KR101917161B1 - Rotation and transfer apparatus for head part probe card of probe test apparatus for flat pannel display - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a probe card rotating and transferring apparatus for head part of a flat panel display, A head part of an electrical characteristic test apparatus for a flat panel display in which a probe card is rotated to easily align a pattern of a model of a glass mounted on a stage and a probe card while maintaining alignment between the camera and the probe card, The present invention has been made in view of the above problems.
The head portion probe card rotating and transferring device of the electrical property testing apparatus for a flat panel display according to the present invention is mounted on a head portion of an electrical property testing apparatus for a flat panel display and contacts the circuit pattern of the glass placed on the stage, The probe card, which measures the characteristics, is optionally installed in front, rear, left and right, and rotatable; A Y-axis sliding unit movably installed on a Y-axis transferring rail provided at a lower end of the head unit; An X-axis sliding unit installed on the X-axis transporting rail provided on the Y-axis sliding unit so as to be movable left and right; And a rotary unit installed through the bracket fixed to the X-axis sliding unit and providing a predetermined rotational force to the probe card side connected to the lower portion.

Description

TECHNICAL FIELD [0001] The present invention relates to a probe card rotating and transferring device for a head portion of an electrical characteristic testing apparatus for a flat panel display,

The present invention relates to a probe card rotating and transferring apparatus for a head part of an electrical property testing apparatus for a flat panel display, and more particularly, And more particularly, to a head portion probe card rotating and transferring apparatus for an electrical property testing apparatus for a flat panel display, which can perform alignment by rotating a probe card without rotating the glass upon alignment.

      In general, a flat panel display includes a liquid crystal display (LCD), a plasma display panel (PDP), a field emission display (FED), and the like.

      In the manufacture of such a flat panel display, processes such as a manufacturing process of a lower substrate, a manufacturing process of an upper substrate, and a laminating process of a lower substrate and an upper substrate are progressed.

      In more detail, a plurality of cells are formed on a glass substrate for manufacturing a lower substrate, a plurality of horizontal lines and vertical lines are formed to intersect with each other in a matrix form, and a plurality of horizontal lines and vertical lines And pixel cells including a pixel electrode transparent at each intersection are formed.

      A thin film transistor connected to the horizontal line, the vertical line, and the pixel electrode is formed in the pixel cells.

      In addition, a plurality of cells formed on the glass base plate are subjected to an inspection process and then cut by a scribing process. Thus, a plurality of cells cut off from the glass base plate, that is, each of the lower substrates, A flat plate display is completed by being assembled with the substrate, assembling the driving circuit for driving the pixel cells and various elements.

      At this time, in the process of inspecting a plurality of cells formed on the glass base plate in the manufacturing process of the flat panel display as described above, the state of the circuit is inspected by applying an electrical test signal to the circuit pattern using the probe device.

      That is, it is possible to measure the electrical characteristics of the transistor by bringing the pins of the probe card into contact with the circuit pattern while placing a glass for inspection on the stage of the probe inspection apparatus.

      The conventional probe inspection apparatus for testing the flat panel display as shown in FIGS. 1 to 4 includes a base member 100 in the form of a plate, a stage 300 on which the glass 500 is mounted, An index ring 200 for rotation of the stage 300, a gantry 400 for supporting the head 10, a head 10 on which the probe card 12 and the camera 14 are installed .

      However, in order to align the direction of the probe card 12 with the pattern direction of each model of the glass 500 for inspection at the time of pattern inspection of the flat panel display panel for inspection, The stage 300 provided with the glass 500 for rotating the stage 300 must be rotated by a certain angle via the index ring 200 so that the turning radius for the rotation of the stage 300 It is impossible to dispose other objects in the apparatus.

      As a result, the volume of the probe inspecting apparatus becomes unnecessarily large. In particular, the size of the apparatus is increased by a larger radius of rotation in proportion to the enlargement of the glass, thereby increasing the manufacturing cost and the transportation cost of the apparatus .

Korean Patent Registration No. 10-1064553

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a probe card, A head part of an electrical characteristic test apparatus for a flat panel display in which a probe card is rotated to easily align a pattern of a model of a glass mounted on a stage and a probe card while maintaining alignment between the camera and the probe card, .

      According to an aspect of the present invention, there is provided an apparatus for rotating and transferring a probe card of a head part of an electrical property testing apparatus for a flat panel display, comprising: a glass mounted on a head of an electrical property testing apparatus for a flat panel display, A probe card which is in contact with a circuit pattern of the transistor and measures electrical characteristics of the transistor, is selectively installed in front, rear, left and right, and rotatably; A Y-axis sliding unit movably installed on a Y-axis transferring rail provided at a lower end of the head unit; An X-axis sliding unit installed on the X-axis transporting rail provided on the Y-axis sliding unit so as to be movable left and right; And a rotary unit provided through a bracket fixed to the X-axis sliding unit and providing a predetermined rotational force to the probe card side connected to the lower portion thereof.

      Preferably, the rotary unit is provided on an upper surface of a mounting plate protruding from a front surface of the bracket, and a rectangular parallelepiped-shaped housing is provided at a lower portion of the mounting plate. The housing has upper and lower ends, And a shaft connected to the probe card is rotatably inserted through the shaft.

      In the housing, a pair of bearings are arranged to be spaced apart from each other by a predetermined distance so as to support the shaft. In the housing corresponding to a certain point between the pair of bearings, And a shock absorber for relieving shock at the time of stopping.

      In addition, it is preferable that a first stopper and a second stopper are provided at certain points outside the housing for limiting the position of the probe card when the probe card is rotated according to driving of the rotary unit.

According to the present invention as described above, the probe card is transported forward, backward, left and right by the radius of rotation of the head part probe card at the time of inspecting the glass through the electrical property testing apparatus for flat panel display, It is possible to easily align the pattern of each model of the glass placed on the stage and the probe card while maintaining the alignment state of the card, so that unnecessary space generated by rotating the glass on the stage is eliminated, thereby realizing miniaturization of equipment and reduction in manufacturing cost Therefore, it is possible to manufacture the equipment corresponding to the increasingly larger size of the glass, and the convenience of transportation can be improved.

In addition, by applying a specific structure for transferring and rotating to the probe card provided in the head portion, it is possible to suppress the fine fluctuation of the probe card, thereby improving the positional accuracy of the probe card.

1 is a front view showing a configuration of a conventional electric characteristics testing apparatus for a flat panel display,
2 is a plan view showing a state in which a glass for inspection is installed on a stage in a conventional electric characteristic testing apparatus for a flat panel display,
3 is a perspective view showing the structure of a head of a conventional electric characteristics testing apparatus for a flat panel display,
4 is a perspective view showing a configuration of a head part probe card of a conventional electric characteristics testing apparatus for a flat panel display,
FIG. 5 is a perspective view illustrating a configuration of a head portion to which a head part probe card rotating and transferring device of the electrical characteristics testing apparatus for a flat panel display according to the present invention is applied;
6A is a front perspective view showing a configuration of a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention,
FIG. 6B is a perspective view showing a configuration of a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention,
FIG. 7 is a front view showing a configuration of a head part probe card rotating and conveying device of an electric property testing apparatus for a flat panel display according to the present invention,
FIG. 8 is a side view showing a configuration of a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention.
FIG. 9 is a perspective view showing an operation state of a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention,
10A is a perspective view showing an outer appearance of a housing of a rotary unit applied to a head part probe card rotating and transferring apparatus of an electrical property testing apparatus for a flat panel display according to the present invention,
10B is a front sectional view showing the configuration of the housing of the rotary unit applied to the head part probe card rotating and transferring device of the electrical property testing apparatus for a flat panel display according to the present invention.

Hereinafter, the present invention configured as described above will be described in detail with reference to the accompanying drawings.

FIG. 5 is a perspective view showing a configuration of a head part to which a head part probe card rotating and conveying device of the electric property testing device for flat panel display according to the present invention is applied. FIG. 6 is a perspective view showing a configuration of a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention, FIG. 8 is a front view showing the structure of a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention, and FIG. Fig. 9 is a side view of the flat panel display according to the present invention. FIG. 10A is a perspective view showing an operation state of the head part probe card rotating and conveying device of the testing device, FIG. 10A is a perspective view showing the appearance of the housing of the rotary unit applied to the head part probe card rotating and conveying device of the electric characteristics testing device for flat panel display according to the present invention And FIG. 10B is a front sectional view showing the configuration of a housing of a rotary unit applied to a head part probe card rotating and conveying device of an electrical property testing apparatus for a flat panel display according to the present invention.

The head portion probe card rotating and transferring apparatus of the electrical characteristics testing apparatus for a flat panel display according to the present invention includes a head portion 10 structure (not shown) so that the probe card 12 can be rotated and transferred in an electrical property testing apparatus for a flat panel display The probe card 12 is moved in the X and Y axes by the radius of rotation of the probe card and then the probe card 12 is rotated so that the camera 14 and the probe card 12 are maintained in an aligned state, So that the pattern for each model and the probe card 12 can be aligned.

1 to 4, an electrical characteristic testing apparatus for testing a flat panel display (FPD) glass 500 includes a base member 100 fixedly installed at a position having a predetermined height, and a glass 500 And a probe card 12 including a plurality of probe pins for selectively measuring the characteristics of the transistors while selectively contacting electrodes and pads formed on the glass 500 And the head unit 10 is configured to have a structure capable of moving back and forth and left and right on the stage 300 via the gantry 400. [

Here, the head part probe card rotation and transfer device of the electrical property testing apparatus for a flat panel display according to the present invention is characterized in that the probe card 12 of the head part 10 movably installed on the stage 300 is inspected A Y-axis sliding unit 30, an X-axis sliding unit 20, and a rotary (not shown) so as to be transported in the X and Y axes in accordance with a radius rotated to correspond to a pattern of the glass 500 mounted on the stage 300, Unit 52 and the like.

The Y-axis slide unit 20 is provided with a Y-axis feed rail 22 in the Y-axis direction on the lower end side of the head unit 10 and a Y-axis feed rail 22 on the Y- And is configured to be movable in the forward and backward directions by driving the motor on one side thereof.

The X-axis sliding unit 30 is provided with an X-axis feed rail 32 in the X-axis direction on the Y-axis feed member 24 and a X- A shaft conveying member 34 is provided and is configured to be movable in the left and right direction through driving of one side of the shaft.

The rotary unit 52 constitutes a rotary detector 50 that provides a rotational force to the probe card 12 together with the housing 54 having a specific structure. A mounting plate 42 which is provided in front of a bracket 40 formed in a flat plate shape having a roughly "┏" shape and fixed to the upper portion of the X-axis conveying member 34 and protruded from the front end of the bracket 40, And is configured to provide a predetermined rotational force to the probe card 12 side connected to the lower portion thereof via the housing 54 through motor driving.

The housing 54 is fixed to the front lower side of the bracket 40 corresponding to the lower portion of the mounting plate 42. The upper and lower ends of the housing 54 are connected to the driving shaft 52 of the rotary unit 52, And a shaft 56 connected to the probe card 12 are rotatably inserted through the shaft 56 so that the rotational force of the rotary unit 52 is transmitted to the probe card 12. [

In addition, a pair of bearings (58) are arranged in the housing (54) so as to be spaced apart from each other by a predetermined distance to support the shaft (56) while forming a double reheat bearing, A shock absorber 59 is installed at a position of the housing 54 corresponding to a position between the probe card 58 and the shaft 58. When the shaft 56 stops rotating, The positional accuracy of the probe card 12 rotated while avoiding interference with the camera lens is improved due to the characteristics of the probe card 12 which is close to the camera 14 through such a structure .

A first stopper 60 and a second stopper 62 for limiting the position of the probe card 12 when the probe card 12 is rotated according to the driving of the rotary unit 52, The first stopper 60 and the second stopper 64 may have a structure capable of selectively adjusting the position of the probe card 12 to accurately set the rotational position thereof.

Reference numeral 70 denotes a tilt unit provided so that position setting can be selectively performed for precise rotation position setting of the profile card 12. [

In the present invention, the camera 14 for photographing and providing an image of contact between the pin of the probe card 12 and the circuit pattern of the glass 500 is configured such that its body is fixed to the rotary unit 52 desirable.

Next, the operation of the present invention as described above will be described in detail as follows.

      The probe card rotating and transferring apparatus of the head part of the electric property testing apparatus for a flat panel display according to the present invention is characterized in that the probing card 12 Is controlled to be rotated.

      The Y-axis sliding unit 20, the X-axis sliding unit 30, and the rotary unit 50 (not shown) are controlled according to the control of the control PC (not shown) The probe card 12 is rotated by a predetermined angle after the X and Y axes of the probe card 12 are rotated according to the rotation radius of the probe card 12, The probe card 12 can be aligned with the model-specific pattern of the glass 500 while the alignment state of the probes 14 and the probe card 12 is maintained.

      That is, by the operation of the X-axis sliding unit 30 and the Y-axis sliding unit 20 according to the control of the control PC provided in the equipment, the X-axis and Y-axis corresponding to the turning radius of the probe card 12 The rotation of the probe card 12 in the Z-axis direction is sequentially performed through the driving of the rotary sensor 50 after the predetermined distance has been transferred.

      At this time, the probe card 12 is rotated by the rotation of the rotary unit 52 constituting the rotary detector 50 and the first stopper 60 and the second stopper 62 provided at one side of the housing 54 To be rotated to the correct position.

      The shaft 56 can be smoothly rotated through a pair of bearings 58 having a dual thermal structure built in the housing 54 when the probe card 12 rotates, It is possible to prevent arbitrary shaking due to rotation and to prevent interference with the camera lens due to the characteristics of the probe card 12 in proximity to the camera 14, The positional accuracy of the probe card 12 can be improved.

      Accordingly, the Y-axis sliding unit 20, the X-axis sliding unit 30, and the rotary unit 30 having the specific structure as described above are connected to the head unit probe card rotating and transferring device of the electrical property testing apparatus for flat panel display in the present invention, The probe card 12 can be precisely transferred and rotated in correspondence with the pattern direction of the model 500 of the glass 500 placed on the stage 300 for inspection Therefore, the space required for the rotation of the glass 500 according to the related art can be eliminated, and the miniaturization of the equipment can be achieved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the scope of the appended claims.

The head portion probe card rotating and transferring apparatus of the electric property testing apparatus for a flat panel display according to the present invention can be applied to a probe driving apparatus having an automatic position correcting function of a probe pin as disclosed in Japanese Patent Application No. 10-1064553 ) May be applied to improve the positional accuracy of the probe card.

10: head part, 12: probe card,
14: camera, 20: Y-axis sliding unit,
22: Y-axis feed rail, 24: Y-axis feed member,
30: X-axis sliding unit, 32: X-axis feeding rail,
34: X-axis conveying member, 40: bracket,
42: Mounting plate, 50: Rotary inspection,
52: rotary unit, 54: housing,
56: shaft, 58: bearing,
59: Shaw, 60: First stopper,
62: second stopper, 70: tilt unit,
300: stage, 500: glass.

Claims (4)

The probe card, which is mounted on the head of the electrical characteristics test apparatus for flat panel display and contacts the circuit pattern of the glass placed on the stage, and measures the electrical characteristics of the transistor, can be selectively installed in front, rear, left and right, ; A Y-axis sliding unit movably installed on a Y-axis transferring rail provided at a lower end of the head unit; An X-axis sliding unit installed on the X-axis transporting rail provided on the Y-axis sliding unit so as to be movable leftward and rightward; And a rotary unit provided through a bracket fixed to the X-axis sliding unit and providing a predetermined rotational force to the probe card side connected to the lower portion thereof;
The rotary unit is installed on the upper surface of the mounting plate protruding from the front surface of the bracket, and a rectangular parallelepiped-shaped housing is provided on the lower part of the mounting plate. The upper and lower ends of the rotary unit are connected to the drive shaft of the rotary unit, A shaft associated with the card is rotatably installed and configured;
Wherein a pair of bearings are arranged in the interior of the housing so as to be spaced apart from each other with a predetermined distance therebetween so as to support the shaft, and a shock absorber is provided in the housing corresponding to a certain point between the pair of bearings, And a shaver for relaxation is installed on the head part of the electric device for testing electric devices for flat panel displays. delete delete The method according to claim 1,
And a first stopper and a second stopper for restricting a position of the probe card when the probe card is rotated according to the driving of the rotary unit are provided at a certain point outside the housing. Sub-probe card rotation and transfer device.

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