KR100923658B1 - Probe Positioning Method, Movable Probe Unit Mechanism, and Inspection Apparatus - Google Patents

Abstract

The present invention is to enable easy positioning of the probe assembly with respect to the liquid crystal panel. According to the present invention, the liquid crystal panel is installed at a set position, and the probe assembly is moved independently from another probe assembly while the probe of the probe assembly and the electrode of the liquid crystal panel are photographed by photographing means. A probe positioning step of aligning the position, a holding step of maintaining a relative position with respect to the base plate of the probe assembly while keeping the position of the probe and the electrode in the probe positioning step, and moving the photographing means to the A reference position specifying step of specifying a reference position of the liquid crystal panel by photographing the alignment mark of the liquid crystal panel after the alignment with the photographing means; and aligning the alignment mark of the new inspection target plate with the specific reference position by the probe and the new inspection table. Normal positioning to match the position of the electrode on the top plate It comprises a process.

LCD panel, probe assembly, probe, electrode, photographing means, alignment mark, alignment

Description

Probe Positioning Method, Movable Probe Unit Mechanism, and Inspection Apparatus

1 is an enlarged perspective view of a main portion showing a movable probe unit mechanism according to an embodiment of the present invention.

2 is a side sectional view showing a movable probe unit mechanism, a work table, and a backlight according to an embodiment of the present invention.

3 is a perspective view showing a movable probe unit mechanism according to an embodiment of the present invention.

4 is a perspective view showing a movable probe unit mechanism according to an embodiment of the present invention.

5 is a plan view showing a movable probe unit mechanism according to an embodiment of the present invention.

6 is a partially enlarged view showing the main portion of the movable probe unit mechanism according to the embodiment of the present invention.

Fig. 7 is a schematic diagram showing a contact state between an electrode and a probe taken by the alignment camera unit.

8 is a partially enlarged cross-sectional view showing the proximal block portion of the probe assembly of the movable probe unit mechanism according to the embodiment of the present invention.

9 is an enlarged view illustrating main parts showing a first modification.

10 is an enlarged view illustrating main parts illustrating a second modified example.

Description of the main symbols in the drawings

1: movable probe unit mechanism 2: worktable

3: liquid crystal panel 4: electrode

5: probe assembly 6: probe

7: backlight 8: fluorescent tube

9: housing 10: light guide plate

11: diffuser 15: base plate

16: probe assembly

17: Probe assembly slide mechanism

18: lock mechanism 19: photographing means

20: photographing means slide mechanism 21: moving mechanism

24: probe 25: probe rail

26: probe guide 28: electronic lock

29: switch 30: solenoid

31: fixed pin 33: base block portion

34: direction board part 35: alignment camera part

37: connecting mechanism 38: cylinder

39: connecting rod 41: recording means rail

42: shooting guide 44: ball screw

45: moving nut portion 46: drive motor

51: fixed pin 52: lift pin

53: spring

Field of invention

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe positioning method, a movable probe unit mechanism, and an inspection apparatus in which a probe and an electrode are brought into contact with each other for a lighting inspection of an inspection object plate such as a liquid crystal display panel.

Background of the Invention

One test in the manufacturing process of a liquid crystal panel is the final test of a cell process, and there is a lighting test of the liquid crystal panel which enclosed the liquid crystal. The lighting test includes a test for turning on the liquid crystal panel to display a test pattern and confirming an operating state of the liquid crystal panel. In the lighting inspection, inspection of chromaticity, color unevenness, contrast, and the like is performed.

The inspection apparatus used for the lighting inspection includes an automatic inspection apparatus for inspecting a test pattern using a CCD camera, and a visual inspection apparatus for inspecting by a human eye.

As one of the inspection apparatuses of such a liquid crystal panel, there exist some which provided the some contact unit for an inspection in the inspection stage in which the liquid crystal panel under test is arrange | positioned.

In the plurality of contact units, at the time of inspection, the contacts contact the electrodes of the liquid crystal panel on the panel receiver of the inspection stage, thereby supplying the inspection signal from the energization circuit to the display panel.

Moreover, at the time of arrangement | positioning of the display panel in the panel receiver before inspection, and taking out the display panel from the panel receiver after inspection, each contact unit retreats from the arrangement area of a display panel.

Thereby, the handling of the display panel is smoothly performed without disturbing the arrangement of the plurality of contact units to the panel support of the display panel and the removal thereof (Patent Document 1).

In addition, for display panels of different sizes, it was necessary to provide a display panel dedicated inspection stage and a probe unit, but it is necessary to install a new dedicated inspection stage and a probe unit by adjusting the opening to the size of the display panel having a different size. The apparatus which removed is also seen (patent document 2).

[Patent Document 1] Japanese Patent Application Laid-Open No. 2002-350485

[Patent Document 2] Japanese Patent Application Laid-Open No. 2002-91336

In the conventional probe unit, since the contact unit is driven by providing a motor and wiring in each contact unit, the number of wirings increases. In this case, since it is necessary to secure the space to which wiring is enclosed, it was difficult to ensure a large work space.

In the alignment of the probe with the electrodes of the liquid crystal panel, the probe and each electrode can be aligned only in the unit of a contact unit in which a plurality of probe blocks are integrated. Therefore, the shift | offset | difference with respect to each electrode of each probe cannot be absorbed reliably with respect to the thermal expansion of the liquid crystal panel by the heat of a backlight.

In addition, when a plurality of probe blocks are mounted in the same contact unit, the relative position between each probe block cannot be adjusted. Therefore, when the variety (positioning position of each electrode) of the liquid crystal panel is changed, the distance between each probe and each electrode is changed. Proper positioning becomes difficult.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a probe positioning method, a movable probe unit mechanism, and an inspection apparatus that allow thermal expansion of an inspection object plate to facilitate alignment of a probe and an electrode. .

The above and other objects of the present invention can be achieved by the present invention described below.

Summary of the Invention

The probe positioning method according to the present invention has been made to solve the above problems, and includes a plurality of probe assemblies movably supported with respect to the base plate of the probe unit for inspecting the inspection target plate, and the angles with respect to the base plate. A probe positioning method for aligning a position of an electrode of the inspection object plate and a probe of each probe assembly by means of photographing means supported by a movable means parallel to the probe assembly, wherein the inspection object plate is installed at a setting position, Probe alignment to position the probe and the electrode by moving the probe assembly independently of the other probe assembly while photographing the probe of the probe assembly and the electrode of the inspection target plate with the imaging means as appropriate. Process and the probe position A holding step of maintaining a relative position with respect to the base plate of the probe assembly in a state where the position of the probe and the electrode is aligned in the process, and moving the photographing means to mark the alignment mark of the inspection target plate after the positioning A reference position specifying process for specifying a reference position of the positioned inspection target plate by aligning the alignment mark of the new inspection target plate with the reference mark specified at the reference position specified by the reference position specifying process; It is characterized by including the normal positioning step of performing the alignment of the electrode.

With the above configuration, in the probe positioning step, the probe assembly is moved by moving the probe assembly while photographing the probe of the probe assembly and the electrode of the inspection target plate by the imaging means. In the holding step, the probe assembly after positioning is held on the base plate. When the positioning of one probe assembly is finished, the imaging means is moved to the next probe assembly and the same as above to perform the positioning of the next probe assembly. This is repeated to align all probe assemblies. Subsequently, in the reference position specifying step, the photographing means is photographed by moving the photographing means with respect to the inspected object plate after the alignment, and the photographing means is fixed in such a state so that the position of the photographed alignment mark is adjusted. It is specified as a reference position of. Subsequently, in the alignment process, alignment is performed on the second and subsequent inspections. In the case of inspecting a new inspection object plate, the alignment mark of the new inspection object plate is aligned with the reference position, and the position of the probe and the electrode of the new inspection object plate is aligned.

In the probe positioning process, it is preferable to connect the imaging means and the probe assembly to be aligned to move simultaneously with each other to perform alignment between the probe of the probe assembly and the electrode of the inspection target plate.

The movable probe unit mechanism according to the present invention includes a plurality of probe assemblies for supporting the probe at its tip to contact the probe with the electrode of the inspection object plate, photographing means for photographing the probe of the probe assembly, the electrode of the inspection object plate, and the like; And supporting each of the probe assemblies independently of the base plate of the probe unit for inspecting the inspection object plate so as to be movable independently and independently of the photographing means, thereby supporting the electrodes of the inspection object plate and the respective probe assemblies. A probe assembly slide mechanism for aligning the probe with the probe, and the photographing means with respect to the base plate so as to be movable in parallel with the slide direction of the probe assembly, so as to properly move to a position such as the probe and the electrode. Camera slide mechanism and image A moving mechanism connected to the photographing means movably supported by the photographing means slide mechanism to properly move the photographing means, and the probe assembly in a state where the electrodes of the inspection target plate are aligned with the probes of the respective probe assemblies; And a lock mechanism for maintaining a relative position with respect to the base plate.

With the above configuration, the probe assembly slide mechanism moves each of the probe assemblies independently to position the probe of the probe assembly to the electrode of the inspection object plate. At this time, the photographing means movably supported by the photographing means slide mechanism is properly moved to the position of the probe, the electrode, and the like by the moving mechanism, and the probe assembly slide mechanism is photographed while photographing the probe, the electrode, and the like. The probe assembly is slid to position the probe and the electrode. After the end of the alignment, the lock mechanism holds the probe assembly on the base plate.

When photographing the probe of the probe assembly and the electrode of the inspection target plate by the photographing means, it is preferable to have a connecting means for adjusting the position of the probe by connecting the probe assembly and the photographing means to move the photographing means.

Preferably, the connecting means includes a rod fitted into the guide hole provided in the probe assembly or the photographing means, and a projection mechanism provided in the photographing means or the probe assembly to project the rod.

It is preferable that the lock mechanism is released by being fitted into the guide hole by the rod drawn out from the projection mechanism, and locked by being pulled out.

Preferably, the photographing means includes a camera having an image sensor made of a CCD or a CMOS, and the inspection object plate is a liquid crystal display panel.

It is preferable that the base plate is composed of a plurality of frame plates, and is provided with a movable frame mechanism for moving the respective frame plates to adjust the dimensions of the inspection object plate according to different dimensions of the inspection object plate having different varieties. .

An inspection apparatus according to the present invention is an inspection apparatus for performing inspection by bringing a probe of a probe assembly into contact with an electrode of an inspection object plate, and a mechanism for aligning a probe of the probe assembly and an electrode of the inspection object plate with the movable probe unit. It is characterized by having a mechanism.

By this structure, it acts similarly to the said movable probe unit mechanism, and test | inspects the said inspection target board.

Detailed description of the invention

EMBODIMENT OF THE INVENTION Hereinafter, the inspection apparatus provided with the movable probe unit mechanism which concerns on embodiment of this invention, and the probe positioning method using a movable probe unit mechanism are demonstrated, referring an accompanying drawing. Here, the liquid crystal panel will be described as an example as the inspection object plate. In addition, a test | inspection apparatus is demonstrated as an apparatus which performs the lighting test of a liquid crystal panel. Since the overall configuration of the inspection apparatus for performing the lighting inspection is almost the same as the conventional inspection apparatus described above, the movable probe unit mechanism incorporated in the inspection apparatus, which is a feature of the present invention, and the probe using the movable probe unit mechanism. The explanation focuses on the positioning method.

The movable probe unit mechanism 1 is an apparatus which positions the electrodes of the said liquid crystal panel and the probe of each probe assembly mentioned later, and makes them contact each other in order to test | inspect. The movable probe unit mechanism 1 is fixed to the frame side of the inspection apparatus. Specifically, as shown in Fig. 2, the apparatus is provided at a position facing the work table 2 on the inspection apparatus side.

The work table 2 is a member for directly supporting the liquid crystal panel 3. On the work table 2, a stopper and a pusher (both not shown) are provided to contact the edge of the liquid crystal panel 3 to accurately position the liquid crystal panel 3 on the work table 2. When the liquid crystal panel 3 is placed on the work table 2, first, the edge of the liquid crystal panel 3 contacts the stopper, and pushes the opposite edge of the liquid crystal panel 3 with a pusher provided at a position facing the stopper. do. The work table 2 is provided in the XYZθ stage (not shown) in the inspection apparatus. By the XYZθ stage, the position of the liquid crystal panel 3 supported by the work table 2 is finely adjusted. Specifically, the electrode 4 of the liquid crystal panel 3 and the probe 6 of the probe assembly 5 are supported by the work table 2 so as to match each other (to be in the state of FIG. 7). The position of the liquid crystal panel 3 is finely adjusted in the XYZθ stage.

The backlight 7 is provided inside the work table 2 (lower part in FIG. 2). The backlight 7 is a device for lighting the liquid crystal panel 3 from the inside thereof in the lighting test. Specifically, the backlight 7 includes a plurality of fluorescent tubes 8 disposed therein, a housing 9 for storing each fluorescent tube 8, a light guide plate 10 and a diffusion plate 11 provided on the work table 2. )

As shown in FIGS. 1 to 5, the movable probe unit mechanism 1 includes a base plate 15, the probe assembly 5, a probe assembly slide mechanism 17, a lock mechanism 18, and photographing. The means 19, the photographing means slide mechanism 20, and the moving mechanism 21 are comprised.

The base plate 15 is a board | substrate which supports the whole movable probe unit mechanism 1. The base plate 15 is fixed to the frame side of the inspection apparatus. The base plate 15 is formed in the shape of a square plate having a rectangular opening 15A in the center thereof. The probe assemblies 5 and the like are provided on the upper surface of the base plate 15, respectively.

The probe assembly 5 is a member for supporting the probe 6. The probe assembly 5 is supported by the base plate 15 so that a movement is possible in the state which supported the probe 6 at the front-end | tip. The probe assembly 5 is movably supported by the base plate 15, and makes the probe 6 contact the electrode 4 of the liquid crystal panel 3. Four probe assemblies 5 are provided on the short side and five long sides of the base plate 15. At the proximal end of the probe assembly 5, a guide hole 5A into which the connecting rod 39 of the connecting mechanism 37 of the imaging means 19 is fitted is provided. 5 A of guide holes are tapered, and the connecting rod 39 is easy to be fitted.

The probe assembly slide mechanism 17 is a device for movably supporting the respective probe assemblies 5 with respect to the base plate 15. The probe assembly slide mechanism 17 supports each probe assembly 5 so as to be able to move independently of each other, and also to the imaging means 19 so as to be able to move independently. Thereby, the probe assembly slide mechanism 17 moves the probe assembly 5 suitably, and makes alignment with the electrode 4 of the said liquid crystal panel 3, and the probe 6 of each said probe assembly 5. FIG. Do it. The probe assembly slide mechanism 17 is comprised from the probe rail 25 and the probe guide 26 slidably attached to the said probe rail 25 specifically ,.

The probe rail 25 is disposed along the edge at the edge of the opening 15A of the base plate 15. The probe rails 25 are provided adjacent to each other on the short side and the long side of the opening 15A. Specifically, it is provided in one of two opposite sides of a short side, and one of two opposite sides of a long side, respectively.

The probe guide 26 is slidably fitted to the probe rail 25 in a state where the probe guides 26 are provided in the respective probe assemblies 5, and slidably supports the probe assemblies 5 toward the base plate 15. .

The lock mechanism 18 is a device for maintaining the relative position of the probe assembly 5 with respect to the base plate 15. The lock mechanism 18 is the base plate of the probe assembly 5 in a state in which the electrode 4 of the liquid crystal panel 3 is aligned with the probe 6 of each probe assembly 5. The relative position with respect to 15) is maintained. The lock mechanism 18 is provided in the probe guide 26, fixes the probe guide 26 to the probe rail 25, and releases the fixing. Specifically, as shown in Fig. 8, the lock mechanism 18 is composed of an electronic lock portion 28 and a switch 29 for operating the electronic lock portion 28. The electromagnetic lock 28 is composed of an electromagnetic solenoid 30. The electromagnetic solenoid 30 is provided with the fixing pin 31 which penetrates from the said electromagnetic solenoid 30, the said fixing pin 31 is directed, and press-contacts the probe rail 25, The probe guide ( 26) to the probe rail 25. In addition, the electromagnetic lock part 28 may be comprised by an electromagnet. In this case, an electromagnet is provided in the probe guide 26, and the electromagnet is attracted to the probe rail 25 to fix the probe guide 26 to the probe rail 25 by energizing the electromagnet.

The switch 29 is provided in the guide hole 5A of the proximal end of the probe assembly 5. As a result, the connecting rod 39 of the coupling mechanism 37 is fitted into the guide hole 5A, so that the switch 29 is disconnected and the fixing of the probe guide 26 to the probe rail 25 is released. have. Moreover, the switch 29 enters and the probe guide 26 is fixed to the probe rail 25 by pulling out the connecting rod 39 from the guide hole 5A.

The photographing means 19 is an alignment unit for photographing the position of the probe 6 of the probe assembly 5 and the electrode 4 of the liquid crystal panel 3 and the like. The photographing means 19 is composed of a proximal block portion 33, a director plate portion 34, and an alignment camera portion 35. The base end block portion 33 is a material for being supported by the photographing means slide mechanism 20 to support the entire photographing means 19 in a movable manner. The base nut block 33 is provided with a moving nut 45 of the moving mechanism 21. In addition, the base end block portion 33 is provided with a coupling mechanism 37. The connecting mechanism 37 photographs the probe 6 of the probe assembly 5 and the electrode 4 of the liquid crystal panel 3 with the photographing means 19 to adjust the position thereof. It is a connecting means for adjusting the position of the probe 6 by connecting the photographing means 19 integrally with each other and by moving the photographing means 19. The connecting mechanism 37 is composed of a cylinder 38 and a connecting rod 39. The cylinder 38 is a retrieval mechanism for retracting the connecting rod 39. The cylinder 38 is configured by actuators such as hydraulic, pneumatic, and electric motors, and projects the connecting rod 39. The connecting rod 39 is a member for connecting the probe assembly 5 and the photographing means 19 to be fitted into the guide hole 5A of the probe assembly 5. The connecting rod 39 is produced while being supported by the cylinder 38 and inserted into the guide hole 5A so that the probe assembly 5 and the photographing means 19 are integrally moved. In addition, the switch 29 is turned off by pulling the connecting rod 39 into the guide hole 5A, and the switch 29 is turned on by being pulled out.

The directing plate part 34 extends and is installed above the probe assembly 5, and extends to a position facing the probe 6 of the probe assembly 5. The alignment camera unit 35 is a camera for photographing the electrode 4 of the liquid crystal panel 3 and the probe 6 of the probe assembly 5 (see FIG. 7). The alignment camera unit 35 includes a camera having an image sensor made of a CCD or a CMOS. With the alignment camera unit 35, the electrode 4 and the probe 6 are photographed, and their alignment is achieved. In addition, the alignment camera unit 35 also captures the alignment marks 3A of the liquid crystal panel 3, and performs alignment of the liquid crystal panel 3.

The photographing means slide mechanism 20 supports the photographing means 19 so as to be movable in parallel with the slide direction of the probe assembly 5 with respect to the base plate 15, and the probe 6 and the electrode. It is a mechanism for moving suitably to the position of (4) and the position of alignment mark 3A. The photographing means slide mechanism 20 is constituted by a photographing means rail 41 and a photographing means guide 42 slidably mounted to the photographing means rail 41.

The imaging means rail 41 is arrange | positioned in parallel with the said probe rail 25 at the edge of the opening 15A of the base board 15 mutually. That is, two imaging means rails 41 are provided in the direction orthogonal to the edge of the opening 15A of the said base board 15. As shown in FIG.

The photographing means guide 42 is slidably fitted to the photographing means rail 41 in a state where it is provided in the photographing means 19, and supports the photographing means 19 slidably toward the base plate 15. As a result, the photographing means 19 moves in parallel with the moving direction of the probe assembly 5.

The moving mechanism 21 is an apparatus for properly moving the imaging means 19 by connecting to the imaging means 19 movably supported by the imaging means slide mechanism 20. The movement mechanism 21 is comprised with the ball screw 44, the movement nut part 45, and the drive motor 46. As shown in FIG. The ball screw 44 is disposed parallel to the photographing means rail 41, and both ends thereof are rotatably supported. The moving nut part 45 is a member twisted by the ball screw 44 and moved by the rotation of the said ball screw 44. The moving nut part 45 is provided integrally with the base end block part 33 of the photographing means 19 and moves the photographing means 19 by the rotation of the ball screw 44. The drive motor 46 is connected to one end of the ball screw 44, and drives the ball screw 44 in rotation. The drive motor 46 is composed of a motor capable of precisely controlling the rotation of a stepping motor and the like, and precisely controls the rotation of the ball screw 44 to accurately adjust the position of the photographing means 19. It is supposed to be. The drive motor 46 is automatically controlled or manually controlled by image processing by a computer program.

[Probe Positioning Method]

Next, the probe positioning method using the inspection apparatus configured as described above will be described.

First, a probe positioning process is performed. In the probe positioning step, the liquid crystal panel 3 is installed at a set position, the imaging means 19 is moved appropriately, and the imaging means 19 includes the probe 6 and the liquid crystal panel 3 of the probe assembly 5. The probe assembly 5 is moved independently of the other probe assembly 5 while the electrode 4 of the electrode 4 is photographed, thereby aligning the probe 6 with the electrode 4.

Specifically, the liquid crystal panel 3 serving as the first inspection target plate is placed at the set position of the work table 2. At this time, the origin of the liquid crystal panel 3 is set to match the origin of the work table 2. Specifically, the liquid crystal panel 3 is placed on the work table 2 with the edge of the liquid crystal panel 3 in contact with the stopper. Subsequently, the pusher pushes against the edge of the liquid crystal panel 3 on the opposite side of the stopper, thereby positioning and supporting the liquid crystal panel 3. In this way, the probe unit is set so that the proper relative position of the liquid crystal panel 3 with respect to the base plate 15 of the probe unit can be secured at the position of the liquid crystal panel 3.

Subsequently, the imaging means 19 is moved to the position of the probe assembly 5 located at one end of the row of probe assemblies 5 supported on the base plate 15. Specifically, the photographing means 19 is moved from an initial position to a position that matches the probe assembly 5 at one end. The photographing means 19 is moved by controlling the drive motor 46 and rotating the ball screw 44. The ball screw 44 is rotated by the drive motor 46 to directly move the moving nut part 45, and the photographing means 19 indirectly moves the alignment camera part 35 to the probe assembly 5 at one end. Move until you recognize. When the movement of the photographing stage 19 is completed, the connecting rod 39 of the cylinder 38 of the coupling mechanism 37 and the guide hole 5A of the probe assembly 5 are matched with each other.

Then, the probe assembly 5 and the photographing means 19 are connected. Specifically, the coupling rod 37 of the photographing means 19 is operated to produce the coupling rod 39, and the coupling rod 39 is pushed into the guide hole 5A of the probe assembly 5. As a result, the lock of the locking mechanism 18 is released, and the probe assembly 5 is connected to each other via the photographing means 19 and the connecting rod 39 so as to be movable integrally.

Subsequently, each electrode 4 of the liquid crystal panel 3 and each probe 6 of the probe assembly 5 are taken by the alignment camera unit 35, and as shown in FIG. Adjust it to Specifically, it controls so that the rotation angle of the drive motor 46 may be fine-adjusted. As a result, the ball screw 44 rotates only the set angle (an angle at which the shifted amount is zero), thereby moving the probe assembly 5 integrated with the photographing means 19. By this operation, each probe 6 of the probe assembly 5 (probe assembly 5 located at one end of the row of probe assemblies 5) and the angles of the liquid crystal panel 3 corresponding to the respective probes 6 The electrode 4 is positioned.

Then, a holding process is performed. In the holding step, the probe 6 is held relative to the base plate 15 of the probe assembly 5 while the probe 6 and the electrode 4 are aligned. .

The probe assembly 5 positioned in the probe positioning process maintains a relative position with respect to the base plate 15 by the locking mechanism 18. Specifically, when the connecting rod 39 of the coupling mechanism 37 inserted into the guide hole 5A is slightly pulled out of the guide hole 5A, the switch 29 of the lock mechanism 18 enters, The probe assembly 5 is fixed relative to the probe rail 25 of the probe guide 26 so that the relative position with respect to the base plate 15 is maintained.

Subsequently, the connecting rod 39 is completely pulled out of the guide hole 5A, and the connection between the probe assembly 5 and the photographing means 19 is released. Even after the connecting rod 39 is pulled out, the probe assembly 5 is held in a state where the probe 6 and the electrode 4 are aligned by the locking mechanism 18.

Subsequently, the probe positioning process and the holding step are performed separately for each probe assembly 5, and each probe 6 of all the probe assemblies 5 is matched to each electrode 4 of the liquid crystal panel 3. Let's do it. That is, in the row of probe assemblies 5, each probe 6 of each probe assembly 5 and each electrode 4 of the liquid crystal panel 3 corresponding to each probe 6 in the adjacent order. Position it. Specifically, based on the probe 6 and the electrode 4 positioned in the probe positioning step, the probe positioning step and the holding step are sequentially performed on the neighboring probe assembly 5. Each probe 6 of all the probe assemblies 5 is matched to each electrode 4 of the liquid crystal panel 3.

Subsequently, a reference position specifying step is performed. In the reference position specifying step, the photographing means 19 is moved to specify the reference position of the liquid crystal panel 3. Specifically, the imaging means 19 is accurately moved to the alignment mark 3A at one end of the liquid crystal panel 3 after the positioning by the moving mechanism 21, and the alignment mark is performed by the imaging means 19. (3A) is photographed and the reference position of the aligned liquid crystal panel 3 is specified. The position of the photographing means 19 can be specified and fixed by accurately moving the photographing means 19 with the moving mechanism 21, and by photographing the alignment mark 3A at the position of the specified photographing means 19. The reference position of the liquid crystal panel 3 can be accurately specified. The liquid crystal panel 3 after the second sheet can be aligned by matching the alignment mark 3A to the reference position specified by the photographing means 19.

Subsequently, while the backlight 7 is turned on, a predetermined electric signal is supplied from the probe 6 to the electrode, and the lighting test of the liquid crystal panel 3 is performed.

Next, a positioning process is normally performed. In the normal positioning step, the probe 6 and the new liquid crystal panel 3 are aligned by aligning the alignment marks 3A of the second new liquid crystal panel 3 at the reference position specified by the reference position specifying step. ), The electrode 4 is aligned.

In order to inspect the second liquid crystal panel 3 (same varieties as the first chapter), the liquid crystal panel 3 is positioned on the work table 2 in the same position as the first liquid crystal panel 3. Here, even if the first and second liquid crystal panels 3 are placed at the same position on the work table 2 according to the dimensional accuracy of each liquid crystal panel 3, the relative position with respect to the base plate 15 of the probe unit. May not match. Thus, by photographing the alignment mark 3A on the liquid crystal panel 3 aligned first by the photographing means 19, the reference position is specified, and the second liquid crystal panel 3 and the base plate 15 The relative position is adjusted to be the same position as the first liquid crystal panel 3. This adjustment is performed by the XYZθ mechanism provided in the work table 2.

As long as the varieties of the respective liquid crystal panels 3 to be inspected are the same, the positions of the electrodes 4 on the liquid crystal panel 3 and the relative positions of the alignment marks 3A and the electrodes 4 also become the same. When the adjustment is completed, the alignment between the electrodes 4 and the probes 6 of the second and subsequent liquid crystal panels 3 is completed.

That is, the lighting test is performed on the second liquid crystal panel 3 by the same process as described above, and the lighting test is performed on the liquid crystal panel 3 of the third and subsequent sheets (same varieties as the first chapter) by the same process as described above.

[effect]

As described above, in the probe positioning process, the probe 6 is aligned with the electrode 4, and in the holding step, the probe assembly 5 is held on the base plate 15. In the reference position specifying process, the reference position of the liquid crystal panel 3 is specified, and in the normal positioning process, the position of the probe 6 and the electrode 4 of the new liquid crystal panel 3 are aligned. As a result, the probe assembly 5 can be easily aligned with respect to the liquid crystal panel 3. As a result, inspection efficiency is improved.

In addition, since each probe assembly 5 is moved individually to position each probe 6 and each electrode 4 of the liquid crystal panel 3, the thermal expansion of the liquid crystal panel 3 due to the heat of the backlight 7 is caused. Even if each probe 6 shifts with respect to each electrode, the shift can be reliably absorbed.

Compared with the conventional inspection apparatus, since only the moving mechanism 21 of the photographing means 19 is a driving source of the driving mechanism, the number of driving sources can be reduced, and the number of wirings to the driving sources can be reduced. As a result, it is advantageous in terms of cost, and a large work space can be secured.

Moreover, even if the kind (position of electrodes) of the liquid crystal panel 3 changes, and the position of the electrode 4 deviates from the position until then, each probe 6 can be easily aligned with each electrode.

Alignment mark 3A of liquid crystal panel 3 is photographed by alignment camera part 35, and it adjusts so that the shift amount of alignment mark 3A and a reference point may become zero, Since the alignment of the probe assembly 5 is performed, these alignment can be performed easily and quickly.

The position of the probe 6 and the electrode 4 is adjusted by taking the electrodes 6 of the probe 6 and the liquid crystal panel 3 by the alignment camera unit 35 and adjusting the shifted amounts to zero. Since alignment is performed, these positioning can be performed quickly and easily.

[Modification]

In the above embodiment, only one imaging means 19 is provided on each side. However, when the number of probe assemblies 5 is large, two or more imaging means 19 may be provided.

In the above embodiment, the liquid crystal panel 3 has been described as an example of the inspection object plate, but it can be applied to all inspection object plates in which the probe 6 and the electrode 4 need to be matched. In addition, the test | inspection performed by a test | inspection apparatus is applicable not only to the lighting test | inspection of the liquid crystal panel 3, but also to the test | inspection performed by making the probe 6 and electrode 4 contact.

In the said embodiment, although the coupling mechanism 37 was provided in the imaging means 19 side, you may provide it in the probe assembly 5 side. The imaging means 19 and the probe assembly 5 may be a structure that can be connected to each other.

In the said embodiment, although the lock mechanism 18 provided with the electromagnetic solenoid 30 and the fixing pin 31 was demonstrated to the example, another structure may be sufficient as the lock mechanism 18. FIG. For example, as shown in FIG. 9, you may comprise the fixing pin 51, the lift pin 52, and the spring 53. As shown in FIG. The fixing pin 51 is biased toward the probe rail 25 by the spring 53. The lift pin 52 is inserted in the guide hole 5A and has a tapered portion 52A at the distal end. The upper end of the fixing pin 51 also has a tapered portion 51A corresponding to the tapered portion 52A of the lift pin 52. As a result, when the connecting rod 39 is pushed into the guide hole 5A, the lift pin 52 is pushed in, and the fixing pin 51 is pushed upward by the tapered portions 51A and 52A to be fixed. Is released. When the connecting rod 39 is pulled out, the fixing pin 51 is pushed down by the spring 53 and fixed.

In the said embodiment, although the base board 15 was comprised with the rectangular board | plate material, you may be a movable base board. In this case, a movable frame mechanism is provided in a movable probe unit mechanism. The movable frame mechanism comprises a base plate composed of a plurality of frame plates, and moves the respective frame plates to adjust the dimensions of the liquid crystal panel 3 according to different dimensions of the liquid crystal panel 3 having different varieties. to be.

An example of the movable frame mechanism is shown in FIG. The movable frame mechanism 55 is composed of a Y-axis moving mechanism 56 and an X-axis moving mechanism 57. The Y-axis moving mechanism 56 is a mechanism for adjusting the Y-axis direction of the opening 55A of the movable frame mechanism 55. The Y-axis moving mechanism 56 includes a rail disposed in the Y-axis direction, a guide fitted to the rail and slidably supported in the Y-axis direction, and an upper base supported by the guide and slidable in the Y-axis direction. It is composed of a plate, a lower base plate supported by the guide and slidable in the Y-axis direction similarly to the upper base plate, and a Y-axis driving unit for moving the upper base plate and the lower base plate in the Y-axis direction. . The X axis moving mechanism 57 is a mechanism for adjusting the X axis direction of the opening 55A of the movable frame mechanism 55. The X-axis moving mechanism 57 includes an X-axis upper side frame portion disposed in the X-axis direction, an X-axis lower side frame portion disposed in the X-axis direction in parallel with the X-axis upper side frame portion, and disposed in the Y-axis direction. Y-axis right side frame portion, the Y-axis left side frame portion disposed in the Y-axis direction and the X-axis lower side driving portion for moving the X-axis lower side frame portion in the X-axis direction similarly to the Y-axis right side frame portion. And an X-axis upper side driving unit for moving the X-axis upper side frame part in the X-axis direction. The specific structure of the movable frame mechanism 55 is described in the movable probe unit mechanism (Japanese Patent Application No. 2006-148562) first proposed by the present applicant.

In the case of inspecting the liquid crystal panel 3 having different varieties by inspecting by the inspection apparatus provided with the movable frame mechanism 55, the movable frame after the liquid crystal panel 3 is placed at a predetermined position of the work table 2. The opening 55A fits the dimensions of the liquid crystal panel 3 by the mechanism 55. After adjusting the size of the opening 55A in accordance with the dimensions of the liquid crystal panel 3, each probe 6 of the probe assembly 5 is photographed by the photographing means 19 or the like, and each electrode of the liquid crystal panel 3 is used. Position it at (4). As a result, the varieties of the liquid crystal panel 3 can be exchanged quickly.

Moreover, even if the kind of liquid crystal panel 3 changes, since the probe assembly 5 can be moved individually, the alignment of the probe 6 and the electrode 4 can be reliably performed. By changing the variety of the liquid crystal panel 3, no special apparatus is required.

Since the alignment of the plurality of probe assemblies 5 and the liquid crystal panel 3 with the electrodes 4 can be performed separately in each probe assembly 5, the standard of the liquid crystal panel 3 (position of electrodes) Even if this changes, the alignment of each probe 6 and each electrode 4 can be made easy.

Moreover, in the said embodiment, although the movement of the probe assembly 5 for the position alignment of the probe 6 and the electrode 4 was performed by the imaging means 19 connected with the said probe assembly 5, each The probe assembly 5 may be provided with a drive source at the same time. For example, the linear motor mechanism may be used to independently and electrically control the probe assembly 5. Moreover, as a linear motor mechanism, a well-known mechanism can be used as it is. By the linear motor mechanism, the probe assembly 5 can be finely adjusted precisely, so that the accuracy of the alignment between the probe 6 and the electrode 4 can be improved. In this case, as the lock mechanism of the probe assembly 5, for example, a brake by a solenoid valve is applied. Thereby, the same effect | action and effect as the said embodiment can be exhibited.

As mentioned above, according to this invention, the following effects can be exhibited.

In the probe positioning process, the probe is aligned with the electrode, in the holding step, the probe assembly is held on the base plate, and in the reference position specifying step, the reference position of the inspection target plate is specified, and in general, In the positioning process, since the probe and the electrode of the new inspection target plate are aligned, the probe assembly can be easily aligned with respect to the inspection target plate.

Further, with the probe assembly slide mechanism, the probe of the probe assembly is positioned on the electrode of the inspection target plate, and the probe assembly slide mechanism is positioned with the locking mechanism while photographing the probe and the electrode with the photographing means. Since the probe assembly is held on the base plate, the probe assembly can be easily aligned with respect to the inspection target plate.

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and all such variations or modifications can be considered to be included within the scope of the present invention.

Claims (9)

A plurality of probe assemblies movably supported with respect to the base plate of the probe unit for inspecting the inspection object plate, and photographing means supported so as to be movable in parallel with the respective probe assemblies with respect to the base plate. A probe positioning method for positioning an electrode and a probe of each probe assembly, The inspection target plate is installed at a set position, and the imaging means is appropriately moved to photograph the probe of the probe assembly and the electrode of the inspection object plate by the imaging means, and the probe assembly is moved independently from the other probe assembly. A probe alignment step of performing alignment between the probe and the electrode; A holding step of maintaining a relative position with respect to the base plate of the probe assembly in a state in which the probe is aligned with the electrode in the probe positioning step; A reference position specifying step of moving the photographing means to photograph the alignment mark of the inspection subject plate after the alignment with the photographing means to specify a reference position of the aligned inspection subject plate; And A normal positioning step of aligning the probe and the electrode of the new inspection object plate by aligning the alignment mark of the new inspection object plate with the reference position specified by the reference position specifying process; Probe positioning method, characterized in that configured to include. The method of claim 1, wherein the photographing means and the probe assembly are moved independently of each other, and in the probe positioning process, the photographing means and the probe assembly to be aligned are connected to each other and simultaneously moved. Probe positioning method characterized in that the alignment of the probe of the assembly and the electrode of the inspection plate. A plurality of probe assemblies supporting the probe at a tip to contact the probe with an electrode of an inspection object plate; Photographing means for photographing the probe of the probe assembly and the electrode of the inspection target plate; Each of the probe assemblies is independently movable to the base plate of the probe unit for inspecting the inspection target plate and independently of the photographing means, so that the electrodes of the inspection target plate and the respective probe assemblies can be moved. A probe assembly slide mechanism for aligning with the probe; A photographing means slide mechanism for supporting the photographing means so as to be movable in parallel with the slide direction of the probe assembly with respect to the base plate, and appropriately moving the photographing means to positions such as the probe and the electrode; A moving mechanism connected to the photographing means movably supported by the photographing means slide mechanism to appropriately move the photographing means; And A lock mechanism that maintains a relative position with respect to the base plate of the probe assembly in a state where the electrodes of the inspection plate are aligned with the probes of the respective probe assemblies; Movable probe unit mechanism comprising a. According to claim 3, The connecting means for adjusting the position of the probe by connecting the probe assembly and the photographing means to move the photographing means when photographing the probe of the probe assembly and the electrode of the inspection target plate with the photographing means Movable probe unit mechanism comprising the. The method of claim 4, wherein the connecting means, characterized in that the rod is fitted with a guide hole provided in the probe assembly or the imaging means, and the projection mechanism installed in the imaging means or the probe assembly to project the rod Movable probe unit mechanism. 6. The apparatus of claim 5, wherein the guide hole is installed in the probe assembly, and the appearance mechanism is provided in the photographing means. And the lock mechanism is released by being fitted into the guide hole by the rod directed from the projection mechanism and locked by being pulled out. 4. The photographing apparatus according to claim 3, wherein the photographing means comprises a camera having an image sensor made of a CCD or a CMOS, And said test target plate is a liquid crystal display panel. The said base plate is comprised from the several frame board, Comprising: The movable frame mechanism for adjusting the dimension of the said test board by moving each said frame board according to the other dimension of the test board which differs in a kind is provided. Movable probe unit mechanism, characterized in that configured. In the inspection apparatus for performing inspection by contacting the probe of the probe assembly to the electrode of the inspection object plate, A mechanism for aligning the probe of the probe assembly and the electrode of the inspection target plate with each other, A plurality of probe assemblies for supporting the probe at the tip to contact the probe with the electrodes of the inspection object plate, photographing means for photographing the probe of the probe assembly and the electrodes of the inspection object plate, and a probe unit for inspecting the inspection object plate A probe assembly which supports each of the probe assemblies independently of the base plate of the probe plate and independently of the photographing means, thereby aligning the electrodes of the inspection target plate with the probes of the probe assemblies. A photographing means slide mechanism for supporting the slide mechanism, the photographing means with respect to the base plate so as to be movable in parallel with the slide direction of the probe assembly, and appropriately moving them to positions such as the probe and the electrode; Movable to apparatus A moving mechanism connected to the photographing means to move the photographing means appropriately, and a relative position of the probe assembly relative to the base plate in a state where the electrodes of the inspection target plate are aligned with the probes of the respective probe assemblies. An inspection apparatus comprising a movable probe unit mechanism configured to hold a lock mechanism.

Images