JP2001255232A - Inspection device for display panel substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the cost by dispensing with a television camera with high resolution and high precision and to easily respond to the inspection of a panel substrate with different dimension. SOLUTION: This inspection device inspects a panel substrate by moving line sensors in a second direction crossing at right angles with a first direction in a surface of the panel substrate and a closed port using the two or more line sensors with a plurality of photoelectric transducers arranged approximately linearly in a first direction, while energizing to the panel substrate from a probe unit. When inspecting the panel substrates with different dimensions, the relative position of the line sensors in the first direction is changed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a display panel substrate such as a liquid crystal substrate, and more particularly to an apparatus for inspecting a panel substrate before being mounted on a device such as a frame of a display device.

[0002]

2. Description of the Related Art There has been proposed an apparatus for inspecting a completed liquid crystal display panel in a state of being mounted on a device such as a frame of a display device (for example, Japanese Patent Application Laid-Open No. H11-142286). However, since this inspection apparatus is an apparatus for inspecting a liquid crystal display panel mounted on a device, a liquid crystal display panel glass substrate on which a TFT is formed, a liquid crystal panel substrate in which liquid crystal is sealed, or the like before mounting on the device. Panel panel cannot be inspected.

[0003] Various inspection apparatuses for testing a panel substrate before mounting it on equipment have been proposed and put into practical use. These inspection devices include a so-called visual inspection device that checks the quality of the panel substrate with the naked eye of an operator, and a television camera that photographs the surface of the panel substrate and processes the captured image signal to determine the quality of the panel substrate. It is roughly divided into a so-called automatic inspection device for checking.

[0004] The visual inspection is performed by the operator by visually checking the surface of the panel substrate under inspection to judge the quality of the panel substrate. In contrast,
The automatic inspection device uses a television camera and an image processing technology, and thus has a high processing capability.

[0005]

However, the conventional automatic inspection apparatus requires a high-resolution and high-precision television camera having a pixel density higher than the pixel density of the panel substrate to be inspected, so that the apparatus itself is expensive. . Further, when inspecting a panel substrate having different dimensions, it is necessary to replace the television substrate with a television camera having a field of view, resolution and accuracy according to the dimensions of the panel substrate, and the replacement operation is troublesome.

Therefore, it is important for an automatic panel substrate inspection apparatus to eliminate the need for a high-resolution and high-precision television camera to reduce the cost and to easily respond to inspection of panel substrates having different dimensions. .

[0007]

The inspection apparatus according to the present invention comprises:
An inspection stage that receives a display panel substrate, an imaging device that photographs the panel substrate received by the inspection stage from a side opposite to the inspection stage, and a plurality of contacts that are in contact with electrode portions of the panel substrate. And a probe unit. The image capturing apparatus includes two or more line sensors in which a plurality of photoelectric conversion elements that convert light into an electric signal are arranged in a first direction parallel to the panel substrate, and the line sensors are disposed in a plane parallel to the panel substrate. And a sensor moving mechanism for moving in at least a second direction intersecting the first direction. The two or more line sensors are arranged in the sensor moving mechanism so as to be adjacent to each other in the second direction and to be capable of changing a relative position in the first direction.

[0008] The line sensor is moved by the sensor moving mechanism, and during that time, an electric signal is generated by each photoelectric conversion element to photograph the panel substrate. The quality of the panel substrate is automatically determined by an appropriate means such as an electric circuit using a computer based on an electric signal obtained from the line sensor.

Since the line sensor has a plurality of photoelectric conversion elements such as CCD elements arranged linearly, a high-resolution and high-precision line sensor can be obtained easily and inexpensively as compared with a television camera. For this reason, an inspection apparatus using such a line sensor is inexpensive compared to the cost required for a high-resolution and high-precision television camera, even if the cost required for the moving mechanism for the line sensor is considered.

On the other hand, using a long single line sensor,
An inspection apparatus that changes the effective range of the line sensor in accordance with the dimensions of the panel substrate to be inspected includes, for example, a plurality of electrodes on at least three sides of a rectangle and a dimension smaller than the length of the line sensor. In a special case, such as when inspecting a panel substrate that has or when the alignment of the panel substrate is based on the center of the panel substrate,
Some probe units hinder the movement of the line sensor in the second direction, making inspection impossible.

However, when two or more line sensors whose relative positions in the first direction can be changed are used, when inspecting a small-sized panel substrate, the relative positions of the line sensors in the first direction are inspected. Since it can be changed according to the dimensions of the panel substrate to be formed, it is possible to easily cope with the inspection of panel substrates having different dimensions.

The inspection apparatus may further include the inspection stage,
The apparatus may include a main body in which the imaging device and the probe unit are arranged, and the main body may open the panel substrate so as to be visible from the probe unit side. With this configuration, the same inspection apparatus can be used as a so-called visual inspection apparatus in which an operator views the panel substrate through the opening.

The sensor moving mechanism includes a first moving mechanism for moving the line sensor in the first direction and a second moving mechanism for rotating the line sensor angularly about an axis extending in the first direction. And a third mechanism for moving the line sensor in a third direction perpendicular to the panel substrate.
And a moving mechanism. By doing so, the angle of the line sensor with respect to the panel substrate is changed,
Inspection of the panel substrate can be performed. In addition, the line sensor can be moved to a position that does not hinder the visual inspection during the visual inspection, although the line sensor can be brought close to the panel substrate during the automatic inspection.

The sensor moving mechanism may further include a fourth moving mechanism for relatively moving the two or more line sensors in the second direction. However, instead of including such a moving mechanism for the base 4, the two or more line sensors may be manually moved relatively in the second direction.

Each of the line sensors may be assembled to the sensor moving mechanism by a sensor holder. Further, the sensor holder may be supported by the sensor moving mechanism so as to be movable in the first direction.

The inspection apparatus may further include an optical microscope for viewing the panel substrate from the side of the probe unit. In this way, even in the case of a visual inspection, the panel substrate can be inspected with higher accuracy using an optical microscope.

[0017] The inspection stage may be inclined to receive the panel substrate obliquely. If you do this,
Since the operator can visually observe the panel substrate from obliquely above, visual inspection work is facilitated.

In a preferred embodiment, the probe unit includes a plate-like base having a rectangular opening, and a plurality of probe blocks attached to the base, and each probe block includes a plurality of contacts. The contacts are arranged in parallel, and are arranged on the base such that the tips of the contacts protrude from the opening toward the panel substrate.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 9, an inspection apparatus 10 is used as an automatic and visual lighting inspection apparatus for using a completed rectangular liquid crystal display panel as a panel substrate 12 to be inspected. The panel substrate 12 has a rectangular shape, and has a plurality of electrode portions at edges corresponding to a pair of adjacent sides of the rectangle.

The inspection apparatus 10 includes a main body 14 having an upper front surface inclined obliquely upward. The main body 14 is formed in a housing shape by a main body frame in which a plurality of long channel members are assembled, and a plurality of panels detachably attached to the main body frame.

The front portion of the main body 14 has a left area serving as an inspection section (ie, a measurement section) 16 of the panel substrate 12 and a relay section (ie, a transfer section) 1 for the panel substrate 12.
And a right region set at 8. The rear part of the main body 14 is a cassette setting part 20. A central portion in the front-rear direction of the main body 14 is a loader unit 22 that transports a panel substrate between the relay unit 18 and the cassette installation unit 20.

As shown in FIGS. 3 to 5, in the inspection section 16, a measurement probe unit 24 is disposed on an inclined surface portion. The probe unit 24 attaches a plurality of probe blocks 26 to a rectangular plate-like probe base 28,
The probe base 28 is mounted inside the base plate 30.

Each probe block 26 is disclosed in
It is a known device described in Japanese Patent Publication No. 132853, and has a plurality of contacts (that is, probes) 32 assembled in parallel below it. The probe base 28 has a rectangular opening 34 slightly larger than the panel substrate 12 to be inspected at the center. Probe block 26
Is attached to the edge of the opening 34 so that the contact 32 projects from the opening 34 into the main body 14.

The base plate 30 is an obliquely upward plate-like member forming the inclined surface of the main body 14 in the illustrated example, and has an opening 36 in the inspection section 16. The probe unit 24 is assembled to the base plate 30 such that at least the probe block 26 projects from the opening 36 of the base plate 30 into the main body 14.

The inspection section 16 further includes an operation panel 38 for controlling the operation of the inspection apparatus 10, an optical microscope 40 for observing the panel substrate 12 conveyed to the inspection section 16,
A television receiver 42 for displaying an image of the panel substrate 12 under inspection is arranged (see FIG. 1). The inspection unit 16 is releasably covered by a cover 44 arranged on the main body 14.

The cover 44 is made of a material that prevents external radio waves or light from entering the main body 14.
In addition, the front side of the inclined surface portion of the main body 14 is movably attached to the inspection unit 16 and the relay unit 18. Cover 44
Has an opening 46 for the operator to see inside the inspection section 16, and the opening 46 is closed by a glass 48. The glass 48 is a semi-transparent glass that prevents external radio waves or light from entering the main body 14, but allows light inside the main body 14 to exit the main body 14.

The inspection section 16 is further provided with an inspection stage (that is, a measurement stage) 50 (see FIGS. 2 and 4). The inspection stage 50 receives the panel substrate 12 in an obliquely upward direction substantially parallel to the inclined surface portion of the main body 14, and places the panel substrate 12 in the probe unit 2.
Move with respect to 4.

The inspection stage 50 has a function of maintaining the panel substrate 12 in a releasable manner, a function of rotating the panel substrate 12 angularly around a Z (θ) axis orthogonal to the panel stage,
A function of moving the panel substrate 12 in the Z-axis direction, a function of moving the panel substrate 12 in an oblique vertical direction (Y direction) in a plane parallel thereto, and a function of moving the panel substrate 12 in a horizontal direction in a plane parallel thereto. (X direction).

For this reason, the inspection stage 50 includes a work table (that is, a chuck top) that releasably adsorbs the panel substrate, a backlight unit that receives the work table, and a work table that is angularly moved around the Z axis. A θ stage for rotating, a Z stage for moving the work table in the direction of the Z axis, a Y stage for moving the work table in the Y direction, and an X stage for moving the work table in the Y direction.
X stage (that is, stage base) that is moved in the direction.

The inspection stage 50 can be moved to the inspection unit 16 and the relay unit 18 by the X stage. The backlight arranged in the backlight unit illuminates the panel substrate 12 received on the work table from behind,
It is lit. Such an inspection stage 50 is disclosed in, for example, JP-A-11-183863 and JP-A-11-1838.
A known stage described in JP-A-64 can be used.

A plurality of cassettes 52 are mounted on the mounting table 54 in the cassette mounting section 20 (see FIG. 2). The panel substrate 12 is accommodated in each cassette 52. The transfer and transfer of the panel substrate 12 to and from the cassette 52 are performed while the panel substrate 12 is kept horizontal by the transfer robot 56 disposed in the loader unit 22.

The transfer robot 56 is movably supported by the pair of guide rails 58 extending in parallel to the loader section 22 in the left-right direction, and has a motor and a robot moving mechanism 6 having a lead screw rotated by the motor.
The transfer of the panel substrate to the cassette 52 and the alignment device 62 is performed by moving the panel substrate to an appropriate position in the left-right direction by 0.

The transfer robot 56 has a robot moving mechanism 6
0, a slider 64 moved along the guide rail 58, and a driving mechanism 66 mounted on the slider.
And a pair of robot arms (that is, hands) 68 that are separately driven by the drive mechanism 66 to transfer the panel substrate. The panel substrate is transport robot 56
, Are transported horizontally and transferred.

In the transfer robot 56, the cassette 52
Is transferred to the empty cassette in the appropriate cassette group while passing the inspected panel substrate received by one robot arm 68 to an uninspected (ie, unmeasured) panel in the other cassette. This can be performed by controlling the substrate to be received by the same robot arm 68 or the other robot arm 68.

The panel substrate is transferred to the alignment device 62 such that the measured panel substrate is received by one robot arm 68 and the uninspected panel substrate received by the other robot arm 68 is passed to the alignment device 62. , Can be performed by controlling.

The alignment device 62 is arranged in the relay section 18 and on the side of the loader section 22. The alignment device 62 also has a function of transferring the panel substrate to the transfer robot 56 in a horizontal state, a function of transferring the panel substrate to the relay device 70 in an obliquely upward state, and a function of transferring the panel substrate from the transfer robot 56. It has a position adjustment function of adjusting the position of the substrate and an angle changing function of changing the inclination angle (ie, posture) of the panel substrate.

As the alignment device 62 as described above, for example, Japanese Patent Application Laid-Open No. 11-183863,
A known alignment mechanism described in 1-1183864 can be used. Alignment device 6
Since No. 2 is described in detail in the above-mentioned publication, a detailed description thereof will be omitted.

The relay device 70 is disposed in the relay portion 18 so as to be inclined forward of the alignment device 62. The relay device 70 also has a function of transferring the panel substrate to the inspection stage 50 and the alignment device 62 in a state where the panel substrate is inclined obliquely upward. The relay device 70 preferably includes a pair of relays.

As the relay device 70 as described above, for example, JP-A-11-183863, JP-A-11-183
A known device using a pair of relay mechanisms described in JP-A-864-864 can be used. Since the relay device 70 is described in detail in the above-mentioned publication, a detailed description thereof will be omitted.

The photographing device 72 is arranged in the inspection section 16 and in front of the probe unit 24 so as to photograph the panel substrate 12 received by the inspection stage 50. The imaging device 72 includes two or more line sensors 74 that extend the inspection unit 16 in an oblique vertical direction (Y direction), and a sensor moving mechanism that simultaneously moves the line sensors 74 in the left and right direction (X direction).

Each line sensor 74 is a known one in which a large number of photoelectric conversion elements such as CCD elements are arranged substantially linearly in the longitudinal direction (Y direction) of the line sensor 74.
Further, it is assembled to the sensor moving mechanism by a sensor holder 76 extending in the Y direction. The sensor holder 76 is supported by the sensor moving mechanism by an appropriate method. The photoelectric conversion element of the line sensor 74 is connected to an electric circuit (not shown) using a computer, and the converted electric signal is read by the electric circuit.

In the illustrated example, the two line sensors 74 are arranged adjacent to each other in the direction (X direction) moved by the sensor moving mechanism, and the relative position in the arrangement direction of the photoelectric conversion elements can be changed. Are located. The sensor holder 76 is provided for each line sensor,
The sensor moving mechanism is arranged so as to be adjacent to the X direction and change the relative position in the Y direction.

Each line sensor 74 includes a glass substrate on which a TFT is formed, a monochrome panel substrate, a color panel substrate, a monochrome or color panel substrate in which pixels are arranged in a line, and a monochrome or color panel substrate in which pixels are arranged in a zigzag. Depending on the type of panel substrate to be inspected, such as a color panel substrate, a color panel substrate in which color pixels are arranged in a plurality of rows, a plurality of photoelectric conversion elements are arranged in one row, zigzag, or a plurality of rows.

The sensor moving mechanism is driven in synchronization with each other to move the sensor holder 76 in the left-right direction (X direction), and a pair of X moving mechanisms 80 is driven in synchronization with each other to move the sensor holder 76 to the inclined surface. A pair of Z moving mechanisms 82 for moving in a vertical direction (Z direction);
To rotate angularly about an axis extending in the Y direction
A moving mechanism 84 and a Y moving mechanism 86 that relatively moves the sensor holder 76 in the Y direction are provided.

The X moving mechanism 80 is spaced apart in the Y direction and is mounted on the base plate 30 of the main body 14. The Z moving mechanism 82 is spaced apart in the Y direction,
Also, it is arranged in the corresponding X moving mechanism 80. The θ movement mechanism 84 is supported by one Z movement mechanism 82.
One end of the Y moving mechanism 86 is supported by the θ moving mechanism 84, and the other end is supported by the other Z moving mechanism 82 via a bearing 88. The sensor holder 76 is supported by the Y moving mechanism 86.

The inspection stage 50 is lowered by the Z stage so as to separate the panel substrate 12 from the probe unit 24 during standby and when transferring the panel substrate 12 to the inspection stage 50. In addition, the line sensor 74 is configured as shown in FIG.
As shown by a two-dot chain line in FIG. 3, the moving unit 80 is separated from the inspection stage 50 by the Z moving mechanism 82 and is retracted in the X direction by the X moving mechanism 80. Accordingly, the probe unit 24 and the line sensor 74 do not hinder the delivery of the panel substrate 12 to the inspection stage 50, and the delivery of the panel substrate 12 is facilitated.

Prior to the inspection, the relative position of the line sensor 74 in the Y direction is adjusted according to the size of the panel substrate 12 to be inspected. Such position adjustment of the line sensor 74 can be performed by relatively moving the sensor holder 76 in the Y direction by the Y moving mechanism 86 using an electric motor and maintaining the sensor holder 76 at the position so as to be releasable. However, the position of the line sensor 74 may be adjusted by manually moving the sensor holder 76 relatively in the Y direction.

The relative positions of the adjacent line sensors 74 in the Y direction are determined such that the smaller the size of the panel substrate 12 to be inspected, the greater the amount of overlap between the ends of the adjacent line sensors 74. The practical use range, that is, the effective range is adjusted.

Before the inspection, the inspection stage 50
Is aligned.
For this reason, the backlight of the inspection stage 50 is turned on, and the alignment marks formed on the panel substrate 12 are read by the imaging device 72 and the electric circuit connected thereto, whereby the panel substrate 12 is moved to the probe unit 2.
The effective range of the line sensor 74 and the like are confirmed whether or not the line sensor 74 is located at the correct position with respect to the imaging device 72 and the photographing device 72.

If the panel substrate 12 is not placed at the correct position, at least one of the X stage, the Y stage and the θ stage of the inspection stage 50 is driven to correct the position of the panel substrate 12 so that it is correct. Is done. If the alignment is performed using the line sensor 74 in this manner, a television camera for an alignment mark, which is required in a conventional automatic inspection device using a television camera, becomes unnecessary. However, the main body 14 may be provided with one or more television cameras for photographing the alignment marks.

At the time of the automatic inspection, the panel substrate 12 is moved toward the probe unit 24 by the Z stage of the inspection stage 50, and the electrode portion is pressed against the tip (needle tip) of the contact 32. Electricity is supplied to the electrode section. The backlight of the inspection stage 50 is turned on.

At the time of the automatic inspection, the line sensor 74 is adjusted to a proper posture with respect to the panel substrate 12 by the θ moving mechanism 84 as shown in FIG. The panel board 12 is approached by the mechanism 82, and in this state, the panel board 12 is moved from one end in the X direction to the other end by the X moving mechanism 80.

During the automatic inspection, each photoelectric conversion element of the line sensor 74 generates an electric signal according to the amount of incident light. The electric signal thus obtained by the line sensor 74 is supplied to an electric circuit using a computer, and is used to determine the quality of the panel substrate 12 in the electric circuit. The quality of the panel substrate 12 can be determined by the same method as that of a conventional automatic inspection device using a television camera.

The image of the panel substrate 12 during the automatic inspection is obtained based on the electric signal obtained by the line sensor 74 based on the image of the image receiving device 42.
It is projected on. Thus, the operator can visually check the image on the image receiver 42 and check the quality of the panel substrate 12.

When the inspection of one panel substrate 12 is completed, the panel substrate 12 is separated from the probe unit 24 by the inspection stage 50, and the inspection stage 50 is moved to the relay section 18 in that state. The inspection stage 50
In the relay section 18, the inspected panel substrate is transferred to the relay device 70, and a new panel substrate is received from the relay device 70 instead. Thereafter, the inspection stage 50 returns to the inspection section 16.

The inspected panel substrate transferred to the relay device 70 is transferred to the alignment device 62 from the relay device 70, and further transferred from the alignment device 62 to the transfer robot 56.
Passed to. The transfer robot 56 receives the inspected panel substrate on one robot arm 68 and transfers a new panel substrate held on the other robot arm 68 to the alignment device 62.

The transfer robot 56 has a predetermined cassette 52
To the empty cassette 5
2 and instead receive a new panel substrate in a given cassette 52. Thereafter, the transfer robot 56 returns to the transfer position of the panel substrate to the alignment device 62 again, transfers a new panel substrate to the alignment device 62 at that position, and waits at that position.

The alignment device 62 transfers the new panel substrate to the relay device 70 and stands by in that state. The relay device 70 also waits while receiving a new panel substrate from the alignment device 62.

The transfer of the panel substrate between the relay device 70 and the alignment device 62, the alignment device 6
The inspection stage 50 transfers the panel substrate between the transfer robot 2 and the transfer robot 50 from the inspection unit 16 to the relay unit 18.
It is performed until it is moved again.

During the automatic inspection, the inspection section 16 is closed by the cover 44 to prevent radio waves or light which is noise from entering the inspection section 16. However, the inside of the inspection unit 16, particularly the panel substrate under automatic inspection, can be visually observed through the glass 48 of the cover 44.

Inspection device 10 replaces the automatic lighting inspection with
By moving the cover 44 to the side of the relay section 18 and visually checking the panel substrate in a state where the inspection section 16 is opened forward, it can also be used as a visual lighting inspection apparatus for determining the quality of the panel substrate.

Further, in the inspection apparatus 10, the panel substrate 12 is disposed obliquely upward on the inspection stage 50, so that the operator can view the panel substrate 12 obliquely from above, thereby facilitating the visual inspection. .

The inspection apparatus 10 further includes an optical microscope 40
Therefore, it can also be used as a visual lighting inspection device in which an operator uses the optical microscope 40 to determine the quality of the panel substrate. In this case, since an enlarged image can be obtained by the optical microscope 40, the visual inspection can be performed with high accuracy.

The optical microscope 40 is arranged movably in the X direction on a portal-type moving member 90 disposed on the main body 14 so as to be movable in the Y direction. Therefore, the operator can move the optical microscope 40 in the X direction and the Y direction to enlarge and view an arbitrary portion of the panel substrate.

Since the inspection apparatus 10 further includes the image receiver 42, it can be used also as a visual lighting inspection apparatus for judging the quality of the panel substrate by the operator viewing the image of the image receiver 42. it can. The image projected on the receiver 42 may be an image of the entire panel substrate, or may be an image obtained by enlarging a part of the panel substrate. These images can be obtained by moving the line sensor 74 at least once.

The above-described automatic inspection is performed at least once while the angle of incidence of light on the line sensor 74 is kept constant. However, when performing an automatic inspection of one panel substrate a plurality of times, the incident angle of light to the line sensor 74 is changed as shown in FIG. It is preferable to change the incident angle of light.

Since the line sensor 74 has a plurality of photoelectric conversion elements arranged in a straight line, a high-resolution and high-precision one can be easily and inexpensively compared with a television camera for photographing the entire panel substrate under inspection. Obtainable. For this reason,
The inspection device 10 using such a line sensor 74 includes:
Even if the cost required for the sensor moving mechanism for the line sensor 74 is considered, the cost is lower than the cost required for a high-resolution and high-precision television camera.

Further, since the relative position of the line sensor 74 in the Y direction can be changed, when inspecting a small-sized panel substrate, the line sensor 74 in the Y direction can be used.
By changing the relative position of 4 according to the dimensions of the panel substrate 12 to be inspected, the effective range by the line sensor 74 can be adjusted, and therefore, it is possible to easily cope with the inspection of panel substrates having different dimensions. .

The relative position of the adjacent line sensors 74 in the Y direction is, for example, when inspecting a panel substrate having a minimum size, the adjacent line sensors 74 are completely or maximally overlapped, and the adjacent line sensors 74 overlap. Adjusted to maximize volume. Further, when inspecting a panel substrate having an intermediate size, adjustment is made so that the overlapping amount of the adjacent line sensors 74 is reduced as shown in FIGS. Further, when inspecting the panel substrate having the maximum dimension, as shown in FIGS. 9 and 10, the adjustment is performed so that the overlapping amount of the adjacent line sensors 74 is minimized.

In any case, when inspecting a panel substrate having a plurality of electrodes on each of at least three sides of a rectangle and having a dimension smaller than the length of the line sensor, or aligning the panel substrate with the panel substrate, Even when the center is used as a reference, the probe unit 26 does not prevent the movement of the line sensor 74 in the X direction.

The present invention is not limited to the above embodiment. For example, the transfer robot, the alignment device, and the relay device may be omitted, and the panel substrate to be inspected may be manually delivered to the inspection stage. Further, the present invention can be applied not only to an apparatus for inspecting a panel substrate in an obliquely upward state but also to an apparatus for inspecting a panel substrate in a horizontal state.

The present invention can be variously modified without departing from the gist thereof.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of an inspection apparatus according to the present invention.

FIG. 2 is a sectional view of the inspection apparatus shown in FIG.

FIG. 3 is a plan view of an inspection unit in the inspection apparatus shown in FIG.

FIG. 4 is a cross-sectional view taken along line 4-4 in FIG.

FIG. 5 is a sectional view taken along line 5-5 in FIG. 3;

FIG. 6 is a view for explaining angle change and adjustment of a line sensor with respect to a panel substrate;

FIG. 7 is a plan view showing an embodiment in which the relative positions of adjacent line sensors are changed.

8 is a sectional view taken along line 8-8 in FIG. 7;

FIG. 9 is a plan view showing another embodiment in which the relative positions of adjacent line sensors are changed.

10 is a sectional view taken along line 10-10 in FIG. 9;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Panel board 14 Main body 16 Inspection part 18 Relay part 20 Cassette installation part 22 Loader part 24 Probe unit 26 Probe block 28 Probe base 30 Base plate of main body 32 Contact 34, 36 Opening 38 Operation panel 40 Optical microscope 42 Television John receiver 44 Cover 46 Opening 48 Transparent glass 50 Inspection stage 52 Cassette 56 Transfer robot 62 Alignment device 70 Relay device 72 Imaging device 74 Line sensor 76 Sensor holder 80 X moving mechanism of sensor moving mechanism 82 Z moving mechanism of sensor moving mechanism 84 Theta moving mechanism of the sensor moving mechanism 86 The Y moving mechanism of the sensor moving mechanism

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Isao Ueki 2-6-1-8 Kichijoji Honcho, Musashino City, Tokyo F-term in Japan Micronics Co., Ltd. (reference) 2G051 AA73 AA90 AC15 CA03 CA07 CB02 DA03 DA08 2G086 EE10 2H088 FA11 FA30 HA01 MA20

Claims (6)

[Claims] 1. An inspection stage for receiving a display panel substrate, a photographing device for photographing the panel substrate received on the inspection stage from a side opposite to the inspection stage, and a plurality of contacting devices that are in contact with electrode portions of the panel substrate. A probe unit including a contact of the above, wherein the imaging device, two or more line sensors arranged in a first direction parallel to the panel substrate, a plurality of photoelectric conversion elements for converting light into an electrical signal, A sensor moving mechanism for moving a line sensor in at least a second direction intersecting with the first direction in a plane parallel to the panel substrate, wherein the two or more line sensors are adjacent to the second direction. An inspection apparatus for a display panel substrate, wherein the inspection panel inspection apparatus is arranged in the sensor moving mechanism so as to be able to change a relative position in the first direction in a fitted state. 2. The apparatus further includes a main body in which the inspection stage, the imaging device, and the probe unit are arranged,
The inspection device according to claim 1, wherein the body opens the panel substrate so as to be visible from a side of the probe unit. 3. The sensor moving mechanism includes a first moving mechanism that moves the line sensor in the first direction, and an angular rotation of the line sensor about an axis that extends in the first direction. The inspection apparatus according to claim 1, further comprising a second moving mechanism, and a third moving mechanism that moves the line sensor in a third direction perpendicular to the panel substrate. 4. The sensor moving mechanism further comprises:
The inspection device according to claim 3, further comprising a fourth movement mechanism that relatively moves the line sensor in the second direction. 5. The inspection apparatus according to claim 1, wherein each of the line sensors is assembled to the sensor moving mechanism by a sensor holder. 6. The inspection apparatus according to claim 5, wherein the sensor holder is supported by the sensor moving mechanism so as to be movable in the first direction.