JP2009251529A - Lighting inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To safely and securely deliver an object to be inspected such as a liquid crystal panel. <P>SOLUTION: A lighting inspection apparatus inspects a plate to be inspected by bringing a contact into contact with an electrode of the plate to be inspected. The lighting inspection apparatus includes a work table supporting the plate to be inspected, a positioning mechanism which comes into contact with an edge of the plate to be inspected supported by the work table to position it, and a pusher mechanism which presses the edge of the plate to be inspected against the positioning mechanism side to position and support the plate to be inspected. The positioning mechanism has a movable function and stands in readiness together with the pusher mechanism when the plate to be inspected is attached and detached. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a lighting inspection apparatus that drives a test target plate for a lighting test of a test target plate such as a liquid crystal display panel and inspects the quality thereof.

  In general, a lighting inspection apparatus includes a work table for supporting a liquid crystal panel as an inspection target plate and aligning electrodes and probes of the liquid crystal panel. As a conventional work table, one described in Patent Document 1 is known.

  The inspection stage for a liquid crystal panel of Patent Document 1 includes a work table that is a mounting table for a liquid crystal panel, an XYZθ table on which the work table is mounted, and a backlight that is installed between the XYZθ table and the work table. Has been.

  The work table includes a panel receiver that receives the liquid crystal panel, first and second stopper means that protrude from the panel receiver to receive two adjacent edges of the liquid crystal panel, and two adjacent edges of the liquid crystal panel. And pressing means for pressing the liquid crystal panel so as to contact the stopper means.

After the liquid crystal panel transported by the transport device is placed on the work table, the two adjacent edges are pressed by the stopper means by the pressing means and positioned at a predetermined position.
Japanese Patent Application Laid-Open No. 11-14756

  By the way, in the conventional work table, the liquid crystal panel is placed on the work table and then pressed and positioned by both stopper means. If the liquid crystal panel is displaced, the liquid crystal panel is moved to the work table. The panel may not be placed reliably. That is, if the liquid crystal panel is slightly misaligned due to the structure of the stopper means, fine adjustment may be required when pressing with the stopper means, and the liquid crystal panel can be smoothly placed on the work table. There are cases where it is not.

  An object of the present invention is to provide a lighting inspection apparatus capable of reliably delivering an inspection object plate.

  The lighting inspection device according to the present invention is made to solve the above-described problem, and in the lighting inspection device that performs inspection by bringing a contactor into contact with an electrode of the inspection target plate, a work table that supports the inspection target plate. A positioning mechanism that contacts and positions the edge of the inspection target plate supported by the work table, and presses the edge of the inspection target plate toward the positioning mechanism to position and support the inspection target plate. A pusher mechanism, wherein the positioning mechanism has a movable function, and is put on standby with the pusher mechanism when the inspection object plate is attached or detached.

  As described above, according to the present invention, the inspection object plate can be reliably delivered.

  Hereinafter, a lighting inspection apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. Here, a liquid crystal panel will be described as an example of the inspection target plate. For this reason, below, the lighting test | inspection apparatus of this invention is demonstrated as a liquid crystal lighting test | inspection apparatus.

  The liquid crystal lighting inspection apparatus 1 according to the present embodiment is configured as shown in FIG. This liquid crystal lighting inspection device 1 brings a probe 3 (see FIG. 9) into contact with an electrode (not shown) of a liquid crystal panel 2 (see FIG. 9), gives an electric signal, and turns on the liquid crystal panel 2 to inspect the inspector. Is an apparatus for visually inspecting defects and the like. That is, in the liquid crystal lighting inspection apparatus 1 of the present embodiment, the liquid crystal panel 2 is tilted and the inspection is performed manually. Needless to say, the inspection may be automatically performed by image processing.

  Hereinafter, in order to facilitate understanding, in both the lighting inspection apparatus and the liquid crystal panel, the direction of the long edge of the liquid crystal panel (the horizontal direction in FIG. 4) is referred to as the X direction (X axis), and the short edge Direction (vertical direction in FIG. 4) is called the Y direction (Y axis), the direction perpendicular to both the XY directions is called the Z direction (Z axis), and the direction rotates around the axis parallel to the Z direction. Is called the θ direction (θ axis).

  As shown in FIGS. 2 and 3, the liquid crystal lighting inspection apparatus 1 includes a delivery unit 5 that supplies and discharges the liquid crystal panel 2, an inspection unit 6 that performs inspection, and these delivery units 5 inside the housing 4. And a transport device 7 for transporting the liquid crystal panel 2 between the inspection units 6.

  The delivery unit 5 is a device for transporting the liquid crystal panel 2 inserted from the outside to the inspection unit 6 and carrying out the liquid crystal panel 2 after the inspection to the outside. Here, supply and discharge of the liquid crystal panel 2 to the delivery unit 5 are performed manually.

  The delivery unit 5 includes an opening 9, and a delivery device 10 and a transport device 7 are provided at the back of the opening 9.

  The delivery device 10 is a device for delivering the liquid crystal panel 2 directly. That is, the delivery device 10 is a device for positioning and supporting the liquid crystal panel 2 carried in from the outside and delivering it to the transport device 7 and receiving the liquid crystal panel 2 after the inspection from the transport device 7 and transporting it to the outside.

  The delivery device 10 includes a positioning support mechanism 13 and a Z-axis movement mechanism 14. The positioning support mechanism 13 includes a rectangular support plate 15, support rods 16 radially disposed from the support plate 15, and the support plate 15 and the support rod 16. The panel receiving member 17 is received and supported, and the clamp mechanism 18 is configured to support the liquid crystal panel 2 supported by each panel receiving member 17 from the X direction and the Y direction. The clamp mechanism 18 includes an X-axis rail 19 disposed in the X direction, a guide 20 movably attached to the X-axis rail 19, a panel clamp 21 attached to the guide 20, and a Y-direction. The Y-axis rail 22 is provided, a guide 23 movably attached to the Y-axis rail 22, and a panel clamp 24 attached to the guide 23. Thereby, when the liquid crystal panel 2 carried in from the outside through the opening 9 is installed in the positioning support mechanism 13, the X of the liquid crystal panel 2 is in a state where the back surface of the liquid crystal panel 2 is in contact with each panel receiving member 17. The panel clamps 21 and 24 come into contact with each other from the direction and the Y direction so that the liquid crystal panel 2 is positioned and supported.

  The Z-axis moving mechanism 14 is a mechanism for moving the positioning support mechanism 13 in the Z-axis direction. The Z-axis moving mechanism 14 supports the positioning support mechanism 13 and moves in the Z direction, and a column 27 that fixes the Z direction moving part 26 to the casing 4 side of the liquid crystal lighting inspection apparatus 1. It is composed of The Z-direction moving unit 26 includes a ball screw 29 disposed in the Z-axis direction, a drive motor 30 that rotates the ball screw 29, and a guide 31 that is attached to the ball screw 29 and moved in the Z direction together with the positioning support mechanism 13. It is composed of The support column 27 is provided with a rotation motor 32 so that the Z-direction moving unit 26 can be rotated to adjust the direction of the Z axis.

  The transport device 7 is a device for transporting the liquid crystal panel 2 received from the delivery device 10 to the inspection unit 6 and transporting the liquid crystal panel 2 after the test from the inspection unit 6 to the delivery device 10. As shown in FIGS. 3 and 6 to 8, the transport device 7 includes a panel gripping mechanism 34 and a moving mechanism 35.

  The panel gripping mechanism 34 is a mechanism for gripping the liquid crystal panel 2 as the liquid crystal panel 2 is transported. The panel gripping mechanism 34 includes a Y direction ball screw support plate 37 disposed in the Y direction, a ball screw 38 supported by the Y direction ball screw support plate 37 and disposed in the Y direction, and the ball screw 38 being driven to rotate. And a support arm 40 that supports and conveys the liquid crystal panel 2. The ball screw 38 is divided by a connecting member 41, one of which is a right screw portion 38A and the other is a left screw portion 38B. The ball screw 38 is rotatably supported by a support plate piece 37A of the Y-direction ball screw support plate 37. The support arm 40 is provided on each of the right screw portion 38A and the left screw portion 38B via a nut 40A at the base end thereof. The two support arms 40 grip the liquid crystal panel 2 close to each other when the ball screw 38 is rotated in one direction, and separate from each other to release the grip of the liquid crystal panel 2 when rotated in the opposite direction. It is like that. A panel gripping member 43 is provided at the tip of each support arm 40 in a direction facing each other. Accordingly, the liquid crystal panel 2 is supported by the panel holding members 43 when the support arms 40 are close to each other, and the support of the liquid crystal panel 2 is released by being separated from each other.

  The moving mechanism 35 is a mechanism for supporting the panel gripping mechanism 34 and moving it between the delivery unit 5 and the inspection unit 6. The moving mechanism 35 includes two base plates 45 disposed in parallel to the X direction, rails 46 disposed on the respective base plates 45 in the X direction, and movably supported by the rails 46. A guide 47 for supporting the Y direction ball screw support plate 37, a ball screw 48 attached to each base plate 45 in the X direction, a drive motor 49 for rotating the ball screw 48, and a Y direction ball screw support plate 37. The nut portion 50 is provided and screwed into the ball screw 48.

  The inspection unit 6 is an apparatus for inspecting the liquid crystal panel 2 delivered from the delivery unit 5. The inspection unit 6 includes an XYZθ stage 52, a backlight 53, a work table 54, a probe unit 55, and a panel receiving unit 56.

  The XYZθ stage 52 is a mechanism for bringing the electrodes of the liquid crystal panel 2 supported by the panel receiving portion 56 into contact with the probes of the probe unit 55 in alignment with each other. The XYZθ stage 52 includes an X movement mechanism, a Y movement mechanism, a Z movement mechanism, and a θ rotation mechanism (all not shown).

  The backlight 53 is a light for illuminating the liquid crystal panel 2 supported by the panel receiving portion 56 from the back surface. The backlight 53 is supported on the upper side surface of the backlight base 58 attached to the XYZθ stage 52. On the upper side of the backlight 53, a work table receiving member 59 is fixed to the backlight base 58 by a plurality of peripheral columns 60. Accordingly, the backlight 53 is supported between the backlight base 58 and the work table receiving member 59.

  The work table 54 is a plate material for supporting the panel receiving portion 56. The work table 54 is attached to a work table receiving member 59, moved in the XYZ direction 52 by the XYZ θ stage 52 via the support 60 and the backlight base 58, and rotated in the θ direction. The work table 54 includes a work table base 61 that is detachably attached to a work table receiving member 59.

  The probe unit 55 is a device for lighting the liquid crystal panel 2 by directly contacting each electrode of the liquid crystal panel 2 and applying an electrical signal to the liquid crystal panel 2. The probe unit 55 mainly includes a probe stage 63 supported on the casing 4 side of the liquid crystal lighting inspection apparatus 1, a probe base 64 supported by the probe stage 63, and a probe assembly supported by the probe base 64. 65 and an alignment camera 66. The probe 3 is attached to the panel receiving portion 56 side of the probe assembly 65.

  The panel receiving part 56 is a member for positioning and supporting the liquid crystal panel 2. As shown in FIGS. 1 and 9 to 12, the panel receiving portion 56 includes a support frame 70, a positioning mechanism 71, and a pusher mechanism 72.

  The support frame 70 is a frame for supporting the liquid crystal panel 2. The support frame 70 is formed in a rectangular frame shape having substantially the same dimensions as the liquid crystal panel 2. The support frame 70 is attached to the upper side of the work table 54. Positioning mechanisms 71 are provided on two adjacent sides of the support frame 70. Pusher mechanisms 72 are provided on two adjacent sides facing each positioning mechanism 71.

  The positioning mechanism 71 is a mechanism for positioning the liquid crystal panel 2 in contact with the edge of the liquid crystal panel 2. As shown in FIGS. 1, 8, and 11, the positioning mechanism 71 is incorporated in a notch 74 of the support frame 70. The positioning mechanism 71 is a state in which the rail 75 is fixed to the work table base 61 in a state where the positioning mechanism 71 is attached to the notch 74, the guide 76 is slidably attached to the rail 75, and the work table base 61 is supported. The control cylinder 77 is connected to the guide 76 and presses the guide 76 with a set pressure, and is movably supported, and a positioning pin 78 attached to the guide 76. The positioning pin 78 is a pin that directly contacts the edge of the liquid crystal panel 2.

  The control cylinder 77 is a pressing means for pressing the positioning pin 78 against the edge of the liquid crystal panel 2. The control cylinder 77 has a function of moving the positioning pin 78 as a movable function, a function of pressing the positioning pin 78 against the edge of the liquid crystal panel 2 with a set pressure, and a function of moving the positioning pin 78 to a standby position when the liquid crystal panel 2 is attached or detached (FIG. 12 and a function of moving to a standby state by t1 in FIG. The pressing force to the liquid crystal panel 2 by the control cylinder 77 is set larger than the pressing force to the liquid crystal panel 2 by the pusher mechanism 72. This is to prevent the positioning pin 78 serving as a positioning reference from easily moving.

  The pusher mechanism 72 is a mechanism for positioning and supporting the liquid crystal panel 2 by pressing the edge of the liquid crystal panel 2 toward the positioning mechanism 71. As shown in FIGS. 1, 8, and 10, the pusher mechanism 72 includes a rail 82 that is fixed to the worktable base 61 while being attached to the notch 81, and a guide 83 that is slidably attached to the rail 82. A control cylinder 84 which is connected to a guide 83 while being supported on the work table base 61 side and presses the guide 83 with a set pressure and is movably supported, and a pusher 85 attached to the guide 83. Has been. The pusher 85 is a member that directly contacts the edge of the liquid crystal panel 2.

The control cylinder 84 has a function of pressing the pusher 85 against the edge of the liquid crystal panel 2 with a set pressure, and a function of moving the pusher 85 to the standby position when the liquid crystal panel 2 is attached or detached (in FIG. 12). a function to move by t2 and enter a standby state). The pressing force applied to the liquid crystal panel 2 by the control cylinder 84 is set to be smaller than the pressing force applied to the liquid crystal panel 2 by the positioning mechanism 71 as described above.

  The positioning mechanism 71 and the pusher mechanism 72 are provided on opposite sides of the support frame 70, respectively. Two positioning mechanisms 71 and one pusher mechanism 72 are provided. The number of positioning mechanisms 71 and pusher mechanisms 72 is appropriately set according to the size of the liquid crystal panel 2 and the like.

  Panel gripping member introduction portions 86 into which the panel gripping member 43 is fitted when the liquid crystal panel 2 is attached to and detached from the support frame 70 are provided on two opposing sides of the support frame 70.

[Operation]
The lighting inspection apparatus configured as described above operates as follows.

  When the liquid crystal panel 2 is carried into the delivery unit 5 from the opening 9 of the housing 4, the liquid crystal panel 2 is supported by the panel receiving member 17 of the delivery device 10 and positioned by the panel clamp 21. Next, it is moved in the Z-axis direction by the Z-axis moving mechanism 14 and delivered to the transport device 7.

  The transport device 7 transports the liquid crystal panel 2 to the inspection unit 6 while being supported by the panel gripping member 43 of the Y-axis drive unit 40.

  In the inspection unit 6, the panel gripping member 43 is fitted into the panel gripping member introducing portion 86 of the support frame 70, and the liquid crystal panel 2 is transferred to the panel receiving unit 56.

  At this time, in the positioning mechanism 71 and the pusher mechanism 72, the control cylinder 77 and the control cylinder 84 move the positioning pin 78 and the pusher 85 to the standby position. For this reason, the liquid crystal panel 2 is smoothly placed on the support frame 70.

  Next, the control cylinder 77 of the positioning mechanism 71 moves the positioning pin 78 from the standby state to the original set position, and supports the edge of the liquid crystal panel 2 at the set position. Next, the control cylinder 84 of the pusher mechanism 72 moves the pusher 85 from the standby state to the original set position, and presses and supports the edge of the liquid crystal panel 2 with the set pressure.

  At this time, since the pressing force at the set position of the control cylinder 77 of the positioning mechanism 71 supports the liquid crystal panel 2 with a stronger force than the control cylinder 84 of the pusher mechanism 72, the liquid crystal panel 2 is at the set position. Fixed.

  When the inspection is completed in this state, the control cylinder 77 and the control cylinder 84 move the positioning pin 78 and the pusher 85 to the standby position, and leave the edge of the liquid crystal panel 2.

  In this state, the liquid crystal panel 2 is easily gripped by the panel gripping member 43 of the transport device 7 and transported to the delivery unit 5.

  Thereafter, the liquid crystal panel 2 is carried out from the opening 9 of the housing 4 to the outside.

[effect]
As described above, when the liquid crystal panel 2 is supported, the pressing force at the set position of the control cylinder 77 of the positioning mechanism 71 supports the liquid crystal panel 2 with a stronger force than the control cylinder 84 of the pusher mechanism 72. Since the positioning pin 78 and the pusher 85 are moved to the standby position when the liquid crystal panel 2 is attached or detached, the liquid crystal panel 2 can be delivered safely and securely.

  As a result, the loading and unloading operations of the liquid crystal panel 2 are smoothed, and the inspection workability is improved.

It is a perspective view which shows the test | inspection part of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the lighting inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the internal structure of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the delivery apparatus of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the delivery apparatus of the lighting inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the principal part of the conveying apparatus of the lighting inspection apparatus which concerns on embodiment of this invention. It is a front view which shows the delivery apparatus of the lighting inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the panel receiving part of the lighting test | inspection apparatus which concerns on embodiment of this invention. It is a top view which shows the panel receiving part of the lighting inspection apparatus which concerns on embodiment of this invention. It is a principal part perspective view which shows the pusher mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a principal part perspective view which shows the positioning mechanism of the lighting inspection apparatus which concerns on embodiment of this invention. It is a top view which shows the panel receiving part of the lighting inspection apparatus which concerns on embodiment of this invention.

Explanation of symbols

  1: lighting inspection device, 2: liquid crystal panel, 3: probe, 4: housing, 5: delivery section, 6: inspection section, 7: transport device, 9: opening, 10: delivery device, 11: transport device, 13: positioning support mechanism, 14: Z-axis movement mechanism, 15: support plate, 16: support rod, 17: panel receiving member, 18: clamp mechanism, 19: X-axis rail, 20: guide, 21: panel clamp, 22 : Y-axis rail, 23: Guide, 24: Panel clamp, 26: Z direction moving part, 27: Support, 29: Ball screw, 30: Drive motor, 31: Guide, 32: Rotating motor, 34: Panel gripping mechanism, 35: moving mechanism, 37: Y-direction ball screw support plate, 38: ball screw, 38A: right screw portion, 38B: left screw portion, 39: drive motor, 40: support arm, 41: connecting member, 43: panel gripping member, 45: Be 46: rail, 47: guide, 48: ball screw, 49: drive motor, 50: nut part, 52: XYZθ stage, 53: backlight, 54: work table, 55: probe unit, 56: panel receiving part 58: Backlight base, 59: Work table receiving member, 60: Support, 61: Work table base, 63: Probe stage, 64: Probe base, 65: Probe assembly, 66: Alignment camera, 70: Support frame 71: Positioning mechanism, 72: Pusher mechanism, 74: Notch, 75: Rail, 76: Guide, 77: Control cylinder, 78: Positioning pin, 81: Notch, 82: Rail, 83: Guide, 84: Control Cylinder, 85: Pusher, 86: Panel gripping member introduction part.

Claims (3)

In the lighting inspection device that performs inspection by bringing a contactor into contact with the electrode of the inspection object plate,
A work table that supports the inspection object plate, a positioning mechanism that contacts and positions an edge of the inspection object plate supported by the work table, and presses the edge of the inspection object plate toward the positioning mechanism. And a pusher mechanism for positioning and supporting the inspection object plate,
The lighting inspection apparatus characterized in that the positioning mechanism has a movable function, and waits together with the pusher mechanism when the inspection object plate is attached or detached. The lighting inspection apparatus according to claim 1,
The positioning mechanism includes a positioning pin that directly contacts the edge of the inspection object plate, and a pressing unit that presses the positioning pin against the edge of the inspection object plate,
The lighting inspection apparatus, wherein the pressing means includes a mechanism for pressing and retracting the positioning pin. In the lighting inspection device according to claim 1 or 2,
The lighting inspection apparatus, wherein a pressing force applied to the inspection target plate by the pressing unit of the positioning mechanism is set to be larger than a pressing force applied to the inspection target plate by the pusher mechanism.

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