JP2002016127A - Chuck top - Google Patents

Abstract

PROBLEM TO BE SOLVED: To securely attract the edge of a display panel to a suction groove. SOLUTION: A chuck top includes a base member having one or above grooves opened to a panel receiving face for sucking the panel receiving face receiving the display panel and the display panel so that they can be released and a plurality of pusher mechanisms pressing the edge of the display panel received by the panel receiving face to the panel receiving face so that it can be released.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chuck top for receiving a display panel such as a liquid crystal display panel, and more particularly, to a chuck top used for an inspection apparatus for conducting a current test of a display panel.

[0002]

2. Description of the Related Art A display panel such as a liquid crystal display panel in which a plurality of electrodes are arranged at edges corresponding to two adjacent sides of a quadrangle is generally used to determine whether or not it has been manufactured according to specifications. Take the test. This type of energization test generally includes one or more probe units including a plurality of probes having contacts pressed against electrodes of a display panel,
The inspection is performed using an inspection apparatus (prober) in which an inspection stage (measurement stage) for receiving a display panel to be inspected is arranged on the main body.

A probe unit has a needle-type probe (probe needle) having a needle tip as a contact, and a plurality of wires formed on one surface of an electrically insulating film or a plurality of wires formed on the tip. Either one or both of the film-like probes (probe elements) using the projected electrode as a contact is used as a probe.

[0006] The inspection stage has a chuck top that receives a square display panel and vacuum-releasably releasably receives the display panel. The chuck top has a panel receiving surface for receiving the display panel, and a suction groove for sucking the received display panel. The suction groove is open to the panel receiving surface, and sucks an edge of the display panel by being connected to a suction source. Each electrode of the display panel is pressed by a contact of the probe and is energized in that state.

However, in this kind of conventional chuck top, the display panel is mounted on the chuck top, and the suction groove is simply connected to the suction source in that state. Therefore, the display panel is warped by the edge of the display panel. If there is a gap between the edge of the display panel and the panel receiving surface of the chuck top, the edge of the display panel will not be attracted to the suction groove, and the display panel will be displaced with respect to the chuck top by slight vibration. Would.

[0006]

As described above, when the display panel is displaced with respect to the chuck top, the relative position between the electrode of the display panel and the contact of the probe changes.
The electrode and the contact do not contact correctly, so that a correct test cannot be performed.

Therefore, in a chuck top for a display panel, it is important that the edge of the display panel is securely sucked into the suction groove.

[0008]

A chuck top according to the present invention is a base member having a panel receiving surface for receiving a display panel, and is opened to the panel receiving surface to releasably adsorb the display panel. It includes a base member having the above-mentioned suction groove, and a plurality of pusher mechanisms for releasably pressing the edge of the display panel received on the panel receiving surface against the panel receiving surface.

After the display panel is received on the panel receiving surface, the edge is pressed against the panel receiving surface by the pusher mechanism. Thus, even if a gap exists between the edge of the display panel and the panel receiving surface of the chuck top, the gap disappears due to the pressing force of the pusher mechanism. As a result, the edge of the display panel is reliably sucked into the suction groove, and the displacement of the display panel with respect to the chuck top is prevented.

A swing cylinder mechanism having a cylinder having an axis extending in a direction intersecting the panel receiving surface and a piston received therein, the piston being angularly rotated about the axis with respect to the cylinder by a fluid. A swing cylinder mechanism that moves in the direction of the axis while the piston moves, and a resilient mechanism that is attached to the tip of the shaft to releasably press the edge of the display panel against the panel receiving surface. And a deformable holding arm. This simplifies the pusher mechanism.

The holding arm is attached to the distal end of the piston so as to be displaced with the displacement of the piston, and is an elastically deformable plate-like arm. An elastic rubber plate pressed against the edge of the panel. By doing so, the edge of the display panel is reliably pressed against the panel receiving surface by the elastic deformation of the plate-like arm and the rubber plate, and the display panel is reliably attracted to the chuck top.

When the edge of the display panel is pressed against the panel receiving surface by the rubber plate,
The plate arm may be received in the cylinder in a bent state. In this case, since the plate-like arm is more elastically deformed, the edge of the display panel is reliably pressed by the panel receiving surface, and the display panel is reliably sucked by the chuck top.

Each of a pair of opposing sides of the rectangle has one
The above pusher mechanism may be provided. Also,
The square may be a rectangle, and the pair of sides may be short sides of the rectangle. Further, the base member may have a rectangular opening, and the suction groove may be formed around the opening.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 7, a chuck top 34, which will be described in detail later, is used in an inspection apparatus 10. FIG. The inspection apparatus 10 is used as a visual lighting inspection apparatus in which a liquid crystal display panel in which liquid crystal is sealed is used as a display panel 12 to be inspected. The display panel 12 has a rectangular planar shape, and although not shown, two opposing long sides (X sides) of the rectangle and one between the two long sides.
Each of the two short sides (Y sides) has a plurality of electrodes. However, the side on which the electrodes of the display panel are formed differs depending on the type of the display panel.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An inspection apparatus 10 is formed in a housing shape by a main body frame in which a plurality of long channel members are assembled, and a plurality of panels detachably attached to the main body frame. A body 14 is included. Body 12
Is formed as an obliquely upward inclined surface portion 16.

As shown in FIG. 1, the main body 14 has a left area serving as an inspection section (ie, a measurement section) 20 of the display panel 12 and a loader section 22 for delivering the display panel 12. It is divided into the right area. Body 14
Is a rectangular opening 2 similar to the shape of the display panel 12.
The inspection section 20 and the loader section 22 are provided on the inclined surface section 16, respectively, and the light shielding plate 28, which will be described in detail later, is provided on the loader section 22.

As shown in FIGS. 3 to 8, an inspection stage (measurement stage) 30 is disposed in the main body 12. The inspection stage 30 connects the display panel 12 to the main body 14.
The transfer stage 32 is selectively moved to the inspection unit 20 and the loader unit 22 in a state of being received obliquely upward substantially parallel to the inclined surface unit 16. The display panel 12 is placed on the inspection stage 30 such that the longitudinal direction thereof is the left-right direction.
Can be received. Display panel 12 for inspection stage 30
Is carried out by the operator in the loader section 22.

In the following, in order to simplify the description and facilitate understanding, the horizontal direction and the oblique vertical direction (oblique front and rear) in a plane parallel to the display panel 12 received by the inspection stage 30 will be described. Directions) are called an X direction and a Y direction, respectively, and the direction perpendicular to the display panel 12 is Z direction.
It is called direction. The axes extending in the X, Y, and Z directions are referred to as an X axis, a Y axis, and a Z axis, respectively.

The inspection stage 30 includes a chuck top 34 for receiving the display panel 12, a backlight unit 36 to which the chuck top 34 is attached, and a chuck top 34 and the backlight unit 36 which are arranged in a plane parallel to the display panel 12. Alignment stage 38 that moves two-dimensionally and rotates angularly around the Z axis
And The inspection stage 30 and the transport stage 32 will be described later in detail.

As shown in FIGS. 1 to 4, the inspection unit 20 includes a plurality of inspection (measurement) probe units 40 and a corresponding probe unit 40 corresponding to each probe unit 40 in the Z direction. Z moving device 42 for moving
Are arranged in the opening 24 of the inclined surface portion 16. The probe unit 40 is disposed at each of the sides of the display panel 12 corresponding to the side where the electrodes are provided.

In the example shown in the figure, the probe unit 40 and the Z moving device 42 have two long sides (X
Side) and one short side (Y side). Also,
The Z moving device 42 is arranged on the other short side (Y side). However, the probe unit 40 and the Z moving device 42
Are arranged on one side, two adjacent sides or three sides depending on the arrangement position of the electrodes of the display panel 12 to be inspected and the type of inspection.

In each probe unit 40, a plurality of probe blocks 44 are mounted on a rectangular plate-like probe base 46, and the probe base 46 is arranged on a plate-like movable table (base plate) 48 provided in the moving device 42. ing. For the movable table 48, the moving device 42
This will be described later in detail.

Each probe block 44 has a plurality of probes assembled in parallel below it. Each probe may be a pogo pin type probe having a contact at the tip, a needle type or blade type probe (probe needle) having a needle tip as a contact, or a plurality of probes formed on one surface of an electrically insulating film. A film-shaped probe (probe element) using the tip of the wiring or the protruding electrode formed at the tip as a contact. One of such probe blocks is disclosed in JP-A-10-132.
Known ones described in No. 853 can be used.

Each probe base 46 of the probe unit 40 arranged on the X side can be moved in the X direction by a linear guide 50 extending in the X direction so that at least the probe block 44 projects from the movable table 48 into the main body 14. The X drive mechanism 52 adjusts the position in the X direction.

Each linear guide 50 is a commercially available general linear guide having a guide rail extending in the X direction and a slide guide fitted to the guide rail so as to be movable in the longitudinal direction. In the illustrated example, the guide rail is mounted on the movable table 48, and the slide guide is mounted on the probe base 46. However, the guide rail may be assembled to the probe base 46 and the slide guide may be assembled to the movable table 48.

Each probe unit 40 arranged on the Y side
Is that at least the probe block 44 is
Probe base 4 so as to project from
At 6, it is assembled to the movable table 48 by the spacer 46 a.

Each X drive mechanism 52 includes an X-axis motor 54 mounted on the movable table 48, a lead screw 56 extending in the X direction connected to the X-axis motor 54, a lead nut 58 mounted on the probe base 46, and a lead screw 56.

Each X drive mechanism 52 includes a lead screw 5
The probe base 46 is displaced in the X direction with respect to the movable table 48 by rotating the lead nut 6 in the X direction by rotating the 6 by the X-axis motor 54.
Thereby, the position of the contact of the probe unit 40 arranged on the long side with respect to the contact of the probe unit 40 arranged on the short side of the rectangle can be adjusted.

Probe unit 40 arranged on Y side
Has a television camera 60 at each end in the longitudinal direction, and each probe unit 40 arranged on the X side.
Has a television camera 60 at an end opposite to the side of the probe unit 40 arranged on the Y side.

Each television camera 60 is connected to the display panel 12.
Is arranged on the probe base 46 so as to photograph the alignment mark formed on the probe base 46. The output signal of the television camera 60 is used for relative positioning (alignment) between the display panel 12 and the probe unit 40. The positioning is performed by moving the display panel 12 by the alignment stage 38 of the inspection stage 30 so that the alignment mark of the display panel 12 is located at a predetermined coordinate position within the field of view of the television camera 60.

Each of the Z moving devices 42 includes a movable table 48 in addition to the movable table 48 described above.
And a Z-movement mechanism 64 for moving the movable table 48 in the first direction.

Each movable table 48 is formed of a plate-like member extending in the direction of the corresponding side of the rectangle, and is supported by the linear guide 62 and the Z moving mechanism 64 in parallel with the inclined surface 16 of the main body 14. .

Each linear guide 62 is a general linear guide including a guide rail 66 extending in the Z direction and a slide guide 68 fitted to the guide rail 66 so as to be movable in the Z direction. The guide rail 66 is mounted on the surface forming the opening 24, and the slide guide 68 is mounted on the movable table 48.

Each Z moving mechanism 64 can be formed by a hollow motor 70 disposed on the surface forming the opening 24 and a lead screw 72 screwed into the hollow portion of the hollow motor 70. The hollow motor 70 is mounted on the inclined surface 16 so that the rotation axis extends in the Z direction.
The lead screw 72 is rotatably mounted on the movable table 48 so as to extend in the Z direction.

During standby, when moving the inspection stage 30 and when transferring the display panel 12 to the inspection stage 30, Z
The moving mechanism 64 separates each probe unit 40 from the inspection stage 30 and the display panel 12 received thereon.

However, when the inspection stage 30 is moved to the inspection unit 20 with the display panel 12 received and the positioning of the display panel 12 and the probe unit 40 is performed in this state, the Z movement mechanism 64 uses the probe. Unit 40
Is brought closer to the inspection stage 30 at least once.

When the positioning is completed, the Z moving mechanism 64 moves the probe unit 40 to the inspection stage 30.
To press the contact of the probe against the electrode of the display panel 12. An energization test is performed in this state.

When the energization test is completed, the Z moving mechanism 64
Moves the probe unit 40 in the Z direction with respect to the inspection stage 30 and retracts the probe unit 40 to the standby position.

As shown in FIG. 1, the operation panel 74 is
And an optical microscope 76 used as an auxiliary device for visual inspection, and in the case of an automatic lighting inspection device, used for displaying an image of the display panel 12 taken by an imaging device such as a television camera. A television receiver (monitor) 78 is provided.

The operation panel 74 allows the operator to set the inspection conditions such as the overdrive amount of the probe, the contact pressure between the electrode and the contact, the operation start command of the inspection stage and the probe unit, the electrode of the display panel and the probe This is for inputting a control command such as a relative positioning command with respect to the contactor, and thereby operating the inspection apparatus 10.

As shown in FIG. 1 and FIG.
In addition, a plurality of re-contact command switches 80, 82, 84, 86 for generating a re-contact command for causing at least the electrode and the contact to come into contact again and to perform the inspection again are provided near the opening 24.

The re-contact command switch 80 generates a contact command again after the relative positioning between the electrode and the contact is performed again. When the switch 80 is operated, the inspection device 10 makes the electrode and the contactor come into contact again, and performs the energization test again. Therefore, the possibility that the display panel is determined as a non-defective product is increased, and the possibility that the non-defective product is determined as a defective product is reduced.

The re-contact command switch 82 generates a contact command again with the electrode after causing the relative positioning of the electrode and the contact to be performed again and increasing the relative contact pressure between the electrode and the contact. When the switch 82 is operated, the inspection device 1
In the case of 0, after the relative positioning between the electrode and the contact is performed again, the electrode and the contact are brought into contact again, and the energization test is performed again. Therefore, the possibility that the display panel is determined as a non-defective product is higher, and the possibility that the non-defective product is determined as a defective product is lower.

The re-contact command switch 84 causes the second switch and the relative positioning of the electrode and the contact to be performed again, and moves the display panel 12 to the probe unit 40 in the X direction.
After the displacement in the direction, the contact command is generated again. When the switch 84 is operated, the inspection apparatus 10 performs the relative positioning between the electrode and the contact again, and the display panel 12
Is displaced by a predetermined amount with respect to the probe unit 40 in the X direction, the electrodes are brought into contact with the contacts again, and the current test is performed again. Therefore, the possibility that the display panel is determined as a non-defective product is higher, and the possibility that the non-defective product is determined as a defective product is lower.

The re-contact command switch 86 generates a contact command again after the relative positioning between the electrode and the contact is performed again and the display panel is displaced in the Y direction with respect to the probe unit. When the switch 86 is operated, the inspection apparatus 10 performs relative positioning of the electrode and the contact again, displaces the display panel 12 by a predetermined amount with respect to the probe unit 40 in the Y direction, and then makes contact with the electrode. The contact is made again, and the energization test is performed again. Therefore, the possibility that the display panel is determined to be good is higher,
There is a lower possibility that a non-defective product is determined as a defective product.

The operation of the switches 80, 82, 84, and 86 is different from the case where the control panel 74 is operated and the above-mentioned command is generated, since these switches are provided near the inspection section of the main body. Extremely easy. Therefore, it is possible to easily input a re-contact command.

In order to execute the above-mentioned operation by the re-contact command switch, the inspection apparatus 10, for example, switches the switches 80, 82, 84, 86 after the probe unit 40 is separated from the inspection stage 30 by the Z moving device 42. After confirming which one has been lowered, the above operation is executed according to the switch that has been lowered.

As shown in FIGS. 3 to 9, the chuck top 34 is a work table (that is, a vacuum chuck) for removably holding the display panel 12 by vacuum. The chuck top 34 has a rectangular opening 9 that allows light from the backlight unit 36 to reach the display panel 12.
0, and a plurality of suction grooves 92 around the opening 90 for sucking the display panel 12 in a vacuum.

The upper end of the opening 90 is closed by a transparent plate 94 such as a glass plate (see FIG. 9). Transparent plate 94
Is a panel receiving surface 96 for receiving the display panel 12 together with the upper end surface of the chuck top 34 itself. Each suction groove 92 is open to the panel receiving surface 96. In the illustrated example, the chuck top 34 has two suction grooves 92 respectively corresponding to two adjacent sides of a virtual rectangle and extending along the corresponding sides.

However, the virtual rectangle has one, three, or four suction grooves 92 individually corresponding to one, three, or four sides and extending along the corresponding side. Is also good. Further, the suction groove on each side may be continuous in the direction of the side, or may be divided into a plurality. Further, a plurality of suction grooves may be provided in a plurality of rows on each side.

The backlight unit 36 has a function of illuminating the display panel 12 received on the chuck top 34 from behind, so that one or more light sources such as white lamps are provided in a box-shaped case. Accommodating.

As shown in FIGS. 6 and 7, the chuck top 34 and the backlight unit 36 are
8, a space 100 is formed therebetween in the Z direction. The light shielding plate 28 is attached to the mounting tool 102 (FIG. 7).
(See FIG. 2), and is mounted in a cantilever shape inside the main body 14, and is maintained parallel to the display panel 12 at the position of the space 100 in the Z direction.

The light shielding plate 28 starts to be received in the space 100 near the loader section 22 when the inspection stage 30 is moved to the loader section 22, and when the inspection stage 30 is completely positioned on the loader section 22, the light shielding plate 28 is shown in FIG. As shown in FIG.

The light-shielding plate 28 starts to be separated from the space 100 when the inspection stage 30 starts to be separated from the loader unit 22, and is completely separated from the space 100 by completely separating the inspection stage 30 from the loader unit 22. .

Thus, when the inspection stage 30 is moved to the loader section 22, light from the backlight unit 36 toward the chuck top 34 is blocked by the light shielding plate 28. On the other hand, the inspection stage 30 is
2, the light from the backlight unit 36 goes to the chuck top 34 without being blocked by the light shielding plate 28. For this reason, the chuck top 34
When the display panel 12 is attached to or detached from the user, the light from the backlight unit 36 is prevented from being directed to the outside of the main body 14 even if the backlight unit 36 is not turned off. Exposure to strong light is prevented.

The alignment stage 38 includes X, Y, Z
Of two axes (X, Y axes) and an angular rotation about the remaining one axis (Z axis) of the three axes of the above two axes parallel / one for giving to the rotary movement table. It is an axis turning table device. Such devices are, for example,
It is described in JP-A-11-245128.

When a two-axis parallel / single-axis turning table device is used as the alignment table 38 for the inspection stage 30, a θ stage for rotating the rotary table angularly around the Z axis and a Y-axis direction for the rotary table. The height dimension of the inspection stage in the Z-axis direction is significantly smaller than that of an inspection stage that uses, as alignment stages, a Y-stage for moving the rotary stage and an X-stage for moving the rotary table in the X-axis direction.

The transfer stage 32 is disposed on a support plate 104 disposed obliquely upward in the main body 14 and supports the alignment stage 38.

As shown in FIGS. 5, 8 and 9, the inspection stage 30 also includes two sets of stoppers 106 for positioning the display panel 12 with respect to the chuck top 34, and the display panel 12 Press multiple first
And a plurality of second pusher mechanisms 110 that releasably press the edge of the display panel 12 against the panel receiving surface 96. The stopper 106 and the first and second pusher mechanisms 108 and 110 are both arranged on the chuck top 34.

One set of stoppers 106 is spaced apart in the Y direction so as to receive the lower end face of the display panel 12.
It is attached to the panel receiving surface 96 by a screw member. For this reason, even if the panel receiving surface 96 is inclined, the lower end surface of the display panel 12 placed on the chuck top 34 abuts against one of the stoppers 106, thereby preventing the display panel 12 from dropping from the chuck top 34. Is done.

On the other hand, the other set of stoppers 106
The panel receiving surface 96 is spaced apart in the X direction so as to receive one end surface of the display panel 12 in the left-right direction.
Are attached by screw members.

In the illustrated example, one first pusher mechanism 108 is provided on each of the X side and the Y side.
The first pusher mechanism 108 on the X side is arranged on the opposite side (upper side) of one set of the stoppers 106 in the X direction. The first pusher mechanism 108 on the Y side is
In the X direction, it is arranged on the side opposite to the other set of stoppers 106.

As shown in FIGS. 5 and 10, each first pusher mechanism 108 includes a reversible rotating mechanism 112 supported by the chuck top 34 and a direction perpendicular to the display panel 12 by the rotating mechanism 112 ( And a rocking body 114 that is angularly rotated about an axis extending in the Z direction) and pushes the display panel 12.

Each rotation mechanism 112 has an output rotation axis Z
It is supported by the chuck top 34 so as to extend in the direction. As each rotation mechanism 112, a rotary cylinder mechanism, a rotary solenoid mechanism, an electric motor, or the like can be used.

Each oscillating body 114 has an arm 116 attached at one end to an output rotating shaft of a rotating mechanism 112.
And a pin 118 attached to the other end of the arm 116 so as to slightly project from the panel receiving surface of the chuck top 34 in the Z direction.

Each of the first pusher mechanisms 108 rotates the swinging body 114 by a predetermined angle in one direction when the rotation mechanism 112 rotates by a predetermined angle in one direction, and moves the display panel 12 to the corresponding stopper 106. Push. This allows
The display panel 12 is positioned with respect to the inspection stage 30, and is maintained in that state.

When the rotation mechanism 112 is reversed by a predetermined angle, the first pusher mechanism 108 releases the pressing of the display panel 12 against the corresponding stopper 106 by rotating the swinging body 114 by the predetermined angle. .

As shown in FIGS. 5 and 9, each second pusher mechanism 110 includes a cylinder 126 having an axis (Z axis) extending in a direction intersecting with the panel receiving surface 96 and a piston 128 received by the cylinder 126. A cylinder mechanism 120 includes a plate-shaped arm 122 attached to a tip of a piston 128 of the cylinder mechanism 120, and a rubber plate 124 disposed at a tip of the plate-shaped arm 122.

The cylinder mechanism 120 has its piston 12
A swing cylinder mechanism 8 moves in the direction of the axis while rotating angularly around the axis with respect to the cylinder 126 by the fluid. In the illustrated example, two cylinder mechanisms 120 are arranged at both ends in the X direction at an interval in the Y direction.

The plate-like arm 122 is made of an elastically deformable leaf spring, and has a piston 12 at one end.
8 is attached to the upper end. The rubber plate 124 is made of an elastically deformable material such as silicone rubber, and is mounted on the lower surface of the other end of the plate arm 122 so as to be able to contact the edge of the display panel 12.

As shown in FIG. 9A, the piston 128
Is protruding from the cylinder 126, the plate-like arm 12
2 are separated from the display panel 12 in the X direction and the Z direction.

When the piston 128 is retracted into the cylinder 126 in the state shown in FIG.
9B, the plate-shaped arm 122 is lowered while being rotated as shown in FIG. 9B, so that the rubber plate 124 is moved downward.
2 is moved above the edge.

When the piston 128 is further retracted into the cylinder 126, the plate arm 122 is further lowered as shown in FIG. 9C, and the rubber plate 124 contacts the edge of the display panel 12.

When the piston 128 is further retracted into the cylinder 126, the plate arm 122 is further lowered as shown in FIG. 9 (D), so that the rubber plate 124 receives the edge of the display panel 12 from the panel. Press against surface 96. In this state, the plate arm 122 is slightly bent by the elastic deformation, and the rubber plate 124 is elastically deformed.

As a result, the edge of the display panel 12 is X
When the suction groove 92 or all of the suction grooves 92 are connected to a suction source, the edge of the display panel 12 is pressed by the suction groove 92 or the opening of the suction groove 92 located at one end in the direction. Adsorbed in the groove 92 or all the suction grooves 92,
It is stably maintained in that state.

When the pressing of the edge of the display panel 12 is released, each second pusher mechanism 110
8 is protruded from the cylinder 126 to operate in reverse.

The suction groove 92 is connected to a suction source from when the inspection stage 30 receives the display panel to when the inspection is completed and the inspection stage 30 reaches the loader section 22. However, when the display panel is attached to or detached from the inspection stage 30, the suction groove 92 is separated from the suction source.

The first pusher mechanism 108 pushes the display panel 12 against the stopper 106 only when positioning the display panel 12 relative to the inspection stage. The second pusher mechanism 110 is connected to the display panel 12.
Only when the display panel 12 is sucked into the suction groove 92.
Is pressed against the panel receiving surface 96. However, both the first and second pusher mechanisms 108 and 110
At other times, the display panel may be pressed.

However, when the display panel is attached to or detached from the inspection stage 30, all the suction grooves 92 are separated from the suction source, and all the first pusher mechanisms 108 release the pressing of the display panel 12 against the stopper 106. All the second pusher mechanisms 110 release the pressing of the display panel 12 against the panel receiving surface 96.

In the inspection apparatus 10, the inspection stage 30
Is located on the loader unit 22, the inspected display panel 12 is removed from the inspection stage 30, and the uninspected display panel 12 is placed on the inspection stage 30. This delivery work is performed manually.

When the delivery of the display panel 12 is completed, the inspection device 10 starts the following operation by operating a start switch (not shown) provided in the inspection unit 20 of the main body 12.

First, the display panel 12 is pressed by the stopper 96 by the first pusher mechanism 108, and the display panel is positioned with respect to the inspection stage 30.

Next, the edge of the display panel 12 is pressed against the panel receiving surface 96 by the second pusher mechanism 110, and all the suction grooves 92 are connected to the suction source.
Thus, the display panel 12 is held on the inspection stage 30.

Next, the inspection stage 30 is moved to the inspection section 20 and positioned in the inspection section 20 with respect to the probe unit 40. During this alignment, the display panel 12 is moved relative to the probe unit 40 by the chuck stage 34 and the backlight unit 36 being moved by the alignment stage 38. Further, each probe unit 40 is a Z moving device 42.
Is moved once or more with respect to the inspection stage 30.

Next, each probe unit 40 is moved toward the inspection stage 30 by the Z moving device 42,
The contact of the probe is pressed against the electrode of the display panel 12. In this state, electricity is supplied to the display panel, and a visual lighting test is performed by the operator.

As a result of the inspection, if any defect is found, any one of the re-contact command switches is pressed down, so that at least the alignment is performed again, and then the contact and the electrode are re-contacted to perform the re-inspection. .

When the inspection is completed, each probe unit 4
After 0 is separated from the inspection stage 30 by the Z moving device 42, the inspection stage 30 is moved toward the loader unit 22.

The above steps are repeated for each display panel 12.

Since the inspection apparatus 10 moves the probe unit 40 individually in the Z direction with respect to the display panel 12, a moving mechanism for relatively moving the display panel 12 and the probe unit 40 in the Z direction is provided by an inspection stage. The inspection unit 30 does not need to be provided on the probe unit 30, so that the height of the inspection stage 30 in the Z direction is reduced.
The position of the display panel 12 with respect to 0 is stabilized.

Further, since each probe unit 40 is moved in the Z direction with respect to the display panel 12 by the corresponding moving device 42, the moving amount of the probe unit 40 in the Z direction by the moving device 42 is set for each probe unit 40. Therefore, the difference between the overdrive amount and the stylus pressure between the probes can be reduced as compared with the case where all the probes are arranged on the common probe base 46.

Further, when each probe unit 40 arranges a plurality of probe blocks 40 on the probe base 46 and sets overdrive and stylus pressure for each probe probe base 46, overdrive and stylus pressure are set for each probe block 44. The setting work of overdrive and stylus pressure is easier than in the case of setting.

On the other hand, in the conventional inspection device in which the electrodes of the display panel are pressed against the contacts of the probe by the inspection stage, the overdrive is insufficient if the height positions of the contacts of the probe do not exactly match. Probe to be present. As a result, the contact pressure (needle pressure) between the contact of the probe and the electrode of the display panel becomes insufficient, and an accurate test result cannot be obtained.

If all the probes are subjected to an overdrive exceeding a predetermined value in order to prevent this, a large pressing force is required, and some probes have an excessive overdrive. As a result, the life of the probe is shortened, and the electrodes of the display panel may be damaged.

According to the inspection device 10, since the Z moving device 42 is arranged not only on the probe unit 40 side but also for each probe unit 40, the above-mentioned problem of the conventional inspection device can be solved. You.

The present invention can be applied not only to a chuck top for an apparatus for manually transferring display panels, but also to a chuck top for an apparatus using an automated apparatus such as a transfer robot. Also, the present invention
It can be applied not only to a chuck top for a visual lighting device that performs a visual inspection with the naked eye of a person, but also to a chuck top for an automatic lighting inspection device that automatically performs using an imaging device, an image processing device, and the like. The present invention can also be applied to a chuck top for an apparatus capable of selectively performing both an automatic inspection and a visual inspection. Further, the present invention is not limited to a chuck top for an apparatus for inspecting a display panel in an oblique state, as well as other types of chuck tops for an apparatus for inspecting a display panel in an almost horizontal state. It can also be applied to devices.

The present invention is applicable not only to a liquid crystal display panel in which liquid crystal is sealed, but also to a glass substrate on which a thin film transistor is formed.
Like the plasma display panel, the present invention can be applied to a chuck top for an inspection device of another display panel such as a display panel other than the liquid crystal display panel. Further, the present invention can be applied not only to a chuck top for an inspection apparatus but also to a chuck top for another apparatus for processing a display panel.

The present invention is not limited to the above embodiment. The present invention can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a front view showing an example of an inspection apparatus using one embodiment of a chuck top according to the present invention.

FIG. 2 is a diagram showing details of an inspection unit of the inspection apparatus shown in FIG.

FIG. 3 is a cross-sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is a sectional view taken along line 4-4 in FIG. 2;

FIG. 5 is a view showing details of an inspection stage of the inspection apparatus shown in FIG. 1, which uses one embodiment of the chuck top.

FIG. 6 is a schematic sectional view showing an arrangement state of an inspection stage.

FIG. 7 is a sectional view taken along line 7-7 in FIG. 6;

8 is a view of an inspection stage in the state shown in FIG. 7;

FIG. 9 is a view for explaining the operation of the second pusher mechanism.

FIG. 10 is a diagram showing one embodiment of a first pusher mechanism.

FIG. 11 is a diagram showing a re-contact command switch;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Display panel 14 Main body 16 Inclined surface part 20 Inspection part 22 Loader part 24, 26 Opening of main body 30 Inspection stage 32 Transport stage 34 Chuck top 36 Backlight unit 38 Alignment stage 40 Probe unit 42 Z movement device 44 Probe block 46 Probe base 110 Pusher mechanism 120 Cylinder mechanism (swing cylinder mechanism) 122 Plate arm 124 Rubber plate 126 Cylinder 128 Piston

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (Reference) G09F 9/00 352 G01R 31/28 K 5G435 (72) Inventor Yoshiyuki Ando 2-6-8 Kichijoji Honmachi, Musashino City, Tokyo No. Within Japan Micronics Co., Ltd. (72) Inventor Isao Ueki 2-6-8 Kichijoji Honcho, Musashino-shi, Tokyo F-term within Japan Micronics Co., Ltd. (Reference) AA00 AB01 AE01 AE03 AE04 AF02 AF04 AL03 2H088 FA11 FA17 FA30 MA20 5F031 CA05 HA24 HA27 LA15 MA33 5G435 AA17 BB06 BB12 KK05 KK10

Claims (7)

[Claims] A base member having a panel receiving surface for receiving a display panel, the base member having one or more suction grooves opened to the panel receiving surface so as to releasably adsorb the display panel; A plurality of pusher mechanisms for releasably pressing an edge of the display panel received on the panel receiving surface against the panel receiving surface. 2. Each of the pusher mechanisms includes a cylinder having an axis extending in a direction intersecting with the panel receiving surface, and a swing cylinder mechanism having a piston received by the cylinder. A swing cylinder mechanism that rotates in the direction of the axis while rotating angularly around the shaft; and a shaft of the shaft to releasably press an edge of the display panel against the panel receiving surface with movement of the piston. The chuck top according to claim 1, further comprising an elastically deformable pressing arm assembled to the distal end. 3. An elastically deformable plate-shaped arm assembled to a tip of the piston so as to be displaced with the displacement of the piston, and the pressing arm is disposed at the tip of the plate-shaped arm. The chuck top according to claim 2, further comprising: an elastic rubber plate pressed against an edge of the display panel. 4. The piston according to claim 3, wherein when the edge of the display panel is pressed against the panel receiving surface by the rubber plate, the plate arm is bent and received by the cylinder. Chuck top. 5. The chuck top according to claim 1, wherein one or more pusher mechanisms are provided on each of a pair of opposing sides of the quadrangle. 6. The chuck top according to claim 5, wherein the square is a rectangle, and the pair of sides is a short side of the rectangle. 7. The base member has a rectangular opening, and the suction groove is formed around the opening.
The chuck top according to any one of claims 1 to 6.