1314659 麵 九、發明說明： 【發明所屬之技術領域】 本發明’係關於用以檢查如液晶顯示面板般的顯示用 面板的裝置。 【先前技術】 係進行通電試驗、亦即進行檢查，以測試液晶顯示面 板或玻璃基板狀之顯示用面板，是否如規格書所示進行作 、動。 • 該種檢查裝置之一 ’係使承接顯示用面板之檢查工作 台繞著沿水平方向延伸之轴線進行角度式旋轉，而^以選 擇性地將顯示用面板放置在水平狀態或傾斜狀態。（專利= 獻1) ' [專利文獻1]曰本特開2004-108921號公報 在上述習知之檢查裝置中，檢查工作台係包含：板狀 之底座；組裝在該底座上之支撐平台；組裝在支撐平台上 鲁承接顧不用面板的工作台亦即支持台。.. 支撐平台，係使支持台，在與支撐平台所承接之顯示 用面板平行的面内產生二次元移動’並使之相對於著與該 «顯示用面板垂直的方向移動，然後再使支持台繞著與^ 、示用面板垂直之軸線進行角度式旋轉。藉此，由支持台& 承接之顯示用面板可相對於通電用之探針移動並進行^ 位。 '藉由檢查裝置，可由左右方向斜向觀察顯示用面板而 从可目測之視野角檢查該顯示用面板所顯示的影像。 (修正本) 5 1314659 # w = j在進行上述視野角檢查時，若利用習知的檢查 、二只能夠使顯示用面板相對於著通電用的探針移動， - 進行目測點燈檢查時，操作者必須面對檢查裝置左 ~ m而在利用攝影機進行自動檢查時，則必須使攝影 機面向檢查台左右移動。 【發明内容】 (發明所欲解決之課題） 而得以進行左 本發明之目的，係藉由使檢查台移位 _右視野角檢查。 (解決課題之手段） ―與本發明相關之檢查裝置，係包含：檢查台，承接顯 :用面板’基座台，支標該檢查台；们旋轉機構，使前 :述檢查台相對於前述基座台繞著沿上下方向延伸之第】軸 f旋轉’及第2旋轉機構，使前述檢查台相對於前述基座 台繞著水平方向延伸的第2軸線旋轉；前述第1旋轉機構 f係具有由前述基座台所支撐且具有前述第丨轴線之旋轉 轴，而前述第2旋轉機構係具有由前述第"走轉機構所支 撐^具有前述第2軸線之旋轉軸，此外，前述檢查台:係藉 由前述第1或第2旋轉機構支撐於前述基座台。 曰 (發明之效果） 、利用第1旋轉機構，使檢查台繞著第丨軸線進行角度 式旋轉時，檢查台會與由該檢查台所承接之顯示用面板^ 時往左右方向進行角度式旋轉。 上述操作的結果，將使得操作者在進行目測檢查時不 (修正本) 6 1314659 ·» 必相對於檢查裝置左右移動、或在進行自動檢查時 影機相對於檢查台左右移動，即可進行左右視野角的 亦可包含:使前述檢查台相對於前述基座 水千方向延伸的第2軸線旋轉的第2旋轉機構。如 、用：板不:以及傾斜的任何狀態下均能夠檢查顯 ：，tr目測檢查鶴^ —衣置上下私動、或在進行自動檢查時， •對於檢查台上下移動，卽可、隹〜 个义使攝衫機相 广杪動，即可進仃上下視野角的檢查。 前述第1旋轉機射具有由前述基座 撐 别述第1軸線之旋轉軸，另外前述第2旋轉機構 由前述第1旋轉機構所支撐且具有前述第 ^輪有 軸，此外，前述檢杳a介·r 1丄i ”、良之旋轉 切於前述基座台：或第2旋轉機構 擇於美座么、來’㈣於使第2旋轉機構支 探於基座' 而使第1旋轉機構Α撐於第2旋轉機禮^ ►形’檢4台繞著第1軸線旋轉的範圍會變窄。 1 前述基座台，可具備：安裝於_ 於著與前述第2車由線交叉之水平方向移動二：：相對 動台；以及使該移動△相 式支撐的移 •i·、f筮1 # & 口 、；刖W基台移動之移動機構。 刖述弟1方疋轉機構，可苒 轉且配置在前述基座台的λ ^繞者，述第1軸線旋 前述基座台而繞著前述第，使該基座構件相對於 , 1第1轴線旋轉的第1驅叙、、盾. 前述基座構件相對於前述第2 .、、動源，及由 一對支柱、用以支_’、+ '、、向隔以間隔而立起的 切Μ檢查台使之得以繞著前述第2軸 (修正本彡 7 1314659 線旋轉的支柱。 前述第2旋轉機構，可包含 台繞著前述第2轴線旋轉之 以使前述檢查 驅動源。 万的則逑支柱的上部的第2 刖述移動機構，可包含·义 延伸的狀態下以可旋轉方式支撐：：：：：台之移動方向 與該滾珠螺捍螺合並安褒：夂:：剧述基口的滾珠螺桿； 述滾珠螺桿繞莶I 剛处私動台的螺帽，·以及使前 繞者其轴線旋轉的第3驅動源。 1 刖述檢查台，可包合.1丄 平台主體；配置在第1旋轉機構旋轉之 的電性連接裳置且且持台；配置於該支持台 電性連接裝置，此；，前述:=;=單元的 的其中任一方， 以及剛述電性連接裝置 板的面板座。如此二來'承接必須進行檢查之顯示用面 時繞著第1偏a 使電性連接裝置與支持台同 線進行角度式旋轉。 主體，可使前述支持台至少進行二次元移動。 1臭座/…連接裝置，可包含··具有第1開口之板狀第 土第在前述第】基座之板狀第2基座；以及 複數個接觸器單元，另外前述第2基座， 前顯示用面板的面板座，具備有:形成與 =1開口相對之矩形第2開口的面板座。 前述電性連接裝詈，π 4 承接 了匕3·以可抵接前述面板座所 數個擋止m配置在前 任月Ji:弟2基座的複 仕月j迷第2基座，使前述面板座所承 (修正本) 8 1314659 顯不用面板往m述擋止銷壓押的複數個推壓件。以此 連:袭:使面板座所承接之顯示用面板更容易定位在電性 各接觸器單元 述面板所承接之顯 器組塊（block)。 【實施方式】 可具備：具有以可開放之方式接觸前 用面板的電極的複數個接觸器的接觸 •声古a :下說明中’係將檢查台所承接之顯示用面板的厚 二+-°稱為上下方向或Z方向’而將面對該面板的接觸器 念、，頭側（面板側）稱為下方，並將與該面板平行之水平直 =座標的2個方向稱為χ方向以及γ方向。但在進行檢查 可將該面板的厚度方向稱為斜向或橫向，亦可將上下 方向反過來使用。 —參照第1圖至第6圖，檢查裝置10,係使用在與之後 =弟7 ®至第14圖所示檢查.台相關而說明之顯示用面板 •的通電減驗（通電檢查）上。顯示用面板12係具有矩形 形狀’且在對應矩形各邊的部份的各緣部分別具有複數 電才 曰在圖示例中，顯不用面板12 ,係一種封入有液晶之液 ‘晶顯示面板，此外，相鄰的2個緣部，係分別在對應之緣 部的長邊方向隔以間隔設置複數個電極。因此，檢查裝置 W’係使用在液晶顯示面板的點燈檢查。 參照第1圖至第4圖，檢查裝置10係包含：承接干 用面们2之檢查台14;支樓檢查台14之基座台16;^檢 (修正本) 9 1314659 查台14在相對於基座台16上下方向延伸之第〗軸線的周 f旋轉的第1旋轉機構18;及使檢查台14在相對於基座 口 16水平方向延伸之繞著第2軸線旋轉的第2旋轉機構 20 ° 檢查台]4，將於後文詳細說明.，係具有承接顯示用面 板12的接收領域22。 基座台16之構造：係將板狀的基台24安裝於檢查裝 置的框體框架’再利用複數個結合具25，使得在隔/ 炯隔之狀態下結合之板狀的_對移動台26，能夠以可移動 Τ與前述第2姆交又之水平方㈣方式支撐於基台24, 動_2δ使移動台26相對基台24而移動於與前 迷弟2軸線交叉的水平方向。 基纟24 ,係在其上面配置一對導執％ 與移動台26之移動方向正交的 便/導軌在 m 1¾¾ ^ ^ ^ ^ ^ ^ 方向（弟1軸線的方向）隔以 間隔並延伸於移動台26的移動方向。 ，上、+、Γ^6,係由導執3G，以及以可移動之方式结合於 上述V軌30之複數個導件32， 、 24。導# π # + # ^ 了移動之方式結合基台 蜂件32係女裝於下侧移動台26的下面。 移動機構28’係在滚珠螺桿3 叙 向延伸的狀態下，以可旋轉之方動台26之移動方 ^ 9, 足轉之方式使滾珠螺桿34 Φ枰於其 口 24,並將螺合於球形螺絲以 支沒於基 的下面。 ’、巾目36裝配於移動台26 /袞珠螺桿34，係在其長邊方& 螺桿36之長邊方向隔 n V、兩端部，藉由在滾珠 之長邊方向^間隔而由基台24立起的—對支撐 (修正本) 10 1314659 片38以可旋轉之方式支撐於基台24,另外r ^之支撺心的如電動機般的‘_4二= 身之軸線的周圍。 冗動源40，旋轉於其本 第1旋轉機構18,係包含 周圍之方式配置;^ # 可旋轉於前述第1軸線 在前述第ίΓΓΓ 26的板狀的基座構件化 的二=間隔而由基座構件42立起之-對 姑 及使基座構件42與支柱44同時 繞著前述第】私始护姑 」寻相對移動台而 :1軸線方疋轉之如電動機般的驅動源46。 基座構件42係利用軸構件48 移動台26，而^ " 旋轉之方式支擇於 件42驅叙 係以無法移動之方式安裝於基座構 :::動源46，係安裝於基座構件_ 轴構件48使基座構件42繞著前述第^線旋轉。藉由 端部線方向的各 兩支柱44的 對挪5〇而以可旋轉之方式支撐於 =的上端部。驅動源46，係藉由一方的軸樞5。使 >查口 14繞著前述第i軸線旋轉。， 心第2方疋轉機構20，係藉由一方的樞軸5〇支撐於一方 44的上部，以使檢查台14得以繞著前述第2轴鍊旋 轉，此外尚包含有例如電動機般的驅動源。 —在檢查裝置10巾’藉由第i旋轉機構18使檢查台Η ，者第1軸線進行角度式旋轉時，檢查台14，如第4圖、 罘5圖以及第6圖所示，可旋轉為朝正面的狀態、朝右斜 方的狀態或朝左斜方的狀態。因此，不論在上述何種狀態 下均可進行面板12的點燈檢查，並可進行面板丨2的收 (修正本) 11 1314659 付。 檢在進行9測檢查時操作員不必相對於 1對於Μ台左右移動，即可進行左右視野角的檢查。此 ，不錢右斜方的角纽及麵方的肖度， 目的進行選擇。 祝只丨不 杳=檢9查^置10中，利用第2旋轉機構20使檢 =14繞者第2軸線進行角度式旋轉時，檢查台η，如 以及第4圖所示，係在朝上的狀態、朝斜上或 的狀I、、或朝正面的狀態下進行旋轉。因此，不論在 2的收付。此外，不論是斜上或朝下㈣度，均 目的來進行選擇。 貫際 ^述結果，在進行目測檢查時操作員不必相對於檢查 奸杏Γ移動，另外在進行自動檢查時不必使攝影機相對 ，查台上下移動，即可進行上下視野角的檢查。 18以H，藉由檢查襄置10，可使第1以及第2旋轉機構 圍^進订作動，並將檢查台14放置於：第1軸線周 之朝上正面、朝斜右方以及朝斜左方’以及第2轴線周圍 夂上或朝下以及朝正面之任意組合的狀態下。 =照f 4圖至第14圖，說明檢查台的實施例。 並在Γ—ΐ Η，係將支持台116安裝於平台主體118上， 乡；0 IB配置背光裝置120,而將電性連接裝置110 支稼於支持台116。 (修正本) 12 1314659 - 支持台116,係藉由複數個支柱126將具有矩形板形 狀的支撐基座122與具有矩形板形狀的接收基座124，組 裝成在上下方向隔以間隔呈平行的狀態。 接收基座124，係藉由在其中央區域往厚度方向貫通 、的開口 128(參照第10圖），形成框狀。藉此，可於支持台 116形成經由開口 128在上方開放的空間。 平台主體118，係使支持台116往χ、γ以及z的三方 *向（三次元）移位’並使之在往z方向延伸之軸線的周圍進 ❿行角度式旋轉。 背光單S 120,係將白色電燈泡或白色螢光燈等複數 個背光燈130收納於朝上方開放的收納容器132中（參昭第 ίο圖）。而收納容器132，係配置於支持台116的上 並安裝於支撐基座122〇 電性連接裝置110,係包含：安裝於承受基座124上 之呈矩形板狀的安裝基座134 ;以矩形方式設置在安裝其 會座m上的4個探針基座136 ;以及配置在相鄰之2個^ 針基座136的複數個接觸器單元138。 〈如第1G圖所示，安裝基座134，在其_央係具有類似 承又基座124開口 128的矩形開口 14〇。開口 14〇係貫通 、安裝基座134的厚度方向。 /如弟7圖至第10圖所示，探針基座136，具有長板狀 的形狀’且其上部具備有承接顯示用面板12之面板座 142。面板座142’係形成具有矩形之剖面形狀之所謂之方 柱狀的長形構件的形狀，此外，使對應之探針基座136的 (修正本) 13 1314659 .寬度方向的一端部朝對應之探針基座136的長邊方向延 伸。 探針基座136，係載置於安裝基座134，以使4個探針 ，基座以及4個面板座142共同形成與開口 ^相對的開口 144開口 144，具有類似開口 128以及140的矩形形狀。 • 在組裝為電性連接裝置110的狀態下，面板座142的 開口 144侧的緣部，係具有做為共同形成開口 144之緣部 •的作用。開口 128以及14〇雖具有相同的大小，但開口 144 馨係小於開口 128以及140。 開口 144，係由支撐於面板座142之光擴散板丨“所 閉鎖。光擴散板14Θ，使來自背光燈13〇的光產生擴散並 照射於顯示用面板12的背面。 電性連接裝置11〇，係藉由從探針基座136以及安裝 基座134之上方侧貫通而螺合於承受基座124的複數個螺 絲148，以可拆卸之方式，將探針基座136以及安裝基座 翁134安裝於承受基座124上，以使開口 14〇以及144得以 面對開口 128。 電性連接裝置11〇 ’藉由插入承受基座124、安裝基座 .134以及探針基座136之複數個定位銷15〇，在承受基座 .124進行相對性定位。上述定位銷15〇，係固定於承受基座 124、女裝基座134以及探針基座136的其中一個。 相鄰的2個探針基座136，分別安裝;Γ抵接顯示用面 板12之緣部之複數個擋止銷152。而相鄰之其他的2個探 針基座136,則分別安裝有將顯示用面板12往相對之擋止 (修正本) 14 1314659 —銷152推壓的i個以上的推壓件154。 在圖不例中，在相鄰的2個探針基座136的各面板座 2 2個擋止銷152係隔以間隔安裝在面板座ι42的長邊 ,方向，而在相鄰之其他2個探針基座136則分別安裝一個 推壓件154 〇 . 各擋止銷152，係在擋止銷由對應之面板座142向上 突出的狀態下，安裝於對應的面板座142。藉此，顯示用 面板12的緣部，可藉由推壓件154推壓顯示用面板12， 鲁而抵接擋止銷152。 、各推壓件154，在第Η圖（A)、（B)以及（C)所示例中， 係具備：如電磁線圈機構以及氣缸機構般可進行來回運動 的推麼機構156 ;以及利用推壓機構156來回移動於顯示 用面板12的推壓片158,在推壓機構156中係安裝於探 基座136 〇 推壓機構156 ’係安裝於探針機構136,以使其輪出軸 鲁157的移動方向得以形成左右方向，又將往上下延伸之支 撐銷161安裝於輪出軸157前端，並將推壓片丨58 -支撐銷161上端。 . .义各推壓件154’藉由使推壓片158相對於顯示甩面板 '12前進，將該顯示用面板12推壓於擋止銷152，以藉此與 擋止銷152同時把持住顯示用面板j 2。 當推壓片158相對顯示用面板12後退時，各推壓件 154，與擋止銷152會同時解除抓住顯示用面板Μ。 配置有推壓件154之探針基座136的面板座142，且 (修正本) 15 1314659 有承接推麗件154之前端側部分的凹陷部159。 延二放於推壓機構156側而往上下方向 —I 、 卜田推壓片158利用推壓機構156前進時 會接納支撐銷161。 于 動的件1S’亦可具備有使推壓片158正確且確實移 .件。此外，亦可使用其他類型的推壓件。 各接觸器單元138，‘笛彳，^ ，含：藉由蟫今安梦於以 目至第13圖所示’係包 精由螺絲女裝於探針基座136 >進及後退於面板座142 土庄敬ib(J ’以可月·』 動組媸罝_ 、式载置於基座板160的第1移 接之龜千田工，， j祁對於者與面板座142所承 ^顯不用面板12呈傾斜的方向移 移動組塊單元162的第2移動 ' 第2蔣韌加祕--^ m以及支撐於 動、且塊早幻64的接觸器組塊單元⑽。 移動組塊單元m的移動方 所承接之顯示用面板12平 孜屋142 f. it 162 、 方向，而第2移動組塊 一平7G ^的移動方向，則是與 傾斜之上下方向延伸的第2方向 面板I傾斜且朝 基座板160，係在導軌16 •下將導執168安裝在其上方，或I方向延伸的狀態 丧合於導執m，並使導件]70以=巧動之方式 在基座板_，2組擅丘器^第=塊單元脱。 止請、176，在圖干：t塊早几162的移動方向。播 在圏不例中，係以 160,另外，每組擋止器174、 ^式女裝於基座板 係以弟1移動組塊單元 (修正本) 16 1314659 六而在與第1移動組塊單元162之移動方向正 父的方向隔有間隔。 J此 料由㈣以㈣機構移 曼达之接觸ή 172接觸顯示用面板12之電極的前進 位置亦即後退㈣Λ了㈣面板12分開而後退的待機 電磁動機構’可使用柱絲（jaGk)式的驅動機構、 ι162的4構等，可調整第1方向中的第1移動組塊單元 162的位置的機構。 第1㈣組塊單元162’係在其各側部具 第 1移tM且塊_Γ 1 時，抵接播止器1 74限制第 矛夕動，、且塊早兀162前進的限制組塊178。 元^^動組塊單元164,具備有：當第2移動組塊單 Γζ6 L =動_單71162 一起前進時，抵接播止器 繞著水平H轉體180 °各組旋轉體18G’係以可在相對於 挺抽線旋轉的方式安裝在··由第2移動 早兀164沿罘i移動組塊單元162的側方 組塊單元m後退方向延伸的措止臂182的後端^移動 、可藉由配置在基座板160的感測器（未圖示），分別拾 測出第1移動組塊單元162移動至前進 及 退位置。 ^夂私動至後 第1移動組塊單元162的前端面（亦即，面板座142 m)/係設成與顯示用面板12呈傾斜之向下傾斜的傾 〃以使其得以由面板座142側之面板座142離開 (修正本) 17 1314659 上方。第1移動組塊單元162 斜之上下方6 ^ ^ 怍將者傾斜面184往傾 向之伸的導執186安裝在傾斜面184。 移動組塊單元】64，係藉由以山 於導執186的導株,莊 秒動之方式肷合 止臂18?，在、S8’、，且裝於第1移動組塊單元162。擋 “以螺絲固定於第2移動組塊單元丨64。 在= 且的旋轉體】δ〇 ’係在上下方向隔有間隔，以使i Μ進行旋轉的同時得以移動於傾斜面184 臂182的#各旋轉體180 ’在圖示例甲’係安農於播止 # 8的滾輪，但亦可是如球體般的其他構件。 第1移動組塊單元162，尚具備··與傾斜面ΐδ4呈直 角式地安裝於傾斜面184的支撐部⑽；以及由支樓部⑽ 朝著與傾斜面184平行之斜上方延伸的桿子192。 、第2移動組塊單元164,具備有由其上部接收桿子192 同孔194且藉由如配置在桿子192之壓縮線圈彈簧般 的彈性體196 ’朝第2方向推彈以使從第j移動組塊單元 丨162分離、 各接觸盗172,係一種pogo針頭型或彈簧針頭型的探 針係貝通接觸器組塊單元16 6延伸而出。接觸器17 2， 係配置成與顯示用面板丨2之電極配列相同的配列，且藉由 組裝於接觸器組塊單元166的配線基板（未圖示）；組裝於 該配線基板的連接器（未圖示）；以及連接該連接器的可撓 性印刷配線板（未圖示）’與檢查裝置的電氣電路電性連接。 接觸益172的前端與顯示用面板12間的平行度及高度 位置’可依照每一接觸器單元138進行調整。因此，可使 (修正本) 18 1314659 上述平行度及高度位置的調整作業變 示用面板12與接觸器172間^ 〜可降低顯 w⑴間之接觸偏離的發生之虞。 接者’參照第14圖，說明檢查裝置的動作。 教移動組塊單元162,如第14_所示， =面板幻42後退至離向第U向之待機位置。因此， 第2移動组塊單元1 + 以Γ 板座142上之顯示用面 =二 利用彈性體196往斜上方彈推而由顯示 用面板12往上方分離。 ，在待機狀態下，由於第.丨|楚9 & , 田π弟1與第2移動組塊單元162、 164以及接觸器組塊單元1传由 干iDD係由面板座142之顯示用面 板12的配置區域朝γ t θ + i、 夏匕兑軍月X方向或γ方向分離，因此容易在面板 座142上進行顯示用面板a的拆裝。 在面板座142進行顯示用面板！ 2的拆裝時，推壓件 154，係使推壓片158後退’使之得以由面板座丨“朝χ 方向或Υ方向分離。[Technical Field] The present invention relates to an apparatus for inspecting a display panel such as a liquid crystal display panel. [Prior Art] The power-on test, that is, the inspection, is performed to test whether the display panel of the liquid crystal display panel or the glass substrate is operated as shown in the specification. • One of the inspection devices is such that the inspection table that receives the display panel is angularly rotated about an axis extending in the horizontal direction, and the display panel is selectively placed in a horizontal state or a tilted state. (Patent Document 1) [Patent Document 1] In the above-mentioned conventional inspection apparatus, the inspection workbench includes: a plate-shaped base; a support platform assembled on the base; assembly Supporting the workbench without the panel on the support platform is also the support platform. The support platform is such that the support table generates a secondary movement in a plane parallel to the display panel that the support platform receives, and moves it relative to the direction perpendicular to the «display panel, and then supports The table is angularly rotated about an axis perpendicular to the display panel. Thereby, the display panel received by the support table & can be moved and positioned with respect to the probe for energization. 'With the inspection device, the display panel can be viewed obliquely from the left and right directions, and the image displayed on the display panel can be inspected from the visually viewable viewing angle. (Revised) 5 1314659 # w = j When performing the above-described viewing angle inspection, if the display panel is moved relative to the probe for energization by a conventional inspection, - when performing a visual lighting inspection, The operator must face the inspection device left to m. When using the camera for automatic inspection, the camera must be moved to the left and right of the inspection table. SUMMARY OF THE INVENTION The object of the present invention is to shift the inspection table by the right viewing angle inspection. (Means for Solving the Problem) ― The inspection device according to the present invention includes: an inspection table that receives a display panel; a base table that supports the inspection table; and a rotation mechanism that causes the front inspection table to be opposite to the aforementioned The base table rotates around a first axis f extending in the vertical direction and a second rotating mechanism to rotate the inspection table with respect to the second axis extending in the horizontal direction of the base table; the first rotating mechanism f a rotation shaft supported by the susceptor and having the second axis, and the second rotation mechanism has a rotation shaft supported by the traverse mechanism and having the second axis, and the inspection is performed. The table is supported by the base table by the first or second rotating mechanism.曰 (Effect of the invention) When the inspection table is angularly rotated about the second axis by the first rotating mechanism, the inspection table is angularly rotated in the left-right direction with the display panel received by the inspection table. As a result of the above operation, the operator will not (correct) 6 1314659 ·» must move relative to the inspection device to the left or right, or move the camera relative to the inspection table when performing automatic inspection. The viewing angle may include a second rotating mechanism that rotates the inspection table relative to the second axis extending in the direction of the susceptor. For example, use: the board is not: and any state of tilt can be checked: tr, visual inspection, crane, clothing, private movement, or automatic inspection, • for the inspection table to move up and down, 卽 可, 隹~ The righteousness makes the camera machine wide and swaying, so you can check the upper and lower viewing angles. The first rotating machine includes a rotating shaft that supports the first axis by the base, and the second rotating mechanism is supported by the first rotating mechanism and has the shaft of the first wheel, and the inspection is performed.介·r 1丄i ”, the rotation of the shank is changed to the pedestal table: or the second rotating mechanism is selected from the fascia, and the fourth rotating mechanism is caused by the second rotating mechanism being probed on the pedestal Α In the second rotating machine, the range of rotation of the four units around the first axis is narrowed. 1 The pedestal table may be mounted at a level that intersects with the second vehicle. Directional movement 2:: relative movement table; and moving mechanism for moving the △ phase type support, i·, f筮1 # &mouth; 刖W base station movement a first drive that is rotatable and disposed on the susceptor of the susceptor, and wherein the first axis rotates the susceptor and surrounds the first axis, and the base member rotates relative to the first axis. Shield. The pedestal member is spaced apart from the second, the kinetic source, and the pair of struts, for supporting _', +', and And the erecting cutting table is arranged to surround the second axis (the struts that are rotated by the correction line 7 1314659. The second rotating mechanism may include the table rotating about the second axis to drive the inspection. The second moving mechanism of the upper part of the struts can be rotatably supported in a state in which the extension is included::::: The moving direction of the table is combined with the ball screw 褒: 夂::The ball screw of the base of the script; the nut of the ball screw around the 私I, the third drive source that rotates the axis of the front wrap; and the inspection table, which can be included a platform body; an electrical connection arranged to rotate in the first rotating mechanism and holding the table; and being disposed on the support station electrical connection device; wherein: the ==== one of the units, and The panel holder of the electrical connector board is just described. In this case, when the display surface that must be inspected is received, the electrical connection device and the support table are angularly rotated around the first bias a. The support station performs at least two-dimensional movement. The base/... connection device may include a plate-shaped second base having a first open plate-shaped soil on the first base; and a plurality of contactor units, and the second base is displayed before The panel holder of the panel includes a panel holder that forms a rectangular second opening facing the opening of the =1. In the electrical connection device, π 4 receives the 匕3· to abut the number of the panel holders. m is placed in the second month of the previous month Ji: the second base of the second base of the brother 2, so that the front panel seat (revision) 8 1314659 is not used to push the panel to the m This connection: Attack: The display panel that the panel holder accepts is easier to position in the display block of the electrical contactor unit. [Embodiment] It is possible to provide a contact with a plurality of contactors that can openly contact the electrodes of the front panel. • Acuity: In the following description, the thickness of the display panel to be received by the inspection table is +-°. It is called the up-down direction or the Z-direction', and the contactor facing the panel is called, the head side (panel side) is called the lower side, and the two directions of the horizontal straight=coordinate parallel to the panel are called the χ direction and γ direction. However, in the inspection, the thickness direction of the panel can be referred to as oblique or lateral direction, and the upper and lower directions can also be used in reverse. - Referring to Figs. 1 to 6, the inspection apparatus 10 is used in the power-on test (energization check) of the display panel described in relation to the inspection table shown in the following paragraphs. The display panel 12 has a rectangular shape 'and each of the edges of the portions corresponding to the sides of the rectangle has a plurality of electric powers. In the example of the figure, the panel 12 is not used, and the liquid crystal display panel is sealed with liquid crystal. Further, the adjacent two edge portions are provided with a plurality of electrodes at intervals in the longitudinal direction of the corresponding edge portion. Therefore, the inspection device W' is used for lighting inspection of the liquid crystal display panel. Referring to Figs. 1 to 4, the inspection apparatus 10 includes: an inspection table 14 for receiving the dry noodles 2; a pedestal table 16 for the branch inspection table 14; and a check (revision) 9 1314659 a first rotating mechanism 18 that rotates on a circumference f of the first axis extending in the vertical direction of the base table 16; and a second rotating mechanism that rotates the inspection table 14 in a horizontal direction with respect to the base opening 16 about the second axis The 20 ° inspection table 4 will be described later in detail, and has a receiving area 22 for receiving the display panel 12. The structure of the susceptor table 16 is such that the plate-shaped base 24 is attached to the frame frame of the inspection device and the plurality of conjugates 25 are reused, so that the plate-shaped _ pair of mobile stations are combined in a state of being separated/striped 26, the base 24 can be supported by the horizontal ( (4) of the movable Τ and the second trajectory, and the moving table 26 can be moved relative to the base 24 in the horizontal direction intersecting the axis of the front buddy 2 . The base 24 is configured to have a pair of guides/guide rails orthogonal to the moving direction of the mobile station 26 in the m 13⁄43⁄4 ^ ^ ^ ^ ^ direction (the direction of the 1 axis) separated by an interval The moving direction of the mobile station 26. , up, +, Γ^6, are guided by 3G, and a plurality of guides 32, 24 that are movably coupled to the V-track 30 described above. Guide # π # + # ^ The way of moving combined with the base unit The bee piece 32 is worn under the lower side mobile station 26. The moving mechanism 28' is configured such that the ball screw 34 is Φ at its mouth 24 in a state in which the ball screw 3 is extended in the direction of the direction of rotation, and the ball screw 34 is slid into the mouth 24, and is screwed to The ball screw is not under the base. ', the towel 36 is attached to the moving table 26 / bead screw 34, in the longitudinal direction of the long side of the screw 36, n V, both ends, by the direction of the long side of the ball ^ The base 24 stands up - the support (revision) 10 1314659 The piece 38 is rotatably supported on the base 24, and the r ^ is supported by the motor-like '_4 two' around the axis of the body. The redundant source 40 is rotated in the first rotating mechanism 18, and is disposed in a surrounding manner; ^# is rotatable on the first axis and is formed by the second base of the plate-shaped base member of the aforementioned The base member 42 is erected for the purpose of equating the base member 42 and the support 44 at the same time around the aforementioned "private guard" to find a relative moving table: a motor-like drive source 46 that rotates on one axis. The base member 42 is moved by the shaft member 48 by means of the shaft member 48, and the rotation of the member 42 is selected to be attached to the base structure in a non-movable manner:: the source 46 is mounted on the base Member_Axis member 48 rotates base member 42 about the aforementioned line. The upper ends of the yoke are rotatably supported by the pair of struts 44 in the end line direction. The drive source 46 is pivoted by one of the shafts 5. The > check port 14 is rotated about the aforementioned i-th axis. The second-side rotation mechanism 20 is supported by the upper portion of one of the pivots 5 to pivot the inspection table 14 around the second shaft chain, and further includes, for example, a motor-like drive. source. - In the inspection apparatus 10, when the inspection table is rotated by the i-th rotation mechanism 18 and the first axis is angularly rotated, the inspection table 14 is rotatable as shown in Figs. 4, 5, and 6 It is a state of facing the front, a state of being inclined to the right, or a state of being inclined to the left. Therefore, the lighting inspection of the panel 12 can be performed regardless of the above state, and the panel 丨2 can be received (corrected) 11 1314659. When the 9-test is performed, the operator does not have to move to the left and right relative to 1 to check the left and right viewing angles. Therefore, it is not possible to select the angle of the right angle and the angle of the face. I wish you only 丨 检 检 检 检 查 查 置 置 检 检 检 , , , , , , , , , , , , , 置 置 置 第 第 第 第 第 第 第 第 第 第 第 第 第 第 14 14 14 14 14 14 Rotate in the upper state, in the upward direction or in the shape I, or in the state of the front side. Therefore, regardless of the payment of 2. In addition, whether it is obliquely upward or downward (four degrees), the purpose is to select. As a result, the operator does not have to move relative to the inspection of the apricots during the visual inspection. In addition, the automatic inspection can be performed without checking the camera and moving the table up and down. 18, by H, by the inspection device 10, the first and second rotating mechanisms can be engaged and placed, and the inspection table 14 is placed on the front side of the first axis, obliquely to the right, and obliquely to the left. 'And in a state where any combination of the second axis is around or down and toward the front. = Embodiments of the inspection station are described in the drawings from Fig. 4 to Fig. 14. In the Γ-ΐ Η, the support station 116 is mounted on the platform main body 118, and the backlight unit 120 is disposed on the IB, and the electrical connection device 110 is placed on the support station 116. (Revised) 12 1314659 - Supporting table 116 is constructed by a plurality of struts 126 having a rectangular plate-shaped support base 122 and a rectangular plate-shaped receiving base 124 arranged in parallel at intervals in the vertical direction status. The receiving base 124 is formed in a frame shape by an opening 128 (see Fig. 10) penetrating in the thickness direction in the central portion thereof. Thereby, a space opened above the opening 128 via the opening 128 can be formed in the support table 116. The platform main body 118 is such that the support table 116 is displaced by three directions * (three-dimensional) of χ, γ, and z, and is angularly rotated around the axis extending in the z direction. In the backlight unit S 120, a plurality of backlights 130 such as a white light bulb or a white fluorescent lamp are housed in a storage container 132 that is opened upward (see Fig. 3). The storage container 132 is disposed on the support base 116 and is mounted on the support base 122 and the electrical connection device 110. The storage container 132 includes a rectangular mounting plate 134 mounted on the receiving base 124. The manner is set to four probe bases 136 on which the seating m is mounted; and a plurality of contactor units 138 disposed on the adjacent two needle bases 136. As shown in Fig. 1G, the mounting base 134 has a rectangular opening 14 in its central portion similar to the opening 128 of the base 124. The opening 14 is continuous and the thickness direction of the base 134 is attached. As shown in Figs. 7 to 10, the probe base 136 has a long plate shape and the upper portion thereof is provided with a panel holder 142 for receiving the display panel 12. The panel holder 142' is formed into a shape of a so-called square columnar elongated member having a rectangular cross-sectional shape, and further, one end portion of the corresponding probe base 136 (corrected) 13 1314659. The probe base 136 extends in the longitudinal direction. The probe base 136 is mounted on the mounting base 134 such that the four probes, the base and the four panel mounts 142 together form an opening 144 opening 144 opposite the opening, having a rectangular shape similar to the openings 128 and 140. shape. • In the state of being assembled into the electrical connecting device 110, the edge portion of the panel holder 142 on the side of the opening 144 serves to collectively form the edge portion of the opening 144. Although the openings 128 and 14 are of the same size, the opening 144 is smaller than the openings 128 and 140. The opening 144 is "closed by the light diffusing plate 支撑 supported by the panel holder 142. The light diffusing plate 14 扩散 diffuses light from the backlight 13 并 and illuminates the back surface of the display panel 12. The electrical connecting device 11 〇 The probe base 136 and the mounting base are detachably attached by a plurality of screws 148 screwed to the receiving base 124 from the upper side of the probe base 136 and the mounting base 134. The 134 is mounted on the receiving base 124 such that the openings 14 and 144 can face the opening 128. The electrical connecting device 11'' is inserted into the receiving base 124, the mounting base 134, and the probe base 136. The positioning pins 15 are relatively positioned on the receiving base 124. The positioning pins 15 are fixed to one of the receiving base 124, the women's base 134 and the probe base 136. The probe bases 136 are respectively mounted; the plurality of stop pins 152 are abutted against the edge of the display panel 12. The adjacent two probe bases 136 are respectively provided with display panels. 12 to the opposite stop (revision) 14 1314659 - pin 152 pushes i The pusher 154 is the above. In the example of the figure, the two stopper pins 152 of the panel holders 136 of the adjacent two probe bases 136 are spaced apart from each other at the long side of the panel holder ι42. The other two probe bases 136 are respectively mounted with a pressing member 154. Each of the blocking pins 152 is attached to the corresponding one in a state in which the blocking pin protrudes upward from the corresponding panel holder 142. The panel holder 142. Thereby, the edge portion of the display panel 12 can press the display panel 12 by the pressing member 154 to abut against the stopper pin 152. The pressing members 154 are in the first drawing ( In the examples shown in A), (B), and (C), there is provided a push mechanism 156 that can move back and forth like a solenoid mechanism and a cylinder mechanism, and a push mechanism that moves back and forth to the display panel 12 by the pressing mechanism 156. The pressing piece 158 is attached to the probe base 136 in the pressing mechanism 156. The pressing mechanism 156' is attached to the probe mechanism 136 so that the moving direction of the wheel shaft 157 is formed in the left-right direction, and A support pin 161 extending upward and downward is attached to the front end of the wheel shaft 157, and pushes the upper end of the pin 58 - support pin 161. By pushing the pressing piece 158 forward relative to the display jaw panel '12, the display panel 12 is pressed against the stopper pin 152, thereby holding the display at the same time as the stopper pin 152 The panel j 2 is used. When the pressing piece 158 is retracted relative to the display panel 12, the pressing members 154 and the stopper pin 152 simultaneously release the display panel Μ. The probe base on which the pressing member 154 is disposed is disposed. The panel holder 142 of 136, and (amendment) 15 1314659 has a recessed portion 159 that receives the front end side portion of the urging member 154. The second extension is placed on the side of the pressing mechanism 156 to the up-and-down direction - I, and the burdock 158 is received by the pressing mechanism 156 to receive the support pin 161. The moving member 1S' may be provided with a member that allows the pressing piece 158 to be correctly and surely moved. In addition, other types of pushers can be used. Each contactor unit 138, 'flute, ^, contains: by the 蟫 梦 dream of the eye to the figure shown in Figure 13 'the bag is made of screws on the probe base 136 > into and back to the panel Block 142 Tu Zhuang Jing ib (J '以可月· 』 媸罝 媸罝 、 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The second movement 'the second movement' of the block unit 162 and the contactor block unit (10) supported by the moving block and the block early 64 are not moved in the oblique direction of the panel 12. The moving block unit is moved. The display panel 12 of the moving side of the m is a flat panel 142 f. it 162, the direction, and the moving direction of the second moving block is 7G ^, which is inclined to the second direction panel I extending obliquely upward and downward. And toward the base plate 160, the guide 168 is mounted above the guide rail 16 or in the state of extending in the I direction, and the guide member 70 is placed on the base in a sturdy manner. Plate _, 2 groups of grazing devices ^ § = block unit off. Stop, 176, in the figure: t block early 162 movement direction. Broadcast in 圏 圏, in the case of 160, in addition, each The stopper 174 and the base plate are spaced apart from each other in the direction of the parent of the moving direction of the first moving block unit 162 by the moving block unit (revision) 16 1314659. The material is moved from (4) to (4) the mechanism is moved to Mandah. The contact position of the electrode of the display panel 12 is reversed (4). (4) The standby electromagnetic mechanism of the panel 12 is separated and retracted. The jagk type can be used. A mechanism for adjusting the position of the first moving block unit 162 in the first direction, such as the drive mechanism, the fourth structure of the first step 162, etc. The first (four) block unit 162' has a first shift tM and a block_Γ on each side thereof. At 1 o'clock, the abutment stop 1 74 restricts the first action, and the block 162 advances the restricted block 178. The element block unit 164 is provided with: when the second moving block is Γζ 6 L = move_single 71162 When advancing together, the abutment stop is rotated around the horizontal H-rotation 180 ° each group of rotating bodies 18G' to be mounted in a manner to rotate relative to the tapping line. 164 moves along the rear end of the arm 182 extending in the backward direction of the side block unit m of the 组i moving block unit 162, The first moving block unit 162 is picked up and moved to the forward and reverse positions by a sensor (not shown) disposed on the base plate 160. The private end moves to the front end of the first moving block unit 162. The face (i.e., the panel holder 142 m) is disposed so as to be inclined downwardly from the display panel 12 so as to be separated from the panel holder 142 on the panel holder 142 side (revision) 17 1314659. The first moving block unit 162 is mounted on the inclined surface 184 obliquely above and below the 6 ^ ^ 怍 guide inclined surface 184 to the inclined extension guide 186. The moving block unit 64 is coupled to the arm 18 by means of a guide that is guided by the guide 186, and is attached to the first moving block unit 162 at S8'. The gear is "fixed to the second moving block unit 丨 64 by screws. The rotating body of = 且 〇 ' is spaced apart in the vertical direction so that i Μ is rotated while moving to the inclined surface 184 arm 182 # Each rotating body 180 'In the example of the figure A' is the roller of the Anning #8, but it can be other components like a sphere. The first moving block unit 162 is still equipped with the inclined surface ΐδ4 a support portion (10) that is attached to the inclined surface 184 at right angles; and a rod 192 that extends obliquely upward from the branch portion (10) toward the inclined surface 184. The second moving block unit 164 is provided with a rod received from the upper portion thereof. 192 with a hole 194 and by a compression coil spring-like elastic body 196' disposed in the rod 192 to push in the second direction to separate from the j-th moving block unit 丨162, each contact 172, a pogo needle The probe type of the spring-type or spring-needle type is extended by the bead contactor block unit 16 6. The contactor 17 2 is arranged in the same arrangement as the electrode of the display panel 丨2, and is assembled by the contactor. Wiring board (not shown) of the block unit 166; assembled in A connector (not shown) of the wiring board and a flexible printed wiring board (not shown) connected to the connector are electrically connected to an electrical circuit of the inspection device. The front end of the contact 172 and the display panel 12 are provided. The parallelism and height position ' can be adjusted according to each contactor unit 138. Therefore, the adjustment of the parallelism and the height position of the above-mentioned parallelism and height position can be made between the panel 12 and the contactor 172. It is possible to reduce the occurrence of the contact deviation between the visible w(1). The operator's operation of the inspection device will be described with reference to Fig. 14. The moving block unit 162, as shown in the 14th, = panel magic 42 retreats to the departure direction U is in the standby position. Therefore, the second moving block unit 1 + is pushed upward by the elastic body 196 on the display surface of the slab seat 142, and is separated upward by the display panel 12. In the state, the configuration of the display panel 12 of the panel holder 142 by the dry iDD system is transmitted by the i 丨 楚 楚 楚 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 The area is facing γ t θ + i, Xia Wei against the army X side Since the gamma direction is separated, it is easy to attach and detach the display panel a to the panel holder 142. When the panel holder 142 is attached or detached, the pressing member 154 pushes the pressing piece 158 back. It can be separated by the panel seat "direction" or "Υ".
在上述狀態下，當將顯示用面板12載置於面板座142 2，推壓件154，係使推壓片158朝顯示用面板12前進。 藉]^面板座142上的顯示用面板12，係受到擋止銷152 的壓押，而在預定狀態下定位於面板座142。因此，可輕 易地將面板座142所承接之顯示用面板12定位於電性連接 裝置110 〇 使推麼件154的推壓片158前進時，推壓件154的支 撐銷161係納入面板座142的凹陷部159。因此，即使存 在有面板座142，同樣可縮小推壓片158的移動範圍。 (修正本) 19 1314659 示）朝H H私動叙塊單元162係藉由驅動機構（未圖 塊i元如第14圖⑻所示，在第1移動組 ⑽會接觸/止=進時，第2移動組塊單A 164的旋轉體 164的前進「而=176。藉此’可阻止第2移動組塊單元 前進。 而弟1移動組塊單元162則在該狀態下繼續 .塊單I Ί ^ 1私動組塊單兀1 62之更加前進’胃2移動組 塊單_ θ對抗彈性體196的彈推力而面向第1移動組 係♦ Ζ 朝第2方向後退。此時，第2移動組塊單元164, =昂1移動組塊單元162愈接近面板座 142，接觸器址 ”元166則愈朝著移位至顯示用面板⑴則的方向下降。 此時，旋轉體180,係接觸撞止器176 一面旋轉一面下降。 &、如第14圖（C)所示，當第1移動組塊單元162前進至 :進：置時’可藉由限制組塊單元i抵接擋止器⑺而 如進藉此，第2移動組塊單元164以及接觸器組塊 i W " 66可在接觸态172受到顯示用面板12之電極壓押 的狀態下，停止下降。 在上述狀態下，使顯示用面板12通電，以進行點燈檢 查。檢查結束後，電性連接裝置110，係進行與上述動作 相反的動作，並回到第14圖（A)所示狀態。在該狀態下， 進行顯示用面板12的交換。 進行點燈檢查時，由於光擴散版146係安裝在面板座 W2，因此必須進行檢查之顯示用面板12會被承接於靠近 光擴散板146的附近，其結果可使光擴散板丨46所擴散的 (修正本) 20 1314659 光有效地照射在顯示用面板丨2。 在第1移動組塊單^ 162之前進結束時以及後退開始 二’：間隔有第1移動組塊單請之移動路的2組旋轉 體18 0，係依照各組接觸 轉移動，因此可使第的2個位置並進行旋 、 弟2私動組塊單元164朝第2方向安定、 平滑地移動。 如上述在檢查U 1Q中，不必移動面板座142，即可 ^座142裳卸顯示用面板12，此外僅藉由使第^ 組塊單元16 2朝X方a v + 在接觸器接觸顯示用= 即可使接觸器172 面板的位置之間進^夕 與接觸器離開顯示用 卸顯干用^ 位。上述結果，可縮短在面板座 衷卸顯不用面板12的時間。 將必須進行檢杳^> m —之颂不用面板變更為大小相異之1他 顯示用面板時，電性遠拉# ¥ 々兴（具他 m 接裝 ，係變更為適用於新顯 不用面板12的電性連接梦w 丨，•貝 即可檢查大小相^此’毋f更換檢查台… - Ί顯不用面板。此外，面板座 形成前述之承接區域22。 係 電性達接裝置110，係將接觸器單元138安裝在探針 .，座广而將探針基座136安裝結裝基座η :二 .在預先完成之電性連接裝置，在檢查大小相爾裝 板時，只需在完成電性連接 "之頌不用面 即可，因此更便於交換作業之進行。 下進仃乂換 (產業上之可利用性） 電性連接裝置，如上诚 ^ . 迷—般，無需是可進行交換的裝 (修正才 21 1314659 座134朝X =疋種猎由使探針基座136相對安裝基 進行檢杳之顯及γ方向移動’而使之得以適合於必須 :Γ=Γ面板的大小，或是無法進行交換，例如 係早一種類之顯示用面板專用的裝置。 本'明’除了液晶顯示面板外，亦適用於玻璃基板、 有機EL等，其他顯示用面板的檢查裝置。 本發明#限定於上述實施例，可在不脫離發明之主 旨的情況下進行各種變更。 【圖式簡單說明】 第1圖係顯示與本發明相關之一實施例的斜視圖。 第2圖係顯示第1圖所示檢查裝置的側面圖，顯示使 檢查工作台朝上的狀態。 第3圖係顯示第1圖所示檢查裝置的側面圖，顯示使 檢查工作台朝向斜上方的狀態。 ’顯示使 ’顯示使 第4圖係顯示第1圖所示檢查裝置的平面層 檢查工作台朝向正面的狀態。 第5圖係顯示第1圖所示檢查裝置的側面圈 檢查工作台朝向左斜方的狀態。 • 第6圖係顯示第1圖所示檢查裝置的側面圖，顯示使 檢查工作台朝向右斜方的狀態。 第7圖係顯示電性接連裝置之一實施例的斜視圖。 第8圖係第7圖所示電性接連裝置的平面圖。 第9圖係第7圖所示電性接連裝置的正面圖。 第10圖係沿著第8圖中之10-10線所形成之剖面圖。 (修正本) 22 1314659 第11圖係顯示接觸器單元 s 第12円在m团 例的斜視圖。 圖係弟11圖所示之接觸器單元的平面圖。 弟13圖係沿著第^圖 ^ λΑ 闽< U U線形成的剖面圖。 弟4圖係用以說明接觸器單元動作的圖a 移動組塊單元位於後退位置時的圖、=’(A)是第: 前進停止時以及開始後退時的 …私動組件j 到前進位置時的圖。 【主要元件符號說明】 10 檢查裴置 14 檢查工作台 18第1旋轉機構 22承接區域 25 結合具 28 移動機構 32 導件 36螺帽 40移動機構的驅動源 Μ 支柱 5 0 樞軸 116支撐平台 i20背光裝置 136探針基座（第2基座） 140、44 開口 146光擴散板 圖、（C)是第1移動組塊單元 12 顯示用面板 16基座台 20第2旋轉機構 24基台 26 .移動台 30導執 34 滾珠螺桿 38支撐片 42 基座構件 46第1旋轉機構的驅動源 110電性接連裝置 118平台主體 134安裝基座（第1基座） 138接觸器單元 142承受面板 150定位銷 (修正本) 23 1314659 152擋止銷 15 4推壓件 160基座板 162第1移動組塊單元 164第2移動組塊單元 16 6接點組塊單元 168導軌 170導件 24 (修正本)In the above state, when the display panel 12 is placed on the panel holder 142 2 and the pressing member 154, the pressing piece 158 is advanced toward the display panel 12. The display panel 12 on the panel holder 142 is pressed by the stopper pin 152 and positioned in the panel holder 142 in a predetermined state. Therefore, the display panel 12 received by the panel holder 142 can be easily positioned in the electrical connection device 110. When the pressing piece 158 of the pusher member 154 is advanced, the support pin 161 of the pressing member 154 is incorporated into the panel holder 142. The recess 159. Therefore, even if the panel holder 142 is present, the range of movement of the pressing piece 158 can be reduced. (Revised) 19 1314659) The HH private sector 162 is driven by a drive mechanism (not shown in Figure 14 (8), when the first mobile group (10) will contact/stop = advance, 2, the advancement of the rotating body 164 of the moving block A 164 "and = 176. This can prevent the second moving block unit from advancing. The younger moving block unit 162 continues in this state. Block I Ί ^ 1 The private movement block unit 兀1 62 is further advanced 'stomach 2 moving block list _ θ against the elastic force of the elastic body 196 and facing the first moving group ♦ 退 retreating toward the second direction. At this time, the second movement The block unit 164, = the first moving block unit 162 is closer to the panel base 142, and the contact address "member 166 is lowered toward the direction of the display panel (1). At this time, the rotating body 180 is in contact with The striker 176 is lowered while rotating. & As shown in Fig. 14(C), when the first moving block unit 162 is advanced to: "set", the block unit i can be stopped by the restriction The second moving block unit 164 and the contactor block i W " 66 can be pressed by the electrode of the display panel 12 in the contact state 172. In the above state, the display panel 12 is energized to perform the lighting inspection. After the inspection is completed, the electrical connection device 110 performs the operation opposite to the above operation, and returns to the 14th diagram. In the state shown in (A), the display panel 12 is exchanged. When the lighting inspection is performed, since the light diffusion plate 146 is attached to the panel holder W2, the display panel 12 that must be inspected is received. In the vicinity of the light diffusing plate 146, as a result, the light (difference) 20 1314659 diffused by the light diffusing plate 46 is efficiently irradiated on the display panel 丨 2. Before the first moving block 162 Time and retreat start two': The two sets of rotating bodies 18 0 of the moving path of the first moving block are separated by the contact movement of each group, so the second position can be rotated and the other two The movable block unit 164 is stably and smoothly moved in the second direction. As described above, in the inspection U 1Q, the panel holder 142 does not have to be moved, so that the display panel 12 can be unloaded, and only by the first block Unit 16 2 towards X side av + in connection The contact of the contactor display can be used to make the position of the contactor 172 panel and the contactor away from the display. The above result can shorten the time for the panel to be unloaded. It will be necessary to check 杳^> m- 颂 颂 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 面板 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他 他The electrical connection of the panel 12 is dreamy, and the shell can be inspected for size. This '毋f replaces the inspection table... - The panel is not used. Further, the panel base forms the aforementioned receiving area 22. The electrical connection device 110 is configured to mount the contactor unit 138 on the probe. The base is wide and the probe base 136 is mounted on the base η: 2. In the pre-completed electrical connection device, the size is checked. When you install the board, you only need to finish the electrical connection. Therefore, it is easier to exchange the work. Under the 仃乂 ( 产业 产业 产业 产业 产业 ( ( ( ( ( ( ( ( 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 迷 迷 迷 迷 迷 迷 迷 迷 迷The pedestal 136 is inspected in the gamma direction relative to the mounting base to make it suitable for: Γ = Γ panel size, or can not be exchanged, for example, a device for display panels of the early type. In addition to the liquid crystal display panel, the present invention is also applicable to an inspection apparatus for a glass substrate, an organic EL, or the like, and other display panels. The present invention is limited to the above-described embodiments, and various modifications can be made without departing from the gist of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of the present invention, and Fig. 2 is a side view showing the inspection apparatus shown in Fig. 1, showing a state in which the inspection table is facing upward. Fig. 3 is a side view showing the inspection apparatus shown in Fig. 1 and showing a state in which the inspection table is oriented obliquely upward. The 'display is' display causes the fourth layer to display the plane inspection work of the inspection apparatus shown in Fig. 1. station Fig. 5 shows a state in which the side ring inspection table of the inspection apparatus shown in Fig. 1 is inclined to the left. • Fig. 6 shows a side view of the inspection apparatus shown in Fig. 1, showing the inspection The table is oriented obliquely to the right. Fig. 7 is a perspective view showing an embodiment of the electrical connecting device. Fig. 8 is a plan view showing the electrical connecting device shown in Fig. 7. Fig. 9 is a view of Fig. 7. Front view of the electrical connection device. Figure 10 is a cross-sectional view taken along line 10-10 in Figure 8. (Revised) 22 1314659 Figure 11 shows the contactor unit s 12th in m An oblique view of the group. Figure 1 is a plan view of the contactor unit shown in Figure 11. The figure 13 is a section along the U-line of the ^^Α 闽 U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U Diagram of unit operation a diagram when the movement block unit is in the retracted position, =' (A) is the map: when the forward stop is stopped and when the retreat is started... when the private component j reaches the forward position. [Description of main component symbols] 10 inspection device 14 inspection table 18 first rotation mechanism 22 receiving area 25 combined With 28 moving mechanism 32 guide 36 nut 40 moving mechanism drive source 支柱 pillar 50 0 pivot 116 support platform i20 backlight device 136 probe base (second base) 140, 44 opening 146 light diffuser diagram, ( C) is the first moving block unit 12 display panel 16 base table 20 second rotating mechanism 24 base 26. mobile station 30 guide 34 ball screw 38 support piece 42 base member 46 driving source of the first rotating mechanism 110 electrical connection device 118 platform body 134 mounting base (first base) 138 contactor unit 142 bearing panel 150 positioning pin (revision) 23 1314659 152 stop pin 15 4 pusher 160 base plate 162 first Moving block unit 164 second moving block unit 16 6 contact block unit 168 rail 170 guide 24 (revision)