KR101052491B1 - Array test device - Google Patents

Abstract

The array test apparatus according to the present invention is configured such that a test module for detecting a defect of a substrate can be horizontally moved in the X-axis direction and the Y-axis direction with respect to the substrate, thereby efficiently detecting the defect even in a large-area substrate. It can work.

Array, Test, Board

Description

Array Test Device {APPARATUS FOR TESTING ARRAY}

The present invention relates to an array test apparatus.

In general, a flat panel display (FPD) is an image display device that is thinner and lighter than a television or a monitor employing a CRT. As flat panel displays, Liquid Crystal Display (LCD), Plasma Display Panel (PDP), Field Emission Display (FED), Organic Light Emitting Diodes (OLED), etc. It is used.

Among them, the liquid crystal display is a display device in which a desired image is displayed by individually supplying data signals according to image information to liquid crystal cells arranged in a matrix to adjust light transmittance of the liquid crystal cells. Liquid crystal displays are widely used due to their thin, light, low power consumption and low operating voltage. The manufacturing method of the liquid crystal panel generally employed in such a liquid crystal display will be described.

First, a color filter and a common electrode are formed on an upper substrate, and a thin film transistor (TFT) and a pixel electrode are formed on a lower substrate facing the upper substrate.

Subsequently, after the alignment films are applied to the substrates, the alignment films are rubbed to provide a pre-tilt angle and an orientation direction to the liquid crystal molecules in the liquid crystal layer to be formed therebetween.

Then, paste is applied to at least one substrate in a predetermined pattern to form a paste pattern so as to maintain a gap between the substrates and to prevent the liquid crystal from leaking to the outside and to seal the gaps between the substrates. Through the process of forming a liquid crystal layer in the liquid crystal panel is manufactured.

During this process, a process of testing for defects such as disconnection of gate lines and data lines and poor color of pixel cells included in the thin film transistor TFT and the lower substrate (hereinafter, referred to as a substrate) on which the pixel electrode is formed. Will be performed.

To test the substrate, an array test apparatus equipped with a light source, a modulator and a camera is used. If the modulator is adjacent to the substrate while a constant voltage is applied to the modulator and the substrate, an electric field is formed between the modulator and the substrate when the substrate is not defective, but an electric field is formed between the modulator and the substrate when the substrate is defective. If not, or the electric field is weakly formed, the array test apparatus detects the magnitude of the electric field between the modulator and the substrate and detects the defect of the substrate by using it.

In recent years, in order to ensure mass productivity of a liquid crystal panel, a large area board | substrate is processed and the liquid crystal panel is manufactured. Therefore, there is a need for a method for quickly and accurately detecting defects on a large-area substrate.

The present invention is to solve the above-mentioned requirements of the prior art, an object of the present invention, while moving the test module for detecting whether the defect of the substrate horizontally in the X-axis direction and Y-axis direction with respect to the substrate whether It is an object of the present invention to provide an array test apparatus capable of detecting defects efficiently with respect to a large-area substrate by enabling detection.

An array test apparatus according to the present invention for achieving the above object, the stage on which the substrate is mounted, the frame on which the stage is supported, the support that is installed to be movable in the Y-axis direction on the upper portion of the frame, It may be configured to include a test module installed on the support to be movable in the X-axis direction along the longitudinal direction of the support.

The test module may include a modulator including a light source, a reflective layer disposed adjacent to the substrate, an all-optical material layer that changes the amount of light according to the magnitude of an electric field generated between the substrate, and the modulator. It may be configured to include a camera.

The reflective layer may be formed of a reflective film or a reflective glass, and the all-optical material layer may be formed of a liquid crystal (LC) or a polymer dispersed liquid crystal display (PDLC).

In addition, the array test apparatus according to the present invention may further comprise a reaction force canceling device for canceling the reaction force generated by the movement of the test module.

Here, the support is provided with a stator in the longitudinal direction of the support, the test module is provided with a mover connected to the stator to move along the stator, the reaction force offset device, the position spaced apart from the frame And a joint mechanism for connecting the mass body and the stator to transfer the reaction force applied to the stator by the movement of the test module to the mass body.

The joint mechanism may include a connecting body extending from the stator in the X-axis direction, and a connecting guide supported by the mass and connected to the connecting body so as to be movable in the Y-axis direction.

On the other hand, the test module may be provided with a vibration sensing unit for detecting the amount of vibration generated when the test module moves. In this case, a stator is disposed in the support along the longitudinal direction of the support, and a tester is installed in the test module connected to the stator to move along the stator, based on the amount of vibration detected by the vibration sensing unit. The vibration control unit for controlling the drive of the mover may be provided.

In addition, the array test apparatus according to the present invention may further comprise a reaction force canceling device for canceling the reaction force generated by the movement of the support.

Here, the frame is provided with a stator along the Y-axis direction, the support is provided with a mover connected to the stator to move along the stator, the reaction force offset device, the position spaced apart from the frame It may be configured to include a mass to be installed, and a connecting body for connecting the mass and the stator to transfer the reaction force applied to the stator by the movement of the support to the mass.

On the other hand, the support may be provided with a vibration sensing unit for detecting the amount of vibration generated when the support moves. In this case, a stator is disposed in the frame along the Y-axis direction, and a movable part connected to the stator to move along the stator is installed on the frame, and the vibration is detected based on the amount of vibration detected by the vibration sensing unit. Vibration control unit for controlling the drive of the mover may be provided.

In the array test apparatus according to the present invention, a test module for detecting a defect of a substrate is installed to be horizontally movable in the X-axis direction and the Y-axis direction. Since the defects of the substrate can be detected while moving, the array test apparatus can be prevented from being excessively large in order to secure a space for the movement of the substrate, and the effect of smoothly detecting the defects of the large-area substrate is smoothly obtained. have.

In addition, the array test apparatus according to the present invention is provided with a reaction force canceling device for canceling the reaction force generated by the movement of the test module, thereby reducing the vibration generated by the movement of the test module to make the array test apparatus stable and precise It is effective to operate.

In addition, the array test apparatus according to the present invention includes a vibration sensing unit for sensing a vibration amount generated when the test module is moved in the test module, and is installed on the test module based on the vibration amount detected by the vibration detection unit. By controlling the driving of the child through the vibration control unit, the vibration generated by the movement of the test module is reduced, so that the array test apparatus can be stably and precisely operated.

In addition, the array test apparatus according to the present invention is provided with a reaction force canceling device that cancels the reaction force generated by the movement of the support, thereby reducing the vibration generated by the movement of the support to operate the array test apparatus stably and precisely It can be effective.

In addition, the array test apparatus according to the present invention includes a vibration sensing unit for sensing an amount of vibration generated when the support is moved on the support and vibrates driving of the mover installed in the support based on the amount of vibration detected by the vibration sensing unit. By controlling through the control unit, the vibration generated by the movement of the support can be reduced, so that the array test apparatus can be stably and precisely operated.

Hereinafter, a preferred embodiment of an array test apparatus according to the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 1, the array test apparatus according to an embodiment of the present invention includes a stage 15 on which the substrate S is mounted, a frame 10 on which the stage 15 is supported, and a frame 10. The test module 30 is installed to be movable in the Y-axis direction on the upper part of the support) and extends in the X-axis direction, and the test module 30 is installed to be movable in the X-axis direction on the support 20. It may be configured to include a reaction force offset device 50 for canceling the reaction force generated by the movement of the module 30 in the X-axis direction.

The support 20 is disposed in a structure that crosses the upper portion of the stage 15, and both side portions thereof are supported on the upper portion of the frame 10, and both sides of the support 20 supported by the frame 10 are supported by a support ( Y-axis drive unit 25 for linearly moving 20) in the Y-axis direction may be installed. The Y-axis drive unit 25 may be composed of a linear motor. In this case, the Y-axis drive unit 25 may include a stator 26 disposed on the frame 10 along the Y-axis direction, and a support 20. It may be composed of a mover (27) installed in the).

On the other hand, when the movable element 27 provided in the support 20 accelerates and / or decelerates along the Y-axis direction, reaction force by the movement of the movable element 27 may generate | occur | produce in the stator 26. FIG. Therefore, the stator 26 is installed to allow the slide movement with respect to the frame 10 in the Y-axis direction to prevent the reaction force generated in the stator 26 from being transmitted to the frame 10 or the test module 30. Can be.

At least one test module 30 may be installed in the support 20. The test module 30 detects whether the substrate mounted on the stage 15 is defective. The test module 30 may be configured to be movable in the longitudinal direction of the support 20, that is, in the X-axis direction. To this end, an X-axis driving unit 35 for moving the test module 30 in the X-axis direction may be installed between the support 20 and the test module 30. Here, the X-axis drive unit 35 may be composed of a linear motor, in this case, the X-axis drive unit 35, the stator 36 disposed on the support 20 along the X-axis direction, It may be composed of a mover 37 is installed in the test module 30.

On the other hand, when the mover 37 accelerates and / or decelerates while the test module 30 is installed, the reaction force may be generated by the movement of the mover 37 in the stator 36. Therefore, the stator 36 has a slide movement with respect to the support 20 in the longitudinal direction (X-axis direction) of the support 20 so as to prevent the reaction force generated in the stator 36 from being transmitted to the support 20. It can be installed possibly.

By such a configuration, the test module 30 can be moved in the Y-axis direction by the movement of the support 20 in the Y-axis direction according to the drive of the Y-axis drive unit 25, and the X-axis drive unit ( By the driving of the 35, the test module 30 may be moved in the X-axis direction (the longitudinal direction of the support 20). As described above, the test module 30 may be horizontally moved in the X-axis direction and the Y-axis direction with respect to the substrate S to detect whether the substrate S is defective. Therefore, even if the large area of the substrate S is not moved horizontally, defects in the entire area of the substrate S can be detected, so that the array test apparatus is provided to secure a space for horizontally moving the substrate S. It is possible to efficiently detect whether or not a defect is present in the entire area of the substrate S while preventing excessively large size.

As shown in FIG. 2, the test module 30 is disposed adjacent to the light source 31, the light direction controller 32 for adjusting the direction of the light emitted from the light source 31, and the substrate S. It may be configured to include a modulator 33, and a camera 34 for imaging the modulator 33.

The modulator 33 is an electro-optical material that changes the amount of light passing according to the reflection layer 331 disposed adjacent to the substrate S and the magnitude of the electric field generated between the substrate S. layer) 332, a modulator electrode layer 333 connected to a power source, and a transparent substrate layer 334 disposed on the modulator electrode layer 333.

The reflective layer 331 may be made of a thin film-type reflective film, it may be made of a mirror-shaped reflective glass coated with a reflective film on the glass. When the reflective layer 331 is made of reflective glass, the hardness is improved as compared with the case where the reflective layer 331 is made of a reflective film, thereby preventing damage such as scratches caused by contact with the substrate S. FIG.

By such a configuration, an electric field is generated between the substrate S and the modulator 33 when electricity is applied to the electrode of the substrate S and the modulator electrode layer 333 of the modulator 33. The characteristics of the all materials forming the all materials layer 332 are changed. Accordingly, the light emitted from the light source 31 is incident on the modulator 33 through the light direction controller 32 and then the reflective layer of the modulator 33. When reflected from 331, the amount of light reflected is changed. Therefore, the magnitude of the electric field generated between the substrate S and the modulator 33 can be detected by analyzing the light measured by the camera 34. When the substrate S is defective, an electric field is not formed between the modulator 33 and the substrate S, or a smaller electric field is formed as compared with the normal case. Accordingly, the substrate is formed using the detected electric field. The defect of (S) can be measured.

Here, the all-optical material layer 332 may be formed of a liquid crystal (LC) that changes the amount of light according to the size of the electric field. In addition, the all-optical material layer 332 may be made of a polymer dispersed liquid crystal (PDLC) that is made of a material having a characteristic of being arranged in a predetermined direction according to the size of an electric field and polarizes light incident thereto. .

The reaction force canceling device 50 serves to cancel the reaction force generated by the acceleration and / or deceleration of the test module 30 so as to minimize vibration generated when the test module 30 moves in the X-axis direction. do.

The reaction force offset device 50 is installed at a position spaced apart from the frame 10 and connects the mass body 51 having a predetermined mass to the mass body 51 and the stator 36 and moves the test module 30 to the movement of the test module 30. It can be configured to include a joint mechanism 55 for transmitting a reaction force generated in the stator 36 to the mass 51. In FIG. 1, the reaction force canceling device 50 is provided on one side of the support 20 to be connected to one end of the stator 36. However, the present invention is not limited thereto, and the reaction force canceling device 50 is provided. Is provided on both sides of the support 20 can be applied to the configuration connected to both ends of the stator (36).

The mass 51 may be installed to be movable at a predetermined distance when a force is applied from the outside. Accordingly, the external force transmitted to the mass 51 may be converted into kinetic energy of the mass 51 and extinguished. have. The mass, size, and number of installations of such a mass body 51 can be appropriately calculated and installed.

The joint mechanism 55 may transmit the reaction force generated in the stator 36 by the X-axis movement of the test module 30 to the mass 51 even when the Y-axis displacement of the test module 30 is changed. It plays a role.

The joint mechanism 55 is supported by the mass body 51 and connected to the connecting body 70 extending from the stator 36 in the X-axis direction so that the connecting body 70 can move in the Y-axis direction. It may be configured as a connection guide 60.

The connecting body 70 is installed in a structure that protrudes in the X-axis direction in which one side is in contact with the stator 36 and the other side is in contact with the connection guide 60. The connecting body 70 is preferably installed as a structure having a rigidity capable of sufficiently transmitting the reaction force generated in the stator 36 by the movement of the test module 30 and the mover 37 to the mass body 51. .

The connection guide 60 is disposed long in the Y-axis direction at one side of the frame 10, and the height is installed at a height high enough to allow the connector 70 to be coupled thereto.

Such a connection body 70 and the connection guide 60 is preferably configured to be mutually coupled in a male and female coupling manner. To this end, the connection guide 60 may be formed with a groove 62 extending in the longitudinal direction of the connection guide 60, the connector 70 may be inserted into the groove 62 of the connection guide 60. have. Accordingly, the connecting member 70 may be constrained in the X axis direction with respect to the connection guide 60, and may be coupled to allow relative movement in the Y axis direction.

On the other hand, the connecting guide 60 is supported by the mass body 51, in order to stably support the connecting guide 60 installed in the Y-axis direction, the mass body 51 is in the longitudinal direction of the connecting guide 60 It is preferable to be provided in plural at predetermined intervals in the (Y-axis direction). In FIG. 1, a configuration in which two masses 51 are installed is illustrated, and a configuration in which the connection guide 60 is supported on the upper ends of the two masses 51 is illustrated.

On the other hand, it is preferable that the bearing structure is installed at the portion where the connecting member 70 and the connecting guide 60 contact each other so that the relative movement can be smoothly performed in the Y-axis direction. The bearing structure may be provided at a surface in which the connector 70 contacts the groove 62 of the connection guide 60.

In the array test apparatus according to the present invention configured as described above, when the support 20 moves in the Y-axis direction while the other end of the connecting member 70 is inserted into the groove 62 of the connection guide 60. The connector 70 connected to the stator 36 moves together along the groove 62 of the connection guide 60. In this state, when the mover 37 in which the test module 30 is installed moves in the X-axis direction while being accelerated and / or decelerated, a reaction force is applied to the stator 36, and a reaction force applied to the stator 36. Is transmitted to the connector 70, the reaction force transmitted to the connector 70 is transmitted to the mass 51 through the connection guide 60, the reaction force transmitted to the mass 51 is the motion of the mass 51 Converted to energy and destroyed. As such, even when the support 20 moves in the Y-axis direction, the reaction force generated by the movement of the test module 30 in the X-axis direction can be transmitted to the mass 51 to be extinguished.

On the other hand, the array test apparatus according to the present invention is configured to reduce the vibration caused by the movement of the test module 30, input a reference command input to the mover 37 for the movement of the test module 30 Software vibration control unit 6 for correcting by an input shaping method and outputting a corrected correction command to control driving of the mover 37 to reduce vibrations that may occur when the test module 30 moves. (Hereinafter, referred to as a 'vibration control unit') may be further provided.

The vibration control unit 6 includes a vibration sensing unit 5a installed in the test module 30 to sense the vibration amount of the test module 30 by using a signal input from the vibration sensing unit 5a. It can be configured to enable feedback control.

As shown in FIG. 3, the vibration control unit 6 uses an input shaper to output a correction command for driving the mover 37 installed in the test module 30. The control signal is calculated and output in a manner. According to this, the vibration control unit 6 convolutions the input molding machine impulse in addition to the reference command in the input molding machine, and outputs the changed new correction command to drive the mover 37. The impulse may be determined by amplitudes of impulses, time locations of impulses, and the like, which are determined by the natural frequency and damping ratio information of the mover 37. In addition, the impulse may be determined by adding other variables such as the moving speed, the acceleration, the deceleration, and the number of sections to be accelerated or decelerated.

As such, by controlling the driving of the mover 37 installed in the test module 30 using the vibration control unit 6, the test is performed in a state in which vibration generation factors that may be generated by the movement of the test module 30 are minimized. The module 30 can be moved.

In addition, when the vibration detection unit 5a detects and feeds back the vibration amount generated when the test module 30 moves, and corrects the correction command again to output a new correction command, the test module. The vibration generated at the time of movement of 30 can be further reduced. The vibration detecting unit 5a measures the actual vibration amount of the movable element 37 in the state where the movable element 37 is driven by the correction command calculated by the input molding machine. When the vibration amount detected by the vibration sensing unit 5a is greater than or equal to a preset reference vibration amount, the vibration control unit 6 feeds it back to the input molding machine, changes the impulse of the input molding machine, and outputs a new correction command. In addition, the speed, acceleration, and / or deceleration of the mover 37 are controlled by the new correction command of the vibration control unit 6, which may occur when the test module 30 moves. Vibration can be reduced.

The vibration detection unit 5a may be configured as a vibration detection sensor installed at one side of the test module 30. The vibration sensor may be installed at a position capable of detecting the vibration amount of the test module 30 or the mover 37.

As described above, the array test apparatus according to the present invention includes the vibration control unit 6 and / or the vibration sensing unit 5a as well as the reaction force canceling apparatus 50, and thus vibrations that may occur when the test module 30 moves. Can be reduced to a minimum.

Hereinafter, with reference to FIG. 4, the method to set the mass 51 of the reaction force canceling apparatus 50 using the vibration control part 6 is demonstrated.

First, in a state in which the reaction force canceling device 50 is not installed, the actuator 37 in which the test module 30 is installed is driven by the input shaping control method of the vibration controller 6, and at this time, the vibration of the actuator 37 The acceleration value of the mover 37 is measured in a state where generation is reduced.

Then, based on the acceleration value of the movable element 37 reduced by the vibration control unit 6, the size of the mass body 51 of the reaction force canceling device 50 in accordance with the target acceleration value of the target mass body 51. After the determination, the mass 51 thus determined is connected to the stator 36 of the support 20 through the joint mechanism 55 and installed.

For example, assuming that the acceleration of 1G occurs when the mover 37 is driven, the acceleration of the mover 37 may be reduced from about 1G to about 0.4G through the control method of the vibration controller 6. Of course, this is an approximation and not an absolute reduction in acceleration.

In this way, the size of the mass 51 of the reaction force canceling device 50 is determined based on the magnitude of the acceleration of the movable element 37 reduced by the vibration control unit 6. At this time, the size of the mass 51 depends on the stator 36 and the acceleration set value (hereinafter referred to as 'target acceleration') of the mass 51 connected to the stator 36, and the target acceleration is set to 0.2G. The case will be described as an example. For reference, 0.2G is the allowable acceleration value of the mass that can be operated most stably in the system operation experience.

The relationship between the mass and the acceleration that determines the size of the mass 7 is shown in the following formula.

[Equation]

F = m1 × a1 = m2 × a2

Here, F is the reaction force generated when the mover 37 moves, m1 is the mass of the test module 30 and the mover 37, a1 is the acceleration of the mover 37 (by the software vibration control unit). M2 is the mass of the mass 51, and a2 is the target acceleration (acceleration of the mass 51).

When the size of the mass 51 is determined by the above formula, the acceleration a1 of the movable element 37 reduced by the vibration control unit 6 is 0.4 G, and the target acceleration a2 is 0.2. Assuming that the mass m1 of the movable element 37 on which the test module 30 is installed is 1, G is 1 × 0.4 = m2 × 0.2, so the mass m2 of the mass 51 is 2.

Therefore, the mass m2 of the mass 7 is a minimum mass which is about twice the mass m1 of the movable element 37 on which the test module 30 is installed, and the movable element 37 on which the test module 30 is installed. The reaction force generated at the time of moving) is sufficiently offset to allow stable operation of the system.

Of course, if the acceleration a1 of the movable element 37 is further reduced by the vibration control part 6, the mass m2 of the mass 51 can also be designed smaller. However, when only the reaction force canceling device 50 is installed without using the vibration control unit 6 as in the present invention, a mass body design process for obtaining an acceleration of 0.2 G that enables stable system operation as described above is performed. Take a look.

When the acceleration A of the movable element 37 on which the test module 30 is installed is generated by 1G, when it is substituted into the above [Formula] under the same conditions as above, it is 1 × 1 = m2 '× 0.2. The mass m2 'of the mass 51 at this time becomes five.

Therefore, if the reaction force is to be reduced by using only the reaction force canceling device 50 using the mass 51, when the acceleration of the mass 51 is reduced to about 0.2 G, the movable element 37 provided with the test module 30 is provided. A mass 51 having a mass that is about five times the mass of? It can be seen that the size of the mass 51 should be larger by several times or more than when the reaction force is reduced by using the vibration control unit 6 together.

As described above, when the acceleration of the movable element 37 reduced by the vibration control unit 6 is measured and the size of the mass 51 is determined based on this, the reaction force canceling device 50 is constituted. Since the acceleration a2 of the mass 51 can be set to 0.2 G or less even in the state of minimizing the size of 51), it becomes possible to operate a stable and precise system.

Hereinafter, referring to FIG. 5, a method of canceling reaction force generated by the movement of the test module 30 in the X axis direction by using the vibration control unit 6 and the reaction force canceling device 50 will be described. .

When the control command outputted by the vibration control unit 6 to the X-axis drive unit 35 outputs a correction command to the X-axis drive unit, the actuator 37 is installed in the X-axis direction. Since the mover 37 is driven by the correction command and the test module 30 is moved, the test module 30 can be moved in the X-axis direction while minimizing the vibration of the test module 30. At the same time, the reaction force offset device 50 cancels the reaction force generated by the acceleration or deceleration of the test module 30. Therefore, when the vibration control unit 6 and the reaction force canceling device 50 are used together, the vibration generated when the test module 30 moves, as well as the reaction force due to the acceleration or deceleration of the test module 30 can be offset. Therefore, the vibration damping effect of the whole system can be further improved.

In addition, the vibration amount generated during the actual movement of the test module 30 is measured using the vibration sensing unit 5a, and it is determined whether the measured vibration amount exceeds a preset reference range, and the measured vibration amount is a preset reference. If the range is exceeded, a new correction command is calculated on the basis of the actual vibration amount, and the new correction command controls the X-axis driving of the mover 37 installed in the test module 30.

As such, the actual vibration amount of the test module 30 is measured through the vibration sensing unit 5a, and feedback control is performed on the driving of the mover 37 using the vibration module 5a. It is possible to continuously reduce the vibration that can occur in a more complete manner.

In the array test apparatus according to the present invention as described above, the test module 30 for detecting the defect of the substrate S is installed to be horizontally movable in the X-axis direction and the Y-axis direction. Even if S) is not moved horizontally, defects of the substrate S can be detected while the test module 30 is horizontally moved on the substrate S, so that the array test can be performed to secure a space for the movement of the substrate S. While the apparatus can be prevented from being oversized, there is an effect that the defect of the large-area substrate S can be detected smoothly.

In addition, the array test apparatus according to an embodiment of the present invention is provided by the reaction force offset device 50 for canceling the reaction force generated by the movement of the test module 30, generated by the movement of the test module 30 By reducing the vibration, the array test apparatus can be operated stably and precisely.

In addition, the array test apparatus according to an embodiment of the present invention, the test module 30 is provided with a vibration sensing unit (5a) for detecting the amount of vibration generated when the test module 30 moves, the vibration sensing unit ( The vibration generated by the movement of the test module 30 is reduced by controlling the driving of the mover 37, on which the test module 30 is installed, via the vibration control unit 6 based on the amount of vibration sensed by 5a). In this way, the array test apparatus can be operated stably and precisely.

Hereinafter, an array test apparatus according to another embodiment of the present invention will be described with reference to FIG. 6. The same parts as the parts described in the above-described embodiments of the present invention are denoted by the same reference numerals and detailed description thereof will be omitted.

As shown in FIG. 6, the array test apparatus according to another embodiment of the present invention includes a reaction force canceling device 150 that cancels the reaction force generated by the movement of the support 20 in the Y-axis direction. Can be.

The reaction force canceling device 150 serves to cancel the reaction force generated by the acceleration and / or deceleration of the support 20 to minimize the vibration generated when the support 20 moves in the Y-axis direction.

The reaction force canceling device 150 is installed at a position spaced apart from the frame 10 and connects the mass body 151 having a predetermined mass, and connects the mass body 151 and the stator 26 to the Y-axis direction of the support 20. It may be configured to include a connection body 170 for transmitting a reaction force generated in the stator 26 by the movement to the mass body 151. In FIG. 6, the reaction force canceling device 150 is disposed on one side of the frame 10 to be connected to the stator 26 and one end thereof. However, the present invention is not limited thereto, and the reaction force canceling device 150 is provided. Is arranged on both sides of the frame 10 is connected to the both ends of the stator 26 can be applied.

The mass body 151 may be installed to be movable at a predetermined distance when a force is applied from the outside. Accordingly, the external force transmitted to the mass body 151 may be converted into kinetic energy of the mass body 151 and then extinguished. have.

The connecting body 170 is installed in a structure protruding in the Y-axis direction in which one side is in contact with the stator 26 and the other side is in contact with the mass body 151. The connection body 170 is preferably installed as a structure having a rigidity capable of sufficiently transmitting the reaction force generated in the stator 26 to the mass body 151.

By such a configuration, when the support 20 is moved in the Y-axis direction while being accelerated and / or decelerated by the driving of the movable element 27 installed in the support 20, a reaction force is applied to the stator 26. The reaction force applied to the stator 26 is transmitted to the mass body 151 through the connecting body 170, and the reaction force transmitted to the mass body 151 is converted into the kinetic energy of the mass body 151 and then extinguished.

On the other hand, in the array test apparatus according to another embodiment of the present invention, in a configuration to reduce the vibration caused by the movement of the support 20, a reference command input to the mover 27 for the movement of the support 20 is inputted A software vibration control unit 106 for correcting by an input shaping method and outputting a corrected correction command to control driving of the mover 27 to reduce vibrations that may occur when the support 20 is moved. (Hereinafter referred to as 'vibration control unit') may be further provided. Such a vibration control unit 106 may be made of the same configuration as the vibration control unit 6 described in an embodiment of the present invention.

In addition, the vibration control unit 106 includes a vibration sensing unit 105a installed on the support 20 to sense the vibration amount of the support 20, and the vibration amount detected by the vibration sensing unit 105a. On the basis of this, the speed, acceleration and / or deceleration of the mover 27 are controlled. The vibration detection unit 105a may be configured as a vibration detection sensor installed at one side of the support 20. The vibration sensor may be installed at a position capable of sensing the vibration amount of the support 20.

The method of controlling the driving of the mover 27 using the vibration control unit 106 controls the driving of the mover 37 using the vibration control unit 6 as described in the above-described embodiment of the present invention. It can be made of the same configuration as the method. In addition, a method of setting the mass body 151 of the reaction force canceling device 150 by using the vibration control unit 106 may also have the same configuration as described in the embodiment of the present invention.

Array test apparatus according to another embodiment of the present invention as described above is provided by the reaction force offset device 150 to cancel the reaction force generated by the movement of the support 20, generated by the movement of the support 20 By reducing the vibration, the array test apparatus can be operated stably and precisely.

In addition, the array test apparatus according to another embodiment of the present invention, the support 20 is provided with a vibration sensing unit 105a for detecting the amount of vibration generated when the support 20 is moved, vibration detection unit 105a By controlling the drive of the mover 27 installed on the support 20 through the vibration control unit 106 on the basis of the amount of vibration detected in the above, by reducing the vibration generated by the movement of the support 20, the array test It is effective to operate the device stably and precisely.

The technical idea described in each embodiment of the present invention may be implemented independently, or may be implemented in combination with each other. That is, the reaction cancellation device 50, the vibration detection unit 5a and the vibration control unit 6 described in the embodiment of the present invention, the reaction force cancellation device 150 and the vibration detection unit described in another embodiment of the present invention. The configuration in which the 105a and the vibration control unit 106 are combined to one array test apparatus may be applied.

1 is a perspective view of an array test apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic diagram illustrating a test module of the array test apparatus of FIG. 1.

3 is a control block diagram of a software vibration control unit included in the array test apparatus of FIG. 1.

4 is a flowchart illustrating a method of setting a mass of a reaction force canceling apparatus included in the array test apparatus of FIG. 1.

5 is a flowchart illustrating a control method of the array test apparatus of FIG. 1.

6 is a perspective view of an array test apparatus according to another embodiment of the present invention.

*** Explanation of symbols for main parts of drawing ***

10: frame 15: stage

20: support 30: test module

33: modulator 50, 150: reaction force offset device

Claims (13)

A stage on which the substrate is mounted; A frame on which the stage is supported; A support installed on the upper part of the frame to be movable in the Y-axis direction; And Array test apparatus including a test module installed to be movable in the X-axis direction on the support. The method of claim 1, The test module, Light source; A modulator comprising a reflective layer disposed adjacent to the substrate and an all-optical material layer for changing the amount of light according to the magnitude of the electric field generated between the substrate; And And a camera for imaging the modulator. The method of claim 2, The reflective layer is an array test apparatus, characterized in that consisting of a reflective film or a reflective glass. The method of claim 2, The all-optical material layer is an array test device, characterized in that consisting of a liquid crystal (LC) or a polymer dispersed liquid crystal display device (PDLC). The method according to any one of claims 1 to 4, Array test apparatus further comprises a reaction force offset device for canceling the reaction force generated by the movement of the test module. The method of claim 5, A stator is disposed in the support along the longitudinal direction of the support, and a tester is installed in the test module connected to the stator to move along the stator. The reaction force offset device, A mass body installed at a position spaced apart from the frame; And And a joint mechanism for connecting the mass body and the stator to transfer the reaction force applied to the stator by the movement of the test module to the mass body. The method of claim 6, The joint mechanism, A connector extending in the X-axis direction from the stator; And And a connecting guide supported by the mass and connected to the connecting member so as to be movable in the Y-axis direction. The method according to any one of claims 1 to 4, The test module array test apparatus, characterized in that the vibration sensing unit for detecting the amount of vibration generated when the test module moves. The method of claim 8, A stator is disposed in the support along the longitudinal direction of the support, and a tester is installed in the test module connected to the stator to move along the stator. And a vibration controller configured to control driving of the mover based on the vibration amount detected by the vibration detector. The method according to any one of claims 1 to 4, And a reaction force offset device for canceling reaction forces generated by the movement of the support. The method of claim 10, The frame is provided with a stator along the Y-axis direction, and the support is provided with a mover connected to the stator and moving along the stator. The reaction force offset device, A mass body installed at a position spaced apart from the frame; And And a connecting member for connecting the mass and the stator to transfer the reaction force applied to the stator by the movement of the support to the mass. The method according to any one of claims 1 to 4, And the support is provided with a vibration sensing unit for sensing an amount of vibration generated when the support is moved. The method of claim 12, The frame is provided with a stator along the Y-axis direction, and the support is provided with a mover connected to the stator and moving along the stator. And a vibration controller configured to control driving of the mover based on the vibration amount detected by the vibration detector.

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