CN101299125B - Array tester - Google Patents

Array tester Download PDF

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Publication number
CN101299125B
CN101299125B CN2008101264745A CN200810126474A CN101299125B CN 101299125 B CN101299125 B CN 101299125B CN 2008101264745 A CN2008101264745 A CN 2008101264745A CN 200810126474 A CN200810126474 A CN 200810126474A CN 101299125 B CN101299125 B CN 101299125B
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panel
moving
principal axis
along
driver
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CN101299125A (en
Inventor
潘俊浩
丁东澈
郑永珍
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Top Engineering Co Ltd
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Top Engineering Co Ltd
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Abstract

The present invention provides an array tester which comprises the following components: a load application unit which includes a plurality of load application boards that support the panel to be tested, and further more a space is provided between one another; a testing unit which is provided more adjacent to the load application unit in the direction of the first axis, and furthermore the testing unit tests the panel to detect the electrical defect; and a plurality of panel conveying components, and each panel conveying component conveys the panel from the load application unit to the testing unit, wherein the panel conveying component comprises the following components: a guideway which is provided between load application boards along the direction of the first axis; a first moving component which can be movably coupled to the guideway along the direction of the first axis; a second moving component which can be movably coupled to the first moving component along a direction of the second axis perpendicular to the direction of the first axis; and a sucking block which is coupled to the second moving component and is used for supporting the panel from the lower side.

Description

Array tester
Technical field
The present invention relates to array tester, more specifically, relate to the array tester of the electric defective on a kind of flat panel display panel.
Background technology
Flat-panel monitor generally has the electrode that is arranged between upper substrate and the infrabasal plate.For example, Thin Film Transistor-LCD (TFT-LCD) panel comprises TFT panel, light filter panel, the liquid crystal that inserts and backlight between TFT panel and light filter panel.In this case, this TFT panel thin film transistor (TFT) of having infrabasal plate and on this infrabasal plate, forming.In addition, this light filter panel comprise upper substrate and on this upper substrate, form, towards the chromatic filter and the common electrode of TFT panel.
Detect the defective of the panel such as the TFT panel by array detector.
Fig. 1 is the skeleton view according to the array detector 10 of conventional art.As shown in Figure 1, traditional array detector 10 comprises test substrate 20, panel fixed head 30, module moving-member 40 and test module 50.
Panel fixed head 30 is disposed on the test substrate 20, is used for supporting at least one panel that will test 2 from basal surface.
Defective between the electrode of test module 50 detection panels 2.
Module moving-member 40 is formed on the test substrate 20, is used for mobile test module flatly 50.Module moving-member 40 comprises x axle saddle (gantry) 42 and y axle saddle 44.Y axle saddle 44 extends along the y direction of principal axis in each side of test substrate 20, and x axle saddle 42 has the two ends that are coupled with y axle saddle 44, and extends along the x direction of principal axis.X axle saddle 42 can move on the y direction of principal axis along y axle saddle 44.Test module 50 is coupled with x axle saddle, to move along the x axle.
Therefore, the test module 50 that meshes with x axle saddle 44 moves along the y axle, and can move on the x direction of principal axis along x axle saddle 42.
In Fig. 1, test module 50 is by moving the defective that detects panel 2 along x axle and this both direction of y axle when panel 2 has been fixed.Test module 50 produces vibration when mobile, this vibration causes particulate to drop on the panel 2.
In addition, below operation is carried out on panel fixed head 30: panel 2 is loaded on the panel fixed head 30, detects the defective of panel 2 and from panel fixed head 30 unloading panels 2, therefore can not carries out these operations simultaneously.
In addition, be loaded on the panel fixed head 30 or during from 30 unloadings of panel fixed head, test module 50 need be in the position of moving that does not hinder panel 2 when panel 2.Therefore, array tester 10 needs the cost more time to come test panel 2.
The panel of testing 2 is fixed on the panel fixed head 30, and test module 50 vertically and flatly moves along panel 2, to detect the defective of panel 2.In other words, in order to detect the defective of panel 2, the light source, modulator and the video camera that are arranged in the test module 50 should move.For this reason, need accurate aligning between light source, modulator and the video camera.Yet, because test module 50 moves to detect the defective of panel 2, therefore make this aligning depart from easily, and under the situation that this aligning departs from, need to aim at again not conveniently.
Summary of the invention
The objective of the invention is to solve the variety of issue that comprises the problems referred to above, and a kind of array tester is provided, this array tester can be cut down the test duration, and can not make the aligning between the element that forms test module depart from this array tester.
Another object of the present invention provides a kind of array tester, and this array tester has test module, and this test module does not need to move to detect the defective of panel, perhaps only moves very short distance to detect the defective of panel.
Another object of the present invention provides a kind of array tester, and this array tester has the structure that panel easily and is accurately disposed in permission.
The invention discloses a kind of array tester, this array tester comprises: loading unit, test cell and panel conveying assembly.
Loading unit comprises panel and the mutual spaced a plurality of load plate that support will be tested.Test cell is arranged to approach loading unit on first direction of principal axis, and counter plate is tested to detect electric defective.Each panel conveying assembly is delivered to test cell with panel from loading unit, and comprises guide rail, second moving-member and draw piece.
Guide rail is installed between the load plate along first direction of principal axis.First moving-member can be coupled to this guide rail movably along first direction of principal axis.Second moving-member can be along being coupled to first moving-member movably perpendicular to first axial second direction of principal axis.Draw piece and be coupled to second moving-member, be used for from the downside support panel
Loading unit can comprise three or more at least mutual spaced load plate, and at least one in this panel conveying assembly can comprise first driver part and second driver part, this first driver part drives first moving-member and moves along first direction of principal axis, and this second driver part drives second moving-member and moves along second direction of principal axis.
Loading unit can comprise three or more mutual spaced load plate, and does not comprise that second moving-member of the panel conveying assembly of second driver part is coupled to first moving-member, so that move freely along second direction of principal axis.
The invention also discloses a kind of array tester, this array tester comprises: loading unit, test cell, deployment determining unit and a plurality of panel conveying assembly.Loading unit comprises three or more load plate, the panel that load plate has the interval each other and will test from the downside support.Test cell is arranged to approach loading unit on first direction of principal axis, and counter plate is tested to detect the electric defective of panel.Dispose determining unit and be disposed on the arbitrary of loading unit and test cell or both, and whether definite panel is suitably disposed.Each panel conveying assembly in these a plurality of panel conveying assemblies is being delivered to test cell with panel from loading unit in the downside support panel, and disposes panel according to the definite result who disposes determining unit.Each panel conveying assembly comprises: guide rail is installed between the load plate along first direction of principal axis; First moving-member can be coupled to first guide rail movably along first direction of principal axis; First driver part moves first moving-member along first direction of principal axis; Second moving-member can be along being coupled to this driver part movably perpendicular to first axial second direction of principal axis; Second driver part moves second moving-member along second direction of principal axis; And a plurality of absorption pieces, each absorption piece is coupled to second moving-member, and is driven independently of each other.
Second driver part can comprise cylinder formula device, this cylinder formula device is by so that the mode that piston guide rod (pistonleader) can move along second direction of principal axis perpendicular to the moving direction of first moving-member is installed in first moving-member, and an end of second moving-member can be coupled to first moving-member, and the other end can be able to be coupled to the absorption piece along second direction of principal axis movably together with piston guide rod.Second driver part can comprise step motor, driving shaft and ball screw assembly,, wherein this step motor is installed in first moving-member, and this step motor has the turning axle that forms on second direction of principal axis perpendicular to the moving direction of first moving-member, and second moving-member can be coupled to this step motor by ball screw assembly, (ballscrew) and driving shaft.
Each draws piece can have the absorption hole that at least one vertically passes this absorption piece, and also can comprise negative pressure (negative pressure) generator in this array tester, is used for providing negative pressure to this absorption hole.
Guide rail can be the linear movement guide rail, and first moving-member can be the glider piece (runner block) that moves along this linear movement guide rail.
Each draws piece can be coupled to second moving-member up and down movably, and each panel conveying assembly also can comprise driving and draws the driver part that moves up and down that piece moves up and down.
Disposing determining unit can comprise: camera unit, this camera unit are installed in the arbitrary of loading unit and test cell or at least two positions on both; And CPU (central processing unit), this CPU (central processing unit) is based on determining from the photography signal of camera unit whether panel is disposed.
Array tester also can comprise second conveying assembly, and test cell can be coupled to this second conveying assembly movably along x axle saddle on second direction of principal axis.
Description of drawings
Accompanying drawing shows exemplary embodiment of the present invention, and be used to illustrate each side of the present invention together with the description, wherein accompanying drawing is comprised and is used to provide to further understanding of the present invention, and it is included in the part of this instructions, and has constituted the part of this instructions.
Fig. 1 is the skeleton view according to the array tester of conventional art;
Fig. 2 is the skeleton view of array tester according to an embodiment of the invention;
Fig. 3 is the skeleton view that has removed array tester load plate, Fig. 2 from it;
Fig. 4 is the enlarged drawing of the part A among Fig. 3;
Fig. 5 is the decomposition diagram of the panel moving assembly among Fig. 4;
Fig. 6 and 7 shows the how vertical view of each process of rotating panel of panel conveying assembly;
Fig. 8 is the conceptual view of the test module among Fig. 2.
Embodiment
Fig. 2 is the skeleton view of array tester 100 according to an embodiment of the invention, and Fig. 3 is the skeleton view that has removed array tester 100 load plate, Fig. 2 from it.In the present embodiment, the panel electrode 5 (with reference to Fig. 8) that array tester 100 tests form on panel 2 is to test electric defective.Panel 2 can be the panel that is included in the electro-optic device, and can be thin film transistor (TFT) (TFT) panel of TFT LCD (LCD) substrate.
Shown in Fig. 2 and 3, array tester 100 comprises loading unit 110, test cell 120 and test module 150.
Loading unit 110 comprises two or more load plate 112 at least.Load plate 112 is arranged to have each other distance, and the panel 2 that will test is placed on the load plate 112.Load plate 112 makes panel 2 to be moved to test cell 120 places above the load plate 112 in the predetermined altitude being loaded on the load plate 112 regularly or being thus lifted to.
Test cell 120 is disposed in the side of loading unit 110, and detects being loaded the panel 2 that plate 112 moves to test cell 120 places, to detect electric defective.Test cell 120 comprises the test board 122 that is formed by transparency material.
Test module 150 is disposed on the test board 122, is used to detect the fault of panel 2.After a while test module 150 will be described in more detail.
Array tester 100 according to present embodiment also can comprise deployment determining unit 170.Dispose determining unit 170 and be installed among the arbitrary of loading unit 110 and test cell 120 or both, and whether definite panel 2 is suitably disposed.
Dispose determining unit 170 and can comprise camera unit 182 and CPU (central processing unit) (not shown).Camera unit 182 is disposed at least one of loading unit 110 and test cell 120, photographs with the deployable state of counter plate 2.CPU (central processing unit) receives the photography signal from camera unit 182, and whether definite panel 2 is suitably disposed.
Camera unit 182 can be disposed on each unit in loading unit 110 and the test cell 120.
Camera unit 182 can be arranged in a plurality of positions on the loading unit 110.As shown in Figure 2, in this case, camera unit 182 can tiltedly be arranged mutually over the ground at loading unit 110.Camera unit 182 can be arranged in alignment mark 8 belows of panel 2.If loading unit 110 has load plate 112 thereon, then camera unit 182 can be placed on the rear surface of load plate 112.In this case, can form mating holes 117 in the position on, load plate 112 corresponding with camera unit 182 present positions.Mating holes 117 is placed with corresponding with alignment mark 8, so that panel 2 can suitably be aimed at.Camera unit 182 can be disposed on the upper surface of panel 2, and in this case, the mating holes on the load plate 112 is optional.
Yet the position of camera unit 182 is not limited to above-mentioned position.For example, camera unit 182 can be arranged in a plurality of positions on the test cell 120.In this case, camera unit 182 can tiltedly be placed mutually over the ground.By tiltedly placing camera unit 182 over the ground, can determine whether panel 2 twists.
Array tester 100 according to present embodiment of the present invention also can comprise unloading unit 130.Unloading unit 130 is placed on the side of test cell 120, and for unloading panel 2 after the test of finishing counter plate 2, panel 2 is moved to unloading unit 130 from test cell 120.Unloading unit 130 can comprise and unloads support plate 132.Unload support plate 132 and make after the test of finishing counter plate 2, panel 2 can be moved in the predetermined altitude being fixed on to unload on the support plate 132 or be thus lifted to unload above the support plate 132.
Panel 2 is moved to test cell 120 by at least one panel conveying assembly 160 from loading unit 110.Particularly, as shown in Figure 3, panel transfer unit 160 comprises at least one guide rail 162 and at least one panel moving-member 163.Panel moving-member 163 comprises first moving-member 164 and draws piece 166.
Guide rail 162 is installed between the load plate 112 along being parallel to the first direction (the y direction of principal axis among Fig. 3) of the moving direction of panel 2.First moving-member 164 can be installed movably along guide rail 162.Absorption piece 166 is positioned at the top of first moving-member 164, and panel 2 is drawn to absorption piece 166 apace by the basal surface from panel 2.
In other words, when the panel 2 that will test is loaded on the load plate 112, draw piece 166 rear surface support panel 2 from panel 2 when touching panel 2.In this position, first moving-member 164 moves along guide rail 162, panel 2 is moved to test cell 120 places.Guide rail 162 can be linear movement (LM) guide rail, and first moving-member 164 can be the glider piece that is arranged on this LM guide rail.Therefore, first moving-member 164 can have the LM guide and be connected to guide rail 162.By this LM guide, panel conveying assembly 160 can move to accurate position with panel 2.
Draw piece 166 and can comprise at least one absorption hole 167 of vertically passing this absorption piece.In this case, panel conveying assembly 160 also can comprise the negative pressure generator.Drawing piece 166 can be made by rubber.
Unloading unit 130 can comprise that two or more unload support plate 132 at least.Unload support plate 132 and had the compartment of terrain deployment each other, and after the test of finishing counter plate 2, panel 2 is placed on and unloads on the support plate 132.Panel conveying assembly 160 can be inserted in and unload between the support plate 132.Particularly, guide rail 162 is installed in along first direction of principal axis of the moving direction that is parallel to panel 2 to be unloaded between the support plate 132, first moving-member 164 can be installed movably along guide rail 162, and draw the top that piece 166 is located at first moving-member 164, so that draw panel 2 from the basal surface of the panel 2 that will test.Therefore, the panel conveying assembly 160 that is arranged on the loading unit 110 is transported to test cell 120 places by drawing panel 2 with panel 2, and the panel conveying assembly 160 that is arranged on the unloading unit 130 moves to unloading unit 130 with panel 2 from test cell 120.
Therefore, panel 2 is moved to the operation at test cell 120 places and the operation that panel 2 moves to unloading unit 130 places can be carried out together.As a result, can improve the operating rate of array tester 100.
Each load plate 112 can have the surperficial a plurality of blowhole 114 that form that go up thereon.In this case, array tester 100 also can comprise malleation generator (not shown), and this malleation generator allows panel 2 to be promoted predetermined altitude from load plate 112 by the lower surface to panel 2 provides normal pressure via blowhole 114.
In addition, unload support plate 132 and can have the surperficial a plurality of blowhole 134 that form that go up thereon.In this case, array tester 100 also can comprise malleation generator (not shown), this malleation generator allows panel 2 to be thus lifted to the preset distance place of the lower surface top of panel 2 by the lower surface to panel provides normal pressure via blowhole 134.
Therefore, when via blowhole 114 or 134 and in load plate 112 or unload when having formed normal pressure on the support plate 132, panel 2 is thus lifted to load plate 112 or unloads support plate 132 tops, and when supporting, moved piece 166 being drawn along first.According to present embodiment of the present invention,, therefore can not produce panel 2 and load plate 112 or unload contact resistance (contact resistance) between the support plate 132 because panel 2 is moved not contacting load plate 112 or unload under the situation of support plate 132.As a result, drawing piece 166 can use a small amount of strength to come movable panel 2.
Fig. 4 is the enlarged drawing of the part A among Fig. 3, and Fig. 5 is the decomposition diagram of the panel moving assembly among Fig. 4.
With reference to Fig. 3 to 5, each panel moving-member 163 also can comprise second moving-member 168.
Second moving-member 168 is coupled to first moving-member 164, and can move preset distance along second direction of principal axis.At least one panel moving-member 163 also can comprise second driver part 172.Second driver part 172 drives second moving-member 168 and moves along second direction of principal axis.According to present embodiment of the present invention, second moving-member 168 can be coupled with a plurality of second driver parts 172.
Different with said structure, can second driver part 172 not offered the part of panel moving-member 163.In this case, can be coupled to first moving-member 164 carrying out free-moving mode along second direction by second moving-member 168 that drives along second direction of principal axis.Therefore, when in absorption piece 166 places that are drawn to second moving-member 168 at panel 2 fast, second driver part 163 is when second direction of principal axis drives second moving-member 168, panel 2 is moved along second direction of principal axis, and carry out free-moving another second moving-member 168 also can be along with panel 2 moves along second direction of principal axis together.
Second driver part 163 can comprise the step motor 173 that is installed in first moving-member 164, and second moving-member 168 can be coupled to this step motor 173 by means of ball screw assembly, 175.
Particularly, second driver part 163 comprises: step motor 173, driving shaft 174 and ball screw assembly, 175.The driving shaft 174 that extends along second direction of principal axis is coupled to step motor 173, and rotates by the driving force of step motor 173.The ball screw assembly, 175 that is coupled to driving shaft 174 moves forward and backward along with the rotation of driving shaft 174, and is coupled to the side of second moving-member 168.First moving-member 164 can have linear movement (LM) scale (scale) 165 that moves that instructs second moving-member 168.
Above-mentioned ball screw pair apparatus is more cheap than LM guide device, and can advantageously control the position of second moving-member easily and accurately.
Yet second driver part 172 of the present invention is not limited to ball screw pair apparatus, and can be any other drive unit, for example LM guide device or cylinder formula device.
Draw piece 166 and be coupled to second moving-member 168, and panel conveying assembly 160 can comprise also and move up and down driver part 180 that this moves up and down driver part 180 and drives and draw pieces 166 and move up and down in mode moving up and down.This moves up and down driver part 180 can be the cylinder formula device that comprises cylinder formula 182 and piston rod 183.Cylinder formula 182 is coupled to second moving-member 168.Piston rod 183 is included in the piston moving up and down in the cylinder formula and vertically extends and an end is coupled to the bar of drawing piece 166 from lower part of piston.In this case, bearing 184 can be inserted in and draw between piece and the piston rod.
Move up and down driver part 180 and will draw the panel 2 present positions that piece 166 is moved upwards up to load plate 112 tops, can support panel 2 so that draw piece 166.In addition, when drawing piece needn't support panel 2 time, move up and down driver part 180 and will draw piece 166 and move down preset distance.
Draw piece 166 and can have at least one absorption hole 167 of vertically passing this absorption piece 166.In this case, panel conveying assembly 160 also can comprise the negative pressure generator, and this negative pressure generator provides negative pressure to drawing hole 168.Drawing piece can be made by rubber.
As shown in Figure 2, three or more load plate 112 are disposed in parallel to each other, and panel conveying assembly 160 can be arranged at least two positions between the adjacent load plate 112.
Shown in Fig. 2 and 6, panel conveying assembly 160 can comprise at least two guide rails 162 and at least two panel moving-members.Guide rail 162 is installed on the loading unit 110 along first direction of principal axis of the moving direction that is parallel to panel 2.Panel moving-member 163 can be arranged that movably wherein first direction of principal axis is identical with the direction of guide rail 162 along first direction of principal axis (the y direction of principal axis among Fig. 2) and second direction of principal axis (the x direction of principal axis among Fig. 2), and second direction of principal axis is perpendicular to first direction of principal axis.
Fig. 6 and 7 shows the how vertical view of each process of rotating panel of panel conveying assembly.
Be disposed in the left side of loading unit 110 with reference to Fig. 6 and 7, the first panel conveying assembly 160a, the second panel transfer unit 160b is disposed in the right side of loading unit 110.
In this case, the first and second panel conveying assembly 160a and 160b can move independently of each other.Therefore, the absorption piece 166b of the absorption piece 166a of the first panel conveying assembly 160a and the second panel conveying assembly 160b can be placed on the diverse location on first direction of principal axis, and therefore can rotating panel 2.That is to say, as shown in Figure 7, when in the absorption piece 166a and 166b place that are drawn to the first and second panel conveying assembly 160a and 160b at panel 2 fast, the absorption piece 166a of the first panel conveying assembly 160a when the fed distance of absorption piece 166b on first direction of principal axis of the fed distance on first direction of principal axis and the second panel conveying assembly 160b becomes different, panel 2 can be rotated.Therefore, can be by panel conveying assembly 160 so that panel 2 rotates and moves along first direction of principal axis and second direction of principal axis.
Refer again to Fig. 2, test cell 120 comprises transparent test board 122 and test module 150.The part of the panel of testing 2 is positioned to the top surface top of transparent test board 122, and counter plate 2 is carried out test then.
Test module 150 detects the electric defective of panel 2.After a while test module 150 will be described in more detail.
When detecting, test module 150 can be positioned at the fixed position between detection period, perhaps can move on second direction of principal axis along x axle saddle.This is owing to make panel 2 move along first direction of principal axis by panel conveying assembly 160, and test module 150 thereby do not need at least to move along first direction of principal axis.X axle saddle can be the LM guide that is installed in the main body of array tester 100.
The operation of array tester according to an embodiment of the invention will be described below.
Panel 2 is moved to the top surface of load plate 112 by user or charger.At this moment, form normal pressure by blowhole 114 on the top surface of load plate 112, because this normal pressure, panel 2 is promoted preset distance by the top surface from load plate 112.Under this state, draw piece 166 and draw panel 2 and make panel 2 move towards test cell 120.Test by the 150 pairs of panels 2 that arrive test cell 120 places of test module that are included in the test cell 120, whether have electric defective to test this panel 2.Test module 150 is being in a fixed position or is being detected by the defective of x axle saddle counter plate 2 when second direction of principal axis (x direction of principal axis) is mobile.Then, panel 2 is moved to the top surface that unloads support plate 132 of unloading unit 130 after test is finished.At this moment, on the top surface that unloads support plate 132, form normal pressure, so panel 2 is thus lifted to and unloads support plate 132 tops by blowhole 134.When the predetermined portions of panel 2 arrives unloading unit 130, the front end of panel conveying assembly 160 movable panel 2 in support panel 2.Then, unload panels 2 by operator or discharge mechanism from array tester 100.
Fig. 8 is the conceptual view of the test module 150 among Fig. 2.With reference to Fig. 8, test module 150 comprises light source 151, modulator 152 and defect detection unit 157.In this case, light source 151 is disposed in the previous table or the rear surface of panel 2, and modulator 152 is arranged at panel 2 relative with light source 151 with defect detection unit 157.
Light source 151 is to the test panel electrode 5 emission light beams that form on the front surface of panel 2.Light source 151 can be disposed on the rear surface of panel 2.Light source 151 can be launched the light beam such as xenon, sodium, quartzy Halogen lamp LED and laser etc.
Modulator 152 is arranged at panel 2 relative with light source 151.In Fig. 7, because light source 151 is placed on the rear surface of panel 2, so modulator 152 is disposed in the front surface 2b (with reference to Fig. 8) of panel 2.
Modulator 152 comprises light incident surface 152a, modulator electrode layer 155, electro-optical material layer 154 and light-emitting area 152b.The light beam that incides the front surface 1b of panel 2 from light source 151 through the rear surface 2a of panels 1 finally incides light incident surface 152a.
Modulator electrode layer 155 is parallel to panel electrode 5 ground and arranges, so that form electric field together with panel electrode 5.More specifically, modulator electrode layer 155 applies constant voltage from external power source to this common electrode as common electrode.Therefore, modulator electrode layer 155 is arranged to be placed on apart from panel 2 and is less than the preset distance place, and when when panel electrode 5 and modulator electrode layer 155 apply the voltage of scheduled volume, produces electric field between panel electrode 5 and modulator electrode layer 155.
Electro-optical material layer 154 is inserted between modulator electrode layer 155 and the panel electrode 5, and changes optical transmission amount via light incident surface 152a incident according to the value of electric field.For this reason, electro-optical material layer 154 can comprise that value according to electric field makes the material of incident light polarization.Electro-optical material layer 154 can be a polymer-dispersed liquid crystal.
Light-emitting area 152b is coupled to light transmissive substrate 156, so that light transmissive substrate 156 can support electro-optical material layer 154.In addition, light incident surface 152a can be coated with protective seam 153, is used to protect electro-optical material layer 154.
The light that light-emitting area 152b will pass through electro-optical material layer 154 is transmitted into the outside.
Defect detection unit 157 detects the electric defective that whether has panel electrode 5 on panel 5 based on the amount of the light of launching via light-emitting area 152b.In this case, defect detection unit 157 can comprise sighting device 158 and the monitor 159 that is connected with this sighting device 158, thereby allows user's defective of detection faces plate electrode 5 visually.Monitor 159 can be assembled on computers.
Panel 2 is used for electro-optical device, and has the panel electrode 5 on the front surface that is arranged in panel 2.Panel 2 can be used for flat-panel monitor, for example, can be the TFT panel of LCD.
According to present embodiment of the present invention, incide the rear surface of panel 2 from the light of light source 151 emission, and be launched into panel electrode 5 and be arranged thereon front surface.Then, light incides modulator 152, then the amount Be Controlled of light.The light that its amount has been conditioned is transmitted into the outside via the light-emitting area 152b of modulator 152.To checking via the light of light-emitting area 152b emission.
Usually, under the situation of LCD,, be launched into the front surface of light filter panel then from the light process TFT panel backlight of the rear surface that is placed on the TFT panel, wherein this light filter panel is attached to the front surface of TFT panel, and is formed with common electrode thereon.As seen this light that is launched into the front surface of light filter panel become then.
In practice, when the beholder watched lcd screen, the beholder was positioned at the front of light filter panel.Therefore, array tester 100 according to the present invention has and is used for the essentially identical configuration of configuration that the beholder watches the mechanism of lcd screen.By using this configuration, array tester 100 can detect defective more accurately.
In addition, array detector 100 does not have the optional feature on the light path that is arranged between defect detection unit 157 and the modulator 152, and for example panel electrode 5.
If defect detection unit 157 is placed on the rear surface of each panel electrode 5, and light is from light source 151 emission and received by defect detection unit 157 through modulator 152 backs, and then defect detection unit 157 can detect degree of polarization in the modulator 152 and the optical distortion in the panel 2.In other words, when the light of ovennodulation device 152 during through panel 2, this light is by scattering or reflection once more, so that direct this polarisation of light degree of ovennodulation device 152 of detection.Therefore, when this light incided modulator 152 and is launched into the outside then, defect detection unit 157 was difficult to accurately detect the amount of light defective, that be launched that depends on the panel 2.In addition, for accurate detection, need to remove, thereby cause expending the more time through the light of modulator 152 and the additional work of another factor.
According to the present invention, defect detection unit 157 can directly receive the light through modulator 152.As a result, needn't come this light of scattering by add ons, therefore can be fast and accurately detect defective on the panel electrode 5.
In this case, panel electrode 5, modulator 152 and sighting device 158 on light source 151, the panel 2 that will test can be arranged to be in line, and needn't additionally provide being used to such as mirror to change the element of light path.
According to the present invention, test module needn't move to detect the defective on the panel along first direction of principal axis, therefore can avoid the damage on the appearance of moving the micronic dust that is caused of test module and the panel that this micronic dust caused.
In addition, because panel conveying assembly movable panel and panel part is deployed in the tram side by side, therefore can be easily and dispose panel apace.
For a person skilled in the art, obviously can carry out various modifications and variations in the present invention, and not deviate from the spirit and scope of the present invention.Therefore, the present invention be intended to cover within the scope of appended claim and equivalent thereof, to modifications and variations of the present invention.

Claims (11)

1. array tester comprises:
Loading unit, this loading unit comprises a plurality of load plate, these a plurality of load plate support the panel that will test and have each other at interval;
Test cell, this test cell are arranged to approach loading unit on first direction of principal axis, and this test cell counter plate is tested to detect electric defective; And
A plurality of panel conveying assemblies, each described panel conveying assembly is delivered to test cell with panel from loading unit,
Wherein said panel conveying assembly comprises: guide rail, and this guide rail is installed between the described load plate along first direction of principal axis; First moving-member, this first moving-member can be coupled to this guide rail movably along first direction of principal axis; Second moving-member, this second moving-member quilt can be along being coupled to first moving-member movably perpendicular to first axial second direction of principal axis; And the absorption piece, this absorption piece is coupled to second moving-member, is used for from the downside support panel.
2. array tester according to claim 1, wherein said loading unit comprises three or more at least mutual spaced load plate, and at least one in the described panel conveying assembly comprises first driver part and second driver part, wherein this first driver part drives first moving-member and moves along described first direction of principal axis, and this second driver part drives second moving-member and moves along described second direction of principal axis.
3. array tester according to claim 2, wherein said loading unit comprises three or more mutual spaced load plate, and second moving-member that does not comprise the panel conveying assembly of second driver part is coupled to first moving-member, so that move freely along second direction of principal axis.
4. array tester comprises:
Loading unit, this loading unit comprise three or more load plate, the panel that described load plate has the interval each other and will test from the downside support;
Test cell, this test cell are arranged to approach loading unit on first direction of principal axis, and this test cell counter plate is tested to detect the electric defective of this panel;
Dispose determining unit, this deployment determining unit is disposed on the arbitrary of loading unit and test cell or both, and whether definite panel is suitably disposed; And
A plurality of panel conveying assemblies, each described panel conveying assembly is being delivered to test cell with panel from loading unit in the downside support panel, and disposes panel according to the definite result who disposes determining unit,
Wherein each described panel conveying assembly comprises: guide rail, and this guide rail is installed between the described load plate along first direction of principal axis; First moving-member, this first moving-member can be coupled to first guide rail movably along first direction of principal axis; First driver part, this first driver part moves first moving-member along first direction of principal axis; Second moving-member, this second moving-member quilt can be along being coupled to this driver part movably perpendicular to first axial second direction of principal axis; Second driver part, this second driver part moves second moving-member along second direction of principal axis; And a plurality of absorption pieces, each absorption piece is coupled to second moving-member, and is driven independently of each other.
5. array tester according to claim 4, wherein said deployment determining unit comprises: camera unit, described camera unit are installed in the arbitrary of loading unit and test cell or at least two positions on both; And CPU (central processing unit), this CPU (central processing unit) is based on determining from the photography signal of camera unit whether panel is disposed.
6. according to the described array tester of one of claim 2-5, wherein said second driver part comprises cylinder formula device, this cylinder formula device is by so that the mode that piston guide rod can move along second direction of principal axis perpendicular to the moving direction of first moving-member is installed in first moving-member, and an end of second moving-member is coupled to first moving-member, and the other end can be coupled to the absorption piece along second direction of principal axis movably together with piston guide rod.
7. according to the described array tester of one of claim 2-5, wherein said second driver part comprises step motor, driving shaft and ball screw assembly,, wherein this step motor is installed in first moving-member, and this step motor has the turning axle that forms on second direction of principal axis perpendicular to the moving direction of first moving-member, and second moving-member is coupled to this step motor by this ball screw assembly, and this driving shaft.
8. according to the described array tester of one of claim 1-5, wherein said absorption piece has at least one absorption hole of vertically passing this absorption piece, and also comprises the negative pressure generator in this array tester, is used for providing negative pressure to this absorption hole.
9. according to the described array tester of one of claim 1-5, wherein said guide rail is the linear movement guide rail, and described first moving-member is the glider piece that moves along this linear movement guide rail.
10. according to the described array tester of one of claim 1-5, wherein said absorption piece can be coupled to second moving-member up and down movably, and each described panel conveying assembly also comprises and drives the driver part that moves up and down that described absorption piece moves up and down.
11., also comprise according to the described array tester of one of claim 1-5:
Second conveying assembly, described test cell can be coupled to this second conveying assembly movably along x axle saddle on second direction of principal axis.
CN2008101264745A 2008-07-03 2008-07-03 Array tester Active CN101299125B (en)

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KR101036112B1 (en) * 2009-11-20 2011-05-23 주식회사 탑 엔지니어링 Apparatus for array test with auto changing unit of probe bar
KR101052491B1 (en) * 2009-12-18 2011-07-29 주식회사 탑 엔지니어링 Array test device
KR101207029B1 (en) * 2010-12-30 2012-11-30 주식회사 탑 엔지니어링 Array test apparatus
CN105372854B (en) * 2014-08-27 2018-08-21 北京兆维电子(集团)有限责任公司 liquid crystal module screen detection device
CN104851823B (en) * 2015-04-03 2018-03-23 沈阳拓荆科技有限公司 X, the contactless silicon wafer warpage degree measuring apparatus of Y Dual-spindle linkeds
CN106370656B (en) * 2015-07-23 2019-03-05 旭东机械工业股份有限公司 Automate micro- imaging equipment and view finding method
CN109449092A (en) * 2018-10-16 2019-03-08 惠科股份有限公司 A kind of test equipment and test method of array substrate

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