KR102542185B1 - Vision alignment probe unit - Google Patents

Abstract

The present invention relates to a base plate on which an object to be inspected is seated, at least one probe that contacts a terminal of the object to be inspected and inputs a test signal, at least one probe block that causes displacement of the probe, and a guide set that guides the displacement of the probe block. Including, the probe block discloses a vision alignment probe device configured to adjust coordinate displacement of the probe through a guide set. According to the present invention, probes in contact with a plurality of terminals on the subject can be independently aligned and controlled.

Description

Vision Alignment Probe Unit {VISION ALIGNMENT PROBE UNIT}

The present invention relates to a vision alignment probe device, and more particularly, to a vision alignment probe device constituting a vision alignment probe system for inspecting electronic components using vision alignment.

A probe device for inspecting electronic parts is, for example, a device for testing aging of a panel of a display. Aging is a process performed during the manufacturing process of a display panel, and is a process of testing reliability to check whether the display panel is properly driven.

In this aging process, with probes mounted on a plurality of blocks coupled to the display panel and the base plate in the aging chamber, electrical signals are applied for a predetermined period of time to check whether the display operates normally.

A plurality of probe blocks may be aligned and arranged in a probe device for inspecting an electronic component. Each probe block is equipped with a probe that contacts the display panel. The contact position of the probe and the display panel must be aligned. However, the contact position may be different depending on the type and size of the display panel. Therefore, whenever a display panel of a different type or size is changed, there is a problem in that the test device of the display panel needs to be replaced.

As a technology related to the present invention, a test apparatus for a display panel disclosed in Korean Registered Patent Publication discloses a second block including a probe contacting the panel. This related art is distinguished from the configuration and effect of the present invention including a configuration for automatically fixing the position of a probe using vision alignment in that it does not include a configuration suitable for use of vision alignment.

Korean Registered Patent No. 10-1961691 (Announced on March 26, 2019)

One problem to be solved by the present invention is to provide a vision alignment probe device capable of independently aligning (aligning) probes in contact with a plurality of terminals on an object to be inspected.

One problem to be solved by the present invention is to provide a vision alignment probe device capable of stably fixing an alignment state in which a plurality of terminals and a plurality of probes are in contact.

The problem to be solved by the present invention is not limited to the above-mentioned problems, and other problems not mentioned herein will be clearly understood by those skilled in the art from the following description.

The vision alignment probe device according to an embodiment of the present invention is disposed on the base plate 100 on which the object 20 is seated, in one direction, and in contact with the terminal 22 of the object 20 to be inspected. It includes at least one probe 300 for inputting a test signal, at least one probe block 200 for causing displacement of the probe 300, and a guide set 400 for guiding the displacement of the probe block 200, , The probe block 200 may be configured to adjust the coordinate displacement of the probe 300 through the guide set 400 .

In addition, a control unit 50 for controlling the seating of the object to be inspected 20, the input of the inspection signal, and the displacement of the probe 300 is included, and the control unit 50 uses vision alignment information Thus, by controlling the position of the subject 20 and controlling the operation of the probe block 200, the position of the probe 300 is adjusted to correspond to at least one terminal 22 formed on the subject 20. can be configured to control

In addition, the base plate 100 is installed on the bottom surface of the probe 300 through the first base plate 110 on which the inspected object 20 is seated and the camera 30 installed below the base plate 100. It may be configured to include a second base plate 120 having a bottom hole 121 so that the mark 310 and the align mark 21 displayed on the object 20 may be recognized.

In addition, the vision align probe device 10 may be configured to further include a clamper 430 for fixing the position of the probe block 200 on the base plate 100 on which the object 20 is seated.

In addition, the guide set 400 includes a plurality of guide rails 410 disposed on the base plate 100 and a plurality of guides coupled to the probe block 200 and sliding along the guide rails 410. A block 420 may be included, and the clamper 430 may be configured to fix the guide block 420 to the guide rail 410 using air pressure.

In addition, the probe block 200 causes the Z-axis (upper and lower) displacement of the probe 300 so that the inspected object 20 is seated on the base plate 100 by the jig 40, and the seated It may be configured to cause Y-axis (one direction) displacement and Z-axis displacement of the probe 300 so that the probe 300 corresponds to the inspected object 20 .

In addition, the probe block 200 includes a head block set 210 having slots in the Z-axis direction and a middle block that causes the Z-axis displacement of the probe 300 coupled to the lower portion through displacement along the slot 214. The set 220 may be configured to include a guide plate 230 coupled to the head block set 210 on one side and coupled to the guide block 420 constituting the guide set 400 on the other side.

In addition, the head block set 210 may be configured to further include an alignment mark 212 recognized through a camera and a side stopper 213 to which a force causing Y-axis displacement of the probe block 200 acts. .

In addition, the middle block set 220 has a T-shaped block 221 that is displaced along the Z-axis along the slot 214 using a vertical guide, and a force for Z-axis displacement of the T-shaped block is applied. It may be configured to further include a lever 223.

Details of other embodiments are included in the "specific details for carrying out the invention" and the accompanying "drawings".

Advantages and/or features of the present invention, and methods of achieving them, will become apparent with reference to the various embodiments described below in detail in conjunction with the accompanying drawings.

However, the present invention is not limited only to the configuration of each embodiment disclosed below, but may also be implemented in various other forms, and each embodiment disclosed herein only makes the disclosure of the present invention complete, and the present invention It is provided to completely inform those skilled in the art of the scope of the present invention, and it should be noted that the present invention is only defined by the scope of each claim of the claims.

According to the present invention, probes in contact with a plurality of terminals on an object to be inspected can be independently aligned (aligned).

In addition, an alignment state in which a plurality of terminals and a plurality of probes are in contact may be stably fixed.

1 is an exemplary diagram of a vision alignment probe device according to an embodiment of the present invention.
2 is a block diagram of a vision alignment probe system according to an embodiment of the present invention.
3 is a plan view of a vision alignment probe device and an object to be inspected according to an embodiment of the present invention.
4 is an exploded view of a vision alignment probe device according to an embodiment of the present invention.
5 is a front view of a vision alignment probe device according to an embodiment of the present invention.
6 is an exploded view of a probe block according to an embodiment of the present invention.
7 is an exemplary view for explaining vision alignment according to an embodiment of the present invention.
8 is a bottom view illustrating vision alignment according to an embodiment of the present invention.
9 is an exemplary view for explaining a clamper according to an embodiment of the present invention.

Before explaining the present invention in detail, the terms or words used in this specification should not be construed unconditionally in a conventional or dictionary sense, and in order for the inventor of the present invention to explain his/her invention in the best way It should be noted that concepts of various terms may be appropriately defined and used, and furthermore, these terms or words should be interpreted as meanings and concepts corresponding to the technical spirit of the present invention.

That is, the terms used in this specification are only used to describe preferred embodiments of the present invention, and are not intended to specifically limit the contents of the present invention, and these terms represent various possibilities of the present invention. It should be noted that it is a defined term.

In addition, it should be noted that in this specification, singular expressions may include plural expressions unless the context clearly indicates otherwise, and similarly, even if they are expressed in plural numbers, they may include singular meanings. .

Throughout this specification, when a component is described as "including" another component, it does not exclude any other component, but further includes any other component, unless otherwise stated. It can mean you can do it.

Furthermore, when a component is described as “existing inside or connected to and installed” of another component, this component may be directly connected to or installed in contact with the other component, and a certain It may be installed at a distance, and when it is installed at a certain distance, a third component or means for fixing or connecting the corresponding component to another component may exist, and now It should be noted that the description of the components or means of 3 may be omitted.

On the other hand, when it is described that a certain element is "directly connected" to another element, or is "directly connected", it should be understood that no third element or means exists.

Similarly, other expressions describing the relationship between components, such as "between" and "directly between", or "adjacent to" and "directly adjacent to" have the same meaning. should be interpreted as

In addition, in this specification, the terms "one side", "the other side", "one side", "the other side", "first", "second", etc., if used, refer to one component It is used to be clearly distinguished from other components, and it should be noted that the meaning of the corresponding component is not limitedly used by such a term.

In addition, in this specification, terms related to positions such as "top", "bottom", "left", and "right", if used, should be understood as indicating a relative position in the drawing with respect to the corresponding component, Unless an absolute position is specified for these positions, these positional terms should not be understood as referring to an absolute position.

In addition, in this specification, in specifying the reference numerals for each component of each drawing, for the same component, even if the component is displayed in different drawings, it has the same reference numeral, that is, the same reference throughout the specification. Symbols indicate identical components.

In the drawings accompanying this specification, the size, position, coupling relationship, etc. of each component constituting the present invention is partially exaggerated, reduced, or omitted in order to sufficiently clearly convey the spirit of the present invention or for convenience of explanation. may be described, and therefore the proportions or scale may not be exact.

In addition, in the following description of the present invention, a detailed description of a configuration that is determined to unnecessarily obscure the subject matter of the present invention, for example, a known technology including the prior art, may be omitted.

Hereinafter, embodiments of the present invention will be described in detail with reference to related drawings.

1 is an exemplary diagram of a vision alignment probe device according to an embodiment of the present invention.

Referring to FIG. 1 , in the vision alignment probe device 10 (hereinafter referred to as the probe device), a plurality of probe blocks 200 including probes 300 contacting the object 20 to be inspected and the object 20 to be inspected are seated. It may be configured to include a base plate 100 to be.

1, the width direction of the probe device 10 is defined as the X-axis direction, the length direction of the probe device 10 is defined as the Y-axis direction, and the The height direction is determined in the Z-axis direction.

2 is a block diagram of a vision alignment probe system according to an embodiment of the present invention.

Referring to FIG. 2 , the probe device 10 includes a camera 30, a driving device (hereinafter referred to as a jig 40) for driving the probe device 10, a control unit 50, and an air compressor 60. It is one of the components of the vision alignment probe system 1 including.

The vision alignment probe system 1 recognizes the positions of the probe device 10 and the inspected object 20 using the camera 30, and controls the operation of the jig 40 using the position recognition and control unit 50. Based on the alignment between the probe device 10 and the test object 20 through the test object 20 may be configured to perform the inspection (probe).

The control unit 50 may determine the position of the subject 20 on the base plate 100 based on the vision alignment. For example, the control unit 50 may be configured to control the displacement of the inspected object 20 by controlling the operation of the jig 40 . That is, the control unit 50 may be configured to adjust the coordinate displacement in the X-axis direction and the Y-axis direction and the rotation angle (yaw ) around the Z-axis on the base plate 100 of the probe device 10 . The control unit 50 uses the camera 30 to determine whether the positions of the plurality of terminals 22 of the subject 20 and the terminals of the probe 300 to be in contact with them match, and if their positions do not match each other, In this case, the Y-axis coordinates of the probe block 200 may be individually controlled so that all terminals contact the corresponding probes 300. The control unit 50 may be configured to apply force to the side stopper 213 of the probe block 200 using the jig 40 for coordinate displacement of the probe block 200 . The probe block 200 may be configured to perform Y-axis coordinate displacement along the guide rail 410 by the jig 40 .

Align marks that can be recognized by the camera 30 may be displayed on the probe device 10 and the object to be inspected 20 . The camera 30 includes a first camera 31 that captures the alignment mark 212 displayed on the top surface of the probe device 10 and the alignment mark 310 displayed on the bottom surface of the probe device 10 and the inspected object. It may be configured to include a second camera 32 that captures the alignment marks 21 shown in (20).

A side stopper 213 receiving power for coordinate displacement of the probe device 10 in the Y-axis direction from the jig 40 may be provided in the probe device 10 . The controller 50 may individually control coordinate displacements of the plurality of probe blocks 200 in the Y-axis direction by controlling the jig 40 based on vision alignment.

A plurality of probe blocks 200 may be disposed at intervals corresponding to the terminals of the inspected object 20 in the Y-axis direction. That is, the plurality of probe blocks 200 may be spaced apart from each other at regular intervals for independent displacement in the Y-axis direction required for contact with the terminal 22 of the object 20 to be inspected.

The probe block 200 is disposed in one region on the base plate 100 on one side in the X-axis direction, and the object to be inspected 20 is seated on one region on the base plate 100 on the other side. When viewed in the Z-axis direction, the inspection (probe) of the inspection subject 20 occurs in an area where the probe block 200 and the inspection subject 20 overlap.

The base plate 100 may seat the object 20 under test and may be a base on which the guide rail 410 is installed.

The air compressor 60 has a function of providing air pressure to the clamper 430 to fix the probe block 200 to a designated position based on vision alignment.

3 is a plan view of a probe device and a test subject according to an embodiment of the present invention.

Referring to FIG. 3 , a probe device 10 and an object to be inspected 20 are shown. The probe device 10 may be disposed on the work space by combining the bottom of the probe device 10 with the main body of the jig 40 . The test object 20 is moved in the direction of the arrow by an arm included in the jig 40 and is seated on the base plate 100 of the probe device 10, thereby preparing the test object 20 for inspection. The process is complete.

The test subject 20 may be configured to include an alignment mark 21 and a terminal 22 . For example, the subject 20 may be a display panel including a plurality of terminals 22 and a plurality of alignment marks 21 corresponding thereto. Also, the alignment marks 21 and terminals 22 may be disposed on a flexible printed circuit board constituting a display panel.

A plurality of terminals 22 may be provided on the inspected object 20 . The terminal 22 receives signals necessary for inspection from the probe device 10 . The alignment mark 21 of the subject 20 may be displayed on the bottom surface of the subject 20 or a transparent component constituting the subject 20, for example, a flexible printed circuit board.

The test object 20 may be configured to include a flexible printed circuit board (FPCB). Therefore, the distance between the plurality of terminals 22 provided on the object 20 to be inspected may appear different from each other due to temperature conditions or errors in manufacturing.

The alignment mark 21 of the object 20 to be inspected may be displayed at a position close to the terminal 22 . Also, one or two alignment marks 21 may be displayed on each terminal 22 . According to an embodiment of the present invention, two alignment marks 21 are displayed per terminal 22 .

The inspected object 20 may be seated at an intended position on the probe device 10 by being displaced upward in the Y-axis direction, moved-displaced in the X-axis direction, and displaced downward in the Y-axis direction through compression of the jig 40 .

The controller 50 may recognize the alignment mark 21 of the object 20 to be inspected using the second camera 32 based on vision alignment.

4 is an exploded view of a probe device according to an embodiment of the present invention.

Referring to FIG. 4 , the probe device 10 includes a first base plate 110, a second base plate 120, a glass assembly 130, a plurality of probe blocks 200, and a plurality of guide sets 400. , and may be configured to include a printed circuit board (PCB) 140.

The base plate 100 may include a first base plate 110 and a second base plate 120 , a glass assembly 130 , and a PCB 140 .

The base plate 100 may be configured to include a plurality of components. For example, the base plate 100 may include a first base plate 110 , a second base plate 120 and a bottom hole 111 .

The first base plate 110 becomes a base on which a printed circuit board (PCB) 140 and a guide rail 410 are installed. The PCB 140 is electrically connected to the probe 300 and the controller 50 and is involved in generating a test signal.

The second base plate 120 is coupled to the first base plate 110 and includes an area where the test subject 20 is seated.

A glass assembly 130 may be installed on the base plate 100 . The glass assembly 130 may include a glass 131 and a glass fix block 132 . The glass 131 may be disposed to cover the bottom hole 111 formed on the first base plate 110 . The glass fix block 132 has a function of fixing the glass 131 .

The probe block 200 may be configured to include the probe 300 on one side. The probe 300 corresponds to a portion in contact with the terminal 22 of the inspected object 20 . The probe block 200 has a function of causing Y-axis displacement and Z-axis displacement of the probe 300 . That is, the probe block 200 has a function of moving and stopping for Y-axis displacement under the control of the control unit 50 .

The guide set 400 is responsible for the Y-axis displacement of the probe block 200 .

5 is a front view of a vision alignment probe device according to an embodiment of the present invention.

6 is an exploded view of a probe block according to an embodiment of the present invention.

5 and 6 , the probe block 200 may include a head block set 210, a middle block set 220, a guide plate 230, and a probe 300.

The head block set 210 has a function of guiding the Z-axis displacement of the middle block set 220 coupled with the probe 300 . The head block set 210 may include a head block 211, an alignment mark 212, a side stopper 213, a slot 214, an elastic body 215, and an elastic body fixing pin 216.

The head block 211 has a function of guiding the Z-axis displacement of the middle block set 220 . An alignment mark 212 may be displayed on the head block 211, and a connector 435 may be disposed.

The alignment mark 212 displayed on the head block 211 of the probe block 200 may be photographed by the first camera 31 . The controller 50 may recognize the Y-axis coordinate of the probe block 200 based on the position of the alignment mark 212 .

The side stopper 213 may be coupled to the head block 211 . The side stopper 213 corresponds to a portion receiving a force that causes Y-axis displacement of the probe block 200 from the jig 40 .

The slot 214 may be configured to be slidably engaged with a vertical guide 222 that guides the Z-axis displacement of the middle block set 220 .

The elastic body 215 acts as an elastic force between the head block set 210 and the middle block set 220 . The middle block set 220 presses the probe 300 in the direction of gravity by using elastic force.

The elastic body fixing pin 216 has a function of fixing the elastic body 215 so that the elastic body 215 does not fall out of the hole formed in the head block 211 .

The middle block set 220 has a function of causing the Z-axis displacement of the probe 300 according to the lever 223 driven by the jig 40 . When replacing the inspected object 20, the probe 300 needs Z-axis displacement.

The middle block set 220 may be configured to include a T-shaped block 221, a vertical guide 222, a lever 223, and a lever guide 224. A vertical guide 222, a lever 223 and a lever guide 224 are coupled to the T-shaped block 221. Elastic force of the elastic body 215 may be transmitted to the probe 300 through the T-shaped block 221 . The lever guide 224 may include a lever axis, and the T-shaped block 221 may be configured to displace the Z-axis by the lever principle when the lever 223 is driven.

The longitudinal guide 222 may be configured to slide and displace while being inserted into the slot 214 .

The guide plate 230 is coupled to the head plate set 210 at the top and coupled to the guide block 420 and the clamper 430 at the bottom.

The probe 300 may include an alignment mark 310 and a probe body 320 . The probe body 320 may be configured to include a probe pin (probe) that contacts the terminal 22 of the object under test 20 . The probe 300 is coupled to the T-shaped block 221 and displaces in the Z axis based on the matching information between the object under test 20 and the alignment mark displayed on the probe 300, and displaces in the Y axis along the probe block 200. can be configured to

Referring back to FIG. 3 , the probe device 10 may be configured to include a guide set 400 . The guide set 400 may be configured to include a guide rail 410 and a guide block 420 .

A plurality of guide rails 410 may be configured. The guide block 420 may be configured in plurality for each guide rail 410 to correspond to the guide rail 410 . A guide block 420 having a stopping function may be included in at least one guide block 420 among the plurality of guide blocks 420 . Hereinafter, the guide block 420 having a stop function will be referred to as a clamper 430.

The guide block 420 and the clamper 430 may be coupled to the bottom surface of the guide plate 230 . The guide rail 410 may be installed on the first base plate 110 .

The guide block 420 coupled with the probe block 200 may move along the guide rail 410 installed on the first base plate 110 . The guide set 400 may be implemented in the form of a linear motion (LM) guide. That is, the guide rail 410 may be implemented in the form of an LM rail and the guide block 420 in the form of an LM block.

The clamper 430 has a function of stopping the probe block 200 on the guide rail 410 . Specifically, the controller 50 operates the clamper 430 based on the vision alignment using the camera 30 to move the probe block 200 to a specific position on the base plate 100 on which the guide rail 410 is installed, that is, align the It can be configured to stop at this finished position.

7 is an exemplary view for explaining vision alignment according to an embodiment of the present invention.

6 and 7, FIG. 6 shows the probe block 200 and the guide set 400 among the probe block 200, the guide set 400, and the base plate 100 constituting the probe device 10. describe And FIG. 7 depicts the bottom surface of the probe block 200 where the base plate 100 is treated transparently.

As described above, the vision alignment probe system 1 according to an embodiment of the present invention includes a probe device 10, a subject 20, a camera 30, a jig 40, a control unit 50, and an air compressor. (60).

For vision alignment, an alignment mark corresponding to an identification mark recognized by the camera 30 may be displayed on the probe device 10 and the inspection object 20 . The alignment mark 21 displayed on the test subject 20 is depicted in FIG. 2 .

Referring to FIG. 7 , a first alignment mark 212 may be displayed on the head block set 210 constituting the probe device 10 . In addition, a second alignment mark 310 may be displayed on the bottom surface of the probe 300 constituting the probe device 10 . A plurality of second alignment marks 310 may be displayed according to the configuration of the probe 300 . According to an embodiment of the present invention, two second alignment marks 310 are displayed on each probe block 200 .

8 is a bottom view illustrating vision alignment according to an embodiment of the present invention.

7 and 8 , in order for the controller 50 to recognize the second alignment mark 310 displayed on the bottom surface of the probe 300 using the camera 30, the lens of the camera 30 and There should be no obstacles between the second alignment marks 310 . A bottom hole 111 may be formed in the base plate 100 corresponding to the obstacle, for example, the first base plate 110 so that the second alignment mark 310 is photographed by the camera 30. . In addition, the inspected object 20 may be configured to include a transparent material, for example, an FPCB made of a transparent material.

9 is an exemplary view for explaining a clamper according to an embodiment of the present invention.

7 and 9, the clamper 430 may be configured to include a clamper body 431, a first fitting 432, a connection pipe 433, a second fitting 434, and a connector 435. there is.

The clamper 430 may be installed to engage with the guide rail 410 . The clamper 430 may be implemented in the form of an air linear clamper. The clamper 430 may be configured to include a moving module and a stop module using pneumatic pressure therein. That is, the movement module of the clamper 430 may include a bearing, and the stop module of the clamper 430 may include a brake operated by pneumatic pressure.

For the operation of the stop module, the connector 435 of the clamper 430 and the air compressor 60 may be connected through a connecting means, for example, a high-pressure air hose. Since the probe block 200 moves on the base plate 100, the connector 435 is preferably disposed on the top surface of the probe block 200 to avoid interference with the high-pressure air hose. The pneumatic action of driving the clamper 430 may be controlled by the control unit 50 .

According to the top surface arrangement of the probe block 200 of the connector 435, the first fitting 432 connected to the clamper body 431 disposed on the bottom surface of the probe block 200 and the second fitting 432 installed on the probe block 200 A fitting 434 and a connection pipe 433 connecting the first fitting 432 and the second fitting 434 may be provided. An air tunnel connecting the connector 435 and the second fitting 434 may be formed inside the probe block 200 .

The vision alignment probe device 10 according to an embodiment of the present invention may include a plurality of probe blocks 200 . The Y-axis displacement of the plurality of probe blocks 200 can be individually controlled by the control unit 50 included in the vision alignment probe system 1, and the alignment is completed by the clamper 430 during the control process. It can be automatically fixed at the position of the Y coordinate. In a state where the contact portion of the terminal 22 of the object 20 and the probe pin (probe) of the probe 300 is stably maintained, the test of the object 20 may be performed.

In the above, the probe device 10 according to a preferred embodiment of the present invention has been examined in detail with reference to the accompanying drawings.

One embodiment of the present invention described above should be understood as illustrative in all respects and not limiting, and the scope of the present invention will be indicated by the claims to be described later rather than the detailed description above. And it should be construed that all changes or transformable forms derived from the meaning and scope of the claims as well as their equivalent concepts are included in the scope of the present invention.

In this way, according to an embodiment of the present invention, probes in contact with a plurality of terminals on the object to be inspected may be independently aligned (aligned).

In addition, an alignment state in which a plurality of terminals and a plurality of probes are in contact may be stably fixed.

In the above, various preferred embodiments of the present invention have been described with some examples, but the description of various embodiments described in the "Specific Contents for Carrying Out the Invention" section is only exemplary, and the present invention Those skilled in the art will understand from the above description that the present invention can be practiced with various modifications or equivalent implementations of the present invention can be performed.

In addition, since the present invention can be implemented in various other forms, the present invention is not limited by the above description, and the above description is intended to complete the disclosure of the present invention and is common in the technical field to which the present invention belongs. It is only provided to completely inform those skilled in the art of the scope of the present invention, and it should be noted that the present invention is only defined by each claim of the claims.

1: Vision Align Probe System
10: probe device
20: test subject
30: camera
40: jig
50: control unit
60: air compressor
100: base plate
200: probe block
300: probe
400: guide set

Claims (9)

Base plate on which the test object is seated;
at least one probe block coupled to the base plate in a linear displacement manner; and
Includes a guide set for guiding the displacement of the probe block;
The probe block,
A head block set with slots formed in the Z-axis direction;
a middle block set displaced in the Z-axis direction along the slot; and
A guide plate coupled to the head block set on one side and coupled to the guide block included in the guide set on the other side,
The middle block set,
A T-shaped block displaced in the Z-axis direction along the slot using a vertical guide; and
Including a lever on which the force for displacement of the T-shaped block in the Z-axis direction is applied,
The probe block further includes a probe coupled to the T-shaped block to contact a terminal of the test object,
The head block set includes an elastic body that presses the T-shaped block downward,
The probe block is configured to adjust the coordinate displacement of the probe through the guide set,
Vision Align Probe Device. The method of claim 1,
A controller for controlling seating of the object to be inspected, input of a test signal, and displacement of the probe;
The control unit controls the position of the probe to correspond to at least one terminal formed on the target object through control of the position of the target object and operation control of the probe block using vision alignment information. made up,
Vision Align Probe Device. The method of claim 1,
The base plate,
A first base plate on which the test object is seated; and
It is configured to include a second base plate having a bottom hole so that an alignment mark displayed on the bottom surface of the probe and the object to be inspected is recognized through a camera installed below the base plate.
Vision Align Probe Device. The method of claim 1,
It is configured to further include a clamper for fixing the position of the probe block on the base plate on which the test object is seated.
Vision Align Probe Device. The method of claim 4,
The guide set,
It is configured to include a plurality of guide rails disposed on the base plate and a plurality of guide blocks coupled to the probe block and sliding along the guide rail,
Vision Align Probe Device. The method of claim 1,
The probe block,
The Z-axis (upper and lower) displacement of the probe is caused so that the object to be inspected is seated on the base plate by the jig, and the Y-axis (one direction) displacement of the probe is caused so that the probe of the probe corresponds to the seated object to be inspected. and configured to cause a Z-axis displacement.
Vision Align Probe Device. delete The method of claim 1,
The head block set,
Align marks recognized through a camera; and
It is configured to further include a side stopper on which the force that causes the Y-axis displacement of the probe block acts.
Vision Align Probe Device. The method of claim 5,
The clamper fixes the guide block to the guide rail using air pressure,
The probe block,
Disposed on the top surface, configured to further include a connector to which a high-pressure air hose for providing air pressure to the clamper is connected.
Vision Align Probe Device.

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