CN101995680B - Alignment stage for LCD tester - Google Patents
Alignment stage for LCD tester Download PDFInfo
- Publication number
- CN101995680B CN101995680B CN2009101784316A CN200910178431A CN101995680B CN 101995680 B CN101995680 B CN 101995680B CN 2009101784316 A CN2009101784316 A CN 2009101784316A CN 200910178431 A CN200910178431 A CN 200910178431A CN 101995680 B CN101995680 B CN 101995680B
- Authority
- CN
- China
- Prior art keywords
- platform
- lcd
- worktable
- support
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Liquid Crystal (AREA)
Abstract
The present invention relates to an alignment stage for a LCD tester, including a worktable, a XY theta table and a mobile station; wherein, the worktable is provided with a light deflection panel and a white light lamp on a front face of a rectangle terne, and a suction tube on a side face of the terne; the XY theta station is provided with a plurality of XY theta modules combined with the terne of the worktable on a front face of a support, and a main suction box connected with the suction tube on a back face of the support; the mobile station is connected with a bottom face of the support of the XY theta station to make the XY theta station to move in a Z-axis direction. The alignment stage is provided with the movable station on the bottom face of the XY theta station, the movable station can make the XY theta station to move in the Z-axis direction, so as to prevent the XY theta station and the worktable from vibrating in moving, and to prevent the support of the XY theta station from overload; heat generated by the white light lamp of the worktable is discharged outwards from the XY theta station, so as to prevent a detection unit from deformation due to the heat generated by the white light lamp.
Description
Technical field
The present invention relates to a kind of calibration console of LCD checkout equipment, particularly, the calibration console that relates to following a kind of LCD checkout equipment, the calibration console of this LCD checkout equipment is provided with transfer table in the bottom surface of XY θ platform, so that XY θ platform is moved along Z-direction, and the heat transferred XY θ platform that the white light of worktable is produced by conduit, and heat is discharged to the outside from XY θ platform.
Background technology
In general, by LCD(Liquid Crystal Display, LCDs) plate, organic EL(Electroluminescence, electroluminescence) display screen made such as plate will just can complete through multiple working procedure, in each procedure, for example, wait in assembling procedure or the repairing operation to undesirable element in welding, need to carry out luminance test step that the luminance of display screen is tested, all keep the luminescent properties more than the certain standard to guarantee the outbound product.
Prior art is as follows for the test process of LCD plate.
After the staff supplies to supply unit with respect to ground one-tenth level with LCD plate to be tested, so that supply unit rotation, so that supply unit tilts with certain pitch angle (making the staff can most accurately confirm the angle of LCD plate to be tested) with respect to ground, and then, the LCD plate that will supply to supply unit by handover section moves to test department, the LCD plate is in test department and test department conducting, thereby can the sending/receiving electric signal, simultaneously, the white light of LCD plate is luminous, light is dispersed to the outside by the LCD plate, in this process, the staff is by visual inspection LCD plate, to the whole form and aspect of LCD plate, bad pixel rate etc. is confirmed, judges whether the LCD plate is qualified.
In addition, can also carry out shading treatment to the cavity inboard of worktable that camera head is installed after, the LCD plate that is installed in the worktable upside is detected in the robotization mode by this camera head.
As shown in Figures 1 and 2, general LCD checkout equipment is provided with for the test section 2 that LCD plate 10 is detected in body 1 one sides, and is provided with for the handling part 7 that LCD plate 10 is supplied with and reclaimed in a side of test section 2.
In addition, the LCD checkout equipment also possess can move left and right carrier 9, this carrier 9 can 7 be transported to test section 2 from the handling part with LCD plate 10, or is transported to handling part 7 from test section 2.
Calibration console 4 is made of worktable 4-1 and XY θ platform 4-3, and wherein, worktable 4-1 is comprised of Polarizer 4-11 and white light 4-13; XY θ platform 4-3 is arranged on the rear of worktable 4-1, so that worktable 4-1 is positioned with respect to detector cells 3, and worktable 4-1 is connected with detector cells 3.
Handling part 7 is provided with at a certain angle (for example, 60 degree) information desk 8 of tilting of the LCD plate that will return from charging appliance (not shown).
In addition, the place ahead of test section 2 also is provided with and can along up and down or the microscope 6 of move left and right, with when the staff checks LCD plate 10 by naked eyes, if note abnormalities, can carries out more accurate affirmation to it.
The testing process of being undertaken by above-mentioned existing LCD checkout equipment can be simply described as follows.
7 charging appliance (not diagram) is transported to information desk 8 to LCD plate 10 from the handling part, and information desk 8 tilts with certain angle, and sends LCD plate 10 to carrier 9.Then, carrier 9 is transported to test section 2 with LCD plate 10.After the LCD plate 10 of needs detection is positioned at test section 2, XY θ platform 4-3 will advance from the rear, LCD plate 10 on the carrier 9 is carried out vacuum suction fixes, and so that the pad of fixing LCD plate 10 (not have diagram) be connected on the pin (not illustrating) of detector cells 3.
As mentioned above, after LCD plate 10 and detector cells 3 conductings, signal of video signal by detector cells 3 input regulations, simultaneously, the illumination of white light 4-13 will be by the external image signal input apparatus, be that pictcure generator (pattern generator) changes the multiple image of formation, at this moment, whether the staff can qualified according to the image discriminating LCD plate that presents.
But, the calibration console of above-mentioned existing LCD checkout equipment forms on XY θ platform so that the structure that worktable moves along Z-direction, this need to be provided with mobile device (motor, ball-screw etc.) for travelling table at XY θ platform, but also to be combined with worktable in the front of XY θ platform, therefore, the center of gravity of XY θ platform is positioned at the top, and this can produce vibration when travelling table, make simultaneously the support overload of XY θ platform, cause the distortion of shape or position.
In addition, the worktable of above-mentioned existing LCD checkout equipment is discharged the heat that white light produces to a side of LCD checkout equipment, therefore, can cause because the problem on deformation of the probe unit that high heat causes.
Summary of the invention
The present invention proposes for addressing the above problem, its objective is the calibration console that a kind of New type LCD checkout equipment is provided, this calibration console arranges transfer table by the bottom surface at XY θ platform, XY θ platform can be moved along Z-direction, thereby avoided XY θ platform and worktable vibration-generating when mobile, and can prevent the support overload of XY θ platform.
Another object of the present invention provides a kind of calibration console of New type LCD checkout equipment, after the heat that this calibration console produces the white light of worktable passes to XY θ platform by conduit, be discharged to the outside from XY θ platform, thereby prevent the metaboly of the probe unit that heat that white light produces causes.
To achieve these goals, the calibration console of LCD checkout equipment of the present invention comprises worktable, XY θ platform and transfer table; Wherein, described worktable is provided with Polarizer and white light in the front of rectangle terneterneplate, is provided with exhaust tube in the side of described terneterneplate; Described XY θ platform is provided with a plurality of XY θ modules of being combined with the terneterneplate of worktable in the front of support, be provided with the main exhaust chamber that is connected with the exhaust tube of described worktable at the back side of described support; Described transfer table is connected with the support bottom surface of described XY θ platform, thereby described XY θ platform is moved along Z-direction; Described transfer table comprises substrate, driven unit, linear motion guided, position transducer and cable bearer assembly, wherein, described substrate is made by metal material, and it is tabular to be quadrilateral, and the upper surface broad ways of this substrate is protruded and is formed with a plurality of guide rails; Described driven unit is arranged on the middle part of this substrate along the Width of described substrate, and is combined with the support bottom surface of described XY θ platform, so that this XY θ platform support moves along Z-direction; Described linear motion guided has the rectilinear motion bootstrap module, and these rectilinear motion bootstrap modules are separately positioned on the guide rail of described substrate, and is combined with the support bottom surface of described XY θ platform; Described position transducer is for detection of the amount of movement of the support of described XY θ platform, and is arranged on the sensor guide rail, and this sensor guide rail then is arranged on the both sides along its length of described substrate by sensor stand; Described cable bearer assembly is arranged on the both sides along its length of substrate, to transmit signal to described worktable, XY θ platform and transfer table.
The inside of the exhaust tube of above-mentioned worktable has fan.
The suction side of the main exhaust chamber of above-mentioned XY θ platform is connected with the exhaust tube of worktable by flexible conduit, and the exhaust side of this main exhaust chamber is connected with the hair-dryer of outside.
Above-mentioned XY θ platform also be provided with in the position corresponding with position transducer can the shift position sensor sensing equipment.
Above-mentioned transfer table also is formed with adjusting module be used to the backing positions of adjusting described XY θ platform at the guide rail of substrate and the end along sound stage width degree direction between the guide rail.
Above-mentioned driven unit comprises: electric rotating machine; Ball-screw, an end of this ball-screw is connected with the turning axle of electric rotating machine; Parts of bearings, this parts of bearings is the other end of ball-screw fixedly; Movable plate, this movable plate is arranged on the ball-screw, and is combined with the support of XY θ platform, and this movable plate is along with the rotation of ball-screw is mobile with described ball-screw, thus so that the support-moving of XY θ platform.
The two ends of above-mentioned LM guide also are provided with detent, to be used for the position of restriction LM bootstrap module.
The calibration console of LCD checkout equipment involved in the present invention has said structure, bottom surface at described XY θ platform is provided with transfer table, this transfer table can make XY θ platform move along Z-direction, thereby vibration-generating when having avoided XY θ platform and movable workbench, and can prevent the support overload of XY θ platform, after the heat that the white light of worktable produces passes to XY θ platform by conduit, be discharged to the outside from XY θ platform, thereby can prevent the metaboly of the probe unit that heat that white light produces causes.
Description of drawings
Fig. 1 and Fig. 2 are the structural representations of general LCD checkout equipment;
Fig. 3 is the exploded perspective view of the LCD calibration console structure that the present invention relates to;
Fig. 4 is the front elevation of the LCD calibration console structure that the present invention relates to;
Fig. 5 is the side view of the LCD calibration console structure that the present invention relates to;
Fig. 6 is the oblique view of the XY θ platform structure of the LCD calibration console that the present invention relates to;
Fig. 7 is the oblique view of the transfer table structure of the LCD calibration console that the present invention relates to.
Reference numeral:
200: worktable 210: terneterneplate
220: exhaust tube 230: fan
300:XY θ platform 310: support
320:XY θ module 330: main exhaust chamber
400: transfer table 410: substrate
420: driven unit 430:LM guide
440: position transducer
Embodiment
Be elaborated below in conjunction with the structure of accompanying drawing to the calibration console of the LCD checkout equipment that the present invention relates to.
In the following description, for well-known correlation function or structure, if think it is specifically described and may causes confusion to understanding main design of the present invention, will save detailed description thereof.In addition, the term that the below uses defines on function of the present invention basis, might be different because of user's intention or custom.Therefore, its definition should be understood as the basis take the whole content of this instructions.
Fig. 3 is the exploded perspective view of the LCD calibration console structure that the present invention relates to, Fig. 4 is the front elevation of the LCD calibration console structure that the present invention relates to, Fig. 5 is the oblique view of the LCD calibration console structure that the present invention relates to, Fig. 6 is the oblique view of the XY θ platform structure of the LCD calibration console that the present invention relates to, and Fig. 7 is the oblique view of the transfer table structure of the LCD calibration console that the present invention relates to.
To shown in Figure 7, the calibration console 100 of the LCD checkout equipment that the present invention relates to comprises worktable 200, XY θ platform 300 and transfer table 400 such as Fig. 3.
In addition, XY θ platform 300 is the same with existing structure in the front of support 310 to be provided with five XY θ modules 320, terneterneplate 210 combinations of each XY θ module 320 and worktable 200 are provided with the main exhaust chamber 330 that is connected with the exhaust tube 220 of worktable 200 at the back side of support 310.The suction side of the main exhaust chamber 330 of XY θ platform 300 is connected with the exhaust tube 220 of worktable 200 by flexible conduit 340, and exhaust side is connected by the hair-dryer of flexible conduit 340 with the outside.XY θ platform 300 also is provided with sensing equipment 360 in the position corresponding with the position transducer 440 of following transfer table 400, and this sensing equipment 360 and position transducer 440 are in conjunction with also this position transducer 440 being moved.
In addition, transfer table 400 comprises substrate 410, driven unit 420, LM guide 430, position transducer 440, cable bearer assembly 450 and position adjusting type modules 460.
Wherein, substrate 410 is made by metal material, and it is tabular to be quadrilateral, and the upper surface broad ways of this substrate 410 is protruded and is formed with a plurality of guide rails 411.Substrate 410 also is formed be used to the accepting hole 413 of installing rheme and put adjusting module 460.
LM guide 430 has bootstrap module 431, these bootstrap modules 431 are separately positioned on the guide rail of substrate 410, and be combined with support 310 bottom surfaces of XY θ platform 300, the two ends of LM guide 430 also are provided with detent 433, to be used for the position of restriction LM bootstrap module 431.The upper surface of the movable plate 427 of the upper surface of LM bootstrap module 431 and driven unit 420 is at grade.
Position adjusting type modules 460 forms
Shape, this position adjusting type modules 460 is used for the position of the support 310 of adjustment XY θ platform 300, the bottom surface of this position adjusting type modules 460 is fixedly installed in the guide rail 411 and the accepting hole 413 between the guide rail 411 that is formed at substrate 410, upper surface is combined with the back side of the support 310 of XY θ platform 300, and central portion is provided with position adjusting screw 461.
With reference to the accompanying drawings the principle of work of the calibration console of the LCD checkout equipment that the present invention relates to is elaborated.
At first, same as the prior art, the charging appliance (not diagram) of (Fig. 1 7) is transported to information desk (among Fig. 1 8) to LCD plate 10 from the handling part, and information desk 8 tilts at a certain angle, and sends LCD plate (among Fig. 2 10) to carrier (among Fig. 2 9).
Then, carrier 9 is transported to test section (among Fig. 1 2) with LCD plate 10.After LCD plate 10 to be measured was positioned on the test section 2, transfer table 400 started, so that worktable 200 and XY θ platform 300 advance along Z-direction.
That is, the electric rotating machine 421 in the driven unit 420 of transfer table 400 begins rotation, makes ball-screw 423 rotation, thereby movable plate 427 is moved, and the support 310 that finally makes XY θ platform 300 is along with LM guide 430 moves along Z-direction.
At this moment, detect the amount of movement of the support 310 of XY θ platform 300 by position transducer 440, thereby driven unit 420 is controlled.
Then, the XY θ module of XY θ platform 300 320 starts, with the terneterneplate 210 of adjusting worktable 200 in rectangular coordinate system X, Y and the position of θ.
Fixed L CD plate 10 begins to detect under above-mentioned state, and at this moment, the fan 230 of exhaust tube 220 inside of worktable 200 begins to start, and the heat of white light generation is passed to the main exhaust chamber 330 of XY θ platform 300 by exhaust tube 220 and flexible conduit 340.
Like this, the hot gas of main exhaust chamber 330 hair-dryer 350 that will be connected by the exhaust side with main exhaust chamber 330 is discharged to the outside.
Below only the preferred embodiment of the present invention is illustrated, the present invention can also carry out multiple modification, and adopts various ways to implement.The present invention is not limited to embodiment described above, and all variations, the equivalent form of value and alternative form in the described technological thought scope of the present invention of claims all should belong to the scope of claim of the present invention.
Claims (7)
1. the calibration console of a LCD checkout equipment, the calibration console of this LCD checkout equipment comprises worktable, XY θ platform and transfer table; Wherein, described worktable is provided with Polarizer and white light in the front of rectangle terneterneplate, is provided with exhaust tube in the side of described terneterneplate; Described XY θ platform is provided with a plurality of XY θ modules of being combined with the terneterneplate of described worktable in the front of the support of this XY θ platform, be provided with the main exhaust chamber that is connected with the exhaust tube of described worktable at the back side of described support, it is characterized in that, described transfer table is connected with the support bottom surface of described XY θ platform, and described XY θ platform is moved along Z-direction; Described transfer table comprises substrate, driven unit, linear motion guided, position transducer and cable bearer assembly, wherein, described substrate is made by metal material, and it is tabular to be quadrilateral, and the upper surface broad ways of this substrate is protruded and is formed with a plurality of guide rails; Described driven unit is arranged on the middle part of this substrate along the Width of described substrate, and is combined with the support bottom surface of described XY θ platform, so that this XY θ platform support moves along Z-direction; Described linear motion guided has the rectilinear motion bootstrap module, and these rectilinear motion bootstrap modules are separately positioned on the guide rail of described substrate, and is combined with the support bottom surface of described XY θ platform; Described position transducer is for detection of the amount of movement of the support of described XY θ platform, and is arranged on the sensor guide rail, and this sensor guide rail then is arranged on the both sides along its length of described substrate by sensor stand; Described cable bearer assembly is arranged on the both sides along its length of substrate, to transmit signal to described worktable, XY θ platform and transfer table.
2. the calibration console of LCD checkout equipment according to claim 1 is characterized in that, the inside of the exhaust tube of described worktable has fan.
3. the calibration console of LCD checkout equipment according to claim 1 is characterized in that, the suction side of the main exhaust chamber of described XY θ platform is connected with the exhaust tube of described worktable by flexible conduit, and the exhaust side of this main exhaust chamber is connected with the hair-dryer of outside.
4. the calibration console of LCD checkout equipment according to claim 1 is characterized in that, described XY θ platform also is provided with the sensing equipment that can move described position transducer in the position corresponding with described position transducer.
5. the calibration console of LCD checkout equipment according to claim 1 is characterized in that, described transfer table also is formed with adjusting module be used to the position of the support of adjusting described XY θ platform at an end of the guide rail of described substrate and the broad ways between the guide rail.
6. the calibration console of LCD checkout equipment according to claim 1 is characterized in that, described driven unit comprises: electric rotating machine; Ball-screw, an end of this ball-screw is connected with the turning axle of described electric rotating machine; Parts of bearings, the other end of the fixing described ball-screw of this parts of bearings; Movable plate, this movable plate is arranged on the described ball-screw, and is combined with the support of described XY θ platform, and this movable plate is mobile with described ball-screw along with the rotation of described ball-screw, thus so that the support-moving of described XY θ platform.
7. the calibration console of LCD checkout equipment according to claim 1 is characterized in that, the two ends of described linear motion guided also are provided with detent, with the position that is used for limiting described rectilinear motion bootstrap module.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020090079668A KR101017626B1 (en) | 2009-08-27 | 2009-08-27 | Alignment stage for lcd tester |
| KR10-2009-0079668 | 2009-08-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101995680A CN101995680A (en) | 2011-03-30 |
| CN101995680B true CN101995680B (en) | 2013-04-24 |
Family
ID=43777959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101784316A Expired - Fee Related CN101995680B (en) | 2009-08-27 | 2009-09-24 | Alignment stage for LCD tester |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101017626B1 (en) |
| CN (1) | CN101995680B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102184167B1 (en) * | 2020-04-29 | 2020-11-27 | 가온솔루션 주식회사 | Work stage for inspection equipment |
| CN113092019B (en) * | 2021-03-30 | 2023-12-22 | 深圳市善之能科技有限公司 | High-definition display screen production finished product testing system and testing method |
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| CN2627501Y (en) * | 2003-05-26 | 2004-07-21 | 由田新技股份有限公司 | Equipment for automatic detection of display quality after lighting up of LCD panel |
| CN1661465A (en) * | 2004-02-24 | 2005-08-31 | 乐金电子（沈阳）有限公司 | Structure of suction/exhaust bars in LCD projector |
| CN2727794Y (en) * | 2004-07-07 | 2005-09-21 | 晶彩科技股份有限公司 | Automatic optical detecting bench for TFT LCD panel process production line |
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| CN1971343A (en) * | 2006-12-05 | 2007-05-30 | 友达光电股份有限公司 | Checking platform and checking method using the same |
| KR20070103093A (en) * | 2006-04-18 | 2007-10-23 | (주)구일엔지니어링 | Inspection mechanism for a liquid crystal display panel |
| KR20080016295A (en) * | 2006-08-18 | 2008-02-21 | 주식회사 파이컴 | Inspecting stage of apparatus for inspecting of liquid crystal display panel |
| CN101388356A (en) * | 2007-09-14 | 2009-03-18 | 住友重机械工业株式会社 | Stage apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH06151532A (en) | 1992-11-13 | 1994-05-31 | Tokyo Electron Yamanashi Kk | Prober |
| JP4702083B2 (en) * | 2006-02-10 | 2011-06-15 | ウシオ電機株式会社 | XYθ moving stage |
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2009
- 2009-08-27 KR KR1020090079668A patent/KR101017626B1/en not_active IP Right Cessation
- 2009-09-24 CN CN2009101784316A patent/CN101995680B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1263693A (en) * | 1998-02-07 | 2000-08-16 | 洛氏两合公司里塔尔工厂 | Switch cupboard with device for cooling hot air inside |
| CN2627501Y (en) * | 2003-05-26 | 2004-07-21 | 由田新技股份有限公司 | Equipment for automatic detection of display quality after lighting up of LCD panel |
| CN1661465A (en) * | 2004-02-24 | 2005-08-31 | 乐金电子（沈阳）有限公司 | Structure of suction/exhaust bars in LCD projector |
| CN2727794Y (en) * | 2004-07-07 | 2005-09-21 | 晶彩科技股份有限公司 | Automatic optical detecting bench for TFT LCD panel process production line |
| CN1731203A (en) * | 2005-03-09 | 2006-02-08 | 飞而康公司 | LCD panel inspection apparatus and inspection method thereof |
| CN1916734A (en) * | 2005-08-18 | 2007-02-21 | 飞而康公司 | Back light apparatus |
| CN1776526A (en) * | 2005-11-10 | 2006-05-24 | 中国科学院光电技术研究所 | Warm-up flash two-purpose nano impression device |
| CN1967319A (en) * | 2005-11-18 | 2007-05-23 | 飞而康公司 | Checking platform of checking device of LCD panel |
| KR20070103093A (en) * | 2006-04-18 | 2007-10-23 | (주)구일엔지니어링 | Inspection mechanism for a liquid crystal display panel |
| KR20080016295A (en) * | 2006-08-18 | 2008-02-21 | 주식회사 파이컴 | Inspecting stage of apparatus for inspecting of liquid crystal display panel |
| CN1971343A (en) * | 2006-12-05 | 2007-05-30 | 友达光电股份有限公司 | Checking platform and checking method using the same |
| CN101388356A (en) * | 2007-09-14 | 2009-03-18 | 住友重机械工业株式会社 | Stage apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101017626B1 (en) | 2011-02-28 |
| CN101995680A (en) | 2011-03-30 |
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