembly 1 includes a block 2, a plurality of strip-shaped probes 3 arranged in parallel below the block 2, and a probe 3; Stabilizes the position of the needle bar at a pair of elongated guide bars 4, a pair of slit bars 5 which receive a part of the probe 3, and a rear end of the probe 3 It comprises a long guide member 6 to be made and a pair of side covers 7 for supporting the guide bar 4 to the block 2.

Each probe 3 has a strip-shaped central region 3A and a pair of needle-guided regions 3B and 3C extending forward and backward from the front and rear ends of the central region. The central region 3A has guide holes 3D at each end portion through which the guide bar 4 penetrates. Each probe 3 passes through the guide bar 4 through the guide hole 3D, and each needle region 3B and 3C is fitted to the slit bar 5, and is provided below the block 2. As shown in FIG.

As a result, the probe of the needle needle region 3B is brought into contact with and electrically connected to an electrode provided on the liquid crystal panel, and control signal transmission and the like are performed.

[Patent Document 1]

Japanese Patent Application Laid-Open No. 10-132853

By the way, although the said probe 3 is supported by the two guide bars 4, when only two guide bars 4 are supported, some shift | offset | difference arises in each probe 3. That is, although several probes 3 are arranged in parallel, when each probe 3 is supported by only two guide bars 4, unevenness in the probe height direction occurs between the probes 3. As a result, there is a problem that the contact between the electrode on the liquid crystal panel side and the electrode on the TCP side of the probe base and the probe 3 becomes unstable.

An object of the present invention is to provide a probe assembly which supports a blade-type probe and makes electrical contact with an electrode of an object under test.

Another object of the present invention is to provide a probe assembly that reduces unevenness of a blade type probe to improve contact stability between the blade type probe and each electrode.

The above and other objects of the present invention can be achieved by the present invention described below.

Summary of the Invention

In order to solve the above problems, a probe assembly according to the present invention is a probe assembly for supporting a blade-type probe and electrically contacting an electrode of an object to be tested, the block piece integrally supporting a plurality of the blade-type probes, Positioning pins penetrating through the blade-type probes to integrally support and position each blade-type probe, and are fitted to the tip side of the blade-type probe toward the test object side, and the tip contactor of the blade-type probe is connected to the test object. The contact load receiving end portion receiving the contact load when contacting the electrode of the electrode, and the contact load when the proximal contact of the blade-type probe contacts the electrode of the probe base side, Characterized in that it has a base end contact load receiving portion .

Detailed description of the invention

EMBODIMENT OF THE INVENTION Hereinafter, the probe assembly and inspection apparatus which concern on embodiment of this invention are demonstrated, referring an accompanying drawing. The inspection apparatus of the present embodiment is an inspection apparatus used for inspection of an inspection object, and includes a set portion (not shown) for carrying an inspection object from the outside and returning it to the outside after completion of the inspection, and an inspected object passed from the set portion. It has a measuring section (not shown) to support and test. As the probe assembly of the measurement unit of the inspection apparatus, a probe assembly according to the present embodiment is used. In addition, since the inspection apparatus of this embodiment is substantially the same as the said conventional inspection apparatus, it demonstrates centering around a probe assembly here. Moreover, as the inspection apparatus which concerns on this invention, it is applicable to all the apparatus which can use the probe assembly which concerns on this embodiment.

The probe unit 11 of this embodiment is an apparatus used for the inspection apparatus of the liquid crystal panel 12 as a to-be-tested object, as shown in FIG. The liquid crystal panel 12 has a rectangular shape, and a plurality of electrodes (not shown) are formed at predetermined pitches at edges corresponding to two adjacent sides of the rectangle.

The probe unit 11 mainly comprises the probe base 13 and the probe assembly 14.

The probe base 13 is a member fixed to the main body frame side of the inspection apparatus. The probe base 13 supports the probe assembly 14 in a state fixed to the main body frame side.

The probe assembly 14 is a device for supporting the probe to electrically contact the electrodes of the liquid crystal panel 12. As shown in FIG. 1, the probe assembly 14 mainly includes a suspension base 16, a slide block 17, a probe plate 18, an FPC base 19, and a probe block 20. Consists of.

The suspension base 16 is a member for supporting the blade-shaped probe 38 of the probe block 20 described later with the slide block 17 or the like interposed therebetween. The suspension base 16 is formed almost in a cubic shape and fixed to the probe base 13. A sunshade 16A for applying a force from the upper side to the slide block 17 is provided on the front end side of the suspension base 16. The bolt hole 22 is provided in the shade 16A, and the bolt 23 is tightened. The distal end of the bolt 23 is inserted into a spring hole 17B of the slide block 17 described later. Below the said shade part 16A of the front end side surface of the suspension base 16, the rail 24 which guides the slide block 17 so that a slide to an up-down direction is provided.

The slide block 17 is a member for supporting the probe block 20 by sliding up and down. The slide block 17 is formed in substantially cubic shape. A shading portion 17A having a size covering the probe plate 18 is formed below the slide block 17. The probe plate 18 is supported in contact with the bottom surface of the slide block 17 including the shade 17A. A base 26 (right side in FIG. 1) of the slide block 17 is provided with a guide 26 fitted to the rail 24 of the suspension base 16 to support the movement of the slide block 17 up and down. The upper surface of the slide block 17 is provided with a spring hole 17B for inserting the spring 28. The spring 28 is supported by the bolt 23 and inserted into the spring hole 17B, and the slide block 17 is applied downward. By the force by the said spring 28, each contactor 56 mentioned later exerts a force on each contactor 56 toward each electrode in the state which contacted each electrode of the liquid crystal panel 12. FIG.

The probe plate 18 is a member for supporting the FPC base 19 and the probe block 20 while being supported by the slide block 17. As for the probe plate 18, the FPC base 19 and the probe block 20 are fixed to the lower surface with the upper surface fixed to the lower surface of the slide block 17. As shown in FIG.

The FPC base 19 is a member for supporting the FPC cable 27 and electrically connecting the external device and the blade type probe 38 described later. The FPC cable 27 has its proximal end connected to the relay board 29 provided on the lower surface of the probe base 13, and the distal end thereof is provided on the lower surface of the FPC base 19. A terminal (not shown) in electrical contact with the proximal end (FPC side) contactor 57 of the blade-type probe 38, which will be described later, on the distal end of the FPC base 19, and a guide film 30 for protecting the terminal. And a driving integrated circuit (not shown) are provided.

The probe block 20 is a member for electrically contacting an electrode of the liquid crystal panel 12 to transmit a test signal or the like to a circuit (not shown) of the liquid crystal panel 12. As shown in Figs. 1, 5 and 6, the probe block 20 includes a block piece 33, a slit bar 34, a positioning pin 35, a support pin 36, a side cover 37 and a blade. The type | mold probe 38 and the load receiving bar 39 are comprised.

The block piece 33 is a member for integrally supporting the plurality of blade-shaped probes 38 at regular intervals on the lower surface thereof. The lower surface of the block piece 33 is formed concave in conformity with the shape of the upper surface of the blade type probe 38. A plurality of screw holes 33A for fixing the side cover 37 are provided in the left and right both sides of the block piece 33 (both in the upper left and right lower directions in FIG. 5). On the upper surface of the block piece 33, a guide hole 40 and a screw hole 41 for positioning and fixing the probe block 20 to the probe plate 18 are provided.

The slit bar 34 is a member for accurately positioning and supporting each of the front end arm 51 and the base end arm 52, which will be described later, among the plurality of blade-type probes 38 to be disposed. The slit bar 34 is formed of ceramics so as to accurately support the blade-type probe 38 without being affected by heat. The slit bar 34 is comprised with 34 A of front end side slit bars, and 34 B of base end slit bars.

34A of tip side slit bars are provided in the front end side which is the liquid crystal panel 12 side (inspection object side) of the block piece 33, and the front end side (each tip side arm part 51) of the some blade type probe 38 is carried out. ) At regular intervals. The proximal end slit bar 34B is provided at the proximal end of the block piece 33 and supports the proximal end (each proximal arm 52) of the plurality of blade-type probes 38 at a predetermined interval. Each slit bar 34A, 34B is provided by providing a plurality of slits 43. Each slit 43 is a slit for supporting each front end arm 51 and each proximal arm 52 of the blade-shaped probe 38 at a set interval. The interval of each slit 43 of the front side slit bar 34A is matched with the space | interval of each electrode of the liquid crystal panel 12 by the contactor 56 mentioned later of the front side arm part 51 fitted to each slit 43. It is set to. The spacing of the slits 43 of the proximal end slit bar 34B is matched to the spacing of the terminals of the FPC cable 27 by a contactor 57, which will be described later, of the proximal arm 52 that is fitted to each slit 43. It is set to.

A tip contact load receiving portion 44A is provided on the tip side of the blade probe 38. The contact load receiving portion 44A at the tip side is fitted to the tip side of the blade-type probe 38 so that the contact load when the tip-contactor 56 of the blade-type probe 38 contacts the electrode of the liquid crystal panel 12 It is a member for receiving. The proximal end contact load receiving portion 44B is provided on the proximal end of the blade-type probe 38. The proximal end contact load receiving portion 44B is fitted to the proximal end of the blade probe 38 so that the proximal contact 57 of the blade probe 38 contacts the electrode of the probe base 13 side. It is a member for receiving a contact load.

The tip contact load receiving portion 44A includes a coupling portion 45 provided at the tip slit bar 34A, and a blade provided at a position corresponding to the coupling portion 45 of the blade-type probe 38. The coupling part 46 is provided and comprised. By coupling these coupling parts 45 and the to-be-engaged parts 46 with each other, the body plate part 50 is provided through the front end arm part 51 in reaction when the contactor 56 contacts the electrodes of the liquid crystal panel 12. Is pushed upward and an unevenness occurs in the height of each blade-type probe 38, preventing contact between the contactor 56 and the electrode of the liquid crystal panel 12 from becoming unstable.

The engaging portion 45 is a cross-sectional rectangular convex member directed toward the body plate portion 50 of the blade-shaped probe 38, and is provided at the entire length of the tip slit bar 34A. It is provided over, and the to-be-engaged parts 46 of all the blade-type probes 38 are couple | bonded. The to-be-engaged part 46 is dug in substantially the same shape as the said engaging part 45 corresponding to the engaging part 45. As shown in FIG. The specific shape of the to-be-engaged part 46 is formed in square shape substantially the same as the cross-sectional shape of the engaging part 45. FIG. In addition, a substantially arcuate groove A (see Fig. 7) is provided below the inside of the to-be-engaged portion 46. The groove A is for minimizing the warping due to the concentration of stress to a minimum within the set range, so that the contactor 56 can be supported accurately.

The proximal end contact load receiving portion 44B includes an engaging portion 48 of the load receiving bar 39 provided on the proximal end of the block piece 33 and the engaging portion 48 of the blade-type probe 38. The engaging part 49 provided in the position corresponding to this is provided. When these engaging portions 48 and the to-be-engaged portion 49 are coupled to each other, the body plate portion (via the proximal end arm portion 52) is reacted when the contactor 57 contacts the terminal of the distal end portion of the FPC base 19. 50 is pushed down, and unevenness arises in the height of each blade-type probe 38, and the contact of the contact 57 and the terminal of the front-end | tip of the FPC base 19 is prevented from becoming unstable.

The load receiving bar 39 is composed of a base portion 39A fixed to the block piece 33 and a coupling portion 48 provided toward the probe base 13 from the base portion 39A. It is. The base portion 39A is set to the same length as the transverse direction of the block piece 33 and is fixed to the block piece 33 by screwing, bonding, or joining by a dovetail method. The coupling portion 48 is a member of a cross-sectional rectangular convex structure directed toward the probe base 13 and is provided over the entire length of the base portion 39A, and all the blade-type probes 38 are engaged. The part 49 is adapted to engage. The load receiving bar 39 is made of an insulator such as ceramics or synthetic resin. Alternatively, the load-bearing bar 39 is made of metal and an insulating material is attached to the contact portion with the blade-shaped probe 38 to insulate the blade-shaped probe 38 from the load-bearing bar 39. In addition, the load receiving bar 39 may be integrally formed with the block piece 33 and may be insulated between the blade probe 38 and the load receiving bar 39. The to-be-engaged part 49 is formed similarly to the said to-be-engaged part 46, and the groove | channel A (not shown) is provided similarly.

The positioning pin 35 is a member for supporting and positioning the blade-type probe 38. The positioning pins 35 are formed in a circumferential shape having a large diameter. The diameter of the large cylindrical columnar positioning pin 35 is set to the dimension which matches the inner diameter of the positioning pin hole 53 mentioned later of the blade-type probe 38. This is because the blade type probe 38 is positioned through the positioning pin 35. That is, when the positioning pin 35 is positioned with the positioning pin 35 inserted in the positioning pin hole 53 of the blade-type probe 38, the positioning pin 35 is positioned at the center axis of the positioning pin 35. The position of the blade-shaped probe 38 in the orthogonal direction is accurately determined. For this reason, by setting the diameter of the positioning pin 35 to the dimension which matches the inner diameter of the positioning pin hole 53 of the blade-type probe 38, and positioning the positioning pin 35, the said positioning The positioning of the blade-shaped probe 38 in the direction orthogonal to the central axis of the pin 35 is made possible accurately. The positioning pins 35 mainly position the blade-type probes 38, and the support of the blade-type probes 38 is mainly provided for each slit 43 of the leading slit bar 34A and the proximal slit bar 34B. And the engaging portion 45 and the load receiving bar 39. For this reason, only one positioning pin 35 is provided.

The support pin 36 is a member for supporting the blade type probe 38. The support pin 36 is formed in circular rod shape. The diameter of the support pin 36 is set to a dimension that matches the inner diameter of the support pin hole 54 described later of the blade-type probe 38. This is because the blade type probe 38 is positioned through the support pin 36 together with the positioning pin 35.

The side cover 37 is a plate material for supporting the positioning pin 35 and the support pin 36. Two side covers 37 are used and are provided on both sides of the block piece 33. The side cover 37 is provided with a cover fixing screw hole 37A into which the fixing screw 47 is inserted, a positioning pin fixing screw hole 37B, a support pin fixing screw hole 37C, and the like. Each screw hole is accurately positioned and provided to accurately position and support the positioning pin 35 and the support pin 36 with respect to the block piece 33.

The blade type probe 38 is a member for directly contacting an electrode of a circuit of the liquid crystal panel 12 to transmit an inspection signal or the like. The blade type probe 38 is comprised from the main body plate part 50, the front end side arm part 51, and the base end side arm part 52. As shown in FIG.

The main body plate part 50 is provided with the positioning pin hole 53 and the support pin hole 54 for letting the positioning pin 35 and the support pin 36 pass. The positioning pin hole 53 is set to a dimension whose inner diameter matches the outer diameter dimension of the positioning pin 35. The support pin hole 54 is set to the dimension whose inner diameter matches with the outer diameter dimension of the support pin 36. Thereby, the main body plate part 50 is correctly positioned and supported.

The tip arm 51 is a member for supporting the contactor 56 facing downward from the tip portion. In the front end side arm part 51, the contactor 56 is provided in the front end position matching with the electrode of the liquid crystal panel 12. As shown in FIG.

The proximal end arm portion 52 is a member for supporting the contactor 57 facing upward at its proximal end (right end in Fig. 6). In the base end arm portion 52, a contactor 57 is provided at a position that matches the terminal of the FPC cable 27. As shown in FIG.

Moreover, the to-be-engaged part 46 is provided in the position which faced the engaging part 45 side of the said front side slit bar 34A among the main body board parts 50. As shown in FIG. The to-be-engaged part 46 is a part for supporting the blade-type probe 38 with respect to the contact load received from the liquid crystal panel 12 side by being fitted to the engaging part 45. The to-be-engaged part 46 is comprised by the recessed groove provided in the position facing the engaging part 45 of 34 A of front end side slit bars among the main-body plate parts 50 of each blade-type probe 38. As shown in FIG.

The to-be-engaged part 49 is provided in the position which faced the engaging part 48 side of the said load receiving bar 39 among the main body board parts 50. As shown in FIG. The to-be-engaged part 49 is a part for supporting the blade-type probe 38 with respect to the contact load received by the FPC base 19 side by being fitted to the engaging part 48. The to-be-engaged part 49 is comprised by the recessed groove provided in the position facing the engaging part 48 of the load receiving bar 39 among the body plate parts 50 of each blade-type probe 38. As shown in FIG.

The probe unit 11 configured as described above acts as follows. In addition, since the operation | movement of the whole inspection apparatus is the same as that of the conventional inspection apparatus, it demonstrates centering here on the blade type probe 38 part.

When the liquid crystal panel 12 is placed in the measuring unit of the inspection apparatus, and the contactor 56 of the blade-shaped probe 38 of the probe block 20 contacts each electrode of the liquid crystal panel 12 and overdrives, A strong stress acts on the entire type probe 38. At this time, the force acts in the direction in which the tip arm portion 51 and the body plate portion 50 are pushed upward together with the contactor 56, but in the body plate portion 50 of the tip contact load receiving portion 44A. Since the to-be-engaged part 46 is fitted to the engaging part 45 and the main body plate part 50 is supported by 34A of front end side slit bars, the contactor 56 is reliably supported.

As a result, unevenness in the height direction of each blade-type probe 38 is reduced, and the contactor 56 at the tip of the blade-type probe 38 can be accurately supported. As a result, each contactor 56 reliably contacts each electrode of the liquid crystal panel 12, and contact stability improves.

On the other hand, at the proximal end of the blade-type probe 38, the probe block 20 is fixed to the probe plate 18, and the blade-type probe 38 when the contactor 57 contacts the terminal of the distal end of the FPC base 19. ) Strong stress acts on the whole. At this time, the force acts in the direction in which the proximal arm portion 52 and the main body plate portion 50 are pressed downward along with the contactor 57, but the main plate portion 50 avoids the base end contact load receiving portion 44B. Since the engaging portion 49 is fitted to the engaging portion 48, and the main body plate portion 50 is supported by the load bar 39, the contactor 57 is reliably supported.

As a result, unevenness of each blade-type probe 38 is reduced, and the contact 57 at the proximal end of the blade-type probe 38 can be accurately supported. As a result, each contact 57 reliably contacts each terminal of the front-end | tip part of the FPC base 19, and contact stability improves.

[Modification]

In the said embodiment, although the engaging part 48 of the load receiving bar 39 was arrange | positioned so that it may direct to the base end side (FPC base 19 side), you may arrange | position so that it may direct to the front end side. Specifically, as shown in FIG. 7, the load receiving bar 61 is provided at the proximal end of the block piece 33, and the engaging portion 62 is directed to the blade-type probe 38. In addition, the engaging portion 63 of the blade-type probe 38 is installed facing the engaging portion 62. Here, the to-be-engaged part 63 is formed in substantially hook shape, and supports the blade-type probe 38 so that it may hang on the upper surface of the engaging part 62. As shown in FIG. Also in this case, the same effects and effects as in the above embodiment can be exhibited.

In the above embodiment, only one positioning pin 35 is provided, but two may be provided. By supporting the blade-type probe 38 with two positioning pins 35, the blade-type probe 38 is operated by interacting with the tip contact load receiving portion 44A and the proximal contact load receiving portion 44B. I can support it more stably.

In the above embodiment, only one support pin 36 is provided, but two may be provided. By supporting the blade-type probe 38 with two support pins 36, the positioning pins 35, the tip contact load receiving portion 44A and the base contact load receiving portion 44B interact with each other, The blade-type probe 38 can be supported more stably.

In the said embodiment, although the engaging part 45 of the said front side contact load receiving part 44A was provided in 34A of front end side slit bars, you may provide in the front end side of the block piece 33. As shown in FIG. Also in this case, the same effects and effects as in the above embodiment can be exhibited.

In the said embodiment, although the engaging part 48 of the said base end side contact load receiving part 44B was provided in the load bar 39, you may provide it in the said base end slit bar 34B side. Also in this case, the same effects and effects as in the above embodiment can be exhibited.

In the said embodiment, although the load bar 39 of the base end side contact load receiving part 44B was provided in the base end side of the block piece 33, it was made to support the base end side of the blade-type probe 38, but it received a load. The bar 39 may be provided at the front end side of the block piece 33 to support the front end side of the blade-type probe 38. In this case, the coupling part 45 is provided in the proximal end slit bar 34B of the blade type probe 38, and the to-be-engaged part 49 is provided facing the coupling part 45. As shown in FIG. Also in this case, the same effects and effects as in the above embodiment can be exhibited.

According to the present invention, the unevenness of the blade-type probe is reduced, and the contact stability with each electrode at the front end side and the proximal end of the blade-type probe is improved.

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and all such variations or modifications can be considered to be included within the scope of the present invention.

Claims (12)

A probe assembly for supporting a blade-type probe and electrically contacting an electrode of an object under test, Block piece for integrally supporting a plurality of the blade-type probe; Positioning pins each penetrating through the plurality of blade-type probes and integrally supporting and positioning each blade-type probe; A tip-side contact load receiving portion which is inserted into the tip side of the blade-type probe that is the test object side and receives contact load when the tip-side contactor of the blade-type probe contacts the electrode of the test object; And A proximal end contact load receiving portion which is inserted into the proximal end of the blade probe and receives a contact load when the proximal contact of the blade probe contacts the electrode of the probe base side; Probe assembly comprising a. According to claim 1, It is provided with a front end side slit bar installed on the front end side of the block piece for supporting a plurality of blade-shaped probes at a predetermined interval, And the engaging portion provided at the distal contact load receiving portion at the distal end side of the distal slit bar or the block piece, and the engaging portion provided at a position corresponding to the engaging portion of the blade-type probe. The proximal end slit bar according to claim 1, which is provided at the proximal end of the block piece and supports the proximal end of the plurality of blade-type probes at a predetermined interval. And the proximal contact load receiving portion includes a coupling portion provided at the proximal end of the slit bar or the block piece, and an engaged portion provided at a position corresponding to the coupling portion of the blade-type probe. The load bearing bar of claim 1, wherein the tip-side contact load receiving portion is provided at a tip side of the block piece and supports a tip side of the blade-type probe, and is installed at a position corresponding to the load-bearing bar of the blade-type probe. And a load-bearing bar to which the load receiving bar is inserted to receive the contact load. The base end contact load receiving portion of claim 1, wherein the load receiving bar is installed at the base end of the block piece and supports the base end of the blade-type probe, and is installed at a position corresponding to the load receiving bar of the blade-type probe. And a load-bearing bar to which the load receiving bar is inserted to receive the contact load. The probe assembly of claim 1, wherein only one positioning pin is installed. An inspection apparatus used for inspecting a subject, A measuring section having a set unit for carrying in the inspected object from the outside and conveying it to the outside after completion of the inspection, and a probe unit for testing the inspected object passed from the set unit, A probe assembly for supporting a blade-type probe in the probe unit of the measurement unit to electrically contact an electrode of the object under test, the block assembly integrally supporting a plurality of the blade-type probes and a plurality of blade-type probes, respectively. A positioning pin that penetrates and integrally supports and positions each blade-type probe, and is fitted to a tip side of the blade-type probe that is on the test subject side, and the contactor of the blade-type probe contacts the electrode of the test subject. A proximal contact load receiving portion subjected to a contact load of the proximal end, and a proximal end contact load receiving portion which is inserted into the proximal end of the blade-type probe and receives the contact load when the proximal contact of the blade-shaped probe contacts the electrode of the probe base side. A sword comprising a probe assembly Device. 8. A tip slit bar according to claim 7, further comprising a tip side slit bar installed at the tip side of the block piece and supporting the tip ends of the plurality of blade-type probes at a predetermined interval, And the engaging portion provided at the distal contact load receiving portion provided at the distal end side of the distal slit bar or the block piece, and the engaging portion provided at a position corresponding to the engaging portion of the blade-type probe. The base end side slit bar of Claim 7 which is provided in the base end side of the said block piece, and supports the base end sides of a plurality of said blade-type probes at predetermined intervals, And the base end contact load receiving portion includes a coupling portion provided at the base end slit bar or the base end side of the block piece, and a coupled portion provided at a position corresponding to the coupling portion of the blade-type probe. 8. The load bearing bar according to claim 7, wherein the tip-side contact load receiving portion is provided at a tip side of the block piece and supports a tip side of the blade-type probe, and is installed at a position corresponding to the load-bearing bar of the blade-type probe. And a to-be-engaged portion to which the load receiving bar is inserted to receive the contact load. The base end contact load receiving portion according to claim 7, wherein the load receiving bar is provided at the base end of the block piece and supports the base end of the blade-type probe, and is installed at a position corresponding to the load receiving bar of the blade-type probe. And a to-be-engaged portion to which the load receiving bar is inserted to receive the contact load. 8. The inspection apparatus according to claim 7, wherein only one positioning pin is installed.

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