JP2008309503A - Optical drive mechanism and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical drive mechanism capable of enhancing the reproducibility of an inspection condition value when an inspection target is inspected. <P>SOLUTION: The optical drive mechanism has an internal gear 10 having the timing belt 10a, which makes a straight line or a point on the surface of the inspection target 1 serve as a radial center, as inner teeth, the timing pulley 9 rotated while fitted to the inner teeth of the internal gear 10, a first motor 8a for rotating the timing pulley 9 and the inspection part revolved centering around a straight line or a point by accompanying the rotation of the timing pulley 9 to inspect the inspection target 1. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical system drive mechanism and an inspection apparatus for inspecting an object to be inspected.

  For example, Patent Document 1 discloses an optical surface inspection apparatus that inspects the surface of an object using a CCD camera or the like. The optical surface inspection apparatus described in Patent Document 1 has a line-shaped light guide that irradiates light on an object (substrate), images the substrate irradiated with light, and the surface of the substrate based on the captured image Perform the inspection. Here, FIG. 6 shows a perspective view of the optical surface inspection apparatus 90 described in Patent Document 1, and the configuration thereof will be described.

As shown in FIG. 6, a substrate (not shown) to be inspected is placed on the work table 91. A stand 92 is supported perpendicular to the work table 91. The stand 92 supports a camera 93 that images the substrate. A line-shaped light guide 96 is supported by a support arm 95 that rotates around a bearing 94 at the lower end of the stand 92. The support arm 95 is provided with a screw stopper 98 at the end of the support arm 95 opposite to the bearing 94. The stand 92 supports a fixed plate 97 having an arcuate guide groove 97a in which the support arm 95 is slid. That is, the support arm 95 is slid along the arcuate guide groove 97a formed in the fixing plate 97, and is fixed by the screw stopper 98 at a desired position. By fixing the support arm 95 at a desired position, the angle of light emitted from the line-shaped light guide 96 provided on the support arm 95 is adjusted.
JP-A-11-295235

  However, since the substrate to be inspected changes the light irradiation position for each substrate, it is necessary to adjust the position of the support arm 95 for each substrate. As described above, in the optical surface inspection apparatus 90 described in Patent Document 1, the position of the support arm 95 is adjusted by the screw stopper 98. Since the position of the support arm 95 is adjusted by the screw stopper 98, when inspecting a substrate of the same type as the substrate once inspected, the support arm set when inspecting the same type of substrate is inspected. It is difficult to adjust the position of the support arm again to the same position as the position. For this reason, there is a problem that the reproducibility of the inspection condition values such as the light irradiation angle and the light irradiation intensity when imaging the substrate is reduced.

  The present invention has been made to solve such problems, and provides an optical system driving mechanism and an inspection apparatus capable of improving the reproducibility of inspection condition values when inspecting an inspection object. For the purpose.

  In order to solve the above-described problems, an optical system driving mechanism according to the present invention includes an internal gear having a timing belt having a radius centered on a straight line or a point on the surface of the inspection object, and an internal gear of the internal gear. A timing pulley that rotates while being engaged with a tooth, a first motor that rotates the timing pulley, and the rotation of the timing pulley rotates about the straight line or the point to inspect the inspection object. And an inspection unit.

  The optical system driving mechanism and the inspection apparatus according to the present invention can improve the reproducibility of the inspection condition value when inspecting the inspection object.

Embodiment 1 FIG.
Hereinafter, specific embodiments to which the present invention is applied will be described in detail with reference to the drawings. In this embodiment, the present invention is applied to an optical system drive mechanism (hereinafter referred to as a drive mechanism) that performs inspection by imaging an inspection object with a camera. A drive mechanism 50 according to the present embodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is a perspective view of the drive mechanism according to the present embodiment. FIG. 2 shows a front view of the drive mechanism shown in FIG. FIG. 3 shows a side view of the drive mechanism shown in FIG.

  The drive mechanism 50 includes an inspection unit that inspects the inspection object 1. In the present embodiment, for example, the inspection unit is a camera that images the inspection object 1. When inspecting the inspection object 1, the inspection conditions such as the imaging angle and the distance between the camera and the inspection object 1 are different for each inspection object 1. For this reason, the drive mechanism 50 adjusts the position of the inspection unit with respect to the inspection object 1 for each inspection object 1.

  Hereinafter, the configuration of the drive mechanism 50 according to the present embodiment will be described in detail. As shown in FIG. 1, the drive mechanism 50 according to the present embodiment has, on the surface of the inspection object 1, for example, a straight line in a direction orthogonal to the direction in which the inspection object 1 is conveyed as a reference axis. A.

  On the extension line of the reference axis A, an arm 3 is provided via a bearing 2 serving as a support rotation axis for rotating the drive mechanism 50. The arm 3 is provided so as to rotate about the reference axis A as a radius center. An optical support arm 5 is fixed to the arm 3 in parallel with the reference axis A from the arm 3. The optical support arm 5 is provided with a camera 4 that images the inspection object 1 at a position substantially opposite to the inspection object 1. For example, the inspection object 1 is imaged from below the inspection object 1. Further, in the present embodiment, the camera 4 is provided as the inspection unit supported by the optical support arm 5. However, for example, a light source that irradiates the inspection object 1 with light may be formed. In this case, the camera 4 that images the inspection object 1 is provided in a fixed manner other than on the drive mechanism 50, for example.

  In addition, a motor mounting plate 6 that supports the first motor 8a is provided on the side of the arm 3 opposite to the side on which the bearing 2 is formed. A first motor 8 a having a first encoder 7 a is provided on one side surface of the motor mounting plate 6. And the timing pulley 9 which is a toothed pulley is provided in the surface on the opposite side to the side in which the 1st motor 8a of the motor attachment board 6 is provided. Further, a timing belt 10a centering on the reference axis A is provided. The timing belt 10a is affixed on an R guide 10b which is an arcuate guide rail provided along a circle having a reference axis A as a radius center. And the internal gear 10 is comprised by the timing belt 10a and the R guide 10b by using the timing belt 10a as an internal tooth.

  The first encoder 7a described above is a sensor that detects the position of the camera 4 serving as an inspection unit. The driving of the first motor 8a is controlled based on the position of the camera 4 detected by the first encoder 7a. At this time, the timing pulley 9 rotates in accordance with the driving of the first motor 8a, and the teeth of the timing pulley 9 and the internal teeth of the timing belt 10a attached to the R guide 10b mesh with each other. As the timing pulley 9 meshes with the timing belt 10a and rotates, the arm 3 rotates about the reference axis A. The camera 4 on the optical support arm 5 provided on the arm 3 rotates about the reference axis A in accordance with the rotation of the arm 3. Thereby, the imaging angle θ of the camera 4 when imaging the inspection object 1 is adjusted (see θ in FIG. 2). From the above, the arm 3 is rotated by driving the first motor 8a. Accordingly, the camera 4 on the optical support arm 5 fixed to the arm 3 rotates together with the arm 3, and the imaging angle of the camera 4 can be adjusted. Thereby, for example, when the same type of inspection object 1 is periodically inspected, the imaging angle can be accurately adjusted when the once adjusted imaging angle is adjusted again. That is, the reproducibility of the imaging angle can be improved.

  Here, the configuration in the vicinity of the timing pulley 9 will be described in detail with reference to FIGS. 2 and 3. As shown in FIGS. 2 and 3, the arm 3 is provided with a first guide. In the present embodiment, for example, a linear ball bush 11 is provided as the first guide. A spring 12 is provided at the upper end of the motor mounting plate 6. When the spring 12 expands and contracts, the timing pulley 9 provided on the motor mounting plate 6 is pressed against the internal gear 10. At this time, the linear ball bush 11 guides the expansion / contraction direction of the spring 12 in parallel with a straight line connecting the reference axis A and the timing pulley 9 axis. That is, the linear ball bushing 11 guides the expansion / contraction direction of the spring 12 along the arm 3. Thereby, the precision of the meshing of the teeth of the timing pulley 9 and the internal teeth of the timing belt 10a of the internal gear 10 can be improved. Further, an internal gear 10 having a bearing 2 formed at one end of the arm 3 and a timing belt 10 a meshing with a timing pulley 9 provided at the other end of the arm 3 is fixed to the side plate 13. And the cam follower 14 is provided in the other side of the side plate 13 on both sides of the internal gear 10 (refer FIG. 3). The cam follower 14 can suppress the shake in the direction perpendicular to the rotation direction of the drive mechanism 50 having the reference axis A as the central axis.

  Further, the configuration in the vicinity of the optical support arm 5 on which the camera 4 is supported will be described in detail with reference to FIG. As shown in FIG. 3, the arm 3 is provided with a second guide which is a slide mechanism. In the present embodiment, for example, an LM guide (linear motion guide) 15 is provided as the second guide. The LM guide 15 is provided with an optical support arm 5. The LM guide 15 is provided with a ball screw 16, a second motor 8b, and a second encoder 7b. The second encoder 7b detects the position of the camera 4, and the second motor 8b is driven based on the detected position of the camera 4. When the second motor 8b is driven, the ball screw 16 is closed or loosened. Thereby, the camera 4 moves up and down along the LM guide 15 provided on the arm 3, and the focal length B between the inspection object 1 and the camera 4 is adjusted. That is, by driving the second motor 8b, the imaging distance between the camera 4 and the inspection object 1 can be adjusted, and the reproducibility of the imaging distance can be improved.

  In the present embodiment, the first motor 8a is driven based on the position of the camera 4 detected by the first encoder 7a. Then, the arm 3 is rotated by rotating the timing pulley 9 in accordance with the driving of the first motor 8a. Accordingly, the camera 4 on the optical support arm 5 fixed to the arm 3 rotates, and the imaging angle θ of the camera 4 can be adjusted around the reference axis A. As a result, when the imaging angle is changed for each inspection object 1 and the inspection object 1 of the same type is periodically inspected, the once adjusted imaging angle θ of the camera 4 is adjusted again with high accuracy. can do. Further, the distance between the camera 4 and the inspection object 1 can be adjusted by driving the second motor 8b. For this reason, it is possible to improve the reproducibility of the inspection condition values such as the imaging angle different for each inspection object 1 and the distance between the inspection object 1 and the camera 4. Here, the camera 4 is provided on the optical support arm 5 of the drive mechanism 50. For example, the camera 4 is fixedly provided on the optical support arm 5 other than on the drive mechanism 50, and light is applied to the inspection object 1 on the optical support arm 5. A light source for irradiation may be provided. When the optical support arm 5 is provided with a light source, the incident angle of the light applied to the inspection object 1 can be controlled by driving the first motor 8a of the drive mechanism 50. In addition, the distance between the inspection object 1 and the light source can be controlled by driving the second motor 8b. Thereby, the irradiation intensity | strength of the light irradiated to the test object 1 is controllable. Further, in the present embodiment, in the plane of the inspection object 1, a straight line in a direction orthogonal to the direction in which the inspection object 1 is transported is the reference axis A, and the reference axis A is the center of the radius. Although the internal gear 10 having the belt 10a as the internal teeth is provided, the internal gear 10 having the timing belt 10a as the internal teeth may be provided with one point on the surface of the inspection object 1 as the radial center.

  Here, an optical system inspection apparatus having a plurality of the drive mechanisms described above will be described. FIG. 4 shows a diagram of an inspection apparatus 60 having a plurality of drive mechanisms. 5 shows a side view of the inspection apparatus 60 shown in FIG.

  As shown in FIGS. 4 and 5, the inspection device 60 includes a drive mechanism 51 having a plurality of cameras 4, for example, and a drive mechanism 52 having a light source 17 such as a line light guide. The light source 17 of the drive mechanism 52 is connected to a light source device 17 a that supplies power to the light source 17. Then, the first motor 8a is driven according to the position of the drive mechanism detected by the first encoder 7a, and the drive mechanisms 51 and 52 rotate along the internal gear 10 attached to the side plate 13, respectively. To do. Thereby, the imaging angle of the camera 4 can be controlled. Moreover, the irradiation angle of the light source 17 can be controlled. Although not shown here, the second motor 8b is driven according to the position of the camera 4 detected by the second encoder 7b of the drive mechanism 51. Thereby, the distance between the camera 4 and the inspection object 1 can be controlled. Further, the second motor 8b is driven according to the position of the light source 17 detected by the second encoder 7b of the drive mechanism 52. Thereby, the distance between the light source 17 and the inspection object 1 is controlled. Thereby, the irradiation intensity | strength of the light irradiated to the test object 1 is controllable.

  And the conveyor 18 which conveys the test target object 1 to the plane containing the reference axis A of the drive mechanisms 51 and 52 is provided. The conveyor 18 is composed of, for example, a conveyance roller unit. The conveyor 18 is formed so as to convey the inspection object 1 in a direction parallel to the rotation direction of the drive mechanisms 51 and 52. Further, the conveyor 18 is not formed with a conveyance roller portion on the reference axis A. Thereby, the inspection object 1 that passes through the reference axis A is irradiated with light from the lower side of the conveyor 18, and the reflected light that reflects the inspection object 1 is imaged from the lower side of the conveyor 18. That is, the reference axis A becomes an inspection point of the inspection device 60. The drive mechanism 51 having the camera 4 is connected to an image processing device 19 such as a computer. Then, the image processing device 19 (shown only in FIG. 4) performs image processing of the captured image captured by the camera 4 or the like, and inspects the surface of the inspection object 1 for scratches and adhesion of foreign matter. Here, the image processing device 19 is placed on a gantry 20 formed on the side plate 13 to which the drive mechanisms 51 and 52 are attached, for example.

  Further, depending on the inspection object 1 to be inspected, the transmitted light that passes through the inspection object 1 may be imaged. In this case, the fluorescent lamp 21 is formed at a position where the inspection object 1 is irradiated with light from above the inspection object 1 passing through the inspection point. Thereby, the transmitted light of the light irradiated onto the inspection object 1 from above the inspection object 1 passing through the inspection point can be imaged by the camera 4 or the like provided in the drive mechanism 51.

  The inspection apparatus 60 shown in FIGS. 4 and 5 includes a drive mechanism 51 having an imaging unit such as the camera 4 and a drive mechanism 52 having a light source 17. The drive mechanism 51 having the camera 4 and the like can rotate around the reference axis A and control the imaging angle of the camera 4 by driving the first motor 8a. In addition, the distance between the camera 4 and the inspection object 1 can be controlled by driving the second motor 8b. Thereby, the reproducibility of inspection condition values, such as the imaging angle which changes for every test object 1, and the distance of the test object 1 and the camera 4, can be improved. Then, the drive mechanism 52 having the light source 17 can rotate around the reference axis A by driving the first motor 8a, and can control the irradiation angle of the light source 17. Further, by driving the second motor 8b, it is possible to control the irradiation intensity of the light irradiated to the inspection object 1. Thereby, the reproducibility of inspection condition values, such as the irradiation angle and irradiation intensity of light which differ for every test object 1, can be improved. Further, since the inspection apparatus 60 includes the drive mechanism 51 having the camera 4 and the drive mechanism 52 having the light source 17, the inspection condition value of the camera 4 and the inspection condition value of the light source 17 can be controlled independently. . For this reason, a fine inspection condition value can be set for each inspection object 1.

  It should be noted that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention.

It is a perspective view which shows the drive mechanism concerning this Embodiment. It is a front view of the drive mechanism shown in FIG. It is a side view of the drive mechanism shown in FIG. It is a figure which shows the optical system inspection apparatus which has a drive mechanism concerning this Embodiment. It is a side view of the optical system inspection apparatus shown in FIG. It is a perspective view which shows the conventional optical surface inspection apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Inspection object, 2 Bearing, 3 Arm, 4, 93 Camera, 5 Optical support arm, 6 Motor mounting plate, 7a 1st encoder, 7b 2nd encoder, 8a 1st motor, 8b 2nd motor, 9 Timing pulley, 10 Internal gear, 10a Timing belt, 10b R guide, 11 Linear ball bushing, 12 Screw, 13 Side plate, 14 Cam follower, 15 LM guide, 16 Ball screw, 17 Light source, 17a Light source device, 18 Conveyor, 19 Image Processing device, 20 frame, 50, 51, 52 Optical system drive mechanism, 60 inspection device, 90 optical surface inspection device, 91 work table, 92 stand, 94 bearing, 95 support arm, 96 line light guide, 97 fixing plate 97a Guide groove, 98 Stopper with screw

Claims (7)

An internal gear having a timing belt centered on a straight line or a point on the surface of the inspection object and having the timing belt as an internal tooth;
A timing pulley that rotates while fitting with the internal teeth of the internal gear;
A first motor for rotating the timing pulley;
An optical system drive mechanism that includes an inspection unit that inspects the inspection object by rotating about the straight line or the one point as the timing pulley rotates. The optical system drive mechanism according to claim 1, further comprising: a spring that presses the timing pulley against the internal gear; and a first guide that guides an expansion / contraction direction of the spring. The optical system driving mechanism according to claim 1, further comprising a guide rail to which the timing belt is attached. An arm that supports the timing pulley;
A second guide provided on the arm for sliding the inspection portion toward the inspection object;
The optical system drive mechanism according to claim 1, further comprising: a second motor that moves the inspection unit along the second guide. The optical system driving mechanism according to any one of claims 1 to 4, wherein the inspection unit is an imaging unit that images the inspection object. The optical system driving mechanism according to any one of claims 1 to 4, wherein the inspection unit is a light source that irradiates light to the inspection object. One or more optical system drive mechanisms are provided,
The optical system drive mechanism is
An internal gear having a timing belt centered on a straight line or a point on the surface of the inspection object and having the timing belt as an internal tooth;
A timing pulley that rotates while fitting with the internal teeth of the internal gear;
A first motor for rotating the timing pulley;
An inspection apparatus including an inspection unit that rotates about the straight line or the one point as the timing pulley rotates and inspects the inspection object.

Images