TWI264532B - Substrate inspection device - Google Patents

Substrate inspection device Download PDF

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Publication number
TWI264532B
TWI264532B TW91132539A TW91132539A TWI264532B TW I264532 B TWI264532 B TW I264532B TW 91132539 A TW91132539 A TW 91132539A TW 91132539 A TW91132539 A TW 91132539A TW I264532 B TWI264532 B TW I264532B
Authority
TW
Taiwan
Prior art keywords
inspection
heads
substrate
glass substrate
stage
Prior art date
Application number
TW91132539A
Other languages
Chinese (zh)
Other versions
TW200302345A (en
Inventor
Nobuo Fujisaki
Kazuya Ito
Original Assignee
Olympus Corp
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Publication date
Priority to JP2001339938A priority Critical patent/JP3929285B2/en
Priority to JP2002000767A priority patent/JP2003202209A/en
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200302345A publication Critical patent/TW200302345A/en
Application granted granted Critical
Publication of TWI264532B publication Critical patent/TWI264532B/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method

Abstract

A substrate inspecting device of the present invention comprises a fixed stage for placing a subject, a gantry type arm disposed astride the subject placed on the fixed stage, and two inspection heads disposed back to back with the horizontal beam of the gantry type arm interposed between them.

Description

1264532 E6 F6 V. DETAILED DESCRIPTION OF THE INVENTION: [Field of the Invention] The present invention is used to inspect, for example, a flat panel display such as a liquid crystal display (LCD) (please read the precautions on the back side and draw it) (FPD) glass substrate, A substrate inspection device for large glass substrate defects such as color filters. [Background of the Invention] The glass substrate of a liquid crystal display is being introduced into a large-scale size year by year, and a model having a size exceeding 1000 mm has recently appeared; in order to increase the efficiency of use of the same panel size, the large-sized glass substrate adopts 9 sides according to the panel size. 6 faces, 4 faces and more chamfers. Fig. 12 is a view showing the configuration of a conventional substrate inspecting device; this substrate inspecting device is described in Japanese Laid-Open Patent Publication No. 8-171057; the substrate inspecting device is provided on the base (201) and is permeable to the Y-direction guide rail (202). Moving the download stage (203); the download stage (203) is provided to move the upload stage (205) through the X-direction guide rail (204); the upload stage (205) is loaded A large glass substrate (206). In addition, the base (201) is provided with an arm (am) (207), and the arm (207) is provided on the side, and the two optical heads (209) and (210) can be moved to the X through the guide rail (208). The optical heads (209) and (210) are each equipped with a television camera (TV camera) (211) and (212). The Substance Standards Bureau employee consumption cooperative printed by the Ministry of Economic Affairs printed the substrate inspection device by changing the size of the chamfer and the pattern by the size of the large glass substrate (206), so the optical heads (209) and (210) were placed on each other. Interval, adjusted to match the interval of the pattern, etc. After the optical head (209) and (210) intervals are set, by moving the download stage (203) and the upload stage (205), the same two adjacent patterns can be observed on the large glass substrate (206). Part. In recent years, with the rapid growth of liquid crystal display production, it is required to shorten the paper size of 4. It is applicable to China National Standard (CNS) A4 specification (210X297 mm). 1264532 E6 F6 5. Detailed description of the invention: (Please read the notes on the back first) Draw further) Check the required measurement interval of the substrate, and check the thinness and thinness of the main body of the device; and the manufacturer has to ask for a light, thin and small inspection device body in order to suppress the investment in equipment; with the large size of the display, Since a large-sized glass substrate having a size exceeding 1000 mm has appeared, it is indeed necessary to make the main body of the inspection apparatus light, thin, and small in terms of transportation and cost. In contrast to this concept, in order to move the download stage (203) and the upload stage (205) to the XY direction, the substrate inspection apparatus requires a space four times or more higher than the substrate size, and this space is sufficient. Let the main body of the device be biased towards large-scale development. Fig. 13 is a view showing a configuration of a conventional substrate inspecting device; the substrate inspecting device is disclosed in Japanese Laid-Open Patent Publication No. Hei No. 1-94756, and is a thin, short and compact device body; the substrate inspecting device is on the stage (301). Above, a support frame (holdei*) (303) for loading a large glass substrate (302) is provided. Guide rails (304) and (304) are disposed at both ends of the stage (301), and a gate type microscope head moving stage (305) movable to the Y direction is provided on the guide rails (304) and (304). The microscope head moves on the horizontal beam (306) of the stage (305) and is provided with a microscope head (307) movable to the X direction. The central standard bureau of the Ministry of Economic Affairs, the consumer consortium, prints the microscope head (305) on the bottom plate of the microscope head (305), and the microscope head (307) is placed on the precision observation component (309). The objective lens (3 1 0) and the eyepiece (311); in addition, the microscope head (307) is provided with macro illumination (312) and indicator illumination (313). On the fine observation component (309), a TV camera (314) is installed; the observation image of the large glass substrate (302) photographed by the TV camera (3 14) is displayed on the TV display (315); The department (3 16) is responsible for managing the movement of the coordinates of the missing position, the micro lens moving stage (305) and the microscope head (307). As long as such a substrate inspection device is provided, the stage 307 can be moved along the micro lens, and the microscope head (307) can be moved linearly toward the X direction, and the Chinese National Standard (CNS) A4 can be applied along the guide rail (304) and the paper scale. Specifications (210X 297 mm) 1264532 E6 F6 V. Detailed description of the invention: (3 04),: shoulder: line moving microlens moving stage (305); in the state of fixing large glass substrate (302), The entire large glass substrate (302) raster scanning microscope head (307) can be inspected. (Please read the precautions on the back and draw). However, the substrate inspection device shown in Figure 12 must be placed on the micro lens moving stage (305) to observe the entire large size. The glass substrate (302); therefore, the stage (301) must have a moving space A of the micro lens moving stage (305) at the position where the support frame (303) is removed, and the light is the moving space A. Sufficient to bias the stage (301) to a large size. In addition, it is also required to shorten the measurement interval time for inspecting the substrate, but since it is a large glass substrate (302) which measures the angular size of l〇〇〇m. with one microscope head (307), the measurement interval is shortened. Its limits. Figure 14 shows the appearance of the surface of a glass substrate such as a conventional FPD; the four corners of the glass substrate shown in Figure 14 will be copied and positioned on the FPD and other processes (200); Figure 14 shows the mark copied by the customized process. Printing (200); when the resist applied to the substrate is correctly copied on the pattern formed on the hood, the mark (200) formed on the four corners of the glass substrate will correctly fit on the four corners of the hood Marked and exposed. Downstream of each process, it will check whether the marking focus on the glass substrate conveyed by the conveyor belt is blurred, defective, or marked with or without displacement; when these markings have no defects or displacement, they will be copied smoothly and correctly. Determine the positioning of the upstream end. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Four TV cameras are set on this conveyor belt to simultaneously capture and inspect the four corners of the mark; however, this configuration is based on the setting of four TV cameras, so the cost is high. SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate inspection apparatus which is capable of shortening a required measurement interval of a substrate and a thin and light small device body. [Disclosure of the Invention] 6 This paper scale applies to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: (Please read the notes on the back and draw again) Substrate inspection of the present invention The device includes a fixed stage on which the object to be inspected is mounted, a door type arm that is disposed across the body to be inspected on the fixed stage, and is passed through the level of the door type arm. The beam, the two inspection heads set in a state of being back-to-back to each other. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a substrate inspecting apparatus according to a first embodiment of the present invention. Fig. 2 is a side view showing the configuration of a substrate inspecting apparatus according to a first embodiment of the present invention. Fig. 3 is a view showing the movement state of the conveyor belt in the substrate inspection apparatus according to the first embodiment of the present invention. Fig. 4A is a view showing an observation field of an inspection and a conveyor belt according to a first embodiment of the present invention. Figure 4B is a view showing an observation field of the inspection conveyor belt of the first embodiment of the present invention. Fig. 5 is a side view showing the configuration of a substrate inspecting apparatus according to a second embodiment of the present invention. Fig. 6 is a side sectional view showing the configuration of a substrate inspecting apparatus according to a third embodiment of the present invention. Figure 7 is a perspective view showing the appearance of a substrate inspecting apparatus according to a third embodiment of the present invention. Figure 8 is a top plan view showing the structure of a roller conveyor belt according to a third embodiment of the present invention. Fig. 9 is a side view showing the configuration of each mechanism of the entire mechanism of the third embodiment of the present invention. Figure 10 is a side view showing the constitution of each mechanism of the entire mechanism of the third embodiment of the present invention. Figure 11 is a perspective view showing the appearance of a substrate inspecting apparatus according to a fourth embodiment of the present invention. Printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs. Fig. 13 is a view showing the configuration of a conventional substrate inspection device. Figure 14 is a surface appearance view of an embodiment of the present invention and a conventional glass substrate. [Description of Symbols] 1...... Stage 2... Glass Substrate This paper scale applies to China National Standard (CNS) A4 Specification (210X297 mm) 1264532 E6 F6 Ministry of Economic Affairs Central Bureau of Standards Staff Consumer Cooperatives Printed V. Invention Detailed description: 3... Stage 4. ... fixed member 5··. ··· Guide rails 6... Glass substrates 7... Stages 10···. .. control unit 11···· ..Y scale 12...·..X scale 13 ...·, ..TV screen 14 ...·. .. illumination 41, 42 ... orientation mechanism 43 ... ·, .. cylinder 51, 52 ... orientation mechanism 71...·· _. horizontal beam 81, 82 ... inspection head 83 ..... objective lens 91, 92 ... lens 93, 94 ... camera 95, 96 ... photographic mirror 97 ..... support member 100 ... ... projection illumination 101 ... lens 102 ... mirror 103 ... . .. objective lens 104, 105 ... mirror 106 ... lens 107 ... ... inspection head 108 ... ... glass substrate (please read the notes on the back before drawing) This paper size applies China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: 109... pedestal, 110...stage (please read the notes on the back and draw again) 111.. ....horizontal beam 113,114...camera 115,116...camera 1 17...control unit 118...TV display 120.. support member 121...support shaft 122.....roller 123... Pulleys 124......Belts 125, 126, 127... Reflective Photoelectric Sensors 200..... Marking 201... Bases 202, 204... Guides 203, 205... Stages 206... Glass Substrate Economy Department of Central Bureau of Standards Staff Consumer Cooperatives Printed 207... Arms 208, 304... Guides 209, 210... Optical Heads 211, 212... TV Cameras 301, 305... Stages 302... Glass Substrates 303... Support Frames 306... Horizontal Beams 307... ...microscope head 308......through lighting 9 This paper scale applies to Chinese national standard (CNS) A4 size (210X 297 mm) 1264532 E6 F6 __ five, the detailed description of the invention: 309 ...... objective lens assembly 310 ^^ eyepiece 311 ?????? 312. .Growth lighting 3 1 3 . Indicator lighting 314.. . ..TV camera 315 ... TV display 316 ... control unit 402 ... support member 403 ... cylinder 404 ... active portion 405 .... ... Fixing portion 406 ... connecting member 41 1,412,421,422 ... mechanism 511 ... movable portion 512 ..... insert 513 ... cylinder 514 ... movable portion 4050. ····· shaft 405 1 ... protruding piece 5111... Vertical plate 5112... Horizontal plate [Best embodiment of the invention] Hereinafter, an embodiment of the invention will be described with reference to the drawings. Fig. 1 and Fig. 2 are views showing the configuration of a substrate inspecting apparatus according to a first embodiment of the present invention; Fig. 1 is an external perspective view; and Fig. 2 is a side view. This substrate inspection device is mounted on the stage (1) to hold the large glass 10 I. _„ This paper scale is applicable to the Chinese national standard (CNS>A4 specification (210X297 mm) (please read the precautions on the back) Line drawing) ·—«木. Department of Economics, Central Bureau of Standards, Staff Consumer Cooperatives, Printing 1264552 E6 F6 V. Detailed description of the invention: Stage (2) stage (fixed stage) (3); The table (3) member IL is provided with a plurality of substrate fixing members (4) at predetermined positions, and the plurality of substrate fixing members (4) support the large glass substrate (2) by, for example, adsorption. (Please read the back side first. Precautions should be drawn again. The left and right sides of the stage (1) are provided with guide rails (6) and (6); these guide rails (6) and (6) are provided for moving in the Y direction. Moving the stage (door type arm) (7) and the stage (3) across the gate type inspection head. This inspection head moves the horizontal beam (71) of the stage (7) to have a clamping level. a beam (71) for two inspection heads (81), (82) facing each other in a back-to-back state; these inspection heads (81), (82) are by a motor Rotating, and the ball guides disposed in the horizontal beam (71) can move along the horizontal beam (71) toward the X direction; the inspection heads (81), (82) can be used to magnify the inspection heads (for example: defects or patterns) ), measuring the shape of the pattern, and performing spectrophotometry of the color filter. The inspection heads (81) and (82) have mounting objective lenses (83) and (83); and the inspection heads (81) and (82) are further TV cameras (93) and (94) for transmitting the coupling lenses (91) and (92) are attached to each other. The inspection heads (81) and (82) are provided for inspection in the vertical direction (X direction). The movement direction of the head moves the stage (Y direction); the inspection heads (81) and (82) sandwich the horizontal beam (7 1 ), and are arranged at a predetermined interval in the same direction as the moving direction of the inspection head moving stage (7). The printing of the employee's consumption cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs is shown in Figure 2. The optical axis spacing f of the inspection heads (81) and (82) is in the direction of the inspection heads (81) and (82). In the case of the above, the size D of the large glass substrate (2) is set to be less than or equal to 1/2. The constituent elements on the inspection heads (81) and (82) are formed. An image of a large glass substrate (2) supported on the object stage (3), and an image forming optical system including an objective lens (83) and (83), an illumination optical system for illuminating a large glass substrate (2), and an observation large glass. The observation system of the substrate (2) image, and the focusing device that focuses on the large glass substrate (2). 11 This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Invention Detailed description: (Please read the notes on the back and draw again) Forming the image optical to have the conversion function (revolver) and focusing function (autofocus) of the objective lens (83); the illumination optics has the projection Lighting function; the observation system is equipped with the above TV cameras (93), (94); the objective lens (83) conversion function and focusing function, it is made into an electric type, and can be remotely controlled from the control unit (丨〇). Each of the TV cameras (93) and (94) is photographed, and an image is observed by a large glass substrate (2) observed by each of the inspection heads (8 1) and (82), and each image signal is output; these image signals are Transfer to the control unit (10). Furthermore, as shown in FIG. 1, the stage (1) is provided with a Y scale (ll); the inspection head moving stage (7) is provided with an X scale (12); the control unit (10) It has the functions of managing the position coordinates of the Y scale (11) and the X scale (12), and moving and controlling the movement of the stage (7) and the inspection heads (81) and (82). In addition, the control unit (10) inputs image signals output from the TV cameras (93) and (94), and these image signals have, select any one or both or both image signals (selection means), and let the image The observation image of the large glass substrate (2) of the signal is displayed on the function of the TV screen (display device) (13). When the control unit (10) moves and controls the inspection head to move the stage (7) and the inspection heads (81) and (82), and to the large glass substrates (2) of the inspection heads (81) and (81), When the observation field moves to the XY direction, it has a function of overlapping the boundary portions of these observation fields. Printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs Next, the operation of the substrate inspection device constructed as described above will be explained; when the large glass substrate (2) is supplied to the stage (3), the large glass substrate (2) will be borrowed. Positioning is performed by a plurality of substrate fixing members (4), and the stage (3) is adsorbed and supported. Figure 3 shows the movement state diagram of the inspection head; the control unit (10) illuminates the through-line illuminations (14), (14), and causes the inspection head to move the stage (7) and the inspection heads (93), (94) Move to the coordinate origin position 0 shown in Figure 3. Next, the control unit (10) moves the inspection head to move the stage (7) and the inspection heads (81) and (82) to the XY direction. The paper size is applicable to the Chinese National Standard (CNS) VIII 4 specifications (210X297 mm). 1264532 E6 F6 V. Detailed description of the invention: Line control, and move the inspection positions of the inspection heads (81) and (82). (Please read the precautions on the back and draw again.) In other words, the inspection head moving stage (7) moves directly to the Y direction along the guide rails (6) and (6), and each inspection head (81), (82) ) Move the horizontal beam (7 1 ) of the stage (7) along the inspection head and move directly to the X direction. At this time, as shown in FIG. 4A and FIG. 4B, each of the inspection heads (81) and (82) will be in the observation field of each inspection head which is formed in about 1/2 of the entire large glass substrate (2). h, moving within P2; in other words, as shown in Fig. 4A, the objective lens (83) having one end of the inspection head (81) moves in the inspection head Pi field; and as shown in Fig. 4B, the other end is inspected. The head (82) objective lens (83) moves in the inspection head observation field ; 2; in other words, the inspection head movement stage (7) and the inspection heads (81), (82) are present throughout the large glass substrate (2) ) Move within 1/2 of the field. Further, the control unit (10) moves and controls the inspection head to move the stage (7) and the inspection heads (81) and (82), and allows the optical axes of the inspection heads (81) and (82) (objective lens (83). When the optical axes of (83) are moved in the respective observation fields Pi and p2, the partial fields Ρ, p2 are superimposed on the boundary of the inspection heads 、! and P2. The TV camera (93) captures the image of the large glass substrate (2) in the inspection head P! inspected by the objective lens (83) of the inspection head (81), and then outputs the image signal; The TV camera (94) captures a large glass substrate (2) in the inspection head observation area p2 observed by the objective lens (83) of the inspection head (82), and then outputs an image signal; these image signals are output. It is transmitted to the control unit (10). The Central Standards Bureau of the Ministry of Economic Affairs, the Consumer Cooperatives Printing Control Department (10) inputs the image signals output by the TV cameras (93) and (94), and then selects any one of these image signals or one or both of the image signals. 'The observation image of the large glass substrate (2) of the image signal is displayed on the TV screen (13). Furthermore, the control unit (1〇) inputs the video signals output by the TV cameras (93) and (94), and divides the TV screen (13) into two screens, which can also be displayed on each divided screen. Each inspection head observes an observation image of a large glass substrate (2) of the fields P, p2. 13 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of invention · (Please read the notes on the back and draw again) The control unit (10) will read Based on the data of the gamma scale (11) and the X scale (12), the defect coordinates of the large glass substrate (2), which are mastered by other macro inspection devices, are used to determine the position coordinates of the defect, in order to make the inspection head (8 1) The optical axis and the defective portion are identical to each other, and the movement and control inspection head moves the stage (7) and the inspection head (81). In this way, the defective portion enters the field of view of the objective lens (83) of the inspection head (81), and then the defective portion is enlarged by the objective lens (83); next, the enlarged defect portion image is transmitted through the TV camera ( 93) Take a picture and display it on the TV screen (13). When the grating scans the entire large glass substrate (2), the control unit (10) moves the inspection head moving stage (7) to the Y direction and moves the inspection heads (81) and (82) to the X direction. It is also possible to input the enlarged image data that has been loaded by the TV cameras (93) and (94) of the inspection heads (81) and (82). After completing this precise observation, if a predetermined instruction is given to the control unit (10), the inspection head moving stage (7) and the inspection heads (81) and (82) will return to the starting position; In addition to the large glass substrate (2) that was inspected by the stage (3), a new unchecked large glass substrate (2) was placed on the stage (3). The employee's consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs is cracked on the substrate inspection apparatus of the first embodiment described above, and the stage (3) on which the large glass substrate (2) is mounted is placed across the stage, and the stage ( 3) On the large-sized glass substrate (2) to be mounted, the stage (3) is provided with an inspection head moving the stage (7) movable to the Y direction, and the inspection head is allowed to move the stage (7). The moving direction is moved in the vertical direction (X direction), and a predetermined interval is also provided in the state where the objective lenses (83) and (83) are located outside, and the moving direction of the stage (7) is moved in the same manner as the inspection head. Two inspection heads (81), (82) configured above. In this way, the inspection head moving stage (7) and the inspection heads (81) and (82) can be housed in the space in which the guide rails (5) are provided in the space of the stage (3). The device body size can also be controlled within the limit range; specifically, as shown in FIG. 2 and FIG. 3, the depth dimension S of the device body can be reduced to only slightly larger than the Y dimension D of the large glass substrate (2). In addition, when performing inspections, check the paper size for the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1264532 E6 F6 V. Detailed description of the invention: Check head (81), (82) will not It protrudes from the outer side of the large glass substrate (2), and saves space for installation of the device. (Please read the precautions on the back and draw again.) As shown in Figure 3, the device body width S2 can be reduced to only slightly larger than the width of the large glass substrate (2), and 2 inspection heads are applied. The pillars of the stage (7) are wide. As shown in FIG. 4A and FIG. 4B, the two inspection heads (81) and (82) are moved in the inspection head fields P! and P2 of 1/2 of the entire large glass substrate (2). Therefore, compared with the case where one inspection head is provided, the Y-direction movement stroke of the inspection head moving stage (7) can be shortened by 1/2, and the measurement interval time can be shortened; The moving distance of the moving platform (7), and the two inspection heads (81) and (82) are attached to the horizontal beam (71), and then arranged in a symmetrical state, the stage can be moved for the inspection head (7). The horizontal beam (71) improves the balance of the inspection heads (81), (82) and reduces the load on the drive train. In other words, in the case where the liquid crystal display enters the mass production stage, the required measurement interval time for inspecting the substrate can be shortened, and the amount of equipment investment required by the user can be suppressed, and the requirements of the small device main body can be met. In addition, the optical axis distance F of each of the two inspection heads (81) and (82) is set to be 1/2 or less of the depth of the large glass substrate (2). And arranged in such a manner that the inspection heads (81) and (82) are attached to each other; thus, the two inspection heads (81) and (8 2) are not significantly protruded from the large glass substrate (2). On the outside, the entire large glass substrate (2) can be observed. Further, when the two inspection heads (81) and (82) are moved in the inspection heads P, p2, the partial fields P!, P2 overlap each other on the boundary of these observation fields P1 and p2. After that, it is also possible to check the boundary of the observation head fields P1 and p2. Fig. 5 is a view showing the configuration of a substrate inspecting apparatus according to a second embodiment of the present invention; and Fig. 5 is the same as that in Fig. 1. 15 The paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: (Please read the notes on the back and draw again), Figure 5 shows when setting up a TV camera The optical system is composed of the same structure; the two inspection heads (81) and (82) belong to the same configuration; for example, when the configuration of an inspection head (81) is taken as an example, it is provided with illumination for epi-illumination (1) 〇〇), and in the optical path of the epi-illumination lamp output by the projection illumination (100), a half mnror (102) penetrating through the lens (10) is provided; the semi-transparent reflection is performed here. An objective lens (1〇3) is disposed on the reflection optical path of the mirror (102); and an optical path zigzag mirror is disposed on the transmission optical path of the objective lens (103) through the semi-transparent mirror (102) ( 104); the configuration of the other inspection head (82) is the same as that of the inspection head (81), and thus the description is omitted. Between each of the optical path meandering mirrors (104) and (104) of the inspection heads (81) and (82), an optical path selection mirror (selection means) (105) is provided; the optical path selection mirror ( 105), reflecting any one of the inspection heads (81), (82) to a TV camera (93) provided through the formation of the image mirror (106); the TV camera (93), It is placed above any of the inspection heads (81) and (82). According to this configuration, each of the inspection heads (81) and (81) allows the projection illumination light output from each of the projection illuminations (100) to be incident on the translucent reflection through the lenses (101) and (101). The mirrors (102) and (102) are irradiated onto the large glass substrate (2) by the objective lenses (103) and (103) reflected by the semi-transparent mirrors (102) and (102). The image of the large glass substrate (2) printed by the employee's consumption cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs is incident on the semi-transparent mirrors (102) and (102) from the objective lenses (103) and (103). The transparent mirrors (102) and (102) are incident on the optical path meandering mirrors (104) and (104), and are then incident on the optical path selecting mirror (105). The image of the inspection heads (107), (108) can be reflected toward a TV camera (93) by rotating the optical path selection mirror (105) through the formation of the image lens (106); the TV camera ( 93) The image from the surface of the large glass substrate (2) is taken, and the image signal is output. The control unit (10) inputs the image signal output by the TV camera (93), and the paper size is applied to the Chinese National Standard (CNS) A4 specification (21〇><297 嫠) 1264532 E6-F6. DETAILED DESCRIPTION: After the image signal is processed, an observation image of the large glass substrate 2 is displayed on the TV display (13). According to the second embodiment described above, any image of the inspection heads (81) and (82) can be made to face a TV by forming an image lens (106) by the optical path selection mirror (105). Since the camera (93) is incident, it is not necessary to provide two TV cameras, and the configuration of the device can be simplified. Here, in the first and second embodiments described above, the case where the two inspection heads (81) and (82) are provided has been described. However, the inspection head may be moved to the stage (7) and moved. a plurality of inspection heads composed of two inspection heads (81) and (82); for example, two inspection heads composed of two inspection heads (81) and (82) are provided, and one inspection can be performed. The observation field of the head is reduced to about 1/4 of the entire large glass substrate (6), and the measurement interval can be shortened. Further, the substrate inspection device can be applied to defect inspection of a large-sized glass substrate such as a flat panel display (FPD) glass substrate or a color filter, in addition to a large-sized glass substrate (6) for a liquid crystal display. Figure 6 is a side elevational cross-sectional view showing the substrate inspecting apparatus of the third embodiment of the present invention; Figure 7 is a front view showing the substrate inspecting device, which is disposed on the FPD line, and can transport a large glass substrate between the two processes. Conveyor belt. At the left and right ends of the base (109) of the roller conveyor belt (101), a door type inspection head moving stage (door type arm) (110) is provided; the horizontal beam 111 of the inspection head moving stage (110) is provided. The upper part is provided with two inspection heads (103) and (104) which can be moved orthogonally to the flow direction (Y direction) of the conveyor belt (101) through the support member (105) and by the motor and the ball screw; The inspection heads (103) and (104) are arranged in a close arrangement with respect to the horizontal beam (111) at regular intervals; the inspection heads (103) and (104) are arranged to adjust the objective lenses (106) and (107). The interval Ly is set by a driving means such as a linear motor to move the supporting member (105) in the arrow direction (Y direction). 17 This paper scale applies to China National Standard (CNS) A4 specification (210X 297 麓) ---------— (Please read the notes on the back and draw again) - Book the Ministry of Economic Affairs Central Bureau of Standards staff consumption Cooperatives Printed 1264532 E6 F6 printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs V. Detailed description of the invention: In order to be able to be placed on the glass substrate (108), as shown in Figure 14, the four-dimensional mark (200)' is set. The inspection heads (103) and (104); the inspection heads (103) and (104) are mounted with objective lenses (106) and (107), and through the camera lenses (113) and (114), the TV camera is installed ( 115) and (116); the inspection heads (103) and (104) are provided with an image of a glass substrate (108) supported by the conveyor belt (101) and include an objective lens (106) as will be described later. (107) an imaging optical system, an illumination optical system for illuminating a glass substrate (108), an observation system for observing an image of a large glass substrate (1〇8), and a focusing device for focusing on a large glass substrate (108) Etc. Forming an image optics with the conversion function of the objective lens (106), (107) Transducer) and focus function (autofocus); illumination optics has epi-illumination function g; observation system has the above TV camera (115), (116); objective lens (106), (107) conversion function and focus The function is made electric, and can be remotely controlled from the control unit (11 7); each TV camera (115), (116) is photographed by each of the inspection heads (103), (104). The large glass substrate (108) observes the image and outputs each image signal; these image signals are transmitted to the control unit (117). The control unit (117) has a pulse position coordinate for managing the motor encoder, and a movement and control check. The head moves the stage (110) and the functions of the inspection heads (103) and (104), and inputs the image signals output by the respective TV cameras (115) and (116), and displays the image of the glass substrate 108. The function of the TV display (screen device) (11 8). Figure 8 shows the structure of the roller conveyor belt (101); the support members (120), (120) of the roller conveyor belt (1 〇 1), which can rotatably support the cylinder a plurality of roller support shafts (121) formed by a rod shape; each roller The support shaft (121) is supported by a plurality of rollers (122) forming a predetermined interval; one end of each roller support shaft (121) penetrates through the support member (120), and the end portion has a pulley ( L23); each pulley (123) has a belt (124) facing the Y direction. The conveyor belt (10 1 ) is driven by a motor to rotate the end pulley (123) and then through the pulleys (123). ), the direction of the Y-rotating belt 18 is applicable to the Chinese National Standard (CNS) A4 specification (210乂297 嫠1 (please read the notes on the back and draw again)
1264532 E6 F6 V. Detailed description of the invention: (Please read the notes on the back and draw again) (124); Because this method is used, the pulleys (123) are rotated in the Y direction, so they will follow The rotation of each roller support shaft (121) causes the rollers (122) to rotate in the Y direction, and conveys the glass substrate (108) mounted on the plurality of rollers (122) to the Y direction. A pedestal (109) near the upstream entrance of the conveyor belt (101) is provided with a reflective photosensor (photo sensoi*) (125) for detecting the delivery of the glass substrate (108); and a base near the downstream exit of the conveyor belt 101. On the seat (109), two reflective photoelectric sensors (126) and (127) for detecting the delivery of the glass substrate (108) are provided along the traveling direction (Y direction) of the glass substrate (108). Further, upstream and downstream of the conveyor belt (101), there are provided glass substrates (108) for flow, and orientation mechanisms (41), (42) oriented in the Y direction; orientation mechanisms (41), (42) ) each consisting of two mechanisms (411), (4 12) and (421), (422), mechanisms (411), (4 12) and mechanisms (421), (422), from each support member (120) The centers between (120) are arranged at equal intervals; the respective mechanisms (411), (412), and (421) and (422) include cylinders (43) and the like which will be described later. The two ends of the conveyor belt (101) are provided along the support members (120), (120), and are provided with glass substrates (108) to be oriented, and orientation mechanisms (51) and (52) each oriented in the X direction; The orientation mechanisms (51) and (52) include a movable plate (511), two insertion pins (512), (512), two sets of cylinders (513), (513), and the like as will be described later. Furthermore, the control unit (117) controls the motor, the photoelectricity department, the Central Bureau of Standards, the staff consumption cooperative, and the printing (125), (126), (127), orientation mechanism (41), (42), (51). ), (51) each cylinder, etc. Figure 9 shows a side view of the mechanisms (411), (412), (4 2 1 ), (42 2) of the orienting mechanisms (41), (42); Figure 9 shows the mechanism at the base (1 〇 9 a support member (402) for mounting the support driving portion (4 10); the support member (402) is erected on the base (109) forming the plate shape, and the driving portion is fixed on the side surface The cylinder (403) of (4 10); the cylinder (403) is mounted in a configuration that allows the movable portion (4〇4) to move toward the Y direction. 19 The paper size is applicable to China National Standard (CNS) M specification (2ΐ〇χ297 mm) 1264532 E6 F6 ______ V. Detailed description of the invention: (Please read the note on the back and then paint) In addition, the support member ( 402) the upper end side 'supports a rotatable fixing portion (405) for fixing the edge of the glass substrate (108); and the front end of the movable portion (404) of the cylinder (403) has a mounting connecting member (406) for connecting The member (406) and the fixing portion (405) are connected in a mutually rotatable manner. When there is no glass substrate (108) on the conveyor belt (101), the movable portions (404) of the respective mechanisms (411), (412), (421), and (422) are housed in the cylinder (403) and fixed. The protruding piece (405 1) of the portion (405) is evacuated downward from the passing surface a of the glass substrate (108). Figure 10 shows a side view of the orientation mechanisms (51), (52); the mechanism of Figure 10, two sets of cylinders (513) are placed side by side on the base (109); the profile of the movable plate (511) forms an L-shape The vertical plate (51U) has a front end of the movable portion (414) on which each cylinder (513) is mounted. Further, the horizontal plate (5112) of the movable plate (511) maintains a predetermined interval in the Y direction and is exposed. The two rotating ends (5 12) are supported. When there is no glass substrate (108) on the conveyor belt (101), the movable portions (514) and (514) of the respective orienting mechanisms (51) and (52) are pushed out from the respective cylinders (513) and (513). Each of the movable plates (511) and (511) having the insertion ends (512) and (512) is evacuated to the respective support members (120) and (120). Next, the operation of the above device will be explained. The glass substrate (108) of the Central Bureau of Standards of the Ministry of Economic Affairs printed by the consumer consortium in the upstream process is delivered to the conveyor belt (101) through the conveyor to the upstream inlet of the conveyor belt (101); the glass substrate (108) After the motor is driven to let the conveyor belt (101) flow into the Y direction, and the current end reaches the position of the photoelectric sensor (125), the photoelectric sensor detects the conveyor belt (101) of the delivered glass substrate (108). . When the front end of the glass substrate (108) reaches the position of the photosensor (126), the photosensor (126) detects the delivered glass substrate (108); when the photosensor (126) detects the delivered glass substrate (1 08) Thereafter, the control unit (1 Π) decelerates the drive motor; in this way, the glass substrate (108) is decelerated toward the Y direction; next, when the front end of the glass substrate (108) reaches the photosensor (127) Position 20 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 _ 5. Detailed description of the invention: (Please read the notes on the back and draw again), then the photoelectric sensor (127) The glass substrate (108) is detected; when the electrical sensor (127) detects that the glass substrate (108) has been delivered, the control unit (117) stops the driving of the motor; thereby, the glass is allowed to be driven. The substrate (108) is stopped at an inspection position near the center of the conveyor belt (101). The control unit (117) drives the orientation mechanisms (51), (52); at this time, the control unit (117) pulls the movable portions (514) of the orientation mechanisms (51) and (52) back to the cylinder (51). 3) inside; each orienting mechanism (51), (52), let each movable plate (511), (511) move toward the center of the conveyor belt (101) to the X direction; thus, the glass substrate (108) The two side edges are pushed into the center of the conveyor belt (101) by the respective spigots (5 12); as a result, the glass substrate (4) is positioned at the X-direction of the conveyor belt (101) at the center. The control unit (117) is the p-direction mechanism (41) and (42); at this time, the control unit (117) will move the activities of the mechanisms (411), (412), (421), and (422) ( 404), simultaneously ejected from the cylinder (403); thus, the mechanisms (411), (412), (421), (422) are fixed as they move to the front of the connecting member (406) The portion (405) rotates around the shaft (4050), and the protruding piece (405 1) of each fixing portion (405) stands up almost in a state of being orthogonal to the passing surface (a); the front end of the glass substrate (108) By the protruding pieces (4051) of the machines (421) and (422), the same as the upstream end, the trailing edge is pushed to the downstream end by the protruding pieces (405 1) of the machines (421) and (422). At this time, the respective spigots (512) adjacent to the respective end edges of the glass substrate (108) are rotated in accordance with the Y-direction movement of the glass substrate (108); as a result, the glass substrate (108) is positioned on the conveyor belt. The X direction and the Y direction on the (101) are at the center. The Central Bureau of Standards of the Ministry of Economic Affairs prints the employee's consumption cooperative. Next, after the inspector takes the prescribed operation on the control unit (117), the control unit (11 7) moves the stage (110) along the inspection head to let the inspection head (103) And (104) moving toward the X direction, so that the inspection heads (103) and (104) objective lenses (106) and (107) are located, and the markings of the conveyor belt (101) flowing to the left side position glass substrate (108) are located. (200), (200); further, the optical axis of the objective lens (106) and the objective lens (107) are adjusted in advance so as to conform to the two markings (200) and (200) juxtaposed in the Y direction. The distance between the control unit and the input of the control unit (117), the glass substrate (108) at the four corners of the paper. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). 1264532 E6 F6 5. Detailed description of the invention: Formation The Y-space spacing size ly of the four marks (2.00) is spaced from the X-direction spacing dimension Lx. (Please read the precautions on the back and draw again.) TV camera (1 1 5) captures the upstream end mark (200) image observed by the inspection head (1 〇 3) objective lens (1 〇 6), and then outputs The image signal; at the same time, the TV camera (1 16) captures the downstream end mark (200) image observed by the objective lens (107) of the inspection head (104), and then outputs the image signal; these image signals are sent to Control unit (117). The control unit (11 7) inputs the image signals output by the respective TV cameras (115) and (11 6), and displays the observed images of the respective marks 200 on the TV display (11 8); the inspector checks the images. The image of the TV display (1 18) is checked for defects such as focus blur, defects, and the like on each of the marks (200). Next, after the inspector takes a predetermined operation on the control unit (117), the control unit (1 17) moves the stage (1 10) along the inspection head, so that the inspection heads (1〇3) and (104) only face The previously set X-direction spacer size LX is moved, and the objective lenses (106) and (107) of the respective inspection heads (1 〇 3) and (104) are located, and the conveyor belt (101) flows to the glass substrate 108 at the right side position. Each mark (200), (200). The TV camera (11 5) captures the image of the upstream end mark (200) observed by the objective lens (106), and then outputs the image signal; at the same time, the TV camera (116) shoots the inspection head (104). The downstream end mark (200) image observed by the objective lens (107) is outputted, and the image signal is sent to the control unit (117). The control unit (11 7) inputs each TV camera ( 115), (11 6) After outputting the video signals from the Consumers' Cooperatives of the Central Bureau of Standards of each Ministry of Economic Affairs, the observation images of each mark (200) are displayed on the TV display (118); the inspectors examine the TV. The image of the display (11 8) is checked for defects such as focus blur, defects, and the like on each of the marks (200). Next, when all the marks on the glass substrate (108) are abnormal, the inspector After the control unit (1 17) performs a predetermined operation, the control unit (117) drives the orientation mechanisms (51) and (52). At this time, the control unit (117) activates the active units of the mechanisms (51) and (52) ( 514), extruded from the cylinder (5 13); each orientation mechanism (51), (5 2) allows 22 The scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: Each movable plate (511), (511) moves toward the support members (120) and (120) To the X direction; then evacuate the spigots from the two ends of the glass substrate (108) (5 12. (Please read the notes on the back and draw again) Next, the control unit (117) drives the orientation mechanism (41) (42); at this time, the control unit (11 7) pulls the movable parts (404) of the mechanisms (411) and (412) '(421) and (422) back into the cylinder (403) at the same time. In this way, each mechanism (411), (412), (421), (422) moves the fixing portion (405) around the shaft (4050) as it moves to the rear of the connecting member (406). The protruding piece (405 1) of each fixing portion (405) is evacuated from the passing surface (a) to the lower side. The control portion (117) drives the motor again; the glass substrate (108) allows the conveyor belt (101) to flow into the downstream end. Further, when any one of the markings on the glass substrate (108) is abnormal, the inspector removes the glass substrate (108) from the conveyor belt (101). Further, when the marking on the glass substrate 108 having different sizes is inspected, the inspection head (103), 104) is moved to a predetermined distance to the supporting member (105), and the control portion (1) can be input by the glass The positional information on the conveyor belt (101) of the four markings (200) of the substrate (108) is adapted. Further, the type information of the glass substrate is input to the control by registering the X-direction spacing dimension and the Y-direction spacing dimension on the various glass substrates (108) of the design data from the memory of the control unit (117) in advance. In the portion (117), the Y-direction intervals of the objective lenses (103) and (107) of the respective inspection heads (103) and (104) are automatically set to the X-direction moving distances of the inspection heads (103) and (104). According to the third embodiment of the above, the central standard bureau of the Ministry of Economic Affairs printed on the roller conveyor belt that carries the glass substrate into the process, and checks the positioning mark of the glass substrate during standby, and can also check out The marking can be simultaneously positioned by the two inspection heads, thereby shortening the processing time; in addition, as long as the two inspection heads are set in the same direction (X direction) in advance to control the distance, the inspection heads can be easily positioned on the four-corner marking . Further, by adjusting the distance between the two inspection heads and the X-direction moving distance, it is possible to respond to glass substrates of various sizes. 23 The paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: The glass substrate 'supplied by the roller conveyor belt' is positioned at the inspection position, and two The inspection head is determined to be located on each marking. (Please read the precautions on the back side and draw it again.) In other words, according to the substrate inspection apparatus of the third embodiment described above, it is known that the low-speed configuration can be used to send the upstream conveyor by the roller conveyor belt in a short time. The target substrate is subjected to defect determination or measurement of at least four corner marks so that the target substrate can flow into the downstream process. In addition, after positioning the target substrate on the roller conveyor belt, the two inspection heads can be determined to be located on the labels of the respective labels; further, the moving distances of the horizontal beam directions of the two inspection heads and the two inspection heads can be adjusted. The spacing between the various substrates can be supported. Further, the four-dimensional marking inspection on the glass substrate is not limited to the substrate inspection apparatus configured in the third embodiment, and the movable inspection head can be moved by the first and second embodiments. The substrate inspection device composed of the object table is implemented. At this time, in order to adjust the interval between the objective lenses (83) and (83), the inspection heads (81) and (82) may be arranged in the direction of the arrow (Y direction) to the horizontal beam (71) by a driving device such as a linear motor. The state of the movement; in this way, the mark Y is spaced apart from the spacing of the objective lenses (83), (83), and the two markings juxtaposed in the Y direction can be checked; When the inspection heads (81) and (82) move toward a predetermined distance in the X direction, the two marks can be inspected. Printed by the Consumers' Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. Fig. 11 is a perspective view showing the appearance of a substrate inspecting apparatus constituting the fourth embodiment of the present invention; Fig. 11 is a part similar to that of Fig. 1. The horizontal beam (71) of the inspection head moving stage (7) is provided with a supporting member (97), and both ends of the supporting member (97) are mounted in a state of sandwiching the horizontal beam (71). For TV cameras (93) and (94) for each inspection head, TV cameras (93) and (94) are equipped with each camera lens (95) and (96); with a TV camera (93), The support member (97) of (94) is transmitted through the guide rail disposed under the horizontal beam (71), and can be integrated by the motor, and then applied along the horizontal beam (71). A4 size (210 X 297 mm) 1264532 E6 F6 V. Detailed description of the invention: Move to the X direction. In the substrate inspection apparatus according to the fourth embodiment, two TV cameras 03) and (94) are provided at a predetermined interval in the moving direction of the inspection head moving stage (7), and the glass can be photographed. Any part of the surface of the substrate. Furthermore, the present invention is not limited to the above-described respective embodiments, and may be implemented after being appropriately deformed without changing the scope of the invention. [Case of Industrial Use] The present invention provides a substrate inspection apparatus which is capable of shortening the measurement interval time required for inspecting a substrate and forming a thin and light small device main body. (Please read the note on the back and draw it again.) Printed by the Consumer Standards Bureau of the Central Bureau of Standards of the Ministry of Economic Affairs 25 This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm)

Claims (1)

1264532 A 8 B8 C8 D8 VI. Scope of Application [Scope of Application] 1. A substrate inspection apparatus characterized in that it has a fixed stage on which an object to be inspected is mounted, and is loaded over the fixed load. The two types of inspection heads are provided in a state in which the door-type arm provided by the above-mentioned inspection object on the stage and the horizontal beam passing through the door type arm are placed back to each other. 2. The substrate inspection apparatus according to claim 1, wherein each of the inspection heads is a component of the inspection optical axis to the horizontal beam end. 3. The substrate inspection device of claim 1, wherein the gantry arm is movable toward the fixed stage, and the two inspection heads are disposed on the gantry arm. The moving direction is in a state of being moved in the vertical direction, and is configured by a predetermined interval which is the same as the moving direction of the arm. The substrate inspection device according to the first aspect of the invention, wherein the distance between the inspection optical axes of the two inspection heads is less than 1/2 of the size of the inspection object in the direction in which the inspection heads are arranged. Its characteristics. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the notes on the back and fill out this page). 5. The substrate inspection device described in the first paragraph of the patent application, which is installed in the above two inspections. The first two imaging devices and at least one of the two imaging devices are selected, and the image signal output by the imaging device is input by the selection means, and the display portion of the image to be inspected is displayed. The substrate inspection device according to the first aspect of the invention, wherein the selection means for selecting one observation image from the two inspection heads is provided, and the Chinese national standard is applied by the paper size of CNS ) A4 specification (210X297 mm) A8 B8 C8 D8 Six _______I Ministry of Economic Affairs Central Bureau of Standards Bureau staff consumption cooperative prints 1264532, patent application range selection means to take the above-mentioned observation image photography means, input the image output by the above-mentioned camera The signal is such that the display portion of the image of the object to be inspected is characterized. In the substrate inspection apparatus according to Item 1, wherein, when the two inspection heads are moved, some of the observation fields of the object to be inspected are characterized by repetition of each other. 8. Patent Application No. 1. The substrate inspection device according to the invention, wherein the two inspection heads are characterized by a TV camera. The substrate inspection device according to the first aspect of the invention, wherein the fixed carrier is provided The table is constituted by a roller conveyor belt of the object to be inspected formed by carrying a mark specified on at least four corners, and the two inspection heads are arranged to be along the level of the door type arm The beam is moved in a direction orthogonal to the direction in which the object to be inspected is moved, and is disposed at a predetermined interval in the same direction as the moving direction of the object to be inspected; and further, each of the two inspection heads disposed in the inspection is photographed. The two photographing means for the aforementioned marking on the body, as long as the distance between the two inspection heads set in advance is controlled and controlled, and the aforementioned two photographing means are used to photograph the aforementioned position at the set position. The marking inspection device is further characterized in that the display image of the above-mentioned respective markings is displayed on the display portion. The substrate inspection device according to the invention of claim 9, wherein the fixing is provided On the stage, the positioning means for positioning the object to be inspected at a predetermined inspection position is characterized. 11. The substrate inspection device according to claim 9, wherein the two paper sizes are applicable to the Chinese country. Standard (CNS) M specification (210X297 mm) (Please read the notes on the back and fill out this page)
ABCD 1264532 6. Patent application scope inspection head, along the horizontal beam of the aforementioned door type arm, is arranged on the movable support member in a back-to-fit manner, and is set to a movable state, so as to adjust the two inspection heads The interval is characterized by it. (Please read the note on the back and fill out this page.) Printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs 8 2 This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm)
TW91132539A 2001-11-05 2002-11-04 Substrate inspection device TWI264532B (en)

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WO2003040711A1 (en) 2003-05-15

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