JP2012064912A - Transfer system and array test device including teh same - Google Patents

Transfer system and array test device including teh same Download PDF

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JP2012064912A
JP2012064912A JP2010253682A JP2010253682A JP2012064912A JP 2012064912 A JP2012064912 A JP 2012064912A JP 2010253682 A JP2010253682 A JP 2010253682A JP 2010253682 A JP2010253682 A JP 2010253682A JP 2012064912 A JP2012064912 A JP 2012064912A
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reaction force
base
force transmission
transfer system
support member
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Jong Hyoun Park
種賢 朴
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Top Engineering Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a transfer system capable of reducing the oscillation generated in the transfer system by providing a reaction force transmission member that transmits reaction force generated by the movement of a movable member to a base, and an array test device including the transfer system.SOLUTION: The present invention relates to a transfer system that transfers a target object to a specific location, and provides a structure capable of reducing the oscillation of the transfer system by providing a reaction force transmission member that transmits reaction force generated by the movement of a movable member that moves the target object to a base.

Description

本発明は、目的物を所定位置に移送させる移送システムに関するものである。   The present invention relates to a transfer system for transferring an object to a predetermined position.

液晶ディスプレイ（ＬＣＤ、Liquid Crystal Display）を含む各種平板ディスプレイ（ＦＰＤ、Flat Panel Display）の製造工程では、基板、液体吐出用ノズルまたはノズル移送装置などの目的物を移送するロボット、クレーン及びテーブルなどの移送システムが適用されている。   In the manufacturing process of various flat panel displays (FPDs) including liquid crystal displays (LCDs), robots, cranes, tables, etc. for transferring objects such as substrates, nozzles for liquid discharge or nozzle transfer devices A transfer system is applied.

このような移送システムは、フレームと、フレーム上に支持される支持部材と、支持部材上に設けられて一方向へ移動する可動部材と、を含んで構成されて、可動部材を所定目的のために移動させる構成を有している。   Such a transfer system includes a frame, a support member supported on the frame, and a movable member provided on the support member and moving in one direction. The movable member is used for a predetermined purpose. It has the structure moved to.

移送システムの動作過程では可動部材の移動により発生する反力から移送システムに振動が発生され、このような反力による振動によって作業の精密性が低下する問題点があった。従って、振動を低減し得る、移送システムに関する最適の設計が要求される。   In the operation process of the transfer system, a vibration is generated in the transfer system from the reaction force generated by the movement of the movable member, and there is a problem that the precision of the work is lowered due to the vibration due to the reaction force. Therefore, there is a need for an optimal design for the transfer system that can reduce vibration.

本発明は、上記のような従来技術の問題点を解決するために考案されたものであり、本発明の目的は、可動部材の移動によって発生する反力をベースに伝達する反力伝達部材を備えることで、移送システムに発生する振動を低減し得る、移送システム及びそれを備えたアレイテスト装置を提供しようとする。   The present invention has been devised to solve the above-described problems of the prior art, and an object of the present invention is to provide a reaction force transmission member that transmits a reaction force generated by the movement of a movable member to a base. By providing, it is intended to provide a transfer system and an array test apparatus including the transfer system that can reduce vibrations generated in the transfer system.

上記目的を得るための、本発明に係る移送システムにおいては、ベースと、上記ベースに支持されるフレームと、上記フレームに移動可能に支持される支持部材と、上記支持部材に移動可能に設けられる可動部材と、上記支持部材に連結される第１部と上記ベースに連結される第２部とを有する反力伝達部材と、を包含して構成される。   In order to achieve the above object, the transfer system according to the present invention is provided with a base, a frame supported by the base, a support member movably supported by the frame, and movably provided by the support member. A movable member, and a reaction force transmission member including a first part coupled to the support member and a second part coupled to the base are configured.

ここで、上記ベースと上記フレーム間には防塵部材が備えられることが好ましい。   Here, it is preferable that a dustproof member is provided between the base and the frame.

また、上記反力伝達部材の第１部と上記支持部材との間に設けられて、上記反力伝達部材の第１部が上記支持部材に連結される位置を調節する調節装置を更に具備され、上記反力伝達部材の第２部と上記ベースとの間に設けられて、上記反力伝達部材の第２部が上記ベースに連結される位置を調節する調節装置を更に具備される。   Further, an adjustment device is further provided between the first part of the reaction force transmission member and the support member, and adjusts a position where the first part of the reaction force transmission member is connected to the support member. And an adjusting device that is provided between the second part of the reaction force transmitting member and the base and adjusts a position where the second part of the reaction force transmitting member is connected to the base.

そして、本発明に係るアレイテスト装置においては、ベースと、上記ベースに支持されて長手方向に延長されるフレームと、上記フレームに上記フレームの長手方向へ移動可能に設けられる支持部材と、上記支持部材に上記フレームの長手方向へ移動可能に設けられる可動部材と、上記可動部材に連結されて基板の欠陥をテストするテストモジュールと、上記支持部材及び上記ベースに連結される反力伝達部材と、を包含して構成される。   In the array test apparatus according to the present invention, a base, a frame supported by the base and extended in the longitudinal direction, a support member provided on the frame so as to be movable in the longitudinal direction of the frame, and the support A movable member provided on the member so as to be movable in the longitudinal direction of the frame; a test module coupled to the movable member for testing a defect of the substrate; a reaction force transmitting member coupled to the support member and the base; It is configured to include.

本発明に係る移送システムは、可動部材が移動可能に支持される支持部材をフレーム上で可動部材の移動方向とは反対の方向へ移動可能に設け、支持部材とベースとを反力伝達部材により連結することで、可動部材の移動によって発生する反力をベースに伝達して吸収させて、可動部材の移動による反力から発生する振動を低減し得るという効果がある。   In the transfer system according to the present invention, a support member on which the movable member is movably supported is provided on the frame so as to be movable in a direction opposite to the moving direction of the movable member, and the support member and the base are provided by the reaction force transmission member. By connecting, the reaction force generated by the movement of the movable member is transmitted to the base and absorbed, and the vibration generated from the reaction force due to the movement of the movable member can be reduced.

また、本発明に係る移送システムによると、反力伝達部材の第１部が支持部材に連結される位置を調節する方法を利用して、移送システムの振動を低減し得る反力伝達部材の剛性を最適に調節することができるという効果がある。   In addition, according to the transfer system of the present invention, the rigidity of the reaction force transmission member that can reduce the vibration of the transfer system using the method of adjusting the position where the first part of the reaction force transmission member is connected to the support member. The effect is that it can be adjusted optimally.

更に、本発明に係る移送システムによると、反力伝達部材の第２部がベースに連結される位置を調節する方法を利用して、移送システムの振動を低減し得る反力伝達部材の剛性を最適に調節することができるという効果がある。   Furthermore, according to the transfer system of the present invention, the rigidity of the reaction force transmission member that can reduce the vibration of the transfer system is reduced by using a method of adjusting the position where the second part of the reaction force transmission member is connected to the base. There is an effect that it can be adjusted optimally.

本発明の第１実施例に係る移送システムを示した概略図である。It is the schematic which showed the transfer system which concerns on 1st Example of this invention. 図１のＡ−Ａ線断面図である。It is the sectional view on the AA line of FIG. 本発明の第２実施例に係る移送システムを示した概略図である。It is the schematic which showed the transfer system which concerns on 2nd Example of this invention. 図３の移送システムの調節装置を示した概略図である。FIG. 4 is a schematic diagram illustrating an adjustment device of the transfer system of FIG. 3. 図４の移送システムの調節装置の作動状態図である。FIG. 5 is an operational state diagram of the adjusting device of the transfer system of FIG. 4. 図４の移送システムの調節装置の作動状態図である。FIG. 5 is an operational state diagram of the adjusting device of the transfer system of FIG. 4. 本発明の第３実施例に係る移送システムを示した概略図である。It is the schematic which showed the transfer system which concerns on 3rd Example of this invention. 図７の移送システムの調節装置を示した概略図である。FIG. 8 is a schematic diagram illustrating an adjustment device of the transfer system of FIG. 7. 本発明に係る移送システムを備えたアレイテスト装置を示した斜視図である。It is the perspective view which showed the array test apparatus provided with the transfer system which concerns on this invention.

以下、本発明の好ましい実施例を添付された図面を参照して詳細に説明する。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

図１及び図２に示したように、本発明の第１実施例に係る移送システムは、各構成が支持される基礎となるベース１０と、ベース１０に支持されるフレーム２０と、フレーム２０に第１方向（図１のＸ軸方向）へ移動可能に設けられる支持部材３０と、支持部材３０に第１方向へ移動可能に設けられる可動部材４０と、ベース１０と支持部材３０との間を連結し、可動部材４０の移動によって発生する反力をベース１０に伝達する反力伝達部材５０と、を備えて構成される。   As shown in FIGS. 1 and 2, the transfer system according to the first embodiment of the present invention includes a base 10 serving as a base on which each component is supported, a frame 20 supported by the base 10, and a frame 20. Between the support member 30 provided to be movable in the first direction (X-axis direction in FIG. 1), the movable member 40 provided to be movable in the first direction on the support member 30, and between the base 10 and the support member 30. And a reaction force transmission member 50 that transmits the reaction force generated by the movement of the movable member 40 to the base 10.

ベース１０とフレーム２０との間には、防塵部材６０を備えることが好ましい。防塵部材６０としては、ゴムまたは合成樹脂のような弾性材質の部材、スプリング、油圧式または空圧式ダンパー、内部に所定の圧力を有するチューブなどを適用することができる。このような防塵部材６０によって、ベース１０に伝達された反力がフレーム２０に再び伝達されることが防止される。   A dustproof member 60 is preferably provided between the base 10 and the frame 20. As the dust-proof member 60, a member made of an elastic material such as rubber or synthetic resin, a spring, a hydraulic or pneumatic damper, a tube having a predetermined pressure inside, and the like can be applied. Such a dustproof member 60 prevents the reaction force transmitted to the base 10 from being transmitted again to the frame 20.

支持部材３０は、フレーム２０にフレーム２０の長手方向に沿って延長して設けられるガイド２１に沿ってスライド移動可能に設けられる。   The support member 30 is slidably provided along a guide 21 provided on the frame 20 so as to extend along the longitudinal direction of the frame 20.

可動部材４０には移送の対象となる目的物が設けられる。可動部材４０は、支持部材３０に支持部材３０の長手方向に沿って延長して設けられるガイド３１に沿ってスライド移動可能に設けられる。可動部材４０が支持部材３０に対して自動移動できるように、支持部材３０には支持部材３０の長手方向に固定子３２が設けられ、可動部材４０には支持部材３０の固定子３２に対向して設けられて固定子３２との電磁気的相互作用によって可動部材４０を移動させる可動子４２が備えられる。即ち、支持部材３０と可動部材４０の間には、永久磁石により構成される固定子３２と電磁石コイルにより構成される可動子４２とを含むリニアモータが具備される。但し、本発明は、可動部材４０を自動移動させるための手段としてリニアモータを適用することに限定されず、ボールスクリュー装置、油圧または空圧により動作する移送装置など、可動部材４０を自動移動させるための様々な直線移送機構を適用することができる。   The movable member 40 is provided with a target object to be transferred. The movable member 40 is slidably provided along a guide 31 provided on the support member 30 so as to extend along the longitudinal direction of the support member 30. The support member 30 is provided with a stator 32 in the longitudinal direction of the support member 30 so that the movable member 40 can automatically move with respect to the support member 30, and the movable member 40 faces the stator 32 of the support member 30. A movable element 42 is provided that moves the movable member 40 by electromagnetic interaction with the stator 32. That is, a linear motor including a stator 32 made of a permanent magnet and a mover 42 made of an electromagnet coil is provided between the support member 30 and the movable member 40. However, the present invention is not limited to the application of a linear motor as means for automatically moving the movable member 40, and the movable member 40 is automatically moved, such as a ball screw device or a transfer device that operates by hydraulic pressure or pneumatic pressure. Various linear transfer mechanisms can be applied.

反力伝達部材５０は、支持部材３０と連結される第１部５１と、ベース１０と連結される第２部５２と、を備え、第１部５１と支持部材３０との間の連結及び第２部５２とベース１０との間の連結のために、ボルト及びナットなどのような締結部材または溶接などの方法を適用することができる。図１では、反力伝達部材５０として支持部材３０の両方側に固定したものを示しているが、本発明はそれに限定されず、単一の反力伝達部材５０を支持部材３０に固定する構成を適用することもできる。   The reaction force transmission member 50 includes a first part 51 connected to the support member 30 and a second part 52 connected to the base 10. The reaction force transmission member 50 is connected to the first part 51 and the support member 30. For the connection between the two parts 52 and the base 10, a fastening member such as a bolt and a nut or a method such as welding can be applied. In FIG. 1, the reaction force transmission member 50 fixed to both sides of the support member 30 is shown. However, the present invention is not limited thereto, and the single reaction force transmission member 50 is fixed to the support member 30. Can also be applied.

このような構成によって、可動部材４０がＸ軸方向へ移動する場合、支持部材３０には可動部材４０の移動方向とは反対の方向、即ち、−Ｘ軸方向への反力が発生する。従って、支持部材３０には−Ｘ軸方向への力が作用するようになるが、この力は支持部材３０に連結される反力伝達部材５０を通してベース１０に伝達される。このように、可動部材４０の移動によって発生する反力は、支持部材３０及び反力伝達部材５０を通してベース１０に伝達されてベース１０に吸収される。   With such a configuration, when the movable member 40 moves in the X-axis direction, a reaction force in the direction opposite to the moving direction of the movable member 40, that is, in the −X-axis direction is generated in the support member 30. Accordingly, a force in the −X-axis direction acts on the support member 30, but this force is transmitted to the base 10 through the reaction force transmission member 50 connected to the support member 30. As described above, the reaction force generated by the movement of the movable member 40 is transmitted to the base 10 through the support member 30 and the reaction force transmission member 50 and absorbed by the base 10.

ここで、可動部材４０の移動による反力によって支持部材３０は所定移動量だけ移動され、この場合、反力伝達部材５０を通して伝達される力の大きさは、可動部材４０の移動によって発生した全体の力の大きさのうち、支持部材３０を移動させる力を除いた力となる。このように、支持部材３０が所定移動量で移動する場合、支持部材３０に連結される反力伝達部材５０の第１部５１は支持部材３０の移動方向へ移動され、そのため、反力伝達部材５０は長手方向へ伸張される。   Here, the support member 30 is moved by a predetermined amount by the reaction force due to the movement of the movable member 40. In this case, the magnitude of the force transmitted through the reaction force transmission member 50 is the entire amount generated by the movement of the movable member 40. This is the force excluding the force that moves the support member 30. Thus, when the support member 30 moves by a predetermined movement amount, the first portion 51 of the reaction force transmission member 50 connected to the support member 30 is moved in the movement direction of the support member 30, and thus the reaction force transmission member 50 is extended in the longitudinal direction.

一方、反力伝達部材５０がベース１０に伝達する力の大きさと可動部材４０の移動による支持部材３０の移動量とは反力伝達部材５０の剛性または弾性によって変化するので、反力伝達部材５０の剛性または弾性を調節することによって反力伝達部材５０がベース１０に伝達する力の大きさ及び支持部材３０の移動量を調節することができる。反力伝達部材５０の剛性または弾性の調節は、材料的剛性が相違する反力伝達部材５０を交換する過程を通して行うことができる。本発明に係る移送システムによれば、可動部材４０の重量によって移送システムの振動が最小となる反力伝達部材５０の剛性または弾性を実験やシミュレーションを通して探索し、可動部材４０の重量によって反力伝達部材５０の剛性または弾性を調節することによって、移送システムの振動を最小化する方法を適用することができる。   On the other hand, the magnitude of the force transmitted by the reaction force transmission member 50 to the base 10 and the amount of movement of the support member 30 due to the movement of the movable member 40 vary depending on the rigidity or elasticity of the reaction force transmission member 50. It is possible to adjust the magnitude of the force transmitted by the reaction force transmission member 50 to the base 10 and the amount of movement of the support member 30 by adjusting the rigidity or elasticity of the support member 30. The rigidity or elasticity of the reaction force transmission member 50 can be adjusted through a process of replacing the reaction force transmission member 50 having different material rigidity. According to the transfer system of the present invention, the rigidity or elasticity of the reaction force transmission member 50 that minimizes the vibration of the transfer system due to the weight of the movable member 40 is searched through experiments and simulations, and the reaction force is transmitted according to the weight of the movable member 40. By adjusting the stiffness or elasticity of the member 50, a method for minimizing the vibration of the transfer system can be applied.

また、反力伝達部材５０がベース１０に伝達する力の大きさと可動部材４０の移動による支持部材３０の移動量は反力伝達部材５０の個数によって相違するので、反力伝達部材５０の個数を調節することによって、反力伝達部材５０を通して伝達される力の大きさ及び支持部材３０の移動量を調節することができる。本発明に係る移送システムによれば、可動部材４０の重量によって移送システムの振動が最小となる反力伝達部材５０の個数を実験やシミュレーションを通して探索し、可動部材４０の重量によって反力伝達部材５０の個数を調節することによって、移送システムの振動を最小化する方法を適用することができる。   Further, since the magnitude of the force transmitted by the reaction force transmission member 50 to the base 10 and the amount of movement of the support member 30 due to the movement of the movable member 40 differ depending on the number of reaction force transmission members 50, the number of reaction force transmission members 50 is determined. By adjusting, the magnitude of the force transmitted through the reaction force transmitting member 50 and the amount of movement of the support member 30 can be adjusted. According to the transfer system of the present invention, the number of reaction force transmission members 50 that minimize the vibration of the transfer system due to the weight of the movable member 40 is searched through experiments and simulations, and the reaction force transmission member 50 is determined according to the weight of the movable member 40. The method of minimizing the vibration of the transfer system can be applied by adjusting the number of

上記したような本発明の第１実施例に係る移送システムは、可動部材４０が移動可能に支持される支持部材３０をフレーム２０上で可動部材４０の移動方向とは反対の方向へ移動可能に設け、支持部材３０とベース１０とを反力伝達部材５０により連結して、可動部材４０の移動によって発生する反力をベース１０に伝達して吸収させることによって、可動部材４０の移動による反力から発生する振動を低減することができる。   In the transfer system according to the first embodiment of the present invention as described above, the support member 30 on which the movable member 40 is movably supported can be moved on the frame 20 in a direction opposite to the moving direction of the movable member 40. The reaction force generated by the movement of the movable member 40 is provided by connecting the support member 30 and the base 10 by the reaction force transmission member 50 and transmitting the reaction force generated by the movement of the movable member 40 to the base 10 for absorption. The vibration generated from can be reduced.

また、反力伝達部材５０の剛性（弾性）及び／又は個数を調節することで反力伝達部材５０を通してベース１０に伝達される力の大きさ及び支持部材３０の移動量を調節することが可能であり、これにより、移送システムの振動を低減し得る反力伝達部材５０の最適の剛性（弾性）及び／又は個数を探索することができる。   Further, by adjusting the rigidity (elasticity) and / or the number of reaction force transmission members 50, the magnitude of the force transmitted to the base 10 through the reaction force transmission member 50 and the amount of movement of the support member 30 can be adjusted. Accordingly, it is possible to search for the optimum rigidity (elasticity) and / or number of the reaction force transmission members 50 that can reduce the vibration of the transfer system.

以下、図３〜図６を参照して、本発明の第２実施例に係る移送システムに関して説明する。上述した本発明の第１実施例で説明した部分と同一部分に対しては同一符号を付して説明を省略する。   Hereinafter, the transfer system according to the second embodiment of the present invention will be described with reference to FIGS. The same parts as those described in the first embodiment of the present invention are denoted by the same reference numerals and the description thereof is omitted.

図３に示したように、本発明の第２実施例に係る移送システムは、反力伝達部材５０の第１部５１と支持部材３０との間に設けられ、反力伝達部材５０の第１部５１が支持部材３０に連結される位置を調節する調節装置７０を更に含んで構成される。   As shown in FIG. 3, the transfer system according to the second embodiment of the present invention is provided between the first portion 51 of the reaction force transmission member 50 and the support member 30. It further includes an adjusting device 70 that adjusts the position where the part 51 is connected to the support member 30.

図４に示したように、調節装置７０は、反力伝達部材５０に固定される移動部材７１と、支持部材３０に固定され移動部材７１と連結されて移動部材７１の移動を案内するガイド部材７２と、移動部材７１を移動させる調節部材７３と、を含んで構成される。ここで、ガイド部材７２及び調節部材７３の構成はボールスクリュー装置のような形態に構成されており、調節部材７３として回転モータを適用することができる。但し、本発明は、調節装置７０としてボールスクリュー装置を適用することに限定されず、リニアモータ、油圧または空圧により動作する移送装置など、移動部材７１を移動させるための様々な直線移送機構を適用することができる。   As shown in FIG. 4, the adjusting device 70 includes a moving member 71 fixed to the reaction force transmission member 50 and a guide member fixed to the support member 30 and connected to the moving member 71 to guide the movement of the moving member 71. 72 and an adjustment member 73 that moves the moving member 71. Here, the configuration of the guide member 72 and the adjustment member 73 is configured as a ball screw device, and a rotary motor can be applied as the adjustment member 73. However, the present invention is not limited to the application of the ball screw device as the adjusting device 70, and various linear transfer mechanisms for moving the moving member 71 such as a linear motor, a transfer device that operates by hydraulic pressure or pneumatic pressure, and the like. Can be applied.

このような構成により、図５及び図６に示したように、調節部材７３の調節によって移動部材７１が移動する場合、反力伝達部材５０の第１部５１が支持部材３０に連結される位置が変更される。反力伝達部材５０は、第２部５２がベース１０に固定された状態で第１部５１の位置だけが変更されるので、反力伝達部材５０は第１部５１が移動する方向へ所定角度だけ撓む。従って、反力伝達部材５０には元の形状に復帰しようとする復原力が作用され、このように反力伝達部材５０に作用する復原力によって反力伝達部材５０を通してベース１０に伝達される反力の大きさ及び反力による支持部材３０の移動量が調節され、その結果、移送システムから発生する振動の大きさを調節することができる。   With such a configuration, as shown in FIGS. 5 and 6, when the moving member 71 is moved by adjusting the adjusting member 73, the position where the first portion 51 of the reaction force transmitting member 50 is connected to the support member 30. Is changed. Since the reaction force transmission member 50 is changed only in the position of the first portion 51 in a state where the second portion 52 is fixed to the base 10, the reaction force transmission member 50 has a predetermined angle in the direction in which the first portion 51 moves. Just bend. Accordingly, a restoring force that attempts to return to the original shape is applied to the reaction force transmission member 50, and the reaction force that is transmitted to the base 10 through the reaction force transmission member 50 by the restoring force that acts on the reaction force transmission member 50 in this way. The amount of movement of the support member 30 due to the magnitude of the force and the reaction force is adjusted, and as a result, the magnitude of vibration generated from the transfer system can be adjusted.

移送システムの可動部材４０に移送の対象となる目的物を取り付けた後、可動部材４０をフレーム２０の長手方向へ移動させると、可動部材４０の移動によって発生する反力の大きさは目的物及び可動部材４０の全体重量と比例する。移送システムの可動部材４０には常に同一重量の目的物が取り付けられず、条件に応じて様々な重量の目的物が交換して取り付けられる。従って、重量の相違する目的物が可動部材４０に交換して取り付けられる場合、可動部材４０を移動させる試運転を行いながらフレーム２０または移送システムの各部分に作用する振動を検出し、検出された振動に基づいて反力伝達部材５０の個数及び／又は剛性（弾性）を調節して、振動を最小化する過程を行う。   When the object to be transferred is attached to the movable member 40 of the transfer system and then the movable member 40 is moved in the longitudinal direction of the frame 20, the magnitude of the reaction force generated by the movement of the movable member 40 is the target and It is proportional to the total weight of the movable member 40. Objects having the same weight are not always attached to the movable member 40 of the transfer system, and objects having various weights are exchanged and attached according to conditions. Therefore, when an object having a different weight is exchanged and attached to the movable member 40, vibrations acting on each part of the frame 20 or the transfer system are detected while performing a trial operation for moving the movable member 40, and the detected vibrations are detected. The number of reaction force transmission members 50 and / or rigidity (elasticity) is adjusted based on the above, and a process of minimizing vibration is performed.

この時、重量の相違する目的物が可動部材４０に取り付けられる毎に反力伝達部材５０の個数を増減したり材料的剛性の相違する反力伝達部材５０を交換して設けるべきであると、工程に掛かる時間や複雑性が増加する問題が発生する。本発明の第２実施例及び後述する第３実施例に係る移送システムによれば、調節装置７０及び／又は８０を調節して反力伝達部材５０が支持部材３０に連結される位置及び／又は反力伝達部材５０がベース１０に連結される位置を調節することで反力伝達部材５０に作用する復原力を調節する簡単な過程を行って移送システムに発生する振動を調節することができるので、上述したように工程に掛かる時間や複雑性を大幅に増加させる問題を解消することができる。   At this time, every time an object having a different weight is attached to the movable member 40, the number of the reaction force transmission members 50 should be increased or decreased, or the reaction force transmission members 50 having different material rigidity should be replaced. There is a problem that the time and complexity of the process increase. According to the transfer system according to the second embodiment of the present invention and the third embodiment to be described later, the adjustment device 70 and / or 80 is adjusted and the reaction force transmission member 50 is connected to the support member 30 and / or By adjusting the position where the reaction force transmission member 50 is connected to the base 10, the vibration generated in the transfer system can be adjusted by performing a simple process of adjusting the restoring force acting on the reaction force transmission member 50. As described above, the problem of greatly increasing the time and complexity of the process can be solved.

以下、図７及び図８を参照して、本発明の第３実施例に係る移送システムに関して説明する。上述した本発明の第２実施例及び第３実施例で説明した部分と同一部分に対しては同一符号を付して説明を省略する。   Hereinafter, a transfer system according to a third embodiment of the present invention will be described with reference to FIGS. The same parts as those described in the second and third embodiments of the present invention are denoted by the same reference numerals, and the description thereof is omitted.

図７に示したように、本発明の第３実施例に係る移送システムは、反力伝達部材５０の第２部５２とベース１０との間に設けられて反力伝達部材５０の第２部５２がベース１０に連結される位置を調節する調節装置８０を更に含んで構成される。   As shown in FIG. 7, the transfer system according to the third embodiment of the present invention is provided between the second part 52 of the reaction force transmission member 50 and the base 10, and the second part of the reaction force transmission member 50. It further includes an adjusting device 80 for adjusting the position where 52 is connected to the base 10.

図８に示したように、調節装置８０は、反力伝達部材５０に固定される移動部材８１と、ベース１０に固定され移動部材８１に連結されて移動部材８１の移動を案内するガイド部材８２と、移動部材８１を移動させる調節部材８３と、を含んで構成される。ここで、ガイド部材８２及び調節部材８３の構成はボールスクリュー装置と同様に構成することが可能で、調節部材８３として回転モータを適用することができる。但し、本発明は調節装置８０としてボールスクリュー装置を適用することに限定されず、リニアモータ、油圧または空圧で動作する移送装置など、移動部材８１を移動させるための様々な直線移送機構を適用することができる。   As shown in FIG. 8, the adjusting device 80 includes a moving member 81 fixed to the reaction force transmitting member 50 and a guide member 82 fixed to the base 10 and connected to the moving member 81 to guide the movement of the moving member 81. And an adjustment member 83 that moves the moving member 81. Here, the configuration of the guide member 82 and the adjustment member 83 can be the same as that of the ball screw device, and a rotary motor can be applied as the adjustment member 83. However, the present invention is not limited to the application of the ball screw device as the adjusting device 80, and various linear transfer mechanisms for moving the moving member 81, such as a linear motor, a transfer device that operates by hydraulic pressure or pneumatic pressure, are applied. can do.

このような構成によって、調節部材８３の調節によって移動部材８１が移動する場合、反力伝達部材５０の第２部５２がベース１０に連結される位置が変更される。反力伝達部材５０は第１部５１が支持部材３０に固定された状態で第２部５２の位置だけが変更されるので、反力伝達部材５０は第２部５２が移動する方向へ所定角度だけ撓む。従って、反力伝達部材５０には元の形状に復帰しようとする復原力が作用するようになるので、このような反力伝達部材５０に作用する復原力によって反力伝達部材５０を通してベース１０に伝達される反力の大きさ及び反力による支持部材３０の移動量が調節され、よって、移送システムから発生する振動の大きさを調節することができる。   With such a configuration, when the moving member 81 moves by adjusting the adjusting member 83, the position where the second portion 52 of the reaction force transmitting member 50 is coupled to the base 10 is changed. Since the reaction force transmission member 50 is changed only in the position of the second portion 52 in a state in which the first portion 51 is fixed to the support member 30, the reaction force transmission member 50 has a predetermined angle in the direction in which the second portion 52 moves. Just bend. Accordingly, since the restoring force for returning to the original shape acts on the reaction force transmission member 50, the restoring force acting on the reaction force transmission member 50 causes the reaction force transmission member 50 to be applied to the base 10 through the reaction force transmission member 50. The magnitude of the transmitted reaction force and the amount of movement of the support member 30 due to the reaction force are adjusted, so that the magnitude of vibration generated from the transfer system can be adjusted.

このように、本発明の第３実施例に係る移送システムによれば、反力伝達部材５０の第２部５２がベース１０に連結される位置を調節する方法を利用して反力伝達部材５０に作用する復原力を調節することが可能で、それを利用して移送システムに発生する振動を最小化することができる効果がある。   As described above, according to the transfer system of the third embodiment of the present invention, the reaction force transmission member 50 is utilized by using the method of adjusting the position where the second portion 52 of the reaction force transmission member 50 is connected to the base 10. It is possible to adjust the restoring force acting on the motor, and it is possible to minimize the vibration generated in the transfer system by using the restoring force.

本発明の第３実施例に係る移送システムの効果は、上述した本発明の第２実施例に係る移送システムの効果と同様である。   The effect of the transfer system according to the third embodiment of the present invention is the same as the effect of the transfer system according to the second embodiment of the present invention described above.

以下、図９を参照して本発明に係るアレイテスト装置に関して説明する。   The array test apparatus according to the present invention will be described below with reference to FIG.

図９に示したように、本発明に係るアレイテスト装置は、ベース１０と、基板をテストするテスト部１２０と、基板をテスト部１２０へローディングするローディング部１３０と、テスト部１２０から基板をアンローディングするアンローディング部１４０と、を含んで構成される。   As shown in FIG. 9, the array test apparatus according to the present invention includes a base 10, a test unit 120 for testing a substrate, a loading unit 130 for loading a substrate onto the test unit 120, and an unloading substrate from the test unit 120. And an unloading unit 140 for loading.

テスト部１２０は、基板の電気的または光学的欠陥の可否をテストする役割を行うもので、ローディング部１３０によりローディングされた基板が配置されるテストプレート１２１と、テストプレート１２１上に配置された基板の電気的欠陥の可否をテストするテストモジュール１２２と、テストプレート１２１上に配置された基板の電極に電気信号を印加するためのプローブモジュール１２３と、を含んで構成される。   The test unit 120 plays a role of testing whether the substrate has an electrical or optical defect. The test plate 121 on which the substrate loaded by the loading unit 130 is disposed, and the substrate disposed on the test plate 121. A test module 122 for testing whether or not the electrical defect is present, and a probe module 123 for applying an electrical signal to an electrode of a substrate disposed on the test plate 121.

テストモジュール１２２は、テストプレート１２１の上側から基板の移送方向とは垂直である方向（Ｘ軸方向）に延長されるフレーム２０にＸ軸方向へ移動可能に設けられる。また、テストモジュール１２２は、フレーム２０の延長方向（Ｘ軸方向）に沿って複数備えられる。テストモジュール１２２は、テストプレート１２１上に配置された基板の上側に配置されて基板の欠陥の可否を検出する。テストモジュール１２２は、テストプレート１２１上に配置された基板に隣接するモジュレータ１２５と、モジュレータ１２５を撮像する撮像装置１２６と、を含んで構成されている。   The test module 122 is provided on the frame 20 extended from the upper side of the test plate 121 in a direction perpendicular to the substrate transfer direction (X-axis direction) so as to be movable in the X-axis direction. A plurality of test modules 122 are provided along the extending direction of the frame 20 (X-axis direction). The test module 122 is disposed on the upper side of the substrate disposed on the test plate 121 and detects whether the substrate is defective. The test module 122 includes a modulator 125 adjacent to the substrate disposed on the test plate 121 and an imaging device 126 that images the modulator 125.

このようなテスト部１２０は、反射方式と透過方式との２種類に大別される。反射方式の場合、光源がテストモジュール１２２と一緒に配置され、テストモジュール１２２のモジュレータ１２５に反射層が備えられており、光源から発光された光がモジュレータ１２５に入射した後モジュレータ１２５の反射層から反射される時に、反射される光の光量を測定することによって、基板の欠陥の可否を検出する。透過方式の場合は、光源がテストプレート１２１の下側に備えられており、光源から発光されてモジュレータ１２５を透過する光の光量を測定することで、基板の欠陥の可否を検出する。本発明に係るアレイテスト装置のテスト部１２０としては上述した反射方式及び透過方式を両方適用することができる。   Such a test unit 120 is roughly divided into two types, a reflection method and a transmission method. In the case of the reflection method, the light source is disposed together with the test module 122, and the modulator 125 of the test module 122 is provided with a reflection layer. After the light emitted from the light source is incident on the modulator 125, the light is emitted from the reflection layer of the modulator 125. When the light is reflected, whether the substrate is defective or not is detected by measuring the amount of light reflected. In the case of the transmission method, a light source is provided on the lower side of the test plate 121, and by measuring the amount of light emitted from the light source and transmitted through the modulator 125, the possibility of a substrate defect is detected. As the test unit 120 of the array test apparatus according to the present invention, both the reflection method and the transmission method described above can be applied.

テストモジュール１２２のモジュレータ１２５には、基板との間で発生する電場の大きさによって反射される光の光量（反射方式の場合）または透過される光の光量（透過方式の場合）を変更する電光物質層（electro-optical material layer）が備えられる。電光物質層は、基板とモジュレータ１２５に電気が印加される時に発生する電場によって特定物性が変更される物質により構成されて、電光物質層に入射される光の光量を変更する。このような電光物質層は、電場の大きさによって一定方向に配列される特性を有する物質で構成されて、これに入射する光を偏光させる高分子分散型液晶（ＰＤＬＣ、polymer dispersed liquid crystal）により構成される。   The modulator 125 of the test module 122 is an electric light that changes the amount of reflected light (in the case of the reflection method) or the amount of transmitted light (in the case of the transmission method) depending on the magnitude of the electric field generated between the substrate and the substrate. An electro-optical material layer is provided. The electroluminescent material layer is made of a material whose specific physical properties are changed by an electric field generated when electricity is applied to the substrate and the modulator 125, and changes the amount of light incident on the electroluminescent material layer. Such an electroluminescent material layer is made of a material having a characteristic of being arranged in a certain direction according to the magnitude of an electric field, and is formed by a polymer dispersed liquid crystal (PDLC) that polarizes light incident on the electroluminescent material layer. Composed.

ローディング部１３０は、テストの対象となる基板を支持すると共に基板をテスト部１２０へ移送させる役割を行い、アンローディング部１４０は、テスト終了した基板を支持すると共に基板をテスト部１２０から移送させる役割を行う。ローディング部１３０及びアンローディング部１４０には、所定間隔で離隔して配置されてその上部に基板が搭載される複数の支持プレート１５０と、基板を移送させるための基板移送ユニット１６０と、が備えられる。   The loading unit 130 supports the substrate to be tested and transports the substrate to the test unit 120. The unloading unit 140 supports the substrate that has been tested and also transports the substrate from the test unit 120. I do. The loading unit 130 and the unloading unit 140 include a plurality of support plates 150 that are spaced apart from each other at a predetermined interval and on which a substrate is mounted, and a substrate transfer unit 160 that transfers the substrate. .

また、本発明に係るアレイテスト装置は、フレーム２０にフレーム２０の長手方向（Ｘ軸方向）へ移動可能に設けられる支持部材３０と、支持部材３０にフレーム２０の長手方向（Ｘ軸方向）へ移動可能に設けられる可動部材４０と、ベース１０と支持部材３０との間を連結して可動部材４０の移動によって発生する反力をベース１０に伝達する反力伝達部材５０と、を更に含んで構成される。   Further, the array test apparatus according to the present invention includes a support member 30 provided on the frame 20 so as to be movable in the longitudinal direction of the frame 20 (X-axis direction), and the support member 30 in the longitudinal direction of the frame 20 (X-axis direction). It further includes a movable member 40 that is movably provided, and a reaction force transmission member 50 that connects the base 10 and the support member 30 to transmit a reaction force generated by the movement of the movable member 40 to the base 10. Composed.

また、ベース１０とフレーム２０との間には、防塵部材６０を具備することが好ましい。防塵部材６０としては、ゴムまたは合成樹脂のような弾性材質の部材、スプリング、油圧式または空圧式ダンパー、内部に所定圧力を有するチューブが適用される。このような防塵部材６０によって、ベース１０に伝達された反力がフレーム２０に再び伝達されることが防止される。   A dustproof member 60 is preferably provided between the base 10 and the frame 20. As the dust-proof member 60, a member made of an elastic material such as rubber or synthetic resin, a spring, a hydraulic or pneumatic damper, and a tube having a predetermined pressure inside is applied. Such a dustproof member 60 prevents the reaction force transmitted to the base 10 from being transmitted again to the frame 20.

支持部材３０は、フレーム２０にフレーム２０の長手方向に沿って延長して設けられるガイド２１に沿ってスライド移動できるように設けられる。   The support member 30 is provided so as to be slidable along a guide 21 provided on the frame 20 so as to extend along the longitudinal direction of the frame 20.

可動部材４０は、テストモジュール１２２と連結されてテストモジュール１２２をフレーム２０の長手方向（Ｘ軸方向）へ移動させる役割を行う。可動部材４０と支持部材３０との間にはリニアモータ、ボールスクリュー装置、油圧または空圧で動作する移送装置など、可動部材４０を移動させるための多様な直線移送機構が備えられる。   The movable member 40 is connected to the test module 122 to move the test module 122 in the longitudinal direction (X-axis direction) of the frame 20. Various linear transfer mechanisms for moving the movable member 40 are provided between the movable member 40 and the support member 30 such as a linear motor, a ball screw device, and a transfer device that operates by hydraulic pressure or pneumatic pressure.

反力伝達部材５０は、本発明の第１実施例で説明した通り、その両端のうちの一方は支持部材３０に固定され、他方はベース１０に固定される。また、反力伝達部材５０の両端のうちの一方は本発明の第２実施例または第３実施例で説明した調節装置７０または調節装置８０を通して支持部材３０またはベース１０に連結される。   As described in the first embodiment of the present invention, one of the reaction force transmission members 50 is fixed to the support member 30 and the other is fixed to the base 10. In addition, one of both ends of the reaction force transmission member 50 is connected to the support member 30 or the base 10 through the adjusting device 70 or the adjusting device 80 described in the second embodiment or the third embodiment of the present invention.

反力伝達部材５０の個数及び／又は剛性を調節することによって反力伝達部材５０を通して伝達される力の大きさ及び支持部材３０の移動量を調節することが可能で、それにより、移送システム及びアレイテスト装置全体の振動を低減することができる。   By adjusting the number and / or rigidity of the reaction force transmission member 50, the magnitude of the force transmitted through the reaction force transmission member 50 and the amount of movement of the support member 30 can be adjusted, and thereby the transfer system and The vibration of the entire array test apparatus can be reduced.

以上、本発明の各実施例で説明した技術的思想はそれぞれ独立して、または、相互に組み合わせて実施することができる。   As described above, the technical ideas described in the embodiments of the present invention can be implemented independently or in combination with each other.

１０ ベース、２０ フレーム、２１ ガイド、３０ 支持部材、３１ ガイド、３２ 固定子、４０ 可動部材、４２ 可動子、５０ 反力伝達部材、５１ 第１部、５２ 第２部、６０ 防塵部材、７０ 調節装置、７１ 移動部材、７２ ガイド部材、７３ 調節部材、８０ 調節装置、８１ 移動部材、８２ ガイド部材、８３ 調節部材、１２０ テスト部、１２１ テストプレート、１２２ テストモジュール、１２３ プローブモジュール、１２５ モジュレータ、１２５ 後モジュレータ、１２６ 撮像装置、１３０ ローディング部、１４０ アンローディング部、１５０ 支持プレート、１６０ 基板移送ユニット 10 base, 20 frame, 21 guide, 30 support member, 31 guide, 32 stator, 40 movable member, 42 movable member, 50 reaction force transmission member, 51 first part, 52 second part, 60 dustproof member, 70 adjustment Device, 71 moving member, 72 guide member, 73 adjusting member, 80 adjusting device, 81 moving member, 82 guide member, 83 adjusting member, 120 test part, 121 test plate, 122 test module, 123 probe module, 125 modulator, 125 Rear modulator, 126 imaging device, 130 loading unit, 140 unloading unit, 150 support plate, 160 substrate transfer unit

Claims (8)

ベースと、
上記ベースに支持されるフレームと、
上記フレームに移動可能に支持される支持部材と、
上記支持部材に移動可能に設けられる可動部材と、
上記支持部材に連結される第１部と上記ベースに連結される第２部とを有する反力伝達部材と、
を含むことを特徴とする、移送システム。 Base and
A frame supported by the base;
A support member supported movably on the frame;
A movable member movably provided on the support member;
A reaction force transmission member having a first part coupled to the support member and a second part coupled to the base;
A transfer system comprising: 上記ベースと上記フレームとの間には防塵部材が備えられることを特徴とする、請求項１に記載の移送システム。   The transfer system according to claim 1, wherein a dustproof member is provided between the base and the frame. 上記反力伝達部材の第１部と上記支持部材との間に設けられて、上記反力伝達部材の第１部が上記支持部材に連結される位置を調節する調節装置を更に含むことを特徴とする、請求項１または２に記載の移送システム。   An adjustment device is further provided between the first part of the reaction force transmission member and the support member, and adjusts a position where the first part of the reaction force transmission member is connected to the support member. The transfer system according to claim 1 or 2. 上記反力伝達部材の第２部と上記ベースとの間に設けられて、上記反力伝達部材の第２部が上記ベースに連結される位置を調節する調節装置を更に含むことを特徴とする、請求項１または２に記載の移送システム。   An adjustment device is further provided between the second part of the reaction force transmission member and the base, and adjusts a position where the second part of the reaction force transmission member is connected to the base. The transfer system according to claim 1 or 2. ベースと、
上記ベースに支持されて長手方向に延長されるフレームと、
上記フレームに上記フレームの長手方向へ移動可能に設けられる支持部材と、
上記支持部材に上記フレームの長手方向へ移動可能に設けられる可動部材と、
上記可動部材に連結されて基板の欠陥をテストするテストモジュールと、
上記支持部材及び上記ベースに連結される反力伝達部材と、
を含むことを特徴とするアレイテスト装置。 Base and
A frame supported by the base and extended in the longitudinal direction;
A support member provided on the frame so as to be movable in the longitudinal direction of the frame;
A movable member provided on the support member so as to be movable in the longitudinal direction of the frame;
A test module connected to the movable member for testing a defect of the substrate;
A reaction force transmission member coupled to the support member and the base;
An array test apparatus comprising: 上記ベースと上記フレーム間には防塵部材が備えられることを特徴とする、請求項５に記載のアレイテスト装置。   The array test apparatus according to claim 5, wherein a dustproof member is provided between the base and the frame. 上記支持部材と上記反力伝達部材との間には、上記支持部材に上記反力伝達部材が連結される位置を調節する調節装置が備えられることを特徴とする、請求項５または６に記載のアレイテスト装置。   The adjusting device for adjusting a position at which the reaction force transmission member is coupled to the support member is provided between the support member and the reaction force transmission member. Array test equipment. 上記ベースと上記反力伝達部材との間には、上記ベースに上記反力伝達部材が連結される位置を調節する調節装置が備えられることを特徴とする、請求項５または６に記載のアレイテスト装置。   The array according to claim 5 or 6, wherein an adjustment device for adjusting a position where the reaction force transmission member is coupled to the base is provided between the base and the reaction force transmission member. Test equipment.
JP2010253682A 2010-09-17 2010-11-12 Transfer system and array test device including teh same Pending JP2012064912A (en)

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