JP3958875B2 - Prober and probe needle contact method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a prober and a probe needle contact method for performing a lighting test or the like by bringing a probe needle into contact with a thin plate having an electric circuit provided on the surface thereof, such as a liquid crystal plate, and in particular by a needle pressure at the time of contact of the probe needle. The present invention relates to a prober and probe needle contact method that solves the problem.
[0002]
[Prior art]
In general, the prober is mainly composed of a gantry 1 and a main body 3 as shown in FIG.
[0003]
The gantry 1 is a member that supports the main body 3 from below. That is, the main body 3 is installed on the gantry 1. Inside the gantry 1 is provided a control box 2 for controlling the entire apparatus.
[0004]
The main body 3 includes a panel setting unit 5 provided on the right side in the drawing and a work table unit 9 provided on the left side in the drawing.
[0005]
The panel set unit 5 is a part to which the liquid crystal display panel 15 to be inspected by the work table unit 9 is attached. A work table 4 is attached to the panel set unit 5. The work table 4 can be moved between the panel set unit 5 and the work table unit 9. When the work table 4 is located on the panel set unit 5, a liquid crystal display panel 15 is attached to the work table unit 9. It is supposed to be. The work table 4 is provided with a vacuuming mechanism (not shown) for holding the liquid crystal display panel 15 by vacuuming. A CRT 6 for projecting alignment marks engraved on the liquid crystal display panel 15 is provided on the upper part of the panel set unit 5.
[0006]
The work table portion 9 is a portion that performs a lighting test of the liquid crystal display panel 15. The work table unit 9 includes an alignment stage 13, a contact Z stage 14, and a work table 4. The alignment stage 13 is composed of X, Y, and θ stages, and adjusts in the X, Y, and θ directions. The contact Z stage 14 supports the work table 4 and performs adjustment in the Z direction. The contact Z stage 14 is attached to the alignment stage 13 and moved in the X, Y, and θ directions. Thereby, the work table 4 is adjusted in the X, Y, Z, and θ directions by the alignment stage 13 and the contact Z stage 14. Further, the alignment stage 13 is attached to a moving mechanism (not shown). The work table 4 is supported by this moving mechanism via the alignment stage 13 and the contact Z stage 14, and moves between the panel set unit 5 and the work table unit 9. By this moving mechanism, the liquid crystal display panel 15 is attached when the work table 4 is moved to the panel set unit 5, and the work table 4 supporting the liquid crystal display panel 15 is conveyed to the work table unit 9, and the alignment stage. The alignment operation and the contact operation are performed at 13 or the like.
[0007]
These work table 4, alignment stage 13 and contact Z stage 14 are inclined. Thereby, the liquid crystal display panel 15 is attached to the work table 4 in an inclined manner, and the visibility during the test is improved.
[0008]
In the work table portion 9, a base plate 12 is provided so as to be inclined while facing the work table 4. The base plate 12 is disposed at a fixed interval with respect to the work table 4. A large square opening is provided at the center of the base plate 12 so as to support a probe base 16 described later.
[0009]
A probe unit 10 is attached to the outer side surface (left side surface in FIG. 3) of the base plate 12. The probe unit 10 includes a probe base 16 and a probe block 11. The probe base 16 is provided with a rectangular opening corresponding to the opening of the base plate 12, and is directly fixed to the base plate 12 in a state in which these openings are aligned. The probe block 11 supports the probe needle 7 at its tip (lower end). Specifically, a plurality of probe needles 7 are integrally supported in a state aligned in parallel. A plurality of the probe blocks 11 are arranged on adjacent sides of the square opening of the probe base 16. Specifically, three on the left short side (side on the gate side terminal 22 side of the liquid crystal display panel 15) of the square opening in FIG. 2, and the long side below the square opening (data side of the liquid crystal display panel 15). Six probe blocks 11 are respectively provided on the terminal 23 side. Here, three probe blocks 11 are provided on the short side and six on the long side, but this is an example, and there may be two or less, four or more, five or more, and seven or more.
[0010]
Two alignment cameras 8 for positioning the liquid crystal display panel 15 and each probe block 11 are provided on both upper sides of the base plate 12. Each alignment camera 8 photographs an alignment mark carved on the liquid crystal display panel 15 and displays it on the CRT 6.
[0011]
The probe unit configured as described above operates as follows under the control of the control box 2.
[0012]
The work table 4 has been moved to the panel setting unit 5 side in advance. When the liquid crystal display panel 15 to be inspected is placed on the work table 4, the liquid crystal display panel 15 is fixed by the vacuuming mechanism.
[0013]
The work table 4 is moved to the work table unit 9 side with the liquid crystal display panel 15 fixed. In the work table unit 9, positioning is performed by the alignment stage 13 based on the alignment mark photographed by the alignment camera 8. When the positioning is completed, the work table 4 is raised by the contact Z stage 14, and the probe needle 7 of each probe block 11 is brought into contact with the gate side terminal 22 and the data side terminal 23 of the liquid crystal display panel 15. When the probe needle 7 and the gate-side terminal 22 and the like come into contact with each other, the work table 4 is further raised slightly, so-called overdrive is applied.
[0014]
Next, a lighting inspection of the liquid crystal display panel 15 is performed. When the lighting inspection is completed, the work table 4 is lowered by the contact Z stage 14 and moved to the panel setting unit 5. Next, the vacuum fixing of the liquid crystal display panel 15 is released and the liquid crystal display panel 15 is detached from the work table 4.
[0015]
[Problems to be solved by the invention]
In the prober having the above-described configuration, the work table 4 is raised and overdrive is applied in a state where the gate-side terminal 22 and the data-side terminal 23 of the liquid crystal display panel 15 are in contact with the probe needles 7 of the probe blocks 11. And a big pressure arises between these. In particular, a large pressure is applied to the data side terminal 23 side where six probe blocks 11 are provided. For example, a pressure of 20 to 30 kgf is applied to the data side terminal 23 side.
[0016]
This pressure acts on the probe base 16 and the base plate 12 via the probe block 11 as a reaction force as it is. As a result, as shown in FIG. 4, the probe base 16 and the base plate 12 are bent in a mountain shape.
[0017]
As described above, when the probe base 16 and the base plate 12 are bent in a mountain shape, the three probe blocks 11 of the gate-side terminal 22 are inclined with respect to the liquid crystal display panel 15. As a result, the position of the gate side terminal 22 of the liquid crystal display panel 15 and the probe needle 7 of each probe block 11 in contact with the terminal 22 shifts.
[0018]
This phenomenon occurs when overdrive is applied while the probe needle 7 of each probe block 11 is in contact with the gate terminal 22 and the data terminal 23, respectively. At this time, the probe needle 7 of the probe block 11 that has come into contact with the gate side terminal 22 is strongly pressed against the gate side terminal 22 by the overdrive before the probe base 16 or the like is bent. Therefore, as shown in FIG. Needle scratches 17 are attached to the side terminals 22.
[0019]
Further, when the lighting inspection is completed, the work table 4 is lowered, and each probe needle 7 moves away from the gate side terminal 22 and the data side terminal 23, but before that, it acted on the probe base 16 and the base plate 12. Reaction force is reduced. That is, before the probe needle 7 moves away from the gate-side terminal 22 or the like, the mountain-shaped bending of the probe base 16 and the base plate 12 is reduced, so that the inclination of the probe needle 7 and the liquid crystal display panel 15 returns to the original state. . At this time, each probe needle 7 on the side of the gate side terminal 22 gives a needle flaw 18 to the gate side terminal 22 in an oblique direction as the inclination returns. The needle flaw 18 may extend to the adjacent gate side terminal 22 beyond the insulating film 19 between the gate side terminals 22 arranged at intervals of several tens of microns. In this case, there is a problem in that a part of the insulating film 19 is broken, solder leakage occurs in bonding performed later, and the adjacent gate side terminals 22 are electrically short-circuited.
[0020]
The present invention has been made in view of such problems, and provides a prober and a probe needle contact method capable of absorbing the deflection due to pressure caused by the contact of a large number of probe needles and reliably preventing an electrical short circuit between terminals. The purpose is to do.
[0021]
[Means for Solving the Problems]
  A prober according to a first aspect of the present invention is a prober for performing a test by accurately contacting a plurality of probe needles that are integrally supported in correspondence with a plurality of thin plate terminals to be inspected. Depending on the needle pressure of the probe needleAccompanying bending of surrounding membersAbsorb the tilt between the probe needle and the terminal of the thin plate,All probe needles and the terminals of the thin plateProvided with an inclination absorbing means for contact,The inclination absorbing means includes probe needle groups classified into a plurality of groups. Among these probe needle groups, the probe needle group having a high needle pressure has a low height relative to the thin plate, and the probe pressure is low. Increase the height of the needle groupIt is characterized by that.
[0022]
  With the above configuration, when an inclination occurs between the probe needle and the thin plate terminal due to the needle pressure of the probe needle, the inclination absorbing means absorbs the inclination. As a result, the probe needle and the thin plate terminal contact each other accurately without being affected by the needle pressure.Further, when a probe needle group having a high needle pressure comes into contact with the terminal, the reaction force is large corresponding to the needle pressure, so that each part bends. At this time, since the probe needle group having a small needle pressure is supported at a high position, the probe needle group does not contact the terminal until each portion is bent. At this time, the height of the probe needle group with a small needle pressure is set to such an extent that the parts of the probe needle group with a large needle pressure are in contact after being sufficiently bent. As a result, the probe needle in contact with the terminal is prevented from being damaged due to the bending.
[0023]
The prober according to a second aspect of the invention is characterized in that the inclination absorbing means is constituted by an elevating mechanism that supports the probe needle and elevates and lowers.
[0024]
With the above-described configuration, the lifting mechanism that constitutes the tilt absorbing means supports the probe needle and moves it up and down. As a result, when bending occurs due to contact with the terminal of the probe needle not supported by the lifting mechanism, the probe needle supported by the lifting mechanism is supported at a position higher than the other probe needles, and the other probe needles After the contact and the terminal are bent, the probe needle is lowered by the lifting mechanism and brought into contact with the terminal. As a result, it is possible to prevent the periphery of the terminal from being damaged by the displacement of the probe needle due to bending.
[0025]
In the prober according to a third aspect of the invention, the inclination absorbing means has flexibility and integrally supports a plurality of probe needles, and the amount of deflection changes according to the needle pressure of the probe needle. It is characterized by comprising an attachment part.
[0026]
With the above configuration, when the probe needle that is integrally supported by the probe needle mounting portion contacts the terminal, the reaction force of the needle pressure of the probe needle reaches the probe needle mounting portion. The probe needle mounting portion is bent by this reaction force and absorbs the needle pressure of the probe needle. When the needle pressure of the probe needle is large, the amount of deflection increases accordingly.
[0029]
  4thThe probe needle contact method according to the present invention is a prober for performing a test by accurately contacting a plurality of probe needles that are integrally supported in correspondence with a plurality of thin plate terminals to be inspected. The probe needle group which is classified into a plurality of groups by position and can move independently from each other is brought into contact with the terminals of the thin plate in descending order of the needle pressure, and separated from the terminals of the thin plate in order of increasing needle pressure. Features.
[0030]
With the above configuration, when the probe needle group is brought into contact with each terminal of the thin plate, the parts are bent at an early stage by bringing the probe needle group into contact with the terminal in order from the probe needle group having the highest needle pressure. When the probe needle group is separated from the thin plate terminal, the probe needle group having a small needle pressure can be separated from the terminal before the bending of each part is restored by separating the probe needle group from the probe needle group having a small needle pressure in order. Thereby, it is possible to prevent the terminal and its periphery from being scratched.
[0031]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a prober and a probe needle contact method according to the present invention will be described with reference to the accompanying drawings.
[0032]
[Configuration of First Embodiment]
In this embodiment, a prober and probe needle contact method will be described. FIG. 1 is a main part perspective view showing a main part of a prober according to this embodiment, and FIGS. 6 to 8 are operation explanatory views showing a probe needle contact method of the prober according to this embodiment.
[0033]
Since the entire configuration of the prober according to the present embodiment is substantially the same as that of the conventional prober, the same members are denoted by the same reference numerals and the description thereof is omitted.
[0034]
The prober of this embodiment is characterized in that the mounting structure of the three probe blocks 57 on the gate side terminal 22 side is improved. The overall configuration of the probe base 56 is the same as that of the conventional prober. The configuration of the probe block 11 on the data side terminal 23 side is the same as that of the conventional prober.
[0035]
The probe block 57 on the gate side terminal 22 side is supported by a block raising / lowering mechanism 50 as an inclination absorbing means. This block raising / lowering mechanism 50 integrally integrates a linear guide mounting plate 51 and a linear guide 52 for guiding the raising and lowering of the probe block 57, an air cylinder 53 and a cylinder mounting block 54 for raising and lowering the probe block 57, and each probe block 57. It comprises a supporting probe block mounting plate 55.
[0036]
A pair of linear guide mounting plates 51 are provided to face the upper surface of the probe base 56. Two linear guides 52 are provided on the inner surface of each linear guide mounting plate 51 so as to face each other. A probe block mounting plate 55 is fixed to each linear guide 52. As a result, the probe block mounting plate 55 is moved up and down while being guided by the linear guide 52.
[0037]
The cylinder mounting block 54 is provided in the vicinity of the probe block mounting plate 55 so as to face the center portion of the upper side surface of the probe block mounting plate 55. The base end portion of the cylinder mounting block 54 is fixed to the probe base 56. An air cylinder 53 is attached to the upper end portion of the cylinder attachment block 54 so as to face the probe block attachment plate 55. The lower end portion of the piston portion 53 </ b> A of the air cylinder 53 is fixed to the center portion of the upper surface of the probe block mounting plate 55. The air cylinder 53 is connected to the control box 2 and controlled together with the alignment stage 13 and the contact Z stage 14. A compressed air supply source (not shown) is connected to the air cylinder 53 and is controlled by a solenoid valve (not shown) or the like.
[0038]
The probe block 57 includes a base end side horizontal bar portion 57A and a tip end side vertical bar portion 57B, and is formed in an L shape as a whole. A large number of probe needles 7 arranged in parallel are attached to the distal end portion (lower end portion) of the distal end side vertical bar portion 57B. The proximal end side horizontal bar portion 57 </ b> A of the probe block 57 is fixed to the lower surface of the probe block mounting plate 55. The probe block 57 is adjusted by the air cylinder 53 so that the height of the probe needle 7 supported by the block lifting mechanism 50 on the gate side terminal 22 side is the same as the height of the probe needle 7 on the data side terminal 23 side. It is supported to be higher than the height. This difference in height is a state in which each probe needle 7 on the data side terminal 23 side comes into contact with the data side terminal 23 and is overdriven and the probe base 56 and the like are almost bent (preferably completely bent). In this state, the probe needle 7 on the gate side terminal 22 side is set so as not to contact the gate side terminal 22.
[0039]
[Operation]
The liquid crystal display panel 15 is placed on the work table 4 that has been moved to the panel setting unit 5 in advance, and is fixed by a vacuuming mechanism.
[0040]
The work table 4 is moved to the work table unit 9 side with the liquid crystal display panel 15 fixed. In the work table unit 9, positioning is performed by the alignment stage 13 based on the alignment mark. When the positioning is completed, the work table 4 is lifted by the contact Z stage 14 from the state of FIG. 6, and as shown in FIG. 7, the probe of each probe block 57 on the data side terminal 23 side (left side in FIG. 7). The needle 7 is brought into contact with the data side terminal 23 of the liquid crystal display panel 15. At this time, the probe needle 7 on the gate side terminal 22 side (the side supported by the block lifting mechanism 50) has not yet been in contact.
[0041]
In this state, the work table 4 is lifted slightly, and the probe needle 7 in contact with the data side terminal 23 is overdriven. As a result, the probe base 56 and the base plate 12 are bent into a mountain shape by the needle pressure of the probe needle 7. At this time, the probe needle 7 on the gate side terminal 22 side is not yet in contact. That is, the probe needles 7 are contacted in descending order of needle pressure.
[0042]
Next, as shown in FIG. 8, the air cylinder 53 is actuated to lower the probe block 57 attached to the probe block attachment plate 55. As a result, each probe needle 7 of the probe block 57 comes into contact with the gate-side terminal 22. Further, the air cylinder 53 is activated and overdrive is applied.
[0043]
Next, a lighting inspection of the liquid crystal display panel 15 is performed. When the lighting inspection is completed, the air cylinder 53 is first actuated to raise the probe block 57, and the probe needle 7 in contact with the gate side terminal 22 is released. That is, the probe needle 7 is released in ascending order of needle pressure. For this reason, the probe needle 7 in contact with the gate side terminal 22 is separated from the gate side terminal 22 before the bending of the probe base 56 and the like returns.
[0044]
Next, the work table 4 is lowered and the probe needle 7 in contact with the data side terminal 23 is released from the data side terminal 23. Thereafter, the work table 4 is moved to the panel setting unit 5 and the vacuum fixation is released. Next, the liquid crystal display panel 15 is removed from the work table 4, and the lighting inspection work is completed.
[0045]
Note that when the probe base 56 and the like are bent due to overdrive of the probe needle 7 on the data side terminal 23 side, the positions of the probe needle 7 on the gate side terminal 22 side and the gate side terminal 22 are somewhat shifted. Since this deviation is slightly different depending on each prober, each apparatus is actually overdriven to produce a deviation, and the relative position adjustment between the gate terminal 22 side and the probe needle 7 is performed in accordance with each deviation. .
[0046]
[effect]
As described above, the block raising / lowering mechanism 50 is provided, and the probe needle 56 on the data side terminal 23 side where the needle pressure is high is first contacted to bend the probe base 56 and the like in advance, and then the block raising / lowering mechanism 50 uses the gate side terminal. The probe needle 7 on the 22 side is brought into contact with the gate side terminal 22 and the probe needle 7 on the side of the gate side terminal 22 having a low needle pressure is separated from the gate side terminal 22 before the bending of the probe base 56 and the like is restored. Therefore, when the overdrive is applied or released, the probe needle 7 on the gate side terminal 22 side is not displaced and the needle flaw 18 is not attached in a state where the probe needle 7 is in contact with the gate side terminal 22. As a result, the insulating film 19 between the terminals is not broken, and an electrical short circuit between the terminals due to solder leakage during bonding can be prevented.
[0047]
[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIG. In addition, since the whole structure of the probe unit which concerns on this embodiment is as substantially the same as the said conventional probe unit, the same code | symbol is attached | subjected to the same member and the description is abbreviate | omitted.
[0048]
The feature of the prober of this embodiment is that the configuration of the probe unit 100 is improved. That is, the gate-side probe block mounting portion 104 is provided as a probe needle mounting portion that has flexibility and supports a plurality of probe needles 7 in an integrated manner, and the amount of deflection changes according to the needle pressure of the probe needle 7. And a data side probe block mounting portion 105 is provided.
[0049]
The probe base 102 of the present embodiment is generally the same as the conventional probe base 16. That is, the probe base 102 is formed in a square shape as a whole, and a square opening is provided at the center thereof. In the probe base 102, three probe blocks 11 are provided at positions corresponding to the gate-side terminals 22 of the liquid crystal display panel 15, and six probe blocks 11 are provided at positions corresponding to the data-side terminals 23. . Then, slits 103 are respectively provided at both end positions sandwiching the three and six probe blocks 11, and a gate side probe block mounting portion 104 and a data side probe block mounting portion 105 are formed. The gate-side probe block mounting portion 104 and the data-side probe block mounting portion 105 are integrally supported by the three and six probe blocks 11 so that they can be bent at the same time. The gate-side probe block mounting portion 104 and the data-side probe block mounting portion 105 allow the probe block 11 to bend in the vertical direction by an amount corresponding to the needle pressure of the probe needle 7 in a state where the probe blocks 11 are integrally supported. At the same time, the strength is set so that twisting can be allowed.
[0050]
[Operation]
The probe unit configured as described above operates as follows.
[0051]
Since the overall operation is the same as that in the first embodiment, only the operation in the work table unit 9 will be described here.
[0052]
In the work table unit 9, the work table 4 is raised, the probe needles 7 are brought into contact with the gate side terminals 22 and the data side terminals 23, respectively, and overdrive is applied. Thereby, the needle pressure by each probe needle 7 acts on the gate side terminal 22 and the data side terminal 23, and the reaction acts via the probe block 11 to the gate side probe block mounting portion 104 and the data side probe block mounting portion. 105. Each of the attachment portions 104 and 105 bends by receiving the reaction force of the probe pressure of each probe needle 7 and absorbs the reaction force. In particular, since the data-side probe block mounting portion 105 side has six probe blocks 11, a larger reaction force than the gate-side probe block mounting portion 104 acts. For this reason, the data side probe block mounting part 105 is bent more largely than the gate side probe block mounting part 104, and absorbs reaction force. That is, when the data side probe block mounting portion 105 is largely bent, the inclination between the probe needle 7 of the data side probe block mounting portion 105 and the liquid crystal display panel 15 is absorbed, and the gate side terminal of the probe needle 7 is absorbed. The contact state to 22 etc. is maintained and the displacement of the probe needle 7 is prevented.
[0053]
Thereby, each probe needle 7 contacts the gate side terminal 22 and the data side terminal 23 accurately, and a lighting test is performed.
[0054]
After completion of the test, the work table 4 is lowered. At this time, the bending of the gate-side probe block mounting portion 104 and the data-side probe block mounting portion 105 first returns. Thereafter, each probe needle 7 is separated from the gate side terminal 22 and the data side terminal 23.
[0055]
[effect]
As described above, the reaction force (reaction) caused by the needle pressure of each probe needle 7 is absorbed by bending the gate-side probe block mounting portion 104 and the data-side probe block mounting portion 105. Can be prevented from bending. Thus, when the overdrive is applied or released, the probe needle 7 is displaced, that is, when the probe base 102 or the like is bent by the needle pressure of the probe needle 7 or the bending is eliminated, the gate side terminal It is possible to prevent the probe needle 7 from being displaced in a state where it is in contact with the data terminal 22 and the data terminal 23. As a result, the insulating film 19 between the terminals is not broken by the probe needle 7, and an electrical short circuit between the terminals due to solder leakage during bonding can be prevented.
[0056]
[Modification]
(1) In each of the above embodiments, the liquid crystal display panel 15 has been described as an example. However, the present invention is not limited to this, and the present invention is not limited to this, as long as it is a thin plate that needs to prevent the probe needle 7 from being displaced due to overdrive during inspection. By applying the invention, the same operations and effects as described above can be achieved.
[0057]
(2) In the first embodiment, the block lifting mechanism 50 is provided on the gate side terminal 22 side, but may be provided on the data side terminal 23 side. You may provide in both the gate side terminal 22 and the data side terminal 23. FIG. Also by these, the effect | action and effect similar to the said 1st Embodiment can be show | played.
[0058]
(3) In the first embodiment, the block raising / lowering mechanism 50 moves the three probe blocks 11 up and down as they are supported by the probe block mounting plate 55 guided by the linear guide 52. 50 may be provided with means for correcting the tilt angle. That is, the inclination of the liquid crystal display panel 15 and the probe needle 7 (specifically, the inclination of the work table 4 and the probe base 56) is detected by electrical, optical, mechanical or other means, and the inclination is detected. A means for correcting the probe block mounting plate 55 may be provided accordingly. Specifically, the distance between the probe base 56 and the work table 4 is detected at two or more locations using a proximity sensor, laser light, or the like, and the inclination is detected from the difference. By providing two air cylinders 53 and adjusting the extension amount of each piston portion 53A according to the inclination detected by a sensor or the like, the inclination of the probe block mounting plate 55 is corrected, and the liquid crystal display panel 15 The gate-side terminal 22 and the probe needles 7 are aligned. Also by this, the same operation and effect as the first embodiment can be obtained.
[0059]
(4) In the first embodiment, the block raising / lowering mechanism 50 for raising and lowering the probe needle 7 is provided as the inclination absorbing means so that the position of the probe needle 7 can be changed during the inspection. However, the gate side terminal 22 side and the data side The height of the probe needle 7 on the terminal 23 side may be adjusted and fixed in advance. In this case, the inclination absorbing means may remain the configuration of the block lifting mechanism 50, or the air cylinder 53 may be replaced with a screw mechanism or the like. A configuration with only a screw mechanism may be used.
[0060]
In this case, the difference in height is that after each probe needle 7 on the data side terminal 23 comes into contact with the data side terminal 23, the overdrive starts and the probe base 16 and the like are almost bent (preferably, completely) The probe needle 7 on the gate side terminal 22 side is brought into contact with the gate side terminal 22 and sufficient overdrive is applied after the deflection. That is, the work table 4 is raised by several tens of microns due to overdrive, but the probe needle 7 on the gate side terminal 22 side is gated at the final stage of the ascent process (after the probe base 16 is bent by overdrive). The height of each probe needle 7 is set such that sufficient overdrive is applied in contact with the side terminal 22. This height setting varies depending on the number of probe needles 7, strength, stroke length when bending, the rigidity of the probe base 16 and the base plate 12, and so on, and is set according to each probe unit.
[0061]
(5) In the first embodiment, the air cylinder 53 is used as means for raising and lowering the probe block mounting plate 55 of the block raising and lowering mechanism 50, and the probe block mounting plate 55 is raised and lowered by air pressure. May be used. Moreover, you may make it raise / lower the probe block attachment board 55 using a motor.
[0062]
(6) In the second embodiment, the slit 103 is formed to configure the gate-side probe block mounting portion 104 and the data-side probe block mounting portion 105 as tilt absorbing means. The data side probe block mounting portion 105 may be formed to protrude inward from the probe base 102. In this case, the opening of the probe base 102 is largely formed according to the gate-side probe block mounting portion 104 and the like that are formed to protrude inward.
[0063]
Further, since the inclination absorbing means only needs to be configured to bend and absorb the reaction force due to the needle pressure of the probe needle 7, the probe block 11 itself supporting the probe needle 7 may be configured to have flexibility. . In this case, the probe block 11 itself becomes an inclination absorbing means.
[0064]
【The invention's effect】
As described above, according to the present invention, the following effects can be obtained.
[0065]
The probe needle is overdriven because it is provided with an inclination absorbing means that absorbs the inclination between the probe needle and the terminal of the thin plate due to the needle pressure of the probe needle and makes the contact with each other accurately. When or when the probe needle is released, the probe needle does not deviate greatly in contact with the terminal. As a result, damage to the terminals and the surroundings can be prevented, and an electrical short circuit between the terminals can be prevented.
[0066]
Further, by the method of the present invention, the probe needles classified into a plurality of groups can be moved independently of each other, and each probe needle group is brought into contact with a thin plate terminal in descending order of needle pressure. Since the probe is separated from the thin plate terminal in ascending order of the needle pressure, as described above, when the probe needle is overdriven or released, the probe needle may be greatly displaced in a state of contacting the terminal. It is possible to prevent damage to the terminals and their surroundings and electrical short circuit between the terminals.
[Brief description of the drawings]
FIG. 1 is a main part perspective view showing a main part of a prober according to a first embodiment of the present invention.
FIG. 2 is a front view showing a conventional prober.
FIG. 3 is a side view showing a conventional prober.
FIG. 4 is a cross-sectional view of a main part showing a state in which a base plate and a probe base are bent by a needle pressure in a conventional prober.
FIG. 5 is a schematic diagram showing a state in which a probe needle comes into contact with a gate-side terminal and is scratched in a conventional prober.
FIG. 6 is a main part enlarged view showing a state where probe needles of the prober according to the first embodiment of the present invention are not in contact with each other.
FIG. 7 is an essential part enlarged view showing a state in which the probe needle on the data side terminal side of the prober according to the first embodiment of the present invention is in contact.
FIG. 8 is an enlarged view of a main part showing a state where probe needles of a gate side terminal and a data side terminal of the prober according to the first embodiment of the present invention are in contact with each other.
FIG. 9 is a plan view showing a probe unit of a prober according to a second embodiment of the present invention.
[Explanation of symbols]
1: stand, 2: control box, 3: main body, 4: work table, 5: panel set, 6: CRT, 7: probe needle, 8: alignment camera, 9: work table, 10: probe unit, 11 : Probe block, 12: Base plate, 13: Alignment stage, 14: Contact Z stage, 15: Liquid crystal display panel, 16: Probe base, 17, 18: Needle scratch, 19: Insulating film, 22: Gate side terminal, 23: Data side terminal, 50: Block lifting mechanism, 51: Linear guide mounting plate, 52: Linear guide, 53: Air cylinder, 54: Cylinder mounting block, 55: Probe block mounting plate, 56: Probe base, 57: Probe block, 100: Probe unit, 102: Probe base, 103: Slit 104: gate side probe block attaching portion, 105: data side probe block attaching portion.

Claims (4)

In a prober for performing a test by accurately contacting a probe needle integrally supported by a plurality of terminals corresponding to a plurality of terminals of a thin plate to be inspected,
Inclination absorbing means for absorbing the inclination between the probe needle and the thin plate terminal due to bending of the surrounding members due to the needle pressure of the probe needle and bringing all the probe needles and the thin plate terminal into contact with each other. ,
The inclination absorbing means is configured to have probe needle groups classified into a plurality of groups, and among these probe needle groups, the probe needle group having a high needle pressure has a low height relative to the thin plate, and the probe has a low needle pressure. A prober characterized by increasing the height of the needle group . The prober according to claim 1, wherein
The prober according to claim 1, wherein the inclination absorbing means is constituted by an elevating mechanism that supports and elevates the probe needle. The prober according to claim 1, wherein
The inclination absorbing means is configured by a probe needle mounting portion that has flexibility and integrally supports a plurality of probe needles, and the amount of deflection changes according to the needle pressure of the probe needle. A prober. In a prober for performing a test by accurately contacting a probe needle integrally supported by a plurality of terminals corresponding to a plurality of terminals of a thin plate to be inspected,
A group of probe needles that are classified into a plurality of groups at the arrangement position and that can move independently from each other are brought into contact with the terminals of the thin plate in descending order of the needle pressure, and separated from the terminals of the thin plate in the order of increasing needle pressure. A probe needle contact method of a prober characterized by the above.

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