1264532 E6 F6 五、發明之詳細説明： 〔發明之領域〕 .， 本發明用以檢查例如：液晶顯示器（LCD )等平面顯示器 (請先閲讀背面之注意事項再行繪製) (FPD )玻璃基板、彩色濾光片等大型玻璃基板缺陷的基板檢 查裝置。 〔發明之背景〕 液晶顯示器的玻璃基板正逐年邁入大型尺寸化，最近已 出現超過1000mm尺寸的機種；這種大型玻璃基板爲了提昇相 同面板尺寸的使用效率，於是便依據面板尺寸採用9面、6 面、4面等多倒角。 圖十二表示傳統基板檢查裝置的構成圖；這種基板檢查 裝置已記載於特開平8-171057號；此基板檢查裝置是在基座 (201)上設有，可透過Y向的導軌（202)移動下載物台 (stage)(203);此下載物台（203)上則設有，可透過X向導軌（204) 移動上載物台（205);此上載物台（205)上則裝載了大型玻璃基 板（206)。 此外，基座（201)上則設有手臂（am)(207)，此手臂（207) 側面則設有，可透過導軌（208)將二個光學頭（209)、（210)移動 到X向；此光學頭（209)、（210)則各自安裝了電視接收攝影機 (television camera) ( TV 攝影機）（211)、（212)。 經濟部中央標準局員工消費合作社印製 這種基板檢查裝置，是藉由大型玻璃基板（206)尺寸，而 改變倒角數與圖樣間隔，因此會將光學頭（209)、（210)彼此的 間隔，調整爲符合圖樣的間隔等。 完成光學頭（209)、（210)間隔的設定後，只要移動下載物 台（203)與上載物台（205)，就可在大型玻璃基板（206)上，同時 觀察二個比鄰圖樣的相同部份。 近年來，隨著液晶顯示器產量急速成長，因而要求縮短 4 本紙張尺度適用中國國家標準（CNS) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： (請先閲讀背面之注意事項再行繪製) 檢查基板的所需測量間隔時間、檢查裝置主體的輕薄短小 化；而且製造商爲了抑制設備投資額，也紛紛要求輕薄短小 型的檢查裝置主體；隨著顯示器的大型尺寸發展，而出現了 尺寸超過1000mm的大型玻璃基板，因此從運輸與成本面來 看，確實需要將檢查裝置主體做成輕薄短小尺寸。 與這種觀念不同的是，上述基板檢查裝置爲了將下載物 台（203)、上載物台（205)移動到XY向，而需要高於基板尺寸 4倍以上的空間，光是這個空間就足以讓裝置主體偏向於大型 化發展。 圖十三表示傳統基板檢查裝置的構成圖；這種基板檢查 裝置已記載於特開平1 1-94756號公報，屬於輕薄短小型的裝 置主體；這種基板檢查裝置是在載物台（301)上，設置裝載大 型玻璃基板（302)的支撐架（holdei*)(303)。 在載物台（301)兩端各設置導軌（304)、（304)，並在這些導 軌（304)、（304)上設有可移動到Y向的門型顯微鏡頭移動載物 台（305);此顯微鏡頭移動載物台（305)的水平波束（beam)(306) 上，則設有可移動到X向的顯微鏡頭（307)。 經濟部中央標準局員工消費合作社印製 顯微鏡頭移動載物台（305)的底板上，則設有透線照明 (308);顯微鏡頭（307)則在精密觀察組件（309)上，設有物鏡（3 1 0) 及目鏡（311);此外，顯微鏡頭（307)上，則設有巨集照明（312) 及指標用照明（313)。 精細觀察組件（309)上，則有安裝TV攝影機（314);用此 TV攝影機（3 14)所拍攝之大型玻璃基板（302)的觀察圖像，則會 顯示於TV顯示器（315);控制部（3 16)負責管理缺限位置的座 標、微鏡頭移動載物台（305)與顯微鏡頭（307)的移動控制。 只要擁有這種基板檢查裝置，就可沿著微鏡頭移動載物 台305，朝X向直線移動顯微鏡頭（307)，並沿著導軌（304)、 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 1264532 E6 F6 五、發明之詳細説明： (3 04)，:肩：線移動微鏡頭移動載物台（305);在固定大型玻璃基 板（302)的狀態下，對整個大型玻璃基板（302)光柵（raster)掃描 顯微鏡頭（307)，就可執行檢查。 (請先閱讀背面之注意事項再行繪製) 但是，圖十二所不的基板檢查裝置，必須將顯微鏡頭（3 0 7) 設置於微鏡頭移動載物台（305)上，以觀察整個大型玻璃基板 (302);因此載物台（301)上就必須在卸除支撐架（303)的位置 上，有微鏡頭移動載物台（305)的移動空間A，光是此移動空 間A就足以讓載物台（301)偏向大型尺寸。 此外，也要求需縮短用於檢查基板的測量間隔時間，但 因屬於用一個顯微鏡頭（307)，測量l〇〇〇m.角尺寸的大型玻璃 基板（302)，因此縮短測量間隔時間則有它的限度。 圖十四表示傳統FPD等玻璃基板表面外觀圖；圖十四所 示之玻璃基板的四角，在FPD等各製程上會複印定位標印 (200);圖十四表示用所定製程所複印的標印（200);對塗佈於 基板的抗蝕劑正確複印遮光罩上所形成的圖樣時，在玻璃基 板四角上所形成的標印（200)，會正確的配合遮光罩四角上所 形成的標印而曝光。 各製程下游，則會檢查輸送帶所送達之玻璃基板上的各 標印焦點有無模糊、缺陷、或標印有無位移；當這些標印沒 有缺陷或位移時，則會順利的予以複印，並正確判定上游端 的定位。 經濟部中央標準局員工消費合作社印製 在此輸送帶上設置4台TV攝影機，以同時拍攝與檢查四 角的標印；但這種構成方式屬於設置4台TV攝影機，因此成 本較高。 本發明之目的在於，提供縮短檢查基板的所需測量間隔 時間、輕薄短小型裝置主體的基板檢查裝置。 〔發明揭示內容〕 6 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： (請先閱讀背面之注意事項再行繪製) 本發明之基板檢查裝置具備了，裝載被檢查體的固定載 物台、以跨過被裝載於此固定載物台上之前述被檢查體方式 所設置而成的門型手臂、並於透過此門型手臂之水平波束， 以彼此背對貼合的狀態所設置的二個檢查頭。 〔圖面之簡單說明〕 圖一係本發明第一實施例基板檢查裝置構成的外觀斜視圖。 圖二係本發明第一實施例基板檢查裝置構成的側視圖。 圖三係本發明第一實施例基板檢查裝置檢查輸送帶的移動狀 態圖。 圖四A係本發明第一實施例檢查、輸送帶的觀察領域表示圖。 圖四B係本發明第一實施例檢查輸送帶的觀察領域表示圖。 圖五係本發明第二實施例基板檢查裝置構成的構成側視圖。 圖六係本發明第三實施例基板檢查裝置構成的構成側視剖面 圖。 圖七係本發明第三實施例基板檢查裝置構成的外觀斜視圖。 圖八係本發明第三實施例滾輪輸送帶的構成上視圖。 圖九係本發明第三實施例整體機構的各機構的構成側視圖。 圖十係本發明第三實施例整體機構的各機構的構成側視圖。 圖十一係本發明第四實施例基板檢查裝置構成的外觀斜視 圖。 經濟部中央標準局員工消費合作社印製 圖十二係習用基板檢查裝置的構成表示圖。 圖十三係習用基板檢查裝置的構成表示圖。 圖十四係本發明實施例及習用的玻璃基板的表面外觀圖。 【符號之說明】 1……載物台 2……玻璃基板 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 經濟部中央標準局員工消費合作社印製 五、發明之詳細説明: 3……載物台 4。… 固定構件 5··。··· 導軌 6…… 玻璃基板 7…… 載物台 10···。 ..控制部 11···· ..Y標度 12…· ..X標度 13 …·, ..TV螢幕 14 …·. ..照明 41,42 ......定向機構 43 …·, ..汽缸 51,52 ......定向機構 71…·· _.水平波束 81,82 ......檢查頭 83 …·. .物鏡 91,92 ……透鏡 93,94 ......攝影機 95,96 ......攝影鏡 97 …·· .支撐構件 100… ...落射用照明 101... ...透鏡 102… ...反射鏡 103… 。..物鏡 104,105 ......反射鏡 106... ...透鏡 107… ...檢查頭 108… ...玻璃基板 (請先閱讀背面之注意事項再行繪製) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： 109……基座 , 110……載物台 (請先閱讀背面之注意事項再行繪製) 111.. ....水平波束 113,114……相機 115,116……攝影機 1 17……控制部 118…...TV顯示器 120.. .…支撐構件 121……支撐軸 122.. ....滾輪 123……皮帶輪 124.. ....皮帶 125,126,127……反射型光電傳感器 200.. ....標印 201……基座 202,204……導軌 203,205……載物台 206......玻璃基板 經濟部中央標準局員工消費合作社印製 207……手臂 208,304……導軌 209,210……光學頭 211,212……TV攝影機 301,305……載物台 302……玻璃基板 303……支撐架 306……水平波束 307……顯微鏡頭 308.. ....透線照明 9 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 1264532 E6 F6 __ 五、發明之詳細説明： 3 0 9……組件 310^^物鏡 311······目鏡 312。.巨集照明 3 1 3 。指標用照明 314.. .。..TV 攝影機 315 ......TV顯示器 316 ......控制部 402 ......支撐構件 403 ......汽缸 404……活動部 405.. ....固定部 406……連接構件 41 1,412,421,422……機構 511……活動部 512.. ....插梢 513……汽缸 514……活動部 4050.···.·軸 405 1……突出片 5111……縱板 5112……橫板 〔發明之最佳實施例〕 以下將參閱圖式說明本發明的實施型態。 圖一及圖二表示本發明第1實施型態之相關基板檢查裝 置的構成圖；圖一爲外觀立體圖；圖二爲側視圖。 此基板檢查裝置是在載物台（1)上，固定住裝載大型玻璃 10 I . _„ 本紙張尺度適用中國國家標準（CNS〉A4規格（210X297公釐） (請先閱讀背面之注意事項再行繪製) ·—«木. 訂 經濟部中央標準局員工消費合作社印製 1264532 E6 F6 五、發明之詳細説明： 基板（2)的載物台（固定載物台）（3);此載物台（3)員IL在規定位 置上，設有數個基板固定構件（4);這數個基板固定構件（4)， 則以例如吸附方式支撐大型玻璃基板（2)。 (請先閱讀背面之注意事項再行繪製) 載物台（1)的左方與右方各設有導軌（6)、（6);這些導軌 (6) 、（6)上則設有，可朝Y向移動的橫跨門型檢查頭移動載物 台（門型手臂）（7)、載物台（3)。 此檢查頭移動載物台（7)的水平波束（71)上，則設有夾住 水平波束（71)，以呈彼此背對貼合狀態的二個檢查頭（81)、 (82);這些檢查頭（81)、（82)則藉由馬達旋轉，而設置於水平 波束（71)內的滾珠導軌，可沿著水平波束（71)朝X向移動；檢 查頭（81)、（82)可用於放大檢視各檢查頭（例如：缺陷或圖 樣）、測量圖樣形狀、執行彩色濾光片的分光測光之用。 檢查頭（81)、（82)上各有安裝物鏡（83)、（83);檢查頭（81)、 (82)上還各安裝了透過連結用透鏡（91)、（92)的TV攝影機 (93) 、 （94)。 檢查頭（81)、（82)上則設有，可移動到垂直方向（X向） 的檢查頭移動載物台的移動方向（Y向）；檢查頭（81)、（82) 則夾住水平波束（7 1 )，以規定間隔配置同於檢查頭移動載物台 (7) 的移動方向。 經濟部中央標準局員工消費合作社印製 如圖二所示，檢查頭（81)、（82)的各物系光軸間距f，在 檢查頭（81)、（82)的排列方向（Y向）上，則設定了低於大型 玻璃基板（2)尺寸D的1/2以下。 檢查頭（81)、（82)上的構成要素爲，形成各載物台（3)上所 支撐的大型玻璃基板（2)圖像，且包含物鏡（83)、（83)的形成圖 像光學系、照明大型玻璃基板（2)的照明光學系、觀察大型玻 璃基板（2)圖像的觀察系、以及在大型玻璃基板（2)上進行對焦 的對焦裝置等。 11 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： (請先閲讀背面之注意事項再行繪製) 形成圖像光學竭擁有物鏡（83)的轉換功能（旋轉器 (revolver))與對焦功能（自動對焦）；照明光學系則擁有落射 照明功能；觀察系則具備上述TV攝影機（93)、（94);物鏡（83) 的轉換功能與對焦功能，則被做成電動式，可從控制部（丨〇) 進行遠端操控。 各TV攝影機（93)、（94)則拍攝，由各檢查頭（8 1)、（82)所 觀察到的大型玻璃基板（2)觀察圖像，再輸出各影像信號；這 些影像信號則被傳輸到控制部（10)。 再者，如圖一所示，載物台（1)上設有Y標度（scale)(ll); 檢查頭移動載物台（7)上則設有X標度（12);控制部（10)則擁有 管理Y標度（11)及X標度（12)的位置座標、移動與控制檢查寧 移動載物台（7)及檢查頭（81)、（82)的功能。 此外，控制部（10)則輸入來自於TV攝影機（93)、（94)所輸 出的各影像信號，這些影像信號則擁有，選擇任一種或單方 或雙方影像信號（選擇手段），讓該影像信號的大型玻璃基板 (2)的觀察圖像，顯示於TV螢幕（顯示器裝置）（13)的功能。 當控制部（10)移動與控制檢查頭移動載物台（7)及檢查頭 (81)、（82)，且針對檢查頭（81)、（81)的大型玻璃基板（2)，讓 各觀察領域移動到XY向時，則具有讓這些觀察領域的邊界部 份相互重疊的功能。 經濟部中央標準局員工消費合作社印製 接下來，將說明上述構成之基板檢查裝置的動作；當大 型玻璃基板（2)被供應於載物台（3)時，大型玻璃基板（2)會藉由 數個基板固定構件（4)以進行定位，且對載物台（3)進行吸附與 支撐。 圖三表示檢查頭的移動狀態圖；控制部（10)則點亮透線照 明（14)、（14)，且讓檢查頭移動載物台（7)及檢查頭（93)、（94)， 移動到圖三所示的座標原點位置0 ;接下來，控制部（1 0)則讓 檢查頭移動載物台（7)及檢查頭（81)、（82)，移動到X-Y向再進 12 本紙張尺度適用中國國家標準（CNS )八4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： 行控制，並移動檢查頭（81)、（82)的各觀察位置。 (請先閱讀背面之注意事項再行繪製) 換言之，檢查頭移動載物台（7)是沿著導軌（6)、（ 6)，直接 移動到Y向，各檢查頭（81)、（82)則沿著檢查頭移動載物台（7) 的水平波束（7 1 )，直接移動到X向。 此時，各檢查頭（81)、（82)，則如圖四A、圖四B所示， 會在占整個大型玻璃基板（2)約1/2領域所構成之各檢查頭的 觀察領域h、P2內進行移動；換言之，如圖四A所示，有一 端的檢查頭（81)物鏡（83)，會在檢查頭觀察領域Pi內移動；並 如圖四B所示，另一端的檢查頭（82)物鏡（83)，會在檢查頭觀 察領域卩2內移動；換言之，檢查頭移動載物台（7)及檢查頭 (81)、（82)，會在整個大型玻璃基板（2)的1/2領域內進行移動。 再者，控制部（10)則移動與控制檢查頭移動載物台（7)及 檢查頭（81)、（82)，讓檢查頭（81)、（82)的各光軸（物鏡（83)、 (83)的各光軸）在各觀察領域Pi、p2內進行移動時，會在這些 檢查頭觀察領域Ρ!、P2的邊界上，彼此重疊部份領域Ρ,、p2。 TV攝影機（93)則拍攝出，由檢查頭（81)的物鏡（8 3)所觀察 之檢查頭觀察領域P!內的大型玻璃基板（2)觀察圖像後，再輸 出影像信號；同時，TV攝影機（94)則拍攝出，由檢查頭（82) 的物鏡（83)所觀察之檢查頭觀察領域p2內的大型玻璃基板（2) 觀察圖像後，再輸出影像信號；這些影像信號則被傳輸到控 制部（10)。 經濟部中央標準局員工消費合作社印製 控制部（10)則輸入由TV攝影機（93)、（94)所輸出的各影像 信號，再選擇這些影像信號中的任一個或單方或雙方影像信 號後’再將該影像信號的大型玻璃基板（2)的觀察圖像顯示於 TV螢幕（13)。再者，控制部（1〇)則輸入由TV攝影機（93)、（94) 所輸出的各影像信號，再將TV螢幕（13)分割成2個畫面，各 分割畫面上也可顯示出，各檢查頭觀察領域P,、p2之大型玻 璃基板（2)的觀察圖像。 13 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明·· (請先閲讀背面之注意事項再行繪製) 控制部（10)會讀取由其他巨集檢查裝置所掌握之大型玻 璃基板（2)的各缺陷座標資料，再基於γ標度（11)及X標度（12) 的數據，求出缺陷的位置座標，爲了讓檢查頭（8 1)光軸與缺陷 部互爲一致，而移動與控制檢查頭移動載物台（7)及檢查頭 (81)。 藉由這種方式，讓缺陷部進入檢查頭（81)的物鏡（83)視野 內，再透過物鏡（83)放大此缺陷部；接下來，被放大的缺陷部 圖像，則透過TV攝影機（93)進行拍攝，再顯示於TV螢幕（13)。 光柵掃描整個大型玻璃基板（2)時，控制部（10)會讓檢查 頭移動載物台（7)移動到Y向的同時，讓檢查頭（81)、（82)移動 到X向，同樣的也可用檢查頭（81)、（82)的TV攝影機（93)、 (94)，輸入已載入的放大影像資料。 完成此精密觀察後，若對控制部（10)執行規定的指示，檢 查頭移動載物台（7)及檢查頭（81)、（82)則會回到起始位置；接 下來，則卸除由載物台（3)完成檢查的大型玻璃基板（2)，再將 新的未檢查大型玻璃基板（2)，安置於載物台（3)。 經濟部中央標準局員工消費合作社印裂 在上述第1實施型態的基板檢查裝置上，則橫跨設有裝 載大型玻璃基板（2)的載物台（3)、以及在此載物台（3)所裝載的 大型玻璃基板（2)上，對載物台（3)設有可移動到Y向的檢查頭 移動載物台（7)、以及可讓此檢查頭移動載物台（7)的移動方向 朝垂直方向（X向）移動，而且還備有在各物鏡（83)、（83)位 於外側的狀態下，在同於檢查頭移動載物台（7)移動方向的規 定間隔上所配置的二個檢查頭（81)、（82)。 藉由這種方式，可將檢查頭移動載物台（7)及檢查頭 (81)、（82)，收納於在載物台（3)的空間內設有導軌（5)的空間 內，還可將裝置主體尺寸控制在極限範圍內；具體而言，如 圖二及圖三所示，可將裝置主體的深度尺寸S，縮小到僅略大 於大型玻璃基板（2)的Y向尺寸D ;此外，在執行檢查時，檢 14 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） 1264532 E6 F6 五、發明之詳細説明： 查頭（81)、（82)不會突出於大型玻璃基板（2)的.外側，而可實現 節省裝置的設置空間。 (請先閱讀背面之注意事項再行繪製) 如圖三所示，可將裝置主體寬幅尺寸S2，縮小到僅略大 於在大型玻璃基板（2)的寬幅，並施加2根檢查頭移動載物台 (7)的支柱寬幅。 如圖四A及圖四B所示，二個檢查頭（81)、（82)，只要在 整個大型玻璃基板（2)之1/2的各檢查頭觀察領域P!、P2內進 行移動即可；因此，與具備一個檢查頭的情況相較之下，可 將檢查頭移動載物台（7)的Y向移動行程縮短1/2，還能縮短 測量的間隔時間；只要縮短此檢查頭移動華物台（7)的移動距 離，以及在水平波束（71)上貼合二個檢查頭（81)、（82)，再配 置成對稱狀態，就可針對檢查頭移動載物台（7)的水平波束 (71)，改善檢查頭（81)、（82)的平衡，並可減輕對驅動系的負 荷。 換言之，在液晶顯示器進入量產階段的情況下，能縮短 檢查基板的所需測量間隔時間，還能抑制用戶所要求的設備 投資額，並符合小型裝置主體的要求。 經濟部中央標準局員工消費合作社印製 此外，還將二個檢查頭（81)、（82)的各物系光軸間距F， 設定爲大型玻璃基板（2)深度的尺寸1/2以下，並以彼此背對 貼合檢查頭（81)、（82)的方式予以配置；如此一來，二個檢查 頭（81)、（8 2)，就不會大幅突出於大型玻璃基板（2)的外側，而 可確實觀察到整個大型玻璃基板（2)。 此外，讓二個檢查頭（81)、（82)，在各檢查頭觀察領域P,、 p2內進行移動時，在這些觀察領域Pl、p2的邊界上，彼此重 疊部份領域P!、P2後，也能確實檢查觀察頭領域Pl、p2的邊 界。 圖五表示本發明第2實施型態之相關基板檢查裝置構成 圖；圖五則在同於圖一的部份上有標示出相同符號。 15 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： (請先閱讀背面之注意事項再行繪製) ,圖五表示設置1台TV攝影機時的光學系構成圖；二個檢 查頭（81)、（82)屬於相同構成；舉例來說，要說明以一個檢查 頭（81)爲例的構成情況時，這屬於設有落射用照明（1〇〇)，並 在此落射用照明（100)所輸出的落射用照明燈的光程上，設有 透過透鏡（10)的半透明反射鏡（half mnror)(102);在此半透明 反射鏡（102)的反射光程上，則設有物鏡（1〇3);在由此物鏡（103) 透過半透明反射鏡（102)的透過光程上，則設有光程曲折反射 鏡（104);另一個檢查頭（82)的構成，則同於檢查頭（81)，因而 省略說明。 這些檢查頭（81)、（82)的各光程曲折反射鏡（104)、（104) 之間，則設有光程選擇反射鏡（選擇手段）（105);此光程選 擇反射鏡（105)，會將各檢查頭（81)、（82)的任一個圖像，反射 到透過形成圖像鏡（106)而設置的1台TV攝影機（93);此TV 攝影機（93)，可設置於檢查頭（81)、（82)任一處的上方。 只要屬於這種構成方式，各檢查頭（81)、（81)，就可讓各 落射用照明（100)所輸出的落射用照明光，透過透鏡（101)、（101) 入射到半透明反射鏡（102)、（102)，再藉由此半透明反射鏡 (102)、（102)所反射的物鏡（103)、（103)，照射於大型玻璃基板 (2)上。 經濟部中央標準局員工消費合作社印製 這種大型玻璃基板（2)上圖像，是從物鏡（103)、（103)入射 到半透明反射鏡（102)、（102)，再透過此半透明反射鏡（102)、 (102)，入射到光程曲折反射鏡（104)、（104)，在此經由反射後 再入射到光程選擇反射鏡（105)。 可藉由旋轉光程選擇反射鏡（105)，透過形成圖像透鏡 (106)，讓檢查頭（107)、（108)的任一種圖像，朝一台TV攝影 機（93)反射；TV攝影機（93)則拍攝來自於入射大型玻璃基板（2) 面的圖像，再輸出該影像信號。 控制部（10)則輸入TV攝影機（93)所輸出的影像信號，處 16 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇><297公嫠） 1264532 E6 —F6 五、發明之詳細説明： 理該影像信號後，在TV顯示器（1 3)顯示出大型玻璃基板2的 觀察圖像。 只要依據上述第2實施型態，就可藉由光程選擇反射鏡 (105)，透過形成圖像透鏡（106)，讓檢查頭（81)、（82)的任一種 圖像，朝一台TV攝影機（93)入射，因此不須設置2台TV攝 影機，還能簡化裝置的構成。 再者，在此已針對上述第1、第2實施型態，說明過設置 二個檢查頭（81)、（82)的情況，不過也可對檢查頭移動載物台 (7)，移動設置由二個檢查頭（81)、（82)所構成的數個檢查頭； 舉例來說，設置2組由二個檢查頭（81)、（82)所構成的檢查頭， 就可將一個檢查頭的觀察領域，縮小到整個大型玻璃基板（6) 約1/4領域，還能縮短測量間隔時間。 此外，上述基板檢查裝置，除了用於液晶顯示器的大型 玻璃基板（6)之外，也可適用於平面顯示器（FPD)玻璃基板、 彩色濾光片等大型玻璃基板的缺陷檢查上。 圖六表示本發明第3實施型態之相關基板檢查裝置的外 觀側視剖面圖；圖七表示正視圖；此基板檢查裝置，在FPD 生產線上設置，可在二個製程之間搬運大型玻璃基板的輸送 帶。 在橫跨滾輪輸送帶（101)基座（109)左右兩端，設有門型檢 查頭移動載物台（門型手臂）（110);檢查頭移動載物台（110) 的水平波束111上則設有，透過支撐構件（105)，並藉由馬達 與滾珠螺絲，可對輸送帶（101)的流動方向（Y向）呈直交移 動的二個檢查頭（103)、（104);此檢查頭（103)、（104)，則對水 平波束（111)，以一定間隔密合配置而呈；檢查頭（103)、（104)， 爲了可調整雙方物鏡（106)、（107)的間隔Ly，而用線性馬達等 驅動裝置，對支撐構件（105)朝箭頭方向（Y向）移動的方式 所設置而成。 17 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公麓） ---------— (請先閲讀背面之注意事項再行繪製} -訂 經濟部中央標準局員工消費合作社印製 1264532 經濟部中央標準局員工消費合作社印製 E6 F6 五、發明之詳細説明： 爲了能在玻璃基板（108)上，如，圖十四所示放大四角標印 (200)’ 而設置了 檢查頭（103)、（104);檢查頭（103)、（104)上， 則各安裝物鏡（106)、（107)，並透過相機鏡頭（113)、（114)，安 裝TV攝影機（115)、（116);這些檢查頭（103)、（104)，則如後 述內容所示，設有受輸送帶（101)所支撐的玻璃基板（108)圖 像，且包含物鏡（106)、（107)的形成影像光學系、照明玻璃基 板（108)的照明光學系、觀察大型玻璃基板（1〇8)圖像的觀察 系、以及在大型玻璃基板（108)上進行對焦的對焦裝置等。 形成圖像光學系擁有物鏡（106)、（107)的轉換功能（旋轉 器）與對焦功能（自動對焦）；照明光學系則擁有落射照明功 會g ;觀察系則具備上述TV攝影機（115)、（116);物鏡（106)、 (107)的轉換功能與對焦功能，則被做成電動式，可從控制部 (11 7)以進行遠端操控；各TV攝影機（115)、（116)則拍攝由各 檢查頭（103)、（104)所觀察到的大型玻璃基板（108)觀察圖像， 再輸出各影像信號；這些影像信號則被傳輸到控制部（117)。 控制部（117)則擁有管理馬達編碼器的脈衝位置座標、以 及移動與控制檢查頭移動載物台（110)與檢查頭（103)、（1 04)的 功能、以及輸入各TV攝影機（115)、（116)所輸出的各影像信 號，再將該玻璃基板108圖像顯示於TV顯示器（螢幕裝置） (11 8)的功能。 圖八表示滾輪輸送帶（101)的構成圖；滾輪輸送帶（1 〇 1)的 支撐構件（120)、（120)，可旋轉支撐圓柱型棒狀所構成的數個 滾輪支撐軸（121);各滾輪支撐軸（121)，則受到形成規定間隔 的數個滾輪（122)所支撐；各滾輪支撐軸（121)的一端則貫穿支 撐構件（120)，該端部上則有安裝皮帶輪（pulley)(l23);各皮帶 輪（123)則掛有朝向Y向的皮帶（124)。 輸送帶（10 1 )，則藉由馬達所構成的驅動機構以旋轉末端 皮帶輪（123)，再透過各皮帶輪（123)，朝向Y向旋轉皮帶 18 尺度適用中國國家標準（CNS ) A4規格（210乂297公嫠1 (請先閱讀背面之注意事項再行繪製)1264532 E6 F6 V. DETAILED DESCRIPTION OF THE INVENTION: [Field of the Invention] The present invention is used to inspect, for example, a flat panel display such as a liquid crystal display (LCD) (please read the precautions on the back side and draw it) (FPD) glass substrate, A substrate inspection device for large glass substrate defects such as color filters. [Background of the Invention] The glass substrate of a liquid crystal display is being introduced into a large-scale size year by year, and a model having a size exceeding 1000 mm has recently appeared; in order to increase the efficiency of use of the same panel size, the large-sized glass substrate adopts 9 sides according to the panel size. 6 faces, 4 faces and more chamfers. Fig. 12 is a view showing the configuration of a conventional substrate inspecting device; this substrate inspecting device is described in Japanese Laid-Open Patent Publication No. 8-171057; the substrate inspecting device is provided on the base (201) and is permeable to the Y-direction guide rail (202). Moving the download stage (203); the download stage (203) is provided to move the upload stage (205) through the X-direction guide rail (204); the upload stage (205) is loaded A large glass substrate (206). In addition, the base (201) is provided with an arm (am) (207), and the arm (207) is provided on the side, and the two optical heads (209) and (210) can be moved to the X through the guide rail (208). The optical heads (209) and (210) are each equipped with a television camera (TV camera) (211) and (212). The Substance Standards Bureau employee consumption cooperative printed by the Ministry of Economic Affairs printed the substrate inspection device by changing the size of the chamfer and the pattern by the size of the large glass substrate (206), so the optical heads (209) and (210) were placed on each other. Interval, adjusted to match the interval of the pattern, etc. After the optical head (209) and (210) intervals are set, by moving the download stage (203) and the upload stage (205), the same two adjacent patterns can be observed on the large glass substrate (206). Part. In recent years, with the rapid growth of liquid crystal display production, it is required to shorten the paper size of 4. It is applicable to China National Standard (CNS) A4 specification (210X297 mm). 1264532 E6 F6 5. Detailed description of the invention: (Please read the notes on the back first) Draw further) Check the required measurement interval of the substrate, and check the thinness and thinness of the main body of the device; and the manufacturer has to ask for a light, thin and small inspection device body in order to suppress the investment in equipment; with the large size of the display, Since a large-sized glass substrate having a size exceeding 1000 mm has appeared, it is indeed necessary to make the main body of the inspection apparatus light, thin, and small in terms of transportation and cost. In contrast to this concept, in order to move the download stage (203) and the upload stage (205) to the XY direction, the substrate inspection apparatus requires a space four times or more higher than the substrate size, and this space is sufficient. Let the main body of the device be biased towards large-scale development. Fig. 13 is a view showing a configuration of a conventional substrate inspecting device; the substrate inspecting device is disclosed in Japanese Laid-Open Patent Publication No. Hei No. 1-94756, and is a thin, short and compact device body; the substrate inspecting device is on the stage (301). Above, a support frame (holdei*) (303) for loading a large glass substrate (302) is provided. Guide rails (304) and (304) are disposed at both ends of the stage (301), and a gate type microscope head moving stage (305) movable to the Y direction is provided on the guide rails (304) and (304). The microscope head moves on the horizontal beam (306) of the stage (305) and is provided with a microscope head (307) movable to the X direction. The central standard bureau of the Ministry of Economic Affairs, the consumer consortium, prints the microscope head (305) on the bottom plate of the microscope head (305), and the microscope head (307) is placed on the precision observation component (309). The objective lens (3 1 0) and the eyepiece (311); in addition, the microscope head (307) is provided with macro illumination (312) and indicator illumination (313). On the fine observation component (309), a TV camera (314) is installed; the observation image of the large glass substrate (302) photographed by the TV camera (3 14) is displayed on the TV display (315); The department (3 16) is responsible for managing the movement of the coordinates of the missing position, the micro lens moving stage (305) and the microscope head (307). As long as such a substrate inspection device is provided, the stage 307 can be moved along the micro lens, and the microscope head (307) can be moved linearly toward the X direction, and the Chinese National Standard (CNS) A4 can be applied along the guide rail (304) and the paper scale. Specifications (210X 297 mm) 1264532 E6 F6 V. Detailed description of the invention: (3 04),: shoulder: line moving microlens moving stage (305); in the state of fixing large glass substrate (302), The entire large glass substrate (302) raster scanning microscope head (307) can be inspected. (Please read the precautions on the back and draw). However, the substrate inspection device shown in Figure 12 must be placed on the micro lens moving stage (305) to observe the entire large size. The glass substrate (302); therefore, the stage (301) must have a moving space A of the micro lens moving stage (305) at the position where the support frame (303) is removed, and the light is the moving space A. Sufficient to bias the stage (301) to a large size. In addition, it is also required to shorten the measurement interval time for inspecting the substrate, but since it is a large glass substrate (302) which measures the angular size of l〇〇〇m. with one microscope head (307), the measurement interval is shortened. Its limits. Figure 14 shows the appearance of the surface of a glass substrate such as a conventional FPD; the four corners of the glass substrate shown in Figure 14 will be copied and positioned on the FPD and other processes (200); Figure 14 shows the mark copied by the customized process. Printing (200); when the resist applied to the substrate is correctly copied on the pattern formed on the hood, the mark (200) formed on the four corners of the glass substrate will correctly fit on the four corners of the hood Marked and exposed. Downstream of each process, it will check whether the marking focus on the glass substrate conveyed by the conveyor belt is blurred, defective, or marked with or without displacement; when these markings have no defects or displacement, they will be copied smoothly and correctly. Determine the positioning of the upstream end. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Four TV cameras are set on this conveyor belt to simultaneously capture and inspect the four corners of the mark; however, this configuration is based on the setting of four TV cameras, so the cost is high. SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate inspection apparatus which is capable of shortening a required measurement interval of a substrate and a thin and light small device body. [Disclosure of the Invention] 6 This paper scale applies to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: (Please read the notes on the back and draw again) Substrate inspection of the present invention The device includes a fixed stage on which the object to be inspected is mounted, a door type arm that is disposed across the body to be inspected on the fixed stage, and is passed through the level of the door type arm. The beam, the two inspection heads set in a state of being back-to-back to each other. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a substrate inspecting apparatus according to a first embodiment of the present invention. Fig. 2 is a side view showing the configuration of a substrate inspecting apparatus according to a first embodiment of the present invention. Fig. 3 is a view showing the movement state of the conveyor belt in the substrate inspection apparatus according to the first embodiment of the present invention. Fig. 4A is a view showing an observation field of an inspection and a conveyor belt according to a first embodiment of the present invention. Figure 4B is a view showing an observation field of the inspection conveyor belt of the first embodiment of the present invention. Fig. 5 is a side view showing the configuration of a substrate inspecting apparatus according to a second embodiment of the present invention. Fig. 6 is a side sectional view showing the configuration of a substrate inspecting apparatus according to a third embodiment of the present invention. Figure 7 is a perspective view showing the appearance of a substrate inspecting apparatus according to a third embodiment of the present invention. Figure 8 is a top plan view showing the structure of a roller conveyor belt according to a third embodiment of the present invention. Fig. 9 is a side view showing the configuration of each mechanism of the entire mechanism of the third embodiment of the present invention. Figure 10 is a side view showing the constitution of each mechanism of the entire mechanism of the third embodiment of the present invention. Figure 11 is a perspective view showing the appearance of a substrate inspecting apparatus according to a fourth embodiment of the present invention. Printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs. Fig. 13 is a view showing the configuration of a conventional substrate inspection device. Figure 14 is a surface appearance view of an embodiment of the present invention and a conventional glass substrate. [Description of Symbols] 1...... Stage 2... Glass Substrate This paper scale applies to China National Standard (CNS) A4 Specification (210X297 mm) 1264532 E6 F6 Ministry of Economic Affairs Central Bureau of Standards Staff Consumer Cooperatives Printed V. Invention Detailed description: 3... Stage 4. ... fixed member 5··. ··· Guide rails 6... Glass substrates 7... Stages 10···. .. control unit 11···· ..Y scale 12...·..X scale 13 ...·, ..TV screen 14 ...·. .. illumination 41, 42 ... orientation mechanism 43 ... ·, .. cylinder 51, 52 ... orientation mechanism 71...·· _. horizontal beam 81, 82 ... inspection head 83 ..... objective lens 91, 92 ... lens 93, 94 ... camera 95, 96 ... photographic mirror 97 ..... support member 100 ... ... projection illumination 101 ... lens 102 ... mirror 103 ... . .. objective lens 104, 105 ... mirror 106 ... lens 107 ... ... inspection head 108 ... ... glass substrate (please read the notes on the back before drawing) This paper size applies China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: 109... pedestal, 110...stage (please read the notes on the back and draw again) 111.. ....horizontal beam 113,114...camera 115,116...camera 1 17...control unit 118...TV display 120.. support member 121...support shaft 122.....roller 123... Pulleys 124......Belts 125, 126, 127... Reflective Photoelectric Sensors 200..... Marking 201... Bases 202, 204... Guides 203, 205... Stages 206... Glass Substrate Economy Department of Central Bureau of Standards Staff Consumer Cooperatives Printed 207... Arms 208, 304... Guides 209, 210... Optical Heads 211, 212... TV Cameras 301, 305... Stages 302... Glass Substrates 303... Support Frames 306... Horizontal Beams 307... ...microscope head 308......through lighting 9 This paper scale applies to Chinese national standard (CNS) A4 size (210X 297 mm) 1264532 E6 F6 __ five, the detailed description of the invention: 309 ...... objective lens assembly 310 ^^ eyepiece 311 ?????? 312. .Growth lighting 3 1 3 . Indicator lighting 314.. . ..TV camera 315 ... TV display 316 ... control unit 402 ... support member 403 ... cylinder 404 ... active portion 405 .... ... Fixing portion 406 ... connecting member 41 1,412,421,422 ... mechanism 511 ... movable portion 512 ..... insert 513 ... cylinder 514 ... movable portion 4050. ····· shaft 405 1 ... protruding piece 5111... Vertical plate 5112... Horizontal plate [Best embodiment of the invention] Hereinafter, an embodiment of the invention will be described with reference to the drawings. Fig. 1 and Fig. 2 are views showing the configuration of a substrate inspecting apparatus according to a first embodiment of the present invention; Fig. 1 is an external perspective view; and Fig. 2 is a side view. This substrate inspection device is mounted on the stage (1) to hold the large glass 10 I. _„ This paper scale is applicable to the Chinese national standard (CNS>A4 specification (210X297 mm) (please read the precautions on the back) Line drawing) ·—«木. Department of Economics, Central Bureau of Standards, Staff Consumer Cooperatives, Printing 1264552 E6 F6 V. Detailed description of the invention: Stage (2) stage (fixed stage) (3); The table (3) member IL is provided with a plurality of substrate fixing members (4) at predetermined positions, and the plurality of substrate fixing members (4) support the large glass substrate (2) by, for example, adsorption. (Please read the back side first. Precautions should be drawn again. The left and right sides of the stage (1) are provided with guide rails (6) and (6); these guide rails (6) and (6) are provided for moving in the Y direction. Moving the stage (door type arm) (7) and the stage (3) across the gate type inspection head. This inspection head moves the horizontal beam (71) of the stage (7) to have a clamping level. a beam (71) for two inspection heads (81), (82) facing each other in a back-to-back state; these inspection heads (81), (82) are by a motor Rotating, and the ball guides disposed in the horizontal beam (71) can move along the horizontal beam (71) toward the X direction; the inspection heads (81), (82) can be used to magnify the inspection heads (for example: defects or patterns) ), measuring the shape of the pattern, and performing spectrophotometry of the color filter. The inspection heads (81) and (82) have mounting objective lenses (83) and (83); and the inspection heads (81) and (82) are further TV cameras (93) and (94) for transmitting the coupling lenses (91) and (92) are attached to each other. The inspection heads (81) and (82) are provided for inspection in the vertical direction (X direction). The movement direction of the head moves the stage (Y direction); the inspection heads (81) and (82) sandwich the horizontal beam (7 1 ), and are arranged at a predetermined interval in the same direction as the moving direction of the inspection head moving stage (7). The printing of the employee's consumption cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs is shown in Figure 2. The optical axis spacing f of the inspection heads (81) and (82) is in the direction of the inspection heads (81) and (82). In the case of the above, the size D of the large glass substrate (2) is set to be less than or equal to 1/2. The constituent elements on the inspection heads (81) and (82) are formed. An image of a large glass substrate (2) supported on the object stage (3), and an image forming optical system including an objective lens (83) and (83), an illumination optical system for illuminating a large glass substrate (2), and an observation large glass. The observation system of the substrate (2) image, and the focusing device that focuses on the large glass substrate (2). 11 This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Invention Detailed description: (Please read the notes on the back and draw again) Forming the image optical to have the conversion function (revolver) and focusing function (autofocus) of the objective lens (83); the illumination optics has the projection Lighting function; the observation system is equipped with the above TV cameras (93), (94); the objective lens (83) conversion function and focusing function, it is made into an electric type, and can be remotely controlled from the control unit (丨〇). Each of the TV cameras (93) and (94) is photographed, and an image is observed by a large glass substrate (2) observed by each of the inspection heads (8 1) and (82), and each image signal is output; these image signals are Transfer to the control unit (10). Furthermore, as shown in FIG. 1, the stage (1) is provided with a Y scale (ll); the inspection head moving stage (7) is provided with an X scale (12); the control unit (10) It has the functions of managing the position coordinates of the Y scale (11) and the X scale (12), and moving and controlling the movement of the stage (7) and the inspection heads (81) and (82). In addition, the control unit (10) inputs image signals output from the TV cameras (93) and (94), and these image signals have, select any one or both or both image signals (selection means), and let the image The observation image of the large glass substrate (2) of the signal is displayed on the function of the TV screen (display device) (13). When the control unit (10) moves and controls the inspection head to move the stage (7) and the inspection heads (81) and (82), and to the large glass substrates (2) of the inspection heads (81) and (81), When the observation field moves to the XY direction, it has a function of overlapping the boundary portions of these observation fields. Printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs Next, the operation of the substrate inspection device constructed as described above will be explained; when the large glass substrate (2) is supplied to the stage (3), the large glass substrate (2) will be borrowed. Positioning is performed by a plurality of substrate fixing members (4), and the stage (3) is adsorbed and supported. Figure 3 shows the movement state diagram of the inspection head; the control unit (10) illuminates the through-line illuminations (14), (14), and causes the inspection head to move the stage (7) and the inspection heads (93), (94) Move to the coordinate origin position 0 shown in Figure 3. Next, the control unit (10) moves the inspection head to move the stage (7) and the inspection heads (81) and (82) to the XY direction. The paper size is applicable to the Chinese National Standard (CNS) VIII 4 specifications (210X297 mm). 1264532 E6 F6 V. Detailed description of the invention: Line control, and move the inspection positions of the inspection heads (81) and (82). (Please read the precautions on the back and draw again.) In other words, the inspection head moving stage (7) moves directly to the Y direction along the guide rails (6) and (6), and each inspection head (81), (82) ) Move the horizontal beam (7 1 ) of the stage (7) along the inspection head and move directly to the X direction. At this time, as shown in FIG. 4A and FIG. 4B, each of the inspection heads (81) and (82) will be in the observation field of each inspection head which is formed in about 1/2 of the entire large glass substrate (2). h, moving within P2; in other words, as shown in Fig. 4A, the objective lens (83) having one end of the inspection head (81) moves in the inspection head Pi field; and as shown in Fig. 4B, the other end is inspected. The head (82) objective lens (83) moves in the inspection head observation field ; 2; in other words, the inspection head movement stage (7) and the inspection heads (81), (82) are present throughout the large glass substrate (2) ) Move within 1/2 of the field. Further, the control unit (10) moves and controls the inspection head to move the stage (7) and the inspection heads (81) and (82), and allows the optical axes of the inspection heads (81) and (82) (objective lens (83). When the optical axes of (83) are moved in the respective observation fields Pi and p2, the partial fields Ρ, p2 are superimposed on the boundary of the inspection heads 、! and P2. The TV camera (93) captures the image of the large glass substrate (2) in the inspection head P! inspected by the objective lens (83) of the inspection head (81), and then outputs the image signal; The TV camera (94) captures a large glass substrate (2) in the inspection head observation area p2 observed by the objective lens (83) of the inspection head (82), and then outputs an image signal; these image signals are output. It is transmitted to the control unit (10). The Central Standards Bureau of the Ministry of Economic Affairs, the Consumer Cooperatives Printing Control Department (10) inputs the image signals output by the TV cameras (93) and (94), and then selects any one of these image signals or one or both of the image signals. 'The observation image of the large glass substrate (2) of the image signal is displayed on the TV screen (13). Furthermore, the control unit (1〇) inputs the video signals output by the TV cameras (93) and (94), and divides the TV screen (13) into two screens, which can also be displayed on each divided screen. Each inspection head observes an observation image of a large glass substrate (2) of the fields P, p2. 13 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of invention · (Please read the notes on the back and draw again) The control unit (10) will read Based on the data of the gamma scale (11) and the X scale (12), the defect coordinates of the large glass substrate (2), which are mastered by other macro inspection devices, are used to determine the position coordinates of the defect, in order to make the inspection head (8 1) The optical axis and the defective portion are identical to each other, and the movement and control inspection head moves the stage (7) and the inspection head (81). In this way, the defective portion enters the field of view of the objective lens (83) of the inspection head (81), and then the defective portion is enlarged by the objective lens (83); next, the enlarged defect portion image is transmitted through the TV camera ( 93) Take a picture and display it on the TV screen (13). When the grating scans the entire large glass substrate (2), the control unit (10) moves the inspection head moving stage (7) to the Y direction and moves the inspection heads (81) and (82) to the X direction. It is also possible to input the enlarged image data that has been loaded by the TV cameras (93) and (94) of the inspection heads (81) and (82). After completing this precise observation, if a predetermined instruction is given to the control unit (10), the inspection head moving stage (7) and the inspection heads (81) and (82) will return to the starting position; In addition to the large glass substrate (2) that was inspected by the stage (3), a new unchecked large glass substrate (2) was placed on the stage (3). The employee's consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs is cracked on the substrate inspection apparatus of the first embodiment described above, and the stage (3) on which the large glass substrate (2) is mounted is placed across the stage, and the stage ( 3) On the large-sized glass substrate (2) to be mounted, the stage (3) is provided with an inspection head moving the stage (7) movable to the Y direction, and the inspection head is allowed to move the stage (7). The moving direction is moved in the vertical direction (X direction), and a predetermined interval is also provided in the state where the objective lenses (83) and (83) are located outside, and the moving direction of the stage (7) is moved in the same manner as the inspection head. Two inspection heads (81), (82) configured above. In this way, the inspection head moving stage (7) and the inspection heads (81) and (82) can be housed in the space in which the guide rails (5) are provided in the space of the stage (3). The device body size can also be controlled within the limit range; specifically, as shown in FIG. 2 and FIG. 3, the depth dimension S of the device body can be reduced to only slightly larger than the Y dimension D of the large glass substrate (2). In addition, when performing inspections, check the paper size for the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1264532 E6 F6 V. Detailed description of the invention: Check head (81), (82) will not It protrudes from the outer side of the large glass substrate (2), and saves space for installation of the device. (Please read the precautions on the back and draw again.) As shown in Figure 3, the device body width S2 can be reduced to only slightly larger than the width of the large glass substrate (2), and 2 inspection heads are applied. The pillars of the stage (7) are wide. As shown in FIG. 4A and FIG. 4B, the two inspection heads (81) and (82) are moved in the inspection head fields P! and P2 of 1/2 of the entire large glass substrate (2). Therefore, compared with the case where one inspection head is provided, the Y-direction movement stroke of the inspection head moving stage (7) can be shortened by 1/2, and the measurement interval time can be shortened; The moving distance of the moving platform (7), and the two inspection heads (81) and (82) are attached to the horizontal beam (71), and then arranged in a symmetrical state, the stage can be moved for the inspection head (7). The horizontal beam (71) improves the balance of the inspection heads (81), (82) and reduces the load on the drive train. In other words, in the case where the liquid crystal display enters the mass production stage, the required measurement interval time for inspecting the substrate can be shortened, and the amount of equipment investment required by the user can be suppressed, and the requirements of the small device main body can be met. In addition, the optical axis distance F of each of the two inspection heads (81) and (82) is set to be 1/2 or less of the depth of the large glass substrate (2). And arranged in such a manner that the inspection heads (81) and (82) are attached to each other; thus, the two inspection heads (81) and (8 2) are not significantly protruded from the large glass substrate (2). On the outside, the entire large glass substrate (2) can be observed. Further, when the two inspection heads (81) and (82) are moved in the inspection heads P, p2, the partial fields P!, P2 overlap each other on the boundary of these observation fields P1 and p2. After that, it is also possible to check the boundary of the observation head fields P1 and p2. Fig. 5 is a view showing the configuration of a substrate inspecting apparatus according to a second embodiment of the present invention; and Fig. 5 is the same as that in Fig. 1. 15 The paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: (Please read the notes on the back and draw again), Figure 5 shows when setting up a TV camera The optical system is composed of the same structure; the two inspection heads (81) and (82) belong to the same configuration; for example, when the configuration of an inspection head (81) is taken as an example, it is provided with illumination for epi-illumination (1) 〇〇), and in the optical path of the epi-illumination lamp output by the projection illumination (100), a half mnror (102) penetrating through the lens (10) is provided; the semi-transparent reflection is performed here. An objective lens (1〇3) is disposed on the reflection optical path of the mirror (102); and an optical path zigzag mirror is disposed on the transmission optical path of the objective lens (103) through the semi-transparent mirror (102) ( 104); the configuration of the other inspection head (82) is the same as that of the inspection head (81), and thus the description is omitted. Between each of the optical path meandering mirrors (104) and (104) of the inspection heads (81) and (82), an optical path selection mirror (selection means) (105) is provided; the optical path selection mirror ( 105), reflecting any one of the inspection heads (81), (82) to a TV camera (93) provided through the formation of the image mirror (106); the TV camera (93), It is placed above any of the inspection heads (81) and (82). According to this configuration, each of the inspection heads (81) and (81) allows the projection illumination light output from each of the projection illuminations (100) to be incident on the translucent reflection through the lenses (101) and (101). The mirrors (102) and (102) are irradiated onto the large glass substrate (2) by the objective lenses (103) and (103) reflected by the semi-transparent mirrors (102) and (102). The image of the large glass substrate (2) printed by the employee's consumption cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs is incident on the semi-transparent mirrors (102) and (102) from the objective lenses (103) and (103). The transparent mirrors (102) and (102) are incident on the optical path meandering mirrors (104) and (104), and are then incident on the optical path selecting mirror (105). The image of the inspection heads (107), (108) can be reflected toward a TV camera (93) by rotating the optical path selection mirror (105) through the formation of the image lens (106); the TV camera ( 93) The image from the surface of the large glass substrate (2) is taken, and the image signal is output. The control unit (10) inputs the image signal output by the TV camera (93), and the paper size is applied to the Chinese National Standard (CNS) A4 specification (21〇><297 嫠) 1264532 E6-F6. DETAILED DESCRIPTION: After the image signal is processed, an observation image of the large glass substrate 2 is displayed on the TV display (13). According to the second embodiment described above, any image of the inspection heads (81) and (82) can be made to face a TV by forming an image lens (106) by the optical path selection mirror (105). Since the camera (93) is incident, it is not necessary to provide two TV cameras, and the configuration of the device can be simplified. Here, in the first and second embodiments described above, the case where the two inspection heads (81) and (82) are provided has been described. However, the inspection head may be moved to the stage (7) and moved. a plurality of inspection heads composed of two inspection heads (81) and (82); for example, two inspection heads composed of two inspection heads (81) and (82) are provided, and one inspection can be performed. The observation field of the head is reduced to about 1/4 of the entire large glass substrate (6), and the measurement interval can be shortened. Further, the substrate inspection device can be applied to defect inspection of a large-sized glass substrate such as a flat panel display (FPD) glass substrate or a color filter, in addition to a large-sized glass substrate (6) for a liquid crystal display. Figure 6 is a side elevational cross-sectional view showing the substrate inspecting apparatus of the third embodiment of the present invention; Figure 7 is a front view showing the substrate inspecting device, which is disposed on the FPD line, and can transport a large glass substrate between the two processes. Conveyor belt. At the left and right ends of the base (109) of the roller conveyor belt (101), a door type inspection head moving stage (door type arm) (110) is provided; the horizontal beam 111 of the inspection head moving stage (110) is provided. The upper part is provided with two inspection heads (103) and (104) which can be moved orthogonally to the flow direction (Y direction) of the conveyor belt (101) through the support member (105) and by the motor and the ball screw; The inspection heads (103) and (104) are arranged in a close arrangement with respect to the horizontal beam (111) at regular intervals; the inspection heads (103) and (104) are arranged to adjust the objective lenses (106) and (107). The interval Ly is set by a driving means such as a linear motor to move the supporting member (105) in the arrow direction (Y direction). 17 This paper scale applies to China National Standard (CNS) A4 specification (210X 297 麓) ---------— (Please read the notes on the back and draw again) - Book the Ministry of Economic Affairs Central Bureau of Standards staff consumption Cooperatives Printed 1264532 E6 F6 printed by the Consumer Standards Agency of the Central Bureau of Standards of the Ministry of Economic Affairs V. Detailed description of the invention: In order to be able to be placed on the glass substrate (108), as shown in Figure 14, the four-dimensional mark (200)' is set. The inspection heads (103) and (104); the inspection heads (103) and (104) are mounted with objective lenses (106) and (107), and through the camera lenses (113) and (114), the TV camera is installed ( 115) and (116); the inspection heads (103) and (104) are provided with an image of a glass substrate (108) supported by the conveyor belt (101) and include an objective lens (106) as will be described later. (107) an imaging optical system, an illumination optical system for illuminating a glass substrate (108), an observation system for observing an image of a large glass substrate (1〇8), and a focusing device for focusing on a large glass substrate (108) Etc. Forming an image optics with the conversion function of the objective lens (106), (107) Transducer) and focus function (autofocus); illumination optics has epi-illumination function g; observation system has the above TV camera (115), (116); objective lens (106), (107) conversion function and focus The function is made electric, and can be remotely controlled from the control unit (11 7); each TV camera (115), (116) is photographed by each of the inspection heads (103), (104). The large glass substrate (108) observes the image and outputs each image signal; these image signals are transmitted to the control unit (117). The control unit (117) has a pulse position coordinate for managing the motor encoder, and a movement and control check. The head moves the stage (110) and the functions of the inspection heads (103) and (104), and inputs the image signals output by the respective TV cameras (115) and (116), and displays the image of the glass substrate 108. The function of the TV display (screen device) (11 8). Figure 8 shows the structure of the roller conveyor belt (101); the support members (120), (120) of the roller conveyor belt (1 〇 1), which can rotatably support the cylinder a plurality of roller support shafts (121) formed by a rod shape; each roller The support shaft (121) is supported by a plurality of rollers (122) forming a predetermined interval; one end of each roller support shaft (121) penetrates through the support member (120), and the end portion has a pulley ( L23); each pulley (123) has a belt (124) facing the Y direction. The conveyor belt (10 1 ) is driven by a motor to rotate the end pulley (123) and then through the pulleys (123). ), the direction of the Y-rotating belt 18 is applicable to the Chinese National Standard (CNS) A4 specification (210乂297 嫠1 (please read the notes on the back and draw again)
1264532 E6 F6 五、發明之詳細説明： (請先閲讀背面之注意事項再行繪製) (124) ;由於是藉用這種方式.,，讓各皮帶輪（123)朝Y向旋轉， 因此會隨著各滾輪支撐軸（121)的旋轉，讓各滾輪（122)朝Y向 旋轉，並將數個滾輪（122)上所搭載的玻璃基板（108)搬運到Y 向。 輸送帶（101)上游入口附近的基座（109)上，設有偵測出玻 璃基板（108)送達的反射型光電傳感器（photo sensoi*)(125);在 輸送帶101下游出口附近的基座（109)上，沿著玻璃基板（108) 的行進方向（Y向），設有二個可偵測出送達玻璃基板（108) 的反射型光電傳感器（126)、（127)。 此外，在輸送帶（101)的上游與下游，則設有讓流過來的 玻璃基板（108)，各朝Y向定向的定向機構（41)、（42);定向機 構（41)、（42)則各包含二個機構（411)、（4 12)及（421)、（422)， 機構（411)、（4 12)及機構（421)、（422)，則從各支撐構件（120)、 (120)之間的中心，被配置成等間隔狀態；各機構（411)、（412) 及（421)、（422)，則包含後述的汽缸（43)等。 輸送帶（101)的兩端則沿著支撐構件（120)、（120)，設有讓 送達的玻璃基板（108)，各朝X向進行定向的定向機構（51)、 (52);各定向機構（51)、（52)，則如後述內容一樣包含活動板 (511)、二個插梢（Pin)(512)、（512)、二組汽缸（513)、（513)等。 再者，藉由控制部（117)控制上述馬達、光電傳感器 經濟部中央標準局員工消費合作社印製 (125) 、（126)、（127)、定向機構（41)、（42)、（51)、（51)之各汽 缸等。 圖九表示定向機構（41)、（42)之各機構（411)、（412)、 (4 2 1 )、（ 4 2 2)的構成側視圖；圖九機構是在基座（1 〇 9)上’安裝 支撐驅動部（4 10)的支撐構件（402);支撐構件（402)，則被立設 於形成板狀的基座（109)上，在該側面上則固定了構成驅動部 (4 10)的汽缸（403);汽缸（403)則被安裝成可讓該活動部（4〇4) 朝向Y向移動的型態。 19 本紙張尺度適用中國國家榇準（CNS ) M規格（2ΐ〇χ297公釐） 1264532 E6 F6 ______ 五、發明之詳細説明： (請先閱讀背面之注意事項再行繪裝) 此外，支撐構件（402)上端側面’則支撐著用以固定玻璃 基板（108)邊緣的可轉動固定部（405);而且汽缸（403)的活動部 (404)前端，則有安裝連接構件（406)，該連接構件（406)與固定 部（405)，則以可相互轉動的方式所連接而成。 當輸送帶（101)上沒有玻璃基板（108)時，各機構（411)、 (412)、（421)、（422)的活動部（404)，則被收納於汽缸（403)內， 固定部（405)的突出片（405 1)，則自玻璃基板（108)的通過面a 朝下方疏散。 圖十表示構成定向機構（51)、（52)的側視圖；圖十的機 構，在基座（109)上並列裝載二組汽缸（513),;活動板（511)的剖 面則形成L型，該縱板（51U)上則有安裝各汽缸（513)的活動 部（414)前端；此外，活動板（511)的橫板（5112)上，則朝Y向 保有規定間隔，並受到可轉動的二個插梢（5 12)所支撐。 當輸送帶（101)上沒有玻璃基板（108)時，各定向機構 (51)、（52)的活動部（514)、（514)，則從各汽缸（513)、（513)內 押出，且具備插梢（512)、（5 12)的各活動板（511)、（511)，則疏 散到各支撐構件（120)、（120)。 接下來，將說明上述裝置的動作。 經濟部中央標準局員工消費合作社印製 在上游製程中完成處理的玻璃基板（108)，是透過輸送帶 搬運到輸送帶（101)的上游入口交給輸送帶（101);此玻璃基板 (108)，是藉由上述馬達驅動讓輸送帶（101)流入Y向，當前端 到達光電傳感器（125)的位置後，光電傳感器就會偵測已送達 之玻璃基板（108)的輸送帶（101)。 當玻璃基板（108)前端到達光電傳感器（126)位置後，光電 傳感器（126)則偵測送達的玻璃基板（108);當光電傳感器（126) 偵測到已送達的玻璃基板（1 08)後，控制部（1 Π)就會讓上述驅 動馬達減速；藉由這種方式，讓玻璃基板（108)朝Y向減速； 接下來，當玻璃基板（108)前端到達光電傳感器（127)的位置 20 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 _ 五、發明之詳細説明： (請先閱讀背面之注意事項再行繪製) 後，光電傳感器（127)就會偵測送達的玻璃基板（108);當電 傳感器（127)偵測到已送達玻璃基板（108)後，控制部（117)就會 讓上述馬達停止驅動；藉由這種方式，讓玻璃基板（108)停止 於輸送帶（101)中央附近的檢查位置。 控制部（117)會驅動定向機構（51)、（52);此時，控制部（117) 會將定向機構（51)、（52)的各活動部（514)，同時拉回汽缸（51 3) 內；各定向機構（51)、（52)，則讓各活動板（511)、（511)，朝輸 送帶（101)中央移動到X向；如此一來，玻璃基板（108)的兩側 邊緣，便藉由各插梢（5 12)，押入輸送帶（101)的中央；其結果， 玻璃基板（4)便定位於輸送帶（101)的X向正，中央處。 控制部（117)，則p動定向機構（41)、（42);此時，控制部 (117)會將機構（411)、（412)、（421)、（422)的各活動部（404)， 同時從汽缸（403)內押出；如此一來，各機構（411)、（412)、 .(421)、（422)，則隨著移動到連接構件（406)的前方，讓固定部 (405)在軸（4050)周圍轉動，各固定部（405)的突出片（405 1)則以 幾乎和通過面（a)成直交狀態下立起；玻璃基板（108)的前端， 則藉由機械（421)、（422)的各突出片（4051)，押往上游端的同 ，後緣則藉由機械（421)、.（422)的各突出片（405 1)押往下游 端；此時，鄰接玻璃基板（108)各端緣的各插梢（512)，則隨著 玻璃基板（108)的Y向移動而旋轉；其結果，玻璃基板（108)則 被定位於輸送帶（101)上的X向與Y向正中央處。 經濟部中央標準局員工消費合作社印製 接下來，檢查人員對控制部（117)採取規定操作後，控制 部（11 7)則沿著檢查頭移動載物台（110)，讓檢查頭（103)、（104) 朝X向移動，讓各檢查頭（103)、（104)物鏡（106)、（107)位於， 對輸送帶（101)流向呈左側位置玻璃基板（108)之各標印 (200)、（200)上；再者，物鏡（106)與物鏡（107)的光軸間隔，則 事先予以調整，以便於符合並列於Y向之二個標印（200)、（200) 之間的距離；並在控制部（117)輸入，玻璃基板（108)四角處所 21 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： 形成之四個標印（2.00)的Y向間隔尺寸ly與X向間隔尺寸Lx。 (請先閱讀背面之注意事項再行繪製) T V攝影機（1 1 5)則拍攝檢查頭（1 〇 3)物鏡（1 〇 6)所觀察到的 上游端標印（200)圖像，再輸出該影像信號；同時，TV攝影機 (1 16)則拍攝檢查頭（104)物鏡（107)所觀察到的下游端標印（200) 圖像，再輸出該影像信號；這些影像信號則被送往控制部 (117)。 控制部（11 7)則輸入各TV攝影機（115)、（11 6)所輸出的各 影像信號後，在TV顯示器（11 8)上顯示出各標印200的觀察圖 像；檢查人員則檢視TV顯示器（1 18)的影像，檢查各標印（200) 上有無發生焦點模糊、缺陷等缺陷或尺寸的偏差。 接下來，檢查人員對控制部（117)採取規定操作後，控制 部（1 17)則沿著檢查頭移動載物台（1 10)，讓檢查頭（1〇3)、（104) 只朝事先設定的X向間隔尺寸L X移動，並讓各檢查頭（1 〇 3)、 (104)的物鏡（106)、（107)位於，對輸送帶（101)流向呈右側位置 之玻璃基板108的各標印（200)、（200)上。 TV攝影機（11 5)則拍攝檢查頭（103物鏡（106)所觀察到的 上游端標印（200)圖像，再輸出該影像信號；同時，TV攝影機 (11 6)則拍攝檢查頭（104)物鏡（107)所觀察到的下游端標印（200) 圖像，再輸出該影像信號；這些影像信號則被送往控制部 (117)。 控制部（11 7)則輸入各TV攝影機（115)、（11 6)所輸出的各 經濟部中央標準局員工消費合作社印製 影像信號後，在TV顯示器（118)上顯示出各標印（200)的觀察 圖像；檢查人員則檢視TV顯示器（11 8)的影像，檢查各標印 (200)上有無發生焦點模糊、缺陷等缺陷或尺寸的偏差。 接下來，當玻璃基板（108)上的所有標印皆無異常時，檢 查人員對控制部（1 17)採取規定操作後，控制部（117)則驅動定 向機構（51)、（52);此時，控制部（117)將機構（51)、（52)的各 活動部（514)，自汽缸（5 13)內押出；各定向機構（51)、（5 2)則讓 22 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、，發明之詳細説明： 各活動板（511)、（511)，朝支撐構件（120)、（120)端移動到X 向；再從玻璃基板（108)的兩測端疏散各插梢（5 12。 (請先閱讀背面之注意事項再行繪製) 接下來，控制部（117)，則驅動定向機構（41)、（42);此時， 控制部（11 7)會將機構（411)、（412) ' (421)、（422)的各活動部 (404)，同時拉回到汽缸（403)內；如此一來，各機構（411)、 (412)、（421)、（422)，則隨著移動到連接構件（406)的後方，讓 固定部（405)在軸（4050)周圍轉動，各固定部（405)的突出片 (405 1)則自通過面（a)疏散到下方。 控制部（117)則再度驅動上述馬達；玻璃基板（108)則讓輸 送帶（101)流入下游端的製程。 再者，當玻璃基板（108)上的任一個標印、有異常時，檢查 人員則自輸送帶（101)撤除玻璃基板（108)。 此外，檢查尺寸不同的玻璃基板108上的標印時，則讓 檢查頭（103)、）104)移動到到支撐構件（105)的規定距離，控制 部（1Π)可藉由輸入該玻璃基板（108)四個標印（200)之輸送帶 (101)上的位置資料予以因應。 此外，只要事先在控制部（117)的記憶體上，登錄來自於 設計資料的各種玻璃基板（108)上的標印X向間隔尺寸與Y向 間隔尺寸，將玻璃基板的種類資料輸入到控制部（117)，就可 自動設定各檢查頭（103)、（104)物鏡（106)、（107)之Y向間隔， 與檢查頭（103)、（104)之X向移動距離。 經濟部中央標準局員工消費合作社印製 根據上述第3實施型態得知，可在將玻璃基板搬入製程 的滾輪輸送帶上，檢查出玻璃基板在待機時的定位標印，而 且還可檢查出用二個檢查頭同時定位的標印，因此可縮短處 理時間；此外，只要事先將二個檢查頭設定於相同方向（X 向）以控制距離，就可在四角標印上輕鬆定位各檢查頭。 再者，只要調整二個檢查頭的間隔與X向移動距離，就 可因應各種尺寸的玻璃基板。 23 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X297公釐） 1264532 E6 F6 五、發明之詳細説明： 將滾輪輸送帶所送達的玻璃基板’定位於檢查位置上， 就可將二個檢查頭正確定位於各標印上。 (請先閱讀背面之注意事項再行繪製) 換言之，根據上述第3實施型態的基板檢查裝置得知， 可用低價的構成方式，在短時間內藉由滾輪輸送帶’對上游 製程送來的標的基板，進行至少四角標印的缺陷判定或測量 尺寸，讓前述標的基板可流入下游製程。 此外，在滾輪輸送帶上定位標的基板後，就可讓二個檢 查頭正確定位於各標的標印上；再者，只要調整二個檢查頭 水平波束方向的移動距離、及二個檢查頭之間的間隔，就可 支援各種尺寸的基板。 . 再者，上述玻璃基板上的、四角標印檢查，不侷限於上述 第3實施型態所構成的基板檢查裝置，也可用上述第1、第2 實施型態，由可移動檢查頭移動載物台所構成的基板檢查裝 置予以.實施。 此時，爲了得以調整雙方物鏡（83)、（83)的間隔，可用線 性馬達等驅動裝置，將檢查頭（81)、（82)設置成，對水平波束 (71)呈箭頭方向（Y向）移動的狀態；藉由這種方式，讓標印 Y向間隔尺寸與物鏡（83)、（83)間隔尺寸互爲一致，還可檢查 並列於Y向的二個標印；接下來，讓檢查頭（81)、（82)朝X向 的規定距離移動，就可檢查二個標印。 經濟部中央標準局員工消費合作社印製 圖十一表示構成本發明第4實施型態之相關基板檢查裝 置的外觀立體圖；圖十一付有部份同於圖一的符號。 檢查頭移動載物台（7)的水平波束（71)上，設有支撐構件 (97)，此支撐構件（97)的兩端，則以夾住水平波束（71)的狀態， 安裝了用作各檢查頭之用的TV攝影機（93)、（94) ; TV攝影機 (93)、（94)上，則有安裝各攝影鏡疼（95)、（96);具備TV攝影 機（93)、（94)的支撐構件（97)，則透過被設置於水平波束（71) 下方的導軌，可藉由馬達呈現一體型後，沿著水平波束（71) 24 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公麓） 1264532 E6 F6 五、發明之詳細説明： 移動到X向。 ， 在上述第4實施型態的基板檢查裝置上，以同於檢查頭 移動載物台（7)之移動方向的規定間隔，設置二個TV攝影機 03)、（94)後，就可拍攝玻璃基板表面的任一個部份。 再者，本發明不僅限於上述各實施型態，只要在不變更 要曰的範圍內都可適當變形後再實施。 〔產業上利用的可能性〕 本發明用以提供，得以縮短檢查基板所需之測量間隔時 間、及做成輕薄短小型裝置主體的基板檢查裝置。 (請先閲讀背面之注意事項再行繪製) 經濟部中央標準局員工消費合作社印製 25 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）1264532 E6 F6 V. Detailed description of the invention: (Please read the notes on the back and draw again) (124); Because this method is used, the pulleys (123) are rotated in the Y direction, so they will follow The rotation of each roller support shaft (121) causes the rollers (122) to rotate in the Y direction, and conveys the glass substrate (108) mounted on the plurality of rollers (122) to the Y direction. A pedestal (109) near the upstream entrance of the conveyor belt (101) is provided with a reflective photosensor (photo sensoi*) (125) for detecting the delivery of the glass substrate (108); and a base near the downstream exit of the conveyor belt 101. On the seat (109), two reflective photoelectric sensors (126) and (127) for detecting the delivery of the glass substrate (108) are provided along the traveling direction (Y direction) of the glass substrate (108). Further, upstream and downstream of the conveyor belt (101), there are provided glass substrates (108) for flow, and orientation mechanisms (41), (42) oriented in the Y direction; orientation mechanisms (41), (42) ) each consisting of two mechanisms (411), (4 12) and (421), (422), mechanisms (411), (4 12) and mechanisms (421), (422), from each support member (120) The centers between (120) are arranged at equal intervals; the respective mechanisms (411), (412), and (421) and (422) include cylinders (43) and the like which will be described later. The two ends of the conveyor belt (101) are provided along the support members (120), (120), and are provided with glass substrates (108) to be oriented, and orientation mechanisms (51) and (52) each oriented in the X direction; The orientation mechanisms (51) and (52) include a movable plate (511), two insertion pins (512), (512), two sets of cylinders (513), (513), and the like as will be described later. Furthermore, the control unit (117) controls the motor, the photoelectricity department, the Central Bureau of Standards, the staff consumption cooperative, and the printing (125), (126), (127), orientation mechanism (41), (42), (51). ), (51) each cylinder, etc. Figure 9 shows a side view of the mechanisms (411), (412), (4 2 1 ), (42 2) of the orienting mechanisms (41), (42); Figure 9 shows the mechanism at the base (1 〇 9 a support member (402) for mounting the support driving portion (4 10); the support member (402) is erected on the base (109) forming the plate shape, and the driving portion is fixed on the side surface The cylinder (403) of (4 10); the cylinder (403) is mounted in a configuration that allows the movable portion (4〇4) to move toward the Y direction. 19 The paper size is applicable to China National Standard (CNS) M specification (2ΐ〇χ297 mm) 1264532 E6 F6 ______ V. Detailed description of the invention: (Please read the note on the back and then paint) In addition, the support member ( 402) the upper end side 'supports a rotatable fixing portion (405) for fixing the edge of the glass substrate (108); and the front end of the movable portion (404) of the cylinder (403) has a mounting connecting member (406) for connecting The member (406) and the fixing portion (405) are connected in a mutually rotatable manner. When there is no glass substrate (108) on the conveyor belt (101), the movable portions (404) of the respective mechanisms (411), (412), (421), and (422) are housed in the cylinder (403) and fixed. The protruding piece (405 1) of the portion (405) is evacuated downward from the passing surface a of the glass substrate (108). Figure 10 shows a side view of the orientation mechanisms (51), (52); the mechanism of Figure 10, two sets of cylinders (513) are placed side by side on the base (109); the profile of the movable plate (511) forms an L-shape The vertical plate (51U) has a front end of the movable portion (414) on which each cylinder (513) is mounted. Further, the horizontal plate (5112) of the movable plate (511) maintains a predetermined interval in the Y direction and is exposed. The two rotating ends (5 12) are supported. When there is no glass substrate (108) on the conveyor belt (101), the movable portions (514) and (514) of the respective orienting mechanisms (51) and (52) are pushed out from the respective cylinders (513) and (513). Each of the movable plates (511) and (511) having the insertion ends (512) and (512) is evacuated to the respective support members (120) and (120). Next, the operation of the above device will be explained. The glass substrate (108) of the Central Bureau of Standards of the Ministry of Economic Affairs printed by the consumer consortium in the upstream process is delivered to the conveyor belt (101) through the conveyor to the upstream inlet of the conveyor belt (101); the glass substrate (108) After the motor is driven to let the conveyor belt (101) flow into the Y direction, and the current end reaches the position of the photoelectric sensor (125), the photoelectric sensor detects the conveyor belt (101) of the delivered glass substrate (108). . When the front end of the glass substrate (108) reaches the position of the photosensor (126), the photosensor (126) detects the delivered glass substrate (108); when the photosensor (126) detects the delivered glass substrate (1 08) Thereafter, the control unit (1 Π) decelerates the drive motor; in this way, the glass substrate (108) is decelerated toward the Y direction; next, when the front end of the glass substrate (108) reaches the photosensor (127) Position 20 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 _ 5. Detailed description of the invention: (Please read the notes on the back and draw again), then the photoelectric sensor (127) The glass substrate (108) is detected; when the electrical sensor (127) detects that the glass substrate (108) has been delivered, the control unit (117) stops the driving of the motor; thereby, the glass is allowed to be driven. The substrate (108) is stopped at an inspection position near the center of the conveyor belt (101). The control unit (117) drives the orientation mechanisms (51), (52); at this time, the control unit (117) pulls the movable portions (514) of the orientation mechanisms (51) and (52) back to the cylinder (51). 3) inside; each orienting mechanism (51), (52), let each movable plate (511), (511) move toward the center of the conveyor belt (101) to the X direction; thus, the glass substrate (108) The two side edges are pushed into the center of the conveyor belt (101) by the respective spigots (5 12); as a result, the glass substrate (4) is positioned at the X-direction of the conveyor belt (101) at the center. The control unit (117) is the p-direction mechanism (41) and (42); at this time, the control unit (117) will move the activities of the mechanisms (411), (412), (421), and (422) ( 404), simultaneously ejected from the cylinder (403); thus, the mechanisms (411), (412), (421), (422) are fixed as they move to the front of the connecting member (406) The portion (405) rotates around the shaft (4050), and the protruding piece (405 1) of each fixing portion (405) stands up almost in a state of being orthogonal to the passing surface (a); the front end of the glass substrate (108) By the protruding pieces (4051) of the machines (421) and (422), the same as the upstream end, the trailing edge is pushed to the downstream end by the protruding pieces (405 1) of the machines (421) and (422). At this time, the respective spigots (512) adjacent to the respective end edges of the glass substrate (108) are rotated in accordance with the Y-direction movement of the glass substrate (108); as a result, the glass substrate (108) is positioned on the conveyor belt. The X direction and the Y direction on the (101) are at the center. The Central Bureau of Standards of the Ministry of Economic Affairs prints the employee's consumption cooperative. Next, after the inspector takes the prescribed operation on the control unit (117), the control unit (11 7) moves the stage (110) along the inspection head to let the inspection head (103) And (104) moving toward the X direction, so that the inspection heads (103) and (104) objective lenses (106) and (107) are located, and the markings of the conveyor belt (101) flowing to the left side position glass substrate (108) are located. (200), (200); further, the optical axis of the objective lens (106) and the objective lens (107) are adjusted in advance so as to conform to the two markings (200) and (200) juxtaposed in the Y direction. The distance between the control unit and the input of the control unit (117), the glass substrate (108) at the four corners of the paper. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). 1264532 E6 F6 5. Detailed description of the invention: Formation The Y-space spacing size ly of the four marks (2.00) is spaced from the X-direction spacing dimension Lx. (Please read the precautions on the back and draw again.) TV camera (1 1 5) captures the upstream end mark (200) image observed by the inspection head (1 〇 3) objective lens (1 〇 6), and then outputs The image signal; at the same time, the TV camera (1 16) captures the downstream end mark (200) image observed by the objective lens (107) of the inspection head (104), and then outputs the image signal; these image signals are sent to Control unit (117). The control unit (11 7) inputs the image signals output by the respective TV cameras (115) and (11 6), and displays the observed images of the respective marks 200 on the TV display (11 8); the inspector checks the images. The image of the TV display (1 18) is checked for defects such as focus blur, defects, and the like on each of the marks (200). Next, after the inspector takes a predetermined operation on the control unit (117), the control unit (1 17) moves the stage (1 10) along the inspection head, so that the inspection heads (1〇3) and (104) only face The previously set X-direction spacer size LX is moved, and the objective lenses (106) and (107) of the respective inspection heads (1 〇 3) and (104) are located, and the conveyor belt (101) flows to the glass substrate 108 at the right side position. Each mark (200), (200). The TV camera (11 5) captures the image of the upstream end mark (200) observed by the objective lens (106), and then outputs the image signal; at the same time, the TV camera (116) shoots the inspection head (104). The downstream end mark (200) image observed by the objective lens (107) is outputted, and the image signal is sent to the control unit (117). The control unit (11 7) inputs each TV camera ( 115), (11 6) After outputting the video signals from the Consumers' Cooperatives of the Central Bureau of Standards of each Ministry of Economic Affairs, the observation images of each mark (200) are displayed on the TV display (118); the inspectors examine the TV. The image of the display (11 8) is checked for defects such as focus blur, defects, and the like on each of the marks (200). Next, when all the marks on the glass substrate (108) are abnormal, the inspector After the control unit (1 17) performs a predetermined operation, the control unit (117) drives the orientation mechanisms (51) and (52). At this time, the control unit (117) activates the active units of the mechanisms (51) and (52) ( 514), extruded from the cylinder (5 13); each orientation mechanism (51), (5 2) allows 22 The scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: Each movable plate (511), (511) moves toward the support members (120) and (120) To the X direction; then evacuate the spigots from the two ends of the glass substrate (108) (5 12. (Please read the notes on the back and draw again) Next, the control unit (117) drives the orientation mechanism (41) (42); at this time, the control unit (11 7) pulls the movable parts (404) of the mechanisms (411) and (412) '(421) and (422) back into the cylinder (403) at the same time. In this way, each mechanism (411), (412), (421), (422) moves the fixing portion (405) around the shaft (4050) as it moves to the rear of the connecting member (406). The protruding piece (405 1) of each fixing portion (405) is evacuated from the passing surface (a) to the lower side. The control portion (117) drives the motor again; the glass substrate (108) allows the conveyor belt (101) to flow into the downstream end. Further, when any one of the markings on the glass substrate (108) is abnormal, the inspector removes the glass substrate (108) from the conveyor belt (101). Further, when the marking on the glass substrate 108 having different sizes is inspected, the inspection head (103), 104) is moved to a predetermined distance to the supporting member (105), and the control portion (1) can be input by the glass The positional information on the conveyor belt (101) of the four markings (200) of the substrate (108) is adapted. Further, the type information of the glass substrate is input to the control by registering the X-direction spacing dimension and the Y-direction spacing dimension on the various glass substrates (108) of the design data from the memory of the control unit (117) in advance. In the portion (117), the Y-direction intervals of the objective lenses (103) and (107) of the respective inspection heads (103) and (104) are automatically set to the X-direction moving distances of the inspection heads (103) and (104). According to the third embodiment of the above, the central standard bureau of the Ministry of Economic Affairs printed on the roller conveyor belt that carries the glass substrate into the process, and checks the positioning mark of the glass substrate during standby, and can also check out The marking can be simultaneously positioned by the two inspection heads, thereby shortening the processing time; in addition, as long as the two inspection heads are set in the same direction (X direction) in advance to control the distance, the inspection heads can be easily positioned on the four-corner marking . Further, by adjusting the distance between the two inspection heads and the X-direction moving distance, it is possible to respond to glass substrates of various sizes. 23 The paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 1264532 E6 F6 V. Detailed description of the invention: The glass substrate 'supplied by the roller conveyor belt' is positioned at the inspection position, and two The inspection head is determined to be located on each marking. (Please read the precautions on the back side and draw it again.) In other words, according to the substrate inspection apparatus of the third embodiment described above, it is known that the low-speed configuration can be used to send the upstream conveyor by the roller conveyor belt in a short time. The target substrate is subjected to defect determination or measurement of at least four corner marks so that the target substrate can flow into the downstream process. In addition, after positioning the target substrate on the roller conveyor belt, the two inspection heads can be determined to be located on the labels of the respective labels; further, the moving distances of the horizontal beam directions of the two inspection heads and the two inspection heads can be adjusted. The spacing between the various substrates can be supported. Further, the four-dimensional marking inspection on the glass substrate is not limited to the substrate inspection apparatus configured in the third embodiment, and the movable inspection head can be moved by the first and second embodiments. The substrate inspection device composed of the object table is implemented. At this time, in order to adjust the interval between the objective lenses (83) and (83), the inspection heads (81) and (82) may be arranged in the direction of the arrow (Y direction) to the horizontal beam (71) by a driving device such as a linear motor. The state of the movement; in this way, the mark Y is spaced apart from the spacing of the objective lenses (83), (83), and the two markings juxtaposed in the Y direction can be checked; When the inspection heads (81) and (82) move toward a predetermined distance in the X direction, the two marks can be inspected. Printed by the Consumers' Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. Fig. 11 is a perspective view showing the appearance of a substrate inspecting apparatus constituting the fourth embodiment of the present invention; Fig. 11 is a part similar to that of Fig. 1. The horizontal beam (71) of the inspection head moving stage (7) is provided with a supporting member (97), and both ends of the supporting member (97) are mounted in a state of sandwiching the horizontal beam (71). For TV cameras (93) and (94) for each inspection head, TV cameras (93) and (94) are equipped with each camera lens (95) and (96); with a TV camera (93), The support member (97) of (94) is transmitted through the guide rail disposed under the horizontal beam (71), and can be integrated by the motor, and then applied along the horizontal beam (71). A4 size (210 X 297 mm) 1264532 E6 F6 V. Detailed description of the invention: Move to the X direction. In the substrate inspection apparatus according to the fourth embodiment, two TV cameras 03) and (94) are provided at a predetermined interval in the moving direction of the inspection head moving stage (7), and the glass can be photographed. Any part of the surface of the substrate. Furthermore, the present invention is not limited to the above-described respective embodiments, and may be implemented after being appropriately deformed without changing the scope of the invention. [Case of Industrial Use] The present invention provides a substrate inspection apparatus which is capable of shortening the measurement interval time required for inspecting a substrate and forming a thin and light small device main body. (Please read the note on the back and draw it again.) Printed by the Consumer Standards Bureau of the Central Bureau of Standards of the Ministry of Economic Affairs 25 This paper scale applies to the Chinese National Standard (CNS) A4 specification (210X297 mm)