TW201003352A - Substrate inspection device and method capable of automatically adjusting illumination - Google Patents

Substrate inspection device and method capable of automatically adjusting illumination Download PDF

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Publication number
TW201003352A
TW201003352A TW97125490A TW97125490A TW201003352A TW 201003352 A TW201003352 A TW 201003352A TW 97125490 A TW97125490 A TW 97125490A TW 97125490 A TW97125490 A TW 97125490A TW 201003352 A TW201003352 A TW 201003352A
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Taiwan
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substrate
illumination
illumination intensity
image
conveyor belt
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TW97125490A
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Chinese (zh)
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TWI381257B (en
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Hui-Hsiung Lee
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Race Ahead Technology Co Ltd
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Publication of TWI381257B publication Critical patent/TWI381257B/en

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Abstract

The present invention relates to a substrate inspection device capable of automatically adjusting illumination intensity, including at least one conveyor belt for conveying the substrate, at least two groups of lighting equipment set up above and beneath the conveyor belt respectively, at least two groups of image pick-up device disposed above and beneath the conveyor belt respectively, and a control unit. Each lighting equipment has an adjustment unit for automatically adjusting illumination intensity. Each image pick-up device captures image of the substrate. The control device is connected to at least the lighting equipment and the image pick-up device so as to control the adjustment unit of the lighting equipment to provide different illumination intensity when thickness of the substrate varies, and to receive the image captured by the image pick-up device, thereby avoiding manual adjustment of the image pick-up device, increasing inspection speed, simplifying inspection processes and achieving automation.

Description

201003352 九、發明說明: 【發明所屬之技術領域】 曰本發明係一種自動調整照明強度之基材檢測裝置,尤 其是一種藉由改變照明設備的強弱,而避免耗費時間調整 鏡頭光圈,以使基材檢測流程簡單、快速的基材檢測裝置。 【先前技術】 由於合成材料(基材)被廣泛應用,該基材可為織品 利用含浸程序而覆蓋有一層樹脂或多層纖維、紙及玻璃材 料’並可製成有熱固性之薄片狀成品,以目前使用基材運 用在生產物品上係f要有極良好的,才可製成高價值 的產物。 一般判斷基材是否有缺陷需要!^分別檢測基材的 上、下表面是否有所缺陷,故為改良傳統以人卫線上翻面 而耗費時間的檢測程序,已有—種自動檢測基材之上、下 表面的檢測裝置。 、…迫種自動檢測基材的裝置係包括至少二輸送基材的透 先輸送帶、至少二組影像擷取單元、至少二組分別配合該 料揭取單元的照明設備以及—控制該輸送帶、該影像榻 _單元X m、明&備的電腦控制單元,藉由電腦控制單 元控制輸送帶,讓輸送帶運送基材,纟此同時,該電腦控 制单元亦啟動照明設備和影像擷取單元,將照明設備對準 &材的上'下表面’並將光源射向基材’冑光源在基材表 面產生不同的反射變化’並被影像擷取單元所擷取,所得 之結果會傳回電腦控制單元,經由分析比對後,即可判斷 201003352 基材之品質。 然而’由於各基材因產0 座°口而要而會有厚度不—的十主 ί兄,而目前所用的影像指音物M 1 月 豕擷取早疋為具有線性電荷藕合元件 (Linear Charge Coupled Devjce,「嶋「ccd>的攝 Η 材’因此在光源之照射強度固定的情況下,對於基材較厚 的部分所反射出之光線比較暗,因此會影響CCD的债測, 而導致戎攝影器材所紀錄的結果有誤差。 目前此誤差可藉由調整攝影器材的光圈來解決,當基 材較厚時,則使用大光圈,而當基材較薄時,則使用小光 圈,雖然如此,但調整光圈的動作必須以人工來執行、調 整,而且電腦控制單元中的條件也必須更動,這些變動有 時需要耗費半天以上的時間,因此非常耗時費力,讓此檢 測流程複雜化’且造成操作上的不便。 【發明内容】 本發明人有鑑於既有的檢測裝置在測量不同厚度的基 材日卞’費a守費力’而無法快速地進行檢測,因此經過不斷 的思考以及研究之後’終於發明出此自動調整照明強度的 基材檢測裝置。 本發明之目的係在於提供一種藉由改變照明設備的強 弱’而避免耗費時間調整鏡頭光圈,以使基材檢測流程簡 單、快速的基材檢測裝置。 為達上述目的’本發明之自動調整照明強度的基材檢 測裝置,其係包括: 至少一輸送帶,係用於輸送基板; 201003352 至少二組照明設備’係分別設置在該輸送帶的上、下 方’且各具有一自動調整照明強度的調整單元; 至夕一組影像擷取裝置,係對於該照明設備而分別設 置在輸送帶的上、下方,以擷取基材之影像; 一控制裝置,其係至少與該照明設備與該影像擷取裝 置連接,以控制該照明設備之調整單元,並接收影像擷取 裝置所得之影像。 本發明又提供一種自動調整照明強度的基材檢測方 法’其係包括: 以一輸送帶運送基材; 提供一連接且控制一照明設備和一影像擷取裝置的控 制波置,並調整該照明設備的照明強度,讓該影像擷取裝 置擷取基材表面的影像,並將此影像回傳至該控制裝置。 田基材較厚時’則以控制裝置控制照明設備中的調整 單疋,以提高該照明設備的照明強度,反之,當基材較薄 犄,則調整該調整單元,以減弱該照明設備的照明強度, 因此’本發明藉由調整照明設備的照明強度,能夠避免以 人工方式調整該影像擷取裝置,故能加快檢測速度,讓檢 測机程簡單化、自動化,故能省時、省力,以利於產業利 用0 【實施方式】 睛參看第一及二圖所示,本發明之自動調整照明強度 的基材檢測裝置,其係包括: —可透光的輸送帶(1〇),其係用於承載並傳送基材 6 201003352 (20); 至少兩組照明設備(30),請附加參看第三圖所示,其 係分別設置在該輸送帶(10)之上、下方,各組照明設備(3〇) 包括一 LED燈具(31)以及一連接該發光二極體燈具(LED 燈具,31)且自動調整LED燈具(31)強度的調整單元(32), 較佳的LED燈具(31)為直流供電的長型LED燈具,該調 整單元(32>可設置於LED燈具(31)之内,亦可單獨設置; 至少兩組影像擷取裝置(4〇),其係對應於該照明設備 (30),而裝設於該輸送帶(1〇)的上方與下方,各組影像擷 取裝置(40)係一具有線性電荷藕合元件(Linea「charge CoMed Device, Linear CCD)的攝影機,令該攝影機以線 性掃描方式拍攝該基材(20)表面的全部影像,該攝影機具 有一固定光圈大小的鏡頭(41); 置(〇),係内建有影像處理程式,並與201003352 IX. Description of the invention: [Technical field to which the invention pertains] The present invention is a substrate detecting device for automatically adjusting the intensity of illumination, in particular, by changing the strength of the lighting device, and avoiding time-consuming adjustment of the lens aperture to make the base A simple and fast substrate inspection device for material inspection. [Prior Art] Since a synthetic material (substrate) is widely used, the substrate can be covered with a layer of resin or multilayer fiber, paper and glass material by using an impregnation procedure, and can be made into a thermosetting flaky finished product. At present, the use of a substrate for the production of articles must be extremely good in order to produce high-value products. Generally judge whether the substrate is defective or not! ^Detecting whether the upper and lower surfaces of the substrate are defective, respectively. Therefore, in order to improve the conventional time-consuming detection procedure for turning over the human body, there has been a detection device for automatically detecting the upper and lower surfaces of the substrate. The apparatus for automatically detecting the substrate comprises at least two transparent conveyor belts for transporting the substrate, at least two sets of image capturing units, at least two sets of lighting devices respectively for supporting the material stripping unit, and - controlling the conveyor belt The computer control unit of the image housing unit X m, Ming & prepares the conveyor belt by the computer control unit, and causes the conveyor belt to transport the substrate. At the same time, the computer control unit also activates the lighting device and the image capturing device. Unit, aligning the lighting device with the upper 'lower surface' of the material and directing the light source to the substrate '胄 light source produces different reflection changes on the surface of the substrate' and is captured by the image capturing unit, and the result will be Return to the computer control unit, after analysis and comparison, you can judge the quality of the 201003352 substrate. However, 'there are thicknesses of the substrate due to the fact that each substrate has a 0-portion, and the currently used image refers to the timbre M. Linear Charge Coupled Devjce, "The cc" of the "ccd>" is therefore darker when the intensity of the light source is fixed, and the light reflected from the thicker part of the substrate is darker, thus affecting the CCD's debt measurement. There is an error in the results recorded by the photographic equipment. At present, this error can be solved by adjusting the aperture of the photographic equipment. When the substrate is thick, a large aperture is used, and when the substrate is thin, a small aperture is used. Even so, the action of adjusting the aperture must be performed and adjusted manually, and the conditions in the computer control unit must be changed. These changes sometimes take more than half a day, which is very time consuming and laborious, complicating the detection process. 'And causing inconvenience in operation. SUMMARY OF THE INVENTION The present inventors have in view of the fact that existing detection devices are not able to quickly measure the substrate of different thicknesses. Line detection, so after continuous thinking and research, 'this substrate detection device that automatically adjusts the illumination intensity is finally invented. The object of the present invention is to provide a way to adjust the lens aperture by changing the strength of the illumination device', A substrate detecting device for making a substrate detection process simple and rapid. The substrate detecting device for automatically adjusting the illumination intensity of the present invention, comprising: at least one conveyor belt for conveying a substrate; 201003352 The two sets of lighting devices are respectively disposed above and below the conveyor belt and each has an adjustment unit that automatically adjusts the illumination intensity; and a group of image capturing devices are respectively disposed on the conveyor belt for the lighting device. Up and down to capture an image of the substrate; a control device coupled to the illumination device and the image capture device to control an adjustment unit of the illumination device and receive an image obtained by the image capture device. The invention further provides a substrate detecting method for automatically adjusting the illumination intensity, which comprises: Feeding the transport substrate; providing a control wave for connecting and controlling a lighting device and an image capturing device, and adjusting the illumination intensity of the lighting device, allowing the image capturing device to capture an image of the surface of the substrate, and The image is transmitted back to the control device. When the field substrate is thicker, the control device controls the adjustment unit in the lighting device to improve the illumination intensity of the lighting device. Conversely, when the substrate is thinner, the adjustment unit is adjusted. In order to reduce the illumination intensity of the lighting device, the invention can avoid manual adjustment of the image capturing device by adjusting the illumination intensity of the lighting device, so that the detection speed can be accelerated, and the detection process can be simplified and automated. Therefore, it can save time and effort, and is beneficial to the industrial use. [Embodiment] As shown in the first and second figures, the substrate detecting device for automatically adjusting the illumination intensity of the present invention comprises: - a light-transmissive conveyor belt (1〇), which is used to carry and transport the substrate 6 201003352 (20); At least two sets of lighting equipment (30), please refer to the third figure, which are separately set Placed above and below the conveyor belt (10), each group of lighting devices (3〇) includes an LED lamp (31) and a light-emitting diode lamp (LED lamp, 31) connected to the LED lamp (31). The intensity adjusting unit (32), the preferred LED lamp (31) is a DC-powered long LED lamp, the adjusting unit (32> can be disposed in the LED lamp (31), or can be separately set; at least two a group image capturing device (4) corresponding to the lighting device (30) and mounted above and below the conveyor belt (1〇), each group of image capturing devices (40) having a linear a camera of a charge coupled device (Linea "charge CoMed Device", which allows the camera to capture a full image of the surface of the substrate (20) in a linear scanning manner. The camera has a fixed aperture size lens (41); (〇), there is an image processing program built in, and

送帶⑽、照明設備(30)以及該影像掏取裳置(4〇)相連接, 以分別控制該照明設備(30)之LED燈具(31)和調整單元(32) =該影像擷取裝置(40)的動作’該控制裝置(5〇)係接收 =像擷取裝置⑽)之攝影機㈣取到的線性影像資料, 進饤影像的處理,並判斷基材(2Q)的品質,另外 該影像擷取裝置(40)中之具有CcD的谋 、 性馬“, 的攝f彡機單次擷取之線 性知像僅為該基材(20)的一小 線性影像資料… ””“象,因此所收集到的 分析判斷程序時的處理速度置(5Q)進行影像 判斷基材(20)品質的檢測速度;U斷速度,提升 7 201003352 :支律架(60),亦請附加參看第三圖,其係固定於該 輸送帶(10)的兩側,用以將該影像擷取裝置(4〇)以及照明 裝置(3〇)固定在輸送帶(1〇)的上、下方位置,藉由框接元 件()將4 ’5V像擷取裝置(40)的攝影機及照明設備(3〇)拖接 固^在支撐架(6〇)上,在該支撐架(6〇)與各樞接元件⑻)之 間°又置有一致動器(符號未示),經由控制該樞接元件(61) 轉動’進而使得該影像擷取裝置(4〇)中之攝影機或㈣燈 具(31)相對於輸送帶⑽的角度為可調,且各致動器分別 與該控制裝置(50)連接,受該控制装置(5〇)驅動,進而調 整攝影機和/或LED燈具(31)相對於輸送帶(1〇)的角度。 本發明之自動調整照明強度的基材檢測方法’其係包 括: 提供上述自動調整照明強度的基材檢測裝置; 啟動該輸送帶(10)以運送基材(2〇);The feeding belt (10), the lighting device (30) and the image capturing device (4〇) are connected to respectively control the LED lamp (31) and the adjusting unit (32) of the lighting device (30) = the image capturing device (40) Operation 'The control device (5〇) receives the linear image data taken by the camera (4) of the capture device (10), processes the image, and determines the quality of the substrate (2Q). The linear image of the single capture of the CcD in the image capture device (40) is only a small linear image of the substrate (20)... "" Therefore, the processing speed of the collected analysis and judgment program is set (5Q) to determine the quality of the substrate (20) quality detection; U breaking speed, promotion 7 201003352: the support frame (60), please also refer to The three figures are fixed on both sides of the conveyor belt (10) for fixing the image capturing device (4〇) and the lighting device (3〇) to the upper and lower positions of the conveyor belt (1〇). The camera and the lighting device (3〇) of the 4'5V image capturing device (40) are dragged and supported by the frame connecting component () (6〇), an actuator (not shown) is disposed between the support frame (6〇) and each pivoting member (8), and is controlled by controlling the pivoting member (61) to further The angle of the camera or (4) lamp (31) in the image capturing device (4) relative to the conveyor belt (10) is adjustable, and each actuator is respectively connected to the control device (50), and is controlled by the control device (5〇) Drive to adjust the angle of the camera and/or LED luminaire (31) relative to the conveyor belt (1 〇). The substrate detecting method for automatically adjusting the illumination intensity of the present invention includes: providing the substrate detecting device for automatically adjusting the illumination intensity; and starting the conveyor belt (10) to transport the substrate (2〇);

當基材(2Q)厚度提高時,則提高該照明設備(3G)之LED 燈具(31)的照明強冑,#基材㈣厚度降低時,則降低該 照明設備_之LED燈具(31)的照明強度,並讓該影像操 取設備(40)操取基材(20)表面的影像,並將此影像回傳至 該控制裝置(50)。 當本發明之自動冑整照明強纟的基材檢測裝置使用 時,藉由控制裝置(50)啟動輸送帶(1〇)以運送基材(2〇),同 時亦啟動照明設備(30)令的LED燈具(31)和影像搁取裝置 (40)之攝影機’以將光線照射至該基材(2〇),並讓攝影機 擷取該基材(2G)表面的線性影像,並將該線性影像資料回 8 201003352 傳至控制裝置(50),以進行影像分析判斷。 當所欲檢測之基材(20)的厚薄不一時,則該控制裝置 (50)即可藉由控制照明设備(3〇)中的調整單元(32)來調整 LED燈具(31)的度’當基材(2Q)較厚時,則將[叩燈具(川 的照明強度提高,而當基材(2Q)較薄時’則將led燈具(3,) 的照明強度減弱,目此,各可避免以人工方式調整攝影機 的光圈’ 1無須重新設定該控㈣置(5()),故本發明能加 快並自動化基材(2 〇)的檢測流程。 【圖式簡單說明】 第一圊係本發明之側視示意圖。 第二圖係本發明之立體示意圖。 第二圖係本發明之系統示意圖。When the thickness of the substrate (2Q) is increased, the illumination of the LED device (31) of the lighting device (3G) is increased, and when the thickness of the substrate (4) is lowered, the LED device (31) of the lighting device is lowered. Illumination intensity, and the image manipulation device (40) takes an image of the surface of the substrate (20) and transmits the image back to the control device (50). When the substrate detecting device of the automatic tidying illumination of the present invention is used, the conveyor belt (1 〇) is activated by the control device (50) to transport the substrate (2 〇), and the lighting device (30) is also activated. LED luminaire (31) and image capture device (40) camera 'to illuminate the substrate (2 〇) and let the camera capture a linear image of the surface of the substrate (2G) and linearize The image data is returned to the control device (50) at 8 201003352 for image analysis and judgment. When the thickness of the substrate (20) to be inspected is different, the control device (50) can adjust the degree of the LED lamp (31) by controlling the adjusting unit (32) in the lighting device (3). 'When the substrate (2Q) is thicker, the [叩 luminaire (the illumination intensity of Sichuan is improved, and when the substrate (2Q) is thinner], the illumination intensity of the led luminaire (3,) is weakened, Each can avoid manually adjusting the aperture of the camera' 1 without resetting the control (4) (5 ()), so the invention can speed up and automate the detection process of the substrate (2 〇). BRIEF DESCRIPTION OF THE DRAWINGS The second drawing is a schematic view of the present invention. The second drawing is a schematic view of the system of the present invention.

【主要元件符號說明】 (1 〇)輸送帶 (30)照明設備 (32)調整單元 (41)鏡頭 (6〇)支撐架 (20)基材 (31) LED 燈具 (40)影像擷取裝置 (50)控制裝置 (61)樞接元件 9[Main component symbol description] (1 〇) Conveyor belt (30) Lighting equipment (32) Adjustment unit (41) Lens (6 〇) Support frame (20) Substrate (31) LED luminaire (40) Image capture device ( 50) Control device (61) pivoting component 9

Claims (1)

201003352 申請專利範圍: '種自動調整照明強度的基材檢測裝置,其係包 括: 至少-輪送帶,係用於輸送基板; 至少二組照明設備,係分別設置在該輸送帶的上、下 方’且各具有一自動調整照明強度的調整單元; 至夕一組影像擷取裝置,係對於該照明設備而分別設 置在輸送帶的上、下方,以擷取基材之影像; 、一控制裝置’其係至少與該照明設備與該影像擷取裝 、接以控制该照明設備之調整單元,並接收影像擷取 裝置所得之影像。 如申印專利範圍第1項所述之自動調整照明強度 '材松測裝置,其中該輸送帶係具有可透光性。 如申喷專利範圍第2項所述之自動調整照明強度 的基材檢測裳置,其中各組照明設備設有- LED燈具,且 該調整單元係與該LED燈具連接。 2 請專利範圍第3項所述之自動調整照明強度 2材檢測裝置’其中該LED燈具為錢供電的長型[ED 燈具。 5 .如申請專利範圍第i至4 坰敕。口〜 ^ 項所迷之自動 々'月強度的基材檢測裝置,1中久相Ρ 一且古# ul 八中各,、且衫像擷取裝置係 具有線性電荷藕合元件的攝 宗氺®丄 』僻办機,且該攝影機具有一固 疋先圈大小的鏡頭。 6 .如申請專利範圍第i至4 t 4只Tit 項所述之自動 10 201003352 調2妝明強度的基材檢測裝置,其尚具有一支撐架,其係 固疋於讀送帶的兩側,用以將該影像類取裝置以及照明 裝置固疋在輸送帶的上、下方位置。 7 ·如申請專利範圍第6項所述之自動調整照明強度 的基材檢測裝置’纟中該支擇架具有複數個樞接元件,以 將該影像操取裝置及照明設備樞接以在支撺架上,並於 :支撐*與各樞接①件間設置有—與控制裝置連接的致動 器,以令該影像榻取裝置與照明設備相對於輸送帶的角度 X如中請專利範圍第5項所述之自動調整照明強度 ㈣兩尚具有—支撐架’其係、固定於該輸送 -的兩側,用以將該攝影機以及照明設備固 上、下方位置。 τ J 9.如申請專利範圍第8項所述之 的基材檢測裝置,…支撐架具有複數個拖接 將該攝影機及照明設備樞接固定在支㈣i,並於 架與各樞接元件間設置有_與控制裝置連接的致動^,以 令該攝影機與照明設備相對於輸送帶的角度為可調厂 包括:〇 _ 一種自動調整照明強度的基材檢測方法,其係 μ 一 w达帶運送基材; 提供-連接且控制一照明設備和一影 制裝置,並調整該照明設備的照明強破置的控 置操取基㈣爾,墙f彡㈣裝 201003352 1 1 ·如申請專利範圍第1 0項所述之自動調整照明 強度的基材檢測方法,其中該照明設備係包括LED燈具, 且當基材厚度提高時,則提高該照明設備之LED燈具的照 明強度,當基材厚度降低時,則降低該照明設備之LED燈 具的照明強度。 Ί•一、圖式: 如次頁 12201003352 Patent application scope: 'A substrate detecting device for automatically adjusting the intensity of illumination, comprising: at least - a belt for conveying a substrate; at least two groups of lighting devices respectively disposed above and below the conveyor belt 'Equipped with an adjustment unit for automatically adjusting the illumination intensity; a group of image capturing devices for the illumination device are respectively disposed above and below the conveyor belt to capture an image of the substrate; and a control device 'At least with the lighting device and the image capturing device, the adjusting unit for controlling the lighting device, and receiving the image obtained by the image capturing device. The automatic adjustment of the illumination intensity as described in the first paragraph of the patent application scope, wherein the conveyor belt is permeable to light. For example, the substrate for detecting the intensity of the illumination automatically adjusted according to the second item of the patent application scope, wherein each group of lighting devices is provided with an LED lamp, and the adjusting unit is connected with the LED lamp. 2 Please adjust the illumination intensity as described in item 3 of the patent range. 2 Material detection device' The LED lamp is a long type [ED lamp for power supply. 5. If you apply for patent scopes i to 4 坰敕. The mouth-to-^ item is automatically 々 'month-strength substrate detection device, 1 long-term Ρ 且 古 古 古 古 古 Ρ Ρ Ρ Ρ Ρ 、 、 、 、 、 、 、 、 、 、 、 、 衫 衫 衫 衫 衫 衫 衫 衫 衫 衫 衫 衫 衫 衫 衫® 丄 僻 僻 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , 6. As claimed in the patent scopes i to 4 t 4 of the Tit item, the automatic 10 201003352 2 makeup strength substrate detecting device still has a support frame which is fixed to both sides of the reading belt. The image sorting device and the lighting device are fixed on the upper and lower positions of the conveyor belt. 7. The substrate detecting device for automatically adjusting the illumination intensity as described in claim 6 of the patent application, wherein the support frame has a plurality of pivoting members for pivoting the image capturing device and the lighting device to support On the truss, and between: the support * and each of the pivotal members are provided with an actuator connected to the control device to make the image of the image pickup device and the illumination device relative to the conveyor belt X. The automatic adjustment of the illumination intensity (4) described in item 5 has a support frame that is attached to both sides of the transport to fix the camera and the illumination device to the lower position. τ J 9. The substrate detecting device according to claim 8, wherein the support frame has a plurality of hooks for pivotally fixing the camera and the lighting device to the branch (four) i, and between the frame and each pivoting member The actuator is provided with _ connected to the control device, so that the angle of the camera and the illumination device relative to the conveyor belt is adjustable: 〇_ A substrate detection method for automatically adjusting the illumination intensity, which is a μ With a transporting substrate; providing-connecting and controlling a lighting device and a shadowing device, and adjusting the lighting device of the lighting device to have a strong controllable operation base (four), wall f彡 (four) loaded 201003352 1 1 · as claimed The substrate detecting method for automatically adjusting the illumination intensity according to the item 10, wherein the lighting device comprises an LED lamp, and when the thickness of the substrate is increased, the illumination intensity of the LED lamp of the lighting device is improved, when the substrate is When the thickness is reduced, the illumination intensity of the LED fixture of the lighting device is reduced. Ί•1, Schema: as the next page 12
TW97125490A 2008-07-07 2008-07-07 Substrate-check equipment and checking method TWI381257B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI383844B (en) * 2010-12-30 2013-02-01 Univ Nat Chunghsing Quality inspection system of leaf quality

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
TWI281540B (en) * 2005-10-21 2007-05-21 Jye Jiang Technology Co Ltd Inspection system and method for conveying substrates
JP2007248291A (en) * 2006-03-16 2007-09-27 Olympus Corp Substrate inspecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI383844B (en) * 2010-12-30 2013-02-01 Univ Nat Chunghsing Quality inspection system of leaf quality

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