JP6852735B2 - Glass substrate strain measuring method and glass substrate strain measuring device - Google Patents

Description

The present invention relates to a glass substrate strain measuring method and a technique of a glass substrate strain measuring apparatus.

Generally, in a glass substrate used for a flat panel display such as a liquid crystal display device or an organic EL display device, fine elements and the like are formed, so it is necessary to prevent even minute defects. ..
Therefore, in these glass substrates, the presence or absence of defects has been inspected by introducing light from the end face by utilizing the fact that the defects reflect light.
On the other hand, when the outer size of the flat panel display itself becomes large, color unevenness of an image becomes a problem.
Since the color unevenness of this image is due to the distortion of the glass substrate, it is necessary to measure the distortion of the glass substrate.

As a method for quantitatively measuring the strain of a glass substrate, for example, a method of measuring retardation (phase difference due to birefringence) at a plurality of points on the glass substrate and judging from the tendency of the measurement result of this retardation is known. (See, for example, "Patent Document 1").

Special Table 2010-510519

In the measuring method shown in the above-mentioned "Patent Document 1", when the outer size of the sheet-shaped glass substrate is increased, the glass substrate is easily bent and easily damaged. Therefore, the glass substrate to be measured is strain-measured. It is not easy to place on.
Further, in the strain measuring apparatus shown in the above-mentioned "Patent Document 1", as the outer size of the glass substrate increases, the measurement time required for each glass substrate becomes longer, and the measurement result is fed back to the production process of the glass substrate. It is not suitable for use as an inspection device for glass. That is, when the strain of the glass substrate exceeds the permissible range, if the measurement time is long, defective products will continue to be manufactured in the production process of the glass substrate during that time, and the loss will increase.
Therefore, there has been a demand for an apparatus capable of easily mounting a glass substrate and measuring the degree of distortion of the glass substrate easily and quickly.

The present invention has been made in view of the current problems described above, and the glass substrate strain can be easily placed and the degree of strain on the glass substrate can be measured easily and quickly. An object of the present invention is to provide a measuring method and a glass substrate strain measuring device.

The problem to be solved by the present invention is as described above, and next, the means for solving this problem will be described.

That is, the glass substrate strain measuring method according to the present invention is a strain measuring method for measuring the strain at an arbitrary position of the glass substrate on the gantry, and the pedestal in which the glass substrate is tilted in the mounting area on the pedestal. The tilted pedestal is rotated to make it horizontal, and the previously described pedestal in the horizontal state is slid to the measurement area on the gantry, and the opening of the previously described pedestal in the measurement area. The glass substrate is irradiated with a laser beam through the portion to measure the strain.

As described above, in the glass substrate strain measuring method of the present invention, after the glass substrate is placed on the tilted mounting table, the mounting table is rotated to make it horizontal, and the laser beam is applied to the horizontal glass substrate. Irradiate and measure strain. By doing so, the glass substrate can be easily placed on the mounting table, so that the degree of distortion of the glass substrate can be measured easily and quickly. As a result, the degree of distortion of the glass substrate can be measured easily and quickly. Therefore, for example, when manufacturing a glass substrate, the feedback of the measurement result can be quickly fed to the manufacturing process, and the glass substrate can be manufactured. Quality and yield can be improved.

Further, in the glass substrate strain measuring method according to the present invention, it is preferable that the laser beam irradiates the glass substrate while moving.

According to such a glass substrate strain measuring method, it is possible to measure the strain at an arbitrary position on the glass substrate while moving the laser beam.

Further, in the glass substrate strain measuring method according to the present invention, when the glass substrate is placed on the above-mentioned stand, one end of the glass substrate is supported by a receiving portion, and the receiving portion supports the glass substrate at the time of strain measurement. It is preferable to move in the direction away from.

According to such a glass substrate strain measuring method, since the receiving portion is separated from the glass substrate at the time of strain measurement, the strain can be measured accurately without applying an extra force to the end face of the glass substrate.

Further, in the glass substrate strain measuring method according to the present invention, the receiving portion has an uneven portion on the surface facing the above-mentioned pedestal, and the previously described pedestal has the uneven portion on the surface facing the receiving portion. It is preferable that the receiving portion has a matching groove portion and can be moved according to the outer size of the glass substrate in a state where the convex portion of the uneven portion is engaged with the groove portion.

According to such a glass substrate strain measuring method, even if a gap is generated between the receiving portion and the above-mentioned stand, the convex portion of the uneven portion is engaged with the groove portion, so that the glass substrate is the same. It is possible to prevent it from entering the gap.
Further, even if the outer size of the glass substrate is changed, the receiving portion can be moved to cope with the change. As a result, the receiving portion can be appropriately moved to adjust the measurement position of the strain measurement on the glass substrate.

Further, in the glass substrate strain measuring method according to the present invention, it is preferable that the groove portion is continuously provided in the opening portion and the width dimension of the groove portion is smaller than the maximum dimension of the opening portion.

According to such a glass substrate strain measuring method, the convex portion of the uneven portion can be moved even in the opening, and it is possible to widely cope with the change of the outer shape size of the glass substrate.

Further, the glass substrate strain measuring device according to the present invention is a strain measuring device that measures the strain at an arbitrary position of the glass substrate, and measures the strain of the mounting area on which the glass substrate is placed and the glass substrate. A pedestal having a measurement area, a pedestal held on the gantry and on which the glass substrate is placed, and a glass substrate installed in the measurement area and in a horizontal state are irradiated with laser light to measure strain. The gantry is provided with a strain measuring unit, and the gantry has a slide moving mechanism capable of sliding the pre-described pedestal between the pre-described arranging area and the measuring area in the horizontal direction. The description table has a rotation shaft that rotatably supports the description table, and the front description table is configured to be rotatable in an inclined state or a horizontal state by the rotation axis in the front description placement area. It is characterized by having an opening through which laser light is passed.

In the glass substrate strain measuring device having such a configuration, after the glass substrate is placed on a mounting table in an inclined state, the mounting table is rotated to make it horizontal, and the glass substrate in the horizontal state is irradiated with laser light. And measure the strain. By doing so, the glass substrate can be easily placed on the mounting table, and the degree of distortion of the glass substrate can be measured easily and quickly. As a result, the degree of distortion of the glass substrate can be measured easily and quickly. Therefore, for example, when manufacturing a glass substrate, the measurement result can be fed back to the manufacturing process quickly, and the quality of the glass substrate can be measured. And the yield can be improved.

Further, in the glass substrate strain measuring apparatus according to the present invention, the above-mentioned pedestal has a receiving portion that supports one end of the glass substrate when the glass substrate is placed on the pedestal in an inclined state. It is preferable that the portion can be moved in a direction parallel to the mounting surface of the above-mentioned stand.

According to such a glass substrate strain measuring device, by moving the receiving portion in a direction away from the glass substrate at the time of strain measurement, no extra force is applied to the end face of the glass substrate, and the strain measurement can be performed accurately. can do.

Further, in the glass substrate strain measuring device according to the present invention, the receiving portion has a concavo-convex portion on the surface facing the above-mentioned pedestal, and the pre-described pedestal has the uneven portion on the surface facing the receiving portion. It is preferable that the receiving portion has a matching groove portion and can move in a direction parallel to the mounting surface of the above-mentioned pedestal in a state where the convex portion of the uneven portion is engaged with the groove portion.

According to such a glass substrate strain measuring device, even if a gap is generated between the receiving portion and the above-mentioned stand, the convex portion of the uneven portion is engaged with the groove portion, so that the glass substrate can be formed. It is possible to prevent it from entering the gap.
Further, even if the outer size of the glass substrate is changed, the receiving portion can be moved to cope with the change. As a result, the receiving portion can be appropriately moved to adjust the measurement position of the strain measurement on the glass substrate.

Further, in the glass substrate strain measuring apparatus according to the present invention, it is preferable that the groove portion is continuously provided in the opening portion and the width dimension of the groove portion is smaller than the maximum dimension of the opening portion.

According to such a glass substrate strain measuring device, the convex portion of the uneven portion can be moved in the groove portion, and it is possible to widely cope with the change of the outer shape size of the glass substrate.

The present invention has the following effects.
That is, according to the glass substrate strain measuring method and the glass substrate strain measuring apparatus according to the present invention, the glass substrate can be easily placed and the degree of strain of the glass substrate can be measured easily and quickly. As a result, the degree of distortion of the glass substrate can be measured easily and quickly. Therefore, for example, when manufacturing a glass substrate, the feedback of the measurement result can be quickly fed to the manufacturing process, and the glass substrate can be manufactured. Quality and yield can be improved.

The side view which showed the whole structure of the glass substrate strain measuring apparatus (when the mounting table is tilted) which concerns on one Embodiment of this invention. Similarly, a side view showing the overall configuration of the glass substrate strain measuring device (when the mounting table is horizontal). Similarly, a plan view showing the overall configuration of a glass substrate strain measuring device (when the mounting table on which the glass substrate is mounted is horizontal). Similarly, a front view showing the overall configuration of the glass substrate strain measuring device (when the mounting table is horizontal). It is the figure which showed the 1st shock absorber, (a) is the perspective view which showed the 1st shock absorber in the state which is not in contact with a mounting table, (b) is the state which was in contact with an inclined mounting table, the 1st A perspective view showing a shock absorber. The perspective view which showed the receiving part which the mounting part has. An enlarged perspective view showing the vicinity of the receiving portion of the mounting portion. An enlarged plan view showing a part of the mounting table and the receiving portion in an enlarged manner.

Next, an embodiment of the invention will be described with reference to FIGS. 1 to 8.
Regarding the following description, for convenience, the vertical direction shown in FIGS. 1, 2, and 4 is defined as the vertical direction of the glass substrate strain measuring device 1.
Further, for convenience, the following description will be described by defining the front-rear direction shown in FIGS. 1, 2, and 3 as the front-rear direction of the glass substrate strain measuring device 1.
Further, with respect to the following description, for convenience, the direction orthogonal to the front-rear direction shown in FIG. 3 is defined as the width direction of the glass substrate strain measuring device 1.

[Glass substrate strain measuring device 1]
First, the overall configuration of the glass substrate strain measuring device 1 (hereinafter, simply referred to as “strain measuring device 1”) that embodies the present invention will be described.

The strain measuring device 1 is a device for inspecting the degree of strain of the glass substrate G in the manufacturing process of the glass substrate G, and is a device for measuring the strain at an arbitrary position or region of the glass substrate G. is there.

Here, the glass substrate G measured by the strain measuring device 1 is a sheet-shaped glass member having a predetermined thickness, which is manufactured for use in an electronic device such as a display.
Further, the glass substrate G is formed in a square or rectangular shape, for example, and the size of one side thereof is 2000 mm to 3400 mm.
The shape, dimensions, thickness, etc. of the glass substrate G are not particularly limited, and can be appropriately changed according to the use of the glass substrate G.

As shown in FIG. 1, the strain measuring device 1 is mainly composed of a gantry 20, a mounting table 30, a strain measuring unit 40, a control means 50 for controlling the operation of the entire device (see FIG. 3), and the like.

The gantry 20 is a pedestal for holding the mounting pedestal 30 in an inclined state or a horizontal state, and is installed on the floor surface.
The "horizontal state" in the present embodiment is not limited to a completely horizontal state (tilt angle = 0 °), but also includes a substantially horizontal state, for example, a state in which the appearance is horizontal. .. Specifically, the "horizontal state" is a range in which the tilt angle with respect to the horizontal direction is −10 ° or more and less than 0 ° or more than 0 ° and 10 ° or less when the mounting table 30 is slightly tilted. Including the state.
On the gantry 20, for example, as shown in FIG. 3, a mounting area P, which is an area for mounting the glass substrate G on the mounting table 30 on the front side portion thereof, and a strain measurement of the glass substrate G on the rear side portion thereof are performed. A measurement area M, which is an area for performing the measurement, is provided, and the mounting table 30 can be slid and moved in the horizontal direction (front-back direction of the strain measuring device 1) between the mounting area P and the measurement area M. A slide mechanism 21 (see FIG. 1) is provided.

The slide mechanisms 21 and 21 are arranged at both ends of the mounting table 30 in the width direction, respectively.
Here, as shown in FIG. 1, one end (front end) of each slide mechanism 21 is provided with a rotation shaft 22 that rotatably supports an intermediate portion of the mounting table 30.
The slide mechanism 21 includes a horizontal drive means (not shown) for moving the mounting table 30 in a horizontal state (horizontal posture) in the front-rear direction, and a rotary drive for rotating the mounting table 30 around a rotation shaft 22. Means (not shown) and the like are provided.

The rotation driving means is composed of an actuator including an air cylinder or the like, and is arranged at one end of the gantry 20.
Then, by driving the rotation driving means, the mounting table 30 can rotate about the rotation shaft 22 and be in an inclined state (inverted state) or a horizontal state (horizontal posture).

A first shock absorber 23 is arranged at the front end of the gantry 20.
As shown in FIGS. 5A and 5B, the first shock absorber 23 has a tip portion of the first shock absorber 23 on the back surface of the mounting table 30 when the mounting table 30 is rotated from a horizontal state and tilted. The 23a comes into contact with each other to absorb the impact during rotation.

On the other hand, a second shock absorber (not shown) is arranged on the upper part of the gantry 20.
The second shock absorber absorbs the impact during rotation by contacting the tip of the second shock absorber with the back surface of the mounting table 30 when the mounting table 30 rotates from an inclined state to a horizontal state. Is.

It is also possible to use a shock absorbing member made of an elastic member such as rubber instead of the first shock absorber 23 and the second shock absorber.

As shown in FIG. 1, the mounting table 30 is held at one end of the mounting area P of the frame 20 and the glass substrate G is mounted on the mounting table 30.
The mounting table 30 is a table on which the glass substrate G is placed on one end surface side (upper surface side in the horizontal state) and can be moved to an arbitrary position in the horizontal direction by the horizontal driving means of the slide mechanism 21.
Further, the mounting table 30 is rotatably supported by a rotating shaft 22 included in the slide mechanism 21 of the frame 20 in the middle portion in the front-rear direction. The mounting table 30 is configured to be rotatable in an inclined state or a horizontal state by a rotating shaft 22 in the mounting area P.

At one end (front end) of the gantry 20, the mounting table 30 is tilted at an arbitrary tilt angle (for example, 70 to 80 degrees in the present embodiment as shown in FIG. 6) by the rotation driving means of the slide mechanism 21. It is a platform that can be tilted.
Here, as shown in FIG. 3, the mounting table 30 is composed of a stage portion 31, a receiving portion 32, a widthwise positioning portion 33, and the like.

The stage portion 31 is formed of a flat plate-shaped member made of metal (made of aluminum in this embodiment), and serves as a surface plate for maintaining the flatness of the glass substrate G at a desired accuracy during strain measurement. It works.
The stage portion 31 has a flat plate portion 31a that serves as a flat plate-shaped mounting surface, and the flat plate portion 31a is perforated with a plurality of circular openings 31b, 31b, ....

The plurality of openings 31b, 31b ... Are openings for passing laser light emitted from below during strain measurement by the strain measuring unit 40, and are squares arranged at equal intervals in the vertical and horizontal directions. It is an array.

Among the plurality of openings 31b / 31b ..., The front side and the rear side of the openings 31b / 31b ... located in the front row (the front row in the horizontal mounting table 30) are along the front-rear direction. A groove portion 34 having a predetermined length communicating with the front end portion and the rear end portion of each opening 31b in the front row is bored (see FIG. 7).

As shown in FIG. 7, the groove portion 34 is formed as a surface facing the convex portion 32d of the concave-convex portion 32c described later, has a rectangular cross-sectional shape, and is a portion where the convex portion 32d of the concave-convex portion 32c is engaged. is there.
The groove 34 is connected to the opening 31b.
Specifically, the groove 34 is a front groove 34a extending forward from the front end of the opening 31b in the front row by a predetermined length, and the opening extending rearward from the rear end of the opening 31b in the front row. It is composed of a rear groove portion 34b communicating with the front end portion of the opening 31b in the row behind the 31b.

Here, the width dimension of the groove portion 34 is set to be smaller than the diameter dimension of the opening portion 31b.
Further, the depth dimension of the groove portion 34 is set so as to be equal to or slightly larger than the protruding dimension of the convex portion 32d of the concave-convex portion 32c.
The groove 34 is configured to be engageable with the convex portion 32d of the concave-convex portion 32c.

As shown in FIG. 3, the receiving portion 32 is arranged in the vicinity of one end portion (front end portion) of the stage portion 31 in the width direction, and when the mounting table 30 is tilted to mount the glass substrate G, the receiving portion 32 is arranged. This is for positioning and supporting one end of the glass substrate G.

The receiving portion 32 is composed of a flat plate-shaped base portion 32a arranged over the width direction of the stage portion 31, a plate-shaped member 32b attached to one end side (rear end side) of the base portion 32a, and the like.
Further, the receiving portion 32 includes driving means 35 and 35 arranged on both sides in the width direction of the front end portion of the stage portion 31, and the driving means 35 and 35 refers to the flat plate portion 31a which is the mounting surface of the mounting table 30. It is supported so that it can be moved in the parallel direction.

The plate-shaped member 32b is a member that the front end portion of the glass substrate G comes into contact with when the glass substrate G is placed, and is made of a synthetic resin (for example, MC nylon (registered trademark)).
As a result, when the glass substrate G is placed on the mounting table 30, even if the glass substrate G comes into contact with the plate-shaped member 32b, it is possible to prevent the glass substrate G from being chipped or damaged.

Here, as shown in FIG. 7, the plate-shaped member 32b is formed with a concavo-convex portion 32c that is continuously formed in a rectangular and concavo-convex shape in the longitudinal direction while facing the stage portion 31.
Further, in the plate-shaped member 32b, in a state where the plurality of convex portions 32d, 32d ... Of the concave-convex portion 32c are engaged with the plurality of groove portions 34, 34 ... It is detachably fixed to the base portion 32a.

Then, when the receiving portion 32 (more specifically, the base portion 32a) is driven by the driving means 35, the plurality of convex portions 32d, 32d ... Of the concave-convex portion 32c of the plate-shaped member 32b become a plurality of groove portions 34. It is slidable while maintaining the engaged state with 34 ..., and the plate-shaped member 32b of the receiving portion 32 is placed in the front-rear direction (the direction of the double-headed arrow shown in FIG. 7) at the front portion of the upper surface of the stage portion 31. Can be moved and placed at any position in.
As a result, as shown in FIG. 8, the plate-shaped member 32b of the receiving portion 32 can be moved according to the outer size of the glass substrate G.

When the glass substrate G is placed on the mounting table 30 in an inclined state, the glass substrate G is supported by the plate-shaped member 32b of the receiving portion 32.
On the other hand, when the mounting table 30 is in the horizontal state and the strain is measured in the measurement area, the driving means 35 is driven so as not to affect the strain measurement, and the receiving portion 32 is separated from the glass substrate G (the present embodiment). Then, it can be moved forward) by a predetermined distance.

The width direction positioning unit 33 is a member that positions one end side of the glass substrate G in the width direction when the glass substrate G is placed on the mounting table 30.
The width direction positioning unit 33 is movable in the width direction and can be changed according to the outer size of the glass substrate G.

As shown in FIG. 3, the strain measuring unit 40 is arranged in the measuring area M of the gantry 20 and measures the strain of the glass substrate G by irradiating the glass substrate G in the horizontal state with laser light from below. is there.
As shown in FIG. 4, the strain measuring unit 40 includes a laser light irradiating unit 41, a support 42, a laser light receiving unit 43 movably supported in the width direction of the support 42, and the laser light irradiating unit 41. And a driving means (not shown) for driving the laser light receiving unit 43 and the like.

In FIG. 3, the strain measuring unit 40 makes the laser light irradiation unit 41 movable in a direction (X direction) orthogonal to the front-rear direction (Y direction) of the strain measuring device 1 by a driving means (not shown).
As a result, the strain measuring unit 40 can measure by irradiating the glass substrate G with laser light while moving.
Specifically, the strain measuring unit 40 can move and stop in order for each opening 31b by controlling the driving means of the strain measuring unit 40 by the control means 50, and perform strain measurement for each opening 31b. it can.

As the strain measuring unit 40, a commercially available strain measuring machine can be used.
Specifically, the strain measuring unit 40 can measure the magnitude of the retardation and the azimuth angle of the retardation in order to evaluate the degree of strain of the glass substrate G.

By the way, the strain measuring unit 40 of the present embodiment has a configuration in which one laser light irradiating unit 41 (see FIG. 2) is provided as a measuring head, but a plurality of laser light irradiating units 41, 41 ... Are specified. It may be configured to be provided at intervals.
When a plurality of laser light irradiation units 41, 41 ... Are provided, the measurement time can be shortened as compared with that of one laser light irradiation unit 41.

The control means 50 controls the drive means (horizontal drive means, rotation drive means) included in the slide mechanism 21 of the gantry 20, the drive means included in the strain measuring unit 40, and the measurement operation related to the strain measurement.
The control means 50 is, for example, a personal computer (PC) provided with a processing device such as a CPU, a storage device such as a memory, and a display device such as a display.
The control means 50 is configured to be able to output the strain measurement result of the glass substrate G to a display device such as a display.
Further, the control means 50 is configured so that the strain measurement result data of the glass substrate G can be stored in the storage device.

[Strain measurement method]
Next, a method of measuring the strain of the glass substrate G by the strain measuring device 1 described above will be described.

The method of measuring the strain of the glass substrate G by the strain measuring device 1 in the present embodiment is a method of measuring the strain of the glass substrate G at an arbitrary position on the gantry 20.

First, as shown in FIG. 1, when the glass substrate G is mounted on the mounting table 30, the mounting table 30 is arranged on one end side (front end side) of the mounting area P on the mounting table 20 and is inclined. In this state (in this embodiment, the inclination angle of the mounting table 30 with respect to the floor surface is 70 to 80 degrees).
The glass substrate G is placed on the mounting table 30 with the mounting table 30 tilted in this way.
Specifically, the glass substrate G to be the object to be measured is suction-held by an operator using a suction holder (for example, a vacuum lift) and placed on a mounting table 30 in an inverted state.

The tilt angle of the mounting table 30 may be appropriately set, but is preferably about 70 to 80 °.
With this angle range, the operator can easily place the glass substrate G on the mounting table 30.

Next, as shown in FIG. 2, the control means 50 drives the rotation drive means of the slide mechanism 21 to rotate the mounting table 30 around the rotation shaft 22, and is in an inclined state (tilted posture). To the horizontal state (horizontal posture).
At this time, the back surface of the mounting table 30 is absorbed by the upper shock absorber during rotation.
Subsequently, the control means 50 drives the horizontal drive means of the slide mechanism 21 to slide the mounting base 30 in the horizontal state (horizontal posture) from the mounting area P of the mount 20 to a predetermined position in the measurement area M.

Then, the control means 50 executes strain measurement on the glass substrate G on the mounting table 30 that has moved to the measurement area M.
Specifically, the control means 50 of the strain measuring device 1 is strained by the strain measuring unit 40 from the opening 31b (for example, the opening 31b located at the corner of the stage portion 31) set as the first measurement point. Start the measurement.

The control means 50 moves the laser light irradiation unit 41 in the X direction at preset intervals by the drive means included in the strain measuring unit 40, or moves the mounting table 30 in the Y direction in advance by the horizontal drive means of the slide mechanism 21. It moves at set intervals and irradiates the glass substrate G with laser light from below through each opening 31b to measure strain.
In this way, the control means 50 controls the strain measuring unit 40 and the slide mechanism 21 to move and stop the laser light irradiation unit 41 and the laser light receiving unit 43 of the strain measuring unit 40 in accordance with the openings 31b to control the position. And measure the strain for each opening 31b.

Next, when the strain measurement by the strain measuring unit 40 is completed, the control means 50 displays the magnitude of the retardation and the azimuth angle of the retardation at each measurement point corresponding to each opening 31b as the strain measurement result of the glass substrate G. Output to the display device of.
Further, the control means 50 stores the strain measurement result data of the glass substrate G in the storage device.
The control means 50 compares the standard value (the magnitude of the retardation and the azimuth angle of the retardation), which is an index for evaluating the preset strain, with the measurement result, and determines the quality of the strain on the glass substrate G.

As described above, in the strain measuring method of the glass substrate G using the strain measuring device 1 in the present embodiment, the glass substrate G is placed on the tilted mounting table 30, and then the mounting table 30 is rotated to be horizontal. The state is set, and the glass substrate G in the horizontal state is irradiated with a laser beam to measure the strain.
By doing so, the glass substrate G can be easily mounted on the mounting table 30, and the degree of distortion of the glass substrate G can be measured easily and quickly.
As a result, the degree of distortion of the glass substrate G can be measured easily and quickly. Therefore, for example, when manufacturing the glass substrate G, the feedback of the measurement result can be quickly given to the manufacturing process, and the glass. The quality and yield of the substrate G can be improved.

Further, in the strain measuring method of the glass substrate G using the strain measuring device 1 in the present embodiment, the laser beam is irradiated to the glass substrate while moving.
Thereby, the strain at an arbitrary position of the glass substrate G can be measured.

Further, in the strain measuring method of the glass substrate G using the strain measuring device 1 in the present embodiment, when the glass substrate G is placed on the mounting table 30, one end (front end) of the glass substrate G is received by the receiving portion 32. The plate-shaped member 32b is supported by the plate-shaped member 32b, and the plate-shaped member 32b can be moved according to the outer size of the glass substrate G.
As a result, even if the outer size of the glass substrate G is changed, the plate-shaped member 32b of the receiving portion 32 can be moved to cope with the change.
As a result, the plate-shaped member 32b of the receiving portion 32 can be appropriately moved to adjust the measurement position of the strain measurement on the glass substrate G.

Further, in the method for measuring the strain of the glass substrate G using the strain measuring device 1 in the present embodiment, the plate-shaped member 32b of the receiving portion 32 has an uneven portion 32c on the surface facing the mounting table 30, and the mounting table 30 has an uneven portion 32c. The stage portion 31 of the above has a groove portion 34 in which the convex portion 32d of the uneven portion 32c is engaged with the surface facing the receiving portion 32.
Further, the plate-shaped member 32b of the receiving portion 32 can be moved according to the outer size of the glass substrate G in a state where the convex portion 32d of the concave-convex portion 32c is engaged with the groove portion 34.
As a result, even if a gap is generated between the plate-shaped member 32b of the receiving portion 32 and the mounting table 30, the convex portion 32d of the concave-convex portion 32c is engaged with the groove portion 34, so that the glass substrate G is in the gap. It can be prevented from entering.

Further, in the strain measuring method of the glass substrate G using the strain measuring device 1 in the present embodiment, the groove portion 34 is continuously provided in the opening portion 31b, and the width dimension of the groove portion 34 is smaller than the maximum dimension of the opening portion 31b. It is formed like this.
As a result, the convex portion 32d of the concave-convex portion 32c can be moved even in the opening 31b, and the outer size of the glass substrate G can be changed widely.

Further, in the method for measuring the strain of the glass substrate G using the strain measuring device 1 according to the present invention according to the present invention, the plate-shaped member 32b of the receiving portion 32 is pressed from the end face of the glass substrate G when the strain is measured by the strain measuring unit 40. Move in the direction of separation.
In this way, since the plate-shaped member 32b of the receiving portion 32 is separated from the glass substrate G at the time of strain measurement by the strain measuring unit 40, it is possible to accurately measure the strain without applying an extra force to the end face of the glass substrate G. it can.

The glass substrate strain measuring method and the glass substrate strain measuring apparatus of the present invention can be used to measure the strain at an arbitrary position on the glass substrate.

1 Glass substrate strain measuring device 20 Stand 21 Slide mechanism 22 Rotating shaft 30 Mounting stand 31 Stage part 31a Flat plate part (mounting surface)
31b Opening 32 Receiving part 32b Plate-shaped member 32c Concavo-convex part 32d Convex part 34 Groove part 40 Strain measuring part 50 Control means G Glass substrate M Measuring area P Mounting area

Claims (7)

A strain measurement method that measures the strain at an arbitrary position on a glass substrate on a gantry.
In the mounting area on the gantry, the glass substrate is placed on the pedestal in an inclined state.
The tilted mounting table is rotated to make it horizontal.
Slide the previously described stand in the horizontal state to the measurement area on the stand, and slide it to the measurement area.
In the measurement area, the glass substrate is irradiated with laser light through the opening of the above-mentioned stand to measure the strain .
When the glass substrate is placed on the above-mentioned stand, one end of the glass substrate is supported by a receiving portion.
The receiving portion moves in a direction away from the glass substrate during strain measurement.
A method for measuring strain on a glass substrate. The laser beam irradiates the glass substrate while moving.
The glass substrate strain measuring method according to claim 1, wherein the glass substrate strain is measured. The receiving portion has an uneven portion on the surface facing the above-mentioned stand.
The above-mentioned stand has a groove portion in which the uneven portion engages with a surface facing the receiving portion.
The receiving portion can be moved according to the outer size of the glass substrate in a state where the convex portion of the uneven portion is engaged with the groove portion.
The glass substrate strain measuring method according to claim 1 or 2 , wherein the glass substrate strain is measured. The groove is continuously provided in the opening, and the width dimension of the groove is smaller than the maximum dimension of the opening.
The glass substrate strain measuring method according to claim 3 , wherein the glass substrate strain is measured. A strain measuring device that measures strain at an arbitrary position on a glass substrate.
A pedestal having a mounting area on which the glass substrate is placed and a measurement area for measuring strain of the glass substrate, and
A mounting table that is held on the pedestal and on which the glass substrate is mounted,
A strain measuring unit which is installed in the measuring area and measures strain by irradiating the glass substrate in a horizontal state with laser light is provided.
The gantry has a slide mechanism capable of horizontally sliding the pre-described pedestal between the pre-described pedestal area and the measurement area.
The slide mechanism has a rotating shaft at one end that rotatably supports the above-mentioned stand.
The above-mentioned pedestal is configured to be rotatable in an inclined state or a horizontal state by the rotation shaft in the above-mentioned arranging area.
The mounting table may have a opening for passing said laser beam,
When the glass substrate is placed on the above-mentioned stand, one end of the glass substrate is supported by a receiving portion.
The receiving portion moves in a direction away from the glass substrate during strain measurement.
A glass substrate strain measuring device characterized by this. The receiving portion has an uneven portion on the surface facing the above-mentioned stand.
The above-mentioned stand has a groove portion in which the uneven portion engages with a surface facing the receiving portion.
The receiving portion can move in a direction parallel to the mounting surface of the above-mentioned pedestal in a state where the convex portion of the uneven portion is engaged with the groove portion.
The glass substrate strain measuring apparatus according to claim 5. The groove is continuously provided in the opening, and the width dimension of the groove is smaller than the maximum dimension of the opening.
The glass substrate strain measuring apparatus according to claim 6.

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