TWI381257B - Substrate-check equipment and checking method - Google Patents

Substrate-check equipment and checking method Download PDF

Info

Publication number
TWI381257B
TWI381257B TW97125490A TW97125490A TWI381257B TW I381257 B TWI381257 B TW I381257B TW 97125490 A TW97125490 A TW 97125490A TW 97125490 A TW97125490 A TW 97125490A TW I381257 B TWI381257 B TW I381257B
Authority
TW
Taiwan
Prior art keywords
substrate
conveyor belt
illumination intensity
led lamp
illumination
Prior art date
Application number
TW97125490A
Other languages
Chinese (zh)
Other versions
TW201003352A (en
Inventor
Hui Hsiung Lee
Original Assignee
Race Ahead Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Race Ahead Technology Co Ltd filed Critical Race Ahead Technology Co Ltd
Priority to TW97125490A priority Critical patent/TWI381257B/en
Publication of TW201003352A publication Critical patent/TW201003352A/en
Application granted granted Critical
Publication of TWI381257B publication Critical patent/TWI381257B/en

Links

Description

自動調整照明強度的基材檢測裝置及方法Substrate detecting device and method for automatically adjusting illumination intensity

本發明係一種自動調整照明強度之基材檢測裝置,尤其是一種藉由改變照明設備的強弱,而避免耗費時間調整鏡頭光圈,以使基材檢測流程簡單、快速的基材檢測裝置。The invention relates to a substrate detecting device for automatically adjusting the illumination intensity, in particular to a substrate detecting device which avoids time-consuming adjustment of the lens aperture by changing the strength of the lighting device, so that the substrate detecting process is simple and fast.

由於合成材料(基材)被廣泛應用,該基材可為織品利用含浸程序而覆蓋有一層樹脂或多層纖維、紙及玻璃材料,並可製成有熱固性之薄片狀成品,以目前使用基材運用在生產物品上係需要有極良好的品質,才可製成高價值的產物。Since the synthetic material (substrate) is widely used, the substrate can be covered with a layer of resin or multi-layer fiber, paper and glass material by using an impregnation procedure, and can be made into a thermosetting sheet-like finished product. It is necessary to have excellent quality in the production of articles to produce high-value products.

一般判斷基材是否有缺陷需要藉由分別檢測基材的上、下表面是否有所缺陷,故為改良傳統以人工線上翻面而耗費時間的檢測程序,已有一種自動檢測基材之上、下表面的檢測裝置。Generally, it is necessary to detect whether the substrate is defective or not, and it is necessary to detect whether the upper and lower surfaces of the substrate are defective. Therefore, in order to improve the conventional time-consuming inspection procedure for manually turning the surface, there has been an automatic detection of the substrate. Detection device for the lower surface.

這種自動檢測基材的裝置係包括至少二輸送基材的透光輸送帶、至少二組影像擷取單元、至少二組分別配合該影像擷取單元的照明設備以及一控制該輸送帶、該影像擷取單元以及該照明設備的電腦控制單元,藉由電腦控制單元控制輸送帶,讓輸送帶運送基材,在此同時,該電腦控制單元亦啟動照明設備和影像擷取單元,將照明設備對準基材的上、下表面,並將光源射向基材,讓光源在基材表面產生不同的反射變化,並被影像擷取單元所擷取,所得之結果會傳回電腦控制單元,經由分析比對後,即可判斷 基材之品質。The device for automatically detecting a substrate comprises at least two transparent conveying belts for conveying a substrate, at least two groups of image capturing units, at least two sets of lighting devices respectively for supporting the image capturing unit, and a control belt. The image capturing unit and the computer control unit of the lighting device control the conveyor belt by the computer control unit to allow the conveyor belt to transport the substrate, and at the same time, the computer control unit also activates the lighting device and the image capturing unit to turn the lighting device Aligning the upper and lower surfaces of the substrate, and directing the light source to the substrate, causing the light source to produce different reflection changes on the surface of the substrate, and being captured by the image capturing unit, the result is transmitted back to the computer control unit. After analyzing and comparing, you can judge The quality of the substrate.

然而,由於各基材因產品需要而會有厚度不一的情況,而目前所用的影像擷取單元為具有線性電荷藕合元件(Linear Charge Coupled Device,Linear CCD)的攝影器材,因此在光源之照射強度固定的情況下,對於基材較厚的部分所反射出之光線比較暗,因此會影響CCD的偵測,而導致該攝影器材所紀錄的結果有誤差。However, since each substrate may have a different thickness depending on the product requirements, the image capturing unit currently used is a photographic device having a linear charge coupled device (Linear CCD), and thus is in a light source. When the irradiation intensity is fixed, the light reflected from the thicker portion of the substrate is darker, which may affect the detection of the CCD, resulting in errors in the results recorded by the photographic equipment.

目前此誤差可藉由調整攝影器材的光圈來解決,當基材較厚時,則使用大光圈,而當基材較薄時,則使用小光圈,雖然如此,但調整光圈的動作必須以人工來執行、調整,而且電腦控制單元中的條件也必須更動,這些變動有時需要耗費半天以上的時間,因此非常耗時費力,讓此檢測流程複雜化,且造成操作上的不便。At present, this error can be solved by adjusting the aperture of the photographic equipment. When the substrate is thick, a large aperture is used, and when the substrate is thin, a small aperture is used. However, the movement of the aperture must be artificial. To implement, adjust, and the conditions in the computer control unit must also be changed, these changes sometimes take more than half a day, so it is very time-consuming and laborious, complicate the detection process, and cause operational inconvenience.

本發明人有鑑於既有的檢測裝置在測量不同厚度的基材時,費時費力,而無法快速地進行檢測,因此經過不斷的思考以及研究之後,終於發明出此自動調整照明強度的基材檢測裝置。The present inventors have invented the substrate detection for automatically adjusting the illumination intensity after continuous thinking and research, in view of the fact that the existing detection device is time-consuming and laborious in measuring substrates of different thicknesses, and therefore cannot be quickly detected. Device.

本發明之目的係在於提供一種藉由改變照明設備的強弱,而避免耗費時間調整鏡頭光圈,以使基材檢測流程簡單、快速的基材檢測裝置。It is an object of the present invention to provide a substrate detecting apparatus which avoids time-consuming adjustment of the lens aperture by changing the strength of the lighting apparatus, so that the substrate detecting process is simple and fast.

為達上述目的,本發明之自動調整照明強度的基材檢測裝置,其係包括:至少一輸送帶,係用於輸送一基材; 至少二組照明設備,係分別設置在該輸送帶的上、下方,且各具有一自動調整照明強度的調整單元;至少二組影像擷取裝置,係對於該照明設備而分別設置在輸送帶的上、下方,以擷取基材之影像;一控制裝置,其係至少與該照明設備與該影像擷取裝置連接,以控制該照明設備之調整單元,並接收影像擷取裝置所得之影像。In order to achieve the above object, the substrate detecting device for automatically adjusting the illumination intensity of the present invention comprises: at least one conveyor belt for conveying a substrate; At least two sets of lighting devices are respectively disposed above and below the conveyor belt, and each has an adjusting unit for automatically adjusting the lighting intensity; at least two sets of image capturing devices are respectively disposed on the conveyor belt for the lighting device Up and down to capture an image of the substrate; a control device coupled to the illumination device and the image capture device to control an adjustment unit of the illumination device and receive an image obtained by the image capture device.

本發明又提供一種自動調整照明強度的基材檢測方法,其係包括:以一輸送帶運送基材;提供一連接且控制一照明設備和一影像擷取裝置的控制裝置,並調整該照明設備的照明強度,讓該影像擷取裝置擷取基材表面的影像,並將此影像回傳至該控制裝置。The invention further provides a substrate detecting method for automatically adjusting the illumination intensity, which comprises: transporting a substrate by a conveyor belt; providing a control device for connecting and controlling a lighting device and an image capturing device, and adjusting the lighting device The illumination intensity allows the image capture device to capture an image of the surface of the substrate and pass the image back to the control device.

當基材較厚時,則以控制裝置控制照明設備中的調整單元,以提高該照明設備的照明強度,反之,當基材較薄時,則調整該調整單元,以減弱該照明設備的照明強度,因此,本發明藉由調整照明設備的照明強度,能夠避免以人工方式調整該影像擷取裝置,故能加快檢測速度,讓檢測流程簡單化、自動化,故能省時、省力,以利於產業利用。When the substrate is thick, the adjusting unit in the lighting device is controlled by the control device to increase the lighting intensity of the lighting device. Conversely, when the substrate is thin, the adjusting unit is adjusted to weaken the lighting of the lighting device. Intensity, therefore, the present invention can avoid manual adjustment of the image capturing device by adjusting the illumination intensity of the lighting device, thereby speeding up the detection speed, simplifying and automating the detection process, thereby saving time and labor, and facilitating Industrial use.

請參看第一及二圖所示,本發明之自動調整照明強度的基材檢測裝置,其係包括:一可透光的輸送帶(10),其係用於承載並傳送基材 (20);至少兩組照明設備(30),請附加參看第三圖所示,其係分別設置在該輸送帶(10)之上、下方,各組照明設備(30)包括一LED燈具(31)以及一連接該發光二極體燈具(LED燈具,31)且自動調整LED燈具(31)強度的調整單元(32),較佳的LED燈具(31)為直流供電的長型LED燈具,該調整單元(32)可設置於LED燈具(31)之內,亦可單獨設置;至少兩組影像擷取裝置(40),其係對應於該照明設備(30),而裝設於該輸送帶(10)的上方與下方,各組影像擷取裝置(40)係一具有線性電荷藕合元件(Linear Charge Coupled Device, Linear CCD)的攝影機,令該攝影機以線性掃描方式拍攝該基材(20)表面的全部影像,該攝影機具有一固定光圈大小的鏡頭(41);一控制裝置(50),係內建有影像處理程式,並與該輸送帶(10)、照明設備(30)以及該影像擷取裝置(40)相連接,以分別控制該照明設備(30)之LED燈具(31)和調整單元(32)以及該影像擷取裝置(40)的動作,該控制裝置(50)係接收該影像擷取裝置(40)之攝影機所擷取到的線性影像資料,以進行影像的處理,並判斷基材(20)的品質,另外,由於該影像擷取裝置(40)中之具有CCD的攝影機單次擷取之線性影像僅為該基材(20)的一小部份影像,因此所收集到的線性影像資料量較小,所以可加快控制裝置(50)進行影像分析判斷程序時的處理速度,藉此提高其判斷速度,提升判斷基材(20)品質的檢測速度; 一支撐架(60),亦請附加參看第三圖,其係固定於該輸送帶(10)的兩側,用以將該影像擷取裝置(40)以及照明裝置(30)固定在輸送帶(10)的上、下方位置,藉由樞接元件(61)將該影像擷取裝置(40)的攝影機及照明設備(30)樞接固定在支撐架(60)上,在該支撐架(60)與各樞接元件(61)之間設置有一致動器(符號未示),經由控制該樞接元件(61)轉動,進而使得該影像擷取裝置(40)中之攝影機或LED燈具(31)相對於輸送帶(10)的角度為可調,且各致動器分別與該控制裝置(50)連接,受該控制裝置(50)驅動,進而調整攝影機和/或LED燈具(31)相對於輸送帶(10)的角度。Referring to the first and second figures, the substrate detecting device for automatically adjusting the illumination intensity of the present invention comprises: a light transmissive conveyor belt (10) for carrying and conveying the substrate. (20); at least two sets of lighting devices (30), please additionally refer to the third figure, which are respectively disposed above and below the conveyor belt (10), and each group of lighting devices (30) includes an LED lamp ( 31) and an adjustment unit (32) for connecting the light-emitting diode lamp (LED lamp, 31) and automatically adjusting the intensity of the LED lamp (31), the preferred LED lamp (31) is a DC-powered long LED lamp, The adjusting unit (32) may be disposed in the LED lamp (31) or may be separately provided; at least two sets of image capturing devices (40) corresponding to the lighting device (30) and installed in the conveying Above and below the strip (10), each group of image capturing device (40) is a camera with a linear charge coupled device (Linear CCD), which allows the camera to take the substrate in a linear scanning manner ( 20) The entire image of the surface, the camera has a fixed aperture size lens (41); a control device (50), built-in image processing program, and the conveyor belt (10), lighting equipment (30) and The image capturing device (40) is connected to respectively control the LED lamp (31) and the adjusting unit (32) of the lighting device (30) And the operation of the image capturing device (40), the control device (50) receives the linear image data captured by the camera of the image capturing device (40), performs image processing, and determines the substrate ( 20) the quality, and because the linear image captured by the camera with the CCD in the image capturing device (40) is only a small portion of the image of the substrate (20), the collected linearity Since the amount of image data is small, the processing speed of the image analyzing and determining program by the control device (50) can be speeded up, thereby improving the judging speed and improving the detecting speed of determining the quality of the substrate (20); A support frame (60), please also refer to the third figure, which is fixed on both sides of the conveyor belt (10) for fixing the image capturing device (40) and the lighting device (30) on the conveyor belt The upper and lower positions of (10) are pivotally fixed to the support frame (60) by the pivoting component (61), and the camera and the illumination device (30) of the image capturing device (40) are mounted on the support frame (60). 60) an actuator (not shown) is disposed between each pivoting member (61), and the camera or LED lamp in the image capturing device (40) is controlled by controlling the pivoting member (61) to rotate. (31) The angle with respect to the conveyor belt (10) is adjustable, and each actuator is respectively connected to the control device (50), driven by the control device (50), thereby adjusting the camera and/or the LED lamp (31). ) relative to the angle of the conveyor belt (10).

本發明之自動調整照明強度的基材檢測方法,其係包括:提供上述自動調整照明強度的基材檢測裝置;啟動該輸送帶(10)以運送基材(20);當基材(20)厚度提高時,則提高該照明設備(30)之LED燈具(31)的照明強度,當基材(20)厚度降低時,則降低該照明設備(30)之LED燈具(31)的照明強度,並讓該影像擷取設備(40)擷取基材(20)表面的影像,並將此影像回傳至該控制裝置(50)。The substrate detecting method for automatically adjusting the illumination intensity of the present invention comprises: providing the substrate detecting device for automatically adjusting the illumination intensity; starting the conveyor belt (10) to transport the substrate (20); and when the substrate (20) When the thickness is increased, the illumination intensity of the LED lamp (31) of the lighting device (30) is increased, and when the thickness of the substrate (20) is decreased, the illumination intensity of the LED lamp (31) of the lighting device (30) is lowered. And the image capturing device (40) captures an image of the surface of the substrate (20) and transmits the image back to the control device (50).

當本發明之自動調整照明強度的基材檢測裝置使用時,藉由控制裝置(50)啟動輸送帶(10)以運送基材(20),同時亦啟動照明設備(30)中的LED燈具(31)和影像擷取裝置(40)之攝影機,以將光線照射至該基材(20),並讓攝影機擷取該基材(20)表面的線性影像,並將該線性影像資料回 傳至控制裝置(50),以進行影像分析判斷。When the substrate detecting device for automatically adjusting the illumination intensity of the present invention is used, the conveyor belt (10) is activated by the control device (50) to transport the substrate (20), and the LED lamps in the lighting device (30) are also activated ( 31) and a camera of the image capturing device (40) for irradiating light onto the substrate (20), and causing the camera to capture a linear image of the surface of the substrate (20), and returning the linear image data It is transmitted to the control device (50) for image analysis and judgment.

當所欲檢測之基材(20)的厚薄不一時,則該控制裝置(50)即可藉由控制照明設備(30)中的調整單元(32)來調整LED燈具(31)的亮度,當基材(20)較厚時,則將LED燈具(31)的照明強度提高,而當基材(20)較薄時,則將LED燈具(31)的照明強度減弱,因此,各可避免以人工方式調整攝影機的光圈,且無須重新設定該控制裝置(50),故本發明能加快並自動化基材(20)的檢測流程。When the thickness of the substrate (20) to be inspected is different, the control device (50) can adjust the brightness of the LED lamp (31) by controlling the adjusting unit (32) in the lighting device (30). When the substrate (20) is thick, the illumination intensity of the LED lamp (31) is improved, and when the substrate (20) is thin, the illumination intensity of the LED lamp (31) is weakened, so that each can be avoided. By manually adjusting the aperture of the camera without having to reset the control device (50), the present invention can speed up and automate the inspection process of the substrate (20).

(10)‧‧‧輸送帶(10)‧‧‧Conveyor belt

(20)‧‧‧基材(20)‧‧‧Substrate

(30)‧‧‧照明設備(30) ‧‧‧Lighting equipment

(31)‧‧‧LED燈具(31)‧‧‧LED lamps

(32)‧‧‧調整單元(32) ‧‧‧Adjustment unit

(40)‧‧‧影像擷取裝置(40) ‧‧‧Image capture device

(41)‧‧‧鏡頭(41)‧‧‧ lens

(50)‧‧‧控制裝置(50)‧‧‧Control devices

(60)‧‧‧支撐架(60)‧‧‧Support frame

(61)‧‧‧樞接元件(61) ‧‧‧ pivotal components

第一圖係本發明之側視示意圖。The first figure is a side view of the invention.

第二圖係本發明之立體示意圖。The second drawing is a schematic perspective view of the present invention.

第三圖係本發明之系統示意圖。The third figure is a schematic diagram of the system of the present invention.

(10)‧‧‧輸送帶(10)‧‧‧Conveyor belt

(30)‧‧‧照明設備(30) ‧‧‧Lighting equipment

(31)‧‧‧LED燈具(31)‧‧‧LED lamps

(32)‧‧‧調整單元(32) ‧‧‧Adjustment unit

(40)‧‧‧影像擷取裝置(40) ‧‧‧Image capture device

(50)‧‧‧控制裝置(50)‧‧‧Control devices

Claims (9)

一種自動調整照明強度的基材檢測裝置,其係包括:至少一輸送帶,係用於輸送一基材;至少二組照明設備,係分別設置在該輸送帶的上、下方,且各具有一自動調整照明強度的調整單元以及一LED燈具,且該調整單元係與該LED燈具連接;;至少二組影像擷取裝置,係對於該照明設備而分別設置在輸送帶的上、下方,以擷取基材之影像;一控制裝置,其係至少與該照明設備與該影像擷取裝置連接,以控制該照明設備之調整單元,藉由調整單元來調整LED燈具的亮度,當基材較厚時,則將LED燈具的照明強度提高,而當基材較薄時,則將LED燈具的照明強度減弱,並接收影像擷取裝置所得之影像。 A substrate detecting device for automatically adjusting illumination intensity, comprising: at least one conveyor belt for conveying a substrate; at least two groups of lighting devices respectively disposed above and below the conveyor belt, and each having a An adjusting unit for automatically adjusting the illumination intensity and an LED lamp, wherein the adjusting unit is connected to the LED lamp; at least two sets of image capturing devices are respectively disposed on the upper and lower sides of the conveyor belt for the lighting device Taking an image of the substrate; a control device connected to the illumination device and the image capture device to control the adjustment unit of the illumination device, and adjusting the brightness of the LED lamp by adjusting the unit, when the substrate is thick When the brightness of the LED lamp is increased, when the substrate is thin, the illumination intensity of the LED lamp is weakened, and the image obtained by the image capturing device is received. 如申請專利範圍第1項所述之自動調整照明強度的基材檢測裝置,其中該輸送帶係具有可透光性。 The substrate detecting device for automatically adjusting the illumination intensity as described in claim 1, wherein the conveyor belt is permeable to light. 如申請專利範圍第2項所述之自動調整照明強度的基材檢測裝置,其中該LED燈具為直流供電的長型LED燈具。 The substrate detecting device for automatically adjusting the illumination intensity as described in claim 2, wherein the LED lamp is a DC-powered long LED lamp. 如申請專利範圍第1至3項中任一項所述之自動調整照明強度的基材檢測裝置,其中各組影像擷取裝置係一具有線性電荷藕合元件的攝影機,且該攝影機具有一固定光圈大小的鏡頭。 The substrate detecting device for automatically adjusting the illumination intensity according to any one of claims 1 to 3, wherein each group of image capturing devices is a camera having a linear charge coupling element, and the camera has a fixed Aperture-sized lens. 如申請專利範圍第1至3項中任一項所述之自動 調整照明強度的基材檢測裝置,其尚具有一支撐架,其係固定於該輸送帶的兩側,用以將該影像擷取裝置以及照明裝置固定在輸送帶的上、下方位置。 Automatic as described in any one of claims 1 to 3 A substrate detecting device for adjusting the intensity of illumination further has a support frame fixed to both sides of the conveyor belt for fixing the image capturing device and the lighting device at upper and lower positions of the conveyor belt. 如申請專利範圍第5項所述之自動調整照明強度的基材檢測裝置,其中該支撐架具有複數個樞接元件,以將該影像擷取裝置及照明設備樞接固定在支撐架上,並於該支撐架與各樞接元件間設置有一與控制裝置連接的致動器,以令該影像擷取裝置與照明設備相對於輸送帶的角度為可調。 The substrate detecting device for automatically adjusting the illumination intensity according to claim 5, wherein the support frame has a plurality of pivoting members for pivotally fixing the image capturing device and the lighting device to the support frame, and An actuator connected to the control device is disposed between the support frame and each of the pivoting members to adjust the angle of the image capturing device and the illumination device relative to the conveyor belt. 如申請專利範圍第4項所述之自動調整照明強度的基材檢測裝置,其尚具有一支撐架,其係固定於該輸送帶的兩側,用以將該攝影機以及照明設備固定在輸送帶的上、下方位置。 The substrate detecting device for automatically adjusting the illumination intensity as described in claim 4, further comprising a support frame fixed on both sides of the conveyor belt for fixing the camera and the illumination device to the conveyor belt Upper and lower positions. 如申請專利範圍第7項所述之自動調整照明強度的基材檢測裝置,其中該支撐架具有複數個樞接元件,以將該攝影機及照明設備樞接固定在支撐架上,並於該支撐架與各樞接元件間設置有一與控制裝置連接的致動器,以令該攝影機與照明設備相對於輸送帶的角度為可調。 The substrate detecting device for automatically adjusting the illumination intensity as described in claim 7, wherein the support frame has a plurality of pivoting members for pivotally fixing the camera and the illumination device to the support frame, and the support is An actuator connected to the control device is disposed between the frame and each of the pivoting members to adjust the angle of the camera and the illumination device relative to the conveyor belt. 一種自動調整照明強度的基材檢測方法,其係包括:以一輸送帶運送基材;提供一連接且控制一照明設備和一影像擷取裝置的控制裝置,並調整該照明設備的照明強度,讓該影像擷取裝置擷取基材表面的影像,並將此影像回傳至該控制裝置, 其中該照明設備係包括LED燈具,且當基材厚度提高時,則提高該照明設備之LED燈具的照明強度,當基材厚度降低時,則降低該照明設備之LED燈具的照明強度。A substrate detecting method for automatically adjusting illumination intensity, comprising: transporting a substrate by a conveyor belt; providing a control device for connecting and controlling a lighting device and an image capturing device, and adjusting the illumination intensity of the lighting device, Having the image capture device capture an image of the surface of the substrate and return the image to the control device. Wherein the lighting device comprises an LED lamp, and when the thickness of the substrate is increased, the illumination intensity of the LED lamp of the lighting device is increased, and when the thickness of the substrate is lowered, the illumination intensity of the LED lamp of the lighting device is reduced.
TW97125490A 2008-07-07 2008-07-07 Substrate-check equipment and checking method TWI381257B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97125490A TWI381257B (en) 2008-07-07 2008-07-07 Substrate-check equipment and checking method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97125490A TWI381257B (en) 2008-07-07 2008-07-07 Substrate-check equipment and checking method

Publications (2)

Publication Number Publication Date
TW201003352A TW201003352A (en) 2010-01-16
TWI381257B true TWI381257B (en) 2013-01-01

Family

ID=44825523

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97125490A TWI381257B (en) 2008-07-07 2008-07-07 Substrate-check equipment and checking method

Country Status (1)

Country Link
TW (1) TWI381257B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI383844B (en) * 2010-12-30 2013-02-01 Univ Nat Chunghsing Quality inspection system of leaf quality

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
TWI281540B (en) * 2005-10-21 2007-05-21 Jye Jiang Technology Co Ltd Inspection system and method for conveying substrates
TW200741197A (en) * 2006-03-16 2007-11-01 Olympus Corp Substrate inspection apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
TWI281540B (en) * 2005-10-21 2007-05-21 Jye Jiang Technology Co Ltd Inspection system and method for conveying substrates
TW200741197A (en) * 2006-03-16 2007-11-01 Olympus Corp Substrate inspection apparatus

Also Published As

Publication number Publication date
TW201003352A (en) 2010-01-16

Similar Documents

Publication Publication Date Title
US8426223B2 (en) Wafer edge inspection
KR20160078211A (en) Transmission Type Defect Detecting Device and Defect Detecting Method
WO2014082010A4 (en) Calibration of a dynamic digital imaging system for detecting defects in production stream
KR20160047360A (en) System and method for defect detection
KR101514409B1 (en) Vision inspection apparatus
WO2016157000A1 (en) An automatic control machine
TWI381257B (en) Substrate-check equipment and checking method
JP6249338B2 (en) Appearance inspection device
CN204330625U (en) A kind of pick-up unit for curve surface work pieces surface imperfection
KR102162693B1 (en) System and method for defect detection
TWM514002U (en) Optical inspection device
WO2022224636A1 (en) Inspection device
TWM285884U (en) Inspection device capable of promptly determining the quality of substrate
US8111899B2 (en) Substrate-check equipment
KR101485425B1 (en) Cover-glass Analysis Apparatus
JP6937647B2 (en) Optical display panel damage inspection method
JPH1172439A (en) Surface inspection apparatus
KR101046566B1 (en) Appartus for inspecting substrate and method using the same
KR20080081574A (en) The sheet inspection machine
KR20160104361A (en) Apparatus for inspecting light transmission object
KR101197708B1 (en) Apparatus for inspecting substrate
JP2008116335A (en) Device and method for inspecting belt material, or the like
CN201298023Y (en) Substrate detecting device equipped with scanners
KR100863340B1 (en) Particle inspection device for conveyor establishment
CN104165894A (en) A detection device used for curved-surface workpiece surface defects