JP2008122145A - Probe alignment method, movable probe unit mechanism, and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily align a probe assembly with a liquid crystal panel. <P>SOLUTION: A method includes: a probe alignment step of placing the liquid crystal panel at a set position and aligning a probe with an electrode by moving the probe assembly independently of the other probe assemblies while photographing the probe 6 of the probe assembly 5 and the electrode of the crystal panel; a maintaining step of maintaining a relative position of the probe assembly to a base plate with the probe aligned with the electrode in the alignment step; a reference position determination step of determining a reference position of the crystal panel by photographing an alignment mark of the crystal panel after the alignment while moving the photographing means; and a normal alignment step of aligning the probe with an electrode of a new inspecting object plate by aligning an alignment mark of the new object plate with the determined reference position. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a probe alignment method, a movable probe unit mechanism, and an inspection apparatus for aligning and contacting a probe and an electrode for lighting inspection of an inspection target plate such as a liquid crystal display panel.

  One of inspections in the manufacturing process of a liquid crystal panel is a lighting inspection of a liquid crystal panel in which liquid crystal is enclosed in a final inspection in a cell process. In this lighting inspection, there is an inspection in which the liquid crystal panel is turned on to display a test pattern and the operation state of the liquid crystal panel is confirmed. In this lighting inspection, inspections such as chromaticity, color unevenness, and contrast are performed.

  The inspection devices used for the lighting inspection include an automatic inspection device that inspects a test pattern using a CCD camera and a visual inspection device that is visually inspected by a human.

  One of such inspection apparatuses for liquid crystal panels is one in which a plurality of contact units for inspection are provided on an inspection stage on which a liquid crystal panel to be inspected is arranged.

  The plurality of contact units supply an inspection signal from the energization circuit to the display panel when the contacts come into contact with the electrodes of the liquid crystal panel on the panel receiver of the inspection stage at the time of inspection.

  Further, when the display panel is arranged on the panel receiver prior to the inspection and the display panel is taken out of the panel receiver after the inspection, each contact unit is retracted from the display panel arrangement area.

  Thereby, a large number of contact unit units do not hinder the arrangement and removal of the display panel from the panel receiver, and the display panel can be handled smoothly (Patent Document 1).

Conventionally, for display panels having different sizes, it has been necessary to install an inspection stage and a probe unit dedicated to the display panel. However, the opening is adjusted according to the size of the display panel having a different size. Thus, there is also an apparatus that eliminates the need to install a new dedicated inspection stage and probe unit (Patent Document 2).
JP 2002-350485 A JP 2002-91336 A

  In this conventional probe unit, since the motor and wiring are attached to each contact unit and the contact unit is driven, the number of wirings increases. In this case, since it is necessary to secure a space around which the wiring is routed, it is difficult to secure a wide working space.

  Further, in the alignment of the probe and the electrode of the liquid crystal panel, the probe and each electrode can be aligned only in the unit of the contact unit in which a plurality of probe blocks are integrated. Therefore, the displacement of each probe with respect to each electrode cannot be reliably absorbed with respect to the thermal expansion of the liquid crystal panel due to the heat of the backlight.

  Furthermore, when multiple probe blocks are mounted in the same contact unit, the relative position between the probe blocks cannot be adjusted. Therefore, if the LCD panel type (positioning position of each electrode) changes, It becomes difficult to properly align the probe and each electrode.

  The present invention has been made in view of such problems, and a probe alignment method and a movable probe unit mechanism capable of easily aligning the probe and the electrode while allowing thermal expansion of the inspection object plate. An object of the present invention is to provide an inspection apparatus.

  A probe alignment method according to the present invention is made in order to solve the above problems, and a plurality of probe assemblies supported movably with respect to a base plate of a probe unit that inspects an inspection target plate; A probe alignment method for aligning an electrode of the inspection object plate and a probe of each probe assembly by an imaging unit supported so as to be movable in parallel with each probe assembly with respect to the base plate. The inspection target plate is placed at a set position, the imaging unit is moved as appropriate, and the probe assembly is photographed while imaging the probe of the probe assembly and the electrode of the inspection target plate with the imaging unit. A probe alignment step for aligning the probe and the electrode by moving the probe independently of the other probe assembly; and the probe A holding step of holding the relative position of the probe assembly with respect to the base plate in a state in which the probe and the electrode are aligned in the alignment step; and moving the imaging means to move the imaging target plate after the alignment A reference position specifying step for picking up an alignment mark by the photographing means and specifying the reference position of the aligned inspection target plate, and a new alignment mark for the inspection target plate at the reference position specified by the reference position specifying step And a normal alignment step of aligning the electrodes of the probe and the new inspection target plate by combining them.

  With the above configuration, in the probe alignment step, the position of the probe and the electrode is moved by moving the probe assembly while imaging the probe of the probe assembly and the electrode of the inspection target plate by the imaging unit. Align. In the holding step, the aligned probe assembly is held on the base plate. When the alignment of one probe assembly is completed, the imaging means is moved to the next probe assembly and the next probe assembly is aligned in the same manner as described above. This is repeated to align all probe assemblies. Next, in the reference position specifying step, the imaging means is moved with respect to the inspection target plate after alignment, and the alignment mark is imaged. In this state, the imaging means is fixed, and the position of the imaged alignment mark is determined. It is specified as the reference position of the aligned inspection target plate. Next, in the normal alignment process, alignment is performed for the second and subsequent inspections. When inspecting a new inspection target plate, the alignment mark of the new inspection target plate is aligned with the reference position, and the positions of the probe and the electrode of the new inspection target plate are aligned.

  In the probe alignment step, the imaging means and the probe assembly to be aligned are connected to each other and simultaneously moved to align the probe of the probe assembly and the electrode of the inspection object plate. It is desirable.

  The movable probe unit mechanism according to the present invention includes a plurality of probe assemblies that support a probe at a tip and bring the probe into contact with an electrode of an inspection target plate, a probe of the probe assembly, an electrode of the inspection target plate, and the like The probe assembly can be moved independently with respect to the imaging means for taking images and the base plate of the probe unit for inspecting the inspection object plate, and can also be moved independently with respect to the imaging means. A probe assembly slide mechanism for positioning the electrodes of the inspection target plate and the probes of the probe assemblies, and the imaging means with respect to the base plate, and a slide direction of the probe assembly. An imaging means slide mechanism that is supported so as to be movable in parallel and appropriately moved to the position of the probe, electrode, etc., and moved to the imaging means slide mechanism The probe assembly in a state in which the moving mechanism is connected to the imaging means supported by the function, and the imaging means is appropriately moved, and the electrode of the inspection object plate and the probe of each probe assembly are aligned. And a lock mechanism that holds a relative position with respect to the base plate.

  With the above configuration, the probe assembly slide mechanism moves the probe assemblies independently to align the probes of the probe assemblies with the electrodes of the inspection target plate. At this time, while moving the imaging unit supported movably on the imaging unit slide mechanism to the position of the probe and the electrode, etc. with the moving mechanism, The probe assembly is slid by a three-dimensional slide mechanism to align the probe and the electrode. After the alignment is completed, the probe assembly is held on the base plate by the lock mechanism.

  When imaging the probe of the probe assembly and the electrode of the inspection target plate by the imaging means, the probe assembly and the imaging means are connected to each other and the imaging means is moved to move the position of the probe. It is desirable to provide connecting means for adjusting.

  The connecting means includes a rod that fits into a guide hole provided in the probe assembly or the imaging means, and a retracting mechanism that is provided in the imaging means or the probe assembly and causes the rod to protrude and retract. It is desirable.

  It is desirable that the lock mechanism is released when the rod extended from the retracting mechanism is fitted into the guide hole and is locked by being pulled out.

  Preferably, the photographing means includes a camera having an image sensor made of CCD or CMOS, and the inspection object plate is a liquid crystal display plate.

  The base plate is composed of a plurality of frame plates, and a movable frame mechanism for adjusting the size of the inspection target plate by moving each frame plate according to different dimensions of the inspection target plates of different varieties. It is desirable to be prepared.

  An inspection apparatus according to the present invention is an inspection apparatus that performs inspection by bringing a probe of a probe assembly into contact with an electrode of an inspection target plate, and aligns the probe of the probe assembly and the electrode of the inspection target plate with each other. As a mechanism for this, the movable probe unit mechanism is provided.

  With this configuration, the plate to be inspected is inspected in the same manner as the movable probe unit mechanism.

  As described above, according to the present invention, the following effects can be obtained.

  In the probe alignment step, the probe and the electrode are aligned, in the holding step, the probe assembly is held on the base plate, and in the reference position specifying step, the reference position of the inspection target plate is specified. In the normal alignment step, the probe assembly can be easily aligned with the inspection target plate because the probe and the electrode of the new inspection target plate are aligned.

  Further, the probe assembly slide mechanism is used to align the probe of the probe assembly with the electrode of the inspection object plate, and to position the probe assembly slide mechanism while photographing the probe and the electrode with the photographing means. In addition, since the probe assembly is held on the base plate by the lock mechanism, the probe assembly can be easily aligned with the inspection target plate.

  Hereinafter, an inspection apparatus including a movable probe unit mechanism and a probe alignment method using the movable probe unit mechanism according to an embodiment of the present invention will be described with reference to the accompanying drawings. Here, a liquid crystal panel will be described as an example of the inspection target plate. The inspection apparatus will be described as an apparatus for inspecting lighting of a liquid crystal panel. Since the entire configuration of the inspection apparatus that performs the lighting inspection is substantially the same as that of the conventional inspection apparatus described above, here, the movable probe unit mechanism incorporated in the inspection apparatus and the movable probe unit mechanism, which are features of the present invention, are described here. A probe alignment method using the above will be mainly described.

  The movable probe unit mechanism 1 is a device that aligns the electrodes of the liquid crystal panel and the probes of the probe assemblies described later and makes them contact each other for inspection. The movable probe unit mechanism 1 is fixedly attached to the frame side of the inspection apparatus. Specifically, as shown in FIG. 2, it is attached at a position facing the work table 2 on the inspection apparatus side.

  The work table 2 is a member for directly supporting the liquid crystal panel 3. On the work table 2, there are provided stoppers and pushers (both not shown) for contacting the periphery of the liquid crystal panel 3 and accurately positioning the liquid crystal panel 3 on the work table 2. When the liquid crystal panel 3 is placed on the work table 2, the peripheral edge of the liquid crystal panel 3 is first brought into contact with the stopper, and a pusher provided at a position facing the stopper is opposite to the liquid crystal panel 3. It is supported by pushing the peripheral part of. The work table 2 is attached to an XYZθ stage (not shown) in the inspection apparatus. The position of the liquid crystal panel 3 supported by the work table 2 is finely adjusted by the XYZθ stage. Specifically, the position of the liquid crystal panel 3 supported by the work table 2 so that the electrode 4 of the liquid crystal panel 3 and the probe 6 of the probe assembly 5 are aligned with each other (as shown in FIG. 7). Are finely adjusted on the XYZθ stage.

  A backlight 7 is provided inside the work table 2 (lower side in FIG. 2). The backlight 7 is a device for lighting the liquid crystal panel 3 from the inside in the lighting test. Specifically, the backlight 7 includes a plurality of fluorescent tubes 8, a housing 9 that houses each fluorescent tube 8, a light guide plate 10 and a diffusion plate 11 that are incorporated in the work table 2. ing.

  As shown in FIGS. 1 to 5, the movable probe unit mechanism 1 includes a base plate 15, the probe assembly 5, a probe assembly slide mechanism 17, a lock mechanism 18, an imaging unit 19, and an imaging unit slide. A mechanism 20 and a moving mechanism 21 are included.

  The base plate 15 is a substrate that supports the entire movable probe unit mechanism 1. The base plate 15 is fixed to the frame side of the inspection apparatus. The base plate 15 is formed in a square plate shape having a square opening 15A at the center thereof. The probe assembly 5 and the like are respectively attached to the upper side surface of the base plate 15.

  The probe assembly 5 is a member for supporting the probe 6. The probe assembly 5 is movably supported by the base plate 15 with the probe 6 supported at its tip. The probe assembly 5 is movably supported by the base plate 15 and brings the probe 6 into contact with the electrode 4 of the liquid crystal panel 3. Four probe assemblies 5 are provided on the short side of the base plate 15 and five on the long side. A guide hole 5 </ b> A into which the connecting rod 39 of the connecting mechanism 37 of the photographing means 19 is fitted is provided at the base end portion of the probe assembly 5. The guide hole 5A is tapered so that the connecting rod 39 can be easily fitted.

  The probe assembly slide mechanism 17 is an apparatus for movably supporting the probe assemblies 5 with respect to the base plate 15. The probe assembly slide mechanism 17 supports the probe assemblies 5 so that they can be moved independently of each other and also independently of the photographing means 19. As a result, the probe assembly slide mechanism 17 moves the probe assembly 5 appropriately to align the electrodes 4 of the liquid crystal panel 3 with the probes 6 of the probe assemblies 5. Specifically, the probe assembly slide mechanism 17 includes a probe rail 25 and a probe guide 26 slidably attached to the probe rail 25.

  The probe rail 25 is disposed at the edge of the opening 15A of the base plate 15 along the edge. The probe rail 25 is provided adjacent to the short side and the long side of the opening 15A. Specifically, it is provided on one of the two opposing sides on the short side and one of the two opposing sides on the long side.

  The probe guide 26 is slidably fitted to the probe rail 25 in a state where it is attached to each probe assembly 5, and supports each probe assembly 5 to be slidable on the base plate 15 side.

  The lock mechanism 18 is a device for maintaining the relative position of the probe assembly 5 with respect to the base plate 15. The lock mechanism 18 maintains the relative position of the probe assembly 5 with respect to the base plate 15 in a state where the electrode 4 of the liquid crystal panel 3 and the probe 6 of each probe assembly 5 are aligned. The lock mechanism 18 is incorporated in the probe guide 26 and fixes the probe guide 26 to the probe rail 25 to release the lock. Specifically, as shown in FIG. 8, the lock mechanism 18 includes an electromagnetic lock portion 28 and a switch 29 that operates the electromagnetic lock portion 28. The electromagnetic lock unit 28 includes an electromagnetic solenoid 30. The electromagnetic solenoid 30 includes a fixing pin 31 that protrudes and protrudes from the electromagnetic solenoid 30, and the fixing pin 31 extends and presses against the probe rail 25 to fix the probe guide 26 to the probe rail 25. The electromagnetic lock unit 28 may be composed of an electromagnet. In this case, an electromagnet is incorporated in the probe guide 26, and the electromagnet is energized, whereby the electromagnet is attracted to the probe rail 25 and the probe guide 26 is fixed to the probe rail 25.

  The switch 29 is provided in the guide hole 5 </ b> A at the proximal end portion of the probe assembly 5. Thereby, when the connecting rod 39 of the connecting mechanism 37 is fitted into the guide hole 5A, the switch 29 is cut off, and the probe guide 26 is released from being fixed to the probe rail 25. Further, by pulling out the connecting rod 39 from the guide hole 5A, the switch 29 is turned on so that the probe guide 26 is fixed to the probe rail 25.

  The photographing means 19 is an alignment unit for photographing the probe 6 of the probe assembly 5 and the electrode 4 of the liquid crystal panel 3 to adjust the position. The photographing means 19 includes a proximal end block portion 33, an extension plate portion 34, and an alignment camera portion 35. The proximal end block 33 is a material that is supported by the photographing means slide mechanism 20 to support the whole photographing means 19 so as to be movable. The proximal block portion 33 is provided with a moving nut portion 45 of the moving mechanism 21. Further, the base end block portion 33 is provided with a connecting mechanism 37. The connecting mechanism 37 integrally connects the probe assembly 5 and the imaging means 19 to each other when the imaging means 19 images and aligns the probe 6 of the probe assembly 5 and the electrode 4 of the liquid crystal panel 3. Then, it is a connecting means for adjusting the position of the probe 6 by moving the photographing means 19. The connection mechanism 37 includes a cylinder 38 and a connection rod 39. The cylinder 38 is a retracting mechanism for retracting the connecting rod 39. The cylinder 38 is constituted by an actuator such as a hydraulic type, a pneumatic type, and an electric type, and causes the connecting rod 39 to appear and retract. The connecting rod 39 is a member that fits into the guide hole 5 </ b> A of the probe assembly 5 to connect the probe assembly 5 and the imaging means 19. The connecting rod 39 is extended so as to be supported by the cylinder 38 and is fitted into the guide hole 5A, so that the probe assembly 5 and the imaging means 19 are connected so as to move together. Furthermore, the switch 29 is turned off when the connecting rod 39 is fitted into the guide hole 5A, and the switch 29 is turned on when the connecting rod 39 is removed.

  The extension plate portion 34 is provided to extend above the probe assembly 5 and extends to a position facing the probe 6 of the probe assembly 5. The alignment camera unit 35 is a camera for photographing the electrode 4 of the liquid crystal panel 3 and the probe 6 of the probe assembly 5 (see FIG. 7). The alignment camera unit 35 includes a camera having an image sensor made of a CCD or a CMOS. The alignment camera unit 35 takes an image of the electrode 4 and the probe 6 and aligns them. Further, the alignment camera unit 35 photographs the alignment mark 3 </ b> A of the liquid crystal panel 3 and aligns the liquid crystal panel 3.

  The photographing means slide mechanism 20 supports the photographing means 19 with respect to the base plate 15 so as to be movable in parallel with the sliding direction of the probe assembly 5, and positions of the probe 6 and the electrode 4 and alignment marks 3A. It is a mechanism for appropriately moving to the position. The photographing means slide mechanism 20 includes a photographing means rail 41 and a photographing means guide 42 that is slidably attached to the photographing means rail 41.

  The imaging means rail 41 is disposed adjacent to and parallel to the probe rail 25 at the edge of the opening 15 </ b> A of the base plate 15. That is, two photographing means rails 41 are provided in a direction orthogonal to the edge of the opening 15A of the base plate 15.

  The photographing means guide 42 is slidably fitted to the photographing means rail 41 while being attached to the photographing means 19, and supports the photographing means 19 so as to be slidable on the base plate 15 side. As a result, the imaging means 19 moves in parallel with the moving direction of the probe assembly 5.

  The moving mechanism 21 is an apparatus for connecting the photographing means 19 movably supported by the photographing means slide mechanism 20 and appropriately moving the photographing means 19. The moving mechanism 21 includes a ball screw 44, a moving nut portion 45, and a drive motor 46. The ball screw 44 is disposed in parallel to the photographing means rail 41, and both ends thereof are rotatably supported. The moving nut portion 45 is a member that is screwed into the ball screw 44 and moves by the rotation of the ball screw 44. The moving nut portion 45 is provided integrally with the base end block portion 33 of the photographing means 19 and moves the photographing means 19 by the rotation of the ball screw 44. The drive motor 46 is connected to one end of the ball screw 44 and rotationally drives the ball screw 44. The drive motor 46 is composed of a motor that can accurately control the rotation of a stepping motor or the like, and can accurately adjust the position of the photographing means 19 by accurately controlling the rotation of the ball screw 44. The drive motor 46 is automatically controlled by image processing by a computer program, or manually controlled.

[Probe alignment method]
Next, a probe alignment method using the inspection apparatus configured as described above will be described.

  First, a probe alignment process is performed. In this probe alignment step, the liquid crystal panel 3 is set at a set position, the photographing means 19 is moved as appropriate, and the probe 6 of the probe assembly 5 and the electrode 4 of the liquid crystal panel 3 are photographed with the photographing means 19. By moving the probe assembly 5 independently of the other probe assemblies 5, the probe 6 and the electrode 4 are aligned.

  Specifically, the liquid crystal panel 3 serving as the first inspection target plate is placed at the set position of the work table 2. At this time, the liquid crystal panel 3 is placed so that the origin of the liquid crystal panel 3 coincides with the origin of the work table 2. Specifically, the liquid crystal panel 3 is placed on the work table 2 by bringing the peripheral edge of the liquid crystal panel 3 into contact with the stopper. Next, the liquid crystal panel 3 is positioned and supported by abutting and pressing the peripheral edge of the liquid crystal panel 3 from the opposite side of the stopper with the pusher. The probe unit is set so that an appropriate relative position of the liquid crystal panel 3 with respect to the base plate 15 of the probe unit can be secured at the position of the liquid crystal panel 3 by this placement.

  Next, the imaging means 19 is moved to the position of the probe assembly 5 located at one end of the five rows of probe assemblies supported on the base plate 15. Specifically, the imaging means 19 is moved from the initial position to a position aligned with the probe assembly 5 at one end. The photographing means 19 is moved by controlling the drive motor 46 and rotating the ball screw 44. The ball screw 44 is rotated by the drive motor 46 to move the moving nut portion 45 directly, and the imaging means 19 is indirectly moved until the alignment camera portion 35 recognizes the probe assembly 5 at one end. When the movement of the photographing means 19 is completed, the connecting rod 39 of the cylinder 38 of the connecting mechanism 37 and the guide hole 5A of the probe assembly 5 are aligned with each other.

  Next, the probe assembly 5 and the imaging means 19 are connected. Specifically, the connecting mechanism 37 of the photographing means 19 is operated to extend the connecting rod 39, and the connecting rod 39 is pressed against the guide hole 5A of the probe assembly 5 to be fitted. Thereby, the lock of the lock mechanism 18 is released, and the probe assembly 5 is connected to each other via the imaging means 19 and the connecting rod 39 and can move integrally.

  Next, each electrode 4 of the liquid crystal panel 3 and each probe 6 of the probe assembly 5 are copied by the alignment camera unit 35 and adjusted so that the amount of deviation is zero as shown in FIG. Specifically, control is performed so that the rotation angle of the drive motor 46 is finely adjusted. As a result, the ball screw 44 rotates by a set angle (an angle at which the amount of deviation becomes zero), and the probe assembly 5 integrated with the imaging means 19 is moved. By this operation, each probe 6 of the probe assembly 5 (probe assembly 5 located at one end of the probe assembly 5 row) and each electrode 4 of the liquid crystal panel 3 corresponding to each probe 6 are aligned.

  Next, a holding process is performed. In this holding step, the relative position of the probe assembly 5 with respect to the base plate 15 is held in a state where the probe 6 and the electrode 4 are aligned in the probe positioning step.

  The probe assembly 5 aligned in the probe alignment process maintains a relative position with respect to the base plate 15 by the lock mechanism 18. Specifically, when the connecting rod 39 of the connecting mechanism 37 fitted in the guide hole 5A is slightly extracted from the guide hole 5A, the switch 29 of the lock mechanism 18 is turned on, and the probe assembly 5 is moved to the probe guide. 26 is fixed to the probe rail 25 and the relative position to the base plate 15 is maintained.

  Next, the connecting rod 39 is completely pulled out from the guide hole 5A, and the connection between the probe assembly 5 and the imaging means 19 is released. Even after the connecting rod 39 is pulled out, the probe assembly 5 is held by the lock mechanism 18 in a state where the probe 6 and the electrode 4 are aligned.

  Next, the probe alignment process and the holding process are individually performed for each probe assembly 5 so that the probes 6 of all the probe assemblies 5 are aligned with the electrodes 4 of the liquid crystal panel 3. That is, in the probe assembly 5 row, each probe 6 of each probe assembly 5 and each electrode 4 of the liquid crystal panel 3 corresponding to each probe 6 are aligned in the adjacent order. Specifically, with the probe 6 and the electrode 4 aligned in the probe alignment process as a reference, the probe alignment process and the holding process are sequentially performed on the adjacent probe assembly 5, Each probe 6 of the probe assembly 5 is aligned with each electrode 4 of the liquid crystal panel 3.

  Next, a reference position specifying step is performed. In this reference position specifying step, the photographing means 19 is moved to specify the reference position of the liquid crystal panel 3. Specifically, the photographing means 19 is accurately moved by the moving mechanism 21 to the alignment mark 3A at one end of the liquid crystal panel 3 after the alignment, and the alignment mark 3A is photographed by the photographing means 19, The reference position of the aligned liquid crystal panel 3 is specified. The position of the photographing means 19 can be specified and fixed by accurately moving the photographing means 19 by the moving mechanism 21. By photographing the alignment mark 3A at the position of the specified photographing means 19, the liquid crystal The reference position of the panel 3 can be specified accurately. The second and subsequent liquid crystal panels 3 can be aligned by aligning the alignment mark 3A with the reference position specified by the photographing means 19.

  Next, in a state where the backlight 7 is turned on, a predetermined electrical signal is supplied from the probe 6 to the electrode 4 to perform a lighting inspection of the liquid crystal panel 3.

  Next, a normal alignment process is performed. In this normal alignment step, the probe 6 and the electrode 4 of the new liquid crystal panel 3 are aligned by aligning the alignment mark 3A of the second new liquid crystal panel 3 with the reference position specified in the reference position specifying step. Perform position alignment.

  In order to inspect the second liquid crystal panel 3 (the same type as the first one), the liquid crystal panel 3 is placed and positioned on the work table 2 at the same position as the first liquid crystal panel 3. Here, even if the first and second liquid crystal panels 3 are placed at the same position on the work table 2 due to the dimensional accuracy of each liquid crystal panel 3, the relative position of the probe unit to the base plate 15 is aligned. May not. Therefore, the photographing unit 19 shoots the alignment mark 3A on the first liquid crystal panel 3 aligned to specify the reference position, and the relative position between the second liquid crystal panel 3 and the base plate 15 is determined. Adjustment is made so that it is in the same position as the first liquid crystal panel 3. This adjustment is made by the XYZθ mechanism provided in the work table 2.

  As long as the types of the liquid crystal panels 3 to be inspected are the same, the positions of the electrodes 4 on the liquid crystal panel 3 and the relative positions of the alignment marks 3A and the electrodes 4 are also the same. The alignment of each electrode 4 and the probe 6 of the second and subsequent liquid crystal panels 3 is completed.

  That is, the lighting inspection is performed on the second liquid crystal panel 3 by the same process as described above, and the lighting inspection is performed on the third and subsequent liquid crystal panels 3 (same type as the first sheet) by the same process as described above.

[effect]
As described above, the probe 6 and the electrode 4 are aligned in the probe alignment step, the probe assembly 5 is held on the base plate 15 in the holding step, and the reference position specifying step is performed. The reference position of the liquid crystal panel 3 is specified, and the probe 6 and the electrode 4 of the new liquid crystal panel 3 are aligned in the normal alignment step. The solid 5 can be easily aligned. As a result, the inspection efficiency is improved.

  In addition, since each probe assembly 5 is moved individually to align each probe 6 with each electrode 4 of the liquid crystal panel 3, each probe 6 is moved to each electrode by the thermal expansion of the liquid crystal panel 3 due to the heat of the backlight 7. Even if it slips, the deviation can be absorbed reliably.

  Compared with the conventional inspection apparatus, since there is only the moving mechanism 21 of the photographing means 19 as a drive source of the drive mechanism, the number of drive sources can be reduced and the number of wirings to the drive source can also be reduced. . As a result, it is advantageous in terms of cost and a large work space can be secured.

  Further, even if the type of the liquid crystal panel 3 (electrode position) is changed and the position of the electrode 4 is shifted from the previous position, the probes 6 can be easily aligned with the electrodes.

  The position of the second and subsequent liquid crystal panels 3 and the probe assembly 5 is adjusted by copying the alignment mark 3A of the liquid crystal panel 3 by the alignment camera unit 35 and adjusting the amount of deviation between the alignment mark 3A and the reference point to zero. Since alignment is performed, these alignments can be performed easily and quickly.

  Further, the probe 6 and the electrodes 4 of the liquid crystal panel 3 are copied by the alignment camera unit 35 and adjusted so that the amount of deviation is zero, and the probe 6 and the electrode 4 are aligned. It can be done easily and quickly.

[Modification]
In the above-described embodiment, only one imaging unit 19 is provided for each side. However, when the number of probe assemblies 5 is large, two or more imaging units 19 may be provided.

  In the above-described embodiment, the liquid crystal panel 3 is described as an example of the inspection target plate. However, the present invention can be applied to all inspection target plates that require the probe 6 and the electrode 4 to be aligned. Also, the inspection performed by the inspection apparatus is not limited to the lighting inspection of the liquid crystal panel 3 but can be applied to all inspections performed by bringing the probe 6 and the electrode 4 into contact with each other.

  In the above embodiment, the coupling mechanism 37 is provided on the imaging means 19 side, but may be provided on the probe assembly 5 side. Any structure that can connect the imaging means 19 and the probe assembly 5 to each other is acceptable.

  In the above-described embodiment, the lock mechanism 18 including the electromagnetic solenoid 30 and the fixing pin 31 has been described as an example. However, the lock mechanism 18 may have other configurations. For example, as shown in FIG. 9, the fixing pin 51, the lift pin 52, and the spring 53 may be used. The fixing pin 51 is urged toward the probe rail 25 by a spring 53. The lift pin 52 is inserted into the guide hole 5A and has a tapered portion 52A at the tip. The upper end portion of the fixing pin 51 also has a tapered portion 51A corresponding to the tapered portion 52A of the lift pin 52. Thus, when the connecting rod 39 is pushed into the guide hole 5A, the lift pin 52 is pushed, and the fixing pin 51 is pushed upward by the taper portions 51A and 52A to release the fixing. When the connecting rod 39 is pulled out, the fixing pin 51 is pushed down by the spring 53 and fixed.

  In the embodiment, the base plate 15 is made of a rectangular plate material, but may be a movable base plate. In this case, the movable probe unit mechanism is provided with a movable frame mechanism. This movable frame mechanism is a mechanism in which a base plate is composed of a plurality of frame plates, and each frame plate is moved and adjusted to the dimensions of the liquid crystal panel 3 according to different dimensions of the liquid crystal panels 3 of different varieties. is there.

  An example of this movable frame mechanism is shown in FIG. The movable frame mechanism 55 includes a Y-axis moving mechanism 56 and an X-axis moving mechanism 57. The Y-axis moving mechanism 56 is a mechanism for adjusting the opening 55 </ b> A of the movable frame mechanism 55 in the Y-axis direction. The Y-axis moving mechanism 56 includes a rail disposed in the Y-axis direction, a guide fitted to the rail and supported to be slidable in the Y-axis direction, and supported by the guide and slid in the Y-axis direction. An upper base plate that can be attached, a lower base plate that is supported by the guide and is slidably attached in the Y-axis direction, and an upper base plate and a lower base plate that are attached to the upper base plate. It is comprised from the Y-axis drive part moved to an axial direction. The X-axis moving mechanism 57 is a mechanism for adjusting the opening 55 </ b> A of the movable frame mechanism 55 in the X-axis direction. The X-axis moving mechanism 57 includes an X-axis upper side frame portion arranged in the X-axis direction, an X-axis lower side frame portion arranged in the X-axis direction in parallel with the X-axis upper side frame portion, and a Y-axis direction. The Y-axis right side frame portion arranged, the Y-axis left side frame portion arranged in the Y-axis direction, and the X-axis lower side frame portion moved in the X-axis direction in the same manner as the Y-axis right side frame portion. The lower-side drive unit and an X-axis upper-side drive unit that moves the X-axis upper-side frame unit in the X-axis direction are configured. The specific configuration of the movable frame mechanism 55 is described in the movable probe unit mechanism (Japanese Patent Application No. 2006-148562) previously proposed by the present applicant.

  When inspecting a liquid crystal panel 3 of a different product type by inspecting with an inspection apparatus provided with the movable frame mechanism 55, the movable frame mechanism 55 is placed after the liquid crystal panel 3 is placed at a predetermined position on the work table 2. Thus, the opening 55A is adjusted to the size of the liquid crystal panel 3. After adjusting the size of the opening 55 </ b> A according to the size of the liquid crystal panel 3, the probes 6 of the probe assembly 5 are aligned with the electrodes 4 of the liquid crystal panel 3 by the photographing means 19 or the like. As a result, the liquid crystal panel 3 can be quickly replaced.

  Even if the type of the liquid crystal panel 3 is changed, the probe assembly 5 can be moved individually, so that the alignment of the probe 6 and the electrode 4 can be performed reliably. A special device is not required in accordance with the proportion of the liquid crystal panel 3.

  Since the plurality of probe assemblies 5 and the alignment of the liquid crystal panel 3 with respect to the electrodes 4 can be individually performed by the respective probe assemblies 5, even if the standards (positions of the electrodes) of the liquid crystal panel 3 change, the probes 6 And alignment of each electrode 4 can be facilitated.

  In the above embodiment, the probe assembly 5 is moved by the imaging means 19 connected to the probe assembly 5 to align the probe 6 and the electrode 4. A drive source may be provided at the same time. For example, a linear motor mechanism may be used and electrically controlled independently of the probe assembly 5. As the linear motor mechanism, a known mechanism can be used as it is. By making the probe assembly 5 accurately and finely adjustable by this linear motor mechanism, the alignment accuracy between the probe 6 and the electrode 4 can be improved. In this case, as a lock mechanism of the probe assembly 5, for example, a brake using an electromagnetic valve is applied. Also by this, the same operation and effect as the above-mentioned embodiment can be produced.

It is a principal part expansion perspective view which shows the movable probe unit mechanism which concerns on embodiment of this invention. It is side surface sectional drawing which shows the movable probe unit mechanism, work table, and backlight which concern on embodiment of this invention. It is a perspective view which shows the movable probe unit mechanism which concerns on embodiment of this invention. It is a perspective view which shows the movable probe unit mechanism which concerns on embodiment of this invention. It is a top view which shows the movable probe unit mechanism which concerns on embodiment of this invention. It is a partially expanded view which shows the principal part of the movable probe unit mechanism which concerns on embodiment of this invention. It is a schematic diagram which shows the contact state of an electrode and a probe image | photographed with the alignment camera part. It is a partially expanded sectional view which shows the base end block part of the probe assembly of the movable probe unit mechanism which concerns on embodiment of this invention. It is a principal part enlarged view which shows a 1st modification. It is a principal part enlarged view which shows a 2nd modification.

Explanation of symbols

  1: movable probe unit mechanism, 2: work table, 3: liquid crystal panel, 4: electrode, 5: probe assembly, 6: probe, 7: backlight, 8: fluorescent tube, 9: housing, 10: guide Optical plate, 11: diffuser plate, 15: base plate, 16: probe assembly, 17: probe assembly slide mechanism, 18: lock mechanism, 19: photographing means, 20: photographing means slide mechanism, 21: moving mechanism, 24: Probe: 25: Probe rail, 26: Probe guide, 28: Electromagnetic lock part, 29: Switch, 30: Electromagnetic solenoid, 31: Fixing pin, 33: Base block part, 34: Extension plate part, 35: Alignment camera Part, 37: coupling mechanism, 38: cylinder, 39: coupling rod, 41: photographing means rail, 42: photographing means guide, 44: ball screw, 45: moving nut part, 46 Drive motor, 51: fixing pins, 52: lift, 53: spring.

Claims (9)

A plurality of probe assemblies supported to be movable with respect to a base plate of a probe unit for inspecting an inspection target plate, and imaging means supported to be movable with respect to the base plate in parallel with the probe assemblies. And a probe alignment method for aligning the electrode of the inspection object plate and the probe of each probe assembly,
The inspection target plate is installed at a set position, the imaging unit is appropriately moved, and the probe assembly is moved to another probe while imaging the probe of the probe assembly and the electrode of the inspection target plate with the imaging unit. A probe alignment step of aligning the probe and the electrode by moving independently of the assembly;
A holding step of holding a relative position of the probe assembly with respect to the base plate in a state where the probe and the electrode are aligned in the probe alignment step;
A reference position specifying step of moving the imaging means and imaging the alignment mark of the inspection target plate after the alignment with the imaging means to specify the reference position of the aligned inspection target plate;
And a normal alignment step of aligning the probe and the electrode of the new inspection target plate by aligning the alignment mark of the new inspection target plate with the reference position specified by the reference position specifying step. A probe alignment method characterized by the above.   The imaging means and the probe assemblies move independently of each other, and in the probe positioning step, the imaging means and the probe assembly to be aligned are connected to each other and simultaneously moved to move the probe. The probe alignment method according to claim 1, wherein alignment of the probe of the assembly and the electrode of the inspection target plate is performed. A plurality of probe assemblies that support the probe at the tip and bring the probe into contact with the electrode of the inspection target plate;
Imaging means for imaging the probe of the probe assembly and the electrode of the inspection object plate,
Each of the probe assemblies is supported so as to be independently movable with respect to a base plate of a probe unit that inspects the inspection object plate, and is also independently movable with respect to the imaging means. A probe assembly slide mechanism for aligning the electrode of the plate and the probe of each probe assembly;
An imaging means slide mechanism that supports the imaging means with respect to the base plate so as to be movable in parallel with the sliding direction of the probe assembly, and appropriately moves to positions of the probe, electrodes, and the like;
A moving mechanism for moving the photographing means as appropriate by connecting to the photographing means movably supported by the photographing means slide mechanism;
And a lock mechanism that holds a relative position of the probe assembly with respect to the base plate in a state where the electrodes of the inspection target plate and the probes of the probe assemblies are aligned. Movable probe unit mechanism.   When imaging the probe of the probe assembly and the electrode of the inspection object plate by the imaging means, the probe assembly and the imaging means are connected to each other and the imaging means is moved to adjust the position of the probe The movable probe unit mechanism according to claim 3, further comprising connecting means for performing the above operation.   The coupling means includes a rod that fits into a guide hole provided in the probe assembly or the imaging means, and a retracting mechanism that is provided in the imaging means or the probe assembly and causes the rod to protrude and retract. The movable probe unit mechanism according to claim 4, wherein: The guide hole is provided in the probe assembly, and the projecting mechanism is provided in the imaging unit.
The movable probe according to claim 5, wherein the lock mechanism is released when the rod extended from the retracting mechanism is fitted into the guide hole and is pulled out to be locked. Unit mechanism. The photographing means is configured to include a camera having an image sensor made of CCD or CMOS,
The movable probe unit mechanism according to claim 3, wherein the inspection target plate is a liquid crystal display plate.   The base plate is composed of a plurality of frame plates, and a movable frame mechanism for adjusting the size of the inspection target plate by moving each frame plate according to different dimensions of the inspection target plates of different varieties. The movable probe unit mechanism according to any one of claims 3 to 7, wherein the movable probe unit mechanism is provided. An inspection apparatus for inspecting by contacting the probe of the probe assembly with the electrode of the inspection object plate,
The movable probe unit mechanism according to any one of claims 3 to 8 is provided as a mechanism for aligning the probe of the probe assembly and the electrode of the inspection target plate with each other. Inspection device to do.

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